CN107728236A - 产生纳米尺度纵向光斑链的超构表面元件及产生方法 - Google Patents
产生纳米尺度纵向光斑链的超构表面元件及产生方法 Download PDFInfo
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- CN107728236A CN107728236A CN201711017700.1A CN201711017700A CN107728236A CN 107728236 A CN107728236 A CN 107728236A CN 201711017700 A CN201711017700 A CN 201711017700A CN 107728236 A CN107728236 A CN 107728236A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 13
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- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000003672 processing method Methods 0.000 claims description 2
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- 238000012576 optical tweezer Methods 0.000 abstract description 3
- 239000002105 nanoparticle Substances 0.000 abstract description 2
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- 241000931526 Acer campestre Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- 238000001259 photo etching Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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CN201711017700.1A CN107728236B (zh) | 2017-10-26 | 2017-10-26 | 超构表面元件的制造方法及其产生纳米尺度纵向光斑链的方法 |
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CN201711017700.1A CN107728236B (zh) | 2017-10-26 | 2017-10-26 | 超构表面元件的制造方法及其产生纳米尺度纵向光斑链的方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108919392A (zh) * | 2018-07-05 | 2018-11-30 | 鲁东大学 | 一种直线型表面等离激元透镜及其照明方法 |
CN109597160A (zh) * | 2019-01-02 | 2019-04-09 | 山东大学 | 一种基于v形光学天线超构表面的解复用器件及其工作方法 |
CN111380612A (zh) * | 2020-03-02 | 2020-07-07 | 华中科技大学 | 一种高光谱成像系统 |
CN112567268A (zh) * | 2018-06-19 | 2021-03-26 | 贝勒大学 | 光纤上的超颖表面和相关方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150079523A1 (en) * | 2013-09-13 | 2015-03-19 | Minggan LI | Polymer sheet patterning and its assembly using slit channel lithography |
CN105182556A (zh) * | 2015-09-02 | 2015-12-23 | 鲁东大学 | 一种多焦点阵列光斑的发生装置及方法 |
CN105425401A (zh) * | 2015-12-24 | 2016-03-23 | 鲁东大学 | 一种横向多焦点产生装置及方法 |
US10054863B2 (en) * | 2012-10-26 | 2018-08-21 | Mapper Lithography Ip B.V. | Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method |
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- 2017-10-26 CN CN201711017700.1A patent/CN107728236B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10054863B2 (en) * | 2012-10-26 | 2018-08-21 | Mapper Lithography Ip B.V. | Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method |
US20150079523A1 (en) * | 2013-09-13 | 2015-03-19 | Minggan LI | Polymer sheet patterning and its assembly using slit channel lithography |
CN105182556A (zh) * | 2015-09-02 | 2015-12-23 | 鲁东大学 | 一种多焦点阵列光斑的发生装置及方法 |
CN105425401A (zh) * | 2015-12-24 | 2016-03-23 | 鲁东大学 | 一种横向多焦点产生装置及方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112567268A (zh) * | 2018-06-19 | 2021-03-26 | 贝勒大学 | 光纤上的超颖表面和相关方法 |
JP2021529981A (ja) * | 2018-06-19 | 2021-11-04 | ベイラー ユニバーシティ | 光ファイバのメタ表面及び関連方法 |
CN108919392A (zh) * | 2018-07-05 | 2018-11-30 | 鲁东大学 | 一种直线型表面等离激元透镜及其照明方法 |
CN109597160A (zh) * | 2019-01-02 | 2019-04-09 | 山东大学 | 一种基于v形光学天线超构表面的解复用器件及其工作方法 |
CN111380612A (zh) * | 2020-03-02 | 2020-07-07 | 华中科技大学 | 一种高光谱成像系统 |
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