CN104656571B - It is a kind of to support while processing the route control method and device of many sheet materials - Google Patents
It is a kind of to support while processing the route control method and device of many sheet materials Download PDFInfo
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- CN104656571B CN104656571B CN201310578182.6A CN201310578182A CN104656571B CN 104656571 B CN104656571 B CN 104656571B CN 201310578182 A CN201310578182 A CN 201310578182A CN 104656571 B CN104656571 B CN 104656571B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P80/00—Climate change mitigation technologies for sector-wide applications
- Y02P80/40—Minimising material used in manufacturing processes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The embodiment of the invention provides a kind of support while processing the route control method of many sheet materials, the route control method is comprised the following steps：To support that the processing chamber for processing many sheet materials simultaneously is labeled as batch processing module；It is marked for material to be processed according to preset rules；When the source position of current material is batch processing module, judge whether there is the minimum material of priority in the batch processing module；If it is not, then allowing the material to be left from the source position；When the target location of current material is batch processing module, judge whether there is material in the batch processing module；If so, then allowing the material transferring to the batch processing module when the group mark of the material is identical with the group mark of material in the batch processing module；Otherwise, it is allowed to the material transferring to the batch processing module.The invention enables the biography piece of apparatus for production line high-efficiency automatic, the yield of apparatus for production line is improve.
Description
Technical field
It is more particularly to a kind of to support while processing the route control of many sheet materials the present invention relates to apparatus and process control field
Method processed and a kind of processing chamber is supported while processing the route control device of many sheet materials.
Background technology
Arrange the transmission order of material, and each process station proceeds by time of technique and is collectively referred to as in processing chamber
The route test of material.
Material Route control is a search tree based on equipment state, and each node of search tree is represented in equipment
All materials position and the set of state of the art.Material is often mobile once, and the state of equipment just occurs once to change, shape
Each branch into a new node, therefore search tree represents the movement of material one at a time.Material is moved once, forms one
Individual new node；It is mobile again on new node once to form a new node again, until all materials all complete setting
Task.That is the leaf node of this search tree is that all materials all complete technique processing, returns to corresponding position.Time
This search tree is gone through, that minimum paths, are optimal the time required to finding out this search tree from root node to leaf node
Material transmission order and processing sequence.
Behind the position for carrying out technique processing the need for material is placed into accordingly, processing is immediately begun to.And each branch
Can only be once moving for material, can be exported from journal file：
1. material 1 moves to B location from location A, and starts technique；
2. material 2 moves to D positions from location of C, and starts technique；
3. material 1 moves to location A from B location；
4. material 2 moves to location of C from D positions；
5. position C carries out technique processing once without material.
But the above-mentioned position that can carry out technique processing can only all place a sheet material, i.e., a thing can only be directed to every time
Material carries out PROCESS FOR TREATMENT.Processing multiple materials simultaneously clearly for needs carries out the apparatus for production line of PROCESS FOR TREATMENT, for example
APCVD（Atmospheric Pressure Chemical Vapor Deposition, normal pressure chemical vapor phase deposition）Equipment, on
The method of stating can not be applicable.
The content of the invention
Embodiment of the present invention technical problem to be solved is to provide a kind of support while processing the route control of many sheet materials
Method processed, to solve the problems, such as that processing chamber is not supported while processing many sheet materials.
Support while process the route control device of many sheet materials, to be used to ensure the above method present invention also offers a kind of
Realization and application.
In order to solve the above problems, supported while processing the route test of many sheet materials the embodiment of the invention discloses a kind of
Method, the route control method, comprises the following steps：
To support that the processing chamber for processing many sheet materials simultaneously is labeled as batch processing module；
It is marked for material to be processed according to preset rules；Wherein, the preset rules include that group number demarcates rule
Then rule is demarcated with priority；The batch processing module has capacity, and it is according to the batch processing mould that the group number demarcates rule
Material to be processed is divided into one or more packets by the capacity of block, and there is the material of same packet identical group to identify；Institute
State priority and demarcate rule for the material in same packet is ranked up according to priority；The material has source position and target
Position；
When the source position of current material is batch processing module, judge whether there is priority most in the batch processing module
Low material；If it is not, then allowing the material to be left from the source position；
When the target location of current material is batch processing module, judge whether there is material in the batch processing module；
If so, then allowing the material transferring when the group mark of the material is identical with the group mark of material in the batch processing module
To the batch processing module；Otherwise, it is allowed to the material transferring to the batch processing module.
Preferably, the route control method, further comprising the steps of：
When the target location of current material is non-batch processing module, judge whether the target location has material；If
It is no, then the material transferring to the target location is allowed when with corresponding idle mechanical arm.
Preferably, the route control method, further comprising the steps of：
When the source position of current material is non-batch processing module, the target location of current material is inquired about；
When the target location of current material is batch processing module, judge whether there is material in the batch processing module；
If so, then allowing the material transferring when the group mark of the material is identical with the group mark of material in the batch processing module
To the batch processing module；Otherwise, it is allowed to the material transferring to the batch processing module；
When the target location of current material is non-batch processing module, judge whether the target location has material；If
It is no, then the material transferring to the target location is allowed when with corresponding idle mechanical arm.
Preferably, the preset rules also include that technique demarcates rule, and the technique demarcation rule is excellent for same packet
There are first level highest material preliminary processes to identify, and there is the minimum material of priority process to identify and rearmounted technique mark
Know；
Wherein, when there are material preliminary processes to identify, carried out before material transferring to the batch processing module preposition
Technique；
When there is material process to identify, process is carried out after material transferring to the batch processing module；
When material has rearmounted craft label, rearmounted technique is carried out from after the batch processing module in material.
Preferably, the batch processing module is the processing chamber of Films Prepared by APCVD APCVD equipment, the batch processing
Module includes heat deposition processing chamber and plasma assisted deposition processing chamber.
Supported while process the route control device of many sheet materials the embodiment of the invention also discloses a kind of, the route control
Device processed, including with lower module：
Processing chamber demarcating module, the processing chamber for will support to process many sheet materials simultaneously is labeled as batch processing mould
Block；
Material mark module, for being marked for material to be processed according to preset rules；Wherein, the default rule
Then include that group number demarcates rule and priority demarcates rule；The batch processing module has capacity, and the group number is demarcated rule and is
Material to be processed is divided into one or more packets according to the capacity of the batch processing module, the material of same packet has
Identical group is identified；The priority demarcates rule for the material in same packet is ranked up according to priority；The material
With source position and target location；
First source position judge module, for when the source position of current material is batch processing module, judging at described batch
Whether there is the minimum material of priority in reason module；If it is not, then calling the first permission module；
First allows module, for allowing the material to be left from the source position；
First object position judging module, for when the target location of current material is batch processing module, judging described
Whether there is material in batch processing module；If so, then calling the second permission module；Otherwise, the 3rd permission module is called；
Second allows module, identical with the group mark of material in the batch processing module for the group mark in the material
When allow the material transferring to the batch processing module；
3rd allows module, for allowing the material transferring to the batch processing module.
Preferably, the route control device, also including with lower module：
Second target location judge module, for when the target location of current material is non-batch processing module, judging institute
State whether target location has material；If it is not, then calling the 4th permission module；
4th allows module, for allowing the material transferring to the target position when with corresponding idle mechanical arm
Put.
Preferably, the route control device, also including with lower module：
Second source position enquiry module, for when the source position of current material is non-batch processing module, inquiring about current thing
The target location of material；
When the target location of current material is batch processing module, first object position judging module is called；
When the target location of current material is non-batch processing module, the second target location judge module is called.
Preferably, the preset rules also include that technique demarcates rule, and the technique demarcation rule is excellent for same packet
There are first level highest material preliminary processes to identify, and there is the minimum material of priority process to identify and rearmounted technique mark
Know；
Wherein, when there are material preliminary processes to identify, carried out before material transferring to the batch processing module preposition
Technique；
When there is material process to identify, process is carried out after material transferring to the batch processing module；
When material has rearmounted craft label, rearmounted technique is carried out from after the batch processing module in material.
Preferably, the batch processing module is the processing chamber of Films Prepared by APCVD APCVD equipment, the batch processing
Module includes heat deposition processing chamber and plasma assisted deposition processing chamber.
Compared with background technology, the present invention includes advantages below：
The mark of the processing chamber by supporting to process many sheet materials simultaneously of the invention, and group number demarcates regular, preferential
Level demarcates rule, and also technique demarcates the utilization of rule, realizes support processing chamber while processing the route control of many sheet materials
System so that the biography piece of apparatus for production line high-efficiency automatic, improves the yield of apparatus for production line.
Brief description of the drawings
Fig. 1 is of the invention a kind of supports while the step of processing the route test embodiment of many sheet materials flow chart；
Fig. 2 is a kind of structural representation of APCVD equipment of the invention；
Fig. 3 is a kind of materiel machining path flow diagram in the APCVD equipment shown in Fig. 2；
Fig. 4 is of the invention a kind of supports while processing the structured flowchart of the route control device embodiment of many sheet materials.
Specific embodiment
To enable above-mentioned purpose, the feature and advantage of the embodiment of the present invention more obvious understandable, below in conjunction with the accompanying drawings and
Specific embodiment is described in further detail to the embodiment of the present invention.
Reference picture 1, shows that a kind of of the embodiment of the present invention is supported while processing the route control method reality of many sheet materials
The step of applying flow chart, as shown in figure 1, a kind of route control method, comprises the following steps：
Step 101, will support that the processing chamber for processing many sheet materials simultaneously is labeled as batch processing module；
In implementing, can be marked in CONFIG.SYS can carry out the processing chamber of multi-disc processing, with area
The processing chamber of monolithic processing is not carried out, is called Batch Module.Certainly, in addition to Batch Module, the present invention is real
Applying example can also be to supporting the processing chamber of multi-disc processing for other are identified, as long as the technique that can carry out multi-disc processing can be distinguished
Chamber and the processing chamber of monolithic processing, the embodiment of the present invention are not any limitation as to this.
To make those skilled in the art more fully understand the present invention, APCVD equipment presented below illustrates this as an example
The application implementation process of inventive embodiments.
Reference picture 2, shows a kind of structural representation of APCVD equipment of the invention.As shown in Fig. 2 the APCVD bags
Include：
Two LoadPort：The container of loaded material, comprising multiple grooves, each groove can accommodate a sheet material, inside have
25 Slot（A position for placement material in the container of material can be placed）, wherein the material deposited includes 5 cun, 6 cun and 8
Very little three kinds of forms；
One LoadLock：One container that can be sealed, transmission material plays buffering between air and vacuum parts
Effect, can place 1 sheet material；
One ExternalValve：A valve between LoadPort and LoadLock, only when this valve is opened
Qi Shi, material could be transmitted between LoadPort and LoadLock；
One TC（Transfor Cambe）：Form vacuum environment, the chamber where vacuum end single arm robot, its periphery
Equipped with multiple processing chambers；
One InternalValve：A valve between LoadLock and TC, only when this valve opening,
Material could be transmitted between LoadLock and TC chambers；
One PM：Processing chamber, for carrying out corresponding technological operation, for various sizes of material, deposits in pallet
Material number it is also inconsistent.8 cun can at most put 5, and 6 cun can at most put 8, and 5 cun can at most put 10, in pallet
Position referred to as " Pocket " for depositing material；
One GateValve：Valve between TC and processing chamber, only when this valve opening, material ability
Transmitted between TC and PM；
One atmosphere end single arm robot, for the biography piece between LoadPort and LoadLock
One vacuum end single arm robot, for the material transferring between LoadLock and TC, and TC and PM.
Reference picture 3, shows a kind of materiel machining path flow diagram in the APCVD equipment shown in Fig. 2.As shown in figure 3,
The machining path of material can be：
1st, atmosphere end single arm robot（Robot）Material in LoadPort is placed into calibrator（Aligner）Colonel
It is accurate；
2nd, ExternalValve is opened；
3rd, atmosphere end single arm robot by material from LoadLock is moved on calibrator；
4th, LoadLock completes air pressure conversion；
5th, InternalValve is opened；
6th, vacuum end single arm robot takes piece from LoadLock；
7th, GateValve is opened；
8th, be placed into material in PM by vacuum end single arm robot；
9th, material is processed in PM；
10th, after completion of processing, GateValve is opened；
11st, vacuum end single arm robot takes out material from PM；
12nd, InternalValve is opened；
13rd, be placed into material in LoadLock by vacuum end single arm robot；
14th, LoadLock completes air pressure conversion；
15th, ExternalValve is opened；
16th, during material to move to from LoadLock atmosphere end single arm robot LoadPort.
Since then, material completes time processing.
In one preferred embodiment of the invention, the Batch Module are set for Films Prepared by APCVD APCVD
Standby processing chamber, the Batch Module include heat deposition processing chamber and plasma assisted deposition processing chamber.
Wherein, the heat deposition processing chamber, for carrying out heat deposition；
The plasma assisted deposition processing chamber, for carrying out plasma assisted deposition.
Step 102, is marked according to preset rules for material to be processed；
Specifically, the preset rules can include that group number demarcates rule and priority demarcates rule；
Wherein, the batch processing module has capacity；, it is the appearance according to the batch processing module that the group number demarcates rule
Material to be processed is divided into one or more packets by amount, and there is the material of same packet identical group to identify；
It should be noted that after device hardware determination, the capacity of BatchModule is the same.But user can be with
It is set in BatchModule to set and carries out technique processing using how many positions（Can if certain position is not provided with
Processed with the technique for carrying out material, then this position cannot place material）.
According to the capacity of Batch Module, material to be processed is grouped, the quantity of material is not in same packet
Can exceed that the capacity of Batch Module.For example, the capacity of Batch Module is C1, the 1st of material to be processed to the
C1 pieces are divided into one group, and group number is 1；C1+1 to 2C1 points is one group, and group number is 2；2C1+1 to 3C1 points is one group, and group number is
3, the rest may be inferred, is completed until material to be processed is grouped.
The priority demarcates rule for the material in same packet is ranked up according to priority；
In actual applications, sequence number can be set to material to be processed, divides preferential by sequence number size in same packet
Level；Wherein, the highest priority of the minimum material of sequence number, the priority of the maximum material of sequence number is minimum.
When the material of same packet is taken away from Batch Module, priority material high can first from Batch
Taken away in Module.
The material can have source position and target location；
In actual applications, can judge whether certain branch is feasible on search tree, the source position and target location are
The movement of the branch.
Whether step 103, when the source position of current material is batch processing module, judges have in the batch processing module
The minimum material of priority；If it is not, then performing step 104；
Step 104, it is allowed to which the material leaves from the source position；
When the source position of material is Batch Module, it is necessary to whole group material is taken away.In implementing, work as Batch
Last sheet material in Module not comprising current group（That is the minimum material of priority）, then for the loading for transporting
The all materials of the involved packets of Batch Module are contained in device, then this time movement is feasible；If Batch
Comprising last sheet material of involved group in Module, then in the loader that transports not comprising Batch Module
The all materials of involved packet, then this time movement is infeasible.
Whether step 105, when the target location of current material is batch processing module, judges have in the batch processing module
There is material；If so, then performing step 106, otherwise, step 107 is performed.
Step 106, institute is allowed when the group mark of the material is identical with the group mark of material in the batch processing module
State material transferring to the batch processing module；
Step 107, it is allowed to the material transferring to the batch processing module.
It should be noted that the source position of material can be Batch Module, or non-Batch Module.
If Batch Module（Target location）In there is no material, this time movement it is feasible；If in Batch Module
There is material, and the group mark of this material is identical with the material group mark in Batch Module, then and this time movement is feasible；Such as
There is material in fruit Batch Module, and the group mark of this material is differed with the group mark of material in Batch Module,
So this time movement is infeasible.
In one preferred embodiment of the invention, the route control method, can also comprise the following steps：
Step 108, when the target location of current material is non-batch processing module, judges whether the target location has
Material；If it is not, then performing step 109；
Step 109, allows the material transferring to the target location when with corresponding idle mechanical arm.
It should be noted that the source position of material can be Batch Module, or non-Batch Module.
There is no material and with corresponding idle mechanical arm when target location（It is responsible between the source position and target location
The idle mechanical arm of material transferring）When, it is allowed to the material transferring to the target location.
In one preferred embodiment of the invention, the route control method, can also comprise the following steps：
Step 110, when the source position of current material is non-batch processing module, inquires about the target location of current material；
When the target location of current material is batch processing module, step 105 is performed；
When the target location of current material is non-batch processing module, step 108 is performed.
When the source position of current material is non-Batch Module, then the target location that can be moved according to this is carried out
Judge, the embodiment of the present invention is no longer described in detail one by one herein.
In one preferred embodiment of the invention, the preset rules can also include that technique demarcates rule, the work
Skill demarcates rule for there are the material of the highest priority of same packet preliminary processes to identify, and the minimum material of priority had
Journey craft label and rearmounted craft label；
Wherein, when there are material preliminary processes to identify, carried out before material transferring to the batch processing module preposition
Technique；
When there is material process to identify, process is carried out after material transferring to the batch processing module；
When material has rearmounted craft label, rearmounted technique is carried out from after the batch processing module in material.
It is appreciated that in same packet, except there is preliminary processes PreRecipe marks, preferential in the material of highest priority
There is the minimum material of level process ProcessRecipe to identify and rearmounted technique PostRecipe marks are outer, other piece things
Material is in the absence of craft label.
It should be noted that when the material of same packet carries out technique processing in Batch Module, processing can be
Carry out simultaneously.When there is material preliminary processes PreRecipe to identify, can be before material transferring to Batch Module
The preliminary processes Recipe for carrying out.It should be noted that the preliminary processes Batch corresponding to different Batch Module
Module can be specifically configured by user, can be sky in some cases.
When material have process ProcessRecipe identify when, can material transferring to Batch Module it
The process Recipe for carrying out afterwards.It should be noted that the process Batch corresponding to different Batch Module
Module can be specifically configured by user, can be in some cases sky.
It should be noted that when there is material rearmounted technique PostRecipe to identify, can be in material from Batch
Take the rearmounted technique Recipe for carrying out afterwards in Module away.It should be noted that corresponding to different Batch Module
Rearmounted technique Batch Module can be specifically configured by user, can be in some cases sky.
So for the material in same packet, if this group of material will be put into Batch Module, except the 1st
（That is highest priority）There is material preliminary processes PreRecipe to identify, and other materials are in the absence of preliminary processes PreRecipe
Mark.Because if also be present preliminary processes PreRecipe marks in other materials, such as X sheet materials, then just occur
Material 1 to X-1 pieces is placed in Batch Module, the preliminary processes Recipe of X pieces can act on Batch Module
In 1 to X-1 pieces, this is not allowed.
For similarly for the material in same packet, if this group of material will be put into Batch Module, except last
It is a piece of（I.e. priority is minimum）There is material process ProcessRecipe to identify and rearmounted technique PostRecipe marks,
Other materials are identified and/or rearmounted technique PostRecipe marks in the absence of process ProcessRecipe.If because
Also there is process ProcessRecipe marks in other materials, such as X sheet materials, X+1 pieces there is also process
ProcessRecipe is identified, then X sector-meetings carry out process ProcessRecipe processing twice, and this is incorrect；If
There is rearmounted technique PostRecipe marks in other sheet materials, such as X sheet materials, X+1 pieces there is also rearmounted craft label,
After so taking this group of material away in Batch Module, it may appear that repeatedly rearmounted technique processing, this is also not allow.
For embodiment of the method, in order to be briefly described, therefore it is all expressed as a series of combination of actions, but this area
Technical staff should know that the embodiment of the present invention is not limited by described sequence of movement, because implementing according to the present invention
Example, some steps can sequentially or simultaneously be carried out using other.Secondly, those skilled in the art should also know, specification
Described in embodiment belong to preferred embodiment, necessary to the involved action not necessarily embodiment of the present invention.
Reference picture 4, shows that a kind of of the embodiment of the present invention is supported while processing the route control device reality of many sheet materials
The structured flowchart of example is applied, as illustrated, the system, can include with lower module：
Processing chamber demarcating module 401, the processing chamber for will support to process many sheet materials simultaneously is labeled as batch processing
Module；
Material mark module 402, for being marked for material to be processed according to preset rules；Wherein, it is described pre-
If rule includes that group number demarcates rule and priority demarcates rule；The batch processing module has capacity, and the group number demarcates rule
It is then that material to be processed is divided into one or more packets, the material of same packet according to the capacity of the batch processing module
With identical group mark；The priority demarcates rule for the material in same packet is ranked up according to priority；It is described
Material has source position and target location；
First source position judge module 403, for when the source position of current material is batch processing module, judging described batch
Whether there is the minimum material of priority in processing module；If it is not, then calling the first permission module 404；
First allows module 404, for allowing the material to be left from the source position；
First object position judging module 405, for when the target location of current material is batch processing module, judging institute
Whether state in batch processing module has material；If so, then calling the second permission module 406；Otherwise, the 3rd permission module is called
407；
Second allows module 406, is identified for the group mark in the material and the group of material in the batch processing module
The material transferring to the batch processing module is allowed when identical；
3rd allows module 407, for allowing the material transferring to the batch processing module.
In one preferred embodiment of the invention, the route control device, can also include with lower module：
Second target location judge module, for when the target location of current material is non-batch processing module, judging institute
State whether target location has material；If it is not, then calling the 4th permission module；
4th allows module, for allowing the material transferring to the target position when with corresponding idle mechanical arm
Put.
In one preferred embodiment of the invention, the route control device, can also include with lower module：
Second source position enquiry module, for when the source position of current material is non-batch processing module, inquiring about current thing
The target location of material；
When the target location of current material is batch processing module, first object position judging module is called；
When the target location of current material is non-batch processing module, the second target location judge module is called.
In one preferred embodiment of the invention, the preset rules can also include that technique demarcates rule, the work
Skill demarcates rule for there are the material of the highest priority of same packet preliminary processes to identify, and the minimum material of priority had
Journey craft label and rearmounted craft label；
Wherein, when there are material preliminary processes to identify, carried out before material transferring to the batch processing module preposition
Technique；
When there is material process to identify, process is carried out after material transferring to the batch processing module；
When material has rearmounted craft label, rearmounted technique is carried out from after the batch processing module in material.
In one preferred embodiment of the invention, the batch processing module is Films Prepared by APCVD APCVD equipment
Processing chamber, the batch processing module include heat deposition processing chamber and plasma assisted deposition processing chamber.
For device embodiment, because it is substantially similar to embodiment of the method, so description is fairly simple, it is related
Part is illustrated referring to the part of embodiment of the method.
Each embodiment in this specification is described by the way of progressive, what each embodiment was stressed be with
The difference of other embodiment, between each embodiment identical similar part mutually referring to.
Although having been described for the preferred embodiment of the embodiment of the present invention, those skilled in the art once know base
This creative concept, then can make other change and modification to these embodiments.So, appended claims are intended to be construed to
Including preferred embodiment and fall into having altered and changing for range of embodiment of the invention.
Finally, in addition it is also necessary to explanation, herein, such as first and second or the like relational terms be used merely to by
One entity or operation make a distinction with another entity or operation, and not necessarily require or imply these entities or operation
Between there is any this actual relation or order.And, term " including ", "comprising" or its any other variant meaning
Covering including for nonexcludability, so that process, method, article or mobile device including a series of key elements are not only wrapped
Those key elements, but also other key elements including being not expressly set out are included, or also includes being this process, method, article
Or the intrinsic key element of mobile device.In the absence of more restrictions, by wanting that sentence "including a ..." is limited
Element, it is not excluded that also there is other identical element in the process including the key element, method, article or mobile device.
The embodiment of the present invention is provided above it is a kind of support and meanwhile process many sheet materials route control method and
It is a kind of to support while process the route control device of many sheet materials, to be described in detail, specific case pair used herein
The principle and implementation method of the embodiment of the present invention are set forth, and the explanation of above example is only intended to help and understands the present invention
The method and its core concept of embodiment；Simultaneously for those of ordinary skill in the art, according to the think of of the embodiment of the present invention
Think, will change in specific embodiments and applications, in sum, it is right that this specification content should not be construed as
The limitation of the embodiment of the present invention.
Claims (10)
1. it is a kind of to support while processing the route control method of many sheet materials, it is characterised in that the route control method, including
Following steps：
To support that the processing chamber for processing many sheet materials simultaneously is labeled as batch processing module；
It is marked for material to be processed according to preset rules；Wherein, the preset rules include group number demarcate rule and
Priority demarcates rule；The batch processing module has capacity, and it is according to the batch processing module that the group number demarcates rule
Material to be processed is divided into one or more packets by capacity, and there is the material of same packet identical group to identify；It is described excellent
First level demarcates rule for the material in same packet is ranked up according to priority；The material has source position and target position
Put；
When the source position of current material is batch processing module, judge whether have priority minimum in the batch processing module
Material；If it is not, then allowing the material to be left from the source position；
When the target location of current material is batch processing module, judge whether there is material in the batch processing module；If so,
Then the material transferring to institute is allowed when the group mark of the material is identical with the group mark of material in the batch processing module
State batch processing module；Otherwise, it is allowed to the material transferring to the batch processing module.
2. it is according to claim 1 to support while processing the route control method of many sheet materials, it is characterised in that the road
It is further comprising the steps of by control method：
When the target location of current material is non-batch processing module, judge whether the target location has material；If it is not, then
The material transferring to the target location is allowed when with corresponding idle mechanical arm.
3. it is according to claim 1 to support while processing the route control method of many sheet materials, it is characterised in that the road
It is further comprising the steps of by control method：
When the source position of current material is non-batch processing module, the target location of current material is inquired about；
When the target location of current material is batch processing module, judge whether there is material in the batch processing module；If so,
Then the material transferring to institute is allowed when the group mark of the material is identical with the group mark of material in the batch processing module
State batch processing module；Otherwise, it is allowed to the material transferring to the batch processing module；
When the target location of current material is non-batch processing module, judge whether the target location has material；If it is not, then
The material transferring to the target location is allowed when with corresponding idle mechanical arm.
4. it is according to claim 1 to support while processing the route control method of many sheet materials, it is characterised in that described pre-
If rule also includes that technique demarcates rule, it is preposition for the material of the highest priority of same packet has that the technique demarcates rule
There is craft label, the minimum material of priority process to identify and rearmounted craft label；
Wherein, when there are material preliminary processes to identify, preliminary processes were carried out before material transferring to the batch processing module；
When there is material process to identify, process is carried out after material transferring to the batch processing module；
When material has rearmounted craft label, rearmounted technique is carried out from after the batch processing module in material.
5. it is according to claim 1 to support while processing the route control method of many sheet materials, it is characterised in that described batch
Processing module is the processing chamber of Films Prepared by APCVD APCVD equipment, and the batch processing module includes heat deposition process cavity
Room and plasma assisted deposition processing chamber.
6. it is a kind of to support while processing the route control device of many sheet materials, it is characterised in that the route control device, including
With lower module：
Processing chamber demarcating module, the processing chamber for will support to process many sheet materials simultaneously is labeled as batch processing module；
Material mark module, for being marked for material to be processed according to preset rules；Wherein, the preset rules bag
Include group number and demarcate rule and priority demarcation rule；The batch processing module has capacity, and it is foundation that the group number demarcates rule
Material to be processed is divided into one or more packets by the capacity of the batch processing module, and the material of same packet has identical
Group mark；The priority demarcates rule for the material in same packet is ranked up according to priority；The material has
Source position and target location；
First source position judge module, for when the source position of current material is batch processing module, judging the batch processing mould
Whether there is the minimum material of priority in block；If it is not, then calling the first permission module；
First allows module, for allowing the material to be left from the source position；
First object position judging module, for when the target location of current material is batch processing module, judging at described batch
Whether there is material in reason module；If so, then calling the second permission module；Otherwise, the 3rd permission module is called；
Second allows module, for permitting when the group mark of the material is identical with the group mark of material in the batch processing module
Perhaps described material transferring is to the batch processing module；
3rd allows module, for allowing the material transferring to the batch processing module.
7. it is according to claim 6 to support while processing the route control device of many sheet materials, it is characterised in that the road
By control device, also including with lower module：
Second target location judge module, for when the target location of current material is non-batch processing module, judging the mesh
Whether cursor position has material；If it is not, then calling the 4th permission module；
4th allows module, for allowing the material transferring to the target location when with corresponding idle mechanical arm.
8. it is according to claim 7 to support while processing the route control device of many sheet materials, it is characterised in that the road
By control device, also including with lower module：
Second source position enquiry module, for when the source position of current material is non-batch processing module, inquiring about current material
Target location；
When the target location of current material is batch processing module, first object position judging module is called；
When the target location of current material is non-batch processing module, the second target location judge module is called.
9. it is according to claim 6 to support while processing the route control device of many sheet materials, it is characterised in that described pre-
If rule also includes that technique demarcates rule, it is preposition for the material of the highest priority of same packet has that the technique demarcates rule
There is craft label, the minimum material of priority process to identify and rearmounted craft label；
Wherein, when there are material preliminary processes to identify, preliminary processes were carried out before material transferring to the batch processing module；
When there is material process to identify, process is carried out after material transferring to the batch processing module；
When material has rearmounted craft label, rearmounted technique is carried out from after the batch processing module in material.
10. it is according to claim 6 to support while processing the route control device of many sheet materials, it is characterised in that described
Batch processing module is the processing chamber of Films Prepared by APCVD APCVD equipment, and the batch processing module includes heat deposition technique
Chamber and plasma assisted deposition processing chamber.
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Beijing, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |