CN107871195A - The schedule sequences generation method and device of a kind of apparatus for production line - Google Patents
The schedule sequences generation method and device of a kind of apparatus for production line Download PDFInfo
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Abstract
The embodiment of the present application provides a kind of schedule sequences generation method of apparatus for production line, wherein, apparatus for production line includes：Multiple functional modules；Functional module has the action for needing to perform；Described method includes：It is determined that the object function for the stable state process-cycle；The stable state process-cycle is the cycle that apparatus for production line processes single silicon chip under lower state；It is determined that the constraints for the action for needing to perform for functional module；It is determined that the constraints for the stable state process-cycle；Using the object function for the stable state process-cycle, the constraints and the constraints for the stable state process-cycle of the action for needing to perform for functional module, stable state schedule sequences corresponding to systematic function module.The embodiment of the present application is in the object function for the stable state process-cycle, and the constraints for the action for meeting to perform for functional module needs and determination are under the constraints of stable state process-cycle, generating stable state schedule sequences, to improve the capacity efficiency of cluster equipment.
Description
Technical field
The application is related to technical field of producing, more particularly to a kind of schedule sequences generation method of apparatus for production line
With a kind of schedule sequences generating means of apparatus for production line.
Background technology
Cluster scheduling problem refers to that semiconductor manufacturing industry must use multiple transmission platforms, extension simultaneously because of technique productions demand
Carry multiple processing chambers, so as to cause the transmission path of silicon chip in technique productions (wafer) and dispatching method it is more complicated one
Class problem.
In the scheduling process of apparatus for production line, for any a piece of silicon chip, there are a variety of choosings in its path for transmitting processing
Select, and different machining paths and the execution sequence of task sequence can all have influence on the time that equipment completes technique.In other words,
The machining path of equipment and the execution sequence of task differ, and equipment completes the time required for the technique of Board Lot silicon chip
Differ.Scheduling path is more excellent, and the time required for equipment completes the silicon chip of identical quantity is shorter, and the production capacity of equipment is also got over
It is high.
For semicon industry, the production capacity of equipment is that equipment very important performance in market competition refers to
Mark.And under identical hardware configuration and process conditions, the performance of dispatching algorithm is to influence a principal element of equipment capacity.
Therefore, a technical problem for needing those skilled in the art urgently to solve at present is exactly：There is provided a kind of dispatching method for
Complicated dispatching requirement, improve the capacity efficiency of apparatus for production line.
The content of the invention
In view of the above problems, it is proposed that the embodiment of the present application overcomes above mentioned problem or at least in part to provide one kind
The scheduling sequence of a kind of schedule sequences generation method of the apparatus for production line to solve the above problems and a kind of corresponding apparatus for production line
Column-generation device.
In order to solve the above problems, the embodiment of the present application discloses a kind of schedule sequences generation method of apparatus for production line,
Wherein, the apparatus for production line includes：Multiple functional modules；The functional module has the action for needing to perform；Described side
Method includes：
It is determined that the object function for the stable state process-cycle；The stable state process-cycle is the apparatus for production line in stable state
The cycle of single silicon chip is processed under state；
It is determined that the constraints for the action for needing to perform for functional module；
It is determined that the constraints for the stable state process-cycle；
Using the object function for the stable state process-cycle, the action for needing to perform for functional module
Constraints and the constraints for the stable state process-cycle, generate corresponding to the functional module stable state and adjust
Degree series.
Preferably, it is described to determine to include the step of being directed to the object function of the stable state process-cycle：
It is object function to determine that the stable state process-cycle takes minimum value.
Preferably, the functional module includes：Vacuum mechanical-arm, the action for determining to perform for functional module needs
Constraints the step of include：
Obtain the fabrication cycles pattern of current manufacturing lines equipment；
Preset state parameter is obtained, the action that the preset state parameter needs to perform with the vacuum mechanical-arm associates；
Using the fabrication cycles pattern and the preset state parameter, it is determined that needing to hold for the vacuum mechanical-arm
First constraints of capable action.
Preferably, the functional module also includes：Processing chamber；The constraint determined for the stable state process-cycle
The step of condition, includes：
Obtain the vacuum mechanical-arm takes/film releasing time, the rotational time of the vacuum mechanical-arm and the technique
The process time of chamber；
Using it is described take/film releasing time, the rotational time, the process time, the vacuum mechanical-arm need to perform
Action and the preset state parameter, it is determined that the second constraints for the stable state process-cycle.
Preferably, the step of constraints of the action for determining to need to perform for functional module also includes：
Obtain the vacuum mechanical-arm quantity, and the processing chamber quantity；
Using the vacuum mechanical-arm quantity and the processing chamber quantity, it is determined that for being needed with the vacuum mechanical-arm
3rd constraints of the preset state parameter for the action association to be performed.
Preferably, the step of constraints of the action for determining to need to perform for functional module also includes：
Using the fabrication cycles pattern, it is determined that the 4th constraint article of the action for needing to perform for the vacuum mechanical-arm
Part.
Preferably, the step of constraints of the action for determining to need to perform for functional module also includes：
/ film releasing time, and the rotational time are taken using described, it is determined that needing what is performed for the vacuum mechanical-arm
5th constraints of action.
Preferably, the apparatus for production line also includes：Atmospheric mechanical hand, loadlock chambers.
Preferably, the object function of the stable state process-cycle is directed to described in the use, it is described to be needed for functional module
The constraints for the action to be performed and the constraints for the stable state process-cycle, generate the functional module
The step of corresponding stable state schedule sequences, includes：
Using the object function for the stable state process-cycle, first constraints, second constraint
Condition, the 3rd constraints, the 4th constraints, and the 5th constraints, determine vacuum mechanical-arm
Stable state schedule sequences；
Using the stable state schedule sequences of the vacuum mechanical-arm, the processing chamber, the atmospheric mechanical hand are determined, and
The stable state schedule sequences of the loadlock chambers.
Meanwhile disclosed herein as well is a kind of schedule sequences generating means of apparatus for production line, wherein, the production line is set
It is standby to include：Multiple functional modules；The functional module has the action for needing to perform；Described device includes：
Object function determining module, for determining the object function for the stable state process-cycle；The stable state processing
Cycle is the cycle that the apparatus for production line processes single silicon chip under lower state；
Action constraint condition determining module, for the constraints for the action for determining to perform for functional module needs；
Cycle constraint condition determining module, for determining the constraints for the stable state process-cycle；
Stable state schedule sequences generation module, it is described for using the object function for being directed to the stable state process-cycle
The constraints and the constraints for the stable state process-cycle for the action for needing to perform for functional module, it is raw
Into stable state schedule sequences corresponding to the functional module.
Preferably, the object function determining module includes：
Minimum period determination sub-module, it is object function for determining that the stable state process-cycle takes minimum value.
Preferably, the functional module includes：Vacuum mechanical-arm, the action constraint condition determining module include：
Fabrication cycles pattern acquiring submodule, for obtaining the fabrication cycles pattern of current manufacturing lines equipment；
State parameter acquisition submodule, for obtaining preset state parameter, the preset state parameter and the vacuum machine
Tool hand needs the action association performed；
First constraints determination sub-module, for using the fabrication cycles pattern and the preset state parameter,
It is determined that the first constraints of the action for needing to perform for the vacuum mechanical-arm.
Preferably, the functional module also includes：Processing chamber；The cycle constraint condition determining module includes：
First device parameter acquisition submodule, for obtaining the taking of the vacuum mechanical-arm/film releasing time, the vacuum machine
The process time of the rotational time of tool hand and the processing chamber；
Second constraints determination sub-module, for taken described in use/the film releasing time, the rotational time, the processing
Time, the vacuum mechanical-arm need the action performed and the preset state parameter, it is determined that for stable state processing week
The second constraints of phase.
Preferably, the action constraint condition determining module also includes：
Second device parameter acquisition submodule, for obtaining the vacuum mechanical-arm quantity, and the process cavity number of chambers
Amount；
3rd constraints determination sub-module, for using the vacuum mechanical-arm quantity and the process cavity number of chambers
Amount, it is determined that the 3rd constraints of the preset state parameter associated for the action performed with vacuum mechanical-arm needs.
Preferably, the action constraint condition determining module also includes：
4th constraints determination sub-module, for using the fabrication cycles pattern, it is determined that being directed to the vacuum machine
Hand needs the 4th constraints of the action performed.
Preferably, the action constraint condition determining module also includes：
5th constraints determination sub-module, for taking/film releasing time, and the rotational time described in use, it is determined that
5th constraints of the action for needing to perform for the vacuum mechanical-arm.
Preferably, the apparatus for production line also includes：Atmospheric mechanical hand, loadlock chambers.
Preferably, the stable state schedule sequences generation module includes：
First ray determination sub-module, for using the object function for being directed to the stable state process-cycle, described the
One constraints, second constraints, the 3rd constraints, the 4th constraints, and the described 5th about
Beam condition, determine the stable state schedule sequences of vacuum mechanical-arm；
Second sequence determination sub-module, for the stable state schedule sequences using the vacuum mechanical-arm, determine the technique
Chamber, the atmospheric mechanical hand, and the stable state schedule sequences of the loadlock chambers.
The embodiment of the present application includes advantages below：
The embodiment of the present application is by determining the object function for the stable state process-cycle, it is determined that being directed to apparatus for production line
Functional module need the constraints of action performed, and determine the constraints for the stable state process-cycle.For
The object function of stable state process-cycle, the constraints for the action for meeting to perform for functional module needs and determination are for steady
Under the constraints of state process-cycle, stable state schedule sequences corresponding to systematic function module, to improve the production capacity of cluster equipment effect
Rate.The method that the application solves stable state schedule sequences can be used in various complicated cluster equipment, improve various cluster equipment
Scheduling problem.
Brief description of the drawings
Fig. 1 is a kind of step flow chart of the schedule sequences generation method embodiment 1 of apparatus for production line of the application；
Fig. 2 is a kind of step flow chart of the schedule sequences generation method embodiment 2 of apparatus for production line of the application；
Fig. 3 is a kind of schematic diagram of apparatus for production line in the embodiment of the present application；
Fig. 4 is a kind of schematic diagram of apparatus for production line in the embodiment of the present application；
Fig. 5 is a kind of structured flowchart of the schedule sequences generating means embodiment of apparatus for production line of the application.
Embodiment
It is below in conjunction with the accompanying drawings and specific real to enable the above-mentioned purpose of the application, feature and advantage more obvious understandable
Mode is applied to be described in further detail the application.
One of core idea of the embodiment of the present application is, based on mixed-integer programming model (MIP) thought, by true
Surely the object function of the stable state process-cycle is directed to, it is determined that needing the action performed for the functional module of apparatus for production line
Constraints, and determine the constraints for the stable state process-cycle.According to the target letter for the stable state process-cycle
Number, the constraints for the action for needing to perform for functional module and determination are for the constraints of stable state process-cycle, life
Into stable state schedule sequences corresponding to functional module.
Reference picture 1, show the application a kind of apparatus for production line schedule sequences generation method embodiment 1 the step of flow
Cheng Tu, wherein the apparatus for production line includes：Multiple functional modules；The functional module has the action for needing to perform；It is described
Method specifically may include steps of：
Step 101, it is determined that object function for the stable state process-cycle；The stable state process-cycle is the production
Line equipment processes the cycle of single silicon chip under lower state；
The embodiment of the present application is based on the thought of mixed-integer programming model (MIP), and the scheduling problem of apparatus for production line is taken out
As for mathematical programming model.Specifically, by determining the object function for the stable state process-cycle, it is determined that being directed to production line
The functional module of equipment needs the constraints of the action performed, and determines the constraint bar for the stable state process-cycle
Part, to build mathematical programming model.In the case where meeting constraints, mathematical programming model is solved, to obtain each function
The stable state schedule sequences of module.
The state of apparatus for production line includes：Starting stage, steady-state process and ending phase.Starting stage refers to that production line is set
Standby just to start the stage for starting to perform technique, now, the schedule speed of apparatus for production line is slow.
Steady-state process refers to that the schedule speed of apparatus for production line reaches the stage of a metastable speed.
Ending phase refers to apparatus for production line, prepares the stage of process ends, and now the schedule speed of apparatus for production line is put
Slowly.
Step 102, it is determined that the constraints for the action for needing to perform for functional module；
Step 103, it is determined that constraints for the stable state process-cycle；
Step 104, it is described to need to hold for functional module using the object function for the stable state process-cycle
The constraints of capable action and the constraints for the stable state process-cycle, it is corresponding to generate the functional module
Stable state schedule sequences.
The embodiment of the present application is by determining the object function for the stable state process-cycle, it is determined that being directed to apparatus for production line
Functional module need the constraints of action performed, and determine the constraints for the stable state process-cycle.For
The object function of stable state process-cycle, the constraints for the action for meeting to perform for functional module needs and determination are for steady
Under the constraints of state process-cycle, stable state schedule sequences corresponding to systematic function module, to improve the production capacity of cluster equipment effect
Rate.The method that the application solves stable state schedule sequences can be used in various complicated cluster equipment, improve various cluster equipment
Scheduling problem.
Reference picture 2, show the application a kind of apparatus for production line schedule sequences generation method embodiment 2 the step of flow
Cheng Tu, wherein the apparatus for production line includes：Multiple functional modules；The functional module has the action for needing to perform；It is described
Method specifically may include steps of：
Step 201, it is object function to determine that the stable state process-cycle takes minimum value；The stable state process-cycle is the production
Line equipment processes the cycle of single silicon chip under lower state；
Specifically, the stable state process-cycle is represented with λ.Object function is：minλ.
Step 202, it is determined that the constraints for the action for needing to perform for functional module；
In the embodiment of the present application, the functional module includes：Vacuum mechanical-arm；The step 202 can specifically include
Following sub-step：
Sub-step S11, obtain the fabrication cycles pattern of current manufacturing lines equipment；
By taking the apparatus for production line for processing silicon chip as an example, fabrication cycles pattern refers to time for the technological process that silicon chip needs pass through
Number.For example, single cycle module.Single cycle pattern refers to that silicon chip only needs to pass through once complete technique in apparatus for production line
Flow.
Sub-step S12, obtains preset state parameter, and the preset state parameter needs what is performed with the vacuum mechanical-arm
Action association；
Preset state parameter can react the state parameter of position of the silicon chip in technological process.
Sub-step S13, using the fabrication cycles pattern and the preset state parameter, it is determined that being directed to the vacuum machine
Tool hand needs the first constraints of the action performed.
Reference picture 3 is a kind of schematic diagram of apparatus for production line in the embodiment of the present application.Wherein apparatus for production line includes：Technique
Chamber 1-a, processing chamber 2-b, single arm vacuum manipulator-c, loadlock chambers (LoadLock) 1-d and loadlock chambers 2-e.Technique
Execution route be：Loadlock chambers 1- processing chamber 1- processing chamber 2- loadlock chambers 2.
Under single cycle pattern, the action that vacuum mechanical-arm needs to perform can be included by label sequence：
A1, vacuum mechanical-arm take piece from loadlock chambers 1；
A2, vacuum mechanical-arm to the film releasing of processing chamber 1；
A3, vacuum mechanical-arm take piece from processing chamber 1；
A4, vacuum mechanical-arm to the film releasing of processing chamber 2；
A5, vacuum mechanical-arm take piece from processing chamber 2；
A6, vacuum mechanical-arm are from the film releasing of loadlock chambers 2.
Default state parameter can include：
The silicon chip number that S1, vacuum mechanical-arm take out from loadlock chambers 1；
Silicon chip number in S2, processing chamber 1；
The silicon chip number that S3, vacuum mechanical-arm take out from processing chamber 1；
Silicon chip number in S4, processing chamber 2；
The silicon chip number that S5, vacuum mechanical-arm take out from processing chamber 2.
The action for needing to perform using vacuum mechanical-arm, generate the action vector Z under single cycle patternk。
Represent the action of k-th of generation in chronological order, Z in a cycle0Represent initial actuating.
Using preset state parameter, generation state vector Mk。
Represent the system mode after k-th of action generation, M0Represent original state.
Act vector ZkWith state vector MkBetween equation below be present：Mk=Mk-1+ATZk, A in formulaTSquare is shifted for state
Battle array, its value are：
Equation Mk=Mk-1+ATZkThe first constraints of action performed is as needed for the vacuum mechanical-arm.
In the embodiment of the present application, the step 202 can also specifically include following sub-step：
Sub-step S14, obtain vacuum mechanical-arm quantity, and the processing chamber quantity；
Sub-step S15, using the vacuum mechanical-arm quantity and the processing chamber quantity, it is determined that for it is described true
Empty manipulator needs the 3rd constraints of the preset state parameter of the action association performed.
Define Mj,kFor system mode vector MkJ-th of element, be the 1, technique of same process in vacuum mechanical-arm quantity
When chamber quantity is 1.Mj,k∈ { 0,1 } and M1,k+M3,k+M5,k≤ 1, specifically：M1,k,M3,k,M5,kBy vacuum mechanical-arm single armed
The limitation of number, M2,kLimited by PM1 technique process cavity numbers, M4,kLimited by PM2 technique process cavity numbers.
Reference picture 4 is a kind of schematic diagram of apparatus for production line, wherein apparatus for production line in the embodiment of the present application：Including two
Processing chamber 1-a, two processing chamber 2-b, two single arm vacuum manipulator-c, loadlock chambers (LoadLock) 1-d and locking
Container 2-e.The execution route of technique is：Loadlock chambers 1- processing chamber 1- processing chamber 2- loadlock chambers 2.
Vacuum mechanical-arm quantity be 2, the processing chamber quantity of same process be 2 when.Mj,k∈ { 0,1,2 } and M1,k+M3,k
+M5,k≤2.In formula, M1,k,M3,k,M5,kNumber is limited untill by manipulator single armed, M2,kBy PM1 technique process cavity numbers
Limitation, M4,kLimited by PM2 technique process cavity numbers.
The difference of Fig. 3 apparatus for production line and Fig. 4 apparatus for production line is, the quantity and same process of vacuum mechanical-arm
Processing chamber quantity it is different, it is therefore, different for the 3rd constraints of two kinds of apparatus for production line.
In the embodiment of the present application, the step 202 can also specifically include following sub-step：
Sub-step S16, using the fabrication cycles pattern, it is determined that the action for needing to perform for the vacuum mechanical-arm
4th constraints.
Specifically, define Zi,kExpression acts vector ZkI-th of element, thenAnd Zj,k∈ { 0,1 }, the opposing party
Face, under single cycle pattern, each action to the technique of single silicon chip will not synchronously be carried out and can only performed once, i.e.,
In the embodiment of the present application, the step 202 can also specifically include following sub-step：
Sub-step S17, obtain the taking of the vacuum mechanical-arm/film releasing time, the rotational time of the vacuum mechanical-arm；
Sub-step S18 ,/film releasing time, and the rotational time are taken using described, it is determined that being directed to the vacuum mechanical-arm
Need the 5th constraints of action performed.
Defined variable yiRepresent to carve at the beginning of the in chronological sequence action of k-th of generation of order, variable xiExpression acts Ai
At the time of beginning, then the 5th constraints includes：Wherein ε represents to take, put piece time, η expression manipulators
Rotational time.Variable y is actually the arrangements of variable x from small to large, and its relation can be described with following formula：
-(1-Zi,k)B≤yk-xi≤(1-Zi,k) B, in formula, constant B is a very big number.
Step 203, it is determined that constraints for the stable state process-cycle；
In the embodiment of the present application, the step 203 can specifically include following sub-step：
In the embodiment of the present application, the functional module also includes：Processing chamber；The step 203 can specifically include
Following sub-step：
Sub-step S22, obtain the taking of the vacuum mechanical-arm/film releasing time, the vacuum mechanical-arm rotational time with
And the process time of the processing chamber；
Sub-step S23, using it is described take/the film releasing time, the rotational time, the process time, the vacuum machine
Hand needs the action performed and the preset state parameter, it is determined that the second constraints for the stable state process-cycle.
Specifically, include in apparatus for production line：The processing chamber of single vacuum mechanical-arm and two technique, the work of each technique
When skill chamber quantity is 1.
Defined variable xiExpression acts AiAt the time of beginning, λ is the cycle that monolithic wafer is processed under lower state, then xi+1-
xi≥ti-Mi,0λ, specifically, following relation be present between each action time started：
x2-x1≥ε+η-M1,0λ
x3-x2≥ε+tPM1-M2,0λ
x4-x3≥ε+η-M3,0λ
x5-x4≥ε+tPM2-M4,0λ
x6-x5≥ε+η-M5,0λ
In formula, ε represents to take, put the piece time, and η represents manipulator rotational time, tPM1Represent the time of technique 1, tPM2Represent
The time of technique 2.
Step 204, it is described to need to hold for functional module using the object function for the stable state process-cycle
The constraints of capable action and the constraints for the stable state process-cycle, it is corresponding to generate the functional module
Stable state schedule sequences.
In the embodiment of the present application, the apparatus for production line also includes：Atmospheric mechanical hand, loadlock chambers.
The step 204 can specifically include following sub-step：
Sub-step S31, using the object function for the stable state process-cycle, first constraints, institute
The second constraints, the 3rd constraints, the 4th constraints, and the 5th constraints are stated, it is determined that very
The stable state schedule sequences of empty manipulator；
In the embodiment of the present application, the object function of minimum value, the first constraint determined by satisfaction are taken in the stable state process-cycle
In the case of condition, the second constraints, the 3rd constraints, the 4th constraints, and the 5th constraints, it can solve
Obtain the stable state schedule sequences of vacuum mechanical-arm.
Sub-step S32, using the stable state schedule sequences of the vacuum mechanical-arm, determine the processing chamber, the air
Manipulator, and the stable state schedule sequences of the loadlock chambers.
In the embodiment of the present application, apparatus for production line can include：Vacuum mechanical-arm, loadlock chambers 1, loadlock chambers 2, work
Skill chamber 1, processing chamber 2.Processing route is：Loadlock chambers 1- processing chamber 1- processing chamber 2- loadlock chambers 2.Vacuum machine
Hand is responsible for taking piece from loadlock chambers 1；To the film releasing of processing chamber 1；Piece is taken from processing chamber 1；To the film releasing of processing chamber 2；From technique
Chamber 2 takes piece；From the film releasing of loadlock chambers 2.Therefore, the stable state schedule sequences of vacuum mechanical-arm are being determined, you can confirm each
The stable state schedule sequences of loadlock chambers and each processing chamber.And atmospheric mechanical hand is responsible for from taking piece or put in loadlock chambers
Piece to loadlock chambers, therefore after the stable state schedule sequences of loadlock chambers determine, also may be used by the stable state schedule sequences of atmospheric mechanical hand
To determine.
The method based on mixed integer programming mathematical modeling that the application proposes, the scheduling for being not only suitable for conventional equipment are calculated
Method designs, such as mask HardMask boards, etching machine bench, for the complex device of more transmission platforms, multi-chamber, such as physical vapor
PVD CuBs equipment (Double tabletop, 8 chambers) is deposited, is also very suitable for.Because for mixed integer programming mathematical model method
Speech, what the object function of the model of all scheduling problems was just as, be all using the minimum stable state process-cycle as object function.Difference
Zhi Shi not be in the constraints in scheduling process, as long as the various constraint bars during the clear all types of equipment schedulings of analysis
Part, mathematical programming model is established, then solved, the optimal scheduling sequence with regard to problem can be obtained.
It should be noted that for embodiment of the method, in order to be briefly described, therefore it is all expressed as to a series of action group
Close, but those skilled in the art should know, the embodiment of the present application is not limited by described sequence of movement, because according to
According to the embodiment of the present application, some steps can use other orders or carry out simultaneously.Secondly, those skilled in the art also should
Know, embodiment described in this description belongs to preferred embodiment, and involved action not necessarily the application is implemented
Necessary to example.
Reference picture 5, show a kind of structural frames of the schedule sequences generating means embodiment of apparatus for production line of the application
Figure, wherein the apparatus for production line includes：Multiple functional modules, the functional module have the action for needing to perform；Described
Device can specifically include following module：
Object function determining module 301, for determining the object function for the stable state process-cycle；The stable state adds
The work cycle is the cycle that the apparatus for production line processes single silicon chip under lower state；
Action constraint condition determining module 302, for the constraints for the action for determining to perform for functional module needs；
Cycle constraint condition determining module 303, for determining the constraints for the stable state process-cycle；
Stable state schedule sequences generation module 304, for using the object function for being directed to the stable state process-cycle, institute
The constraints of the action performed for functional module needs and the constraints for the stable state process-cycle are stated,
Generate stable state schedule sequences corresponding to the functional module.
In the embodiment of the present application, the object function determining module 301 can include：
Minimum period determination sub-module, it is object function for determining that the stable state process-cycle takes minimum value.
In the embodiment of the present application, the functional module includes：Vacuum mechanical-arm, the action constraint condition determining module
302 can include：
Fabrication cycles pattern acquiring submodule, for obtaining the fabrication cycles pattern of current manufacturing lines equipment；
State parameter acquisition submodule, for obtaining preset state parameter, the preset state parameter and the vacuum machine
Tool hand needs the action association performed；
First constraints determination sub-module, for using the fabrication cycles pattern and the preset state parameter,
It is determined that the first constraints of the action for needing to perform for the vacuum mechanical-arm.
In the embodiment of the present application, the functional module also includes：Processing chamber；The cycle constraint condition determining module
303 can include：
First device parameter acquisition submodule, for obtaining the taking of the vacuum mechanical-arm/film releasing time, the vacuum machine
The process time of the rotational time of tool hand and the processing chamber；
Second constraints determination sub-module, for taken described in use/the film releasing time, the rotational time, the processing
Time, the vacuum mechanical-arm need the action performed and the preset state parameter, it is determined that for stable state processing week
The second constraints of phase.
In the embodiment of the present application, the action constraint condition determining module 302 can also include：
Second device parameter acquisition submodule, for obtaining the vacuum mechanical-arm quantity, and the process cavity number of chambers
Amount；
3rd constraints determination sub-module, for using the vacuum mechanical-arm quantity and the process cavity number of chambers
Amount, it is determined that the 3rd constraints of the preset state parameter associated for the action performed with vacuum mechanical-arm needs.
In the embodiment of the present application, the action constraint condition determining module 302 can also include：
4th constraints determination sub-module, for using the fabrication cycles pattern, it is determined that being directed to the vacuum machine
Hand needs the 4th constraints of the action performed.
In the embodiment of the present application, the action constraint condition determining module 302 can also include：
5th constraints determination sub-module, for taking/film releasing time, and the rotational time described in use, it is determined that
5th constraints of the action for needing to perform for the vacuum mechanical-arm.
In the embodiment of the present application, the apparatus for production line also includes：Atmospheric mechanical hand, loadlock chambers.
In the embodiment of the present application, the stable state schedule sequences generation module 304 can include：
First ray determination sub-module, for using the object function for being directed to the stable state process-cycle, described the
One constraints, second constraints, the 3rd constraints, the 4th constraints, and the described 5th about
Beam condition, determine the stable state schedule sequences of vacuum mechanical-arm；
Second sequence determination sub-module, for the stable state schedule sequences using the vacuum mechanical-arm, determine the technique
Chamber, the atmospheric mechanical hand, and the stable state schedule sequences of the loadlock chambers.
For device embodiment, because it is substantially similar to embodiment of the method, so description is fairly simple, it is related
Part illustrates referring to the part of embodiment of the method.
Each embodiment in this specification is described by the way of progressive, what each embodiment stressed be with
The difference of other embodiment, between each embodiment identical similar part mutually referring to.
It should be understood by those skilled in the art that, the embodiment of the embodiment of the present application can be provided as method, apparatus or calculate
Machine program product.Therefore, the embodiment of the present application can use complete hardware embodiment, complete software embodiment or combine software and
The form of the embodiment of hardware aspect.Moreover, the embodiment of the present application can use one or more wherein include computer can
With in the computer-usable storage medium (including but is not limited to magnetic disk storage, CD-ROM, optical memory etc.) of program code
The form of the computer program product of implementation.
The embodiment of the present application is with reference to according to the method for the embodiment of the present application, terminal device (system) and computer program
The flow chart and/or block diagram of product describes.It should be understood that can be by computer program instructions implementation process figure and/or block diagram
In each flow and/or square frame and the flow in flow chart and/or block diagram and/or the combination of square frame.These can be provided
Computer program instructions are set to all-purpose computer, special-purpose computer, Embedded Processor or other programmable data processing terminals
Standby processor is to produce a machine so that is held by the processor of computer or other programmable data processing terminal equipments
Capable instruction is produced for realizing in one flow of flow chart or multiple flows and/or one square frame of block diagram or multiple square frames
The device for the function of specifying.
These computer program instructions, which may be alternatively stored in, can guide computer or other programmable data processing terminal equipments
In the computer-readable memory to work in a specific way so that the instruction being stored in the computer-readable memory produces bag
The manufacture of command device is included, the command device is realized in one flow of flow chart or multiple flows and/or one side of block diagram
The function of being specified in frame or multiple square frames.
These computer program instructions can be also loaded into computer or other programmable data processing terminal equipments so that
Series of operation steps is performed on computer or other programmable terminal equipments to produce computer implemented processing, so that
The instruction performed on computer or other programmable terminal equipments is provided for realizing in one flow of flow chart or multiple flows
And/or specified in one square frame of block diagram or multiple square frames function the step of.
Although having been described for the preferred embodiment of the embodiment of the present application, those skilled in the art once know base
This creative concept, then other change and modification can be made to these embodiments.So appended claims are intended to be construed to
Including preferred embodiment and fall into having altered and changing for the embodiment of the present application scope.
Finally, it is to be noted that, herein, such as first and second or the like relational terms be used merely to by
One entity or operation make a distinction with another entity or operation, and not necessarily require or imply these entities or operation
Between any this actual relation or order be present.Moreover, term " comprising ", "comprising" or its any other variant meaning
Covering including for nonexcludability, so that process, method, article or terminal device including a series of elements are not only wrapped
Those key elements, but also the other element including being not expressly set out are included, or is also included for this process, method, article
Or the key element that terminal device is intrinsic.In the absence of more restrictions, wanted by what sentence "including a ..." limited
Element, it is not excluded that other identical element in the process including the key element, method, article or terminal device also be present.
Schedule sequences generation method to a kind of apparatus for production line provided herein and a kind of apparatus for production line above
Schedule sequences generating means, be described in detail, used herein principle and embodiment party of the specific case to the application
Formula is set forth, and the explanation of above example is only intended to help and understands the present processes and its core concept；It is meanwhile right
In those of ordinary skill in the art, according to the thought of the application, change is had in specific embodiments and applications
Part, in summary, this specification content should not be construed as the limitation to the application.
Claims (18)
1. the schedule sequences generation method of a kind of apparatus for production line, it is characterised in that the apparatus for production line includes：Multiple functions
Module；The functional module has the action for needing to perform；Described method includes：
It is determined that the object function for the stable state process-cycle；The stable state process-cycle is the apparatus for production line in lower state
The cycle of lower processing single silicon chip；
It is determined that the constraints for the action for needing to perform for functional module；
It is determined that the constraints for the stable state process-cycle；
Using the object function for the stable state process-cycle, the pact of the action for needing to perform for functional module
Beam condition and the constraints for the stable state process-cycle, generate stable state corresponding to the functional module and dispatch sequence
Row.
2. according to the method for claim 1, it is characterised in that the target letter determined for the stable state process-cycle
Several steps include：
It is object function to determine that the stable state process-cycle takes minimum value.
3. according to the method for claim 2, it is characterised in that the functional module includes：Vacuum mechanical-arm, the determination
The step of constraints for the action for needing to perform for functional module, includes：
Obtain the fabrication cycles pattern of current manufacturing lines equipment；
Preset state parameter is obtained, the action that the preset state parameter needs to perform with the vacuum mechanical-arm associates；
Using the fabrication cycles pattern and the preset state parameter, it is determined that needing what is performed for the vacuum mechanical-arm
First constraints of action.
4. according to the method for claim 3, it is characterised in that the functional module also includes：Processing chamber；The determination
For the stable state process-cycle constraints the step of include：
Obtain the vacuum mechanical-arm takes/film releasing time, the rotational time of the vacuum mechanical-arm and the processing chamber
Process time；
Using it is described take/film releasing time, the rotational time, the process time, the vacuum mechanical-arm need to perform it is dynamic
Work and the preset state parameter, it is determined that the second constraints for the stable state process-cycle.
5. according to the method for claim 4, it is characterised in that the action for determining to perform for functional module needs
The step of constraints, also includes：
Obtain the vacuum mechanical-arm quantity, and the processing chamber quantity；
Using the vacuum mechanical-arm quantity and the processing chamber quantity, it is determined that for needing to hold with the vacuum mechanical-arm
3rd constraints of the preset state parameter of capable action association.
6. according to the method for claim 5, it is characterised in that the action for determining to perform for functional module needs
The step of constraints, also includes：
Using the fabrication cycles pattern, it is determined that the 4th constraints of the action for needing to perform for the vacuum mechanical-arm.
7. according to the method for claim 6, it is characterised in that the action for determining to perform for functional module needs
The step of constraints, also includes：
/ film releasing time, and the rotational time are taken using described, it is determined that the action for needing to perform for the vacuum mechanical-arm
The 5th constraints.
8. according to the method for claim 7, it is characterised in that the apparatus for production line also includes：Atmospheric mechanical hand, locking
Container.
9. according to the method for claim 8, it is characterised in that the mesh of the stable state process-cycle is directed to described in the use
Scalar functions, it is described for functional module to need the constraints of action that performs and described for the stable state process-cycle
Constraints, the step of generating stable state schedule sequences corresponding to the functional module, include：
Using the object function for the stable state process-cycle, first constraints, second constraints,
3rd constraints, the 4th constraints, and the 5th constraints, determine that the stable state of vacuum mechanical-arm is adjusted
Degree series；
Using the stable state schedule sequences of the vacuum mechanical-arm, the processing chamber, the atmospheric mechanical hand are determined, and it is described
The stable state schedule sequences of loadlock chambers.
10. the schedule sequences generating means of a kind of apparatus for production line, it is characterised in that the apparatus for production line includes：Multiple work(
Can module；The functional module has the action for needing to perform；Described device includes：
Object function determining module, for determining the object function for the stable state process-cycle；The stable state process-cycle
The cycle of single silicon chip is processed under lower state for the apparatus for production line；
Action constraint condition determining module, for the constraints for the action for determining to perform for functional module needs；
Cycle constraint condition determining module, for determining the constraints for the stable state process-cycle；
Stable state schedule sequences generation module, it is described to be directed to for using the object function for being directed to the stable state process-cycle
Functional module needs the constraints of the action performed and the constraints for the stable state process-cycle, generates institute
State stable state schedule sequences corresponding to functional module.
11. device according to claim 10, it is characterised in that the object function determining module includes：
Minimum period determination sub-module, it is object function for determining that the stable state process-cycle takes minimum value.
12. device according to claim 11, it is characterised in that the functional module includes：Vacuum mechanical-arm, it is described dynamic
Making constraints determining module includes：
Fabrication cycles pattern acquiring submodule, for obtaining the fabrication cycles pattern of current manufacturing lines equipment；
State parameter acquisition submodule, for obtaining preset state parameter, the preset state parameter and the vacuum mechanical-arm
The action for needing to perform associates；
First constraints determination sub-module, for using the fabrication cycles pattern and the preset state parameter, it is determined that
First constraints of the action for needing to perform for the vacuum mechanical-arm.
13. device according to claim 12, it is characterised in that the functional module also includes：Processing chamber；The week
Phase constraints determining module includes：
First device parameter acquisition submodule, for obtaining the taking of the vacuum mechanical-arm/film releasing time, the vacuum mechanical-arm
Rotational time and the processing chamber process time；
Second constraints determination sub-module, for taken described in use/the film releasing time, the rotational time, the process time,
The vacuum mechanical-arm needs the action performed and the preset state parameter, it is determined that for the stable state process-cycle
Two constraintss.
14. device according to claim 13, it is characterised in that the action constraint condition determining module also includes：
Second device parameter acquisition submodule, for obtaining the vacuum mechanical-arm quantity, and the processing chamber quantity；
3rd constraints determination sub-module, for using the vacuum mechanical-arm quantity and the processing chamber quantity, really
Fixed the 3rd constraints for being directed to the preset state parameter for needing the action performed to associate with the vacuum mechanical-arm.
15. device according to claim 14, it is characterised in that the action constraint condition determining module also includes：
4th constraints determination sub-module, for using the fabrication cycles pattern, it is determined that being needed for the vacuum mechanical-arm
4th constraints of the action to be performed.
16. device according to claim 15, it is characterised in that the action constraint condition determining module also includes：
5th constraints determination sub-module, for taking/film releasing time, and the rotational time described in use, it is determined that being directed to
The vacuum mechanical-arm needs the 5th constraints of the action performed.
17. device according to claim 16, it is characterised in that the apparatus for production line also includes：Atmospheric mechanical hand, add
Lock container.
18. device according to claim 17, it is characterised in that the stable state schedule sequences generation module includes：
First ray determination sub-module, for using the object function for being directed to the stable state process-cycle, described first about
Beam condition, second constraints, the 3rd constraints, the 4th constraints, and the 5th constraint article
Part, determine the stable state schedule sequences of vacuum mechanical-arm；
Second sequence determination sub-module, for using the vacuum mechanical-arm stable state schedule sequences, determine the processing chamber,
The atmospheric mechanical hand, and the stable state schedule sequences of the loadlock chambers.
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Application publication date: 20180403 |