CN107844487A - For composing the automatic data acquisition method of analysis photoelectron/low energy electron microscopy - Google Patents
For composing the automatic data acquisition method of analysis photoelectron/low energy electron microscopy Download PDFInfo
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Abstract
The present invention relates to the automatic data acquisition method for composing analysis photoelectron/low energy electron microscopy, comprise the following steps：Sweep parameter, CCD camera parameter are set, file, file are established under selected data storage path；Electron microscope and CCD collection images are automatically controlled, and records associated equipment and experiment parameter simultaneously.The present invention stores experimental data and relevant parameter, file structure is reasonable, easily identification management, facilitates the analysis, review and progress equipment regulation of data in order in the lump according to unified storage naming rule.
Description
Technical field
It is used to compose analysis photoelectron/low energy electron microscopy (SPELEEM, Elmitec company) the present invention relates to a kind of
Collecting method is automatically controlled, belongs to computer autocontrol technique.
Background technology
Spectrum analysis photoelectron/low energy electron microscopy (SPELEEM) is that a kind of powerful surface and nano science are ground
Study carefully equipment, it collect the photoelectron that is ejected from surface or electron gun beat the electronics progress that reflects on the surface into
Picture, the energy analyzer of outfit make it also possess energy spectrum analysis ability.SPELEEM is with it in real time imagery, diffraction, photoelectron energy
Spectrum, element are differentiated and many functions such as micro-zone analysis, can obtain pattern, structure, chemical composition, electronic structure it is comprehensive
Close information.Our SPELEEM is the product of the most popular German Elmitec companies in the field.SPELEEM common functions
The implementation method of (such as LEED-IV, LEEM-IV, XPS), a picture row are gathered generally by continuous sweep parameter, then
Again intensity curve or band structure are extracted with image processing software from picture row.SPELEEM control softwares are accompanied with simply
Data acquisition program for users to use, but these programs have the following disadvantages：Naming method during data storage can not embody
Relevant information is tested, and file structure is not clear enough so that the data of batch capture are not easy to recognize, it has not been convenient to manage；Continuously sweep
Simply picture row are stored when retouching in itself, but the parameter of microscope and CCD camera, and Parameters variation in scanning process do not have
Have and incidentally stored, rely only on it is hand-written record several major parameters, efficiency is low and unavoidable careless omission, and this is unfavorable for
Follow-up data review, analysis, also inconvenient reduced parameter carry out equipment regulation.
The content of the invention
For above-mentioned technical deficiency, it is used to compose analysis photoelectron/low energy electron microscopy it is an object of the invention to provide one kind
Automatic data acquisition method, the present invention using the VBScript interfaces built in SPELEEM control softwares write data acquisition from
Dynamic control program, is better achieved SPELEEM common function, is obviously improved data acquisition efficiency, and facilitate the pipe of data
Reason and follow-up analysis use.
The technical solution adopted for the present invention to solve the technical problems is：It is micro- for composing analysis photoelectron/low-energy electron
The automatic data acquisition method of mirror, comprises the following steps：
Sweep parameter, CCD camera parameter are set, file and file are established under selected data storage path；
Electron microscope gathers image by CCD, while by the image of collection and corresponding parameter read-in to file.
The sweep parameter includes STV beginning, end value and step-length, and CCD camera parameter includes time for exposure and cumulative time
Number.
The electron microscope collection image comprises the following steps：It is worth to according to the STV of electron microscope matched
Object lens value Obj=coef0+coef1 × STVcoef2；Coef0 is the Obj values before scanning starts, and coef1 and coef2 are equipment
Parameter；STV values and object lens value Obj are exported to electron microscope, electron microscope and gathered using this STV value and object lens value Obj
Image.
Beginning, end value and the step-length of the sweep parameter including object lens value Obj, CCD camera parameter include the time for exposure and
Accumulative frequency.
The electron microscope collection image comprises the following steps：Object lens value Obj is exported to electron microscope, electronic display
Micro mirror gathers image according to object lens value Obj.
The sweep parameter includes the time interval of collection image；CCD camera parameter includes time for exposure and cumulative time
Number.
It is specially to gather image according to time interval that the electron microscope gathers image by CCD.
It is described to establish file and file comprises the following steps：
Scan all in selected data storage path that a newly-built file, the name form of file are each time：
Year_Month_Day_N_Funct；Wherein Year, Month, Day represent from computer system read experimental day year,
The moon, day；N represents it is the n-th file established under the store path on the day of, represents the experiment link where present scan；
Funct represents this time to scan the function to be realized；
The picture row obtained by functionality scan are all stored in the file established for this scanning each time, in picture row
The name form of picture is：Year_Month_Day_N_ sequence numbers；Wherein Year, Month, Day represent reads from computer system
Experimental day year, month, day；N represents it is the n-th file established under the store path on the day of, represents present scan
The experiment link at place；Sequence number represents it is at which figure in picture row.
The file includes three txt files, its name be by the Funct suffix of folder name be changed to respectively camera,
microscope、trace；Wherein camera files storage CCD camera parameter；Before the preservation scanning of microscope files starts
Microscopical 102 parameters；Parameters variation in trace file records scanning process.
The trace files include the one or more in picture numbers, acquisition time, STV values, object lens value, temperature, can
It is used for spectrum analysis to directly read.
The invention has the advantages that and advantage：
1. programming is simple and easy, without extra installation software.
2. data are named storage by scan function automatically, time-saving and efficiency can embody experiment relevant information, and file structure is closed
Reason, is easily discernible management.
3. being stored in the lump together with important parameter and Parameters variation, beneficial to retrospective analysis and equipment regulation is carried out.
4. SPELEEM common function is better achieved.
Brief description of the drawings
Fig. 1 is flow chart of the method for the present invention.
Embodiment
With reference to embodiment, the present invention is described in further detail.
The present invention automatically controls SPELEEM equipment and carries out experimental data collection, save by writing VBscript shell scripts
Shi Gaoxiao, and the management, analysis and equipment of data can be facilitated to adjust, the common function of the equipment can be better achieved.
Writing and debugging for VBscript shell scripts is carried out in the script-editor that SPELEEM control softwares provide, and is made full use of
The method of equipment control software offer, attribute, and FileSystemObject (FSO) object of Windows systems, without volume
The outer other softwares of installation, it is simple and easy.
Whole system includes a set of Elmitec-SPELEEM equipment, an operation have Windows7 operating systems and
The computer of SPELEEM control software LEEM2000, U-view2002.Wherein LEEM2000 is microscope control software, is used
To adjust all parts unit such as the electron gun on imaging optical path, lens and energy analyzer；U-View2002 is IMAQ
Control software, for adjusting the image acquisition parameter of CCD camera.VBscript shell scripts being write and debugging
Carried out in the script-editor that SPELEEM control softwares provide.Microscope and CCD camera automatically control, and related ginseng
Several read-writes, realized by the method and attribute of calling control software offer；VBscript can directly invoke Windows operations
FileSystemObject (FSO) object of system, name and storage to data file are managed.
Realize that the data of a certain function need to gather by the scanning process once automatically controlled, we term it once
Functionality scan.Experiment carry out exactly complete each functionality scan.A functionality scan is carried out, is comprised the following steps：
According to the function to be realized, the parameter of setting control scanning process, generally scanning range begin, end is worth and step
It is long；CCD imaging parameters, generally accumulative frequency and time for exposure are set according to image formation state；
Automatically it is that file is established in this scanning by storage and naming rule under specified data storage path, and herein
Microscope parameter is preserved in file, CCD camera parameter is txt file, the txt file of generation preparation write-in scanning track.
It is scanned, automatic data collection simultaneously writes storage scanning rail by naming rule storage picture row, while by Parameters variation
The txt file of mark.
The data storage path specified, the data storage path voluntarily selected for experimenter when program is run.
The storage and naming rule include：
All functionality scans done in same day experimentation, all it is saved in and is specific under the specified store path on the same day.
The all newly-built file of functionality scan, the naming method of file are each time：Year_Month_Day_N_
Funct.Wherein Year, Month, Day represent the year, month, day of the experimental day read from computer system；N represents it is to work as
The n-th file established under it store path, it may be said that bright this time scanning is which link generation in experiment process；
Last Funct is abbreviation letter suffix, illustrates this time to scan the function to be realized.If 2016_08_24_003_XPS is table
Show that is done realize the scanning of XPS functions for August in 2016 24 days, be the 3rd scanning done in same day experimentation.
The picture row obtained by functionality scan are all stored in the file established automatically for it each time, are schemed in picture row
The name of piece, it is that the Funct suffix of folder name is changed into sequence number, such as 2016_08_24_003_M, M presses storage order from 000
Increase successively.In file in addition to the picture row obtained by scanning, also comprising three txt files, its name is by folder name
Funct suffix be changed to camera, microscope, trace respectively.Wherein camera files storage CCD camera is main
Parameter；Microscope files save microscopical 102 parameters before scanning starts；Trace file records scanning process
In Parameters variation.
According to SPELEEM common function, functionality scan of the present invention has (with corresponding Funct abbreviation imperial mother
Sew mark):XPS、LMIV、LDIV、FOCUS、MOV、PS.
Wherein most typically scanned using obtaining XPS of the xps energy spectrum as target, as shown in figure 1, being said to its scanning process
It is bright as follows：
On the premise of imaging resolution is met, larger binning values are selected so both may be used to reduce the pixel of picture
To improve signal intensity, the size of picture can also be reduced, saves memory space.Microscopes optical path is adjusted, makes imaging clearly, if
It is standby to be in the state that proceed by XPS functionality scans.
Operation program, beginning, end value and the step-length that sweep parameter is inputted by prompting are (single assuming that respectively 335,354.8,0.2
Position V), and ccd image acquisition parameter.XPS sweep parameter is the Start Voltage (STV, unit V) being added on sample,
The photoelectronic kinetic energy (unit eV) that excitation of X-rays goes out is characterized, it begins, last value determines the energy range of scanning XPS spectrum, step-length
Determine the fineness of power spectrum.The ccd image acquisition parameter for needing to set is time for exposure and accumulative frequency.The choosing of time for exposure
The intensity distribution for needing to consider MCP (microchannel plate) voltages and XPS spectrum is selected, enough signal intensities can be obtained, again
Prevent respective regions overflow and damage MCP and fluorescent screen.Big accumulative frequency can obtain better image quality, but institute
Taking time also can be longer.
Selected data store path, the same day all data are stored under this path.If this time scanning is not the same day
First time scanning, will give tacit consent to and use the store path specified when scanning for the first time.
Automatically under selected store path for this XPS scannings establish file 2016_08_24_003_XPS (assuming that
This time XPS scannings are the 3rd scanning that August in 2016 is done on the 24th).102 parameters on microscopes optical path, write-in are read one by one
Into 2016_08_24_003_microscope.txt files and preserve；The major parameter of CCD camera is read, is written to
2016_08_24_003_camera.txt in file and preserve；2016_08_24_003_trace.txt files are generated, are prepared
The change of write parameters in scanning process.
Start scanning process.Picture collection step is as follows：STV values are judged whether in the scanning range of setting, as
Words, then calculate matched object lens value Obj (Objective, unit mA).Obj characterizes the focal length of electromagnetism object lens, available
Following formula obtains：
Obj=coef0+coef1 × STVcoef2
Wherein, coef0 is the Obj values before scanning starts, and coef1 and coef2 are device-dependent parameter, can be passed through
Sample multigroup STV values and Obj values on a large scale on the sample easily focused on, be fitted to obtain.
(STV, Obj) value is passed into corresponding power supply, waits certain time to make power good, starts CCD camera, presses
The time for exposure of setting and accumulative frequency carry out IMAQ, and gained image is stored as to the picture of specified format, then will figure
Piece sequence number, STV and Obj values write-in trace files.Next by setting step-length increase STV values, repeat draw above piece and gathered
Journey, until STV reaches scanning end value, terminate scanning process.The trace files finally obtained are as follows：
First is classified as the sequence number of scanning gained picture, and second and third is classified as (STV, Obj) value when gathering each picture.trace
Parameter in file can directly read the drafting for chart, can also contrast imaging effect in addition and carry out equipment regulation.It is right
In the form of deposited picture, it is advisable with 16 uncompressed tiff formats, can be with the strength information of the reservation image of free of losses.
After the completion of finally scanning, recover the value before (STV, Obj) starts to scanning, quit a program, complete this subfunction and sweep
Retouch.
With reference to the explanation of XPS scanning processes, being described as follows above to other functionality scans：
LMIV represents LEEM-IV, records change of the LEEM images with STV, and now STV characterizes the electricity for inciding sample surfaces
The energy of beamlet.
LDIV represents LEED-IV, records change of the LEED patterns with STV, and now STV characterizes the electricity for inciding sample surfaces
The energy of beamlet.
LMIV and LDIV scanning process and XPS scanning process are the same.
FOCUS scans for focusing, and the purpose is to look for optimal imaging focal length.By scanning objective value Obj and store figure
Piece, finally find out the Obj values of corresponding most blur-free imaging.FOCUS and the difference of XPS scanning processes are sweep parameter, FOCUS's
Sweep parameter is Obj, and need not coordinate change other parameters when changing Obj.For the ease of checking parameter, being adjusted to picture,
FOCUS is scanned as the content of the trace files of XPS scannings, although not changing STV when FOCUS is scanned.
MOV represents movie, is changed with time for recording image in experimentation.MOV needs the sweep parameter set
Only one, that is, gather the time interval t of forward and backward two pictures.After scanning process starts, a figure is just gathered every time t
Piece, this process will persistently go on, until artificially terminating program.The substance of MOV trace files includes two columns
Value, first is classified as the sequence number of scanning gained picture, and second is classified as the acquisition time of every pictures, wherein adopting the first pictures
The collection time is set to 0.If there are other experiment parameters also changing with the time, such as the temperature of sample, then by it in the lump
It is written in trace files.
PS represents picture series, and the purpose is to keep experiment condition and imaging parameters are constant records a series of figures
Piece, picture is arranged and carries out drift correction and cumulative mean, it is possible to reduce be imaged the influence of drift, improve signal to noise ratio, obtain more preferable
Imaging resolution.The sweep parameter that PS needs to set is the number of pictures in picture row, when the picture for acquiring setting number
Terminate program afterwards.Although not being related to the change of microscope parameter in scanning process, we are still that it establishes scan one with XPS
The trace files of sample content, in order to check parameter, be adjusted to picture.
Claims (10)
1. the automatic data acquisition method for composing analysis photoelectron/low energy electron microscopy, it is characterised in that including following step
Suddenly：
Sweep parameter, CCD camera parameter are set, file and file are established under selected data storage path；
Electron microscope gathers image by CCD, while by the image of collection and corresponding parameter read-in to file.
2. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
It is characterised by that the sweep parameter includes STV beginning, last value and step-length, CCD camera parameter includes time for exposure and cumulative time
Number.
3. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
It is characterised by that the electron microscope gathers image by CCD and comprised the following steps：
Matched object lens value Obj=coef0+coef1 × STV is worth to according to the STV of electron microscopecoef2；Coef0 is
The Obj values before starting are scanned, coef1 and coef2 are device parameter；
STV values and object lens value Obj are exported to electron microscope, electron microscope and use this STV value and object lens value Obj collection figures
Picture.
4. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
Be characterised by beginning, last value and the step-length of the sweep parameter including object lens value Obj, CCD camera parameter include the time for exposure with
Accumulative frequency.
5. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
It is characterised by that the electron microscope gathers image by CCD and comprised the following steps：
Object lens value Obj is exported to electron microscope, electron microscope image is gathered according to object lens value Obj.
6. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
It is characterised by that the sweep parameter includes the time interval of collection image；CCD camera parameter includes time for exposure and cumulative time
Number.
7. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
It is specially to gather image according to time interval to be characterised by that the electron microscope gathers image by CCD.
8. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
It is characterised by described and establishes file and file comprises the following steps：
Scan all in selected data storage path that a newly-built file, the name form of file are each time：Year_
Month_Day_N_Funct；Wherein Year, Month, Day represent the year, month, day of the experimental day read from computer system；
N represents it is the n-th file established under the store path on the day of, represents the experiment link where present scan；Funct tables
Show and this time scan the function to be realized；
The picture row obtained by functionality scan are all stored in the file established for this scanning each time, picture in picture row
Name form be：Year_Month_Day_N_ sequence numbers；Wherein Year, Month, Day represent the reality read from computer system
Test the year, month, day on the same day；N represents it is the n-th file established under the store path on the day of, represents present scan place
Experiment link；Sequence number represents it is at which figure in picture row.
9. the automatic data acquisition method according to claim 1 for being used to compose analysis photoelectron/low energy electron microscopy, its
Be characterised by that the file includes three txt files, its name be by the Funct suffix of folder name be changed to respectively camera,
microscope、trace；Wherein camera files storage CCD camera parameter；Before the preservation scanning of microscope files starts
Microscopical 102 parameters；Parameters variation in trace file records scanning process.
10. the automatic data acquisition method according to claim 9 for being used to compose analysis photoelectron/low energy electron microscopy,
It is characterized in that the trace files include the one or more in picture numbers, acquisition time, STV values, object lens value, temperature,
It can directly read for spectrum analysis.
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