CN107894427A - A kind of support platform and detection means of new metal cover - Google Patents
A kind of support platform and detection means of new metal cover Download PDFInfo
- Publication number
- CN107894427A CN107894427A CN201711373480.6A CN201711373480A CN107894427A CN 107894427 A CN107894427 A CN 107894427A CN 201711373480 A CN201711373480 A CN 201711373480A CN 107894427 A CN107894427 A CN 107894427A
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- China
- Prior art keywords
- metal cover
- air supporting
- support platform
- supporting plate
- air
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002184 metal Substances 0.000 title claims abstract description 92
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 92
- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 238000009434 installation Methods 0.000 claims abstract description 7
- 238000007664 blowing Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims 1
- 229910052573 porcelain Inorganic materials 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 11
- 238000001704 evaporation Methods 0.000 description 11
- 229920001621 AMOLED Polymers 0.000 description 9
- 229910001111 Fine metal Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 206010015150 Erythema Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
- G01N21/9072—Investigating the presence of flaws or contamination in a container or its contents with illumination or detection from inside the container
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Physical Vapour Deposition (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
The invention discloses a kind of support platform and detection means of new metal cover, include the framework of two air supporting plates and installation light source, wherein, the side connection parallel with the framework two respectively of two air supporting plates；The edge of the air supporting plate away from the framework is provided with metal cover installed part, one of them described metal cover installed part is provided with photoemitter, another described metal cover installed part is provided with photelectric receiver, and the photoemitter is set with the photelectric receiver face, metal cover it is any be locally higher than where the photoemitter and the photelectric receiver plane when, the photoemitter sends signal with the photelectric receiver；The air supporting plate face is provided with multiple ventholes to the first surface of metal cover, and the second surface parallel with the first surface surface is provided with least one air admission hole, and the air admission hole is interconnected with each venthole in the air supporting intralamellar part.
Description
Technical field
The present invention relates to metal evaporation technical field, more particularly to a kind of support platform of new metal cover and detection
Device.
Background technology
(Active-matrix organic light emitting diode, full name is that active matrix is organic to AMOLED
Light-emittingdiode or active-matrix organic light emitting diode) display with it is frivolous, actively luminous, fast response time, visual angle be wide, color
Many advantages, such as coloured silk is abundant, brightness is high, low in energy consumption and high-low temperature resistant and be considered by industry after liquid crystal display (Liquid
Crystal Display, LCD) after new Display Technique, displayer can be widely applied to smart mobile phone, flat board
The end products such as computer, TV.
In the prior art, it is in vacuum chamber, using as the AMOLED substrates of process object that evaporation is carried out to AMOLED
Towards lower installation, face is deposited in it, when the metal cover of evaporation is configured between the evaporation face of AMOLED substrates and vapor deposition source,
Vapor deposition source is heated so that deposition material evaporates, and it is attached to AMOLED substrate surfaces via the perforate of metal cover and enter
Row evaporation.For example, AMOLED substrates are using fine metal shade (Fine Metal Mask, FMM) evaporation luminous organic material
Colorization pattern of pixels is prepared, the fine metal shade includes perforate and bridge, perforate and the luminous organic material picture that need to be deposited
Plain region exactitude position is simultaneously consistent, and bridge is used to prevent luminous organic material evaporation from arriving other regions.When evaporation emitting red light
During material, make the perforate face red sub-pixel of fine metal shade, and green sub-pixels and blue subpixels are blocked by shade,
The red illuminating material can so sent from vapor deposition source is only deposited at red sub-pixel area；It has been deposited in red illuminating material
Cheng Hou, shade translate the sub-pixel that the distance of a sub-pixel makes perforate be directed at another color, complete RGB three primary colours by that analogy
The evaporation of material, so as to form colorization pattern of pixels.
The important crucial processing procedure for AMOLED is deposited, the relationship between quality of its metal cover evaporation success rate, so evaporation
The detection of preceding metal cover is extremely important.At present, evaporation metal shade detection is to erect metal cover edge, with CCD to whole
Individual metal cover is checked；But because metal cover has weight to cause center section sinking and metal grill edge in itself
There is stronger reflection, cause automatic optics inspection benefit not high, often there are the spurious defects of metallic reflection or because optics is away from burnt bad
Influence verification and measurement ratio.
In view of it is above-mentioned the defects of, the design people, be actively subject to research and innovation, to found a kind of new metal cover
Support platform and detection means, make it with more the value in industry.
The content of the invention
It is an object of the invention to propose a kind of support platform and detection means of new metal cover, gold can compensate for
Belong to shade sag of chain caused by own wt, and degree of compensation can be controlled.
To use following technical scheme up to this purpose, the present invention：
A kind of support platform of new metal cover, including the framework of two air supporting plates and installation light source, wherein,
Parallel with the framework two side connection respectively of two air supporting plates；
The edge of the air supporting plate away from the framework is provided with metal cover installed part, one of them described metal cover
Installed part is provided with photoemitter, and another described metal cover installed part is provided with photelectric receiver, and the photoelectricity is sent out
Emitter is set with the photelectric receiver face, and the plane where the photoemitter and the photelectric receiver hides with metal
Cover is tensioned and the plane under being horizontal maintains an equal level, and is locally higher than the photoemitter and the photoelectricity metal cover is any
During plane where receiver, the photoemitter sends signal with the photelectric receiver；
The air supporting plate face is provided with multiple ventholes to the first surface of metal cover, is put down with the first surface surface
Capable second surface is provided with least one air admission hole, and the air admission hole is mutual in the air supporting intralamellar part with each venthole
Connection.
Further, it is equipped with air nozzle on each venthole.
Further, metal cover can be blown afloat 30~70um by the air-blowing quantity of the air supporting plate.
Further, the density of the venthole on the air supporting plate close to the metal cover installed part is m1, the gas
The density of venthole in kickboard close to the framework is m2, m1 ＜ m2.
Further, the material of the air supporting plate is ceramics.
Further, the air nozzle includes air nozzle body, and the periphery wall of the air nozzle body is provided with external screw thread,
Each venthole inwall is provided with the internal thread being threadedly coupled with the air nozzle body.
Further, the multiple venthole be arranged to can closed type stomata, air supporting plate inwall rotation be fixed with
Air supporting plate position of opening identical adjustable plate, rotation adjustable plate realize the standard-sized sheet, half-open and fully closed of multiple ventholes.
Further, the installed part is slideably positioned on the air supporting plate, to form different size of loading end.
Further, the air supporting plate is provided with dovetail groove, institute with the side that the framework is connected along the side bearing of trend
State framework both sides and be provided with the blocked block coordinated with the dovetail groove.
The detection means of the metal cover of the present invention, support platform and detection unit comprising above-mentioned metal cover,
The detection unit is arranged above the support platform, to check that metal cover whether there is flaw.
Beneficial effects of the present invention are：Metal cover is supported using air supporting plate and metal cover is blown afloat, by metal cover
The height blown afloat can offset metal cover because of sag of chain caused by own wt, and pass through photoemitter and photelectric receiver
The height that control metal cover is blown afloat, avoids metal cover from arching upward；, can be with addition, by the use of the light source in framework as backlight
The influence of reflected light caused by metal cover is offset, so that it is guaranteed that the Detection results of metal cover, greatly improve metal cover
Success rate is deposited.
Brief description of the drawings
Fig. 1 is the structural representation of the support platform for the metal cover that the specific embodiment of the invention provides；
Fig. 2 is the cooperation schematic diagram of air supporting plate and adjustable plate in the present invention；
Fig. 3 is the structural representation for the metal cover detection means that the specific embodiment of the invention provides.
In figure：10- air supporting plates, 11- ventholes, 12- air admission holes, 13- dovetail grooves, 14- adjustable plates, 20- frameworks, 22- cards
Hold block, 30- installed parts, 40- air nozzles, 50- light sources, 60-CCD, 70- metal covers, 81- photoemitters, 82- photoemission
Device.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
As shown in figure 1, the new metal cover support platform of the present invention includes two ceramic air supporting plates 10 and installation
The framework 20 of light source, wherein, two air supporting plates 10 connect with 20 two parallel sides of framework respectively；Air supporting plate 10 is away from frame
The edge of body 20 is provided with metal cover installed part 30, and one of metal cover installed part 30 is provided with photoemitter 81,
Another metal cover installed part 30 is provided with photelectric receiver 82, and photoemitter 81 is set with the face of photelectric receiver 82
Put, metal cover it is any be locally higher than where photoemitter 81 and photelectric receiver 82 plane when, photoemitter 81
Signal is sent with photelectric receiver 82；The first surface of air supporting plate 10 towards metal cover is provided with multiple ventholes 11, with
The parallel second surface of one surface is provided with least one air admission hole 12, and air admission hole 12 is with each venthole 11 in air supporting plate 10
Inside is interconnected.Gas is passed through from air admission hole 12, gas blows to from each venthole 11 to be opened on two installed parts 30
Metal cover, metal cover is blown afloat to certain height, to offset metal cover because of amount of being hung down caused by own wt.
The height that the present invention is blown afloat by photoemitter 81 and the control metal cover of photelectric receiver 82, avoids metal from hiding
Cover arches upward, specifically, the plane where photoemitter 81 and photelectric receiver 82 is tensioned and is horizontal with metal cover
Under plane maintain an equal level.
To ensure blowing effect, the present invention is equipped with air nozzle 40 on each venthole 11, and the gas outlet of air nozzle 40 is straight
Footpath can adjust as needed.
The air-blowing quantity of the air supporting plate 10 of the present invention can blow afloat metal cover 30~70um, too small, can not offset metal
The sag of chain of shade, it is excessive, metal cover can be blown and arched upward.
Because the weight of metal cover in itself can cause center section to sink than more prominent, therefore, the present invention is being set out
During the density of stomata 11, the density on air supporting plate 10 close to the venthole 11 of metal cover installed part 30 is set to m1, by air supporting
The density of venthole 11 on plate 10 close to framework 20 is set to m2, makes m1 ＜ m2, you can more to the air-blowing quantity in the middle part of metal cover
In the air-blowing quantity to metal cover edge, detected so as to can ensure that metal cover is in horizontality.
For convenience of air supporting plate 10 and framework 20 are detachably connected, the present invention is in the side that air supporting plate 10 is connected with framework 20
Dovetail groove 13 is provided with along the side bearing of trend, the blocked block 22 coordinated with dovetail groove 13 is provided with the both sides of framework 20.
In addition, for convenience of installation air nozzle 40, air nozzle 40 of the invention includes air nozzle body, in air nozzle body
Periphery wall is provided with external screw thread, and the internal thread being threadedly coupled with air nozzle body is provided with the inwall of venthole 11.Pass through screw thread
The mode of connection, realize being detachably connected for air nozzle 40.
In an embodiment, the installed part 30 is slideably positioned on air supporting plate 10, to form different size of loading end,
So as to the support suitable for different size shades.
In a preferred embodiment, as shown in Fig. 2 the multiple venthole 11 be arranged to can closed type stomata, the gas
The inwall of kickboard 10 rotation be fixed with the position of opening identical adjustable plate 14 of air supporting plate 10, rotation adjustable plate 14 can realize it is multiple go out
It is the standard-sized sheet of stomata 11, half-open and fully closed.Adjustable plate 14 can be set adjacent only to the edge of air supporting plate 10, and by rotating adjustable plate
14 so that the venthole 11 of marginal portion is half-open position, to reduce the gas output of marginal position, it is ensured that the level of metal cover
Degree.In addition, rotation adjustable plate 14 make it that the venthole 11 of marginal portion is full-shut position, the branch available for reduced size shade
Support.
As shown in figure 3, the present invention also provides a kind of detection means of metal cover, comprising metal cover support platform and
Detection unit 60, when specifically used, by the frame of metal cover 70 on two installed parts 30, one is set up on metal cover 70
Light source 50 in synchronization-moving detection unit 60 (such as CCD) alignment framework 20, then supplies to air supporting plate 10, passes through air supporting plate
10 pairs of metal covers 70 are blown afloat, and are monitored in real time using photoemitter 81 and photelectric receiver 82, work as metal cover
Arched upward by blowing, photoemitter 81 sends signal with photelectric receiver 82, adjusts air-blowing quantity, ensures that metal cover is maintained at all the time
Horizontality, then detection of taking pictures can be carried out to metal cover 70.
The technical principle of the present invention is described above in association with specific embodiment.These descriptions are intended merely to explain the present invention's
Principle, and limiting the scope of the invention can not be construed in any way.Based on explanation herein, the technology of this area
Personnel would not require any inventive effort the other embodiments that can associate the present invention, and these modes are fallen within
Within protection scope of the present invention.
Claims (10)
- A kind of 1. support platform of new metal cover, it is characterised in that the framework including two air supporting plates and installation light source, Wherein,Parallel with the framework two side connection respectively of two air supporting plates；The edge of the air supporting plate away from the framework is provided with metal cover installed part, one of them described metal cover installation Part is provided with photoemitter, and another described metal cover installed part is provided with photelectric receiver, and the photoemitter Set with the photelectric receiver face, the plane where the photoemitter and the photelectric receiver and metal cover Tight and under being horizontal plane maintains an equal level, and is locally higher than the photoemitter and the opto-electronic receiver metal cover is any During plane where device, the photoemitter sends signal with the photelectric receiver；The air supporting plate face is provided with multiple ventholes to the first surface of metal cover, parallel with the first surface surface Second surface is provided with least one air admission hole, and the air admission hole mutually interconnects with each venthole in the air supporting intralamellar part It is logical.
- 2. the support platform of metal cover according to claim 1, it is characterised in that be equipped with spray on each venthole Valve.
- 3. the support platform of metal cover according to claim 1, it is characterised in that the air-blowing quantity of the air supporting plate can be with Metal cover is blown afloat into 30~70um.
- 4. the support platform of metal cover according to claim 1, it is characterised in that close to the gold on the air supporting plate The density for belonging to the venthole of shade installed part is m1, the density of the venthole on the air supporting plate close to the framework is m2, m1＜ m2。
- 5. the support platform of metal cover according to claim 1, it is characterised in that the material of the air supporting plate is pottery Porcelain.
- 6. the support platform of metal cover according to claim 2, it is characterised in that the air nozzle includes air nozzle sheet Body, the periphery wall of the air nozzle body are provided with external screw thread, and each venthole inwall is provided with and the air nozzle body The internal thread of threaded connection.
- 7. the support platform of metal cover according to claim 1, it is characterised in that the multiple venthole is arranged to can Closed type stomata, the air supporting plate inwall rotation are fixed with real with air supporting plate position of opening identical adjustable plate, rotation adjustable plate It is the standard-sized sheet of existing multiple ventholes, half-open and fully closed.
- 8. the support platform of metal cover according to claim 1, it is characterised in that the installed part is slideably positioned in institute State on air supporting plate, to form different size of loading end.
- 9. the support platform of metal cover according to claim 1, it is characterised in that the air supporting plate connects with the framework The side connect is provided with dovetail groove along the side bearing of trend, and the framework both sides are provided with the blocked block coordinated with the dovetail groove.
- 10. a kind of detection means of metal cover, it is characterised in that include the metal as described in claim 1-9 any one The support platform and detection unit of shade, the detection unit are arranged above the support platform, to check that metal hides Cover whether there is flaw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711373480.6A CN107894427B (en) | 2017-12-19 | 2017-12-19 | Novel supporting platform and detection device for metal shade |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711373480.6A CN107894427B (en) | 2017-12-19 | 2017-12-19 | Novel supporting platform and detection device for metal shade |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107894427A true CN107894427A (en) | 2018-04-10 |
| CN107894427B CN107894427B (en) | 2024-04-16 |
Family
ID=61807684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711373480.6A Active CN107894427B (en) | 2017-12-19 | 2017-12-19 | Novel supporting platform and detection device for metal shade |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107894427B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0726365A (en) * | 1993-07-12 | 1995-01-27 | Sony Corp | Material-flying device, thin film forming device and method for cleaning material-flying device |
| JP2003317955A (en) * | 2002-02-22 | 2003-11-07 | Semiconductor Energy Lab Co Ltd | Light emitting device, its manufacturing method, and operation method of manufacturing device |
| US20100124069A1 (en) * | 2008-11-19 | 2010-05-20 | Koito Manufacturing Co., Ltd. | Vehicle headlamp |
| CN207798692U (en) * | 2017-12-19 | 2018-08-31 | 苏州精濑光电有限公司 | A kind of support platform and detection device of novel metal cover |
-
2017
- 2017-12-19 CN CN201711373480.6A patent/CN107894427B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0726365A (en) * | 1993-07-12 | 1995-01-27 | Sony Corp | Material-flying device, thin film forming device and method for cleaning material-flying device |
| JP2003317955A (en) * | 2002-02-22 | 2003-11-07 | Semiconductor Energy Lab Co Ltd | Light emitting device, its manufacturing method, and operation method of manufacturing device |
| US20100124069A1 (en) * | 2008-11-19 | 2010-05-20 | Koito Manufacturing Co., Ltd. | Vehicle headlamp |
| CN207798692U (en) * | 2017-12-19 | 2018-08-31 | 苏州精濑光电有限公司 | A kind of support platform and detection device of novel metal cover |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107894427B (en) | 2024-04-16 |
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