CN107914295A - A kind of vacuum glove box and for quantum chamber anode linkage method - Google Patents
A kind of vacuum glove box and for quantum chamber anode linkage method Download PDFInfo
- Publication number
- CN107914295A CN107914295A CN201711434306.8A CN201711434306A CN107914295A CN 107914295 A CN107914295 A CN 107914295A CN 201711434306 A CN201711434306 A CN 201711434306A CN 107914295 A CN107914295 A CN 107914295A
- Authority
- CN
- China
- Prior art keywords
- babinet
- glove box
- storehouse
- vacuum
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/02—Glove-boxes, i.e. chambers in which manipulations are performed by the human hands in gloves built into the chamber walls; Gloves therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
Abstract
The present invention provides a kind of method of vacuum glove box and quantum chamber anode linkage, including vacuum pump, further includes：First babinet；The second babinet corresponding with first babinet；Connect the First Transition storehouse of first babinet and the second babinet；And the second transitional storehouse for being fixed on second babinet and being connected with the second babinet；The First Transition storehouse and the both ends of the second transitional storehouse set valve respectively, and the vacuum pump is connected on each cavity volume that valve separates, and the valve is opened successively makes the product of making transport and make in a vacuum.The present invention provides a kind of vacuum glove box and the method for quantum chamber anode linkage, has the effect that：Realize being effectively isolated for being environmentally isolated of two babinets, the second babinet and outside air；Avoid silicon chip, sheet glass and reactive material to be polluted be subject to dust and water oxygen, ensure that the Anodic bonding strength of quantum chamber and the purity of reactive material.
Description
Technical field
The present invention relates to chip atomic clock field.More particularly, to a kind of vacuum glove box and for quantum chamber anode
The method of bonding.
Background technology
Chip atomic clock is a kind of chronometer time metrical instrument, be widely used in positioning, navigate, communicate, military affairs etc. it is multiple
Field.The realization of chip atomic clock function, depends on its internal physical system.The physical system of chip atomic clock is ground
Difficult point processed is the anode linkage technique of quantum chamber.
For the anode linkage technique of existing quantum chamber, silicon chip, sheet glass and reactive material are required for not
Transmitted between same equipment, it is difficult to eliminate the pollution of the dust and water oxygen component in air.Silicon chip, sheet glass and reactive material
After being contaminated, the bond strength of quantum chamber and the purity of reactive material can be seriously affected, the bonding for even resulting in quantum chamber is lost
Lose.
The content of the invention
At least one to solve the above problems, the present invention provides a kind of vacuum glove box, including vacuum pump, further includes：
First babinet；
The second babinet corresponding with first babinet；
Connect the First Transition storehouse of first babinet and the second babinet；And
The second transitional storehouse for being fixed on second babinet and being connected with the second babinet；
The First Transition storehouse and the both ends of the second transitional storehouse set valve respectively, what the vacuum pump connection valve separated
On each cavity volume, the valve is opened successively makes the product of making transport and make in a vacuum.
Preferably, second transitional storehouse is fixed on a side wall of second babinet away from first babinet.
Preferably, the vacuum pump is two, and correspondence is connected with the first babinet and the second babinet respectively.
Preferably, the glove box further includes purifier, the purifier be used for gas in filter box and
Absorb dust and water therein to form point, and produce cleaning nitrogen.
Preferably, bonder is set in first babinet, and the bonder is used for the cation key of silicon chip and sheet glass
Close.
The present invention also provides a kind of method for being used for quantum chamber anode linkage in vacuum glove box, including：
The valve of First Transition storehouse and the second transitional storehouse is opened, closing is all after making environment of the glove box full of cleaning nitrogen
Valve；
The second transitional storehouse and First Transition storehouse valve are started to open at from first end successively, silicon chip and sheet glass are put into bonding
Machine, carries out first layer anode linkage and forms the first si-glass piece；
First Transition storehouse and the second transitional storehouse valve are started to open at from second end successively, the first si-glass piece is transported to
Two babinets, and reactive material is uniformly instilled on it, drying；
The second transitional storehouse and First Transition storehouse valve are started to open at from first end successively, by the with drying reactive material
One si-glass piece is put into bonder, carries out second layer anode linkage and forms the second si-glass piece；
Bonder is opened, the second si-glass piece is cut, obtains the quantum chamber of chip atomic clock.
Beneficial effects of the present invention are as follows：
The present invention provides a kind of vacuum glove box and the method for quantum chamber anode linkage, has the effect that：
First, purifier is constantly in working status in anodic bonding process, and air in persistent loop babinet, absorbed
Dust and water oxygen component in air filtration body, ensure that the deflation of anode linkage equipment and the infiltration of outside air do not interfere with babinet
Ultra-high purity and ultralow water oxygen content nitrogen environment.
The second, the first babinet and the second babinet case are connected by First Transition storehouse, and the second babinet passes through the second mistake with extraneous
Cross storehouse to be connected, the purification of transitional storehouse is all carried out in each article transmittance process, realize being environmentally isolated of two babinets,
Two babinets and outside air are effectively isolated.
3rd, during whole anode linkage, ultra-high purity and ultralow water oxygen of all operations all in closing
Carried out in the nitrogen environment of content, avoid silicon chip, sheet glass and reactive material and polluted be subject to dust and water oxygen, be ensure that
The Anodic bonding strength of quantum chamber and the purity of reactive material.
Brief description of the drawings
The embodiment of the present invention is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 shows the vacuum glove box structure diagram in one embodiment of the present invention.
The method that Fig. 2 shows the quantum chamber anode linkage in one embodiment of the present invention.
Embodiment
In order to illustrate more clearly of the present invention, the present invention is done further with reference to preferred embodiments and drawings
It is bright.Similar component is indicated with identical reference numeral in attached drawing.It will be appreciated by those skilled in the art that institute is specific below
The content of description is illustrative and be not restrictive, and should not be limited the scope of the invention with this.
First end is defined as the right end in diagram, or is construed to one end that reactant enters vacuum glove box, second end
For the opposite other end of vacuum glove box.
The present invention provides a kind of vacuum glove box, including：First babinet 1；Second babinet corresponding with first babinet 1
8；
Connect the First Transition storehouse 3 of 1 and second babinet 8 of the first babinet；And it is fixed on second babinet 8 simultaneously
The second transitional storehouse 7 connected with the second babinet 8；The both ends of 3 and second transitional storehouse 7 of First Transition storehouse set valve respectively,
And setting vacuum pump connection, the vacuum pump is two on each cavity volume that valve separates, and is respectively 5 He of the first vacuum pump
Second vacuum pump 6, the valve is opened successively makes the product of making transport and make in a vacuum.
Vacuum pump connects all cavity volumes, and therefore, when opening first valve, gas enters in the second transitional storehouse 7, this
When by vacuum pump by 7 vacuum pumping of the second transitional storehouse, close first valve, open each valve successively so that even if its
Middle vacuum environment is destroyed, and can also be reduced as far as the influence caused by making product.
Alternatively, second transitional storehouse 7 is fixed on a side wall of second babinet 8 away from first babinet 1.
Alternatively, the vacuum pump is two, and correspondence is connected with the first babinet 1 and the second babinet 8 respectively.
The quantity increase of vacuum pump can allow each independent operating space to match a vacuum pump, when accelerating vacuum preparation
Between, and single space is mutually unaffected, but can also increase the consumption of electric energy and the acquisition cost of device.
Alternatively, the glove box further includes purifier 4, and the purifier 4 is used to filter the gas in glove box
And absorb dust therein and water is formed point, and produce cleaning nitrogen.
Purifier 4 can need to choose according to experiment, and glove box further comprises purifier 4 so that the vacuum glove
Case has wider array of applicability.
Alternatively, bonder 2 is set in first babinet 1, and the bonder 2 is used for the cation of silicon chip and sheet glass
Bonding.
When setting bonder 2 in the first babinet 1, which can be used in the system of chip quantum clock quantum chamber
Make, anode linkage is carried out in the first babinet 1.
Although this vacuum glove box is only enumerated in present embodiment can carry out cation bonding, art technology is bright
, the main body of this vacuum glove box is contemplated that offer needs to carry out making ring in two or more vacuum cavity volumes
Border, therefore various vacuum experiment operating environments can be suitable for, enable in particular to be applicable to two or more independences
The vacuum experiment in space, equally, can also be suitable for only operating using only the vacuum experiment of one of babinet, broadly
Say, additionally it is possible to which, suitable for antivacuum experimental implementation, the present invention repeats no more.
The present invention provides a kind of vacuum glove box and the method for quantum chamber anode linkage, has the effect that：
First, purifier 4 is constantly in working status in anodic bonding process, and air in persistent loop babinet, absorbs
The dust and water oxygen component in gas are filtered, the deflation of anode linkage equipment is ensure that and the infiltration of outside air does not interfere with the
The nitrogen environment of the ultra-high purity of two babinets and ultralow water oxygen content.
The second, the first babinet and the second babinet are connected by First Transition storehouse 3, and the second babinet passes through the second transitional storehouse with extraneous
7 are connected, and the purification of transitional storehouse is all carried out in each article transmittance process, realize being environmentally isolated of two babinets, second
Babinet and outside air are effectively isolated.
3rd, during whole anode linkage, ultra-high purity and ultralow water oxygen of all operations all in closing
Carried out in the nitrogen environment of content, avoid silicon chip, sheet glass and reactive material and polluted be subject to dust and water oxygen, be ensure that
The Anodic bonding strength of quantum chamber and the purity of reactive material.
In addition, in yet another embodiment of the present invention, the present invention also provides one kind in vacuum glove box quantum chamber
The method of anode linkage, including：
S1：The valve of First Transition storehouse and the second transitional storehouse is opened, is closed after making environment of the glove box full of cleaning nitrogen
All valves；
S2：The second transitional storehouse and First Transition storehouse valve are started to open at from first end successively, silicon chip and sheet glass are put into
Bonder, carries out first layer anode linkage and forms the first si-glass piece；
S3：First Transition storehouse and the second transitional storehouse valve are started to open at from second end successively, the first si-glass piece is transported to
Second babinet, and reactive material is uniformly instilled on it, drying；
S4：The second transitional storehouse and First Transition storehouse valve are started to open at from first end successively, there will be drying reactive material
The first si-glass piece be put into bonder, carry out second layer anode linkage and form the second si-glass piece；
S5：Bonder is opened, the second si-glass piece is cut, obtains the quantum chamber of chip atomic clock.
Obviously, the above embodiment of the present invention is only intended to clearly illustrate example of the present invention, and is not pair
The restriction of embodiments of the present invention, for those of ordinary skill in the field, may be used also on the basis of the above description
To make other variations or changes in different ways, all embodiments can not be exhaustive here, it is every to belong to this hair
Row of the obvious changes or variations that bright technical solution is extended out still in protection scope of the present invention.
Claims (6)
1. a kind of vacuum glove box, including vacuum pump, it is characterised in that including：
First babinet；
The second babinet corresponding with first babinet；
Connect the First Transition storehouse of first babinet and the second babinet；And
The second transitional storehouse for being fixed on second babinet and being connected with the second babinet；
The First Transition storehouse and the both ends of the second transitional storehouse set valve respectively, and set what vacuum pump connection valve separated
On each cavity volume, the valve is opened successively makes the product of making transport and make in a vacuum.
2. vacuum glove box according to claim 1, it is characterised in that second transitional storehouse fixes second babinet
On side wall away from first babinet.
3. vacuum glove box according to claim 1, it is characterised in that the vacuum pump is two, is corresponded to and first respectively
Babinet and the connection of the second babinet.
4. vacuum glove box according to claim 1, it is characterised in that the glove box further includes purifier, described net
Makeup is put forms point for filtering gas in glove box and absorbing dust and water therein, and produces cleaning nitrogen.
5. vacuum glove box according to claim 1, it is characterised in that
Bonder is set in first babinet, and the bonder is used for the cation bonding of silicon chip and sheet glass.
A kind of 6. method that quantum chamber anode linkage is carried out in vacuum glove box, it is characterised in that including：
The valve of First Transition storehouse and the second transitional storehouse is opened, all valves are closed after making environment of the glove box full of cleaning nitrogen
Door；
The second transitional storehouse and First Transition storehouse valve are started to open at from first end successively, silicon chip and sheet glass are put into bonder,
Carry out first layer anode linkage and form the first si-glass piece；
First Transition storehouse and the second transitional storehouse valve are started to open at from second end successively, the first si-glass piece is transported to the second case
Body, and reactive material is uniformly instilled on it, drying；
The second transitional storehouse and First Transition storehouse valve are started to open at from first end successively, by first with drying reactive material
Si-glass piece is put into bonder, carries out second layer anode linkage and forms the second si-glass piece；
Bonder is opened, the second si-glass piece is cut, obtains the quantum chamber of chip atomic clock.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711434306.8A CN107914295B (en) | 2017-12-26 | 2017-12-26 | Vacuum glove box and anodic bonding method for measuring cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711434306.8A CN107914295B (en) | 2017-12-26 | 2017-12-26 | Vacuum glove box and anodic bonding method for measuring cavity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107914295A true CN107914295A (en) | 2018-04-17 |
| CN107914295B CN107914295B (en) | 2020-05-15 |
Family
ID=61894376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711434306.8A Active CN107914295B (en) | 2017-12-26 | 2017-12-26 | Vacuum glove box and anodic bonding method for measuring cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107914295B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113325686A (en) * | 2021-04-22 | 2021-08-31 | 温州激光与光电子协同创新中心 | Micro atomic clock physical unit applying spherical air chamber and spherical air chamber |
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|---|---|---|---|---|
| WO2009148316A1 (en) * | 2008-06-05 | 2009-12-10 | Glovecube V.O.F. | Device and method for the provision of a space sealed substantially gas -tightly from the environment |
| CN102495545A (en) * | 2011-12-30 | 2012-06-13 | 东南大学 | Wafer-level on-chip integrated miniature atomic clock chip and preparation method for same |
| CN102515083A (en) * | 2011-12-30 | 2012-06-27 | 东南大学 | Miniature atom cavity with light incidence plane, miniature atomic clock chip and preparation methods |
| CN202474087U (en) * | 2011-11-30 | 2012-10-03 | 凯迈（江苏）机电有限公司 | Glove box for lithium battery sealing and injecting |
| CN104555905A (en) * | 2013-10-28 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Wafer level chip size atomic vapor chamber encapsulating method |
| CN105867178A (en) * | 2016-03-29 | 2016-08-17 | 威格气体纯化科技（苏州）股份有限公司 | System and method for controlling interlocking between glove box and transition cabin |
| CN205497536U (en) * | 2016-03-25 | 2016-08-24 | 威格气体纯化科技（苏州）股份有限公司 | Glove box and transition bin interfacing apparatus and glove box equipment |
-
2017
- 2017-12-26 CN CN201711434306.8A patent/CN107914295B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009148316A1 (en) * | 2008-06-05 | 2009-12-10 | Glovecube V.O.F. | Device and method for the provision of a space sealed substantially gas -tightly from the environment |
| CN202474087U (en) * | 2011-11-30 | 2012-10-03 | 凯迈（江苏）机电有限公司 | Glove box for lithium battery sealing and injecting |
| CN102495545A (en) * | 2011-12-30 | 2012-06-13 | 东南大学 | Wafer-level on-chip integrated miniature atomic clock chip and preparation method for same |
| CN102515083A (en) * | 2011-12-30 | 2012-06-27 | 东南大学 | Miniature atom cavity with light incidence plane, miniature atomic clock chip and preparation methods |
| CN104555905A (en) * | 2013-10-28 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Wafer level chip size atomic vapor chamber encapsulating method |
| CN205497536U (en) * | 2016-03-25 | 2016-08-24 | 威格气体纯化科技（苏州）股份有限公司 | Glove box and transition bin interfacing apparatus and glove box equipment |
| CN105867178A (en) * | 2016-03-29 | 2016-08-17 | 威格气体纯化科技（苏州）股份有限公司 | System and method for controlling interlocking between glove box and transition cabin |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113325686A (en) * | 2021-04-22 | 2021-08-31 | 温州激光与光电子协同创新中心 | Micro atomic clock physical unit applying spherical air chamber and spherical air chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107914295B (en) | 2020-05-15 |
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