CN107850818B - Beam modulator with frequency conversion, associated method and laser processing machine - Google Patents
Beam modulator with frequency conversion, associated method and laser processing machine Download PDFInfo
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- CN107850818B CN107850818B CN201680042123.9A CN201680042123A CN107850818B CN 107850818 B CN107850818 B CN 107850818B CN 201680042123 A CN201680042123 A CN 201680042123A CN 107850818 B CN107850818 B CN 107850818B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/34—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
Abstract
In the case of a beam modulator (1) for power modulation of a laser beam (2), having a controllable deflection device (3) which is arranged in the beam path of the incident laser beam (2) and has two control states, wherein the incident laser beam (2) has different degrees (α)1，α2) According to the invention, at least one nonlinear crystal (5) is arranged in the beam path of the two laser beams (4a, 4b) that are deflected to different extents, the nonlinear crystal frequency-converts one of the two laser beams deflected to different degrees with high efficiency, frequency-converting the other with a lower efficiency, and arranging a separator (7) in the beam path of the laser beams (6a, 6b) frequency-converted with a higher efficiency and frequency-converted with a lower efficiency, the separator spatially separates the frequency-converted and non-frequency-converted parts of the laser beam (6a, 6b) from one another, wherein one of the two spatially separated laser beams (9a, 9b, 9c) forms a power-modulated output laser beam.
Description
Technical Field
The invention relates to a beam modulator for power modulating a laser beam, having a controllable deflection device arranged in a beam path of an incident laser beam, having two control states, wherein the incident laser beam is deflected to different extents, an associated laser processing machine, and a method for power modulating a laser beam. In other words, the deflection device has a first actuation state in which the incident laser beam is deflected at a first angle and a second actuation state in which the incident laser beam is deflected at a different second angle.
Background
In the case of lasers, in particular pulsed lasers, a highly dynamic modulation of the output power of the laser beam is required for many applications. Such power modulation may be achieved by means of a fast deflection unit, which may be formed, for example, by an acousto-optic modulator (AOM) or an electro-optical detector. However, in order to be able to separate the unmodulated and modulated laser beams from one another, large deflection angles or large installation space are required, which significantly limits the design of the beam modulator.
Disclosure of Invention
The invention is therefore based on the following tasks: in the following, a beam modulator of the initially mentioned type is further developed, so that a deflection device with a smaller deflection angle can be used.
According to the invention, this task is solved by: at least one nonlinear crystal is arranged in the beam path of the two laser beams deflected to different extents, which frequency-converts one of the two laser beams deflected to different extents with a higher efficiency and the other laser beam with a lower efficiency, and a splitter is arranged in the beam path of the laser beam frequency-converted with the higher efficiency and in the beam path of the laser beam frequency-converted with the lower efficiency, which splitter spatially separates the frequency-converted part and the non-frequency-converted part of the laser beam, wherein one of the two spatially separated laser beams forms the power-modulated output laser beam.
In the case of an electrically actuated deflection device, two actuation states of the deflection device can be realized, for example, in the following manner:
-applying and not applying an electrical steering signal;
-applying steering signals with different powers;
-applying steering signals having different amplitudes;
-applying steering signals having different frequencies;
-applying steering signals with different powers and different frequencies.
According to the invention, large deflection angles can be dispensed with in combination with the subsequent frequency conversion. The deflection angle of one of the two laser beams deflected to different extents only has to be large enough to leave the angular acceptance range (Winkelakzeptanzbereich) of the nonlinear crystal required for frequency conversion and is therefore not frequency converted or frequency converted with a significantly reduced efficiency. Ideally, the deflection angles and the crystal lengths influencing the angular acceptance range of the crystal are matched to one another in such a way that in one of the two deflection states a maximum frequency conversion occurs and in the other a minimum or no frequency conversion occurs.
The separation of the modulated and unmodulated radiation or of the frequency-converted and unmodulated radiation is then effected by means of a separator. The invention makes it possible to achieve an efficient power modulation and a lower installation space due to the small deflection angle. Suitable materials for frequency conversion are, for example, lithium niobate, potassium dihydrogen phosphate, barium beta-borate or lithium triborate.
Preferably, the two laser beams deflected to different extents each impinge on at least one nonlinear crystal, so that in both operating states always the same laser power impinges on the nonlinear crystal, which is therefore heated as identically as possible in both operating states.
In a particularly preferred embodiment, in one of the two operating states of the deflection device, the incident laser beam is deflected by the deflection device at an angle of 0 °, i.e. the incident laser beam is deflected only in the other operating state.
Particularly preferably, one of the two laser beams deflected to different extents impinges on the nonlinear crystal within the acceptance angle range (Akzeptanzwinkelbereich) of the at least one nonlinear crystal required for the frequency conversion, while the other laser beam impinges on the nonlinear crystal outside the acceptance angle range.
Preferably, a non-linear frequency doubling crystal (SHG (second harmonic generation) crystal) for generating a laser beam with a doubled frequency or a combination of at least two non-linear crystals for tripling the frequency (THG (third harmonic generation)) or higher is arranged in the beam path of the two laser beams deflected to different extents.
The deflection device is preferably designed as an electrically actuated acousto-optic modulator, which deflects the incident laser beam, for example, only in one of its two actuating states. A cost-effective acousto-optic modulator with a small deflection angle can be used. LiNbO is often used as an acousto-optic modulator3Crystals or PbMoO4Crystal, glass or quartz.
Preferably, the separator is designed as a dichroic mirror, which spatially separates the frequency-converted and non-frequency-converted parts of the laser beam from one another. Instead of dichroic mirrors, mirrors or other beam splitters or other means may also be used.
The output laser beam can be formed either from a laser beam that has not been frequency-converted or from a frequency-converted laser beam, wherein in the latter case no power-modulated output laser beam is generated in the event of a failure of the acousto-optic modulator. The power fraction of the output beam can be adjusted by the relationship of the distribution of the input power to the two deflection states. The control unit supplies corresponding steering signals to the deflection unit. Alternatively, the output power may also be realized by modulation of the input power. However, in many applications it is advantageous to keep the input power constant and to modulate the power in the device described here.
Preferably, the beam modulator has a detector which detects the power of at least one of the spatially separated laser beams and an adjusting unit which actuates the deflection unit as a function of the detected laser power.
The invention also relates to an associated laser processing machine for processing a workpiece, comprising: laser beam generator for generating a laser beam, beam modulator according to one of the preceding claims, and machine control for actuating the deflection device of the beam modulator, in particular electrically.
In a further aspect, the invention also relates to a method for power modulating a laser beam, wherein an incident laser beam is deflected selectively at two different angles, wherein the two laser beams deflected to different extents with different efficiencies are frequency-converted, wherein the frequency-converted and the non-frequency-converted parts of the laser beam are spatially separated from one another, wherein one of the spatially separated two laser beams forms a power-modulated output laser beam.
Preferably, the power of at least one of the spatially separated laser beams is detected and the deflection of the incident laser beam is controlled in dependence on the detected laser power.
Drawings
Further advantages and advantageous configurations of the subject matter of the invention emerge from the description, the claims and the drawings. The features mentioned above and listed in more detail can also be used individually or in any combination of a plurality. The embodiments shown and described are not to be understood as exhaustive enumeration but rather have exemplary character for the description of the invention.
The figures show:
fig. 1 shows a beam modulator according to the invention with an SHG crystal for doubling the frequency of the laser radiation;
FIG. 2 shows a beam modulator according to the present invention with two nonlinear crystals for tripling the frequency of the laser radiation;
fig. 3 shows a beam modulator with a power conditioning device according to the invention;
fig. 4 shows a laser processing machine with a beam modulator according to the invention.
In the following description of the figures, the same reference numerals are used for identical or functionally identical components.
Detailed Description
The beam modulator 1 shown in fig. 1 and 2 serves for highly dynamic power modulation of a laser beam 2.
The beam modulators 1 each have a deflection device 3, which is arranged in the beam path of the incident laser beam 2 and which can be actuated, for example, electrically and which, in a first, non-electrically actuated state, does not deflect the incident laser beam 2 (with α)1An undeflected laser beam 4a with a deflection angle of 0 °, the incident laser beam being deflected (with α) in the second electrically actuated state2>Deflected laser beam 4b) at a deflection angle of 0 °. The deflection means 3 is for example an electrically steerable acousto-optic modulator.
A nonlinear SHG crystal 5 is arranged in the beam path of the two laser beams 4a, 4 b. The undeflected laser beam 4a impinges on the SHG crystal 5 within the SHG angular acceptance range of the SHG crystal 5 required for SHG frequency conversion (in the illustrated embodiment at right angles) and is thus converted at least partially into double frequency (frequency-converted laser beam 6a, non-frequency-converted beam 6 c). Conversely, deflected laser beam 4b impinges on SHG crystal 5 outside the SHG angular acceptance range and is therefore not (or inefficiently) frequency converted (non-frequency converted laser beam 6 b).
In the beam path of the frequency-converted part and of the non-frequency-converted laser beams 6a, 6b, 6c, a separator in the form of a wavelength-dependent beam splitter 7, for example a dichroic mirror, is arranged, which is reflective for the wavelength of the frequency-converted laser beam 6a and transmissive for the wavelength of the non-frequency-converted laser beams 6b, 6 c. The beam splitter 7, which is arranged in the beam path, for example at an angle of 45 °, transmits the laser beams 6b, 6c that have not been frequency-converted (transmitted laser beams 9b, 9c) and deflects the frequency-converted laser beam 6a by 90 ° (deflected laser beam 9 a). One of the laser beams 9a or 9b/9c is used as the power-modulated output laser beam of the beam modulator 1, whereas the other laser beam not used can be deflected into a beam trap (strathlfalle) (not shown).
In the two operating states, different electrical control signals are applied by the control unit 10 to the deflection device 3 in order to deflect the incident laser beam 2 to different extents. By electrically switching between the two operating states of the deflection device 3 (here, binary switching on and off of the electrical control signal), the output laser beam can be correspondingly modulated in power or the relationship between the two states can be adjusted. Additionally, by means of the control unit 10 it is possible to regulate: how to distribute the power of the incident laser beam 2 to the undeflected laser beam and the deflected laser beams 4a, 4 b.
Since the two laser beams 4a, 4b deflected to different extents each impinge on the nonlinear crystal 5, they always impinge on the nonlinear crystal 5 with the same laser power in both operating states, and therefore are heated as equally as possible in both operating states.
Instead of the wavelength-dependent beam splitter 7, it is also possible to use another splitter, i.e. for example a mirror or a beam splitter, to spatially separate the two output laser beams 9a, 9 b.
Compared to the beam modulator of fig. 1, the beam modulator 1 shown in fig. 2 differs only in that here a combination of two nonlinear crystals 5, 5' is used to triple the frequency. The first crystal 5 is an SHG crystal and at least partially generates a second harmonic, i.e. a frequency doubling. In the second crystal 5', the third harmonic, i.e. the third frequency multiplication, is then generated at least in part by the fundamental frequency (laser beam 6c) and the second harmonic (laser beam 6a) in the sum frequency process (summenfrequency). The undeflected laser beam 4a impinges on the two crystals 5, 5' in the angular acceptance range required for the two frequency conversions, and is thus converted at least partially into a frequency of three. This laser beam converted to the frequency of three is denoted by 6 d. In contrast, the deflected laser beam 4b impinges on at least one of the two crystals 5, 5' outside the angular acceptance range, whereby no power or a significantly reduced power is frequency-converted. The beam splitter 7 deflects only the laser beam 6d converted into the frequency of three times by 90 ° (deflected laser beam 9a) and transmits the other laser beams 6a, 6b, 6c (transmitted laser beams 9b, 9 c).
Since the laser beams 6a to 6c each impinge on the second crystal 5 ', the same laser power always impinges on the second crystal 5' in both operating states, and the second crystal is therefore heated as equally as possible in both operating states.
Instead of the two shown crystals 5, 5' arranged in succession, three or more crystals can also be arranged in succession. However, instead of tripling the wavelength, other conversion schemes are possible, such as two SHG crystals arranged in sequence for quadrupling the frequency.
The deflection angle of the deflected laser beam 4b can be adapted to a first minimum of a sinusoidal function of the nonlinear crystal 5, 5', for example.
In fig. 1 and 2, the undeflected laser beam 4a is frequency-converted and no power loss occurs in the case of modulation, since the entire laser power of the fundamental wavelength is available.
Instead of converting the undeflected laser beam 4a as in fig. 1 and 2, the nonlinear crystal 5, 5 ' can also be arranged in such a way that the deflected laser beam 4b impinges on the crystal 5, 5 ' within the angular acceptance range of the crystal 5, 5 ' and is thus frequency-converted. In contrast, the undeflected laser beam 4a impinges on the crystal 5, 5 'outside the angular acceptance range of the crystal 5, 5' and is therefore not frequency-converted. Even in this case, the frequency-converted and non-frequency-converted laser beams are spatially separated from one another by means of the beam splitter 7. In this case, the deflected laser beam 4b is frequency-converted, so that no power is converted in the event of a failure of the acousto-optic modulator 3.
Compared to the beam modulator in fig. 1, the beam modulator 1 shown in fig. 3 differs only in that a part of the output laser beam 9a is deflected by a partially reflecting mirror 11 onto a detector/measuring receiver 12 and compared with a desired power value in a control unit (e.g., a machine control device) 13, and the deflection unit 3 or its control unit 10 is controlled/regulated by the control unit 13 accordingly. Thus, a constant power or a predefined power can be set. Alternatively, the unused laser beams 9b, 9c can also be measured, whereby the power of the output laser beam 9a is calculated and compared with a desired value. However, variations in the conversion efficiency of the nonlinear crystal, for example, due to degradation/damage/temperature/misalignment, may not be considered or compensated for here.
Fig. 4 schematically shows a laser processing machine 20 having a laser beam generator 21 for generating a laser beam 2, a beam modulator 1 and a machine control 22 which electrically actuates the deflection device 3 or its control unit 10. By means of the output laser beam 9a, the workpiece 23 can be machined with a desired modulation of the laser power.
Claims (15)
1. A beam modulator (1) for power modulating a laser beam (2), having a controllable deflection device (3) which is arranged in the beam path of an incident laser beam (2) and which serves for deflecting the incident laser beam (2) and has two control states, wherein the incident laser beam (2) is differently (α) modulated1，α2) The deflection is carried out in such a way that,
it is characterized in that the preparation method is characterized in that,
at least one nonlinear crystal (5; 5') is arranged after the deflection device in the beam path of the two laser beams (4a, 4b) deflected to different extents, the nonlinear crystal frequency-converts one of the two laser beams deflected to different degrees with higher efficiency and the other laser beam with lower efficiency, and a separator (7) is arranged in the beam path of the laser beam frequency-converted with a higher efficiency and of the laser beams (6a, 6b) frequency-converted with a lower efficiency, the separator spatially separates a frequency-converted part and a non-frequency-converted part of the laser beam (6a, 6b), wherein one of the two spatially separated laser beams (9a, 9b, 9c) forms a power-modulated output laser beam.
2. The beam modulator according to claim 1, characterized in that in one of the two manipulation states of the deflection means (3) the incident laser beam (2) is at an angle (a) of 0 ° by the deflection means (3)1) And (4) deflecting.
3. The beam modulator according to claim 1 or 2, characterized in that the two laser beams (4a, 4b) deflected to different extents each impinge on the at least one nonlinear crystal (5; 5').
4. The beam modulator according to any of the preceding claims, characterized in that one (4a) of the two laser beams deflected to different extents impinges on the at least one nonlinear crystal (5; 5 ') within an acceptance angle range of the nonlinear crystal (5; 5 ') required for frequency conversion, and the other laser beam (4b) impinges on the nonlinear crystal (5; 5 ') outside the acceptance angle range.
5. The beam modulator according to any of the preceding claims, characterized in that a non-linear frequency doubling crystal (5) or a combination of at least two non-linear crystals (5, 5') for frequency doubling is arranged in the beam path of the two laser beams (4a, 4b) deflected to different extents.
6. The beam modulator according to any of the preceding claims, characterized in that the deflection means (3) is constructed as an electrically operated acousto-optic modulator.
7. The beam modulator according to any of the preceding claims, characterized in that the separator (7) is configured as a dichroic mirror.
8. The beam modulator according to any of the preceding claims, characterized in that the output laser beam is formed by a frequency converted laser beam (9 a).
9. The beam modulator according to any of claims 1 to 7, characterized in that the output laser beam is formed by a laser beam (9b, 9c) which is not frequency converted.
10. The beam modulator according to any of the preceding claims, characterized by a control unit (10) which operates the deflection means (3), in particular electrically.
11. The beam modulator according to claim 10, characterized in that the control unit (10) controls the deflection device (3) in such a way that the incident laser beam (2) is distributed in an adjustable power relationship to the deflected and undeflected beams (4a, 4 b).
12. The beam modulator according to any of the preceding claims, characterized by a detector (12) which detects the power of at least one of the spatially separated laser beams (9a, 9b, 9c), and by an adjusting unit (13) which operates the deflection unit (3) in dependence on the detected laser power.
13. A laser processing machine (20) for processing a workpiece (23), having a laser beam generator (21) for generating a laser beam (2), a beam modulator (1) according to one of the preceding claims, a machine control device (13, 22) which actuates a deflection device (3) of the beam modulator (1), in particular electrically.
14. A method for power modulation of a laser beam (2), wherein two different angles (alpha) are selectively provided1，α2) Downward deflection of an incident laser beam (2), wherein two laser beams (4a, 4b) deflected to different extents are frequency-converted with different efficiencies, wherein the laser beams (6a, 6b) are subjected to frequency conversionThe frequency-converted part and the non-frequency-converted part are spatially separated from one another, wherein one of the two spatially separated laser beams (9a, 9b, 9c) forms a power-modulated output laser beam.
15. Method according to claim 14, characterized in that the power of at least one of the spatially separated laser beams (9a, 9b, 9c) is detected and the deflection of the incident laser beam (2) is controlled in dependence on the detected laser power.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015213468.7A DE102015213468A1 (en) | 2015-07-17 | 2015-07-17 | Beam modulator with frequency conversion and associated method and laser processing machine |
| DE102015213468.7 | 2015-07-17 | ||
| PCT/EP2016/066401 WO2017012898A1 (en) | 2015-07-17 | 2016-07-11 | Beam modulator with frequency conversion, and corresponding method and laser machining machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107850818A CN107850818A (en) | 2018-03-27 |
| CN107850818B true CN107850818B (en) | 2021-11-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680042123.9A Active CN107850818B (en) | 2015-07-17 | 2016-07-11 | Beam modulator with frequency conversion, associated method and laser processing machine |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR102556710B1 (en) |
| CN (1) | CN107850818B (en) |
| DE (2) | DE102015213468A1 (en) |
| WO (1) | WO2017012898A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11378863B1 (en) * | 2021-04-15 | 2022-07-05 | Coherent Kaiserslautern GmbH | Nonlinear frequency conversion with variable average power and stable heat load |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5909306A (en) * | 1996-02-23 | 1999-06-01 | President And Fellows Of Harvard College | Solid-state spectrally-pure linearly-polarized pulsed fiber amplifier laser system useful for ultraviolet radiation generation |
| CN101035647A (en) * | 2004-06-07 | 2007-09-12 | 电子科学工业公司 | AOM modulation techniques for improving laser system performance |
| EP2626742A1 (en) * | 2012-02-08 | 2013-08-14 | Advantest Corporation | Wavelength converting apparatus, light source apparatus and wavelength converting method |
| WO2014012847A1 (en) * | 2012-07-19 | 2014-01-23 | Trumpf Laser Gmbh + Co. Kg | Laser oscillator and method for generating two laser beams of different wavelengths |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6129884A (en) * | 1999-02-08 | 2000-10-10 | 3D Systems, Inc. | Stereolithographic method and apparatus with enhanced control of prescribed stimulation production and application |
| US6961355B1 (en) * | 2003-01-09 | 2005-11-01 | Photonics Industries, Int'l. | Variable power pulsed secondary beam laser |
| US7483196B2 (en) * | 2003-09-23 | 2009-01-27 | Applied Materials, Inc. | Apparatus for multiple beam deflection and intensity stabilization |
| GB2428399B (en) * | 2004-06-07 | 2010-05-05 | Electro Scient Ind Inc | AOM modulation techniques for improving laser system performance |
| US8184667B2 (en) * | 2007-08-29 | 2012-05-22 | National Tsing Hua University | Electro-optic Bragg deflector and method of using it as laser Q-switch in an actively Q-switched laser and an actively Q-switched wavelength-conversion laser |
-
2015
- 2015-07-17 DE DE102015213468.7A patent/DE102015213468A1/en not_active Withdrawn
-
2016
- 2016-07-11 DE DE112016003216.1T patent/DE112016003216A5/en active Pending
- 2016-07-11 WO PCT/EP2016/066401 patent/WO2017012898A1/en active Application Filing
- 2016-07-11 KR KR1020187001554A patent/KR102556710B1/en active IP Right Grant
- 2016-07-11 CN CN201680042123.9A patent/CN107850818B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5909306A (en) * | 1996-02-23 | 1999-06-01 | President And Fellows Of Harvard College | Solid-state spectrally-pure linearly-polarized pulsed fiber amplifier laser system useful for ultraviolet radiation generation |
| CN101035647A (en) * | 2004-06-07 | 2007-09-12 | 电子科学工业公司 | AOM modulation techniques for improving laser system performance |
| EP2626742A1 (en) * | 2012-02-08 | 2013-08-14 | Advantest Corporation | Wavelength converting apparatus, light source apparatus and wavelength converting method |
| WO2014012847A1 (en) * | 2012-07-19 | 2014-01-23 | Trumpf Laser Gmbh + Co. Kg | Laser oscillator and method for generating two laser beams of different wavelengths |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102015213468A1 (en) | 2017-01-19 |
| CN107850818A (en) | 2018-03-27 |
| KR20180030539A (en) | 2018-03-23 |
| KR102556710B1 (en) | 2023-07-17 |
| WO2017012898A1 (en) | 2017-01-26 |
| DE112016003216A5 (en) | 2018-04-19 |
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