CN107827117B - Preparation method of multimodal distribution spherical silicon dioxide micro powder - Google Patents

Preparation method of multimodal distribution spherical silicon dioxide micro powder Download PDF

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CN107827117B
CN107827117B CN201711176711.4A CN201711176711A CN107827117B CN 107827117 B CN107827117 B CN 107827117B CN 201711176711 A CN201711176711 A CN 201711176711A CN 107827117 B CN107827117 B CN 107827117B
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spheroidizing
silicon dioxide
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mixer
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CN107827117A (en
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张建平
陆琼
姜兵
曹家凯
王松宪
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Jiangsu Novoray New Material Co ltd
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/30Particle morphology extending in three dimensions
    • C01P2004/32Spheres
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/51Particles with a specific particle size distribution
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/61Micrometer sized, i.e. from 1-100 micrometer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/62Submicrometer sized, i.e. from 0.1-1 micrometer

Abstract

The invention relates to a preparation method of multimodal distribution spherical silicon dioxide micro powder, which comprises the following steps: selecting silicon dioxide micropowder with purity of more than 99.8% and granularity of 0.1-60 μm as raw material; in a spheroidizing furnace, a flame zone formed by burning natural gas and oxygen is taken as a spheroidizing zone, and the raw materials are introduced into the spheroidizing zone to be spheroidized to obtain a product A, a product B, a product C and a product D; and (3) mixing the product A and the product B according to a mass ratio of 0.1-1: 1, mixing by a high-efficiency mixer, and marking a product after uniform mixing as a product AB; and mixing the product AB, the product C and the product D in a mixer for 10-50 min, and uniformly mixing to obtain the product. The spherical silicon dioxide micropowder prepared by the method at least contains three peaks, and shows the characteristics of good fluidity, large filling amount, low thermal expansion coefficient, low warpage and the like of the filler in plastic packaging material products.

Description

Preparation method of multimodal distribution spherical silicon dioxide micro powder
Technical Field
The invention relates to a preparation method of spherical silicon dioxide micro powder, in particular to a preparation method of multimodal distribution spherical silicon dioxide micro powder.
Background
In order to meet the requirements of current consumers on light weight, small size, thinness and the like of end products, the packaging form of the semiconductor industry is changed greatly, the packaging forms of the semiconductor industry are developed from the packaging forms of leaded DIP, SIP and the like to the packaging forms of surface-mounted SOP, TSOP, SSOP, QFP and the like, and the packaging forms of the semiconductor industry are developed towards the packaging forms of underfil and the like.
In the aspect of raising higher requirements on product performance, one of the key performance indexes is the spiral fluidity of the epoxy plastic package material, and generally, the longer the spiral fluidity is, the better the spiral fluidity is. The performance index is closely related to the filler (silicon micropowder), and the proper filler plays a role in determining the flowability of the epoxy molding compound. In order to meet the requirements, firstly, the filler is spheroidized to provide the filling amount and the fluidity of the filler, and secondly, the filler with the multi-peak distribution is prepared. On the other hand, low cost is also a key factor for entry into the market. Under the requirements of the conditions, a spherical silicon dioxide micro powder product with low cost and high performance for packaging medium and high-end semiconductors is prepared.
Patent No. CN 101743198A, applicant's electric chemical industry co, has a disadvantage in that it adds metal silicon powder to the raw material of fine silica powder to prepare multimodal spherical silica. Firstly, because the furnace temperature is too high in the spheroidizing process, ultrafine powder is easy to agglomerate (the patent number of Japanese patent laid-open No. 2-296711, spherical silicon microparticles and a preparation method thereof show that when the temperature is higher than 1300 ℃, the spheroidizing process is easy to fuse, agglomeration is caused, ultrafine powder is difficult to obtain), and the production process is difficult to control; secondly, the content of the superfine spherical powder required by different products is different, so that the spheroidized product cannot be accurately adjusted and cannot be prepared into products with different requirements; thirdly, the metal silicon powder has potential safety hazard, so that safety accidents are easily caused; and fourthly, the metal silicon is a conductive material, the process control is not accurate, and the metal silicon can easily enter products, so that the electrical property of downstream products is failed.
The patent No. CN 103665775B applicant, Wuxi Chundao electronics, Inc. utilizes spherical silica powder, crystalline silica powder, fused silica powder and fumed silica with different particle sizes to prepare multimodal fillers to prepare plastic packaging materials with higher filling amount and better fluidity. The defects are that the added fumed silica has large specific surface area and high oil absorption rate, so that the viscosity of the plastic packaging material is increased rapidly, and the fumed silica cannot be used for packaging products such as SOP (silicon on insulator) and the like.
The patent No. CN 104194274A applicant Jiangsu alli new materials GmbH utilizes two raw materials to grind twice to prepare the bimodal horn-shaped silicon micro powder, and the product produced by the method can not reach the peak value of 0-1 μm. The requirements of package products such as SOP and the like cannot be met.
Disclosure of Invention
The invention aims to solve the technical problem in the prior art and provides a preparation method of spherical silicon dioxide micropowder with good fluidity, low thermal expansion coefficient and low warpage.
The technical problem to be solved by the invention is realized by the following technical scheme, and the invention discloses a preparation method of multimodal distribution spherical silicon dioxide micro powder, which is characterized by comprising the following steps of: the method comprises the following steps:
(1) raw materials: selecting silicon dioxide micropowder with purity of more than 99.8% and granularity of 0.1-60 μm as raw material;
(2) in a spheroidizing furnace, a flame zone formed by burning natural gas and oxygen is used as a spheroidizing zone, and raw materials are introduced into the spheroidizing zone for spheroidizing to obtain the material: d50=0.1 μm-0.5 μm product a, D50=0.6 μm-3.0 μm product B, D50=4 μm-14 μm product C and D50=15 μm-60 μm product D;
(3) and (3) mixing the product A and the product B according to a mass ratio of 0.1-1: 1, mixing by a high-efficiency mixer for 3-30 min, and recording a product after uniform mixing as a product AB;
(4) the mass ratio of the product AB to the product C to the product D is 0.05-0.30: 0.11-0.24: 0.66-1.08, mixing in a mixer for 10-50 min, and uniformly mixing to obtain the product.
The preparation method of the multimodal distribution spherical silicon dioxide micropowder comprises the following steps: the high-efficiency mixer is an air flow mixer, an intensive mixer, a planetary mixer or a homogenizer.
The preparation method of the multimodal distribution spherical silicon dioxide micropowder comprises the following steps: when the high-efficiency mixer is an air flow mixer, the pressure of compressed air is 0.3-2.0 Mpa, and the loading coefficient is 0.3-0.5.
The preparation method of the multimodal distribution spherical silicon dioxide micropowder comprises the following steps: the mixer is a two-dimensional mixer, a three-dimensional mixer, a V-shaped mixer, a double-cone mixer, a non-gravity mixer, a conical mixer or a coulter mixer.
The preparation method of the multimodal distribution spherical silicon dioxide micropowder comprises the following steps: the consumption of the natural gas in the spheroidizing furnace is 0.5 m per kilogram of the silicon micropowder3-2.5m3
D50 indicates the particle size corresponding to a cumulative volume fraction of a powder of 50%.
Compared with the prior art, the method is simple, products with different grain diameters are prepared by spheroidizing through a flame balling method, the products with different grain diameters are prepared by mixing, and the spherical silicon dioxide micropowder prepared by the method at least contains three peaks and shows the characteristics of good fluidity, large filling amount, low thermal expansion coefficient, low warping and the like of the filler in the plastic package material product.
Drawings
FIG. 1 is a graph showing the particle size distribution of the product obtained in example 4.
FIG. 2 is a graph showing the particle size distribution of the product obtained in example 5.
FIG. 3 is a graph showing the particle size distribution of the product obtained in comparative example 1.
FIG. 4 is a graph showing the particle size distribution of the product obtained in comparative example 2.
Detailed Description
The following further describes particular embodiments of the present invention to facilitate further understanding of the present invention by those skilled in the art, and does not constitute a limitation to the right thereof.
Example 1, a process for the preparation of a multimodal spherical microsilica, comprising the steps of:
(1) raw materials: selecting silicon dioxide micropowder with purity of more than 99.8% and granularity of 0.1-60 μm as raw material;
(2) in a spheroidizing furnace, a flame zone formed by burning natural gas and oxygen is used as a spheroidizing zone, and raw materials are introduced into the spheroidizing zone for spheroidizing to obtain the material: d50=0.1 μm-0.5 μm product a, D50=0.6 μm-3.0 μm product B, D50=4 μm-14 μm product C and D50=15 μm-60 μm product D;
(3) and (3) mixing the product A and the product B according to a mass ratio of 0.1-1: 1, mixing for 3-30 min by using an airflow mixer, wherein the pressure of compressed air of the airflow mixer is 0.3-2.0 Mpa, the loading coefficient is 0.3-0.5, and a product after uniform mixing is marked as a product AB;
(4) the mass ratio of the product AB to the product C to the product D is 0.05-0.30: 0.11-0.24: 0.66-1.08, mixing in a mixer for 10-50 min, and uniformly mixing to obtain the product.
Example 2, in a method for preparing a multimodal spherical fine silica powder according to example 1, the mixer is a two-dimensional mixer, a three-dimensional mixer, a V-type mixer, a double-cone type mixer, a non-gravity mixer, a conical mixer or a coulter type mixer.
Example 3. Process for the preparation of multimodal spherical microsilica according to example 1, the natural gas is used in the nodularisation furnace in an amount of 0.5 m/kg microsilica3-2.5m3
Embodiment 4, a method for preparing multimodal spherical silica micropowder, selecting silica micropowder with purity of 99.8% or more and particle size of 0.1 μm-60 μm as raw material; in a spheroidizing furnace, a flame zone formed by burning natural gas and oxygen is used as a spheroidizing zone, and the raw materials are introduced into the spheroidizing zone to be spheroidized by different spheroidizing processes to prepare the material: d50=0.1 μm-0.5 μm product a, D50=0.6 μm-3.0 μm product B, D50=4 μm-14 μm product C and D50=15 μm-60 μm product D;
the mass ratio of the product A to the product B is 0.2: 1, mixing for 10min in an air flow type mixer, wherein the air pressure of the air flow type mixer is 1.2Mpa, the loading coefficient is 0.4, and the mixed product is marked as a product AB. And (3) putting the product AB, the product C and the product D into a two-dimensional mixer according to the mass ratio of 0.10:0.20:0.87, and mixing for 15 minutes, wherein the rotating speed of the two-dimensional mixer is 12rpm, so as to obtain the product. The particle size distribution diagram refers to fig. 1. This particle size distribution is present in multimodal form (with 4 peaks).
Example 5, a method for preparing multimodal spherical silica fume, selecting silica fume with purity of 99.8% or more and particle size of 0.1 μm-60 μm as raw material; in a spheroidizing furnace, a flame zone formed by burning natural gas and oxygen is used as a spheroidizing zone, and the raw materials are introduced into the spheroidizing zone to be spheroidized by different spheroidizing processes to prepare the material: d50=0.1 μm-0.5 μm product a, D50=0.6 μm-3.0 μm product B, D50=4 μm-14 μm product C and D50=15 μm-60 μm product D;
the mass ratio of the product A to the product B is 0.8: 1, mixing for 10min in an air flow mixer, wherein the air pressure of the air flow mixer is 1.9Mpa, the loading coefficient is 0.35, and the mixed product is marked as a product AB. And (3) putting the product AB, the product C and the product D into a two-dimensional mixer according to the mass ratio of 0.08:0.23:0.72, and mixing for 15 minutes, wherein the rotating speed of the two-dimensional mixer is 12rpm, so as to obtain the product. Particle size distribution referring to figure 2, this particle size distribution again contains 4 peaks.
Comparative example 1:
a product B and a product D were obtained by using the method of example 4 or 5, and the product B and the product D were put into a two-dimensional mixer at a mass ratio of 0.10:0.90 and mixed for 15 minutes at a rotation speed of 12rpm to obtain a product having a particle size distribution pattern shown in FIG. 3, which was in a bimodal form.
Comparative example 2:
the product D, i.e., the finished product, obtained by the method of example 4 or 5, has a particle size distribution diagram as shown in FIG. 4, and has only one peak.
The particle size distribution of the product was measured using a Beckman particle sizer.
The product properties of comparative example 1, comparative example 2 and examples 4 and 5 are given in the following table:
Figure DEST_PATH_IMAGE001
α 1 and α 2 are thermal expansion coefficients.
From the above data, the overall performance of example 5 is best. That is, the multi-peak spherical silica powder has more excellent performance than that of a single peak (comparative example 2) (or a double peak, comparative example 1), and is mainly characterized by long fluidity, large filling amount, small linear expansion coefficient, high strength and the like.

Claims (1)

1. The preparation method of the spherical silicon dioxide micro powder with multimodal distribution is characterized by comprising the following steps:
selecting silicon dioxide micropowder with purity of more than 99.8% and granularity of 0.1-60 μm as raw material; in a spheroidizing furnace, a flame zone formed by burning natural gas and oxygen is used as a spheroidizing zone, and the raw materials are introduced into the spheroidizing zone to be spheroidized by different spheroidizing processes to prepare the material:
d50=0.1 μm-0.5 μm product a;
d50=0.6 μm-3.0 μm product B;
d50=4 μm-14 μm product C;
and D50=15 μm-60 μm product D;
the mass ratio of the product A to the product B is 0.8: 1, mixing for 10min in an airflow mixer, wherein the air pressure of the airflow mixer is 1.9Mpa, the loading coefficient is 0.35, and the mixed product is marked as a product AB;
and (3) putting the product AB, the product C and the product D into a two-dimensional mixer according to the mass ratio of 0.08:0.23:0.72, and mixing for 15 minutes, wherein the rotating speed of the two-dimensional mixer is 12rpm, so as to obtain the product.
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CN109456620A (en) * 2018-11-19 2019-03-12 江苏联瑞新材料股份有限公司 A kind of low viscosity filler composition and preparation method thereof
CN109455726A (en) * 2018-12-14 2019-03-12 江苏联瑞新材料股份有限公司 A kind of preparation method of ball-shaped silicon micro powder used for electronic packaging
CN112607756A (en) * 2020-11-25 2021-04-06 江苏联瑞新材料股份有限公司 Preparation method of spherical alumina for epoxy molding and packaging material
CN112978740B (en) * 2021-03-23 2023-11-21 江苏联瑞新材料股份有限公司 Preparation method of submicron spherical silica micropowder
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