CN107830810B - A kind of measurement method and measuring system of coating layer thickness - Google Patents
A kind of measurement method and measuring system of coating layer thickness Download PDFInfo
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- CN107830810B CN107830810B CN201711285444.4A CN201711285444A CN107830810B CN 107830810 B CN107830810 B CN 107830810B CN 201711285444 A CN201711285444 A CN 201711285444A CN 107830810 B CN107830810 B CN 107830810B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
- G01B17/025—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
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- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Abstract
The invention discloses a kind of measurement method of coating layer thickness and measuring systems, are related to coating thickness measurement technical field, and the measurement method scope of application to solve the problems, such as existing coating layer thickness is narrow and invents.The measurement method of the coating layer thickness, comprising the following steps: S1, first coating is bombarded with the first pulse laser, the spectrum information of the photoacoustic signal issued when obtaining first coating described in first pulsed laser ablation；S2, determined according to the spectrum information first coating from start by bombard to it is breakdown when described in the first pulse laser bombardment number；S3, the thickness that the first coating is determined according to the functional relation between the thickness of coating identical with the material of the first coating and the bombardment number of first pulse laser.The present invention can be used for the measurement of coating.
Description
Technical field
The present invention relates to the measurement methods and measurement system of coating thickness measurement technical field more particularly to a kind of coating layer thickness
System.
Background technique
The good external insulation state of ultra-high-tension power transmission line is the important leverage of safe operation of power system.Eighties of last century 90 years
Since generation, composite insulating material is largely used in electric system, so that the resistance to pollution flashover ability of external insulation equipment be made just to obtain significantly
Improve.Composite insulating material is mainly used for making composite insulator, the various insulating composite coatings of production (such as RTV, full name in English
Room Temperature Vulcanizing room temperature vulcanized silicone rubber coating) and the various casings of production etc..
Wherein, insulating composite coating is to be coated in insulator surface by the methods of brushing, spraying, to reach isolation insulator
With the purpose of external environment.Insulating composite coating has excellent hydrophobicity and migration of hydrophobicity, when coated in glass and ceramics
When insulator surface, originally hydrophilic surface may make to become the surface of hydrophobic, and make surface filth that also there is hydrophobicity, in this way
The generation and development that may refrain from leakage current and local arc, significantly improve the pollution flashover voltage of insulator.
In order to guarantee that insulating composite coating has good anti-fouling flashover performance, the quality of insulating composite coating coating coating is extremely
Close it is important, and in power industry standard to the coating layer thickness of insulating composite coating have clearly require, usually 0.3-
0.5mm.But in practice, spraying is lack of standardization, coating surface is of poor quality, thickness is unsatisfactory for requiring or coating thickness is non-uniform
Situation is quite serious.With the increase of running time, irregular the brought problem of compound inslation coating performance just highlights,
Since coating layer thickness is uneven, portion coating layer thickness is too small, and caused hydrophobicity decline and aging fall off, to influence electricity
The safety of power conveying.In addition, the coating of insulating composite coating is after longtime running by operating condition, high electric-field intensity, high temperature
The various conditions such as high humility, acid rain influence, and the thickness of coating can change and inhomogeneities or even peeling and dusting is presented,
To influence its runnability, and then influence the safety of power Transmission.It can be seen that the coating layer thickness of insulating composite coating
Measurement, have very strong realistic meaning to power line construction quality monitoring and line insulation status monitoring.
Existing coating thickness measuring method, mainly there is magnetoresistance method, swirl method, ultrasonic method and electric spark method etc..Wherein magnetoresistance method master
If flowing into the magnetic flux size of ferromagnet substrate by non-ferromagnetic coating by detection to measure thickness, the bigger thickness of magnetic resistance is more
It is thick；The spread speed of ultrasonic wave in the sample is obtained the thickness of sample multiplied by the half by the sample time by ultrasonic method；Electrical fire
Flower rule be the defects of threading a needle hole or bubble by high-voltage electric shock judge coating thickness quality.However these above-mentioned methods
It is used to the thickness of the coating in measurement metal surface (substrate is metal material), for the coating layer thickness on nonmetallic surface,
It is difficult to ensure using precision, that is to say, that the measurement method of prior art coating thickness is only applicable to survey coating for metal surfaces
Thickness, the scope of application is narrow.
Summary of the invention
The embodiment of the present invention provides the measurement method and measuring system of a kind of coating layer thickness, is able to solve existing coating
The narrow problem of the measurement method scope of application of thickness.
In order to achieve the above objectives, in a first aspect, the embodiment provides a kind of measurement method of coating layer thickness, packet
It includes following steps: S1, first coating being bombarded with the first pulse laser, obtain described in first pulsed laser ablation the
The spectrum information of the photoacoustic signal issued when one coating；S2, determine the first coating from the beginning of according to the spectrum information
The bombardment number of first pulse laser described in when arriving breakdown by bombardment；S3, basis are identical with the material of the first coating
Functional relation between the thickness of coating and the bombardment number of first pulse laser determines the thickness of the first coating.
The measurement method of coating layer thickness provided in an embodiment of the present invention, when the first pulse laser breakdown first coating, and
When across the faying face of first coating and substrate, since substrate is different from the material of first coating, then, first coating is issued
The spectrum information of photoacoustic signal can have a greater change, the measurement method of coating layer thickness provided in an embodiment of the present invention is exactly benefit
It is whether breakdown that first coating is judged with the variation that the spectrum information of photoacoustic signal is occurred, and records first coating quilt
Then the bombardment number of first pulse laser when breakdown is obtaining the according to the functional relation of bombardment number and first coating thickness
The thickness of one coating.The thickness for measuring coating by this method as a result, is not limited by base material, is not only applicable to measure
The thickness of coating for metal surfaces, can equally be well applied to the coating layer thickness of measurement nonmetallic surface, and the scope of application is broader；Together
When, the thickness of this method testing coating is to obtain the thickness of coating indirectly by measuring the bombardment number of pulse laser, in this way
The precision that measures is high, and without sampling, easy to operate, analysis speed is fast, can be to the compound inslation material in the equipment in scene
The coating layer thickness of material measures, to be repaired in time to coating, so that it is guaranteed that the safe operation of equipment.
Second aspect, the embodiment of the invention also provides a kind of measuring devices of coating layer thickness, comprising: detection module, institute
Photoacoustic signal of the detection module for being issued when detecting pulsed laser ablation first coating is stated, and the photoacoustic signal is converted
For electric signal；Processing module, the processing module are connected with the detection module, and the processing module is for receiving the electricity
Signal obtains the spectrum information of the photoacoustic signal according to the electric signal, determines that described first applies according to the spectrum information
Layer from start by bombard to it is breakdown when the pulse laser bombardment number；And according to identical as the material of the first coating
The thickness of first coating and the bombardment number of the pulse laser between functional relation determine the thickness of the first coating.
The measuring device of coating layer thickness provided in an embodiment of the present invention is utilized what the spectrum information of photoacoustic signal was occurred
Variation determines the bombardment number of pulse laser when first coating is breakdown to judge whether first coating is breakdown, then
In the thickness for obtaining first coating according to the bombardment number of pulse laser and the functional relation of coating layer thickness.The survey of the coating layer thickness
Measure measurement method of the beneficial effect of the technical issues of device is solved and generation with the coating layer thickness of first aspect offer
Identical, details are not described herein.
The third aspect, the embodiment of the invention also provides a kind of measuring systems of coating layer thickness, including laser, focusing are thoroughly
The measuring device of coating layer thickness provided by mirror and second aspect of the embodiment of the present invention, the condenser lens are located at the laser
On the path of the laser issued.
When to first coating thickness measure, laser issues the measuring system of coating layer thickness provided in an embodiment of the present invention
Pulse laser, pulse laser reach enough energy density bombardments first coating surface after the focusing of condenser lens, so that
First coating excitation generates plasma, thus the photoacoustic signal needed for generating, the measuring device of coating layer thickness can be according to optoacoustic
The spectrum information of signal fills come the bombardment number of pulse laser when determining that first coating is breakdown, the measurement of final coating thickness
Set the thickness that the first coating is determined according to the bombardment number of coating layer thickness identical with the first coating material and pulse laser.
Thickness is applied as provided by the measuring device and second aspect of coating layer thickness included in the measuring system of the coating layer thickness
The measuring device of degree is identical, so also solving identical technical problem, has reached identical technical effect.
Fourth aspect, the embodiment of the invention also provides a kind of for measuring the computer equipment of coating layer thickness, the meter
Calculating machine equipment includes: processor, communication interface and the memory connected by bus, wherein the memory is for storing
Program code, the processor is for executing program code in the memory, and said program code is for realizing following steps:
Obtain photoacoustic signal spectrum information, according to the spectrum information determine first coating from start bombarded to it is breakdown when pulse
The bombardment number of laser；And according to the bombardment of the thickness of coating identical with the material of the first coating and the pulse laser
Functional relation between number determines the thickness of the first coating.
The computer equipment provided in an embodiment of the present invention for being used to measure coating layer thickness, when first coating is banged by pulse laser
When hitting, photoacoustic signal is generated, photoacoustic signal is converted electric signal by ultrasonic sensor, and is passed to by communication interface, bus
Device is managed, processor executes the program code that memory is stored again to determine the thickness of first coating.The measurement coating layer thickness
The measurement for the coating layer thickness that the beneficial effect of the technical issues of computer equipment is solved and generation is provided with first aspect
Method is identical, and details are not described herein.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the flow chart of the measurement method of coating layer thickness provided in an embodiment of the present invention；
Fig. 2 is in the embodiment of the present invention, the thickness of coating identical with the material of first coating and the first pulse laser
The functional relation bombarded between number realizes the flow chart of step；
Fig. 3 is the RTV coating of pulsed laser ablation coating on a ceramic substrate, when RTV coating quilt in the embodiment of the present invention
The change curve of photoacoustic signal dominant frequency when laser breakdown；
Fig. 4 is the RTV coating of pulsed laser ablation coating on a ceramic substrate, when RTV coating quilt in the embodiment of the present invention
The intensity variation curve of photoacoustic signal when laser breakdown；
Fig. 5 is the RTV coating of pulsed laser ablation coating on a ceramic substrate, when RTV coating quilt in the embodiment of the present invention
The change curve of the relative intensity size of the higher hamonic wave of photoacoustic signal when laser breakdown；
Fig. 6 is the schematic diagram of the measuring system of coating layer thickness provided in an embodiment of the present invention；
Fig. 7 is provided in an embodiment of the present invention for measuring the schematic diagram of the computer equipment of coating layer thickness.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Term " first ", " second " be used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or
Implicitly indicate the quantity of indicated technical characteristic." first " is defined as a result, the feature of " second " can be expressed or imply
Ground includes one or more of the features.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or
It is more than two.
Embodiment 1
Referring to Fig. 1, the embodiment of the invention provides a kind of measurement methods of coating layer thickness, comprising the following steps:
S1, first coating is bombarded with the first pulse laser, obtains the first pulsed laser ablation first coating when institute
The spectrum information of the photoacoustic signal of sending；
Wherein, the first pulse laser can be the pulse laser that following parameter is arranged: wavelength 1064nm, single pulse energy
100mJ, frequency 2Hz, pulse width 7ns；First coating is exactly the coating to Thickness Measurement by Microwave, such as be can be coated in compound
RTV coating on insulator coats the substrate of first coating from first coating using different materials.
S2, determined according to spectrum information first coating from start by bombard to it is breakdown when the first pulse laser bombardment time
Number；
Between S3, the thickness of basis coating identical with the material of first coating and the bombardment number of the first pulse laser
Functional relation determines the thickness of first coating.Wherein, the substrate of first coating is coated from first coating using different materials
Material.
The thickness that coating is measured by this method, is not limited by base material, is not only applicable to measurement metal surface and is applied
The thickness of layer, can equally be well applied to the coating layer thickness of measurement nonmetallic surface, and the scope of application is broader；Meanwhile this method is surveyed
The thickness of examination coating is to obtain the thickness of coating indirectly by measuring the bombardment number of pulse laser, the precision measured in this way
Height, and without sampling, it is easy to operate, analysis speed is fast, it can painting thickness to the composite insulating material in the equipment in scene
Degree measures, to be repaired in time to coating, so that it is guaranteed that the safe operation of equipment.
Step S2 is specifically included in the above measurement method: being determined that first coating is bombarded from beginning to spectrum information and is met
The bombardment number of first pulse laser when breakdown condition, wherein the whether breakdown breakdown of coating is judged according to spectrum information
Condition is not unique, for example, the variation of the dominant frequency (frequency) of photoacoustic signal can be made more than or equal to the first preset value
For breakdown condition, such as shown in Fig. 3, which show the RTV coating of pulsed laser ablation coating on a ceramic substrate, works as RTV
Coating by the change curve of photoacoustic signal dominant frequency when laser breakdown, You Tuzhong it is found that the dominant frequency of photoacoustic signal by original 14KHz
Increase to 15KHz, the variation of dominant frequency size is greater than the first preset value 0KHz, as long as that is, the dominant frequency of photoacoustic signal change
It can determine whether that coating is breakdown；
In addition, can also be by the variation of relative intensity (relative intensity) size of the higher hamonic wave of photoacoustic signal
More than or equal to third preset value as breakdown condition, such as shown in Fig. 4, which show pulsed laser ablation and is coated in ceramics
RTV coating in substrate, when RTV coating is by laser breakdown, the variation of the relative intensity size of the higher hamonic wave of photoacoustic signal is bent
Line, You Tuzhong is it is found that when the bombardment number of pulse laser is 170 or so, the signal of the 200kHz frequency component of photoacoustic signal
Relative intensity increases severely, and has been greater than third preset value, and the size of third preset value can be relatively strong for variation front signal here
The 20% of degree；
Other than both the above, the variation of the intensity (amplitude) of photoacoustic signal can also be greater than or equal to the
For two preset values as breakdown condition, such as shown in Fig. 5, which show the RTV of pulsed laser ablation coating on a ceramic substrate
Coating, the intensity variation curve of photoacoustic signal when RTV coating is by laser breakdown, You Tuzhong is it is found that the intensity of photoacoustic signal is bright
It is aobvious to reduce, it has been greater than the second preset value, the size of the second preset value can be 20% of intensity before variation here.
, can be with whether meeting any one in three above breakdown condition and sentence when judging whether coating is breakdown
It is disconnected, can also be with whether meeting any two in three above breakdown condition and judge, can also be with whether meeting above three
A breakdown condition judges, is not specifically limited herein.
In the measurement method of coating layer thickness provided in an embodiment of the present invention, it needs to be determined that first coating before step S3
Material composition information, in this way obtain first coating it is breakdown after the first pulse laser bombardment number after, Neng Goufang
Just the bombardment of the thickness and the first pulse laser of coating identical with first coating material composition information is found in the database
The functional relation of number, so that it is determined that the thickness of first coating；Or it needs to be determined that first coating factory before step S3
Family and model (manufacturer is identical with model, then the ingredient of coating material is also identical), in this way acquisition first coating hit
After the bombardment number for wearing rear first pulse laser, can easily it find in the database and first coating manufacturer and letter
The functional relation of the bombardment number of the thickness and the first pulse laser of number identical coating, so that it is determined that the thickness of first coating.
Wherein it is determined that the composition information of the material of first coating can pass through the side of remote laser induced breakdown spectroscopy
Method determines.
Referring to fig. 2, identical as the material of first coating in the measurement method of coating layer thickness provided in an embodiment of the present invention
The thickness of coating and the bombardment number of the first pulse laser between functional relation can be obtained by following steps:
N1, with the second pulse laser identical with the first pulse laser setup parameter respectively to multiple and different known thickness
Second coating is bombarded, and determines the bombardment number of the second pulse laser when each second coating is breakdown respectively；
Wherein, second coating is identical as the material of first coating；
The linear functional relation of the bombardment number of N2, the thickness for establishing second coating and the second pulse laser.
Below by taking the RTV coating being coated on earthenware slab as an example, step N1 and N2 are illustrated: taking several volumes of earthenware slab
Number be 1 to 11, RTV coating identical with first coating material is sprayed to respectively on 11 earthenware slabs, each ceramics are made
The thickness of RTV coating is different on plate, and with the thickness of RTV coating on each earthenware slab of pachometer precise measurement, such as can
To be measured by measuring thickness difference of the earthenware slab before and after spraying RTV coating；Then with the first pulse laser setup parameter
Identical pulse laser respectively bombards the RTV coating on 11 earthenware slabs, is determined on each earthenware slab respectively
The bombardment number of pulse laser when RTV coating is breakdown, then in the thickness and arteries and veins according to the RTV coating on 11 earthenware slabs
The relationship matched curve between laser bombardment number is rushed, final determination RTV coating identical with first coating material and pulse swash
The functional relation of light bombardment number.
It is more accurate in order to ensure the test results, by the second pulse laser respectively to the of multiple and different known thickness
It before two coatings are bombarded, needs to clean second coating surface, pulse laser is banged with eliminating the filthy of its surface
The depth hit impacts, so as to improve the precision of test.
In step N1, determine the mode of the bombardment number of the second pulse laser when each second coating is breakdown not only
One, for example spectrum information when can be bombarded by coating judges, specifically, comprising the following steps: N11, obtain respectively
The spectrum information of the photoacoustic signal issued when each second coating of the second pulsed laser ablation；N12, according to institute in step N11
The spectrum information of acquisition determine each second coating from start by bombard to it is breakdown when the second pulse laser bombardment number,
In, determined by spectrum information coating from start by bombard to it is breakdown when pulse laser bombardment number specific method,
It has hereinbefore specifically described, details are not described herein.
Spectrum information when being bombarded except through coating is come except judging, whether coating is breakdown can also to pass through coating
Generated emission spectrum judges when being bombarded, specifically, comprising the following steps: N ° 11, obtain the second pulse laser respectively
Generated emission spectrum when each second coating is bombarded, and records the first chosen elements in the emission spectrum of each second coating
With the intensity of the atom spectrum of the second chosen elements；N ° 12, when the first chosen elements and second in the emission spectrum of second coating
When the atom spectrum of chosen elements changes, determine that the second coating is breakdown, and record the bombardment of pulse laser at this time
Number, for example, when second coating is RTV coating, when minimum and silicon occurs in carbon line intensity in the emission spectrum of second coating
When line intensity rises, then judge that second coating is breakdown, and records the bombardment number of pulse laser at this time.
The method that both the above determines pulsed laser ablation number when coating is breakdown can be selected specifically according to the actual situation
It selects, is not specifically limited herein.
Embodiment 2
Referring to Fig. 6, the embodiment of the invention provides a kind of measuring devices of coating layer thickness, comprising: detection module 1, detection
Module 1 is used for the photoacoustic signal issued when detecting pulsed laser ablation first coating, and converts electric signal for photoacoustic signal；
Processing module 2, processing module 2 are connected with detection module 1, and processing module 2 obtains light for receiving electric signal, according to electric signal
The spectrum information of acoustical signal, according to spectrum information determine coating from start by bombard to it is breakdown when pulse laser bombardment time
Number, and it is true according to the functional relation between the thickness of the identical coating of the material of first coating and the bombardment number of pulse laser
Determine the thickness of first coating.Wherein, detection module 1 can be ultrasonic sensor；Processing module 2 can be computer etc..
The measuring device of coating layer thickness provided in an embodiment of the present invention is utilized what the spectrum information of photoacoustic signal was occurred
Variation determines the bombardment number of pulse laser when first coating is breakdown to judge whether first coating is breakdown, then
In the thickness for obtaining first coating according to the bombardment number of pulse laser and the functional relation of coating layer thickness.The survey of the coating layer thickness
Measure measurement method of the beneficial effect of the technical issues of device is solved and generation with the coating layer thickness provided in embodiment 1
Identical, details are not described herein.
In the measuring device of coating layer thickness provided in an embodiment of the present invention, photoacoustic signal can pass through Fast Fourier Transform (FFT)
(FFT) it is converted into electric signal.The frequency spectrum of photoacoustic signal, while quick Fu more can be quickly obtained by Fast Fourier Transform (FFT)
In leaf transformation operation it is relatively simple, and obtained experimental result can satisfy demand.
In the measuring device of coating layer thickness provided in an embodiment of the present invention, processing module 2 is specifically used for determining first coating
From start by bombard meet breakdown condition to spectrum information when pulse laser bombardment number, breakdown condition may include: optoacoustic
The variation that the variation of the dominant frequency of signal is greater than or equal to the intensity of the first preset value, photoacoustic signal is greater than or equal to the second preset value
And the variation of the relative intensity size of the higher hamonic wave of photoacoustic signal is greater than or equal at least one of third preset value.Place
Reason module 2 judges the first painting by least one of relative intensity of the dominant frequency of photoacoustic signal, intensity and higher hamonic wave
Whether layer is breakdown, increases the selectable range of breakdown condition in this way, processing module 2 can be selected with specific reference to actual conditions
Suitable Rule of judgment increases the arbitration functions of processing module 2 in this way, in addition, when processing module 2 is multiple by photoacoustic signal
Parameter size variation judges whether first coating is breakdown, can reduce experimental error simultaneously, improves the accuracy of judgement.
Embodiment 3
Referring to Fig. 6, the embodiment of the invention provides a kind of measuring system of coating layer thickness, including laser 200 (such as can
Adjust Q nanosecoud pulse laser), the measuring device 100 of coating layer thickness described in condenser lens 300 and embodiment 2, condenser lens
300 are located on the path for the laser that laser 200 is issued.
The measuring system of coating layer thickness provided in an embodiment of the present invention is when to 600 thickness measure of first coating, laser
200 issue pulse laser, and pulse laser reaches enough energy density bombardment first coatings after the focusing of condenser lens 300
600 surfaces, so that the excitation of first coating 600 generates plasma, thus the photoacoustic signal needed for generating, the measurement of coating layer thickness
Device 100 can determine the bombardment number of pulse laser when first coating 600 is breakdown according to the spectrum information of photoacoustic signal,
The measuring device 100 of final coating thickness according to coating layer thickness identical with 600 thickness of first coating and pulse laser Hong
Hit the thickness that number determines the first coating 600.Due to painting thickness included in the measuring system of 600 thickness of first coating
The measuring device 100 of degree is identical as the measuring device 100 of coating layer thickness in embodiment 2, so also solving identical technology
Problem has reached identical technical effect.
The position of the focus of condenser lens 300 is not unique, for example the focus of condenser lens 300 can be located at first coating
On 600 upper surface.In addition, the focus of condenser lens 300 can also be located at the lower section of the upper surface of first coating 600.It compares
Focus is located on the upper surface of first coating 600, when the focus of condenser lens 300 is located under the upper surface of first coating 600
Fang Shi, it is possible to reduce the breakdown of the air on 600 surface of first coating, to reduce plasma measurement knot caused by air breakdown
The influence of fruit.
In order to make the focus of condenser lens 300 be located at first coating 600 upper surface lower section, can be by condenser lens
300 settings are at the position appropriate of first coating 600, for example condenser lens 300 can be away from the distance of first coating 600
10cm。
In order to further decrease the influence that the plasma of air breakdown generation generates experimental result, as shown in fig. 6, poly-
The distance of the focus of focus lens 300 to the upper surface of first coating 600 is no more than 2mm, and the signal-to-background ratio of such photoacoustic signal is higher,
Detection module 1 can obtain the spectrum information of preferable photoacoustic signal to judge whether first coating 600 is breakdown, may finally
Improve the precision of measurement result.
By experiment measure, when condenser lens 300 focus to the upper surface of first coating 600 distance in 1mm and 2mm
Between when, the signal-to-background ratio highest of photoacoustic signal caused by first coating 600.
It is issued in order to which more convenient laser 200 bombards first coating 600 in laser 200 referring to Fig. 6
Laser path on be additionally provided with reflecting mirror 400, transmitting mirror can emit the laser that laser 200 is emitted, can be with
Suitable angular illumination is on the surface of first coating 600.
Referring to Fig. 6, in the measuring system of coating layer thickness provided in an embodiment of the present invention, laser 200 is also connected with control
Device 500 after controller 500 can receive triggering command to the sending triggering command of laser 200, laser 200 and issues pulse
Laser, to bombard 600 surface of first coating.After controller 500 can issue triggering command to laser 200, warp
After spending the shorter time (usually several microseconds), detection module 1 receives photoacoustic signal, after then handling photoacoustic signal
Send processing module to.
Embodiment 4
Referring to Fig. 7, the embodiment of the invention provides a kind of for measuring the computer equipment of coating layer thickness, computer equipment
It include: processor, communication interface and the memory connected by bus, wherein memory is handled for storing program code
For device for executing program code in memory, program code is for realizing following steps: obtaining the spectrum information of photoacoustic signal, root
According to spectrum information determine first coating from start by bombard to it is breakdown when pulse laser bombardment number；And it is applied according to first
Functional relation between the thickness of the identical coating of material and the bombardment number of pulse laser of layer determines the thickness of first coating.
Wherein, processor can be CPU (Central Processing Unit central processing unit), FPGA (Field-
Programmable Gate Array field programmable gate array) etc.；Communication interface can be computer interface, specifically can be with
Be can connect the interface of ultrasonic sensor, such as: USB (Universal Serial Bus universal serial bus) interface.
The computer equipment provided in an embodiment of the present invention for being used to measure coating layer thickness, when first coating is banged by pulse laser
When hitting, photoacoustic signal is generated, photoacoustic signal is converted electric signal by ultrasonic sensor, and is passed to by communication interface, bus
Device is managed, processor executes the program code that memory is stored again to determine the thickness of first coating.The measurement coating layer thickness
The measurement for the coating layer thickness that the beneficial effect of the technical issues of computer equipment is solved and generation is provided with first aspect
Method is identical, and details are not described herein.
More than, only a specific embodiment of the invention, but scope of protection of the present invention is not limited thereto, and it is any to be familiar with
Those skilled in the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all cover
Within protection scope of the present invention.Therefore, protection scope of the present invention should be subject to the protection scope in claims.
Claims (7)
1. a kind of measurement method of coating layer thickness, which comprises the following steps:
S1, first coating is bombarded with the first pulse laser, obtains first coating described in first pulsed laser ablation
When the spectrum information of photoacoustic signal that is issued；
S2, determined according to the spectrum information first coating from start bombarded to it is breakdown when described in the first pulse laser
Bombardment number；
Determine the first coating from start bombarded meet breakdown condition to the spectrum information when described in the first pulse laser
Bombardment number, the breakdown condition includes: that the variation of the dominant frequency of the photoacoustic signal is greater than or equal to the first preset value, described
The variation of the intensity of photoacoustic signal is greater than or equal to the relative intensity of the higher hamonic wave of the second preset value and the photoacoustic signal
The variation of size is greater than or equal at least two in third preset value；
S3, according to the bombardment number of the thickness of coating identical with the material of the first coating and first pulse laser it
Between functional relation determine the thickness of the first coating.
2. the measurement method of coating layer thickness according to claim 1, which is characterized in that the material phase with the first coating
Functional relation between the thickness of same coating and the bombardment number of first pulse laser passes through following steps and obtains:
N1, with the second pulse laser identical with the first pulse laser setup parameter respectively to multiple and different known thickness
Second coating is bombarded, and the bombardment time of the second pulse laser described in being determined when each second coating is breakdown respectively
Number, wherein the second coating is identical as the material of the first coating；
The linear functional relation of the bombardment number of N2, the thickness for establishing the second coating and second pulse laser.
3. the measurement method of coating layer thickness according to claim 2, which is characterized in that the determination each described second applies
The bombardment number of second pulse laser described in when layer is breakdown includes:
The frequency spectrum of N11, the photoacoustic signal issued when obtaining each second coating of second pulsed laser ablation respectively
Information；
N12, the spectrum information according to obtained in step N11 determine that each second coating is bombarded from beginning to breakdown
The bombardment number of the second pulse laser of Shi Suoshu.
4. a kind of measuring device of coating layer thickness characterized by comprising
Detection module, the detection module are used for the photoacoustic signal issued when detecting pulsed laser ablation first coating, and will
The photoacoustic signal is converted into electric signal；
Processing module, the processing module are connected with the detection module, and the processing module is used to receive the electric signal,
The spectrum information for obtaining the photoacoustic signal according to the electric signal determines the first coating from opening according to the spectrum information
The bombardment number of pulse laser when beginning to arrive breakdown by bombardment；And according to coating identical with the material of the first coating
Thickness and the pulse laser bombardment number between functional relation determine the thickness of the first coating；
The processing module is specifically also used to determine that the first coating is bombarded to the spectrum information to meet from beginning and punctures
The bombardment number of pulse laser when condition, the breakdown condition include: the variation of the dominant frequency of the photoacoustic signal be greater than or
Variation equal to the intensity of the first preset value, the photoacoustic signal is greater than or equal to the second preset value and the photoacoustic signal
The variation of the relative intensity size of higher hamonic wave is greater than or equal at least two in third preset value.
5. a kind of measuring system of coating layer thickness, which is characterized in that including described in laser, condenser lens and claim 4
Coating layer thickness measuring device, the condenser lens is located on the path for the laser that the laser is issued.
6. the measuring system of coating layer thickness according to claim 5, which is characterized in that the focus of the condenser lens is located at
The lower section of the upper surface of the first coating.
7. the measuring system of coating layer thickness according to claim 6, which is characterized in that the focus of the condenser lens to institute
The distance for stating the upper surface of first coating is no more than 2mm.
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| CN201711285444.4A CN107830810B (en) | 2017-12-07 | 2017-12-07 | A kind of measurement method and measuring system of coating layer thickness |
| PCT/CN2017/117193 WO2019109385A1 (en) | 2017-12-07 | 2017-12-19 | Method, device, and system for measuring coating thickness |
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| CN110319795B (en) * | 2018-03-29 | 2021-10-19 | 宝山钢铁股份有限公司 | Method and system for measuring thickness of steel plate coating |
| CN109186475B (en) * | 2018-10-15 | 2019-12-06 | 天津大学 | coating thickness measuring method based on terahertz pulse frequency spectrum and optimization algorithm |
| EP3683539A1 (en) * | 2019-01-18 | 2020-07-22 | SABIC Global Technologies B.V. | Multi-layer thickness detection using correction factors for photoacoustic spectroscopy |
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| CN1685215A (en) * | 2002-09-30 | 2005-10-19 | 诺维尔技术解决有限公司 | Photoacoustic detector |
| CN104748691A (en) * | 2015-03-05 | 2015-07-01 | 江苏大学 | Measurement device and method for film thickness |
| CN104914076A (en) * | 2015-06-01 | 2015-09-16 | 南京先进激光技术研究院 | Optoacoustic type laser breakdown detection device |
| CN105352443A (en) * | 2015-11-02 | 2016-02-24 | 清华大学深圳研究生院 | Method for measuring thickness of RTV coating of insulator |
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| JP3325670B2 (en) * | 1993-10-06 | 2002-09-17 | 旭サナック株式会社 | Film thickness measuring device |
| US7824730B2 (en) * | 2007-08-31 | 2010-11-02 | United Technologies Corporation | Method and apparatus for measuring coating thickness with a laser |
| CN103115893A (en) * | 2013-01-30 | 2013-05-22 | 大连理工大学 | Device for detecting components and thickness of first-wall dust deposition layer of tokamak tungsten |
| CN103878479B (en) * | 2014-03-06 | 2016-02-10 | 上海交通大学 | The online test method in the T-shaped lap joint gap of the Laser Welding based on spectrum analysis |
| CN105588516B (en) * | 2016-02-23 | 2018-04-03 | 天津大学 | A kind of film thickness measuring method based on terahertz pulse spectrum |
| CN107218896B (en) * | 2017-07-26 | 2019-06-25 | 大连理工大学 | The method for measuring vacuum ion plating and plasma spray coating plated film film thickness and uniformity |
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|---|---|---|---|---|
| CN1685215A (en) * | 2002-09-30 | 2005-10-19 | 诺维尔技术解决有限公司 | Photoacoustic detector |
| CN104748691A (en) * | 2015-03-05 | 2015-07-01 | 江苏大学 | Measurement device and method for film thickness |
| CN104914076A (en) * | 2015-06-01 | 2015-09-16 | 南京先进激光技术研究院 | Optoacoustic type laser breakdown detection device |
| CN105352443A (en) * | 2015-11-02 | 2016-02-24 | 清华大学深圳研究生院 | Method for measuring thickness of RTV coating of insulator |
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