CN107797225A - Optical lens and its laser process equipment - Google Patents
Optical lens and its laser process equipment Download PDFInfo
- Publication number
- CN107797225A CN107797225A CN201610767112.9A CN201610767112A CN107797225A CN 107797225 A CN107797225 A CN 107797225A CN 201610767112 A CN201610767112 A CN 201610767112A CN 107797225 A CN107797225 A CN 107797225A
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- Prior art keywords
- lens
- curved surface
- optical
- value
- laser
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Lenses (AREA)
Abstract
The invention belongs to optical technical field, there is provided a kind of optical lens, it includes the first lens, the second lens, the 3rd lens and the 4th lens being arranged in order according to the incident direction of light.First lens are double-concave negative lens, and second lens are bent moon positive lens, and the 3rd lens are bent moon positive lens, and the 4th lens are biconvex positive lens.First lens, second lens, the material of the 3rd lens and the 4th lens are fused silica, and the focal length of the optical lens is 160mm.By the design of the shape and relative position of four lens, astigmatism and distortion have effectively been corrected.Laser energy concentration degree is high, realizes high quality imaging mark, improves image quality, and lens construction is simple, is easy to design, and is adapted to be widely used in various laser process equipments.In addition, additionally provide a kind of laser process equipment.
Description
Technical field
The present invention relates to optical technical field, more particularly to a kind of optical lens and its laser process equipment.
Background technology
Ultraviolet laser develops into current height by fast development in recent years from incipient 0.2w~0.5w
In 10w laser power density.Due to the raising of laser power, the application field of Ultra-Violet Laser is set not only to rest on product
In mark, also more it is widely applied in wafer cutting, FPC cutting, thin plate cutting etc. field.
With the continuous improvement of laser power, higher requirement, original optics glass are proposed to corresponding optics, light path
The camera lens that glass makes, such high-power Ultra-Violet Laser it has not been resistant to, it is impossible to be applied to cutting field.Can be through this
The crystalline material of short-wave laser is simultaneously few.Also only fused silica (silica) is a kind of for material ideal at present, and fused silica
For the material of the camera lens, its refractive index is very low, and the lens imaging being commonly designed is of poor quality, is brought to design
It is many difficult.
The content of the invention
The present invention provides a kind of optical lens, it is intended to solves that the optical lens image quality of high power laser light is poor, and design is tired
The problem of difficult.
A kind of optical lens, including the first lens, the second lens, the 3rd saturating being arranged in order according to the incident direction of light
Mirror and the 4th lens, first lens are double-concave negative lens, and second lens are bent moon positive lens, and the 3rd lens are
Bent moon positive lens, the 4th lens are biconvex positive lens, first lens, second lens, the 3rd lens and
The material of 4th lens is fused silica, and the focal length of the optical lens is 160mm.
In one of which embodiment, the Entry pupil diameters of the optical lens are 10mm, cut coverage 50*50mm2,
The angle of divergence is 50 °.
In one of which embodiment, first lens are R1 and R2 first surface and the second song by radius of curvature
Face is formed, and R1 value is -36mm ± 5%, and R2 value is 232.5mm ± 5%, center thickness of first lens on optical axis
For 3mm ± 5%；Second lens are made up of the 3rd curved surface that radius of curvature is R3 and R4 and the 4th curved surface, R3 value for-
81.3mm ± 5%, R4 value are -60.5mm ± 5%, and center thickness of second lens on optical axis is 6mm ± 5%；Institute
State the 3rd lens to be made up of for R5 and R6 the 5th curved surface and the 6th curved surface radius of curvature, R5 value is -725mm ± 5%, R6's
It is worth for -71mm ± 5%, center thickness of the 3rd lens on optical axis is 8.5mm ± 5%；4th lens are by curvature
The 7th curved surface and the 8th curved surface that radius is R7 and R8 are formed, and R7 value is 389mm ± 5%, and R8 value is -66.5mm ± 5%,
Center thickness of 4th lens on optical axis is 15mm ± 5%.
In one of which embodiment, the optical lens the also the including being arranged along the incident direction of light the 5th is saturating
Mirror, the 5th lens are plain protective glass, and the thickness of the 5th lens is 3.5mm ± 5%.
In one of which embodiment, the material of the 5th lens is fused silica；5th lens are by curvature half
The zigzag face and the tenth curved surface that footpath is R9 and R10 are formed, and R9 and R10 value are ∞.
In one of which embodiment, first lens, second lens, the 3rd lens, the described 4th
The ratio of the refractive index and Abbe number of lens and the 5th lens is 1.4585/67.82 ± 5%.
In one of which embodiment, the spacing of second curved surface and the 3rd curved surface on the optical axis is
4mm ± 5%；The spacing of 4th curved surface and the 5th curved surface on the optical axis is 0.5mm ± 5%；Described 6th is bent
The spacing of face and the 7th curved surface on the optical axis is 0.5mm ± 5%；In one of which embodiment, the described 8th
The spacing of curved surface and the zigzag face on the optical axis is 3mm ± 5%.
In addition, additionally provide a kind of laser process equipment.
A kind of laser process equipment, including ultraviolet laser and for focusing on Ultra-Violet Laser to carry out the optical frames of mark
Head, the optical lens use optical lens described above.
In one of which embodiment, the emission wavelength of the ultraviolet laser is 355nm.
In one of which embodiment, the power of the ultraviolet laser is equal to or more than 20W.
By the way that the material of the first lens, the second lens, the 3rd lens and the 4th lens is set into fused silica, the optical lens
High power laser light can be passed through, by the design of the shape and relative position of four lens, has effectively corrected astigmatism and distortion.Swash
Light energy concentration degree is high, realizes high quality imaging mark, improves image quality, and lens construction is simple, is easy to design, and fits
Conjunction is widely used in various laser process equipments.High quality, high-precision can also be carried out using the laser marking device of the camera lens
Spend mark.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, it will use below required in embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for ability
For the those of ordinary skill of domain, on the premise of not paying creative work, it can also be obtained according to these accompanying drawings other attached
Figure.
Fig. 1 is the structural representation of the optical lens in an embodiment；
Fig. 2 is the geometry phase dygoram of the optical lens in an embodiment；
Fig. 3 is the distortion curve figure of the optical lens in an embodiment；
Fig. 4 is the optical transfer function O.T.F curve maps of the optical lens in an embodiment；
Fig. 5 is the M.T.F curve maps of the transmission function of the optical lens in an embodiment；
Fig. 6 is the disc of confusion schematic diagram of the optical lens in an embodiment；
Fig. 7 is the encircled energy schematic diagram of the optical lens in an embodiment.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Optical lens provided in an embodiment of the present invention, by by the first lens L1, the second lens L2, the 3rd lens L3 and
Four lens L4 material is set to fused silica, and the optical lens can pass through high power laser light, pass through the shape and phase of four lens
Design to position, has effectively corrected astigmatism and distortion.Laser energy concentration degree is high, realizes high quality imaging mark, improves
Image quality.The lens construction is simple, is easy to design, and is adapted to be widely used in various laser process equipments.Using the mirror
The laser marking device of head can also carry out high quality, high-precision mark.
As shown in figure 1, the optical lens in an embodiment, including first be arranged in order according to the incident direction of light are saturating
Mirror L1, the second lens L2, the 3rd lens L3 and the 4th lens L4.First lens L1 is double-concave negative lens.Second lens L2 is curved
Month positive lens.3rd lens L3 is bent moon positive lens.4th lens L4 is biconvex positive lens.First lens L1, the second lens L2,
3rd lens L3 and the 4th lens L4 material is fused silica.
First lens L1 is made up of the first surface S1 and the second curved surface S2 that radius of curvature is R1 and R2.R1 value for-
36mm ± 5%, R2 value are 232.5mm ± 5%.First lens L1 first surface S1 protrudes to image space, the second curved surface S2 phases
It is inwardly recessed for first surface S1.Center thickness d1 on first lens L1 optical axises is 3mm ± 5%.First lens L1 folding
The ratio for penetrating rate and Abbe number is 1.4585/67.82 ± 5%.
Second lens L2 is made up of the 3rd curved surface S3 and the 4th curved surface S4 that radius of curvature is R3 and R4.R3 value for-
81.3mm ± 5%, R4 value are -60.5mm ± 5%.3rd curved surface S3 protrudes to image space, and radius of curvature is -81.3mm, and the 4th
Curved surface S4 protrudes to image space.Center thickness d3s of the second lens L2 on optical axis is 6mm ± 5%.Second lens L2 refractive index
Ratio with Abbe number is 1.4585/67.82 ± 5%.
3rd lens L3 is made up of the 5th curved surface S5 and the 6th curved surface S6 that radius of curvature is R5 and R6.R5 value for-
725mm ± 5%, R6 value are -71mm ± 5%.5th curved surface S5 to image space protrude, the 6th curved surface S6 with respect to the 5th curved surface S5 to
Outer protrusion.Center thickness d5s of the 3rd lens L3 on optical axis is 8.5mm ± 5%.3rd lens L3 refractive index and Abbe number
Ratio be 1.4585/67.82 ± 5%.
4th lens L4 is made up of the 7th curved surface S7 and the 8th curved surface S8 that radius of curvature is R7 and R8.R7 value is
389mm ± 5%, R8 value are -66.5mm ± 5%.7th curved surface S7 protrudes to object space.8th curved surface S8 is with respect to the 7th curved surface S7
It is outwardly.Center thickness d7s of the 4th lens L4 on optical axis is 15mm ± 5%.4th lens L4 refractive index and Abbe number
Ratio be 1.4585/67.82 ± 5%.
In above-mentioned optical lens, light is propagated from left to right, is defined by the intersection point of sphere and primary optical axis, and the centre of sphere of sphere exists
The point is negative with a left side, then radius of curvature.Conversely, the centre of sphere is in the point, with the right side, then radius of curvature is just.
In one embodiment, the optical lens also include along light incident direction arrange the 5th lens L5, the 5th
Lens L5 is plain protective glass.5th lens L5 thickness d 9 is 3.5mm ± 5%.5th lens L5 material is fused silica.
5th lens L5 is made up of the zigzag face S9 and the tenth curved surface S10 that radius of curvature is R9 and R10, R9 and R10's
Value is ∞.The refractive index of 5th lens and the ratio of Abbe number are 1.4585/67.82 ± 5%.
In the present embodiment, to the distance between the first lens L1 and the second lens L2, the second lens L2 and the 3rd lens
The distance between L3, the distance between the 3rd lens L3 and the 4th lens L4, between the 4th lens L4 and the 5th lens L5 away from
From being defined.Specifically, the plane of incidence (the 3rd song of the first lens L1 exit facet (the second curved surface S2) and the second lens L2
Face S3) the spacing d2 on optical axis is 4mm ± 5%.Second lens L2 exit facet (the 4th curved surface S4) is with the 3rd lens L3's
Spacing d4 of the plane of incidence (the 5th curved surface S5) on optical axis is 0.5mm ± 5%.3rd lens L3 exit facet (the 6th curved surface S6)
It is 0.5mm ± 5% with the spacing d6 of the 4th lens L4 plane of incidence (the 7th curved surface S7) on optical axis.4th lens L4 outgoing
Spacing d8 of face (the 8th curved surface S8) and the 5th lens the L5 plane of incidence (zigzag face S9) on optical axis is 3mm ± 5%.
The structural parameters of above-mentioned optical lens are specifically listed in table 1.
The structural parameters of the optical lens of table 1
According to " Airy Disk " judgements understand (Airy disc judgement), and the theoretical resolution distance for being cut by laser gap is：
D=2.44 λ f/D
Wherein：D Airies spot diameter (namely cutting gap)；
λ is the optical maser wavelength of machining beams；
F is the focal length of the optical lens；
D is the Entry pupil diameters of the optical lens.
From the foregoing, it will be observed that more fine joint-cutting can be obtained by carrying out cutting with the laser beam of ultrashort wavelength.It is commonly used
Ultraviolet laser wavelength X=355nm, theoretically the laser resolution ratio of its resolution ratio 1064nm wavelength is big by three
Times, this is very attractive selection.Above-mentioned optical lens all uses fused silica material to design camera lens for base material, can fit
Close laser λ=355nm of ultraviolet band, can obtain high-resolution point away from, that is, hyperfine cutting gap can be obtained,
And it is adapted to high power density, it may apply on 20w ultraviolet laser.
As shown in figure 1, logical optical wavelength λ=355nm of the optical lens；Focal length f=160mm；Entry pupil diameters D=10mm；
Cut coverage A=50*50mm2；The angle of divergence (2 ω)=50 °.The characteristics of maximum of above-mentioned optical lens is to minimize, the camera lens
Maximum clear aperture (lens size) only has Φ 75mm, can be used in general cutting machine.The optical lens is all using melting stone
English material, it is adapted to high-power laser.
Fig. 2 and Fig. 3 represents geometrical aberration and the distortion of the optical lens respectively.The optical lens astigmatism and bending have all reached
Preferable correcting state is arrived, image planes significantly flatten.So that the image planes in whole cut coverage are all very flat, and on axle with axle
Outer no significant difference.
Fig. 4 and Fig. 5 represents the optical transfer function O.T.F and transmission function M.T.F of the optical lens respectively.Thus also may be used
To find out, point and off-axis point have reached the purpose of flattened field without significant difference on the axle of the optical lens.
Fig. 6 and Fig. 7 represents the disc of confusion and encircled energy of the optical lens.The size of disc of confusion is equal in all visual fields
In 10 μm of control." encircled energy " also illustrates that, cuts all energy and concentrates within 10 μm.Encircled energy is high, can
Realize accurate mark.
Optical lens provided in an embodiment of the present invention, by the design of the shape and relative position of four lens, effectively rectify
Just astigmatism and distortion, and encircled energy is high, realizes high quality imaging mark, improves image quality.Lens construction letter
It is single, it is easy to design, is adapted to be widely used in various laser process equipments.It can also be entered using the laser marking device of the camera lens
Row high quality, high-precision mark.
A kind of laser process equipment, including ultraviolet laser and for focusing on Ultra-Violet Laser to carry out the optical frames of mark
Head.Wherein, optical lens uses optical lens described above.The emission wavelength of ultraviolet laser is 355nm.Ultraviolet laser
Power be equal to or more than 20W.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement made within refreshing and principle etc., should be included in the scope of the protection.
Claims (10)
1. a kind of optical lens, including the first lens, the second lens, the 3rd lens being arranged in order according to the incident direction of light
With the 4th lens, it is characterised in that first lens are double-concave negative lens, and second lens are bent moon positive lens, described
3rd lens are bent moon positive lens, and the 4th lens are biconvex positive lens, first lens, second lens, described
The material of 3rd lens and the 4th lens is fused silica, and the focal length of the optical lens is 160mm.
2. optical lens as claimed in claim 1, it is characterised in that the Entry pupil diameters of the optical lens are 10mm, cutting
Scope is 50*50mm2, the angle of divergence is 50 °.
3. optical lens as claimed in claim 1, it is characterised in that first lens are by radius of curvature is R1 and R2 the
One curved surface and the second curved surface are formed, and R1 value is -36mm ± 5%, and R2 value is 232.5mm ± 5%, and first lens are in light
Center thickness on axle is 3mm ± 5%；Threeth curved surface and fourth curved surface structure of second lens by radius of curvature for R3 and R4
Into R3 value is -81.3mm ± 5%, and R4 value is -60.5mm ± 5%, and center of second lens on the optical axis is thick
Spend for 6mm ± 5%；3rd lens are made up of the 5th curved surface that radius of curvature is R5 and R6 and the 6th curved surface, R5 value for-
725mm ± 5%, R6 value are -71mm ± 5%, and center thickness of the 3rd lens on the optical axis is 8.5mm ± 5%；
4th lens are made up of radius of curvature for R7 and R8 the 7th curved surface and the 8th curved surface, and R7 value is 389mm ± 5%, R8
Value be -66.5mm ± 5%, center thickness of the 4th lens on the optical axis is 15mm ± 5%.
4. optical lens as claimed in claim 3, it is characterised in that the optical lens also includes the incident direction along light
5th lens of arrangement, the 5th lens are plain protective glass, and the thickness of the 5th lens is 3.5mm ± 5%.
5. optical lens as claimed in claim 4, it is characterised in that the material of the 5th lens is fused silica；Described
Five lens are made up of radius of curvature for R9 and R10 zigzag face and the tenth curved surface, and R9 and R10 value are ∞.
6. optical lens as claimed in claim 4, it is characterised in that first lens, second lens, the described 3rd
Lens, the 4th lens and the refractive index of the 5th lens and the ratio of Abbe number are 1.4585/67.82 ± 5%.
7. optical lens as claimed in claim 5, it is characterised in that second curved surface and the 3rd curved surface are in the light
Spacing on axle is 4mm ± 5%；The spacing of 4th curved surface and the 5th curved surface on the optical axis be 0.5mm ±
5%；The spacing of 6th curved surface and the 7th curved surface on the optical axis is 0.5mm ± 5%；8th curved surface and institute
It is 3mm ± 5% to state spacing of the zigzag face on the optical axis.
8. a kind of laser process equipment, including ultraviolet laser and for focusing on Ultra-Violet Laser to carry out the optical frames of mark
Head, it is characterised in that optical lens of the optical lens described in using any one of claim 1 to 7.
9. laser process equipment as claimed in claim 8, it is characterised in that the emission wavelength of the ultraviolet laser is
355nm。
10. laser process equipment as claimed in claim 8, it is characterised in that the power of the ultraviolet laser is equal to or greatly
In 20W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610767112.9A CN107797225B (en) | 2016-08-30 | 2016-08-30 | Optical lens and laser processing equipment thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610767112.9A CN107797225B (en) | 2016-08-30 | 2016-08-30 | Optical lens and laser processing equipment thereof |
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| Publication Number | Publication Date |
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| CN107797225A true CN107797225A (en) | 2018-03-13 |
| CN107797225B CN107797225B (en) | 2020-08-18 |
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| CN201610767112.9A Active CN107797225B (en) | 2016-08-30 | 2016-08-30 | Optical lens and laser processing equipment thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110936014A (en) * | 2019-12-30 | 2020-03-31 | 苏州迅镭激光科技有限公司 | Optical system capable of realizing large-breadth scanning welding |
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| CN101236291A (en) * | 2007-01-30 | 2008-08-06 | 深圳市大族激光科技股份有限公司 | Telecentric F-theta optical lens and optical system |
| CN101846790A (en) * | 2010-06-11 | 2010-09-29 | 深圳市大族激光科技股份有限公司 | Optical lens applied to ultraviolet laser |
| CN203025409U (en) * | 2012-03-21 | 2013-06-26 | 业纳光学系统有限公司 | F-theta objective lens II |
| WO2014067085A1 (en) * | 2012-10-31 | 2014-05-08 | 深圳市大族激光科技股份有限公司 | EXTREME ULTRAVIOLET LASER MARKING Fθ SHOT AND LASER PROCESSING DEVICE |
| CN104297897A (en) * | 2014-09-28 | 2015-01-21 | 深圳市大族激光科技股份有限公司 | High-power optical lens applying ultraviolet laser |
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2016
- 2016-08-30 CN CN201610767112.9A patent/CN107797225B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101236291A (en) * | 2007-01-30 | 2008-08-06 | 深圳市大族激光科技股份有限公司 | Telecentric F-theta optical lens and optical system |
| CN101846790A (en) * | 2010-06-11 | 2010-09-29 | 深圳市大族激光科技股份有限公司 | Optical lens applied to ultraviolet laser |
| CN203025409U (en) * | 2012-03-21 | 2013-06-26 | 业纳光学系统有限公司 | F-theta objective lens II |
| WO2014067085A1 (en) * | 2012-10-31 | 2014-05-08 | 深圳市大族激光科技股份有限公司 | EXTREME ULTRAVIOLET LASER MARKING Fθ SHOT AND LASER PROCESSING DEVICE |
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| CN110936014A (en) * | 2019-12-30 | 2020-03-31 | 苏州迅镭激光科技有限公司 | Optical system capable of realizing large-breadth scanning welding |
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| CN107797225B (en) | 2020-08-18 |
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