CN107819449B - 一种超宽带声表面波谐振器及滤波器 - Google Patents
一种超宽带声表面波谐振器及滤波器 Download PDFInfo
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- CN107819449B CN107819449B CN201711258998.5A CN201711258998A CN107819449B CN 107819449 B CN107819449 B CN 107819449B CN 201711258998 A CN201711258998 A CN 201711258998A CN 107819449 B CN107819449 B CN 107819449B
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- ultra
- surface acoustic
- acoustic wave
- resonator
- wideband surface
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 45
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 239000010949 copper Substances 0.000 claims abstract description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052802 copper Inorganic materials 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 4
- 230000024241 parasitism Effects 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 230000005764 inhibitory process Effects 0.000 abstract description 3
- 238000007747 plating Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
- H03H9/14541—Multilayer finger or busbar electrode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6406—Filters characterised by a particular frequency characteristic
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
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CN201711258998.5A CN107819449B (zh) | 2017-12-04 | 2017-12-04 | 一种超宽带声表面波谐振器及滤波器 |
Applications Claiming Priority (1)
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CN201711258998.5A CN107819449B (zh) | 2017-12-04 | 2017-12-04 | 一种超宽带声表面波谐振器及滤波器 |
Publications (2)
Publication Number | Publication Date |
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CN107819449A CN107819449A (zh) | 2018-03-20 |
CN107819449B true CN107819449B (zh) | 2021-05-04 |
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CN201711258998.5A Active CN107819449B (zh) | 2017-12-04 | 2017-12-04 | 一种超宽带声表面波谐振器及滤波器 |
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CN (1) | CN107819449B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109361372A (zh) * | 2018-10-12 | 2019-02-19 | 中国电子科技集团公司第二十六研究所 | 一种温度补偿型低损耗超宽带谐振器及滤波器 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3373600D1 (en) * | 1982-01-11 | 1987-10-15 | Hitachi Ltd | Surface acoustic wave transmission device |
CN1335675A (zh) * | 2000-06-26 | 2002-02-13 | 株式会社村田制作所 | 纵向耦合谐振器型声表面波滤波器以及包括这种滤波器的通信设备 |
US7602313B2 (en) * | 1995-06-07 | 2009-10-13 | Intelligent Technologies International, Inc. | License plate including transponder |
CN202652159U (zh) * | 2012-07-17 | 2013-01-02 | 中国科学院声学研究所 | 一种二维压电声子晶体射频声波导 |
CN103117727A (zh) * | 2013-02-06 | 2013-05-22 | 中国电子科技集团公司第二十六研究所 | 一种高阻抗声表面波谐振器 |
CN105703734A (zh) * | 2016-01-12 | 2016-06-22 | 浙江大学 | 基于声表面波的柔性微米线电极的制造方法及装置 |
CN106487351A (zh) * | 2015-09-02 | 2017-03-08 | 雷森南特责任有限公司 | 优化表面声波滤波器的输入阻抗的方法 |
CN107017862A (zh) * | 2016-06-20 | 2017-08-04 | 石以瑄 | 可调谐表面声波谐振器和过滤器 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100502239C (zh) * | 2004-07-13 | 2009-06-17 | 中国科学院声学研究所 | 一种声表面波双工器 |
CN101729035B (zh) * | 2008-10-24 | 2011-09-14 | 中国科学院微电子研究所 | 基于微机电技术制作声表面波相关器的方法 |
FR2998420B1 (fr) * | 2012-11-22 | 2017-06-09 | Centre Nat De La Rech Scient (C N R S) | Transducteur a ondes elastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium. |
CN103888098A (zh) * | 2014-04-10 | 2014-06-25 | 天津理工大学 | 运用喷墨打印工艺制备叉指换能器和反射栅的方法 |
CN106338164B (zh) * | 2015-07-06 | 2019-02-01 | 中南大学 | 基于声表面波发生器件的热声回热器 |
-
2017
- 2017-12-04 CN CN201711258998.5A patent/CN107819449B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3373600D1 (en) * | 1982-01-11 | 1987-10-15 | Hitachi Ltd | Surface acoustic wave transmission device |
US7602313B2 (en) * | 1995-06-07 | 2009-10-13 | Intelligent Technologies International, Inc. | License plate including transponder |
CN1335675A (zh) * | 2000-06-26 | 2002-02-13 | 株式会社村田制作所 | 纵向耦合谐振器型声表面波滤波器以及包括这种滤波器的通信设备 |
CN202652159U (zh) * | 2012-07-17 | 2013-01-02 | 中国科学院声学研究所 | 一种二维压电声子晶体射频声波导 |
CN103117727A (zh) * | 2013-02-06 | 2013-05-22 | 中国电子科技集团公司第二十六研究所 | 一种高阻抗声表面波谐振器 |
CN106487351A (zh) * | 2015-09-02 | 2017-03-08 | 雷森南特责任有限公司 | 优化表面声波滤波器的输入阻抗的方法 |
CN105703734A (zh) * | 2016-01-12 | 2016-06-22 | 浙江大学 | 基于声表面波的柔性微米线电极的制造方法及装置 |
CN107017862A (zh) * | 2016-06-20 | 2017-08-04 | 石以瑄 | 可调谐表面声波谐振器和过滤器 |
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Address after: No.23 Xiyong Avenue, Shapingba District, Chongqing 401332 Patentee after: CETC Chip Technology (Group) Co.,Ltd. Country or region after: China Address before: No.23 Xiyong Avenue, Shapingba District, Chongqing 401332 Patentee before: CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION CHONGQING ACOUSTIC-OPTIC-ELECTRONIC CO.,LTD. Country or region before: China |