CN107860334A - High power laser light punctures metal void shape and area real-time measurement apparatus and method - Google Patents
High power laser light punctures metal void shape and area real-time measurement apparatus and method Download PDFInfo
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- CN107860334A CN107860334A CN201711059812.3A CN201711059812A CN107860334A CN 107860334 A CN107860334 A CN 107860334A CN 201711059812 A CN201711059812 A CN 201711059812A CN 107860334 A CN107860334 A CN 107860334A
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- reflective mirror
- power laser
- total reflective
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
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- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of high power laser light breakdown metal void shape and area real-time measurement apparatus and method, measurement apparatus to include probe laser device, beam homogenization device, deielectric-coating total reflective mirror, optical filter, beam splitting chip, integrating sphere and video camera.Projected using ablation hole of the uniform low-power visible laser beam to metal, reach the purpose that void shape and area measure in real time through the projection hot spot of hole by integrating sphere and video camera measurement again, have precision high, it is time-consuming few, it is convenient and swift, safe and reliable the characteristics of.
Description
Technical field
The invention belongs to laser technology and application field, is related to a kind of high power laser light breakdown metal void shape and area
Real-time measurement apparatus and method, more particularly to a kind of hole is melted to metal as probe light using low-power visible ray surveyed in real time
The laser aid of amount.
Background technology
In the research that high power laser light destroys metal target, ablation perforation is important failure mode.Laser breakdown gold
After category, perforation field directly determines energy deposition efficiency of the high power laser light in target.If metal is in air-flow environment
In, perforation shape will influence the aerodynamic characteristic of metal surface.
Document " the lower thin aluminum sheet response Primary Study of laser irradiation in tangential gas flow environment, National University of Defense technology's Master's thesis,
In page 2012 " the 11st, the research method and device of a kind of lower laser breakdown sheet metal of tangential gas flow effect are disclosed.The device
The scattering light after metal is passed through using photodetector direct detection high power laser light, is judged with this used in laser breakdown metal
Time.Then the pattern change of metal hole is directly shot using video camera.This method can not be in laser irradiation process in real time
The change of metal piercing shape and area is monitored, and accurately extraction perforation shape and area data are also required to again from video image
Miscellaneous computational methods.
The content of the invention
It is an object of the invention to provide one kind to utilize low-power probe laser, on-line measurement record high power laser light breakdown gold
Belong to the apparatus and method of void shape and area, can accurately monitor laser breakdown metal process Hole shape and face in real time
Product change, has that precision is high, and computational methods are simple, take it is few, it is applied widely, it is safe and reliable the features such as.
The technical solution of the present invention is to provide a kind of high power laser light breakdown metal void shape and area and surveyed in real time
Device is measured, it is characterized in that：Including the probe laser device 1, beam homogenization device 2, first medium film set gradually along light path
Total reflective mirror 51, second medium film total reflective mirror 52 and beam splitter 9, in addition to the product being located at respectively in 9 two light splitting optical paths of beam splitter
Bulb separation 10 and video camera 13；
Sheet metal 6 is located between first medium film total reflective mirror 51 and second medium film total reflective mirror 52；High-power laser beam 4
By the reflection of first medium film total reflective mirror 51 through sheet metal 6, again by the after sheet metal 6 forms ablation hole 7
Second medium film total reflective mirror 52 reflects light path；
The above-mentioned emitting probe laser beam 3 of probe laser device 1 enters beam homogenization device 2, and the probe laser beam 3 after homogenizing is successively
Divide after through the ablation hole 7 on first medium film total reflective mirror 51, sheet metal 6, second medium film total reflective mirror 52 through beam splitter 9
Integrating sphere 10 and video camera 13 are respectively enterd after beam, above-mentioned integrating sphere 10 collects the whole light beams for passing through or reflecting beam splitter 9,
Above-mentioned video camera 13 shoots reflection or the transmitted light of beam splitter 9.
Preferably, in order to further avoid influence of the high power laser light to video camera 13 and integrating sphere 10, the present invention surveys
Device is measured also including the optical filter 8 between second medium film total reflective mirror 52 and beam splitter 9, the cut-off model of above-mentioned optical filter 8
Enclose and include the wave band of high-power laser beam 4, not comprising the wave band of probe laser beam 3.
Preferably, above-mentioned probe laser beam 3 is visible laser, optical maser wavelength and the high-power laser beam 4 of probe laser beam 3
Wavelength it is different, and the laser power of probe laser beam 3 is less than the laser power of high-power laser beam 4.
Preferably, the spot size for the laser beam that above-mentioned probe laser device 1 is launched is more than the full-size of ablation hole 7.
Preferably, laser caused by probe laser device 1 can be converted into closely collimating uniform by above-mentioned beam homogenization device 2
Light beam, such as microlens array, binary diffractive optic element etc..
Preferably, above-mentioned first medium film total reflective mirror 51 and second medium film total reflective mirror 52 are quartz or K9 glass materials
Matter, surface are coated with uniform deielectric-coating；
By the above-mentioned first medium film total reflective mirror 51 of Film Design and second medium film total reflective mirror 52 to high power
The reflectivity of the wave-length coverage of laser beam 4 is more than 99.9%, is more than 90% to the transmitance of the wave-length coverage of probe laser beam 3.
Preferably, above-mentioned beam splitter 9 and incident light are in 45° angle, and incident light is pressed into fixed intensity score into vertical two
Shu Guang.
Preferably, above-mentioned video camera 13 can also shoot the reflection of beam splitter 9 or transmitted light is projected on hot spot in white screen
Shape；Photodetector 11 and signal recorder 12 are installed on above-mentioned integrating sphere 10.
The present invention also provides a kind of punctures metal void shape and area measures dress in real time using above-mentioned high power laser light
The method of measurement high power laser light breakdown metal void shape and area in real time is put, is comprised the following steps：
1) probe laser device 1 is opened, it is 1cm that sheet metal 6 is replaced with into perforated area2Diaphragm 14, signal recorder
12 readings are designated as k；
2) exposure of video camera 13 is adjusted, obtains clear light spot image；
3) power P of high-power laser beam 4, light extraction time T are set and go out optical mode；
4) diaphragm 14 is replaced with into sheet metal 6, loads high-power laser beam 4, synchronous signal recorder 12 starts to gather
Data V (t), video camera 13 start to shoot；
5) laser power is calculated as the area change of sheet metal 6 under P-condition according to formula S (t)=k*V (t)；
6) change the power P of high-power laser beam 4, light extraction time T and go out optical mode, repeat step 1) -5) obtain difference
The shape and area change of the ablation hole 7 of sheet metal 6 under input condition.
The beneficial effects of the invention are as follows：
1st, the present invention can monitor, measure and record metal piercing in real time during high power laser light irradiates sheet metal
Shape and area change；
2nd, the present invention is projected using low-power visible laser to metal Durchgangshohle, then is carried out by video camera and integrating sphere
Measurement record, the problem of avoiding dynamic range deficiency when video camera directly shoots high power laser light, has safe and reliable spy
Point；
3rd, the present invention can directly obtain metal piercing area absolute value, without the data handling procedure of complexity, have side
Just the characteristics of quick；
4th, the present invention can be used for different wave length and the high power laser light of pattern irradiation metal process.
Brief description of the drawings
Fig. 1 is measurement apparatus schematic diagram；
Fig. 2 is examples measure method probe laser diaphragm calibration schematic diagram；
Reference is in figure：1- probe laser devices；2- beam homogenization devices；3- probe laser beams；4- high-power laser beams；
51- first medium film total reflective mirrors；52- second medium film total reflective mirrors；6- sheet metals；7- ablation holes；8- optical filters；9- beam splitting
Mirror；10- integrating spheres；11- photodetectors；12- signal recorders；13- video cameras；14- diaphragms.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
The invention provides one kind to utilize low-power probe laser, on-line measurement record high power laser light breakdown metal hole
The method and apparatus of shape and area, laser breakdown metal process Hole shape can not accurately be monitored in real time by solving prior art
The problem of shape and area change.
The preferred embodiment structure of measurement apparatus of the present invention is as shown in figure 1, the probe laser including being set gradually along light path
Device 1, beam homogenization device 2, first medium film total reflective mirror 51, second medium film total reflective mirror 52, optical filter 8, beam splitter 9, in addition to
The integrating sphere 10 and video camera 13 being separately positioned in 9 two light splitting optical paths of beam splitter；It is complete that sheet metal 6 is located at first medium film
Between anti-mirror 51 and second medium film total reflective mirror 52；High-power laser beam 4 by first medium film total reflective mirror 51 reflection through
Sheet metal 6, light path is reflected by second medium film total reflective mirror 52 again after sheet metal 6 forms ablation hole 7；Probe swashs
Light device 1 launches low power laser beam-probe laser beam 3 and enters beam homogenization device 2, and the probe laser beam 3 after homogenizing sequentially passes through
Ablation hole 7, second medium film total reflective mirror 52, optical filter 8 on first medium film total reflective mirror 51, sheet metal 6, through beam splitter
Integrating sphere 10 and video camera 13 are respectively enterd after 9 beam splitting, photodetector 11 and signal recorder 12 are installed on integrating sphere 10.
The present embodiment realizes the real-time measurement of metal void shape and area using the method for light beam projecting.With normal in industry
Exemplified by 1064nm high power laser lights breakdown metal, laser power 1000W.It is 532nm that probe laser device 1, which selects wavelength,
Power is 5mW green (light) laser.After high-power laser beam 4 punctures sheet metal 6, the 1064nm through ablation hole 7 swashs
Light is less than 0.01mW through the power of second medium film total reflective mirror 52 and optical filter 8, to integrating sphere 10 and video camera 13 hardly
Impact.And the energy that power is 5mW green laser beam more than 80% can pass through lens set and reach detection system.Due to
Probe laser beam 3 is uniform light beam, so the light intensity for reaching integrating sphere 10 is proportional to the area of ablation hole 7, so as to reach
The effect of record area value in real time.What video camera 13 was shot is the projection hot spot of low-power green glow, avoids directly shooting Gao Gong
The problem of rate dynamic Laser scope deficiency.
In order to realize the precision real time measuring of ablation hole area, the present invention is needed in advance to integrating sphere in probe laser spoke
According to responsiveness parameter demarcated, as shown in Fig. 2 using perforated area as 1cm2Standard area diaphragm 14, obtain probe
Laser passes through the response signal value of integrating sphere 10 after diaphragm 14, is followed successively by calibration benchmark, directly obtains absolute after ablation perforation
Area value, test data is provided for post laser irradiation effect theoretical modeling.
The tool for puncturing metal void shape and area real-time measurement apparatus based on high power laser light that the present embodiment is provided
Body examination method for testing is as follows：
1】Probe laser device 1 is opened, it is 1cm that sheet metal 6 is replaced with into perforated area2Standard area diaphragm 14, letter
Number reading of recorder 12 is designated as k.
2】The exposure of video camera 13 is adjusted, obtains clear light spot image.
3】The power P of high-power laser beam 4, light extraction time T are set and go out optical mode.
4】By 1cm2Standard area diaphragm 14 replace with sheet metal 6, load high-power laser beam 4, synchronous signal note
Record instrument 12 and start gathered data V (t), video camera 13 starts to shoot.
5】Laser power is calculated as the area change of sheet metal 6 under P-condition according to formula S (t)=k*V (t).
6】Change the power P of high-power laser beam 4, light extraction time T and go out optical mode, repeat 1-5】Obtain different input bars
The shape and area change of the ablation hole 7 of sheet metal 6 under part.
The present invention efficiently solves monitors, measures and records gold in real time during high power laser light irradiates sheet metal 6
The problem of belonging to the shape and area change of perforation, there is the features such as precision is high, time-consuming few, convenient and swift, safe and reliable.
Claims (9)
1. a kind of high power laser light breakdown metal void shape and area real-time measurement apparatus, it is characterised in that：Including along light path
Probe laser device (1), beam homogenization device (2), first medium film total reflective mirror (51), the second medium film total reflective mirror set gradually
(52) integrating sphere (10) and video camera and beam splitter (9), in addition to being respectively located in (9) two light splitting optical paths of beam splitter
(13)；
Sheet metal (6) is located between first medium film total reflective mirror (51) and second medium film total reflective mirror (52)；High power laser light
Through sheet metal (6), ablation hole is formed in sheet metal (6) by the reflection of first medium film total reflective mirror (51) for beam (4)
(7) light path is reflected after by second medium film total reflective mirror (52) again；
Probe laser device (1) the emitting probe laser beam (3) enters beam homogenization device (2), the probe laser beam (3) after homogenizing
Sequentially pass through first medium film total reflective mirror (51), the ablation hole (7) on sheet metal (6), second medium film total reflective mirror (52)
By integrating sphere (10) and video camera (13) is respectively enterd after beam splitter (9) beam splitting, the integrating sphere (10) collects transmission or anti-
Project whole light beams of beam splitter (9), the reflection of video camera (13) the shooting beam splitter (9) or transmitted light.
2. high power laser light breakdown metal void shape according to claim 1 and area real-time measurement apparatus, its feature
It is：Also include the optical filter (8) between second medium film total reflective mirror (52) and beam splitter (9), the optical filter (8)
Cutoff range includes high-power laser beam (4) wave band, not comprising probe laser beam (3) wave band.
3. high power laser light breakdown metal void shape according to claim 2 and area real-time measurement apparatus, its feature
It is：The probe laser beam (3) is visible laser, the optical maser wavelength of probe laser beam (3) and the ripple of high-power laser beam (4)
It is long different, and the laser power of probe laser beam (3) is less than the laser power of high-power laser beam (4).
4. high power laser light breakdown metal void shape according to claim 3 and area real-time measurement apparatus, its feature
It is：The spot size of the laser beam of probe laser device (1) transmitting is more than the full-size of ablation hole (7).
5. high power laser light breakdown metal void shape according to claim 4 and area real-time measurement apparatus, its feature
It is：Laser caused by probe laser device (1) can be converted into the uniform beam closely collimated by described beam homogenization device (2),
Described beam homogenization device (2) is microlens array, binary diffractive optic element.
6. metal void shape and area real-time measurement apparatus are punctured according to any described high power laser lights of claim 1-5,
It is characterized in that：The first medium film total reflective mirror (51) is quartz or K9 glass materials with second medium film total reflective mirror (52)
Matter, surface are coated with uniform deielectric-coating；
The first medium film total reflective mirror (51) is with second medium film total reflective mirror (52) to high-power laser beam (4) wave-length coverage
Reflectivity be more than 99.9%, 90% is more than to the transmitance of probe laser beam (3) wave-length coverage.
7. high power laser light breakdown metal void shape according to claim 6 and area real-time measurement apparatus, its feature
It is：The beam splitter (9) and incident light are in 45° angle, and incident light is pressed into fixed intensity score into vertical two-beam.
8. high power laser light breakdown metal void shape according to claim 7 and area real-time measurement apparatus, its feature
It is：The reflection of video camera (13) the shooting beam splitter (9) or transmitted light are projected in the light spot shape in white screen；The integration
Photodetector (11) and signal recorder (12) are installed on ball (10).
9. a kind of measure dress in real time using any described high power laser light breakdown metal void shapes of claim 1-8 and area
Put the method for measurement high power laser light breakdown metal void shape and area in real time, it is characterised in that comprise the following steps：
1) probe laser device (1) is opened, it is 1cm that sheet metal (6) is replaced with into perforated area2Diaphragm (14), signal recorder
(12) reading is designated as k；
2) exposure of video camera (13) is adjusted, obtains clear light spot image；
3) power P of high-power laser beam (4) is set, light extraction time T and goes out optical mode；
4) diaphragm (14) is replaced with into sheet metal (6), loading high-power laser beam (4), synchronous signal recorder (12) starts
Gathered data V (t), video camera (13) start to shoot；
5) laser power is calculated as sheet metal (6) area change under P-condition according to formula S (t)=k*V (t)；
6) change the power P of high-power laser beam (4), light extraction time T and go out optical mode, repeat step 1) -5) obtain it is different defeated
The shape and area change of the ablation hole (7) of sheet metal (6) under the conditions of entering.
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| CN201711059812.3A CN107860334B (en) | 2017-11-01 | 2017-11-01 | high-power laser breakdown metal hole shape and area real-time measurement device and method |
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| CN201711059812.3A CN107860334B (en) | 2017-11-01 | 2017-11-01 | high-power laser breakdown metal hole shape and area real-time measurement device and method |
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| CN107860334B CN107860334B (en) | 2019-12-06 |
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Cited By (3)
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| CN108955582A (en) * | 2018-06-21 | 2018-12-07 | 中国人民解放军战略支援部队航天工程大学 | Laser focal beam spot area measuring device |
| CN111024224A (en) * | 2019-12-02 | 2020-04-17 | 西北核技术研究院 | Measuring device and measuring method for laser far-field beam quality PIB factor |
| CN117697166A (en) * | 2024-02-06 | 2024-03-15 | 中国工程物理研究院激光聚变研究中心 | Method for etching organic film on surface of metal film by utilizing laser |
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| CN117697166A (en) * | 2024-02-06 | 2024-03-15 | 中国工程物理研究院激光聚变研究中心 | Method for etching organic film on surface of metal film by utilizing laser |
| CN117697166B (en) * | 2024-02-06 | 2024-04-19 | 中国工程物理研究院激光聚变研究中心 | Method for etching organic film on surface of metal film by utilizing laser |
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