CN107806526A - A kind of pneumatic operated valve control method - Google Patents
A kind of pneumatic operated valve control method Download PDFInfo
- Publication number
- CN107806526A CN107806526A CN201610809335.7A CN201610809335A CN107806526A CN 107806526 A CN107806526 A CN 107806526A CN 201610809335 A CN201610809335 A CN 201610809335A CN 107806526 A CN107806526 A CN 107806526A
- Authority
- CN
- China
- Prior art keywords
- valve
- place
- industrial computer
- pneumatic operated
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
Abstract
The invention discloses a kind of pneumatic operated valve control method, belong to semiconductor equipment field.Including following several modules：Industrial computer (1), loopmaster boards (2), PDI controllers (3), valve island (4), air valve (5), sensors in place (6).Wherein industrial computer sends order, fiber optic communication is established by loopmaster boards, PDI controllers, which receive fiber-optic signal and are converted to electric signal, sends valve island to, valve island controls corresponding gas circuit opening and closing, air valve is set to complete specific action, and PDI controllers are given by sensors in place feedback position signal, and send back industrial computer.
Description
Technical field
The present invention relates to a kind of pneumatic operated valve control method of a kind of pneumatic operated valve control method, more particularly to ion implantation apparatus.
Background technology
Air Valve Control is very common among industrial equipment use.In ion implantation apparatus, it is true that air valve is mainly responsible for complete machine
Vacant duct opening and closing, press the work such as empty nitrogen pipeline opening and closing and valut door switch.Due to ion implantation apparatus to vacuum requirement very high, gas
Valve control is established in complete machine vacuum critically important status.
The invention provides a kind of pneumatic operated valve control method.This control method can be opened by the specific air valve of PC control
Close, and actual opening and closing situation is observed according to sensor feedback signal, avoid malfunctioning.When this control method additionally provides communication disconnection
Normally opened signal, add complete machine security reliability.
The content of the invention
The invention discloses a kind of pneumatic operated valve control method in ion implantation machine system.The invention is used for ion implanting
Machine, accurate pneumatic operated valve control can be achieved.
The present invention is achieved through the following technical solutions：Main composition includes：Industrial computer (1), loopmaster boards (2),
PDI controllers (3), valve island (4), air valve (5), sensors in place (6) composition.Wherein, industrial computer sends control life by software
Order, loopmaster boards are sent commands to by pci interface.Loopmaster boards pass through optical fiber and PDI controllers.
PDI controllers send electric signal by input/output port, and valve island receives control signal and controls corresponding magnetic valve break-make.Valve island
Compressed air is connected with, the switch of corresponding magnetic valve can control corresponding pressure blank pipe road inflation/deflation, so that air valve acts.
After air valve sending action, the sensors in place installed in relevant position can send PDI controller air valves to and arrive
The feedback signal of position.By fiber optic communication loop, most signal is shown on industrial computer interface these feedback signals at last.By anti-
Feedback signal can preferably observe the switch conditions of actual air valve, avoid maloperation.Simultaneously as many of Air Valve Control is supplied gas
Mouth has safely certain influence on complete machine, when PDI controllers, which communicate, to be disconnected, has part I/O port to be designed as exporting low electricity
It is flat.The air valve such as normally open, waste gas discharge can be so in control valve island magnetic valve to be maintained a normally open, increase complete machine safety
Property.
The present invention has following remarkable advantage：
After 1. fiber optic communication disconnects, normally opened gas circuit is remained, adds device security.
2. accessing feedback signal, whether controlled valve can pass through industrial personal computer monitoring in place.
Brief description of the drawings
Fig. 1 is pneumatic valve control structure block diagram.
Embodiment
1 couple of present invention is further introduced below in conjunction with the accompanying drawings, but not as a limitation of the invention.
As shown in fig. 1, among the present invention, feedback signal accurately and timely can be with real-time monitored complete machine state.Control
Signal and feedback signal are all to be used as switch command signal using 0V/24V.When needing to open air valve, control command is by industrial computer
Send, PDI controllers corresponding port is unfolded into current loop, the action of valve island solenoid valves.Meanwhile sensors in place receives
Signal in place.After the infrared ray of sensors in place is stopped by corresponding catch, sensor respective channels disconnect, and signal feeds back in place
To PDI controllers, industrial computer is sent to by fiber optic communication loop.The power resources of used air valve switch are empty in compression
Gas.There are the air inlet of stagnation pressure sky and outlet in valve island, and each air valve is shunted to by magnetic valve.
The specific embodiment of patent of the present invention elaborates to the content of patent of the present invention.To the general skill in this area
For art personnel, to any obvious change that it is done on the premise of without departing substantially from patent spirit of the present invention, all form
Infringement to patent of the present invention, corresponding legal liabilities will be undertaken.
Claims (4)
1. the invention discloses a kind of pneumatic operated valve control method, including following several modules：Industrial computer (1), loopmaster plates
Block (2), PDI controllers (3), valve island (4), air valve (5), sensors in place (6).
Wherein industrial computer (1) is used to send order and monitoring feedback signal, loopmaster boards (2) lead to for establishing optical fiber
Letter, PDI controllers (3) are used to send control signal, and valve island (4) receive control signal and control gas circuit to be opened and closed, and air valve (5) is completed
Specific action, and PDI controllers (3) situation will be fed back to by sensors in place (6) in place.
A kind of 2. pneumatic operated valve control method as claimed in claim 1, it is characterised in that：Pneumatic operated valve is completed by industrial computer (1)
Control and monitoring.
It is 3. as claimed in claim 1, it is characterised in that：PDI controllers use fiber optic communication with industrial computer, when communicating disconnection,
Normally opened and normally closed two kinds of signals can be provided.
It is 4. as claimed in claim 1, it is characterised in that：Air valve signal in place is fed back using sensors in place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610809335.7A CN107806526A (en) | 2016-09-08 | 2016-09-08 | A kind of pneumatic operated valve control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610809335.7A CN107806526A (en) | 2016-09-08 | 2016-09-08 | A kind of pneumatic operated valve control method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107806526A true CN107806526A (en) | 2018-03-16 |
Family
ID=61576022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610809335.7A Pending CN107806526A (en) | 2016-09-08 | 2016-09-08 | A kind of pneumatic operated valve control method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107806526A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108958113A (en) * | 2018-07-11 | 2018-12-07 | 无锡气动技术研究所有限公司 | A kind of valve island control device and system based on PROFINET communication protocol |
| CN108964271A (en) * | 2018-07-11 | 2018-12-07 | 无锡气动技术研究所有限公司 | Valve island based on EtherCAT communications protocol |
-
2016
- 2016-09-08 CN CN201610809335.7A patent/CN107806526A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108958113A (en) * | 2018-07-11 | 2018-12-07 | 无锡气动技术研究所有限公司 | A kind of valve island control device and system based on PROFINET communication protocol |
| CN108964271A (en) * | 2018-07-11 | 2018-12-07 | 无锡气动技术研究所有限公司 | Valve island based on EtherCAT communications protocol |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180316 |
|
| WD01 | Invention patent application deemed withdrawn after publication |