CN107739160A - A kind of spraying method of polycrystalline cast ingot crucible - Google Patents
A kind of spraying method of polycrystalline cast ingot crucible Download PDFInfo
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- CN107739160A CN107739160A CN201711130648.0A CN201711130648A CN107739160A CN 107739160 A CN107739160 A CN 107739160A CN 201711130648 A CN201711130648 A CN 201711130648A CN 107739160 A CN107739160 A CN 107739160A
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- Prior art keywords
- crucible
- spraying
- spray
- cast ingot
- silicon nitride
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- 238000005507 spraying Methods 0.000 title claims abstract description 79
- 239000007921 spray Substances 0.000 claims abstract description 67
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 38
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 38
- 239000011248 coating agent Substances 0.000 claims abstract description 30
- 238000000576 coating method Methods 0.000 claims abstract description 30
- 238000010422 painting Methods 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 239000012530 fluid Substances 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 8
- 239000011247 coating layer Substances 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 3
- 238000005266 casting Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005336 cracking Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 239000002210 silicon-based material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/008—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character comprising a mixture of materials covered by two or more of the groups C03C17/02, C03C17/06, C03C17/22 and C03C17/28
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Composite Materials (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of spraying method of polycrystalline cast ingot crucible, it is before to crucible spray automatically using spray robot, the cold painting of a Silicon Nitride has first manually been carried out to crucible so that the silicon nitride coating of crucible combine it is even closer, it is difficult for drop-off and split ingot.The present invention improves the coating quality of crucible, solves robot coating quality is unstable existing for spraying automatically, lack of homogeneity, coating combine not close, easy to fall off, splits the problem of ingot rate is high.
Description
Technical field
The present invention relates to a kind of spraying method of polycrystalline cast ingot crucible, belong to solar energy polycrystalline silicon ingot casting technology field.
Background technology
At present, the casting ingot method of solar energy polycrystalline silicon is typically all and raw silicon material is positioned in crucible and heated,
After the temperature in crucible exceedes the fusing point of silicon material, melted by heat is formed silicon melt by silicon material, when the temperature of silicon melt
After stable, that is, cooled down to form silicon ingot.
Because crucible is mostly quartz material, silicon material is during melted by heating forms silicon melt in crucible, quartz
Reaction can be produced with silicon melt, crucible is corroded by silicon melt, cause the damage of crucible, while also have impact on silicon wafer
The smooth demoulding of ingot.To avoid the generation of this problem, it is typically that crucible is sprayed in the industry, one is coated on the surface of crucible
Layer silicon nitride, to play a part of being used as crucible protective layer and silicon ingot demoulding medium.
Crucible spraying, it is that silicon nitride powder is modulated into aqua with pure water, with compressed air through spray gun even application in crucible
Inner surface, moisture rapid evaporation, leave a kind of technical process that silicon nitride powder is attached to crucible internal walls.At present, the spraying of crucible
Generally include manually to spray, machinery or the robot mode such as spraying automatically, wherein production efficiency highest be robot from
Dynamic spraying.Robot automatic spraying equipment includes the crucible heating chamber of crucible spraying robot and firm heating crucible, by crucible
After being placed in crucible heating chamber, spray robot is sprayed according to the operating path set.Robot sprays automatically at present
It is not close, easy to fall off to apply the combination of generally existing coating, splits the problems such as ingot rate is high.
The content of the invention
In view of this, in view of the shortcomings of the prior art, the present invention provides a kind of spraying method of polycrystalline cast ingot crucible, improves
The coating quality of crucible, solving robot, coating quality existing for spraying is unstable automatically, lack of homogeneity, coating combine not
Closely, it is easy to fall off, split the problem of ingot rate is high.
To solve above technical problem, the technical scheme is that using a kind of spraying method of polycrystalline cast ingot crucible,
It comprises the following steps：
(1) crucible is placed in crucible heating chamber, crucible is bonded with five faces of heating chamber；
(2) manually to five faces difference time Silicon Nitride of manual cold painting of crucible；
(3) crucible heating chamber heats to the crucible after cold painting；
(4) when crucible is heated to spraying temperature, the automatic spray gun on spray robot is according to the operating path set
Start to carry out five faces of crucible automatic spraying silicon nitride fluid, automatic spray gun and the distance on crucible coating layer surface are maintained at 15
~20cm, the flow for nitrogenizing silicon fluid are controlled at 500~550ml/ times.
Further, the weight proportion of Silicon Nitride is Gui Rong Jiao ︰ Shui ︰ silicon nitride powders=︰ of 8 ︰ 13 in the step (2)
12。
Further, crucible carries out dust removal operation before cold painting in the step (2), avoids dust granule from influenceing nitridation
The coating of silicon slurry.
Further, the heating-up temperature of crucible spraying is 65~85 DEG C in the step (4).Wherein, the season of summer and autumn two is 65
~75 DEG C, season in winter in spring two is 70~85 DEG C.
Further, the figure of automatic spray gun spraying is sector, and fan-shaped length be 30 ± 2cm, width for 10 ±
2cm。
Further, five faces spraying of step (4) spray robot to crucible is once one time, spray robot
Need to be to 5 times sprayings for completing a polycrystalline cast ingot crucible of crucible spraying.
Further, spray robot to crucible spray each coating thickness control small in the step (4)
In in 0.01mm.
Compared with prior art, the present invention is first artificial right before to crucible spray automatically using spray robot
Crucible has carried out the cold painting of a Silicon Nitride so that the silicon nitride coating of crucible combine it is even closer, it is difficult for drop-off and
Ingot is split, and the coating uniformity of Control During Paint Spraying by Robot is good, improves coating quality and production efficiency, improves polycrystalline silicon ingot casting life
The quality of production and efficiency of producing line.
Embodiment
In order that those skilled in the art more fully understands technical scheme, with reference to preferred embodiment
The present invention is described in further detail.It should be pointed out that following preferred embodiments are not construed as the limit to the present invention
System, protection scope of the present invention should be defined by claim limited range.For the ordinary skill people of the art
For member, without departing from the spirit and scope of the present invention, some improvements and modifications can also be made, these improvements and modifications
It should be regarded as protection scope of the present invention.
Crucible spraying robot used in following embodiments is the SRT1410P crucible spraying machines of commercially available ABB AB
Device people.
Embodiment 1：
A kind of spraying method of polycrystalline cast ingot crucible, it comprises the following steps：
(1) crucible is placed in crucible heating chamber, crucible is bonded with five faces of heating chamber；
(2) a time Silicon Nitride of cold painting manually manually is distinguished to five faces of the crucible after dedusting, Silicon Nitride
Weight proportion is Gui Rong Jiao ︰ Shui ︰ silicon nitride powders=︰ 12 of 8 ︰ 13, and the coating thickness of Silicon Nitride is controlled in less than 0.02mm；
(3) crucible heating chamber heats to the crucible after cold painting, and heating-up temperature is 65 DEG C (summer and autumns)；
(4) when crucible is heated to spraying temperature, the automatic spray gun on spray robot is according to the operating path set
Start to carry out five faces of crucible automatic spraying silicon nitride fluid, five faces spraying of the spray robot to crucible is once one
Time, spray robot need to be to 5 times sprayings for completing a polycrystalline cast ingot crucible of crucible spraying；Automatic spray gun and crucible coating layer table
The distance in face is maintained at 15cm；The flow for nitrogenizing silicon fluid is controlled at 500ml/ times；The figure of automatic spray gun spraying is sector, is fanned
The length of shape is 30 ± 2cm, and width is 10 ± 2cm；Spray robot spray each coating thickness and control existing to crucible
Less than in 0.01mm.
Crucible after the completion of spraying is detected, its spray-on coating stable uniform, the defects of no cracking, bubble, pin hole,
Ingot casting can completely come off, and the yields of ingot casting is >=99.9%.
Embodiment 2：
A kind of spraying method of polycrystalline cast ingot crucible, it comprises the following steps：
(1) crucible is placed in crucible heating chamber, crucible is bonded with five faces of heating chamber；
(2) a time Silicon Nitride of cold painting manually manually is distinguished to five faces of the crucible after dedusting, Silicon Nitride
Weight proportion is Gui Rong Jiao ︰ Shui ︰ silicon nitride powders=︰ 12 of 8 ︰ 13, and the coating thickness of Silicon Nitride is controlled in less than 0.02mm；
(3) crucible heating chamber heats to the crucible after cold painting, and heating-up temperature is 75 DEG C (summer and autumns)；
(4) when crucible is heated to spraying temperature, the automatic spray gun on spray robot is according to the operating path set
Start to carry out five faces of crucible automatic spraying silicon nitride fluid, five faces spraying of the spray robot to crucible is once one
Time, spray robot need to be to 5 times sprayings for completing a polycrystalline cast ingot crucible of crucible spraying；Automatic spray gun and crucible coating layer table
The distance in face is maintained at 18cm；The flow for nitrogenizing silicon fluid is controlled at 530ml/ times；The figure of automatic spray gun spraying is sector, is fanned
The length of shape is 30 ± 2cm, and width is 10 ± 2cm；Spray robot spray each coating thickness and control existing to crucible
Less than in 0.01mm.
Crucible after the completion of spraying is detected, its spray-on coating stable uniform, the defects of no cracking, bubble, pin hole,
Ingot casting can completely come off, and the yields of ingot casting is >=99.8%.
Embodiment 3：
A kind of spraying method of polycrystalline cast ingot crucible, it comprises the following steps：
(1) crucible is placed in crucible heating chamber, crucible is bonded with five faces of heating chamber；
(2) a time Silicon Nitride of cold painting manually manually is distinguished to five faces of the crucible after dedusting, Silicon Nitride
Weight proportion is Gui Rong Jiao ︰ Shui ︰ silicon nitride powders=︰ 12 of 8 ︰ 13, and the coating thickness of Silicon Nitride is controlled in less than 0.02mm；
(3) crucible heating chamber heats to the crucible after cold painting, and heating-up temperature is 70 DEG C (winters in spring)；
(4) when crucible is heated to spraying temperature, the automatic spray gun on spray robot is according to the operating path set
Start to carry out five faces of crucible automatic spraying silicon nitride fluid, five faces spraying of the spray robot to crucible is once one
Time, spray robot need to be to 5 times sprayings for completing a polycrystalline cast ingot crucible of crucible spraying；Automatic spray gun and crucible coating layer table
The distance in face is maintained at 17cm；The flow for nitrogenizing silicon fluid is controlled at 540ml/ times；The figure of automatic spray gun spraying is sector, is fanned
The length of shape is 30 ± 2cm, and width is 10 ± 2cm；Spray robot spray each coating thickness and control existing to crucible
Less than in 0.01mm.
Crucible after the completion of spraying is detected, its spray-on coating stable uniform, the defects of no cracking, bubble, pin hole,
Ingot casting can completely come off, and the yields of ingot casting is >=99.8%.
Embodiment 4：
A kind of spraying method of polycrystalline cast ingot crucible, it comprises the following steps：
(1) crucible is placed in crucible heating chamber, crucible is bonded with five faces of heating chamber；
(2) a time Silicon Nitride of cold painting manually manually is distinguished to five faces of the crucible after dedusting, Silicon Nitride
Weight proportion is Gui Rong Jiao ︰ Shui ︰ silicon nitride powders=︰ 12 of 8 ︰ 13, and the coating thickness of Silicon Nitride is controlled in less than 0.02mm；
(3) crucible heating chamber heats to the crucible after cold painting, and heating-up temperature is 85 DEG C (winters in spring)；
(4) when crucible is heated to spraying temperature, the automatic spray gun on spray robot is according to the operating path set
Start to carry out five faces of crucible automatic spraying silicon nitride fluid, five faces spraying of the spray robot to crucible is once one
Time, spray robot need to be to 5 times sprayings for completing a polycrystalline cast ingot crucible of crucible spraying；Automatic spray gun and crucible coating layer table
The distance in face is maintained at 20cm；The flow for nitrogenizing silicon fluid is controlled at 550ml/ times；The figure of automatic spray gun spraying is sector, is fanned
The length of shape is 30 ± 2cm, and width is 10 ± 2cm；Spray robot spray each coating thickness and control existing to crucible
Less than in 0.01mm.
Crucible after the completion of spraying is detected, its spray-on coating stable uniform, the defects of no cracking, bubble, pin hole,
Ingot casting can completely come off, and the yields of ingot casting is >=99.9%.
Comparative example：
A kind of spraying method of polycrystalline cast ingot crucible, it comprises the following steps：
(1) crucible is placed in crucible heating chamber, crucible is bonded with five faces of heating chamber, crucible heating chamber is to earthenware
Crucible is heated, and heating-up temperature is 85 DEG C (winters in spring)；
(2) when crucible is heated to spraying temperature, the automatic spray gun on spray robot is according to the operating path set
Start to carry out five faces of crucible automatic spraying silicon nitride fluid, five faces spraying of the spray robot to crucible is once one
Time, spray robot need to be to 5 times sprayings for completing a polycrystalline cast ingot crucible of crucible spraying；Automatic spray gun and crucible coating layer table
The distance in face is maintained at 20cm；The flow for nitrogenizing silicon fluid is controlled at 550ml/ times；The figure of automatic spray gun spraying is sector, is fanned
The length of shape is 30 ± 2cm, and width is 10 ± 2cm；Spray robot spray each coating thickness and control existing to crucible
Less than in 0.01mm.
Crucible after the completion of spraying is used for ingot casting, after testing, the yields of its ingot casting is >=95.5%.
To sum up, the present invention is first manually carried out before to crucible spray automatically using spray robot to crucible
The cold painting of a time Silicon Nitride so that the silicon nitride coating of crucible combine it is even closer, it is difficult for drop-off and split ingot, and machine
The coating uniformity of device people spraying is good, improves coating quality and production efficiency, improves the production of polycrystalline silicon ingot casting production line
Quality and efficiency.
Claims (8)
- A kind of 1. spraying method of polycrystalline cast ingot crucible, it is characterised in that：Comprise the following steps：(1) crucible is placed in crucible heating chamber, crucible is bonded with five faces of heating chamber；(2) manually to five faces difference time Silicon Nitride of manual cold painting of crucible；(3) crucible heating chamber heats to the crucible after cold painting；(4) when crucible is heated to spraying temperature, the automatic spray gun on spray robot starts according to the operating path set Five faces of crucible are carried out with automatic spraying silicon nitride fluid, the distance on automatic spray gun and crucible coating layer surface is maintained at 15~ 20cm, the flow for nitrogenizing silicon fluid are controlled at 500~550ml/ times.
- A kind of 2. spraying method of polycrystalline cast ingot crucible according to claim 1, it is characterised in that：In the step (2) The weight proportion of Silicon Nitride is Gui Rong Jiao ︰ Shui ︰ silicon nitride powders=︰ 12 of 8 ︰ 13.
- A kind of 3. spraying method of polycrystalline cast ingot crucible according to claim 1, it is characterised in that：In the step (2) Crucible carries out dust removal operation before cold painting.
- A kind of 4. spraying method of polycrystalline cast ingot crucible according to claim 1, it is characterised in that：In the step (4) The heating-up temperature of crucible spraying is 65~85 DEG C.
- A kind of 5. spraying method of polycrystalline cast ingot crucible according to claim 4, it is characterised in that：The crucible spraying Heating-up temperature is 65~75 DEG C of two season of summer and autumn, 70~85 DEG C of two season of winter in spring,.
- A kind of 6. spraying method of polycrystalline cast ingot crucible according to claim 1, it is characterised in that：The automatic spray gun spray The figure of painting is sector, and fan-shaped length is 30 ± 2cm, and width is 10 ± 2cm.
- A kind of 7. spraying method of polycrystalline cast ingot crucible according to claim 1, it is characterised in that：Step (4) spray It is once one time to the spraying of five faces of crucible to apply robot, and spray robot is to crucible spraying 5 times.
- A kind of 8. spraying method of polycrystalline cast ingot crucible according to claim 1, it is characterised in that：In the step (4) Spray robot to crucible spray each coating thickness control in less than 0.01mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711130648.0A CN107739160A (en) | 2017-11-15 | 2017-11-15 | A kind of spraying method of polycrystalline cast ingot crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711130648.0A CN107739160A (en) | 2017-11-15 | 2017-11-15 | A kind of spraying method of polycrystalline cast ingot crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107739160A true CN107739160A (en) | 2018-02-27 |
Family
ID=61234774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711130648.0A Pending CN107739160A (en) | 2017-11-15 | 2017-11-15 | A kind of spraying method of polycrystalline cast ingot crucible |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112122079A (en) * | 2019-06-24 | 2020-12-25 | 中美硅晶制品股份有限公司 | Crucible structure and method for forming crucible isolation layer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112122079A (en) * | 2019-06-24 | 2020-12-25 | 中美硅晶制品股份有限公司 | Crucible structure and method for forming crucible isolation layer |
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