CN107837983B - A kind of electromagnetic levitation type glue spreader with quantitative drop glue - Google Patents
A kind of electromagnetic levitation type glue spreader with quantitative drop glue Download PDFInfo
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- CN107837983B CN107837983B CN201711065084.7A CN201711065084A CN107837983B CN 107837983 B CN107837983 B CN 107837983B CN 201711065084 A CN201711065084 A CN 201711065084A CN 107837983 B CN107837983 B CN 107837983B
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- Prior art keywords
- glue
- pallet
- amb
- shell
- quantitative
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
- B05B13/0228—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the movement of the objects being rotative
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/084—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to condition of liquid or other fluent material already sprayed on the target, e.g. coating thickness, weight or pattern
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/10—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to temperature or viscosity of liquid or other fluent material discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0285—Stands for supporting individual articles to be sprayed, e.g. doors, vehicle body parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
- B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
- B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
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- Coating Apparatus (AREA)
Abstract
The invention discloses a kind of electromagnetic levitation type glue spreaders with quantitative drop glue function, including shell, it is mounted on the quantitative adhesive dripping machine structure of housing tip, the motorized spindle supported with AMB of installation inside housings, it is mounted on the pallet on motorized spindle supported with AMB top, and it is mounted on the negative-pressure adsorption mechanism that magnetic suspension top is located at below pallet, substrate is placed on pallet, negative pressure, which is generated, in bottom according to negative-pressure adsorption principle realizes absorption, pallet rotation is driven by motorized spindle supported with AMB, quantitative adhesive dripping machine structure quantitatively drips glue above substrate, realizes uniformly coating.
Description
Technical field
The present invention relates to glue spreaders, and in particular to a kind of electromagnetic levitation type glue spreader with quantitative drop glue function, Ke Yishi
Existing substrate surface quantitative and even gluing.
Background technique
Glue spreader is also known as photoresist spinner, whirler, and principle is on high-speed rotating substrate, and substrate is mostly silicon wafer, drop
All kinds of glues are infused, are uniformly coated on substrate using the glue that centrifugal force and surface tension make to drip on substrate, form one layer
Film, centrifugation spin coating process are a primary crucial steps in photoetching process.Controllability, the base of jelly amount are dripped during gluing
The adjustability of the factors such as the fixation of piece, the stationarity of main shaft rotation, the ornamental of data monitoring and revolving speed time is all should
An important factor for consideration, decides the uniformity of the clarity of figure, the viscosity of glue and film thickness in final photoetching process.
In existing glue spreader, main shaft is that traditional mechanical bearing supports, so that rotation process is big in the presence of friction, noise
The problem of, and structure is complicated, the service life is short for mechanical bearing, while conventional master spindle needs are lubricated and good sealing,
It is difficult to ensure and controls the horizontal accuracy of rotary table, main shaft rotation is unstable, easily leads to the uneven of glue film coating.
Further, since coating substrate is very thin, it is virtually impossible to be fixed by the way of clamping, so existing glue spreader is using pumping
Coating substrate is fixed on corresponding positions always when air pump generates adsorption capacity to overcome centrifugal force and surface tension that glue spreader is made to work
It sets.But aspiration pump haves the shortcomings that volume is big, noise is big, while the drop glue process of existing glue spreader uses manually, this
Sample will lead to drop glue location error, it is also difficult to control and record drop glue amount.
Summary of the invention
To overcome the shortcomings of existing technologies, the present invention provides a kind of electromagnetic levitation type gluings with quantitative drop glue function
The coating of stable and uniform may be implemented in machine.
Present invention discloses a kind of electromagnetic levitation type glue spreaders with quantitative drop glue function, including shell, are mounted on shell
The quantitative adhesive dripping machine structure on top, installs motorized spindle supported with AMB inside housings, is mounted on the pallet on motorized spindle supported with AMB top,
And it is mounted on the negative-pressure adsorption mechanism that magnetic suspension top is located at below pallet, in which:
Quantitative adhesive dripping machine structure includes glue bottle, sebific duct, constant displacement pump, regulating mechanism and spray head, and spray head is interspersed in by sebific duct
In glue bottle, and constant displacement pump is mounted on sebific duct to extract the glue in glue bottle to spray head and spray, and glue bottle is located at hull outside, spray head
Enclosure interior is extended to across housing top wall, and is realized by the regulating mechanism of installation inside housings and drips glue position tune up and down
Section；
The enclosure interior middle position has workbench, and lower section has lower clapboard, and motorized spindle supported with AMB is installed on work
Between platform and lower clapboard, and both ends are each passed through workbench and lower clapboard, and groove is provided at the top of the motorized spindle supported with AMB, and
There is air flue communication groove up and down on motorized spindle supported with AMB central axes；
The negative-pressure adsorption mechanism includes the support rod being interspersed in air flue, is fixed on post upper and is located in groove
Motor, the fan group being mounted on motor shaft, and the air draught of fan group is face-up, support rod bottom end is fixed in housing bottom surface,
The motor-driven fan group rotation, forms negative pressure in groove；
The pallet is mounted on motorized spindle supported with AMB top and is located at immediately below spray head, and center has adsorption hole, magnetcisuspension
Floating electro spindle driving pallet rotation, negative-pressure adsorption mechanism form negative pressure in groove and adsorption hole, the base placed on pallet are sucked
Piece.
Preferably, the surface of shell is hinged with operation door, there is transparent windows and handle on the operation door.
Preferably, the surface of shell is embedded with control panel, there is display screen, multiple operation buttons, control panel
Corresponding back side of shell is equipped with control panel, the motor, and motorized spindle supported with AMB and constant displacement pump are electrically connected with control panel.
Preferably, the fan group is that multiple flabellums are arranged up and down, and air draught face is upward.
Preferably, being also equipped with auxiliary adsorbing mechanism in the motorized spindle supported with AMB top groove, it is located at negative pressure and inhales
Above random structure, it is a fan with outline border, is fixedly mounted in groove by fastener, the air draught of fan is facing towards absorption
Hole.
Preferably, being covered with muff outside the glue bottle and sebific duct.
Preferably, the regulating mechanism includes shell, mutually matched gear and rack gear inside housings, gear are installed
It is immobilized in the shell by shaft, and roller end extends to hull outside, and is equipped with adjusting knob, the sebific duct is fixed on
It on rack gear, is rotated by adjusting knob band moving gear, so that rack gear moves up and down, sebific duct and spray head is driven to realize up and down
Height adjustment.
Preferably, the regulating mechanism further includes grating measuring device and the digital display meter that is mounted on shell, the light
Grid measuring device selects SINO letter and grating, including the grating displacement sensor being mounted on rack gear, and is attached to corresponding housing
Grating scale on inner wall, the grating displacement sensor are electrically connected with digital display meter, when height adjustment is realized in wheel and rack cooperation,
Height is adjusted by optical grating ruler measurement, and is carried out by digital display meter apart from display, so that it is sized more intuitive, and adjust aobvious
Show that precision can achieve 0.001mm, which is SDS2MS model display screen digital display meter.
Preferably, the table surface is embedded with horizontal bubble instrument, housing bottom is equipped with leveling bracket, and the two is matched
Conjunction ensures that workbench is horizontality.
Preferably, being installed on the workbench outside the pallet equipped with outer cover, and outer cover height is greater than pallet installation height
Degree.
A kind of disclosed electromagnetic levitation type glue spreader with quantitative drop glue function, is replaced using motorized spindle supported with AMB
For traditional mechanical main shaft, since it uses magnetic bearing to be supported, without friction between stator rotor, and magnetic bearing is not required to
It lubricates and seals, therefore revolving speed is high when motorized spindle supported with AMB operating, controllability is good, close to no friction, is lost low and uses
Service life is long, it is important to which small (an order of magnitude is up to 0.002mm) is jumped at end when operating, this precision is much higher than roller bearing supports
(0.02mm) greatly improves gluing precision.
It is fixed in view of substrate adsorbs, the present invention uses negative-pressure adsorption principle, and motorized spindle supported with AMB end is improved
Multistage groove is set, and setting runs through upper and lower air duct, setting negative-pressure adsorption mechanism and auxiliary in groove on shaft centre line
Adsorbing mechanism, wherein negative-pressure adsorption mechanism using motor driven it is oppositely arranged fan rotation, due to flabellum air draught facing towards
Pallet, so fan rotation can form negative pressure in tray bottom, so that the absorption to substrate on pallet is realized, in order to increase negative pressure
Adsorption capacity, uses upper and lower multiple fans to enhance negative-pressure adsorption power, the fixation for motor in groove and fan, using support rod
It is fixed on housing bottom across air duct, realizes and stablizes support, control air duct diameter is slightly larger than support rod, and air duct bottom is set
It is set to horn mouth, promotes air duct wind-guiding, reduces windage in air duct, and then promote adsorption effect.
Assisting adsorbing mechanism is the flabellum being directly inlaid in groove, and the air draught of the flabellum is face-up, in magnetic suspension electricity master
When axis rotates, rotates with main shaft, to be similarly formed negative pressure under adsorption orifice, may be implemented to the substrate adsorbed together
Auxiliary absorption so that substrate coat when negative-pressure adsorption mechanism stop working, to realize power saving noise reduction.
For drop glue operation, using constant displacement pump carry out drop glue amount control, control flow, and can also by display screen into
Row display is controlled in real time with realizing, it is contemplated that spray head is fixed on regulating mechanism by influence of the nozzle position to the drop glue uniformity
On, the adjusting of nozzle position may be implemented by regulating mechanism, it can be ensured that the spray head face substrate center of circle, while being located on substrate
Square rational position, facilitates drop glue, and spray head adjusts height and passes through optical grating ruler measurement and be shown on display screen, to observe and
Control to adjust height distance.
Compared with prior art, a kind of electromagnetic levitation type glue spreader with quantitative drop glue of the invention, has following beneficial
Effect:
It using motorized spindle supported with AMB, may be implemented smoothly to run at high speed, and operation process is without friction, noiseless, rotation
It is good to turn stationarity, precision is high；
For the horizontally disposed of workbench, bottom adjustable support is cooperated using horizontal bubble instrument, it is ensured that operation is horizontal early period
Platform is adjusted to horizontal position, and then ensures uniform gluing；
Increase muff outside glue bottle, it can be ensured that glue keeps low-temperature condition in glue bottle, promotes drop glue efficiency；
Since gluing process is centrifugal movement, how much there are problems that glue is thrown away, it pollutes inner walls in order to prevent,
The outer cover that height is greater than pallet height is added outside pallet so that the glue thrown away is all adsorbed on outer cover, and the outer cover be can
Disassembly is installed on the workbench, and can remove cleaning at any time, easy to use；
The fan reversely installed being located at below pallet is used for the absorption of substrate, negative pressure is generated and then realizes suction
Attached, not only absorption is secured, but also fan and motor volume are small, and extra noise is not present；
Quantitatively drop glue control is realized using constant displacement pump for drop glue, not only ensure that substrate surface coated glue film, but also will not deposit
It is excessive in drop amount and the problems such as cause coating thickness excessive, while nozzle position is adjustable, not only easy to operate, but also may insure
The alignment of coating center, promotes the uniformity of coating.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the partial enlarged view of Fig. 1；
Fig. 3 is shape assumption diagram of the invention；
Fig. 4 is the structure sectional view of motorized spindle supported with AMB of the present invention；
Fig. 5 is the side sectional view of regulating mechanism of the present invention；
Fig. 6 is the front view of regulating mechanism of the present invention；
Fig. 7 is the structure chart of present invention auxiliary adsorbing mechanism.
Specific embodiment
Below in conjunction with attached drawing of the invention, clear, complete description is carried out to the technical solution of the embodiment of the present invention.
As shown in Fig. 1 ~ 7, a kind of disclosed electromagnetic levitation type glue spreader with quantitative drop glue function, including shell
Body 1 is mounted on the quantitative adhesive dripping machine structure on 1 top of shell, installs motorized spindle supported with AMB 6 inside housings, be mounted on magnetic suspension
The pallet 3 on electro spindle top, and it is mounted on the negative-pressure adsorption mechanism that magnetic suspension top is located at below pallet.
Particularly, the 1 bosom position of shell has workbench 18, and surface is embedded with horizontal bubble instrument 5, shell
There is lower clapboard 19, the 1 outside front of shell is hinged with operation door 31, and has transparent observing on the operation door below body 1
Window 32 and handle 30 are realized the taking-up of interior substrate or are put into, observe internal coat by observation window by opening operation door
Situation, hull outside face lower section are embedded with control panel, with display screen 33, time knob 34, speed adjustment knob 35, drop glue rotation
Button 36, rotary switch 37 and negative-pressure adsorption start switch 38, and inner walls are equipped with control panel, the control panel and display screen, when
Between knob, speed adjustment knob drips glue knob, rotary switch and negative-pressure adsorption switch electrical connection, on four angles of the housing bottom
Leveling bracket 7 is installed, the adjusting of leveling bracket progress driving water Pingdu is cooperated by horizontal bubble instrument, it is ensured that at horizontal platform
In horizontality.
The quantitative adhesive dripping machine structure includes glue bottle 8, sebific duct 9, constant displacement pump 12, spray head 14 and regulating mechanism 13, and glue bottle 8 is solid
It is scheduled on hull outside and passes through 10 end socket of bottle cap, sebific duct passes through bottle cap and is inserted in glue bottle 8, connects after other end connection constant displacement pump 12
Spray head 14 is connect, is sprayed by glue in constant displacement pump extraction glue bottle by spray head, and extraction amount is fixed amount, can pass through constant displacement pump
The adjusting of extraction amount is carried out, muff 11 is covered with outside the glue bottle and sebific duct, it can be ensured that internal glue is in low temperature shape
State guarantees that coating quality, the constant displacement pump are electrically connected with control panel, controls its work and adjusting, the spray head by control panel
It is protruded into shell across housing top wall, and nozzle position adjusting is carried out by the regulating mechanism in installation on the inner wall of the housing.
The regulating mechanism 13 includes shell 131, installs mutually matched gear 132 and rack gear 133 inside housings, light
Grid measuring device 136 and digital display meter 27, gear is immobilized in the shell by shaft 134, and roller end extends to outside shell
Portion is equipped with adjusting knob 135, is rotated by adjusting knob band moving gear, so that rack gear moves up and down, the sebific duct is solid
It is scheduled on rack gear 133, as rack gear moves up and down, sebific duct and spray head realize that upper-lower height is adjusted, and grating measuring device 136 selects
With SINO letter and grating, including the grating displacement sensor being mounted on rack gear, and the grating being attached on corresponding housing inner wall
Ruler, the grating displacement sensor are electrically connected with digital display meter 27, when height adjustment is realized in wheel and rack cooperation, pass through grating scale
Measurement adjusts height, and is carried out by digital display meter apart from display, so that sized more intuitive, and adjusting display precision can be with
Reach 0.001mm, which is SDS2MS model display screen digital display meter.
The motorized spindle supported with AMB is installed between workbench 3 and lower clapboard 19, and both ends are each passed through workbench under
Partition, structure include main shaft housing 616, main by the interspersed shaft 610 being fixed in main shaft housing 616 of auxiliary bearing 620
Radial transducer 611, radial magnetic bearing stator 612, motor stator 613, diameter are from top to bottom disposed in shaft housing
To magnetic suspension bearing stator 612, axial magnetic suspension bearing stator 614, axial sensor 615, and distinguish from top to bottom on main shaft
Equipped with radial rotor 617, rotor 618, radial rotor 617 and axial rotor 619, wherein radial rotor and axial magnetic
Bearing stator position is corresponding to cooperate, and rotor and motor stator position are for cooperating, axial rotor and axial magnetic
Suspension bearing position of stator is corresponding to cooperate, and wherein radial magnetic bearing stator, motor stator, axial magnetic suspension bearing are fixed
The coil energization of son can generate electromagnetic force, to make corresponding rotor suspension, radial transducer and axial sensor can be examined
The levitation position of respective rotor is surveyed, and the displacement that control panel will test is converted to control signal, then control is believed by power amplifier
It number is converted into control electric current, electric current is by electromagnet generation magnetic force, thus guarantee that rotor maintains set levitation position, thus
It can guarantee the balance and stability of pallet.The structure of motorized spindle supported with AMB used in the present invention and existing electro spindle on the market
And principle is consistent, the present invention slightly illustrates its structure, and unaccounted part can refer to the prior art.
The shaft 610 is interspersed between workbench and lower clapboard, and top is provided with multistage groove 20, and topmost with
And embedded with auxiliary adsorbing mechanism 25 in groove, the auxiliary adsorbing mechanism is the fan for having outline border, and outline border 251 is logical
Fastener 26 to be crossed to be fixedly mounted in groove, fan is integral with outline border and rotates with shaft, and the air draught of fan 252 is face-up,
It keeps watch and inhales down, substrate is adsorbed on pallet, there is air flue 21 up and down on the central axes of the shaft 610, and
Air flue upper end communication groove, lower end have horn mouth 22, and pallet 3 is mounted on shaft upper end and is fixedly mounted by fastener 26,
Center location has adsorption hole 23.
The negative-pressure adsorption mechanism is mounted in multistage groove 20, is located at below auxiliary adsorbing mechanism, including be interspersed in gas
Support rod 17 in road is fixed on the motor 16 of post upper, the fan group 15 being mounted on motor shaft, the support rod bottom
Portion is fixed on housing bottom surface by fixed block 24, and fan group is multiple flabellums arranged up and down, is mounted on machine shaft,
And the air draught of each fan is face-up, face adsorption hole, the motor 16 is electrically connected with control panel, is controlled in negative-pressure adsorption mechanism
Motor 16 works so that fan group rotates, and fan rotation when main shaft works with dynamic auxiliary adsorbing mechanism, two fan works will
The gas of upper end is aspirated through air flue and blows out again from horn mouth, and it is negative that elongated air flue cooperation horn mouth forms flabellum upper end
Pressure, forms adsorption capacity, when substrate 2 is placed on pallet, substrate is firmly adsorbed on by the negative-pressure adsorption power of lower section in adsorption orifice
On pallet.
It is equipped with outer cover 4 outside the pallet to be installed on the workbench, and outer cover height is greater than pallet mounting height, Ke Yiyou
Effect blocks the glue thrown away on substrate.
The glue spreader is realized the secured absorption of substrate by negative-pressure adsorption principle, first starts negative-pressure adsorption before electro spindle rotation
Mechanism, motor-driven fan group rotate, and vacuumize to form negative pressure in groove, realize substrate absorption, when electro spindle starts rotation,
Main shaft band dynamic auxiliary adsorbing mechanism fan rotation generates negative pressure, realizes substrate absorption, can close negative-pressure adsorption mechanism at this time, real
Now economize on electricity, noise reduction.It should be pointed out that the rotation of the fan of fan group and auxiliary adsorbing mechanism is independently of each other, to pass through control
Device controls negative-pressure adsorption mechanism and stops working after main shaft starts rotation 30 seconds, while starting work when main shaft rotary switch is closed
Make, substrate is sucked to guarantee to generate enough adsorption capacities, after main shaft rotation stops, turning off motor power, stops to fan group
After rotation, substrate is removed.
A kind of disclosed electromagnetic levitation type glue spreader with quantitative drop glue function, the course of work are as follows:
The position that bottom leveling bracket 7 adjusts glue spreader is first passed through before starting glue spreader, passes through observation water in adjustment process
Whether the bubble in flat bubble instrument 5 is in center position to guarantee the balance of glue spreader, after guaranteeing level, presses negative-pressure adsorption and opens
Dynamic switch 38 starts negative-pressure adsorption mechanism, and motor 16 works, and fan group 15 starts turning, and fan rotation accelerates air flowing, makes
It obtains 3 inner cavity of pallet and forms negative pressure, so that substrate 2 be made firmly to be adsorbed on pallet 3, multiple fans co-operation play pressurization
Effect, guarantee to remain in correct position in high-revolving operating condition subtegulum 2.When the auxiliary adsorbing mechanism that main shaft drives starts
After rotation 30 seconds, motor-driven fan group just stops operating, to reduce energy consumption.When main shaft rotary switch is closed, main shaft is driven
The rotation speed of the fan of auxiliary adsorbing mechanism will be gradually decrease to stop, and motor 16 is reworked at this time, drive fan group rotation and produce
Raw negative pressure continues to adsorb substrate.It is not interfere with each other by two groups, the fan alternating action of independent control operating, so that substrate is any
What can be consolidated under state is fixed on pallet.
Before dripping glue, regulating mechanism 13 is rotated as needed and adjusts spray head 14 at a distance from substrate 2 and relative position, is passed through
Glue is quantitatively dripped in the realization of constant displacement pump 12, and drop glue amount can be arranged by drop glue knob 36, since jelly is higher to temperature requirement, need to be put
Set freezer storage, to keep low temperature when work, the add insulation sleeve 11 in glue bottle 8 and sebific duct 9, meanwhile, bottle cap 10 and 9 screw thread of sebific duct
Connection when sol evenning machine does not work or needs replacing jelly, need to only replace glue bottle 8.Drop glue process can be divided into static state
Two kinds of glue of glue and dynamic drop are dripped, static state drop glue is first to drip glue, and rear gluing after the completion of dripping glue, is revolved by time knob 34 and speed
Button 35 selects the time required to spin coating and speed, presses the beginning gluing of rotary switch 37 after setting parameter needed for gluing.Dynamically
During dripping glue, firstly, low speed rotation substrate 2, while drop glue is carried out, after dripping glue, then adjustment speed knob 35, make substrate
2 high speed rotations；Quiet, two kinds of drop glue modes of dynamic can be selected according to the viscosity of jelly.
The gluing course of work can be observed by transparent acrylic observation window 32 during spin coating in real time, be got rid of during gluing
The jelly of substrate will be blocked by outer cover 4 out, be polluted in glue spreader in order to avoid getting rid of.After the completion of gluing, gluing gate is opened
31 take out the substrate 2 for having coated jelly.
Balance, precision, revolving speed and the time of dripping glue position in 2 rotary course of spin coating substrate etc. are all to determine gluing
An important factor for quality, replaces traditional mechanical main shaft using motorized spindle supported with AMB 6, can guarantee shaft during spin coating well
610 stationarity is to guarantee the balance of substrate 2, and auxiliary bearing 620 plays the role of temporary brake in motorized spindle supported with AMB,
Magnetic bearing emergency cases, the setting for revolving speed such as out of control or system cut-off suddenly, which can be successfully managed, can pass through adjusting
The frequency converter of motor changes revolving speed in real time.
Technology contents and technical characteristic of the invention have revealed that as above, however those skilled in the art still may base
Make various replacements and modification without departing substantially from spirit of that invention in announcement of the invention, therefore, the scope of the present invention is answered unlimited
It in the revealed content of embodiment, and should include various without departing substantially from replacement and modification of the invention, and be present patent application right
It is required that being covered.
Claims (10)
1. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function, it is characterised in that: including shell, be mounted on housing tip
Quantitative adhesive dripping machine structure, motorized spindle supported with AMB inside housings is installed, the pallet on motorized spindle supported with AMB top is mounted on, and
It is mounted on the negative-pressure adsorption mechanism that motorized spindle supported with AMB top is located at below pallet, in which:
Quantitative adhesive dripping machine structure includes glue bottle, sebific duct, constant displacement pump, regulating mechanism and spray head, and spray head is interspersed in glue bottle by sebific duct
It is interior, and constant displacement pump is mounted on sebific duct to extract the glue in glue bottle to spray head and spray, glue bottle is located at hull outside, and spray head passes through
Housing top wall extends to enclosure interior, and realizes that drop glue position is adjusted up and down by the regulating mechanism of installation inside housings；
The enclosure interior middle position have workbench, lower section have lower clapboard, motorized spindle supported with AMB be installed on workbench with
Between lower clapboard, and both ends are each passed through workbench and lower clapboard, and groove, and magnetcisuspension are provided at the top of the motorized spindle supported with AMB
There is air flue communication groove up and down on floating electro spindle central axes；
The negative-pressure adsorption mechanism includes the support rod being interspersed in air flue, is fixed on the electricity that post upper is located in groove
Machine, the fan group being mounted on motor shaft, and the air draught of fan group is face-up, support rod bottom end is fixed in housing bottom surface, institute
The rotation of motor-driven fan group is stated, forms negative pressure in groove；
The pallet is mounted on motorized spindle supported with AMB top and is located at immediately below spray head, and center has adsorption hole, magnetic suspension electricity
The rotation of main shaft drives pallet, negative-pressure adsorption mechanism form negative pressure in groove and adsorption hole, the substrate placed on pallet are sucked.
2. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: described
Surface of shell is hinged with operation door, has transparent windows and handle on the operation door.
3. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: described
Surface of shell is embedded with control panel, has display screen, multiple operation buttons, and the corresponding back side of shell of control panel is equipped with control
Making sheet, the motor, motorized spindle supported with AMB and constant displacement pump are electrically connected with control panel.
4. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: described
Fan group is that multiple flabellums are arranged up and down, and air draught face is upward.
5. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: described
It is also equipped with auxiliary adsorbing mechanism in motorized spindle supported with AMB top groove, is located above negative-pressure adsorption mechanism, is a band outline border
Fan, outline border is fixedly mounted in groove by fastener, and the air draught of fan is facing towards adsorption hole.
6. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: described
Muff is covered with outside glue bottle and sebific duct.
7. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: described
Regulating mechanism includes first shell, is mounted on mutually matched gear and rack gear, gear inside first shell and is fixed by shaft
In first shell, and roller end extends to outside first shell, and is equipped with adjusting knob, and the sebific duct is fixed on rack gear
On, it is rotated by adjusting knob band moving gear, so that rack gear moves up and down, sebific duct and spray head is driven to realize upper-lower height
It adjusts.
8. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 7, it is characterised in that: described
Regulating mechanism further includes the digital display meter of grating measuring device and installation on the first shell, which includes installation
Grating displacement sensor on rack gear, and the grating scale being attached on corresponding first shell inner wall, the pattern displacement sensing
Device is electrically connected with digital display meter, realizes the display of upper and lower position adjustable range.
9. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: described
Table surface is embedded with horizontal bubble instrument, and housing bottom is equipped with leveling bracket, and the two cooperation ensures that workbench is horizontal
State.
10. a kind of electromagnetic levitation type glue spreader with quantitative drop glue function according to claim 1, it is characterised in that: institute
It states and is installed on the workbench outside pallet equipped with outer cover, and outer cover height is greater than pallet mounting height.
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| CN108525902A (en) * | 2018-06-08 | 2018-09-14 | 重庆中铃兆虎机车制造有限公司 | Locomotive installs mobile device |
| CN109406052B (en) * | 2018-12-17 | 2023-12-22 | 洛阳恒锐测控科技有限公司 | High-speed high-precision bearing roller dynamic unbalance measurement device and measurement method |
| CN110586379A (en) * | 2019-09-17 | 2019-12-20 | 扬州市高升机械有限公司 | Paint spraying device for vehicle seat |
| CN112958310A (en) * | 2021-01-27 | 2021-06-15 | 滁州市友邦涂装有限公司 | Spraying device is used in processing of refrigerator metal accessories |
| CN113909021A (en) * | 2021-09-28 | 2022-01-11 | 江苏齐盛热能科技有限公司 | Foam spraying method and equipment with quantitative spraying function for processing far infrared ceramic tiles |
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| JP2009111344A (en) * | 2007-10-12 | 2009-05-21 | Fuji Electric Device Technology Co Ltd | Spin processor |
| JP2010155216A (en) * | 2008-12-26 | 2010-07-15 | Niigata Univ | Non-contact type rotation treatment apparatus for object to be treated |
| CN202070460U (en) * | 2010-12-30 | 2011-12-14 | 东莞宏威数码机械有限公司 | Vacuum adsorption rotating device |
| JP2015171751A (en) * | 2014-03-12 | 2015-10-01 | 株式会社荒井製作所 | Work-piece fixing mechanism |
| CN105057163A (en) * | 2015-07-15 | 2015-11-18 | 中国科学院长春光学精密机械与物理研究所 | Spin coating device and method utilizing airflow for controlling thickness of photoresist film |
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