CN107740045A - A kind of nickel base superalloy processing coated cutting tool and preparation method thereof - Google Patents
A kind of nickel base superalloy processing coated cutting tool and preparation method thereof Download PDFInfo
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- CN107740045A CN107740045A CN201710934992.9A CN201710934992A CN107740045A CN 107740045 A CN107740045 A CN 107740045A CN 201710934992 A CN201710934992 A CN 201710934992A CN 107740045 A CN107740045 A CN 107740045A
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- layers
- coated cutting
- cutting tool
- nickel base
- base superalloy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/141—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness
- B23B27/145—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness characterised by having a special shape
- B23B27/146—Means to improve the adhesion between the substrate and the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
Abstract
The present invention provides a kind of nickel base superalloy processing coated cutting tool and preparation method thereof.Coated cutting tool provided by the invention is set on tool matrix surface includes Ti base layers,The composite coating of TiN transition zones and nanometer composite layer,Wherein nanometer composite layer is included in the TiCrSiAlN layers and TiCrSiAlYN layers that TiN transition layer surfaces are arranged alternately successively,The doping of Si elements makes coating keep the grainiess refined,The addition of Y element is segregated on crystal boundary,Prevent crystal grain growing up in high temperature,Each interlayer extension symbiosis is tightly combined,Not only there is high rigidity and low-friction coefficient,And less crystallinity and workpiece adhesiveness are still kept in high temperature,Cutter life is greatly improved,During to GH4133 nickel base superalloy high-speed cuttings,Cutting speed 150m/min,Cutting depth 0.5mm,Under conditions of amount of feeding 0.25mm/r,Length of cut is up to 280m.
Description
Technical field
The present invention relates to coated cutting tool technical field, more particularly to a kind of nickel base superalloy processing coated cutting tool and its
Preparation method.
Background technology
High temperature alloy is due to operating temperature height, tissue stabilization, few, the anti-oxidant and excellent thermal corrosion resistance of harmful phase etc.
Advantage, have become indispensable material in modern aerospace industry.Especially nickel base superalloy, by solid solution, when
The methods of effect, strengthens, and can obtain comparatively ideal intensity and creep-resistant property, tissue stabilization, has good elevated temperature strength, heat steady
Qualitative and thermal fatigue resistance, thus turbine disk being widely used in manufacture rocket, aero-engine, jet engine etc.
High-temperature component.
But nickel base superalloy has the characteristics of thermal conductivity factor is small, it is very poor that this results in its machinability, machining
When cutting temperature is high, cutter stress is big, processing hardening is serious, tool wear is serious, machining efficiency is very low.Nickel-base high-temperature closes
The increasingly extensive application of gold and the contradiction of machinability difference are more and more prominent.
Coated cutting tool has turned into the mark of modern cutting tools, and the use ratio in cutter is more than 50%.TiAlN、
CrN, TiAlCrN are the hard coat new materials developed in recent years, wherein, the application of TiAlCrN new coating cutters causes
Hard alloy cutter can be used in cutting nickel base superalloy.TiAlCrN is a kind of gradient structure coating, not only with high tough
Property and hardness, and friction factor is also smaller, and suitable for a variety of cutters such as milling cutter, hobboing cutter, screw tap, cutting ability is substantially better than it
His several coatings.But TiAlCrN coated cutting tools are still had under hot conditions during nickel base superalloy High-speed machining
Grain coarsening, hardness reduce and adhere to a series of problem with workpiece, cause cutting-tool's used life relatively low.
The content of the invention
It is an object of the invention to provide a kind of nickel base superalloy processing coated cutting tool and preparation method thereof.The present invention
Coated cutting tool coating structure and hardness stabilization are used in the nickel base superalloy processing of offer, can keep less crystallization at high temperature
Degree and workpiece adhesiveness, the service life of coated cutting tool are high.
The invention provides a kind of nickel base superalloy processing coated cutting tool, including tool matrix and it is arranged at the knife
Have matrix surface coating, the coating include outwards set gradually from tool matrix surface Ti base layers, TiN transition zones and
Nanometer composite layer, the nanometer composite layer be included in the TiCrSiAlN layers that TiN transition layer surfaces are alternately arranged successively and
TiCrSiAlYN layers.
Preferably, the thickness of every layer of TiCrSiAlYN layer and TiCrSiAlN layers is separately 20~40nm.
Preferably, the TiCrSiAlYN layers press atomic percentage, including：25~32at.% of titanium, chromium 18~
30~40at.% of 21at.%, 3~8at.% of silicon, 10~14at.% of aluminium, 3~6at.% of yttrium and nitrogen.
Preferably, the TiCrSiAlN layers press atomic percentage, including：30~38at.% of titanium, chromium 15~
19at.%, 5~8at.% of silicon；31~40at.% of 10~15at.% of aluminium and nitrogen.
Preferably, the thickness of the nanometer composite layer is 2~5 μm.
Preferably, the grain size of the nanometer composite layer is 5~18nm.
Preferably, the thickness of the Ti base layers is 20~80nm.
Preferably, the thickness of the TiN transition zones is 50~300nm.
Preferably, the material of the tool matrix is hard alloy or high-speed steel.
The invention provides a kind of preparation method of nickel base superalloy processing coated cutting tool described in above-mentioned technical proposal,
Comprise the following steps：
(1) Ti base layers and TiN transition zones are sequentially depositing on tool matrix surface；
(2) alternating deposit TiCrSiAlN layers and the TiCrSiAlYN successively of the TiN transition layer surface in the step (1)
Layer, obtains nickel base superalloy processing coated cutting tool.
Nickel base superalloy processing coated cutting tool provided by the invention, including tool matrix and it is arranged at the cutter base
The coating in body surface face, the coating include Ti base layers, TiN transition zones and the nanometer outwards set gradually from tool matrix surface
Composite bed, the nanometer composite layer are included in the TiCrSiAlN layers and TiCrSiAlYN that TiN transition layer surfaces are alternately arranged successively
Layer.Coated cutting tool provided by the invention is set on tool matrix surface includes Ti base layers, TiN transition zones and nanometer composite layer
Composite coating, wherein nanometer composite layer be included in the TiCrSiAlN layers that TiN transition layer surfaces are arranged alternately successively and
TiCrSiAlYN layers, in nanometer composite layer the doping of Si elements coating is kept the grainiess of refinement, while the addition of Y element
It is segregated on crystal boundary, prevents crystal grain growing up in high temperature, and each interlayer extension symbiosis, be tightly combined, not only there is height
Hardness and low-friction coefficient, and less crystallinity and workpiece adhesiveness are still kept in high temperature, cutter life obtains
Increase substantially.Test result indicates that the coating hardness of nickel base superalloy processing coated cutting tool provided by the invention is reachable
26GPa, coefficient of friction as little as 0.15, during to GH4133 nickel base superalloy high-speed cuttings, cutting speed v=150m/min, cut
Cut depth ap=0.5mm, under conditions of amount of feeding f=0.25mm/r, length of cut is and of the prior art up to 280m
AlTiN coating length of cut 12m, AlCrN coating lengths of cut 42m is compared, and cutter life is greatly improved.
Brief description of the drawings
Fig. 1 is nickel base superalloy processing coated cutting tool structural representation of the present invention；Wherein, (1) is tool matrix,
(2) it is Ti base layers, (3) are TiN transition zones, and (4) are nanometer composite layer, and (5) are TiCrSiAlN layers, and (6) are TiCrSiAlYN
Layer；
Fig. 2 is the XRD spectrum of the nanometer composite layer of nickel base superalloy processing coated cutting tool in the embodiment of the present invention 1；
Fig. 3 is that the high-resolution of the nanometer composite layer of nickel base superalloy processing coated cutting tool in the embodiment of the present invention 2 is saturating
Penetrate electron microscope.
Embodiment
The invention provides a kind of nickel base superalloy processing coated cutting tool, as shown in figure 1, provided by the invention Ni-based
High temperature alloy processing coated cutting tool includes tool matrix (1) and is arranged at the coating on the tool matrix surface, the coating
It is described including the Ti base layers (2), TiN transition zones (3) and nanometer composite layer (4) outwards set gradually from tool matrix surface
Nanometer composite layer is included in the TiCrSiAlN layers (5) and TiCrSiAlYN layers (6) that TiN transition layer surfaces are alternately arranged successively.
Nickel base superalloy processing provided by the invention includes tool matrix with coated cutting tool.In the present invention, the knife
The material for having matrix is preferably hard alloy or high-speed steel, more preferably hard alloy.The present invention is to the hard alloy or height
The composition of fast steel does not have special restriction, using the hard alloy or high speed well known to those skilled in the art for machining
Steel.The present invention does not have special restriction to the shape and size of the tool matrix, carries out selecting i.e. according to requirements
Can.
Nickel base superalloy processing coated cutting tool provided by the invention includes being arranged at the painting on the tool matrix surface
Layer, the coating include Ti base layers, TiN transition zones and the nanometer composite layer outwards set gradually from tool matrix surface.
In the present invention, the thickness of the Ti base layers is preferably 20~80nm, more preferably 40~70nm, most preferably 50~60nm.
In the present invention, the Ti base layers can improve the adhesion of Bulk coat.
In the present invention, the thickness of the TiN transition zones is preferably 50~300nm, and more preferably 100~250nm is optimal
Elect 150~200nm as.In the present invention, the TiN transition zones can realize the structural transition of coating, reduce Bulk coat
Internal stress.
In the present invention, the nanometer composite layer is included in the TiCrSiAlYN that TiN transition layer surfaces are alternately arranged successively
Layer and TiCrSiAlN layers.In the present invention, the thickness of every layer of TiCrSiAlYN layer and TiCrSiAlN layers is distinguished preferably independently
For 20~40nm, more preferably 25~35nm, most preferably 30nm.
In the present invention, the TiCrSiAlYN layers press atomic percentage, preferably include：25~32at.% of titanium, chromium 18
30~40at.% of~21at.%, 3~8at.% of silicon, 10~14at.% of aluminium, 3~6at.% of yttrium and nitrogen, more preferably includes：Titanium
28~30at.%, 19~20at.% of chromium, 5~6at.% of silicon, 11~13at.% of aluminium, 4~5at.% of yttrium and nitrogen 33~
37at.%.In the present invention, the TiCrSiAlYN layers preferably include to be distributed in Si3Nanocrystalline TiN on N and AlN matrixes and
CrN, and the Y element being segregated on crystal boundary.
In the present invention, the TiCrSiAlN layers press atomic percentage, preferably include：30~38at.% of titanium, chromium 15
~19at.%, 5~8at.% of silicon；31~40at.% of 10~15at.% of aluminium and nitrogen, more preferably includes：33~36at.% of titanium,
16~18at.% of chromium, 6~7at.% of silicon；34~38at.% of 12~13at.% of aluminium and nitrogen.In the present invention, it is described
TiCrSiAlN layers preferably include to be distributed in Si3Nanocrystalline TiN and CrN on N and AlN matrixes.
In the present invention, the TiCrSiAlN layers and TiCrSiAlYN layers are alternately arranged, alternating cyclical arrangement
TiCrSiAlN layers and TiCrSiAlYN layers can reduce the stress of coating, increase the crystal plane structure and crystal boundary of coating, so as in height
Promote the quick diffusion of metallic element in speed processing, promote quickly generating for oxide；Meanwhile the doping of Si elements protects coating
The grainiess of refinement is held, the addition of Y element is segregated on crystal boundary, is prevented crystal grain growing up in high temperature, is made coating not only
With high rigidity and low-friction coefficient, and less crystallinity and workpiece adhesiveness are still kept in high temperature.
In the present invention, the thickness of the nanometer composite layer is preferably 2~5 μm, more preferably 3~4 μm.In the present invention
In, the grain size of the nanometer composite layer is preferably 5~18nm, more preferably 8~15nm, most preferably 10~12nm.At this
In invention, the nanometer composite layer preferably includes TiCrSiAlYN and TiCrSiAlN nano particles, the particle diameter of the nano particle
Preferably below 20nm, more preferably 5~15nm, most preferably 8~12nm.In the present invention, the heat of the nanometer composite layer
Stability is preferably more than 1000 DEG C, more preferably 1200~1500 DEG C.
Present invention also offers the preparation method of nickel base superalloy processing coated cutting tool described in above-mentioned technical proposal, bag
Include following steps：
(1) Ti base layers and TiN transition zones are sequentially depositing on tool matrix surface；
(2) alternating deposit TiCrSiAlN layers and the TiCrSiAlYN successively of the TiN transition layer surface in the step (1)
Layer, obtains nickel base superalloy processing coated cutting tool.
The present invention is sequentially depositing Ti base layers and TiN transition zones on tool matrix surface.In the present invention, the Ti matrixes
The deposition of layer and TiN transition zones is preferably physical vapour deposition (PVD), and more preferably multi-arc ion coating deposits.The present invention is to the Ti bases
The no special restriction of operation of the multi-arc ion coating of body layer and TiN transition zones deposition, use are well known to those skilled in the art
The technical scheme of multi-arc ion coating deposition.
The present invention does not have special restriction to the source of the tool matrix, using commercially available prod or according to art technology
It is prepared by the technical scheme that tool matrix is prepared known to personnel.
The tool matrix is pre-processed successively preferably before depositing Ti base layer by the present invention and sputter clean.This hair
The bright no special restriction of operation to the pretreatment, the technical scheme using pretreatment well known to those skilled in the art are
Can.In the present invention, the pretreatment preferably includes washing and dried successively.In the present invention, the washing is preferably included in
It is ultrasonic successively in acetone and absolute ethyl alcohol；The ultrasonic time is preferably independently 10~20min in the acetone and absolute ethyl alcohol,
More preferably 15min.In the present invention, the drying is preferably clean compressed air drying.
In the present invention, the parameter of the sputter clean is preferably：Tool matrix and target 15~50mm of spacing, tool matrix
3~8rpm of rotating speed, 400~500 DEG C of sputter temperature, sputter gas argon gas, sputter gas 1.0~2.0Pa of pressure, bias 800~
1200V, 5~10min of sputter clean time, more preferably：Tool matrix and target 30~40mm of spacing, tool matrix rotating speed 5~
6rpm, 440~460 DEG C of sputter temperature, sputter gas argon gas, sputter gas 1.04~1.6Pa of pressure, 900~1100V is biased,
6~8min of sputter clean time.In the present invention, the sputter clean can improve the knot between tool matrix and Ti base layers
Conjunction ability.
The present invention directly opens Ti targets, and adjust each parameter to Ti base layers preferably after the completion of the sputter clean
The parameter of multi-arc ion coating deposition carries out the deposition of Ti base layers.In the present invention, the multi-arc ion coating of the Ti base layers sinks
Long-pending parameter is preferably：Tool matrix and target 15~50mm of spacing, tool matrix 3~8rpm of rotating speed, sputter temperature 400~500
DEG C, target is Ti targets, sputter gas argon gas, sputter gas 1.2~1.8Pa of pressure, biases 300~500V, 30~80A of electric current,
5~10min of sedimentation time, more preferably：Tool matrix and target 30~40mm of spacing, tool matrix 5~6rpm of rotating speed, sputtering temperature
440~460 DEG C of degree, target are Ti targets, sputter gas argon gas, sputter gas 1.4~1.6Pa of pressure, bias 350~450V, electricity
40~70A, 6~9min of sedimentation time are flowed, is most preferably：Tool matrix and target 32~38mm of spacing, tool matrix rotating speed
5.5rpm, 450 DEG C of sputter temperature, target are Ti targets, sputter gas argon gas, sputter gas pressure 1.5Pa, bias 400V, electric current
50~60A, 7~8min of sedimentation time.
The present invention preferably after the completion of the multi-arc ion coating deposition of the Ti base layers, directly adjusts each parameter to TiN mistakes
The parameter for crossing the multi-arc ion coating deposition of layer carries out the deposition of TiN transition zones.In the present invention, the multi sphere of the TiN transition zones
The parameter of ion-plating deposition is preferably：Tool matrix and target 15~50mm of spacing, tool matrix 3~8rpm of rotating speed, sputter temperature
400~500 DEG C, target is Ti targets, sputter gas argon gas, sputter gas 1.0~1.8Pa of pressure, reacting gas nitrogen, reaction gas
Body 2.0~3.0Pa of pressure, 120~180V, 50~80A of electric current, 5~12min of sedimentation time are biased, more preferably：Tool matrix
It is Ti targets with target 30~40mm of spacing, tool matrix 5~6rpm of rotating speed, 440~460 DEG C of sputter temperature, target, sputter gas argon
Gas, sputter gas 1.2~1.6Pa of pressure, reacting gas nitrogen, 2.2~2.8Pa of reaction gas pressure, 140~160V is biased,
60~70A of electric current, 6~10min of sedimentation time, it is most preferably：Tool matrix and target 32~38mm of spacing, tool matrix rotating speed
5.5rpm, 450 DEG C of sputter temperature, target are Ti targets, sputter gas argon gas, sputter gas pressure 1.4Pa, reacting gas nitrogen,
Reaction gas pressure 2.4Pa, bias 150V, electric current 65A, sedimentation time 8min.
After obtaining TiN transition zones, the present invention in the TiN transition layer surface successively alternating deposit TiCrSiAlN layers and
TiCrSiAlYN layers, obtain nickel base superalloy processing coated cutting tool.In the present invention, the TiCrSiAlYN layers and
The deposition of TiCrSiAlN layers is preferably physical vapour deposition (PVD), and more preferably multi-arc ion coating deposits.
The present invention closes Ti targets preferably after the completion of the deposition of TiN transition zones, opens TiAlCrSi targets, and parameter is adjusted
The whole multi-arc ion coating deposition parameter to TiCrSiAlN layers is deposited, and then turns off TiAlCrSi targets, is opened
TiAlCrSiY targets are simultaneously deposited the multi-arc ion coating deposition parameter of parameter adjustment to TiCrSiAlYN layers, alternately open and
TiAlCrSi targets and TiAlCrSiY targets are closed, deposits and completes to nanometer composite layer.
In the present invention, the multi-arc ion coating deposition parameter of the TiCrSiAlN layers is preferably：Tool matrix and target spacing
15~50mm, tool matrix 3~8rpm of rotating speed, 400~500 DEG C of sputter temperature, target are TiAlCrSi targets, sputter gas argon
Gas, sputter gas 1.0~1.8Pa of pressure, reacting gas nitrogen, 2.0~3.0Pa of reaction gas pressure, bias 80~120V, electricity
50~80A, 10~25min of sedimentation time are flowed, more preferably：Tool matrix and target 20~40mm of spacing, tool matrix rotating speed 4~
7rpm, 440~460 DEG C of sputter temperature, target are TiAlCrSi targets, sputter gas argon gas, sputter gas 1.2~1.6Pa of pressure,
Reacting gas nitrogen, 2.2~2.8Pa of reaction gas pressure, bias 90~110V, 60~70A of electric current, sedimentation time 15~
20min, it is most preferably：Tool matrix and target spacing 30mm, tool matrix rotating speed 5rpm, 440~460 DEG C of sputter temperature, target
For TiAlCrSi targets, sputter gas argon gas, sputter gas pressure 1.4Pa, reacting gas nitrogen, reaction gas pressure 2.5Pa, partially
Press 100V, electric current 65A, sedimentation time 17min.
In the present invention, the multi-arc ion coating deposition parameter of the TiCrSiAlYN layers is preferably：Between tool matrix and target
Away from 15~50mm, tool matrix 3~8rpm of rotating speed, 400~500 DEG C of sputter temperature, target is TiAlCrSiY targets, sputter gas
Argon gas, sputter gas 1.0~1.8Pa of pressure, reacting gas nitrogen, 2.0~3.0Pa of reaction gas pressure, 80~120V is biased,
60~80A of electric current, 10~25min of sedimentation time, more preferably：Tool matrix and target 20~40mm of spacing, tool matrix rotating speed 4
~7rpm, 440~460 DEG C of sputter temperature, target are TiAlCrSiY targets, sputter gas argon gas, sputter gas pressure 1.2~
1.6Pa, reacting gas nitrogen, 2.2~2.8Pa of reaction gas pressure, bias 90~110V, 65~75A of electric current, sedimentation time 15
~20min, it is most preferably：Tool matrix and target spacing 30mm, tool matrix rotating speed 5rpm, 440~460 DEG C of sputter temperature, target
Material is TiAlCrSiY targets, sputter gas argon gas, sputter gas pressure 1.4Pa, reacting gas nitrogen, reaction gas pressure
2.5Pa, bias 100V, electric current 70A, sedimentation time 17min.
The product of the deposition is cooled down preferably after the completion of the deposition of nanometer composite layer, obtains nickel-base high-temperature by the present invention
Alloy processing coated cutting tool.In the present invention, the cooling is preferably carried out in the atmosphere of deposition.In the present invention, it is described
Cooling outlet temperature of the product of deposition in the atmosphere of deposition is preferably less than 150 DEG C, more preferably less than 100 DEG C.
In order to further illustrate the present invention, nickel base superalloy processing provided by the invention is applied with reference to embodiment
Layer cutter and preparation method thereof is described in detail, but they can not be interpreted as into limiting the scope of the present invention.
Embodiment 1:
By hard alloy cutter matrix using acetone and absolute ethyl alcohol in each ultrasonic 10min of ultrasonic cleaner, then with doing
Dry clean compressed air drying.
Pretreated matrix is uniformly fixed on support, with target spacing 20mm, loaded in vacuum chamber, work support turns
Speed is 5rpm.
Base vacuum is taken out to 5 × 10-3Pa is simultaneously heated to 500 DEG C, is passed through Ar gas and make it that chamber pressure is 1.0Pa, and adjustment is inclined
Press and carry out sputter clean 5min for 800V.
Ti multi sphere targets are then turned on, adjustment Ar air pressure is maintained at 1.2Pa, and bias is reduced to 300V, and electric current is adjusted to
30A, depositing Ti base layer 10min.
Then being passed through nitrogen makes pressure be 2.0Pa, and wherein Ar partial pressures are 1.0Pa, and bias keeps 120V, electric current 80A, sinks
Product TiN transition zones 12min.
It is passed through nitrogen and argon gas, pressure control opens TiAlCrSi targets in 2.0Pa, and regulation arc current is 50A, biases and is
80V, nanometer composite layer 10min is prepared, be then shut off TiAlCrSi targets, and open TiAlCrSiY targets, regulation electric current is 60A, pressure
Strong and bias keeps constant, prepares nanometer composite layer 10min.
TiAlCrSi targets and TiAlCrSiY targets are so alternately opened and closed to prepare the resistance to height that gross thickness is 2.8 μm
Warm multi-layer nano composite Ti AlCrSiYN/TiAlCrSiN coatings.
Treat that chamber drops to 150 DEG C after preparation, open fire door and drop to normal temperature taking-up.
Fig. 2 is the XRD spectrum of nano-composite coating in nickel base superalloy processing coated cutting tool prepared by the present invention, can
With the composite construction of the apparent diffraction maximum and nano-crystalline and amorphous of seeing TiN.
Testing coating atomic percent proportioning is as follows：
Titanium chromium-silicon-aluminium yttrium nitrogen layer：Titanium 25at.%, chromium 19at.%, silicon 6at.%, aluminium 12at.%, yttrium 4at.%, nitrogen
34at.%.
Titanium chromium-silicon-aluminium nitrogen layer：Titanium 30at.%, chromium 17at.%, silicon 6at.%；Aluminium 12at.%, nitrogen 35at.%.
Coated cutting tool floating coat hardness 25GPa prepared by the present invention, coefficient of friction 0.18.
Carbide alloy coating cutter manufactured in the present embodiment is carried out to the experiment of high-speed cutting nickel base superalloy, cutting
Workpiece material is nickel base superalloy GH4133, and alloy Cutting parameters are：Cutting speed v=150m/min, cutting depth ap=
0.5mm, amount of feeding f=0.25mm/r, length of cut 200m, and AlTiN coatings length of cut 12m of the prior art,
AlCrN coating length of cut 42m, cutter life increase substantially.
Embodiment 2:
By hard alloy cutter matrix using acetone and absolute ethyl alcohol in each ultrasonic 15min of ultrasonic cleaner, then with doing
Dry clean compressed air drying.
Pretreated matrix is uniformly fixed on support, with target spacing 30mm, loaded in vacuum chamber, work support turns
Speed is 5rpm.
Base vacuum is taken out to 3 × 10-3Pa is simultaneously heated to 400 DEG C, is passed through Ar gas and make it that chamber pressure is 1.0Pa, and adjustment is inclined
Press and carry out sputter clean 5min for 800V.
Ti multi sphere targets are then turned on, adjustment Ar air pressure is maintained at 1.2Pa, and bias is reduced to 300V, and electric current is adjusted to
60A, depositing Ti base layer 10min.
Then being passed through nitrogen makes pressure be 2.0Pa, and wherein Ar partial pressures are 1.2Pa, and bias keeps 120V, electric current 70A, sinks
Product TiN transition zones 12min.
It is passed through nitrogen and argon gas, pressure control opens TiAlCrSi targets in 2.0Pa, and regulation arc current is 60A, biases and is
80V, nanometer composite layer 10min is prepared, be then shut off TiAlCrSi targets, and open TiAlCrSiY targets, regulation electric current is 70A, pressure
Strong and bias keeps constant, prepares nanometer composite layer 10min.
TiAlCrSi targets and TiAlCrSiY targets are so alternately opened and closed to prepare the resistance to height that gross thickness is 3 microns
Warm multi-layer nano composite Ti AlCrSiYN/TiAlCrSiN coatings.
Treat that chamber drops to 150 DEG C after preparation, open fire door and drop to normal temperature taking-up.
Coating atoms percentage proportioning manufactured in the present embodiment is as follows：
Titanium chromium-silicon-aluminium yttrium nitrogen layer：Titanium 30at.%, chromium 20at.%, silicon 6at.%, aluminium 10at.%, yttrium 4at.%, nitrogen
30at.%, micro-structural as shown in Figure 3 a, including are distributed in Si3Nanocrystalline TiN and CrN on N and AlN matrixes, and be segregated in
Y element on crystal boundary.
Titanium chromium-silicon-aluminium nitrogen layer：Titanium 32at.%, chromium 17at.%, silicon 5at.%；Aluminium 12at.%, nitrogen 34at.%, micro-structural
As shown in Figure 3 b, including it is distributed in Si3Nanocrystalline TiN and CrN on N and AlN matrixes.
Coated cutting tool floating coat hardness 26GPa prepared by the present invention, coefficient of friction 0.20.
Carbide alloy coating cutter manufactured in the present embodiment is carried out to the experiment of high-speed cutting nickel base superalloy, cutting
Workpiece material is nickel base superalloy GH4133, and alloy Cutting parameters are：Cutting speed v=150m/min, cutting depth ap=
0.5mm, amount of feeding f=0.25mm/r, length of cut 250m, the cutter life prepared using this technology are increased substantially.
Embodiment 3:
By hard alloy cutter matrix using acetone and absolute ethyl alcohol in each ultrasonic 10min of ultrasonic cleaner, then with doing
Dry clean compressed air drying.
Pretreated matrix is uniformly fixed on support, spacing 20mm, loaded in vacuum chamber, work support rotating speed is
5rpm。
Base vacuum is taken out to 5 × 10-3Pa is simultaneously heated to 500 DEG C, is passed through Ar gas and make it that chamber pressure is 1.0Pa, and adjustment is inclined
Press and carry out sputter clean 5min for 800V.
Ti multi sphere targets are then turned on, adjustment Ar air pressure is maintained at 1.2Pa, and bias is reduced to 300V, and electric current is adjusted to
30A, depositing Ti base layer 10min.
Then being passed through nitrogen makes pressure be 2.0Pa, and wherein Ar partial pressures are 1.0Pa, and bias keeps 120V, electric current 80A, sinks
Product TiN transition zones 12min.
It is passed through nitrogen and argon gas, pressure control opens TiAlCrSi targets in 2.0Pa, and regulation arc current is 50A, biases and is
65V, nanometer composite layer 10min is prepared, be then shut off TiAlCrSi targets, and open TiAlCrSiY targets, regulation electric current is 65A, pressure
Strong and bias keeps constant, prepares nanometer composite layer 15min.
TiAlCrSi targets and TiAlCrSiY targets are so alternately opened and closed to prepare gross thickness be 3.2 microns resistance to
High temperature multi-layer nano composite Ti AlCrSiYN/TiAlCrSiN coatings.Treat that chamber drops to 150 DEG C after preparation, open fire door drop
Taken out to normal temperature.
Coating atoms percentage manufactured in the present embodiment is as follows：
Titanium chromium-silicon-aluminium yttrium nitrogen layer：Titanium 26at.%, chromium 18at.%, silicon 4at.%, aluminium 10at.%, yttrium 3at.%, nitrogen
39at.%.
Titanium chromium-silicon-aluminium nitrogen layer：Titanium 36at.%, chromium 15at.%, silicon 5.2at.%；Aluminium 11.8at.%, nitrogen 32at.%.
Coated cutting tool floating coat hardness 25.4GPa prepared by the present invention, coefficient of friction 0.15.
Carbide alloy coating cutter manufactured in the present embodiment is carried out to the experiment of high-speed cutting nickel base superalloy, cutting
Workpiece material is nickel base superalloy GH4133, and alloy Cutting parameters are：Cutting speed v=150m/min, cutting depth ap=
0.5mm, amount of feeding f=0.25mm/r, length of cut 280m, cutter life increase substantially.
As can be seen from the above embodiments, nickel base superalloy provided by the invention processing with coated cutting tool coating structure and
Hardness stabilization, less crystallinity and workpiece adhesiveness, the service life height of coated cutting tool can be kept at high temperature.
Described above is only the preferred embodiment of the present invention, not makees any formal limitation to the present invention.Should
Point out, for those skilled in the art, under the premise without departing from the principles of the invention, if can also make
Dry improvements and modifications, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of nickel base superalloy processing coated cutting tool, including tool matrix and the painting for being arranged at the tool matrix surface
Layer, the coating include Ti base layers, TiN transition zones and the nanometer composite layer outwards set gradually from tool matrix surface, institute
State nanometer composite layer and be included in TiCrSiAlN layers and TiCrSiAlYN layers that TiN transition layer surfaces are alternately arranged successively.
2. nickel base superalloy processing coated cutting tool according to claim 1, it is characterised in that every layer of TiCrSiAlYN
The thickness of layer and TiCrSiAlN layers is separately 20~40nm.
3. nickel base superalloy processing coated cutting tool according to claim 1 or 2, it is characterised in that described
TiCrSiAlYN layers press atomic percentage, including：25~32at.% of titanium, 18~21at.% of chromium, 3~8at.% of silicon, aluminium 10
30~40at.% of~14at.%, 3~6at.% of yttrium and nitrogen.
4. nickel base superalloy processing coated cutting tool according to claim 1 or 2, it is characterised in that described
TiCrSiAlN layers press atomic percentage, including：30~38at.% of titanium, 15~19at.% of chromium, 5~8at.% of silicon；Aluminium 10~
31~40at.% of 15at.% and nitrogen.
5. nickel base superalloy processing coated cutting tool according to claim 1, it is characterised in that the nanometer composite layer
Thickness be 2~5 μm.
6. nickel base superalloy processing coated cutting tool according to claim 1 or 5, it is characterised in that the nanometer is answered
The grain size for closing layer is 5~18nm.
7. nickel base superalloy processing coated cutting tool according to claim 1, it is characterised in that the Ti base layers
Thickness is 20~80nm.
8. nickel base superalloy processing coated cutting tool according to claim 1, it is characterised in that the TiN transition zones
Thickness be 50~300nm.
9. nickel base superalloy processing coated cutting tool according to claim 1, it is characterised in that the tool matrix
Material is hard alloy or high-speed steel.
10. the preparation method of nickel base superalloy processing coated cutting tool described in claim 1~9 any one, including it is following
Step：
(1) Ti base layers and TiN transition zones are sequentially depositing on tool matrix surface；
(2) alternating deposit TiCrSiAlN layers and the TiCrSiAlYN layers successively of the TiN transition layer surface in the step (1), is obtained
To nickel base superalloy processing coated cutting tool.
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| CN111826653A (en) * | 2020-07-14 | 2020-10-27 | 山东大学 | Method and equipment for preparing hard coating cutter by high-temperature auxiliary pre-cutting method |
| CN111826652A (en) * | 2020-07-14 | 2020-10-27 | 山东大学 | Method for preparing low-friction-coefficient coating cutter by utilizing pre-cutting method and cutter |
| CN112262006A (en) * | 2018-08-24 | 2021-01-22 | 住友电工硬质合金株式会社 | Cutting tool |
| CN113909572A (en) * | 2020-07-08 | 2022-01-11 | 株式会社泰珂洛 | Coated cutting tool |
| CN114929415A (en) * | 2020-01-08 | 2022-08-19 | 住友电工硬质合金株式会社 | Cutting tool |
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| CN111826652A (en) * | 2020-07-14 | 2020-10-27 | 山东大学 | Method for preparing low-friction-coefficient coating cutter by utilizing pre-cutting method and cutter |
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