CN107768278A - Droplet discharge apparatus and drop discharge condition modification method - Google Patents
Droplet discharge apparatus and drop discharge condition modification method Download PDFInfo
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- CN107768278A CN107768278A CN201710723809.0A CN201710723809A CN107768278A CN 107768278 A CN107768278 A CN 107768278A CN 201710723809 A CN201710723809 A CN 201710723809A CN 107768278 A CN107768278 A CN 107768278A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
- B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- Condensed Matter Physics & Semiconductors (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Manufacturing & Machinery (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Ink Jet (AREA)
Abstract
Discharge condition of the present invention based on line sensor to the drop of the appropriate debugging functions liquid of shooting result of the drop of the functional liquid of inspection discharge.Droplet discharge apparatus (1) is used to make the work stage (40) for being equipped with workpiece (W) move on main scanning direction relative to drop discharge nozzle, the drop of functional liquid is discharged on workpiece (W) from drop discharge nozzle and described, it includes line sensor, the mark of prescribed level is pre-formed with workpiece (W), the workpiece (W) that drop inspection is discharged in work stage (40) by nozzle is discharged from drop, the shooting of the drop and above-mentioned mark of the examined discharge on workpiece (W) is carried out by line sensor (31), length based on captured mark on the main scanning direction, correct the shooting result of above-mentioned drop, the discharge condition from drop discharge nozzle based on the shooting result amendment of the revised drop.
Description
Technical field
The droplet discharge apparatus described the present invention relates to the drop to workpiece discharge function liquid and drop discharge dress
The drop discharge condition modification method put.
Background technology
In the past, as the device described using functional liquid on workpiece, it is known that make what the functional liquid was discharged with drops
The droplet discharge apparatus of injection system.Droplet discharge apparatus is widely used in Production Example such as organic el device, colour filter, liquid crystal display
(flat board shows the electro-optical devices such as device, plasma scope (PDP devices), electron emitting device (FED devices, SED devices)
Show device；Situations such as when FPD).
In droplet discharge apparatus, it is desirable to the correctness of the drain position of the drop of functional liquid, therefore, for checking and repair
The purpose of the discharge of positive drop, before being described, discharge drop is checked, the drop of inspection discharge is shot with filming apparatus,
Condition is discharged based on shooting result amendment to adjust the discharge rate of functional liquid and discharge moment etc. (with reference to patent document 1 and 2).
In addition, in the droplet discharge apparatus of patent document 1, the inspection discharge of functional liquid is carried out to the medium of inspection,
In the droplet discharge apparatus of patent document 2, the inspection that functional liquid is carried out to the inspection area on workpiece is discharged.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2010-204411 publications
Patent document 2：Japanese Unexamined Patent Publication 2006-44059 publications
The content of the invention
Technical problems to be solved are thought in invention
But as the filming apparatus for the function liquid droplet for checking discharge, more widely used compared to area sensor suitable
In the line sensor of continuous processing.
During using line sensor, it is necessary to by work stage be on main scanning direction in assigned direction by desired constant airspeed
Travelling workpiece.Because if do not press desired constant speed travelling workpiece, actual drop and the bat based on line sensor
The shape for the drop taken the photograph in the image (hereinafter referred to as shooting image) of result is different.The drop discharged is checked for example, working as actually
For positive round when, if the translational speed of workpiece is less than desired speed, in the shooting image of on-line sensor, the shape of drop
As being the elliptical shape that main scanning direction has major axis in moving direction, if translational speed is more than desired speed,
In the shooting image of line sensor, the ellipse for being shaped as that there is major axis on the direction orthogonal with main scanning direction of drop
Shape.
However, the translational speed of the workpiece moved by work stage has deviation.Therefore, shot by line sensor and check discharge
Drop when, sometimes according to the shooting image of line sensor can not judge check discharge drop true form.If can not
Judge that true form can not also accurately hold the drain position for the drop for checking discharge.As a result, can not suitably it correct from row
The discharge condition of the drop of delivery nozzle.
Patent document 1 and 2 pairs of this point also without disclosure or enlighten any content.
The present invention is that its object is to can discharge nozzle in main scanning side relative to drop in view of this point is made
In the droplet discharge apparatus described on the workpiece moved up from the drop of drop discharge nozzle discharge function liquid, based on line
Discharge condition of the sensor to the drop of the appropriate debugging functions liquid of shooting result of the drop of the functional liquid of inspection discharge.
For solving the technical scheme of technical problem
In order to reach above-mentioned purpose, the present invention is a kind of droplet discharge apparatus, for the work stage phase for making to be equipped with workpiece
Move, be discharged to the drop of functional liquid from drop discharge nozzle described on main scanning direction for drop discharge nozzle
To be described on workpiece, the droplet discharge apparatus is characterised by, including：Arranged in the direction vertical with the main scanning direction
Show the line sensor of capturing element；It is controlled with nozzle, the work stage and the line sensor is discharged to the drop
Control unit, be pre-formed with the mark of prescribed level in the work stage or the workpiece, the control unit causes from described
Drop discharges the inspection discharge that nozzle carries out the drop to the workpiece in the work stage, carries out the line sensor
The shooting of the drop and the mark of examined discharge on the workpiece, based on the captured mark in the main scanning
Length on direction, the shooting result of the drop is corrected, the shooting result amendment based on the revised drop is from described
Drop discharges the discharge condition of nozzle.
It is preferred that configure the drop discharge nozzle, the line sensor, institute successively from the minus side of the main scanning direction
State control unit it is described mark from the drop discharge positive side from nozzle to the main scanning direction movement during and the mark
It is at least each once sensed using line during the minus side movement of main scanning direction described in positive side from the main scanning direction
The shooting of device.
The capturing element of line sensor described in preferred pair is provided with telecentric lens.
It is preferred that the control unit carries out repeatedly inspection discharge of the drop from drop discharge nozzle.
It is preferred that the discharge face for being discharged the drop of the workpiece is quadrangle, in the discharge face, along described
The side of the positive side of main scanning direction is provided with the inspection discharging area for the inspection discharge for carrying out the drop, is discharged than the inspection
Region is provided with description region by the position of the minus side of the main scanning direction.
Another aspect of the present invention is a kind of drop discharge method of droplet discharge apparatus, above-mentioned drop discharge dress is used to make to take
The work stage for being loaded with workpiece is moved relative to drop discharge nozzle on main scanning direction, and nozzle is discharged by function from the drop
The drop of liquid, which is discharged on the workpiece, to be described, and the drop discharge method is characterised by, including：Arranged from the drop
Step is discharged in the inspection that delivery nozzle carries out the inspection discharge of drop to the workpiece in the work stage, by being swept with the master
Retouch be arranged with the vertical direction in direction capturing element line sensor carry out examined discharge on the workpiece drop and
The shooting step of the shooting of the mark of the work stage or the prescribed level on the workpiece is set in advance in, based on captured
Length of the mark on the main scanning direction, correct the shooting result amendment step of the shooting result of the drop；With
The discharge condition of discharge condition of the shooting result amendment based on the drop being corrected from drop discharge nozzle is repaiied
Positive step.
It is preferred that configure the drop discharge nozzle, the line sensor successively from the minus side of the main scanning direction,
In the shooting step, it is described mark from the drop discharge positive side from nozzle to the main scanning direction movement during and institute
During the minus side movement for stating main scanning direction described in positive side of the mark from the main scanning direction, at least respectively once utilized
The shooting of line sensor.
The capturing element of line sensor described in preferred pair is provided with telecentric lens.
It is preferred that in the inspection discharge step, the inspection for carrying out repeatedly the drop from drop discharge nozzle is arranged
Go out.
It is preferred that the discharge face for being discharged the drop of the workpiece is quadrangle, in the discharge face, along described
The side of the positive side of main scanning direction is provided with the inspection discharging area for the inspection discharge for carrying out the drop, is discharged than the inspection
Region is provided with description region by the position of the minus side of the main scanning direction, in the inspection discharge step, to the inspection
Look into the inspection discharge that discharging area carries out the drop.
Invention effect
In accordance with the invention it is possible to arranged on the workpiece moved relative to drop discharge nozzle on main scanning direction from drop
In the droplet discharge apparatus that the drop of delivery nozzle discharge function liquid is described, based on line sensor to checking the functional liquid discharged
Drop the appropriate debugging functions liquid of shooting result drop discharge condition.
Brief description of the drawings
Fig. 1 is the schematic side of the outline of the structure of one of the droplet discharge apparatus for showing the first embodiment of the present invention
View.
Fig. 2 is the schematic plan view of Fig. 1 droplet discharge apparatus.
Fig. 3 is the signal of the work stage for the state for being placed with workpiece possessed by Fig. 1 droplet discharge apparatus in work stage
Plan.
Fig. 4 is the partial enlarged drawing of Fig. 3 workpiece.
Fig. 5 is the explanation figure of the processing action of the droplet discharge apparatus of first embodiment.
Fig. 6 is the explanation figure of the processing action of the droplet discharge apparatus of first embodiment.
Fig. 7 is the enlarged drawing of the part of the drop of the functional liquid of examined discharge of workpiece.
Fig. 8 is the figure of one of the shooting result for showing line sensor.
Fig. 9 is the explanation figure of one of the modification method of the shooting result of line sensor.
Description of reference numerals
1 droplet discharge apparatus
23 carriers
24 nozzle heads
31 line sensors
40 work stages
41 rotating mechanisms
150 control units
W workpiece
W41 is marked.
Embodiment
Hereinafter, referring to the drawings, embodiments of the present invention are illustrated.Wherein, the invention is not restricted to as shown below
Embodiment.
<1. first embodiment>
First, 1~Fig. 4 of reference picture, the structure of the droplet discharge apparatus of the first embodiment of the present invention is illustrated.
Fig. 1 is the diagrammatic side view of the outline of the structure of one of the droplet discharge apparatus for showing the first embodiment of the present invention.Fig. 2
It is the schematic plan view of Fig. 1 droplet discharge apparatus.Fig. 3 is to be placed with possessed by Fig. 1 droplet discharge apparatus in work stage
The schematic plan view of the work stage of the state of workpiece.Fig. 4 is the part A of Fig. 3 workpiece partial enlarged drawing.
In addition, following, the main scanning direction for making workpiece is X-direction, and the sub-scanning direction orthogonal with main scanning direction is Y
Direction of principal axis, the vertical direction orthogonal with X-direction and Y direction are Z-direction, and the rotation direction in direction is θ directions about the z axis.
Droplet discharge apparatus 1 as depicted in figs. 1 and 2 have extend on main scanning direction (X-direction) be used for make work
X-axis workbench 10 that part W is moved on main scanning direction, across X-axis workbench 10 are set up and on sub-scanning direction (Y direction)
A pair of Y-axis workbench 11,11 of extension.A pair of X-axis being provided with the upper surface of X-axis workbench 10 in X-direction extension are led
Rail 12,12, each X-axis guide rail 12 are provided with X-axis linear motor (not shown).It is provided with the upper surface of each Y-axis workbench 11
In the Y-axis guide rail 13 of Y direction extension, the Y-axis guide rail 13 is provided with Y-axis linear motor (not shown).
A pair of Y-axis workbench 11,11 are provided with carrier unit 20 and shooting unit 30.It is provided with X-axis workbench 10
Work stage 40.Maintenance unit is provided between a pair of Y-axis workbench 11,11 in the outside (Y-axis negative direction side) of X-axis workbench 10
50。
Carrier unit 20 be provided with Y-axis workbench 11 it is multiple, such as 10.Each carrier unit 20, which has, to be carried
Device plate 21, carrier rotating mechanism 22, carrier 23 and nozzle head 24.
Carrier plate 21 is arranged in Y-axis guide rail 13, by the Y-axis linear motor that is set in the Y-axis guide rail 13 in Y-axis side
The carrier plate 21 is moved freely upwards.Wherein, can also be moved multiple carrier plates 21 as one in the Y-axis direction.
The lower surface center of carrier plate 21 is provided with carrier rotating mechanism 22, under the carrier rotating mechanism 22
End is provided with the carrier 23 that can freely dismantle.Carrier can freely be rotated in θ directions by carrier rotating mechanism 22
23。
The lower surface of carrier 23 is provided with multiple nozzle heads 24.The quantity of nozzle head 24 is, for example, 12.
Nozzle head 24 is that nozzle face discharges nozzle (not shown) formed with multiple drops in respective lower surface, from the drop
Discharge the drop of nozzle (hereinafter referred to as discharging nozzle) discharge function liquid.
Shooting unit 30 has wired sensor 31.Line sensor 31 is configured in X-axis forward direction side relative to carrier 23.
Line sensor 31 shoots workpiece W, and specifically, shooting checks the drop for the functional liquid being discharged on workpiece W.Line passes
Sensor 31 is for example supported in the pedestal that the side of the Y-axis workbench 11 of X-axis forward direction side in a pair of Y-axis workbench 11,11 is set
32。
Line sensor 31 has multiple capturing elements (not shown), and light source (not shown) and half are provided with each capturing element
Transparent reflector (half mirror).Multiple capturing elements are arranged along sub-scanning direction, and above-mentioned capturing element is set to by one
The secondary position for shooting the sub-scanning direction that can just shoot substantially whole workpiece W.In addition, light source can also be in multiple capturing elements
Between share, but preferably blue led (Light Emitting Diode).In line sensor 31, from the light quilt half of light source outgoing
Transparent reflector reflects, and then subject thing reflects, and through half-mirror, is received by each capturing element.
When work stage 40 be directed into such line sensor 31 just below when, line sensor 31 can shoot tested
Look into the drop for the workpiece W being discharged in work stage 40.
Wherein, each capturing element of line sensor 31 and workpiece W are not parallel sometimes, i.e., each capturing element is into workpiece W
The distance in the region just below of the capturing element is non-constant on sub-scanning direction.In order in this case, also can
The reflected light from reference object is detected with each capturing element, it is saturating that each capturing element of preferred pair line sensor 31 is provided with telecentricity
Mirror.Telecentric lens both can be integral with line sensor 31, can also separate.
Work stage 40 is, for example, vacuum adsorption table, and absorption loads workpiece W.Work stage 40 is by being arranged under the work stage 40
The platform rotating mechanism 41 of face side is supported in a manner of freely being rotated on θ directions.Wherein, the X-axis negative sense side of Y-axis workbench 11
Work stage 40 top, be provided with the alignment mark of the workpiece W in work stage 40 is shot workpiece contraposition video camera
(not shown).Moreover, by platform rotating mechanism 41 based on the image correction mounting table work stage 40 by workpiece contraposition video camera shooting
On workpiece W in the position in θ directions.
Work stage 40 and platform rotating mechanism 41 are supported on the X-axis sliding part for the lower face side for being arranged on platform rotating mechanism 41
42.X-axis sliding part 42 is arranged in X-axis guide rail 12, can be in X by the X-axis linear motor being arranged in the X-axis guide rail 12
Moved freely on direction of principal axis.Moreover, work stage 40 (workpiece W) also can be in X-axis side along X-axis guide rail 12 by X-axis sliding part 42
To moving freely.
The workpiece W being positioned in work stage 40 is, for example, G8.5 glass substrates.Workpiece W is as shown in figure 3, discharge description
The discharge face of functional liquid is quadrangle, and is assigned with six effective coverage W1 as description region in middle body, and
Each side is provided with nominal region W2.Nominal region W2 refers to the region at least not having functional liquid to discharge when describing.In addition,
As shown in figure 4, the inspection that the nominal region W2 set along the side of X-direction positive side is the drop D for being examined discharge function liquid is arranged
Go out region, the position of X-direction minus side is provided with effective coverage W1 in the nominal region W2 for being used for checking discharging area.Separately
Outside, on nominal region W2 surface formed with group liquid layer.And then the θ directions for adjusting workpiece W are provided with the workpiecew
Position alignment mark W3.Wherein, dialling liquid layer can both be formed flatly, and can also be formed as the W1 of effective coverage
It is i.e. defined concavo-convex with dykes and dams.
In addition, two end regions in workpiece W nominal region W2 Y-direction are provided with scale W4.Scale W4 is regulation
What the mark W41 of size and shape was set at equal intervals along main scanning direction.Scale W4 is arranged in nominal region W2 and carried out
Near the region for checking discharge, it can both be made only near the inspection discharge direction, can also be in the big of workpiece W
Cause to be formed on whole main scanning direction.Scale W4 Application way is described below.
Return to Fig. 1 and Fig. 2 explanation.
Maintenance unit carries out the maintenance of nozzle head 24, and the discharge for eliminating the nozzle head 24 is bad.
Droplet discharge apparatus 1 more than is provided with control unit 150.Control unit 150 is, for example, computer, and there are data to protect
Deposit portion (not shown).Preserved in data saving part and for example discharge workpiece W drop for controlling and describe rule on workpiece W
Description data (bitmap data) of fixed pattern etc..In addition, control unit 150 has program storage unit (not shown).Program preserves
The program of the various processing of control droplet discharge apparatus 1 and the program of driving of control drivetrain etc. are preserved in portion.
In addition, above-mentioned data and said procedure can be recorded in for example computer-readable hard disk (HD), floppy disk (FD),
In the computer-readable storage mediums such as CD (CD), magneto-optic disk (MO), storage card, and it is installed to from the storage medium
Control unit 150.
Then, the workpiece processing carried out using the droplet discharge apparatus 1 formed as described above is illustrated.With
Under explanation in, on X-axis workbench 10, be referred to as than Y-axis workbench 11 by the region of X-axis negative sense side and move into out region A1, one
Processing region A2 is referred to as the region Y-axis workbench 11,11, it is referred to as more standby by the region of X-axis forward direction side than Y-axis workbench 11
Region A3.
First, as shown in figure 1, moving into out region A1 configuration work stages 40, drop is moved into by transport mechanism (not shown)
The workpiece W of discharger 1 is positioned in the work stage 40.Next, by the work in workpiece contraposition video camera shooting work stage 40
Part W alignment mark W3.Then, by the workpiece in image correction mounting table work stage 40 of the platform rotating mechanism 41 based on the shooting
The position in W θ directions, carry out workpiece W contraposition (step S1).
Then, by X-axis sliding part 42, as shown in figure 5, work stage 40 is moved into processing region from region A1 is moved into out
A2.In processing region A2, first, by workpiece W nominal region W2 configuration in the lower section of nozzle head 24, to nominal region W2
Describe the pattern (condition amendment pattern) of the discharge condition for correcting discharge nozzle, i.e., from all discharge nozzle check discharge work(
The drop (step S2) of energy liquid.
Then, as shown in fig. 6, work stage 40 is moved into standby region A3, the drop for being examined the functional liquid of discharge is made
Workpiece W the nominal region W2 lower sections that pass through line sensor 31.Then, by when, at least as shown in fig. 7, sensing line
Device 31 shoots the drop D of the workpiece W nominal region W2 functional liquid of examined discharge part, the portion formed with mark W41
Point and adjacent with nominal region W2 effective coverage W1 on main scanning direction a part.Thus, line sensor 31 is made
Shooting is examined the drop D and mark W41 (step S3) of the functional liquid of discharge.Shooting result is output to control unit 150.
After shooting terminates, being obtained in control unit 150 based on the one-dimensional image making from line sensor 31 is included
It is shooting image (step S4) to be examined the drop of discharge and the two dimensional image of mark.
Then, control unit 150 from acquired shooting image using the acquirement such as pattern match mark W41, captured by calculating
Length of the mark W41 on main scanning direction, based on the length, amendment shooting image (step S5).For example, as shown in figure 8,
When marking W41 bigger than the mark W41 of reality length Lo in the length L on main scanning direction (L is more than Lo), i.e. workpiece W exists
Mobile speed on main scanning direction is than setting hour, the amendment shooting figure in a manner of shooting image reduces on main scanning direction
Picture.On the other hand, although eliminating diagram, when length of the mark W41 on main scanning direction is less than actual mark W41 length
When spending (Lo ＞ L), i.e. the workpiece W calculated is existed when the translational speed on main scanning direction is more than setting with shooting image
The mode amendment shooting image amplified on main scanning direction.
In addition, when extracting multiple mark W41, can the average length based on multiple mark W41, calculate shooting image,
A mark W41, the length correction shooting image of the mark W41 based on the selection can also be selected from multiple mark W41.
In addition, control unit 150 can also be based on length computation workpiece of the mark on main scanning direction in main scanning direction
On speed, the result of calculation amendment shooting image based on the speed.
After correcting shooting image, control unit 150 is based on the revised shooting image, corrects the function from discharge nozzle
The discharge condition (step S6) of the drop of liquid.
Specifically, for example, control unit 150 is examined discharge from the shooting image of amendment using extractions such as pattern match
Drop D, calculate the face of the distance from the drop of the extraction to effective coverage W1 main scanning direction and the drop of the extraction
Product.Distance on above-mentioned main scanning direction refers to the drop D of the examined discharge for example out of shooting image center to from this
The nearest effective coverage W1 in center distance.Then, control unit 150 is based on the distance on the above-mentioned main scanning direction calculated,
Correct the discharge timing data as discharge condition.For example, when above-mentioned distance is more than setting, amendment discharge timing data,
So that discharge timing advance of the workpiece when being discharged with checking during the movement of identical direction, and when above-mentioned distance is less than setting
When, after amendment discharge timing data causes above-mentioned discharge fixed response time.Discharge timing data is substituted, can also correct and describe data sheet
Body.In addition, the result of calculation of the area of drop of the control unit 150 based on the examined discharge in shooting image, amendment is as row
Go out the discharge rate of condition.
After above-mentioned discharge condition is corrected, work stage 40 is set to be moved everywhere from standby region A3 sides by X-axis sliding part 42
Manage region A2.In processing region A2, to the lower section for being moved to nozzle head 24 workpiece W effective coverage from have modified discharge bar
The discharge nozzle discharge drop of part.And then it is moved to work stage 40 and moves into out region A1 sides so that workpiece W effective coverage
The entire surface lower section that passes through nozzle head 24.Then, workpiece W is moved back and forth in X-direction, and carrier unit 20 is existed
Suitably moved in Y direction, on the workpiecew pattern (step S7) as defined in description.Wherein, workpiece W translational speed scans
Speed check discharge when and line sensor 31 shooting when with description when be different.
After the completion of description, work stage 40 is moved to from standby region A3 and move into out region A1.Work stage 40, which is moved to, removes
When entering out region A1, the workpiece W for terminating to depict is taken out of (step S8) from droplet discharge apparatus 1.
Then, next workpiece W is moved to droplet discharge apparatus 1, and above-mentioned step S1~S8 is repeated.
As described above, in droplet discharge apparatus 1, the mark W41 of prescribed level is pre-formed on the workpiecew, is passed with line
Sensor 31 shoots the drop and mark W41 of the functional liquid from discharge nozzle check discharge.Then, the shooting based on mark W41
As a result, amendment includes the shooting image of drop, the shooting image based on amendment, the discharge condition of amendment discharge nozzle.Therefore, i.e.,
The translational speed for making workpiece W is not desired speed, being capable of the functional liquid based on the examined discharge shot by line sensor yet
Drop shooting result, suitably correct above-mentioned discharge condition.
Moreover, when the inspection that the medium to inspections such as coupons carries out the drop of functional liquid is discharged, maintenance period is short,
But in droplet discharge apparatus 1, because carrying out inspection discharge to workpiece W nominal region W2, maintenance period can be increased.
In addition, during using coupon, according to ink be functional liquid and coupon compatibility it is different, ink bleed etc. occurs sometimes,
Position and the size of the drop of land can not be made correct.But in droplet discharge apparatus 1, destination is discharged as checking
Workpiece W nominal region W2 is formed with liquid layer is dialled, so ink bleed etc. does not occur, so the black species that can be carried is more.
In addition, effective coverage W1 is located at the nominal region W2 for being used for checking discharging area by X-direction i.e. main scanning side
To minus side position, so effectively can be checked and be described.
In the example above, when shooting multiple marks with line sensor 31, based on mark on main scanning direction
Average value of length etc., amendment shooting image are overall.But the correcting mode not limited to this of shooting image, such as such as Fig. 9 institutes
Show, shooting image can also be divided into multiple region R1~R6 on main scanning direction, a mark W41 is included in each region.
Then, the length based on each mark W41 on main scanning direction, region R1~R6 of the amendment comprising mark W41 shooting figure
Picture.Now, based on the image correction for synthesizing to obtain by the shooting image corrected by each region R1~R6 from discharge nozzle
Discharge condition.
<2. second embodiment>
Next, the structure of the droplet discharge apparatus of second embodiment of the present invention is illustrated.
The droplet discharge apparatus of first embodiment is provided with the mark being made up of the mark W41 of prescribed level on the workpiecew
Spend W41.Unlike this, the droplet discharge apparatus of second embodiment, the mark by prescribed level is provided with work stage 40
The scale of composition.
Now, the mark on the drop and work stage 40 of the functional liquid for being examined discharge, base are also shot with line sensor 31
In length of the mark on main scanning direction of the shooting, amendment includes the shooting image of drop, is tied based on revised shooting
Fruit, correct the discharge condition from discharge nozzle.Thereby, it is possible to the translational speed independent of workpiece W suitably to correct discharge bar
Part.
Wherein, the mark being preferably taken together with the drop of examined discharge is independent of substrate size etc., using system
One design.Because even if substrate size, pixel resolution etc. change, identical analysis result can be also obtained.
<3. the 3rd embodiment>
In the droplet discharge apparatus of first embodiment, after correcting discharge condition, from workpiece W effective coverage W1 master
The end of scanning direction (X-direction) minus side starts to describe.
Unlike this, in the droplet discharge apparatus of the 3rd embodiment, after correcting discharge condition, from the effective of workpiece W
The end of region W1 main scanning direction (X-direction) positive side starts to describe.
Therefore, in the droplet discharge apparatus of the 3rd embodiment, after correcting discharge condition, before description is started, work is made
Part W is moved to processing region A2 from standby region A3.
In the droplet discharge apparatus of the 3rd embodiment, as the droplet discharge apparatus of first embodiment,
Make inspection discharge after workpiece W from during processing region A2 is moved to standby region A3, be detected by line sensor 31
Look into the shooting of the drop and above-mentioned mark W41 of the functional liquid of discharge.Moreover, in the droplet discharge apparatus of the 3rd embodiment,
It is different from the droplet discharge apparatus of first embodiment, workpiece W is moved to treatment region from standby region A3 before starting to describe
Also same shooting is carried out during the A2 of domain.In other words, in the droplet discharge apparatus of the 3rd embodiment, workpiece W from
The pros that discharge nozzle goes to line sensor 31 move up period and workpiece W in opposite direction (the following letter opposite with positive direction
Be designated as opposite direction) it is mobile during, each shooting for carrying out primary line sensor 31.
Then, in the droplet discharge apparatus of the 3rd embodiment, based on making marks of the workpiece W when positive direction moves
The shooting result of W41 shooting result and the mark W41 when opposite direction moves, correct make workpiece W when positive direction moves
Shooting image comprising drop and the identical shooting image when opposite direction moves.
For example, based on the mark W41 when positive direction moves in the length on main scanning direction and when being moved in opposite direction
Length of the mark W41 on main scanning direction average value, correct shooting image when positive direction moves and in opposite direction
Both shooting images when mobile.Alternatively it is possible to based on the mark W41 when positive direction moves on main scanning direction
Shooting image of the length correction when positive direction moves, and based on the mark W41 when opposite direction moves in main scanning side
Shooting image of the upward length correction when opposite direction moves.
In the droplet discharge apparatus of the 3rd embodiment, based on the revised shooting image when positive direction moves and
Shooting image when opposite direction moves, correct the discharge condition from discharge nozzle.
Thereby, it is possible to more accurately correct discharge condition.
In addition, discharge image of the trend when positive direction moves that offsets when the position of drop and when opposite direction moves
Not it is also possible to stop to describe in shooting image, by maintenance unit 50 discharge the maintenance of nozzle.
<4. first and the 3rd embodiment variation>
In the above description, in the first embodiment, only workpiece W is made to enter line sensing during positive direction moves
The above-mentioned shooting of device 31, it shoots number as once.In addition, in the third embodiment, the phase is moved in positive direction making workpiece W
Between and each above-mentioned shooting for carrying out primary line sensor 31 during opposite direction moves.Shooting above-mentioned in the first embodiment
Number can also be multiple, and in the third embodiment, it can also enter respectively when positive direction moves and when opposite direction moves
The multiple above-mentioned shooting of row.
<5. the 4th embodiment>
In the droplet discharge apparatus of first embodiment, the number of the inspection discharge of the drop of functional liquid for once, but
In the droplet discharge apparatus of the 4th embodiment, after checking discharge for the first time, it is to check that drain position is different for the first time
Position carries out second and checks discharge.Second of inspection discharge both can be to be shot to check discharge for the first time by line sensor 31
Before drop or afterwards.
In addition, in the droplet discharge apparatus of the 4th embodiment, together with the mark W41 on workpiece W, by line sensor
31 second of the shooting drops for checking discharge.Wherein it is possible to shoot the drop for checking discharge for the first time simultaneously by line sensor 31
With second of drop for checking discharge.
Then, in the droplet discharge apparatus of the 4th embodiment, based on mark W41 shooting result, modified line sensing
The shooting image of device 31, discharge condition of the shooting image amendment based on amendment from discharge nozzle.
Thereby, it is possible to more accurately correct discharge condition.
Wherein, the number for checking discharge can be more than 3 times.
The droplet discharge apparatus formed as described above can be applied to as described in Japanese Unexamined Patent Publication 2016-77966 publications
Formation Organic Light Emitting Diode organic EL layer base plate processing system.Specifically, can be by above-mentioned arbitrary embodiment party
The droplet discharge apparatus of formula is applied to the applying device of the base plate processing system.
The present invention is useful to the technology that functional liquid is applied on substrate.
Claims (10)
1. a kind of droplet discharge apparatus, it is used to make the work stage for being equipped with workpiece discharge nozzle in main scanning side relative to drop
Move up, the drop of functional liquid is discharged on the workpiece from drop discharge nozzle and described, the drop row
Go out device to be characterised by, including：
The line sensor of capturing element is arranged with the direction vertical with the main scanning direction；With
The control unit being controlled to drop discharge nozzle, the work stage and the line sensor,
The mark of prescribed level is pre-formed with the work stage or the workpiece,
The control unit to discharge inspection of the nozzle to the workpiece progress drop in the work stage from the drop
Look into discharge,
Make the shooting of the drop and the mark of the examined discharge on the line sensor progress workpiece,
Length based on the captured mark on the main scanning direction, corrects the shooting result of the drop, is based on
Discharge condition of the shooting result amendment of the revised drop from drop discharge nozzle.
2. droplet discharge apparatus as claimed in claim 1, it is characterised in that
Configure the drop discharge nozzle, the line sensor successively from the minus side of the main scanning direction,
The control unit it is described mark from the drop discharge positive side from nozzle to the main scanning direction movement during and institute
During the minus side movement for stating main scanning direction described in positive side of the mark from the main scanning direction, at least respectively once utilized
The shooting that line sensor is carried out.
3. droplet discharge apparatus as claimed in claim 1 or 2, it is characterised in that
Telecentric lens is provided with to the capturing element of the line sensor.
4. such as droplet discharge apparatus according to any one of claims 1 to 3, it is characterised in that
The control unit carries out repeatedly inspection discharge of the drop from drop discharge nozzle.
5. such as droplet discharge apparatus according to any one of claims 1 to 4, it is characterised in that
The discharge face for being discharged the drop of the workpiece is quadrangle,
In the discharge face, the inspection discharge of the progress drop is provided with along the side of the positive side of the main scanning direction
Discharging area is checked, position of the inspection discharging area by the minus side of the main scanning direction is being provided with description region.
6. a kind of drop discharge method of droplet discharge apparatus, wherein, the droplet discharge apparatus is used to make to be equipped with workpiece
Work stage moves relative to drop discharge nozzle on main scanning direction, is arranged from drop discharge nozzle by the drop of functional liquid
Going out to being described on the workpiece, the drop discharge method is characterised by, including：
Step is discharged in the inspection that the inspection discharge that nozzle carries out drop to the workpiece in the work stage is discharged from the drop
Suddenly,
By being arranged with the line sensor of capturing element in the direction vertical with the main scanning direction, the quilt on the workpiece is carried out
The shooting of the shooting of the drop for checking discharge and the mark for being set in advance in the work stage or the prescribed level on the workpiece
Step,
Length based on the captured mark on the main scanning direction, corrects the shooting of the shooting result of the drop
Modified result step；With
The discharge bar of discharge condition of the shooting result amendment based on the revised drop from drop discharge nozzle
Part amendment step.
7. drop discharge method as claimed in claim 6, it is characterised in that
Configure the drop discharge nozzle, the line sensor successively from the minus side of the main scanning direction,
In the shooting step, discharge nozzle from the drop in the mark and move the phase to the positive side of the main scanning direction
Between and the positive side of the mark from the main scanning direction described in main scanning direction minus side movement during, it is at least each to carry out one
The secondary shooting carried out using line sensor.
8. drop discharge method as claimed in claims 6 or 7, it is characterised in that
Telecentric lens is provided with to the capturing element of the line sensor.
9. the drop discharge method as any one of claim 6~8, it is characterised in that
In the inspection discharge step, the inspection for carrying out repeatedly the drop from drop discharge nozzle is discharged.
10. the drop discharge method as any one of claim 6~9, it is characterised in that
The discharge face for being discharged the drop of the workpiece is quadrangle,
In the discharge face, the inspection discharge of the progress drop is provided with along the side of the positive side of the main scanning direction
Discharging area is checked, position of the inspection discharging area by the minus side of the main scanning direction is being provided with description region,
In the inspection discharge step, the inspection for carrying out the drop to the inspection discharging area is discharged.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-162041 | 2016-08-22 | ||
| JP2016162041A JP6695237B2 (en) | 2016-08-22 | 2016-08-22 | Droplet ejection device and droplet ejection condition correction method |
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| Publication Number | Publication Date |
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| CN107768278A true CN107768278A (en) | 2018-03-06 |
| CN107768278B CN107768278B (en) | 2021-07-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710723809.0A Active CN107768278B (en) | 2016-08-22 | 2017-08-22 | Droplet discharge device and droplet discharge condition correction method |
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| Country | Link |
|---|---|
| JP (1) | JP6695237B2 (en) |
| KR (1) | KR101986894B1 (en) |
| CN (1) | CN107768278B (en) |
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| CN112097674A (en) * | 2019-06-17 | 2020-12-18 | 三星显示有限公司 | Ink droplet volume measuring device and thin film layer forming device |
| CN112693229A (en) * | 2019-10-23 | 2021-04-23 | 细美事有限公司 | Droplet inspection module and droplet inspection method |
| CN113856929A (en) * | 2020-06-30 | 2021-12-31 | 查目科技股份有限公司 | Repairing device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7119417B2 (en) | 2018-02-22 | 2022-08-17 | Ａｇｃ株式会社 | translucent structure |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101986894B1 (en) | 2019-06-07 |
| JP2018030054A (en) | 2018-03-01 |
| KR20180021647A (en) | 2018-03-05 |
| CN107768278B (en) | 2021-07-20 |
| JP6695237B2 (en) | 2020-05-20 |
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