CN203025411U - F-theta objective lens III - Google Patents
F-theta objective lens III Download PDFInfo
- Publication number
- CN203025411U CN203025411U CN 201220735194 CN201220735194U CN203025411U CN 203025411 U CN203025411 U CN 203025411U CN 201220735194 CN201220735194 CN 201220735194 CN 201220735194 U CN201220735194 U CN 201220735194U CN 203025411 U CN203025411 U CN 203025411U
- Authority
- CN
- China
- Prior art keywords
- lens
- focal distance
- object lens
- independently
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Abstract
The utility model relates to an F-theta objective lens of scanning equipment, which is used for processing laser materials. Lenses L1-L4 and gaps d3, d5 and d7 formed between the lenses L1-L4 are sequentially connected to form a total focus f being 170mm. The F-theta objective lens can be used for calibrating a wavelength being 532nm.
Description
Technical field
The utility model relates to a kind of F-θ object lens that can be used for the scanning device of Materialbearbeitung mit Laserlicht.
Background technology
The F-θ object lens laser beam of incident as follows focus in the image field on a plane, this laser beam flying with respect to the optical axis included angle of these F-θ object lens be+/-the scanning angle zone of θ, wherein in this scanning angle zone, scanning angle is followed a linear function with the ratio that laser beam incident in this image field is put optical axis distance.That is to say, the laser beam that scans with a Constant Angular Velocity has generated a focus that moves with constant speed in this image field.At this, the size of this focus each position in this image field should be invariable.
The size of this focus is to be decided by the purpose of Materialbearbeitung mit Laserlicht (for example writing, remove coat or cutting).
Due to laser beam, relevant to wavelength refraction, when laser beam is passed through F-θ object lens, in order to reach high focus quality, these F-θ object lens are calibrated to the wavelength of processing laser beam used, that is to say this object lens are calculated and make: for predefined wavelength and predefined lasing beam diameter, the image field of a predetermined size in admissible temperature range of tolerable variance, this object lens do not have or only have slight optical aberration, and this optical aberration has caused focal spot size significantly to change.Particularly in the application of Materialbearbeitung mit Laserlicht, F-θ object lens have a large image field and a large total focal length.
The utility model content
The purpose of this utility model is to provide a kind of F-θ object lens for high power laser, and the wavelength and 150 to 190mm that these F-θ object lens have 532nm is preferably total focal length of 170mm, makes the laser emission can be in the situation that there is no the back reflective imaging.This purpose is to realize by the F-θ object lens of the feature with claim 1.
A plurality of favourable embodiments have been described in the dependent claims.
Description of drawings
Below will consult accompanying drawing and illustrate in greater detail the utility model.
In the accompanying drawings:
Fig. 1 shows the geometrical optics figure according to object lens of the present utility model.
Embodiment
Has entrance pupil (Eintrittspupile) EP who is arranged on this a distance, F-θ object lens upstream according to F-θ object lens of the present utility model, this entrance pupil can be arranged in a plane that is provided with a scanning mirror, perhaps, if used two scanning mirrors, be in the alternative plane that it is calculated; And these F-θ object lens comprise four independently lens L
1To L
4, they are arranged on a public optical axis A.These four lens L independently
1To L
4Be configured to form the lens sequence of " negative-negative-positive-positive ".That is to say independently lens L of the first two
1To L
2Have negative focal length, and latter two lens L independently
3To L
4Has positive focal length.
First lens L herein
1Be biconcave lens, the second lens L
2Be concave-convex lens, the 3rd lens L
3Be plano-convex lens, the 4th lens L
4Be biconvex lens.
These four independently the focal length of lens satisfy following requirement:
First lens L
1Focal distance f
1With the focal distance ratio of total focal length be f:-1.4＜f
1/ f＜-1.0.
The second lens L
2Focal distance f
2With the focal distance ratio of total focal length be f:-4.0＜f
2/ f＜-3.3.
The 3rd lens L
3Focal distance f
3With the focal distance ratio of total focal length be f:+1.0＜f
3/ f＜1.3.
The 4th lens L
4Focal distance f
4With the focal distance ratio of total focal length be f:+1.5＜f
4/ f＜+1.8.
A kind of cover plate (Schutzglas) SG can be arranged at these independently lens L
1To L
4The downstream.
By the available power that realizes according to F-θ object lens of the present utility model be: with four quartz glass lens independently, a kind of F-θ object lens have been obtained, these F-θ object lens have a total focal length in 150 to 190mm scopes, and these F-θ object lens are applicable to high power laser and the wavelength of 532mm is calibrated.A plurality of parameters of these F-θ object lens are set to, and make at lens L
1To L
4Optical activity surface and cover plate SG(if any) back reflective of upper generation is at lens L
1To L
4Surface or be arranged on mirror around entrance pupil EP focus on.Concrete structure and the parameter declaration of the exemplary of this F-θ object lens are as follows.
The entrance pupil EP of these F-θ object lens is arranged at first lens L
1Of the place ahead, front summit apart from d
1The place, this first lens is for having thickness d
2Biconcave lens, the radius of its front surface is r
1And the radius of rear surface is r
2First lens L
1After be provided with the second lens L
2, a space d is arranged between the two
3, these second lens are for having thickness d
4Negative meniscus lens, the radius of its front surface is r
3And the radius of rear surface is r
4
After this be the 3rd lens L
3, have space d between itself and last lens
5, the 3rd lens are for having thickness d
6Plano-convex lens, the radius of its front surface is r
5And the radius of rear surface is r
6After this be the 4th lens L
4, have space d between itself and last lens
7, the 4th lens are for having thickness d
8Biconvex lens, the radius of its front surface is r
7And the radius of rear surface is r
8After this be that parallel its thickness of cover plate SG(of face is d
10), have space d between itself and last lens
9Image field BE of distance cover plate SG apart from d
11The place produces.Quartz glass with index of refraction n is selected as all independently lens L
1To L
4Material with cover plate SG.
Provide these independently lens L in following table
1To L
4Radius and their thickness and apart from d.
These distances and thickness all represent with d and pass on direction along the order of the optical axis A of F-θ object lens at light beam according to them to be numbered, and are expressed as d in Fig. 1
1To d
11
Term " front " and " afterwards " surface refer to the direction that light beam passes.These radius r
1To r
10Can be clearly with reference to these associated lens L
1To L
4And cover plate SG and carry out association, and therefore for purpose clearly and not shown in Figure 1.
According to these lens L independently
1To L
4, the refractive index n that depends on material, with these lens L independently
1To L
4Radius-of-curvature r
1To r
8Explicitly, the thickness d of these lens
2, d
4, d
6, d
8Determined respectively separate lenses L
1To L
4Focal distance f
1To f
4Focal distance f
1To f
4Independently lens L has been described respectively
1To L
4Focus to the distance of principal plane, they are not shown in Figure 1, because for the lens L independently of purpose clearly
1To L
4Principal plane and not shown.Total focal distance f has been described the distance of image field BE to an alternative principal plane of these F-θ object lens, does not also illustrate equally.
For having the object lens at the F-of the many kinds of parameters shown in this θ, result is: for first lens L
1, focal distance f
1Ratio with respect to total focal distance f is-1.22; For the second lens L
2, focal distance f
2Ratio with respect to total focal distance f is-3.62; For the 3rd lens L
3, focal distance f
3Ratio with respect to total focal distance f is 1.13; And for the 4th lens L
4, focal distance f
4Ratio with respect to total focal distance f is 1.65.
These lens L
1To L
4And the space d between it
3, d
5, d
7in succession connect the total focal distance f that has formed 170mm is set.These F-θ object lens are calibrated for the wavelength of 532nm.
Claims (3)
1. F-θ object lens, is characterized in that, it comprises four independently lens, wherein the first separate lenses L
1For having focal distance f
1Biconcave lens, the second separate lenses L
2For having focal distance f
2Concave-convex lens, the 3rd separate lenses L
3For having focal distance f
3Plano-convex lens, and the 4th separate lenses L
4For having focal distance f
4Biconvex lens, and total focal length of these F-θ object lens is f; Focal distance f wherein
1To f
4Satisfy following condition with the ratio of total focal distance f:
-1.4<f
1/f<-1.0
-4.0<f
2/f<-3.3
+1.0<f
3/f<1.3
+1.5<f
4/f<+1.8。
2. F-θ object lens as claimed in claim 1, is characterized in that f
1/ f=-1.22, f
2/ f=-3.62, f
3/ f=1.13, f
4/ f=+1.65.
3. F-θ object lens as claimed in claim 2, is characterized in that, the entrance pupil EP of these F-θ object lens is placed in this first separate lenses L
1The place ahead 23.3mm apart from d
1The place.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE201220003079 DE202012003079U1 (en) | 2012-03-21 | 2012-03-21 | F-theta objective lll |
| DE202012003079.5 | 2012-03-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203025411U true CN203025411U (en) | 2013-06-26 |
Family
ID=46510472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220735194 Expired - Fee Related CN203025411U (en) | 2012-03-21 | 2012-12-27 | F-theta objective lens III |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN203025411U (en) |
| DE (1) | DE202012003079U1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101920685B1 (en) | 2017-10-25 | 2019-02-13 | 주식회사 필옵틱스 | Scan Lens for Laser Micro Processing |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104781716B (en) * | 2012-10-31 | 2017-03-22 | 大族激光科技产业集团股份有限公司 | Extreme ultraviolet laser marking F(theta) shot and laser processing device |
| DE102016211811B4 (en) | 2016-06-30 | 2022-02-24 | Trumpf Laser Gmbh | F-theta lens and scanner device therewith |
-
2012
- 2012-03-21 DE DE201220003079 patent/DE202012003079U1/en not_active Expired - Lifetime
- 2012-12-27 CN CN 201220735194 patent/CN203025411U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101920685B1 (en) | 2017-10-25 | 2019-02-13 | 주식회사 필옵틱스 | Scan Lens for Laser Micro Processing |
Also Published As
| Publication number | Publication date |
|---|---|
| DE202012003079U1 (en) | 2012-05-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130626 Termination date: 20161227 |