CN107870405B - Multi-degree-of-freedom optical precision adjusting table - Google Patents
Multi-degree-of-freedom optical precision adjusting table Download PDFInfo
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- CN107870405B CN107870405B CN201711264075.0A CN201711264075A CN107870405B CN 107870405 B CN107870405 B CN 107870405B CN 201711264075 A CN201711264075 A CN 201711264075A CN 107870405 B CN107870405 B CN 107870405B
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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Abstract
The application discloses a multi-degree-of-freedom optical precision adjusting table, which comprises: the adjusting table main body comprises a first rotating plate, a second rotating plate, a first sliding plate, a second sliding plate, a third rotating plate and a bottom plate which are sequentially arranged from top to bottom; θz steering engine assembly; a θy steering engine assembly; an X-direction steering engine component; a Z-direction steering engine assembly and a theta x-direction steering engine assembly. According to the application, the steering engine is introduced into the structure of the precise adjusting table, so that the characteristics of simplicity in steering engine control, low cost and the like are skillfully utilized, and the high-precision multi-degree-of-freedom adjustment of the adjusting table is realized; the application has the advantages of simple and small structure, good self-locking performance, high stability, wide application range, high adjustment precision, simple control, low production cost and wide market prospect, and can adapt to the load of the slender strips.
Description
Technical Field
The application relates to the field of adjusting table equipment, in particular to an optical precision adjusting table with multiple degrees of freedom.
Background
In a large-view-field phase contrast CT imaging system, spatial position adjustment is required to be carried out on a core component, namely three cylindrical gratings, so that the spatial relative position accuracy in a physical index is ensured. The adjusting table below the cylindrical grating is required to meet the requirement of the assembly on space, has exquisite structure and low gravity center, has five degrees of freedom (except in the plumb direction), has adjusting sensitivity which is better than 1 mu m for translational adjustment, can bear 10kg load of slender strip load, has better stability and dynamic performance when placed on a large turntable, and is preferably unmanned to realize the adjustment in the X-ray environment.
There are many optical precision adjustment tables in the present market, and the product is various, and the commonality is good, and modularized design but:
1. the object stage of the existing product is square, and is not suitable for long and thin strip heavy load;
2. for the implementation of multiple degrees of freedom, the existing product usually assembles the modules with various degrees of freedom, which can cause large volume, complex structure and high gravity center;
3. the existing products are usually applied to fixed platforms, such as optical platforms, and have poor stability for moving platforms (such as a turntable in CT);
4. the existing products adopt guide rails for realizing stable and crawling-free movement, but gaps exist in locking, and particularly the existing products are easy to change under heavy load and rotation;
5. the existing products are of various types and are provided with a motor to realize remote operation adjustment, but an irregular heavy-load adjusting table is large in size, complex in structure and high in gravity center, a driver controller is required to be configured, and the system is high in cost and uneconomical.
Along with the development of steering engine technology, especially the birth of digital serial port steering engine, the application of steering engine no longer is limited to toy, model aeroplane and model ship, robot field. The steering engine is based on the original large torque, and the position feedback sensor is replaced by an encoder by the original potentiometer, so that the position feedback accuracy can be improved, the motion resolution of the steering engine can be improved, and more importantly, the steering engine can be changed into continuous rotation from the original stroke of 180 degrees. The serial communication omits an expensive controller in a common multi-freedom system, and has simple control, low cost and at most 200 paths of motors can be controlled simultaneously. In the prior art, however, there is little technology for using steering engines in actuating mechanisms in optical precision machines.
Disclosure of Invention
The application aims to solve the technical problem of providing the multi-degree-of-freedom optical precision adjusting table aiming at the defects in the prior art.
The steering engine is based on the original large torque, and the position feedback sensor is replaced by an encoder by the original potentiometer, so that the position feedback accuracy can be improved, the motion resolution of the steering engine is improved, and more importantly, the steering engine can be changed into continuous rotation from the original 180-degree stroke. The serial communication omits an expensive controller in a common multi-freedom system, and has simple control, low cost and at most 200 paths of motors can be controlled simultaneously. The application successfully tracks the development of steering engines in the robot technology and successfully applies the steering engines to actuating mechanisms in optical precision machinery. This provides a new idea for low cost automated adjustment of optical precision machinery.
In order to solve the technical problems, the application adopts the following technical scheme: an optical precision adjustment stage with multiple degrees of freedom, comprising:
the adjusting table main body comprises a first rotating plate, a second rotating plate, a first sliding plate, a second sliding plate, a third rotating plate and a bottom plate which are sequentially arranged from top to bottom;
the theta Z direction steering engine assembly is used for driving the first rotating plate to rotate around the Z axis direction and comprises a theta Z direction steering engine, a theta Z direction adjusting mechanism and a first arc-shaped guide rail mechanism arranged between the first rotating plate and the second rotating plate;
the theta Y steering engine assembly is used for driving the second rotating plate to rotate around the Y-axis direction and comprises a theta Y steering engine and a theta Y adjusting mechanism;
the X-direction steering engine assembly is used for driving the first sliding plate to move along the X direction and comprises an X-direction steering engine and an X-direction adjusting mechanism;
the Z-direction steering engine assembly is used for driving the second sliding plate to move along the Z direction and comprises a Z-direction steering engine and a Z-direction adjusting mechanism;
and the theta X direction steering engine assembly is used for driving the third rotating plate to rotate around the X axis direction and comprises a theta X direction steering engine, a theta X direction adjusting mechanism and a second arc-shaped guide rail mechanism arranged between the third rotating plate and the bottom plate.
Preferably, the θz direction adjusting mechanism comprises a first nut seat fixedly connected to the second rotating plate, a first screw with one end connected to the output end of the θz direction steering engine and the other movable end matched with the output end of the θz direction steering engine, the first screw is inserted in a first nut hole formed in the first nut seat, and a first bearing seat fixedly connected to the first rotating plate, a first top ball is fixedly connected to the movable end of the first screw, a first clamping hole for the first top ball to be matched and inserted is formed in the first bearing seat, and the first top ball is rotatably clamped in the first clamping hole.
Preferably, the first arc-shaped guide rail mechanism comprises a first lower guide rail fixedly connected to the second rotating plate, a first upper sliding block, a first holding frame and a first steel ball, wherein the upper surface of the first lower guide rail is arc-shaped, the first upper sliding block is slidably arranged on the first lower guide rail, the bottom surface of the first upper sliding block is arc-shaped, the first holding frame is arc-shaped and arranged between the first upper sliding block and the first lower guide rail, and the first steel ball is filled in the first holding frame; the first upper sliding block is fixedly connected with the first rotating plate.
Preferably, the side portion of the first arc-shaped guide rail mechanism is provided with a first locking mechanism, the first locking mechanism comprises a first lower locking block fixedly connected to the second rotating plate, the upper surface of the first lower locking block is arc-shaped, a first upper locking block fixedly connected to the first rotating plate, the lower surface of the first upper locking block is arc-shaped, and a first arc-shaped patch, the bottom surface of the first arc-shaped patch is arc-shaped, the first upper locking block is provided with a first opening for accommodating the first arc-shaped patch, and the first opening is formed between the first upper locking block and the first lower locking block.
Preferably, the second rotating plate is connected to the first sliding plate through a rotating shaft assembly, a second retainer is arranged between the second rotating plate and the first sliding plate, a second steel ball is filled in the second retainer, and a first locking screw is arranged on the second rotating plate; the θy direction adjusting mechanism comprises a second nut seat fixed on the first sliding plate, a second screw, one end of which is connected with the output end of the θy direction steering engine, and the other movable end of which is matched and inserted in a second nut hole formed in the second nut seat, and a second bearing seat fixedly connected on the second rotating plate; a second top ball is fixedly connected to the movable end of the second screw, and an arc-shaped bearing plate matched and propped with the second top ball is fixedly connected to the second bearing seat; the second bearing seat is fixedly connected with a first return spring, and the other end of the first return spring is connected with the first sliding plate.
Preferably, the first sliding plate is slidably arranged on the second sliding plate, a third retainer is arranged between the first sliding plate and the second sliding plate, and third steel balls are filled in the third retainer; the first sliding plate is provided with a second locking screw; the X-direction adjusting mechanism comprises a third nut seat fixedly connected to the second sliding plate and a third screw, one end of the third screw is connected with the output end of the X-direction steering engine, the other movable end of the third screw is matched with the output end of the X-direction steering engine, the third screw is inserted into a third nut hole formed in the third nut seat, a third top ball is fixedly connected to the third screw, and the third top ball is propped against the side end of the first sliding plate; and a second return spring is connected between the first sliding plate and the second sliding plate.
Preferably, the second sliding plate is slidably arranged on the third rotating plate, a fourth retainer is arranged between the second sliding plate and the third rotating plate, a fourth steel ball is filled in the fourth retainer, and a third locking screw is arranged on the second sliding plate; the Z-direction adjusting mechanism comprises a fourth nut seat fixedly connected to the third rotating plate and a fourth screw, one end of the fourth screw is connected with the output end of the Z-direction steering engine, the other movable end of the fourth screw is matched with the fourth nut seat, the fourth screw is inserted into a fourth nut hole formed in the fourth nut seat, a fourth top ball is fixedly connected to the fourth screw, and the fourth top ball is propped against the side end of the second sliding plate; and a third return spring is connected between the second sliding plate and the third rotating plate.
Preferably, the θx direction adjustment mechanism comprises a fifth nut seat fixedly connected to the bottom plate, a fifth screw with one end connected to the output end of the θx direction steering engine and the other movable end matched with the output end of the θx direction steering engine, the fifth screw is inserted in a fifth nut hole formed in the fifth nut seat, and a third bearing seat fixedly connected to the third rotating plate, a fifth top ball is fixedly connected to the movable end of the fifth screw, a second clamping hole for the fifth top ball to be matched and inserted is formed in the third bearing seat, and the fifth top ball is rotatably clamped in the second clamping hole.
Preferably, the second arc-shaped guide rail mechanism comprises a second lower guide rail fixedly connected to the third rotating plate and provided with an arc-shaped upper surface, a second upper sliding block which is slidably arranged on the second lower guide rail and provided with an arc-shaped bottom surface, a fifth arc-shaped holding frame arranged between the second upper sliding block and the second lower guide rail, and a fifth steel ball filled in the fifth holding frame; the second upper sliding block is fixedly connected with the third rotating plate;
preferably, the side portion of the second arc-shaped guide rail mechanism is provided with a second locking mechanism, the second locking mechanism comprises a second lower locking block fixedly connected to the bottom plate and provided with an arc-shaped upper locking block, a second upper locking block fixedly connected to the third rotating plate and provided with an arc-shaped lower surface, and a second arc-shaped patch provided between the second upper locking block and the second lower locking block and provided with an arc-shaped bottom surface, and the second upper locking block is provided with a second opening for accommodating the second arc-shaped patch.
Preferably, the first locking screw, the second locking screw and the third locking screw all adopt improved low-degree-of-freedom screws, the improved low-degree-of-freedom screws comprise screw bodies, gaskets and miniature thrust ball bearings, the gaskets and the miniature thrust ball bearings are sleeved on the screw bodies, the screw bodies comprise screw heads, smooth thin rods connected with the screw heads, threaded rods connected to the other ends of the smooth thin rods, and the gaskets and the miniature thrust ball bearings are sequentially sleeved on the smooth thin rods.
The beneficial effects of the application are as follows: according to the application, the steering engine is introduced into the structure of the precise adjusting table, so that the characteristics of large steering engine moment, small volume, light weight, simple control, low cost and the like are skillfully utilized, and the high-precision multi-degree-of-freedom adjustment of the adjusting table is realized; by adopting the improved low-degree-of-freedom screw, the offset of the part to be locked caused in the locking process can be avoided, the assembly precision is ensured, and the locking effect is improved; the application has the advantages of simple and small structure, good self-locking performance, high stability, wide application range, high adjustment precision, simple control, low production cost and wide market prospect, and can adapt to the load of the slender strips.
Drawings
FIG. 1 is a schematic view of a multi-degree of freedom optical precision adjusting stage according to the present application;
FIG. 2 is an exploded view of the multi-degree of freedom optical precision adjustment stage of the present application;
FIG. 3 is a schematic diagram of the cooperation of a first rotor plate and a second rotor plate according to the present application;
FIG. 4 is a schematic view of the structure of the θz steering engine assembly of the present application;
FIG. 5 is a schematic diagram of the cooperation of the second rotating plate and the first sliding plate according to the present application;
FIG. 6 is a schematic diagram of the steering engine assembly in the θy direction of the application;
FIG. 7 is a schematic illustration of the mating of a first slide plate and a second slide plate of the present application;
FIG. 8 is a schematic structural view of an X-direction steering engine assembly of the present application;
FIG. 9 is a schematic diagram of the cooperation of the second slide plate and the third rotating plate according to the present application;
FIG. 10 is a schematic structural view of the Z-direction steering engine assembly of the present application;
FIG. 11 is a schematic diagram of the cooperation of a third rotor plate and a bottom plate of the present application;
FIG. 12 is a schematic view of the construction of the θx steering engine assembly of the present application;
FIG. 13 is a schematic view of a modified low-degree-of-freedom screw according to the present application;
fig. 14 is a schematic diagram showing the cooperation of the improved low-degree-of-freedom screw of the present application and the component to be locked.
Reference numerals illustrate:
1-an adjusting table main body; 2-theta z direction steering engine assembly; 3-theta y steering engine component; 4-X direction steering engine component; 5-Z direction steering engine component; 6-theta x direction steering engine component;
10-a first rotating plate; 11-a second rotating plate; 12-a first slide plate; 13-a second slide; 14-a third rotating plate; 15-a bottom plate; 110-a second cage; 111-a second steel ball; 112-a first locking screw; 113-a spindle assembly; 120-a third cage; 121-a third steel ball; 122-a second locking screw; 130-fourth cage; 131-fourth steel ball; 132—a third locking screw;
20-theta z direction steering engine; 21- θz direction adjustment mechanism; 22-a first arcuate guide rail mechanism; 23-a first nut seat; 24-a first nut hole; 25-a first screw; 26-a first socket; 27-a first kicking ball; 28-a first clamping hole; 29-a first locking mechanism; 220-a first lower rail; 221-a first upper slider; 222-a first cage; 223—a first steel ball; 290-a first lower locking block; 291-first upper lock block; 292-a first arcuate patch; 293-a first aperture;
30-theta y steering engine; 31- θy direction adjusting mechanism; 32-a second nut seat; 33-a second screw; 34—a second nut hole; 35-second top ball; 36-a second socket; 37-an arc-shaped receiving plate; 38-a first return spring;
40-X direction steering engine; 41-X direction adjusting mechanism; 42-a third nut seat; 43—a third screw; 44—a third nut hole; 45-third top ball; 46-a second return spring;
50-Z direction steering engine; 51-Z direction adjustment mechanism; 52-a fourth nut seat; 53-fourth screw; 54-fourth nut hole; 55-fourth top ball; 56—a third return spring;
60-theta x direction steering engine; 61- θx direction adjustment mechanism; 62-a second arcuate guide rail mechanism; 63-a fifth nut mount; 64-a fifth nut hole; 65-a fifth screw; 66-a third socket; 67-fifth top ball; 68-a second clamping hole; 69-a second locking mechanism; 620-a second lower rail; 621-a second upper slider; 622-a fifth cage; 623-a fifth steel ball; 690-second lower locking block; 691-a second upper locking block; 692-a second arcuate patch; 693—a second opening;
70-a screw body; 71-screw head; 72-smooth thin rod; 73-a threaded rod; 74-a gasket; 75-miniature thrust ball bearing.
Detailed Description
The present application is described in further detail below with reference to examples to enable those skilled in the art to practice the same by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
The X direction, Y direction, Z direction, θy direction, θz direction and θx direction in the present application are all referred to in the directions shown in the three-axis coordinate system in fig. 1, and are only for convenience of description and illustration of the present application, and are not to be construed as limiting the present application. The description of the front direction, the rear direction and the like also refers to the direction in which the steering engine drives the screw to horizontally move, so that the application is convenient to describe and understand.
As shown in fig. 1 to 13, a multi-degree-of-freedom optical precision adjusting stage of the present embodiment includes:
an adjusting table main body 1 including a first rotating plate 10, a second rotating plate 11, a first sliding plate 12, a second sliding plate 13, a third rotating plate 14 and a bottom plate 15 which are sequentially arranged from top to bottom;
the θz steering engine assembly 2 is used for driving the first rotating plate 10 to rotate around the Z-axis direction, and comprises a θz steering engine 20, a θz adjusting mechanism 21 and a first arc-shaped guide rail mechanism 22 arranged between the first rotating plate 10 and the second rotating plate 11;
the θy steering engine assembly 3 is used for driving the second rotating plate 11 to rotate around the Y-axis direction and comprises a θy steering engine 30 and a θy adjusting mechanism 31;
an X-direction steering engine assembly 4 for driving the first slide plate 12 to move in the X-direction, which includes an X-direction steering engine 40 and an X-direction adjustment mechanism 41;
the Z-direction steering engine assembly 5 is used for driving the second sliding plate 13 to move along the Z direction and comprises a Z-direction steering engine and a Z-direction adjusting mechanism 51;
the θx direction steering engine assembly 6 is configured to drive the third rotating plate 14 to rotate about the X axis, and includes a θx direction steering engine 60, a θx direction adjustment mechanism 61, and a second arc-shaped guide rail mechanism 62 disposed between the third rotating plate 14 and the bottom plate 15.
Thereby realizing the adjustment of the adjusting table in five directions. Fig. 2 shows an exploded view of the multi-degree of freedom optical precision adjustment stage of the present application, wherein the various steering engines are not shown.
The θz direction adjusting mechanism 21 comprises a first nut seat 23 fixedly connected to the second rotating plate 11, a first screw 25 with one end connected with the output end of the θz direction steering engine 20 and the other movable end matched with the output end of the θz direction steering engine, the first screw 25 is inserted in a first nut hole 24 formed in the first nut seat 23, and a first bearing seat 26 fixedly connected to the first rotating plate 10, a first top ball 27 is fixedly connected to the movable end of the first screw 25, a first clamping hole 28 for the first top ball 27 to be matched and inserted is formed in the first bearing seat 26, and the first top ball 27 is rotatably clamped in the first clamping hole 28. That is, the first top ball 27 can freely rotate in the first clamping hole 28, but the back-and-forth movement is limited, so that the back-and-forth movement of the first top ball 27 drives the first bearing seat 26 and the first rotating plate 10 to move back and forth.
The first arc-shaped guide rail mechanism 22 comprises a first lower guide rail 220 fixedly connected to the second rotating plate 11, the upper surface of which is arc-shaped, a first upper sliding block 221 slidably arranged on the first lower guide rail 220, the bottom surface of which is arc-shaped, a first retainer 222 arranged between the first upper sliding block 221 and the first lower guide rail 220 and a first steel ball 223 filled in the first retainer 222; the first upper slider 221 is fixedly connected with the first rotating plate 10. The first upper slider 221 slides in an arc on the first lower rail 220, and the first arc-shaped rail mechanism 22 restricts the back-and-forth movement of the first rotating plate 10 on the second rotating plate 11 to an arc-shaped movement, thereby effecting rotation of the first rotating plate 10 on the second rotating plate 11 about the Z-axis direction (rotation in the θz direction).
In one embodiment, the first arcuate rail mechanism 22 includes two connected side-by-side.
Referring to fig. 4, the output end of the steering engine 20 in the θz direction is pinned with a first screw 25 to drive the first screw 25 to rotate, and under the limiting action of the first nut seat 23, the first screw 25 simultaneously steps left or right to drive the first top ball 27 to horizontally move left or right, so that the rotational movement is converted into horizontal movement; the first top ball 27 drives the first rotating plate 10 to move left and right, and under the limiting action of the first arc-shaped guide rail mechanism 22, the first rotating plate 10 moves in an arc shape, so that the first rotating plate 10 rotates around the Z-axis direction. For example, under the limiting action of the first nut seat 23 which is driven and fixed by the steering engine 20 in the θz direction, the first screw 25 rotates and steps to the right to drive the first top ball 27 to move to the right, the first top ball 27 pushes against the first bearing seat 26, the first bearing seat 26 contacts with the first top ball 27 through a cylindrical surface, the linear motion of the first top ball 27 is converted into the rotation of the first bearing seat 26, the rotation of the first top ball 27 is filtered, and therefore the first rotating plate 10 is pushed to move to the right in an arc shape through the first top ball 27, the right end of the first rotating plate 10 is tilted up, and the left end falls down to generate rotation around the Z axis direction. When the steering engine 20 in the θz direction reverses to drive the first top ball 27 to move leftwards, the first top ball 27 is clamped in the first clamping hole 28 on the first bearing seat 26, so that the first rotating plate 10 can be driven to do return motion, namely move leftwards, and the return power of the first rotating plate 10 is improved.
The first arc guide rail mechanism 22 lateral part is provided with first locking mechanism 29, and first locking mechanism 29 is including rigid coupling on second swivel plate 11 and upper surface be curved first latch segment 290, rigid coupling on first swivel plate 10 and lower surface be curved first latch segment 291 and set up and be curved first arc paster 292 in the bottom surface between first latch segment 291 and first latch segment 290, offer the first trompil 293 that is used for holding first arc paster 292 on the first latch segment 291. The first locking mechanism 29 is used for locking the first rotating plate 10 and the second rotating plate 11; when not locked, the first arcuate patch 292 and the first upper lock 291 can cooperate to move arcuately over the first lower lock 290 in response to the arcuate movement of the first rotor plate 10.
When the first rotating plate 10 and the second rotating plate 11 are not locked, the first steel ball 223 jacks up the first upper sliding block 221, so that a small gap is reserved between the first upper sliding block 221 and the first lower guide rail 220, friction force between the first upper sliding block 221 and the first lower guide rail 220 can be reduced, arc sliding of the first upper sliding block 221 on the first lower guide rail 220 is facilitated, creeping phenomenon is avoided, relative movement of the first rotating plate 10 and the second rotating plate 11 can be smoothly carried out, and stepping can be kept to be good in linearity. When the θz angle is adjusted and locking is needed, the first arc patch 292 between the first upper locking block 291 and the first lower locking block 290 is tightly attached to the first upper locking block 291 by tightening a screw (not shown in the figure) on the first upper locking block 291 to press the first upper locking block 291, and then the first upper locking block 291 is tightly attached to the first lower locking block 290, so that the first rotating plate 10 and the second rotating plate 11 are locked to maintain fixation.
The second rotating plate 11 is connected to the first sliding plate 12 through a rotating shaft assembly 113, a second retainer 110 is arranged between the second rotating plate 11 and the first sliding plate 12, a second steel ball 111 is filled in the second retainer 110, and a first locking screw 112 is arranged on the second rotating plate 11.
The first locking screw 112 is used to lock and fix the second rotating plate 11 to the first sliding plate 12 after the rotation angle of the second rotating plate 11 is adjusted, so as to keep stable. The second retainer 110 and the second steel ball 111 are arranged between the second rotating plate 11 and the first sliding plate 12, when the second rotating plate 11 and the first sliding plate 12 are not locked, the second steel ball 111 jacks up the second rotating plate 11, so that a small gap exists between the second rotating plate 11 and the first sliding plate 12, and rolling friction is used for replacing sliding friction, so that sliding friction between the second rotating plate 11 and the first sliding plate 12 is reduced, the crawling effect is reduced, the relative movement of the second rotating plate 11 and the first sliding plate 12 can be smoothly carried out, and the stepping can be kept to be good in linearity. When the locking is needed, the first locking screws 112 at the four corners of the second rotating plate 11 are screwed, and at this time, the second rotating plate 11 is tightly attached to the first sliding plate 12 and kept fixed.
The θy direction adjusting mechanism 31 comprises a second nut seat 32 fixed on the first sliding plate 12, a second screw 33 with one end connected with the output end of the θy direction steering engine 30 and the other movable end matched and inserted in a second nut hole 34 formed on the second nut seat 32, and a second bearing seat 36 fixedly connected on the second rotating plate 11; a second top ball 35 is fixedly connected to the movable end of the second screw 33, and an arc-shaped bearing plate 37 matched and propped with the second top ball 35 is fixedly connected to the second bearing seat 36; the second socket 36 is further fixedly connected with a first return spring 38, the other end of which is connected with the first slide plate 12.
Referring to fig. 6, the output end of the steering engine 30 in the θy direction is pinned with the second screw 33 to drive the second screw 33 to rotate, and under the limiting effect of the second nut seat 32, the second screw 33 simultaneously steps forward or backward to drive the second top ball 35 to horizontally move, so that the rotation motion is converted into the horizontal motion, and the rotating shaft assembly 113 limits the second rotating plate 11 to rotate only around the rotating shaft assembly 113. For example, under the driving of the steering engine 30 in the θy direction, the second screw 33 rotates and steps forward to drive the second top ball 35 to move forward, and the second top ball 35 presses the arc-shaped bearing plate 37, so that the second rotating plate 11 rotates horizontally on the first sliding plate 12 around the rotating shaft on the rotating shaft assembly 113, that is, rotates around the Y axis direction (θy direction). The arc-shaped bearing plate 37 is in spherical contact with the second top ball 35, the arc-shaped bearing plate 37 is enveloped outside the second top ball 35, the second top ball 35 rotates while doing linear motion, the arc-shaped bearing plate 37 is in contact with the second top ball 35 through a cylindrical surface, thereby filtering out the rotation of the second top ball 35, and the motion pair of the spherical surface and the cylindrical surface are matched to change the linear motion into the rotation, namely
Converting the linear motion of the second top ball 35 into the rotational motion of the arc-shaped receiving plate 37, filtering out the rotation of the second top ball 35 and retaining the linear motion so as to push the arc-shaped receiving plate 37 to perform plane rotation; and meanwhile, the contact area of the second top ball 35 and the arc-shaped bearing plate 37 can be increased, and the stability of the top pressing effect of the second top ball is improved. The first return spring 38 is fixed to the first socket 26, and the other end is connected to the first slide plate 12, and the retraction direction thereof is opposite to the pressing direction of the first top ball 27, so that on one hand, return power is provided, and on the other hand, return clearance can be reduced.
The first sliding plate 12 is slidably arranged on the second sliding plate 13, a third retainer 120 is arranged between the first sliding plate 12 and the second sliding plate 13, and a third steel ball 121 is filled in the third retainer 120; the first slide plate 12 is provided with a second locking screw 122; the X-direction adjusting mechanism 41 comprises a third nut seat 42 fixedly connected to the second slide plate 13, and a third screw 43, one end of which is connected with the output end of the X-direction steering engine 40, and the other movable end of which is matched and inserted into a third nut hole 44 formed in the third nut seat 42, a third top ball 45 is fixedly connected to the third screw 43, and the third top ball 45 is propped against the side end of the first slide plate 12; a second return spring 46 is connected between the first slide plate 12 and the second slide plate 13.
The output end of the steering engine 40 in the X direction is in pin joint with a third screw 43 to drive the third screw 43 to rotate, under the limit fit of a third nut seat 42, the third screw 43 rotates and steps at the same time to drive a third top ball 45 to push against the first sliding plate 12, so that the first sliding plate 12 moves in a stepping mode, and two ends of a second return spring 46 respectively hook the first sliding plate 12 and the second sliding plate 13, on one hand, return power is provided, and on the other hand, return clearance can be reduced. The third cage 120 and the third steel balls 121 provided between the first slide plate 12 and the second slide plate 13 function in the same manner as the aforementioned second cage 110 and second steel balls 111. When locking is required, the second locking screws 122 at the four corners of the first slide plate 12 are tightened, and at this time, the first slide plate 12 is abutted against the second slide plate 13 and kept fixed.
The second sliding plate 13 is slidably arranged on the third rotating plate 14, a fourth retainer 130 is arranged between the second sliding plate 13 and the third rotating plate 14, a fourth steel ball 131 is filled in the fourth retainer 130, and a third locking screw 132 is arranged on the second sliding plate 13; the Z-direction adjusting mechanism 51 comprises a fourth nut seat 52 fixedly connected to the third rotating plate 14 and a fourth screw 53, one end of which is connected with the output end of the Z-direction steering engine, and the other movable end of which is matched with and inserted into a fourth nut hole 54 formed in the fourth nut seat 52, a fourth top ball 55 is fixedly connected to the fourth screw 53, and the fourth top ball 55 is propped against the side end of the second sliding plate 13; a third return spring 56 is connected between the second slide plate 13 and the third rotating plate 14.
The output end of the Z-direction steering engine is in pin joint with a fourth screw 53, the fourth screw 53 is driven to rotate, under the limit fit of a fourth nut seat 52, the fourth screw 53 rotates and steps, and a fourth top ball 55 is driven to push against the second sliding plate 13, so that the second sliding plate 13 moves in a step mode. The fourth cage 130 and the fourth steel balls 131 provided between the second slide plate 13 and the third rotating plate 14 function in the same manner as the aforementioned second cage 110 and second steel balls 111. When locking is needed, third locking screws 132 at four corners of the second sliding plate 13 are screwed, and at the moment, the second sliding plate 13 is abutted against the third rotating plate 14 and kept fixed.
The θx direction adjusting mechanism 61 comprises a fifth nut seat 63 fixedly connected to the bottom plate 15, a fifth screw 65 with one end connected to the output end of the θx direction steering engine 60 and the other movable end matched with the output end and inserted in a fifth nut hole 64 formed in the fifth nut seat 63, and a third bearing seat 66 fixedly connected to the third rotating plate 14, a fifth top ball 67 is fixedly connected to the movable end of the fifth screw 65, a second clamping hole 68 for the fifth top ball 67 to be matched and inserted is formed in the third bearing seat 66, and the fifth top ball 67 is rotatably clamped in the second clamping hole 68. That is, the second top ball 35 can freely rotate in the second clamping hole 68, but the back-and-forth movement is limited, so that the third bearing seat 66 and the third rotating plate 14 are driven to move back and forth by the back-and-forth movement of the second top ball 35.
The second arc-shaped guide rail mechanism 62 comprises a second lower guide rail 620 fixedly connected to the third rotating plate 14 and provided with an arc-shaped upper surface, a second upper sliding block 621 slidably arranged on the second lower guide rail 620 and provided with an arc-shaped bottom surface, a fifth arc-shaped retainer 622 arranged between the second upper sliding block 621 and the second lower guide rail 620, and a fifth steel ball 623 filled in the fifth retainer 622; the second upper slider 621 is fixedly connected with the third rotating plate 14. The second upper slider 621 slides in an arc on the second lower rail 620, and the second arc rail mechanism 62 restricts the back-and-forth movement of the third rotary plate 14 on the bottom plate 15 to an arc movement, thereby effecting rotation (rotation in the θx direction) of the third rotary plate 14 on the bottom plate 15 about the Z-axis direction.
In one embodiment, the second arcuate rail mechanism 62 includes two spaced apart.
Referring to fig. 12, the output end of the steering engine 60 in the θx direction is pinned with a fifth screw 65 to drive the fifth screw 65 to rotate, and under the limiting action of the fifth nut seat 63, the fifth screw 65 simultaneously steps left or right to drive the fifth top ball 67 to horizontally move left or right, so that the rotational movement is converted into horizontal movement; the fifth top ball 67 drives the third rotating plate 14 to move left and right, and under the limiting action of the second arc-shaped guide rail mechanism 62, the third rotating plate 14 moves in an arc shape, so that the third rotating plate 14 rotates around the X-axis direction. For example, under the limiting action of the fifth nut seat 63 driven and fixed by the steering engine 60 in the θx direction, the fifth screw 65 rotates and steps to the right to drive the fifth top ball 67 to move to the right, and the fifth top ball 67 pushes against the third bearing seat 66 to drive the third rotating plate 14 to move to the right in an arc shape, and the right end of the third rotating plate 14 warps up and the left end falls down to generate rotation around the X axis direction. When the steering engine 60 in the θx direction reverses, the fifth top ball 67 is driven to move leftwards, and the fifth top ball 67 is clamped in the second clamping hole 68 on the three bearing seats, so that the third rotating plate 14 can be driven to do return motion, namely move leftwards, and the return power is improved for the third rotating plate 14.
The second locking mechanism 69 is arranged on the side portion of the second arc-shaped guide rail mechanism 62, the second locking mechanism 69 comprises a second lower locking block 690 fixedly connected to the bottom plate 15 and provided with an arc-shaped upper locking block 691 fixedly connected to the third rotating plate 14, and a second arc-shaped patch 692 arranged between the second upper locking block 691 and the second lower locking block 690 and provided with an arc-shaped bottom surface, and the second upper locking block 691 is provided with a second opening 693 for accommodating the second arc-shaped patch 692.
When the third rotating plate 14 and the bottom plate 15 are not locked, the fifth steel ball 623 jacks up the second upper slide block 621, so that a smaller gap is left between the second upper slide block 621 and the second lower guide rail 620, friction force between the second upper slide block 621 and the second lower guide rail 620 can be reduced, arc sliding of the second upper slide block 621 on the second lower guide rail 620 is facilitated, creeping phenomenon is avoided, relative movement of the third rotating plate 14 and the bottom plate 15 can be smoothly performed, and stepping can keep better linearity. When the θx angle is adjusted and locking is needed, the second arc patch 692 between the second upper locking block 691 and the second lower locking block 690 is tightly attached to the second upper locking block 691 by tightening the screw on the second upper locking block 691, so that the second upper locking block 691 is tightly attached to the second lower locking block 690, and finally, the third rotating plate 14 and the bottom are locked to keep the fixation.
The first locking screw, the second locking screw and the third locking screw are all improved low-freedom-degree screws. Referring to fig. 14, the improved low-degree-of-freedom screw includes a screw body 70, a washer 74 and a micro thrust ball bearing 75 which are sleeved on the screw body 70, the screw body 70 includes a screw head 71, a smooth thin rod 72 connected with the screw head 71, and a threaded rod 73 connected with the other end of the smooth thin rod 72, and the washer 74 and the micro thrust ball bearing 75 are sequentially sleeved on the smooth thin rod 72. When the screw is used, the screw body 70 sequentially passes through the gasket 74 and the miniature thrust ball bearing 75 and then is inserted into the threaded hole, the gasket 74 and the miniature thrust ball bearing 75 are sleeved on the smooth thin rod 72 at the lower end of the screw body 70, and the threaded rod 73 at the lower end of the smooth thin rod 72 is matched with the threaded hole to tightly lock the part to be locked. The screw body 70 of the improved low-freedom screw is not a full thread, but a smooth thin rod 72 without threads is arranged in the middle, and the lower end of the smooth thin rod 72 is connected with a threaded rod 73; during locking, the smooth thin rod 72 cannot interfere with the part to be locked, the screw body 70 and the gasket 74 rotate on the miniature thrust ball bearing 75, and the upper part of the miniature thrust ball bearing 75 rotates along with the miniature thrust ball bearing, so that the rotation of the screw body 70 cannot influence the part to be locked. Referring specifically to fig. 14, the locking of two plates is illustrated with a modified low-degree-of-freedom screw; the improved low-degree-of-freedom screw is inserted into the threaded holes of the upper plate and the lower plate to be locked, the gasket 74 and the miniature thrust ball bearing 75 are arranged between the upper plate and the screw head 71 of the screw body 70 in a cushioning manner and are positioned at the periphery of the smooth thin rod 72, and the smooth thin rod 72 is not contacted with the upper plate and the lower plate, so that the smooth thin rod 72 at the upper part of the screw body 70 can not interfere the upper plate and the lower plate; when the screw body 70 is screwed, the gasket 74 and the miniature thrust ball bearing 75 are arranged between the screw head 71 of the screw body 70 and the working position, and when the screw body 70 is rotated, the upper part of the miniature thrust ball bearing 75 is simultaneously rotated, so that the rotation torsion of the screw body can not influence the two plates, thereby filtering the influence of the rotation of the screw body 70 on the upper and lower plates to be locked, preventing the rotation torsion of the screw body 70 from causing the upper and lower plates to generate unnecessary movement, finally avoiding the offset of the part to be locked caused by the rotation of the screw body 70 in the locking process, ensuring the assembly precision and improving the locking effect.
In one embodiment, the output end of each steering engine is connected with a corresponding screw pin in the following manner: the output of steering wheel inserts in the slot that corresponding screw one end was seted up, and the draw-in groove is seted up to slot lateral wall on the screw, utilizes the round pin of being connected with the output of steering wheel to insert in the draw-in groove, drives the screw rotation through the round pin, realizes the transmission of steering wheel and screw and is connected, and the output of steering wheel can follow axial back and forth movement in the jack again. Wherein, the output end of each steering engine and the corresponding screw can also be adjusted in an auxiliary way by hand screwing.
Although embodiments of the present application have been disclosed above, it is not limited to the use of the description and embodiments, it is well suited to various fields of use for the application, and further modifications may be readily apparent to those skilled in the art, and accordingly, the application is not limited to the particular details without departing from the general concepts defined in the claims and the equivalents thereof.
Claims (8)
1. An optical precision adjustment table with multiple degrees of freedom, comprising:
the adjusting table main body comprises a first rotating plate, a second rotating plate, a first sliding plate, a second sliding plate, a third rotating plate and a bottom plate which are sequentially arranged from top to bottom;
the theta Z direction steering engine assembly is used for driving the first rotating plate to rotate around the Z axis direction and comprises a theta Z direction steering engine, a theta Z direction adjusting mechanism and a first arc-shaped guide rail mechanism arranged between the first rotating plate and the second rotating plate;
the theta Y steering engine assembly is used for driving the second rotating plate to rotate around the Y-axis direction and comprises a theta Y steering engine and a theta Y adjusting mechanism;
the X-direction steering engine assembly is used for driving the first sliding plate to move along the X direction and comprises an X-direction steering engine and an X-direction adjusting mechanism;
the Z-direction steering engine assembly is used for driving the second sliding plate to move along the Z direction and comprises a Z-direction steering engine and a Z-direction adjusting mechanism;
the theta X direction steering engine assembly is used for driving the third rotating plate to rotate around the X axis direction and comprises a theta X direction steering engine, a theta X direction adjusting mechanism and a second arc-shaped guide rail mechanism arranged between the third rotating plate and the bottom plate;
the θz direction adjusting mechanism comprises a first nut seat fixedly connected to the second rotating plate, a first screw with one end connected with the output end of the θz direction steering engine and the other movable end matched and inserted in a first nut hole formed in the first nut seat, and a first bearing seat fixedly connected to the first rotating plate, a first top ball is fixedly connected to the movable end of the first screw, a first clamping hole for the first top ball to be matched and inserted is formed in the first bearing seat, and the first top ball is rotatably clamped in the first clamping hole;
the second rotating plate is connected to the first sliding plate through a rotating shaft assembly, a second retainer is arranged between the second rotating plate and the first sliding plate, second steel balls are filled in the second retainer, and first locking screws are arranged on the second rotating plate; the θy direction adjusting mechanism comprises a second nut seat fixed on the first sliding plate, a second screw, one end of which is connected with the output end of the θy direction steering engine, and the other movable end of which is matched and inserted in a second nut hole formed in the second nut seat, and a second bearing seat fixedly connected on the second rotating plate; a second top ball is fixedly connected to the movable end of the second screw, and an arc-shaped bearing plate matched and propped with the second top ball is fixedly connected to the second bearing seat; the second bearing seat is fixedly connected with a first return spring, and the other end of the first return spring is connected with the first sliding plate.
2. The multi-degree-of-freedom optical precision adjusting table of claim 1, wherein the first arc-shaped guide rail mechanism comprises a first lower guide rail fixedly connected to the second rotating plate and provided with an arc-shaped upper surface, a first upper sliding block slidably arranged on the first lower guide rail and provided with an arc-shaped bottom surface, a first arc-shaped holding frame arranged between the first upper sliding block and the first lower guide rail, and a first steel ball filled in the first holding frame; the first upper sliding block is fixedly connected with the first rotating plate.
3. The multi-degree-of-freedom optical precision adjusting table of claim 2, wherein a first locking mechanism is arranged on the side portion of the first arc-shaped guide rail mechanism, the first locking mechanism comprises a first lower locking block fixedly connected to the second rotating plate and provided with an arc-shaped upper locking block fixedly connected to the first rotating plate, and a first arc-shaped patch provided between the first upper locking block and the first lower locking block and provided with an arc-shaped bottom surface, and the first upper locking block is provided with a first opening for accommodating the first arc-shaped patch.
4. The multi-degree-of-freedom optical precision adjusting table of claim 3, wherein the first slide plate is slidably disposed on the second slide plate, a third retainer is disposed between the first slide plate and the second slide plate, and a third steel ball is filled in the third retainer; the first sliding plate is provided with a second locking screw; the X-direction adjusting mechanism comprises a third nut seat fixedly connected to the second sliding plate and a third screw, one end of the third screw is connected with the output end of the X-direction steering engine, the other movable end of the third screw is matched with the output end of the X-direction steering engine, the third screw is inserted into a third nut hole formed in the third nut seat, a third top ball is fixedly connected to the third screw, and the third top ball is propped against the side end of the first sliding plate; and a second return spring is connected between the first sliding plate and the second sliding plate.
5. The multi-degree-of-freedom optical precision adjusting table of claim 4, wherein the second sliding plate is slidably arranged on the third rotating plate, a fourth retainer is arranged between the second sliding plate and the third rotating plate, a fourth steel ball is filled in the fourth retainer, and a third locking screw is arranged on the second sliding plate; the Z-direction adjusting mechanism comprises a fourth nut seat fixedly connected to the third rotating plate and a fourth screw, one end of the fourth screw is connected with the output end of the Z-direction steering engine, the other movable end of the fourth screw is matched with the fourth nut seat, the fourth screw is inserted into a fourth nut hole formed in the fourth nut seat, a fourth top ball is fixedly connected to the fourth screw, and the fourth top ball is propped against the side end of the second sliding plate; and a third return spring is connected between the second sliding plate and the third rotating plate.
6. The multi-degree-of-freedom optical precision adjusting table of claim 5, wherein the θx direction adjusting mechanism comprises a fifth nut seat fixedly connected to the bottom plate, a fifth screw with one end connected to the output end of the θx direction steering engine and the other movable end cooperatively inserted in a fifth nut hole formed in the fifth nut seat, and a third socket fixedly connected to the third rotating plate, a fifth top ball is fixedly connected to the movable end of the fifth screw, a second clamping hole for the fifth top ball to cooperatively insert is formed in the third socket, and the fifth top ball is rotatably clamped in the second clamping hole.
7. The multi-degree-of-freedom optical precision adjusting table of claim 6, wherein the second arc-shaped guide rail mechanism comprises a second lower guide rail fixedly connected to the third rotating plate and having an arc-shaped upper surface, a second upper slide block slidably arranged on the second lower guide rail and having an arc-shaped bottom surface, a fifth arc-shaped holding frame arranged between the second upper slide block and the second lower guide rail, and a fifth steel ball filled in the fifth holding frame; the second upper sliding block is fixedly connected with the third rotating plate;
the side part of the second arc-shaped guide rail mechanism is provided with a second locking mechanism, the second locking mechanism comprises a second lower locking block fixedly connected to the bottom plate, the upper surface of the second lower locking block is arc-shaped, a second upper locking block fixedly connected to the third rotating plate, the lower surface of the third rotating plate is arc-shaped, the second upper locking block is arranged between the second upper locking block and the second lower locking block, the bottom surface of the second lower locking block is arc-shaped, and a second opening for accommodating the second arc-shaped patch is formed in the second upper locking block.
8. The multi-degree-of-freedom optical precision adjusting table of claim 6, wherein the first locking screw, the second locking screw and the third locking screw are all modified low-degree-of-freedom screws, the modified low-degree-of-freedom screws comprise screw bodies, gaskets and miniature thrust ball bearings, the gaskets and miniature thrust ball bearings are sleeved on the screw bodies, the screw bodies comprise screw heads, smooth thin rods connected with the screw heads, and threaded rods connected to the other ends of the smooth thin rods, and the gaskets and the miniature thrust ball bearings are sequentially sleeved on the smooth thin rods.
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| CN201711264075.0A CN107870405B (en) | 2017-12-05 | 2017-12-05 | Multi-degree-of-freedom optical precision adjusting table |
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| CN201711264075.0A CN107870405B (en) | 2017-12-05 | 2017-12-05 | Multi-degree-of-freedom optical precision adjusting table |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110187460B (en) * | 2019-05-15 | 2024-06-04 | 中国空气动力研究与发展中心超高速空气动力研究所 | Multi-degree-of-freedom high-strength high-precision adjusting table suitable for wind tunnel environment |
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