CN107830819A - High-precision angular errors demarcation dish and calibration system with identification groove - Google Patents

High-precision angular errors demarcation dish and calibration system with identification groove Download PDF

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Publication number
CN107830819A
CN107830819A CN201710897402.XA CN201710897402A CN107830819A CN 107830819 A CN107830819 A CN 107830819A CN 201710897402 A CN201710897402 A CN 201710897402A CN 107830819 A CN107830819 A CN 107830819A
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CN
China
Prior art keywords
groove
coding
dish
group
angular errors
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CN201710897402.XA
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Chinese (zh)
Inventor
于海
万秋华
赵长海
杜颖财
卢新然
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201710897402.XA priority Critical patent/CN107830819A/en
Publication of CN107830819A publication Critical patent/CN107830819A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

The invention discloses a kind of high-precision angular errors demarcation dish and angular errors calibration system with identification groove.The angular errors demarcation dish includes:Disk body, the disk body are cylinder, and the whole side of the cylinder is reflective surface;Groove group is encoded, the coding groove group is inscribed in the coding groove on reflective surface for some circles, and the coding groove is binary coding;With reference reticle group, the reference reticle group is some equidistant, the wide reference reticles being inscribed on reflective surface.The invention provides a kind of high-precision angular errors with identification groove to demarcate dish, with reference to angle recognition instrument in use, can more traditional angular errors caliberating device realize the angular errors demarcation of more high resolution and higher precision.

Description

High-precision angular errors demarcation dish and calibration system with identification groove
Technical field
The present invention relates to photoelectric displacement Technology of Precision Measurement field, more particularly to one kind is used for high accuracy, high resolution turns Angle error demarcation has the demarcation dish of identification groove and a kind of angular errors calibration system.
Background technology
Angle displacement measurement equipment (such as photoelectric encoder) with its high accuracy, high resolution, measurement range is wide, easy to maintain, Using it is reliable the advantages that, be widely used in electro-optic theodolite, radar, Aero-Space, robot, Digit Control Machine Tool, director and The numerous areas such as high precision closed loop governing system.
In manufacture high accuracy, high resolution angle displacement measurement equipment, it is necessary to be demarcated to its error precision.Pass System error calibration device is divided into two kinds, and one kind is to use High-precision angle benchmark, is realized by comparison method to being calibrated equipment Error calibration;Another kind is to coordinate parallel light tube to realize the demarcation to angular errors using polygon.Understood, adopted according to research When carrying out error calibration with High-precision angle benchmark comparison method, the resolving power and precision of angle reference, which need to be more than, is calibrated equipment More than 3 times, therefore angle reference comparison method is applied to the error calibration of the angle displacement measurement equipment of the low precision of centering mostly.Right When High-Accuracy Angular Displacement Measurement equipment carries out error calibration, polygon standardization is used mostly.But demarcated by polygon Principle is limited, and this method can only realize the error calibration of individual location point identical with polygonal prism dignity number, it is impossible to realize more corners The error calibration of position.
CN106482669A discloses a kind of angle displacement measurement system using twin-line array image detector, and the angular displacement is surveyed Amount system mainly includes main shaft, light source, double optics lens, grating encoder, twin-line array image detector, data acquisition circuit, translated Code and angle sorting circuit, main shaft drives grating encoder to rotate during work, and light source sends source of parallel light and passed through through grating encoder Optical lens is mapped to linear array images detector image-forming, and data acquisition circuit gathers one of linear array images detector data simultaneously It is sent into decoding and sub-circuit is handled to obtain initial angle data, collection is placed on another linear array of code-disc to path position Image detector data, which are realized, to be calculated the error compensation of initial angle data, and angle information measured by output. It is angle displacement measurement system that CN106482669A is disclosed, and groove on its grating encoder used etc. can not realize more corners The error calibration of position.It is to carry out angle sorting to the pattern of grating encoder.
CN106989763A discloses a kind of absolute grating code-disc of image-type photoelectric encoder, including circular base plate, Thick code identification code channel and smart code identification code channel, smart code identification code channel are the circular code channel of the outmost turns positioned at circular base plate;Thick code It is the circumference binary system code channel secondary outer ring, zero-bit being present positioned at circular code wheel to identify code channel;For n positions absolute grating code Disk, circumferential code channel that thick code identification code channel includes the individual same center of circle different radiis of n, that width is equal and 2n identification position, Identify that position changes in binary format;The radial direction spacing of two neighboring circumferential code channel is preset value;Smart code identifies code channel bag Include 2n bars and be in smart code identification that the is same radial location in the same center of circle, radially delineating, equally distributed, not delineating zero-bit Groove.It can not realize the error calibration of more angle positions.
The content of the invention
When realizing high-precision error calibration the invention aims to solve existing error calibration equipment, it is impossible to realize High resolution error calibration, and provide a kind of high-precision angular errors demarcation dish with identification groove.
In a first aspect, the invention provides it is a kind of have identification groove high-precision angular errors demarcate dish, including:
Disk body, the disk body are cylinder, and the whole side of the cylinder is reflective surface;Encode groove group, the volume Code groove group is inscribed in the coding groove on reflective surface for some circles, and the coding groove is binary coding;And reference reticle Group, the reference reticle group are some reference reticles being inscribed on reflective surface, and the width of the reference reticle is equal, two-phase Separation delta between adjacent reference reticle is equal, separation delta=π d/2 between the reference reticle groupN, the benchmark is carved first Width is preset value, generally no greater than Δ/2.It is parallel to each other between the reference reticle of the datum line group, and the datum line is put down Row is in the height of the cylinder, and the reference reticle is perpendicular to and at the top of the coding groove, the coding groove group Coding groove be circle distribution binary coding.In the present invention, the coding groove group is arranged on cylinder disk body Lateral column face, whole lateral column face are provided with, i.e. 360 ° of circumference turn around.
In certain embodiments, the coding groove group has N circle coding grooves, is from top to bottom followed successively by first lap coding Groove, second circle coding groove ..., N circle coding groove, N is natural number.
In certain embodiments, N >=8.
In certain embodiments, N circles coding groove is surrounded with the axis of the disk body, while N circle coding grooves is every Spacing between the coding groove of two adjacent rings is equal, and the height for often enclosing coding groove is equal, the spacing of the coding groove For h/2, width is less thanPreferably, a diameter of preset value d of the cross section of the cylinder, be highly h, the cylinder The whole side of body is reflective surface;It is further preferred that predeterminable d=100mm, h=20mm, the width of the reference reticle are Preset value, width≤Δ/2 of the reference reticle, wherein, Δ is the spacing of two adjacent reference reticles.Preferably, N circles are compiled It is wide, equidistant between code groove.
In certain embodiments, first lap encodes groove and 2 is included in circumference0Bar groove, the second circle coding groove is in circle 2 are included in all1Bar groove, the 3rd circle coding groove include 2 in circumference2Bar groove ... the like, N circle coding grooves exist 2 are included in circumferenceN-1Bar groove, equal equidistantly distributed between the groove of each circle.
In certain embodiments, the reflective surface is divided into 2 by the coding grooveNIndividual coding region, the coding groove The reflective surface is divided into 2 by groupNIndividual coding region, the coding groove group of each coding region are unique to determine.
In certain embodiments, the coding groove is according to the coding groove of any coded system, the coding groove Group is the coding groove according to any coded system, and being encoded to for each coding region determines uniquely.
In certain embodiments, the reference reticle group has 2NBar groove, and perpendicular to coding groove group;The benchmark Groove group has 2NBar reference reticle.
In certain embodiments, the diameter (diameter of the cross section of the cylinder) of the reflective surface position is d, The then separation delta of two adjacent reference reticles=π d/2N
Second aspect, present invention also offers a kind of angular errors calibration system, wherein, the calibration system includes:Mark Determine dish, pallet, shaft coupling, switching identifier;The demarcation dish is arranged on the pallet and by shaft coupling with being marked Locking equipment is coaxially connected;The corner identifier is set in the same horizontal line with the demarcation dish, for realizing to described The identification and angular displacement subdivision for the coding groove demarcated in dish;The demarcation dish is demarcation dish provided by the present invention.
The invention provides a kind of high-precision angular errors with identification groove to demarcate dish, makes with reference to angle recognition instrument Used time, can more traditional angular errors caliberating device realize the angular errors demarcation of more high resolution and higher precision.
Brief description of the drawings
Fig. 1 is the principle according to the high-precision angular errors demarcation dish with identification groove of one embodiment of the invention Figure;
Fig. 2 is the structural representation according to the angular errors calibration system of one embodiment of the invention;
Fig. 3 is the schematic diagram according to a kind of groove of one embodiment of the invention;
In figure, 10, angular errors calibration system;1st, dish is demarcated;11st, disk body;12nd, reflective surface;13rd, groove is encoded; 131st, first lap coding groove;132nd, the second circle coding groove;133rd, N circles coding groove;14th, reference reticle;2nd, pallet;3、 Shaft coupling;4th, corner identifier;5th, it is calibrated equipment.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing and specific implementation Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only explaining this hair It is bright, without being construed as limiting the invention.
It is to demarcate dish according to the high-precision angular errors with identification groove of one embodiment of the invention as shown in Figure 1 Schematic diagram, in a specific embodiment, the invention provides it is a kind of have identification groove high-precision angular errors demarcation Dish 1, including:Disk body 11, the disk body 11 are cylinder, and the whole side of the cylinder is reflective surface 12;Encode groove Group 13, the coding groove group 13 are inscribed in the coding groove on reflective surface 12 for some circles, and the coding groove is binary system Coding;Equidistant, the wide base on reflective surface 12 is inscribed in with reference reticle group 14, some of the reference reticle group 14 Quasi- groove;It is parallel to each other between the reference reticle of the datum line group 14, and the datum line is parallel to the height of the cylinder, For the reference reticle perpendicular to and at the top of the coding groove, the coding groove of the coding groove group 13 is circumference It is distributed binary coding.
In the particular embodiment, it is preferable that the coding groove group 13 has N circle coding grooves, from top to bottom successively For first lap encode groove, second circle coding groove ..., N circle coding groove, N is natural number.
In the particular embodiment, it is preferable that N >=8.
In the particular embodiment, it is preferable that N circle coding groove (131,132 ..., 133) with the disk body Axis surrounds, and wide, equidistant, it is preferable that and a diameter of preset value d of the cross section of the cylinder, highly it is h, institute The whole side for stating cylinder is reflective surface;The spacing of the coding groove is h/2, and width is less thanIt is further preferred that Predeterminable d=100mm, h=20mm, the width of the reference reticle are preset value, width≤Δ/2 of the reference reticle, its In, Δ is the spacing of two adjacent reference reticles.
In the particular embodiment, it is preferable that first lap coding groove 131 includes 2 in a circumferential direction0Bar groove, the Two circle coding grooves 132 include 2 in a circumferential direction1Bar groove, the 3rd circle coding groove include 2 in a circumferential direction2Bar is carved Line ... the like, N circle coding grooves 133 include 2 in a circumferential directionN-1Bar groove, it is impartial between the groove of each circle Spacing is distributed.
In the particular embodiment, it is preferable that the coding groove group 13 divides the reflective surface 12 for 2NIndividual code area Domain, the coding groove in each coding region are unique.Here " unique " refers to a determination value, can be preset value, press According to circumference rehearsal binary data, i.e. corresponding binary number.
In the particular embodiment, it is preferable that the coding groove group 13 is some coding grooves according to any coding Mode, and the coding of each coding region is unique.Here " unique " refers to a determination value, can be preset value, according to Circumference rehearsal binary data, i.e. corresponding binary number.
In the particular embodiment, it is preferable that the reference reticle group 14 has 2NBar reference reticle, and every benchmark is carved Line is perpendicular to coding groove;It is preset value, generally no greater than Δ/2 that the benchmark, which carves first width,.
In the particular embodiment, it is preferable that separation delta=π d/2 between the reference reticle groupN, wherein, d is institute The diameter of cylindrical cross section is stated, it is further preferred that in some specific embodiments, d >=10cm.Because reflective surface is in circle The outer surface of all bodies, so the diameter of reflective surface is the diameter of cylindrical cross section.
Second aspect, present invention also offers a kind of angular errors calibration system 10, wherein, the calibration system 10 wraps Include:Demarcate dish 1, pallet 2, shaft coupling 3, switching identifier 4;The demarcation dish 1 is arranged on the pallet 2 and passes through connection Joint 3 is coaxially connected with being calibrated equipment 5;The corner identifier 4 is set in the same horizontal line with the demarcation dish 1, For realizing identification and angular displacement subdivision to the coding groove in the demarcation dish 1;The demarcation dish 1 is institute of the present invention The demarcation dish 1 of offer.
In the particular embodiment, it is further preferred that the corner identifier includes:Light source, optical imaging lens, figure As detector, transmission line and counting circuit, the light source are connected with the optical imaging lens, the optical imaging lens and Described image detector is connected, and the transmission line is used to connect described image detector and the counting circuit, the calculating Circuit includes:Code identification module, angle sorting module, it is calibrated angle input module and application condition module.
The invention provides a kind of high-precision angular errors with identification groove to demarcate dish, makes with reference to angle recognition instrument Used time, can more traditional angular errors caliberating device realize the angular errors demarcation of more high resolution and higher precision.
Embodiment described above only expresses the several embodiments of the present invention, and its description is more specific and detailed, but simultaneously Therefore the limitation to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that for one of ordinary skill in the art For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the guarantor of the present invention Protect scope.
In the description of the invention, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " up time The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or Position relationship, it is for only for ease of and describes the present invention and simplify description, rather than indicates or imply that signified device or element must There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or Implicitly include at least one this feature.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc. Term should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integrally;Can be that machinery connects Connect or electrically connect;Can be joined directly together, can also be indirectly connected by intermediary, can be in two elements The connection in portion or the interaction relationship of two elements, limited unless otherwise clear and definite.For one of ordinary skill in the art For, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature can be with "above" or "below" second feature It is that the first and second features directly contact, or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height and is less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or the spy for combining the embodiment or example description Point is contained at least one embodiment or example of the present invention.In this manual, to the schematic representation of above-mentioned term not Identical embodiment or example must be directed to.Moreover, specific features, structure, material or the feature of description can be with office Combined in an appropriate manner in one or more embodiments or example.In addition, in the case of not conflicting, the skill of this area Art personnel can be tied the different embodiments or example and the feature of different embodiments or example described in this specification Close and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned Embodiment is changed, changed, replacing and modification.
The embodiment of present invention described above, is not intended to limit the scope of the present invention..Any basis Various other corresponding changes and deformation made by the technical concept of the present invention, should be included in the guarantor of the claims in the present invention In the range of shield.
Merely illustrating the principles of the invention described in above-described embodiment and specification and most preferred embodiment, this is not being departed from On the premise of spirit and scope, various changes and modifications of the present invention are possible, and these changes and improvements both fall within requirement and protected In the scope of the invention of shield.

Claims (10)

  1. A kind of 1. high-precision angular errors demarcation dish with identification groove, it is characterised in that including:
    Disk body, the disk body are cylinder, and the whole side of the cylinder is reflective surface;
    Groove group is encoded, the coding groove group is inscribed in the coding groove on reflective surface for some circles, and the coding groove is Binary coding;
    Reference reticle group, the reference reticle group are some reference reticles being inscribed on reflective surface, the reference reticle Width is equal, and the separation delta between two adjacent reference reticles is equal;
    It is parallel to each other between the reference reticle of the datum line group, and the datum line is parallel to the height of the cylinder, it is described For reference reticle perpendicular to and at the top of the coding groove, the coding groove of the coding groove group is circle distribution two Scale coding.
  2. 2. angular errors according to claim 1 demarcate dish, it is characterised in that there is the coding groove group N circles to compile Code groove, be from top to bottom followed successively by first lap coding groove, second circle coding groove ..., N circle coding groove, N is nature Number.
  3. 3. angular errors according to claim 2 demarcate dish, it is characterised in that N >=8.
  4. 4. angular errors according to claim 2 demarcate dish, it is characterised in that N circle coding grooves are with the disk body Axis surrounds, and the spacing between the coding groove of every two adjacent rings of N circle coding grooves is equal, and often circle encodes groove It is highly equal.
  5. 5. angular errors according to claim 2 demarcate dish, it is characterised in that first lap coding groove wraps in circumference Containing 20Bar groove, the second circle coding groove include 2 in circumference1Bar groove, the 3rd circle coding groove include 2 in circumference2Bar is carved Line ... the like, N circle coding grooves include 2 in circumferenceN-1Bar groove, the spacing between two adjacent scribe lines of each circle It is equal.
  6. 6. angular errors according to claim 2 demarcate dish, it is characterised in that the coding groove group will be described reflective Face is divided into 2NIndividual coding region, the binary data of the coding groove group in each coding region is unique.
  7. 7. angular errors according to claim 1 demarcate dish, it is characterised in that the coding groove group is according to any The coding groove of coded system, and each coding region be encoded to it is unique.
  8. 8. angular errors according to claim 1 demarcate dish, it is characterised in that the reference reticle group has 2NBar base Quasi- groove, the width between the reference reticle is preset value.
  9. 9. angular errors according to claim 1 demarcate dish, it is characterised in that the spacing between the reference reticle group Δ=π d/2N, wherein, d is the diameter of the cylindrical cross section.
  10. A kind of 10. angular errors calibration system, it is characterised in that the calibration system include demarcation dish, pallet, shaft coupling, Switching identifier;The demarcation dish is arranged on the pallet and coaxially connected with being calibrated equipment by shaft coupling;It is described Corner identifier is set in the same horizontal line with the demarcation dish, for realizing to the coding groove in the demarcation dish Identification and angular displacement subdivision;The demarcation dish is the demarcation dish described in claim any one of 1-9.
CN201710897402.XA 2017-09-28 2017-09-28 High-precision angular errors demarcation dish and calibration system with identification groove Withdrawn CN107830819A (en)

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Publication number Priority date Publication date Assignee Title
CN108716927A (en) * 2018-06-29 2018-10-30 广东工业大学 A kind of image-type photoelectric encoder and its grating encoder
CN109886911A (en) * 2018-10-09 2019-06-14 中国计量大学 A kind of air level groove defect inspection method based on image processing techniques
CN109975793A (en) * 2019-04-25 2019-07-05 苏州元联传感技术有限公司 Calibration method of laser two-dimensional distance measurement sensor

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CN108716927A (en) * 2018-06-29 2018-10-30 广东工业大学 A kind of image-type photoelectric encoder and its grating encoder
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CN109886911A (en) * 2018-10-09 2019-06-14 中国计量大学 A kind of air level groove defect inspection method based on image processing techniques
CN109886911B (en) * 2018-10-09 2020-12-18 中国计量大学 Leveling bubble reticle defect detection method based on image processing technology
CN109975793A (en) * 2019-04-25 2019-07-05 苏州元联传感技术有限公司 Calibration method of laser two-dimensional distance measurement sensor

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Application publication date: 20180323