CN107907050A - Ultrafast linear scan edge inspection system and method based on difference - Google Patents
Ultrafast linear scan edge inspection system and method based on difference Download PDFInfo
- Publication number
- CN107907050A CN107907050A CN201711383625.0A CN201711383625A CN107907050A CN 107907050 A CN107907050 A CN 107907050A CN 201711383625 A CN201711383625 A CN 201711383625A CN 107907050 A CN107907050 A CN 107907050A
- Authority
- CN
- China
- Prior art keywords
- way
- light
- pulse
- laser
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Abstract
The present invention relates to a kind of ultrafast linear scan edge inspection system and method using difference, the continuous ultrashort light pulse that femto-second laser produces is exported by optical circulator one end and exported, and is focused on successively by collimater, wave plate group, extender lens group, diffraction grating, focus lens group, the first object lens on sample product to be detected；The reflected beams of detected sample by reflectivity properties are returned along original route, and after the output of another port of optical circulator, it is divided into two-way by dispersion compensating fiber, erbium-doped fiber amplifier, coupler, pass through variable optical delay line all the way, another way passes through attenuator, is subtracted each other two ways of optical signals by balance photodetector, and be converted into electric signal output all the way, signal processing is carried out by digital processing unit, finally restores the marginal information of examined object.The present invention can record image information with ultrahigh speed imaging rate, and edge detection can be completed in imaging process, substantially increases the efficiency of edge detection.
Description
Technical field
It is especially a kind of using Differential Detection and the imaging system of edge detection the present invention relates to a kind of ultrafast imaging system
And method.
Background technology
The novel ultra-high-speed imaging technique used at present in ultrahigh speed imaging field mainly has：Holographic imaging technology, framing
Camera technique and the terrible imaging technique of calculating.Holographic imaging technology is mainly using zero phase-shift reference light and π phase shifts respectively with carrying
The light of object information interferes two width holograms of generation to recover the original light field of object.The figure of holographic imaging technology
As Bandwidth-Constrained, shooting amplitude are limited, it is difficult to high-resolution multiframe imaging is carried out, such as number of patent application 201210406054.9.
The figure that framing camera technology can be included each pulse of laser pulse train using the different reference light of multi beam delay
As information displays respectively, so as to fulfill frame imaging, but imaging resolution is difficult to improve by CCD dimension limitations, such as patent
Application number 201310296473.6.Calculate relevance imaging technology and make use of LED array as random speckle emission source, so as to improve
Imaging frame speed, but the resolution ratio being imaged can be also limited, such as number of patent application 201710115013.7.Ultrahigh speed imaging technique should
With extensive, especially differentiate in biomedical sector, including the classification of high throughput biological cell, medical pathologies type.In cell classification
And, it is necessary to which substantial amounts of cell is detected and is analyzed during the discriminating of medical pathologies type.Traditional flow cytometry
Instrument and microscopic analysis, high labor cost, detection efficiency is low, and the data volume of processing is huge.It is high using this linear scan frequency
This problem can be solved up to tens megahertzs of ultrafast imaging techniques.
Edge detecting technology is one of most common technology in Digital Image Processing, is widely used in many fields, example
Such as exploration of target identification, landforms, safety detection, cell screening.Traditional marginal technology needs to shoot target object,
The marginal information of object, such as number of patent application are extracted from shooting image using complicated software algorithm：200880125437.0.
Marginal information can not be directly acquired in imaging process, causes edge detection efficiency low.Therefore, it is badly in need of a kind of system and method
Solve the problems, such as high speed signal edge extraction.
The content of the invention
The technical problems to be solved by the invention are：A kind of ultrafast linear scan edge detection system based on difference is provided
System and method, it is intended to the detection efficiency of edge detecting technology is improved using ultrafast imaging technique.
To achieve the above object, the technical scheme is that：A kind of ultrafast linear scan edge detection using difference
System, including femto-second laser, optical circulator, dispersion compensating fiber, erbium-doped fiber amplifier, coupler, attenuator, tunable optical
Delay line, parallel detector, digital processing unit, collimater, wave plate group, extender lens group, diffraction grating, focus lens group,
First, two object lens, lens, speculum, the continuous ultrashort light pulse that the femto-second laser produces is exported defeated by optical circulator one end
Go out, focused on successively by collimater, wave plate group, extender lens group, diffraction grating, focus lens group, the first object lens to be detected
On sample product；The reflected beams of detected sample by reflectivity properties, or by the detected sample through property via the
Light beam in the light beam parallel radiation to speculum of two object lens and lens, returns along original route, and from optical circulator another
After the output of port, it is divided into two-way by dispersion compensating fiber, erbium-doped fiber amplifier, coupler, is postponed all the way by tunable optical
Line, another way pass through attenuator, are subtracted each other two ways of optical signals by balance photodetector, and are converted into electric signal output all the way,
Signal processing is carried out by digital processing unit, finally restores the marginal information of examined object.
The diffraction grating uses 600 lines/mm diffraction grating；The extender lens group 12 is by 60mm and 15mm focal length lenses
Composition；The continuous ultrashort light pulse that the femto-second laser produces is the short-pulse laser source of 180fs pulsewidths, and hot spot can exist
Dispersion is into 2.74 μm/nm in space.
A kind of detection method using the ultrafast linear scan edge inspection system based on difference, concretely comprises the following steps：
Step 1：Using diffraction grating, the ultrashort laser pulse that femto-second laser produces is unfolded in spectral domain so that different
The light of wavelength is mapped to the different spatial of detected sample, i.e. the spatial positional information of detected sample is encoded into light arteries and veins
In the spectrum of punching；
Step 2：The light pulse for carrying detected sample spatial positional information is opened up in time by dispersion compensating fiber
Open so that information MAP of the light pulse in spectral domain is into time domain, and finally, digital processing unit is handled signal in time domain
Restore the spatial positional information of detected sample；
Step 3：The two ways of optical signals being divided into by coupler, makes two ways of optical signals in the time using variable optical delay line 7
On stagger, by balanced detector to two ways of optical signals carry out Differential Detection, finally export electric signal all the way, be test sample to be checked
The marginal information of product.
The beneficial effects of the invention are as follows：The present invention can reach hundreds of megahertzs of imaging speed according to ultrashort pulse repetition rate
Rate, without electronic shutter device, the ultrafast imaging to dynamic object is realized using full light path；The edge proposed in the present invention
Detection method obtains marginal information without using complicated edge detection algorithm from artwork, is directly existed using difference detecting method
Physical layer obtains the marginal information of object；The difference detecting method that the present invention uses is realized simple.
Brief description of the drawings
Fig. 1 is embodiment of the present invention structure diagram.
Embodiment
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
As shown in Figure 1, a kind of ultrafast linear scan edge inspection system using difference, including femto-second laser 1, the ring of light
Row device 2, dispersion compensating fiber 3, erbium-doped fiber amplifier 4, coupler 5, attenuator 6, variable optical delay line 7, parallel detector
8th, mathematics processor 9, collimater 10, wave plate group (λ/2 and λ/4 phase delayer) 11, extender lens group 12, diffraction grating 13,
Focus lens group 14, first and second object lens 15,17, detected sample 16, lens 18, speculum 19.
Ultrashort laser pulse is produced by femto-second laser 1, the stringent energy for controlling pulse, prevents that energy is too big, to imaging
Result interfere；Light is inputted via the A mouths of optical circulator 2, enters collimater 10 from B mouthfuls of outputs；What collimater 10 exported
Ultrashort laser pulse, by the polarization state of wave plate group (λ/2 and λ/4 phase delayer) 11 adjustment light, by extender lens group
12 amplification hot spots, in order to improve spatial resolution；Ultrashort laser pulse is radiated at diffraction light after extender lens group
On the surface of grid 13, diffraction grating 13 dissipates the light of different wave length in ultrashort laser pulse in different directions, different ripples
Long diverging light focuses on different locus respectively by focus lens group 14.If detected sample is reflectivity properties
, light beam passes through the first object lens 15, realizes and is imaged over long distances, and apochromatism and the resolution ratio for improving imaging, are consequently focused on
In the different spatial of detected sample 16.Since the reflectivity of 16 diverse location glazing of detected sample has differences, no
The intensity of the light of co-wavelength is modulated respectively；If detected sample 16 is to pass through property, light beam passes through object lens 15, with reference to
Second object lens 17 are realized and are imaged over long distances, are focused in the different spatial on detected sample, the light intensity root of different wave length
Modulated respectively according to the transmitance difference on 16 diverse location of detected sample.It will become through the light beam of object lens 17 by lens 18
It is radiated at into directional light on speculum 19.Thus, the marginal information of detected sample 16 is recorded in the light of ultrashort laser pulse
In spectrum；The light beam for carrying object to be detected image information is returned along original route, B of the light beam by collimater 10 by optical circulator 2
Mouth input, from C mouthfuls of outputs；From optical circulator 2 C mouthfuls output light beam, ultrashort laser pulse via dispersion compensating fiber 3 when
Spread apart on domain, realize mapping of the spectral domain to time domain；Erbium-doped fiber amplifier 4 is passed through in light pulse, its luminous power will be exaggerated；
The light of amplification output passes through 50：50 coupler 5 is divided into two-way；Wherein all the way, light pulse passes through variable optical delay line 7
It will be exported after pulse delay signal, the energy with optical pulse can weaken accordingly；In another way, light pulse is by a decay
Device 6 will export after the energy dropoff of light pulse, to balance the energy between two-way light pulse；Two light pulse signals are again by flat
Weigh photodetector 8, and two optical pulse signals are subtracted each other while are converted into electric signal output all the way, and corresponding electric signal is led to
Cross digital processing unit 9 and carry out signal processing, finally restore the marginal information of examined object.
Optics in the present invention is intended using 600 lines/mm diffraction grating, the lens group of 60mm and 15mm focal lengths, 80fs
The short-pulse laser source of pulsewidth, can by hot spot in space dispersion into 2.74 μm/nm.Optics device of the present invention in common offer
Maximum parameter is taken in part to ensure current prestissimo and resolution imaging.
A kind of detection method using the ultrafast linear scan edge inspection system based on difference, concretely comprises the following steps：
Step 1：Using diffraction grating 13, the ultrashort laser pulse that femto-second laser 1 produces is unfolded in spectral domain so that
The light of different wave length is mapped to the different spatial of detected sample 16, i.e. the spatial positional information of detected sample 16 is compiled
Code is into the spectrum of light pulse；
Step 2：The light pulse for carrying 16 spatial positional information of detected sample passes through dispersion compensating fiber 3 in time
Expansion so that information MAP of the light pulse in spectral domain is into time domain, and finally, digital processing unit 9 carries out signal in time domain
Processing restores the spatial positional information of detected sample 16；
Step 3：The two ways of optical signals being divided into by coupler 5, using variable optical delay line 7 make two ways of optical signals when
Between on stagger, by balanced detector 8 to two ways of optical signals carry out Differential Detection, finally export electric signal all the way, it is as to be checked
The marginal information of sample.
Present invention employs difference method, and the light pulse signal for being loaded with image information is divided into two pulse signals.Two-way
Pulse signal is input to after attenuator and adjustable delay optical fiber cable in balance photodetector respectively, balances photodetector
Two pulse signals are subtracted each other to obtain pulse signal all the way, and are converted into electric signal output.The electric signal of output passes through at numeral
Reason device obtains the marginal information of detected sample.The program can be realized directly obtains object edge information in physical layer, meets
The high throughput of sample is quickly detected, effectively raises the efficiency of edge detection.Without relying on complicated algorithm from artwork
The marginal information of object is obtained, reduces data redundancy, reduces the burden of Back end data processing.Calculated with traditional edge detection
Method is compared, and this method algorithm is realized simple.
Claims (3)
1. a kind of ultrafast linear scan edge inspection system using difference, including femto-second laser (1), optical circulator (2), color
Dissipate compensated optical fiber (3), erbium-doped fiber amplifier (4), coupler (5), attenuator (6), variable optical delay line (7), parallel detection
Device (8), digital processing unit (9), collimater (10), wave plate group (11), extender lens group (12), diffraction grating (13), focusing are saturating
Microscope group (14), first and second object lens (15,17), lens (18), speculum (19), it is characterised in that：The femto-second laser (1)
Produce continuous ultrashort light pulse by optical circulator (2) one end export export, successively by collimater (10), wave plate group (11),
Extender lens group (12), diffraction grating (13), focus lens group (14), the first object lens (15) focus on sample product (16) to be detected
On；The reflected beams of detected sample (16) by reflectivity properties, or by through property detected sample (16) via
Light beam in the light beam parallel radiation of second object lens (17) and lens (18) to speculum (19), returns along original route, and from light
After another port output of circulator (2), by dispersion compensating fiber (3), erbium-doped fiber amplifier (4), coupler (5) point
Into two-way, attenuator is passed through by variable optical delay line (7), another way all the way, by balance photodetector by two ways of optical signals
Subtract each other, and be converted into electric signal output all the way, signal processing is carried out by digital processing unit (9), finally restores thing to be detected
The marginal information of body.
2. the ultrafast linear scan edge inspection system according to claim 1 using difference, it is characterised in that：It is described to spread out
Penetrate grating (13) and use 600 lines/mm diffraction grating；The extender lens group (12) is made of 60mm and 15mm focal length lenses；Institute
The continuous ultrashort light pulse for stating femto-second laser (1) generation is the short-pulse laser source of 180fs pulsewidths, can be by hot spot in space
Middle dispersion is into 2.74 μm/nm.
3. a kind of detection method of ultrafast linear scan edge inspection system based on difference using described in claim 1 or 2,
It is characterized in that, concretely comprise the following steps：
Step 1：Using diffraction grating (13), the ultrashort laser pulse that femto-second laser (1) produces is unfolded in spectral domain so that
The light of different wave length is mapped to the spatial positional information of the different spatial of detected sample (16), i.e. detected sample (16)
It is encoded into the spectrum of light pulse；
Step 2：The light pulse for carrying detected sample (16) spatial positional information passes through dispersion compensating fiber (3) in time
Expansion so that information MAP of the light pulse in spectral domain is into time domain, finally, digital processing unit (9) in time domain to signal into
Row processing restores the spatial positional information of detected sample (16)；
Step 3：The two ways of optical signals being divided into by coupler (5), using variable optical delay line (7) make two ways of optical signals when
Between on stagger, by balanced detector (8) to two ways of optical signals carry out Differential Detection, finally export electric signal all the way, as treat
Detect the marginal information of sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711383625.0A CN107907050A (en) | 2017-12-20 | 2017-12-20 | Ultrafast linear scan edge inspection system and method based on difference |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711383625.0A CN107907050A (en) | 2017-12-20 | 2017-12-20 | Ultrafast linear scan edge inspection system and method based on difference |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107907050A true CN107907050A (en) | 2018-04-13 |
Family
ID=61870475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711383625.0A Pending CN107907050A (en) | 2017-12-20 | 2017-12-20 | Ultrafast linear scan edge inspection system and method based on difference |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107907050A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112297422A (en) * | 2020-10-09 | 2021-02-02 | 南开大学 | One shot forming's 3D printing device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104990512A (en) * | 2015-07-20 | 2015-10-21 | 清华大学 | Transparent container bottle opening thread defect detection system and method |
| CN105823728A (en) * | 2015-12-17 | 2016-08-03 | 李朝晖 | Femtosecond laser high-speed digital microscopic imaging method and apparatus based on coherent receiver |
| CN106291581A (en) * | 2016-09-08 | 2017-01-04 | 上海理工大学 | Ultrafast imaging device based on Optical Time Division Multiplexing and method |
| CN106841117A (en) * | 2017-01-05 | 2017-06-13 | 上海理工大学 | Ultrafast imaging method based on difference detecting method and Run- Length Coding |
-
2017
- 2017-12-20 CN CN201711383625.0A patent/CN107907050A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104990512A (en) * | 2015-07-20 | 2015-10-21 | 清华大学 | Transparent container bottle opening thread defect detection system and method |
| CN105823728A (en) * | 2015-12-17 | 2016-08-03 | 李朝晖 | Femtosecond laser high-speed digital microscopic imaging method and apparatus based on coherent receiver |
| CN106291581A (en) * | 2016-09-08 | 2017-01-04 | 上海理工大学 | Ultrafast imaging device based on Optical Time Division Multiplexing and method |
| CN106841117A (en) * | 2017-01-05 | 2017-06-13 | 上海理工大学 | Ultrafast imaging method based on difference detecting method and Run- Length Coding |
Non-Patent Citations (2)
| Title |
|---|
| 戴博等: "Ultrafast cell edge detection by line-scan time-stretch microscopy", 《JOURNAL OF BIOPHOTONICS》 * |
| 殷松超等: ""基于光时分复用技术的高速成像系统"", 《强激光与粒子束》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112297422A (en) * | 2020-10-09 | 2021-02-02 | 南开大学 | One shot forming's 3D printing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5364203B2 (en) | Observation device | |
| CN111202499B (en) | Stimulated Raman scattering imaging system and method with rapid and efficient self-adaptive optical compensation | |
| CN105423943B (en) | High speed three-dimensional micro imaging system and method | |
| CN108332866B (en) | Wavefront on-line rapid reconstruction device and method based on amplitude modulation | |
| US8654441B2 (en) | Differential interference contrast serial time encoded amplified microscopy | |
| CN104458646B (en) | High-speed multi-width terahertz time-domain spectral imager | |
| CN105021627B (en) | The highly sensitive quick on-line water flushing method of optical thin film and element surface damage from laser | |
| US9574946B2 (en) | Spatiotemporally resolved far-field pulse contrast measuring method and device | |
| CN102692394B (en) | Two-dimensional imaging method and device based on thermal lens effect | |
| CN206095943U (en) | Two -photon fluorescence microscope system of structured light illumination | |
| CN107449738A (en) | A kind of dual-beam pump probe experimental system | |
| CN111141701A (en) | Rapid super-resolution imaging method and system based on terahertz single pulse | |
| CN107843560A (en) | High-spatial-resolution pumping-detection micro-area measuring device, system and method | |
| CN106574871A (en) | Device and method for characterization of light beam | |
| KR102082747B1 (en) | Focal-length adjustable 3D imaging device and method based LED array | |
| CN111521596A (en) | Fluorescence differential super-resolution imaging method and imaging system | |
| JP2006317261A (en) | Image processing method and device of scanning cytometer | |
| CN107907050A (en) | Ultrafast linear scan edge inspection system and method based on difference | |
| Zhang et al. | Single-shot common-path transport of intensity equation method with Greek-ladder sieves | |
| CN107632402A (en) | A kind of continuous/ultrafast micro imaging method of the mould of burst/difference three for real-time monitored micro-nano transient phenomena | |
| CN106454334A (en) | Device for measuring exposure time of X-ray framing camera | |
| CN205514536U (en) | Frequency domain optics chromatographic device that is concerned with | |
| CN115494005A (en) | Semiconductor defect detection device and method based on infrared microscopic digital holography | |
| He et al. | On-line beam diagnostics based on single-shot beam splitting phase retrieval | |
| CN108710205B (en) | A kind of optical scanner holography self-focusing method based on edge gray difference function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180413 |
|
| RJ01 | Rejection of invention patent application after publication |