CN107727730A - A kind of dual reflective flight time mass spectrum optoelectronic speed imager - Google Patents
A kind of dual reflective flight time mass spectrum optoelectronic speed imager Download PDFInfo
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- CN107727730A CN107727730A CN201711229002.8A CN201711229002A CN107727730A CN 107727730 A CN107727730 A CN 107727730A CN 201711229002 A CN201711229002 A CN 201711229002A CN 107727730 A CN107727730 A CN 107727730A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/626—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using heat to ionise a gas
- G01N27/628—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using heat to ionise a gas and a beam of energy, e.g. laser enhanced ionisation
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- G—PHYSICS
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- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
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Abstract
A kind of dual reflective flight time mass spectrum optoelectronic speed imager, provided with laser splash ion gun, cooling ion trap, flight time mass spectrum and anion optoelectronic speed imaging system；Laser splash ion gun is used to generate cluster ions, accelerated field vertically accelerates into flight time mass spectrum after caused cluster ions enter cooling ion trap imprison cooling, anion optoelectronic speed imaging system detects to outgoing photoelectron, obtains the photoelectron spectroscopy of neutral cluster electronic structure.Cluster ions are generated using laser splash ion gun, accelerated field vertically accelerates into flight time mass spectrum after caused cluster ions enter linear ion hydrazine imprison cooling, and the intensity distribution for producing cluster ions is obtained by mass spectrometry detection.After analyzing mass spectrum, specific cluster anion is selected, with being desorbed laser interaction, produces neutral molecule and photoelectron.Outgoing photoelectron is detected using anion optoelectronic speed imaging system, obtains the photoelectron spectroscopy of neutral cluster electronic structure.
Description
Technical field
The present invention relates to imager, more particularly, to a kind of dual reflective flight time mass spectrum optoelectronic speed imager.
Background technology
Molecular reaction dynamics (Molecular Reaction Dynamics) is the forward position neck of chemistry's basic theories research
Domain.It using modern physicses chemistry advanced analysis methodology, atom, molecule level on study under different conditions and different points
The science of the occurrence condition, various reaction channels and the microreaction mechanism that are chemically reacted in subsystem, it is understanding chemical reaction
The basis of essence and control chemical reaction.Geometry, the level structure of gaseous ion/cluster are characterized, and chemical reaction is lived
Property is one of most active research direction in molecular reaction dynamics.These researchs are related to the essence of chemical bonding, chemical reaction
With reaction system internal energy reallocation etc. most basic problem.From infrared to ultraviolet, spectroscopic method is to characterize gaseous ion knot
One of most effective means of structure and property.
The spectral investigation of gaseous ion/cluster starts from the eighties in last century, and research gaseous ion compound has important reason
By and practical significance.Ion/cluster can be used as microreaction model, for example transition metal oxide is the important of antigravity system
Part.Research gas phase is neutral or charged metal oxide cluster can help to identify the reaction active site of heterogeneous catalysis.Greatly
Measure the research about gaseous oxidation thing cluster-glass behaviour and find that the mechanism of action of gas phase cluster-glass behaviour and industrial catalyst is quite similar.
Numerous studies have been carried out to the property and correlated response of gas phase transition metal oxide molecular ion and cluster at present, and
Further understanding is achieved to the relation between oxide molecule structure and response characteristic.
With the development of experimental technique, geometry, electronic structure and other physical chemistry of current research gaseous ion
Property has many new experimental methods.The research of gaseous ion is concentrated mainly on traditional field of mass spectrometry at present.Although gas phase from
The concentration of son is very low, but mass spectrographic sensitivity is very high, can detect gas phase charged ion, and provides the quality letter of ion
Breath.Although the Mass Spectra of these gaseous ions provides substantial amounts of macroscopic property, it is determined that the composition of molecular ion and anti-
Important achievement should be obtained in terms of activity, but simple mass spectrum mode can not directly give the structural information and spectrum number of material
According to, and these spectrum exactly disclose the presence of these chemical species and the important basis of property.Mass spectrum can not study neutrality
Species.At present the understanding of our geometries and electronic structure to gas phase compounds quite a few come from various spectrum and energy
Spectrum research.Anion photoelectron spectroscopy can provide the electronic energy level structure of ion, and binding isotherm, which calculates, obtains ion and corresponding
The information of neutral molecule geometry, some high-resolution photoelectron spectroscopies can even provide the vibrational structure of gaseous ion.
For domestic and international existing flight time mass spectrum-optoelectronic speed imager in order to obtain high resolution mass spectrum, its mass spectrum is field-free
Movement area is all very long and lens group is more, and this causes the losses of ions for reaching light desorption area serious, optoelectronic speed imaging sensitivity
Degree reduces, difficult for some raw or shorter life-span ions of relatively having difficult labour, the detection of its power spectrum.
Bibliography：
[1].Wiley WC,McLaren IH.Time-of-Flight Mass Spectrometer with
Improved Resolution[J].Rev Sci Instrum.1955,26(12):1150-7.
[2].Eppink ATJB,Parker DH.Velocity Map Imaging of Ions and Electrons
Using Electrostatic Lenses:Application in Photoelectron and Photofragment Ion
Imaging of Molecular Oxygen[J].Rev Sci Instrum.1997,68(9):3477-84.
The content of the invention
It is an object of the invention to provide improve optoelectronic speed image sensitivity as far as possible on the premise of ensureing preferably to differentiate
A kind of dual reflective flight time mass spectrum optoelectronic speed imager.
The present invention be provided with laser splash ion gun, cooling ion trap, flight time mass spectrum and anion optoelectronic speed into
As system；Laser splash ion gun is used to generate cluster ions, after caused cluster ions enter cooling ion trap imprison cooling
Accelerated field vertically accelerates into flight time mass spectrum, and the anion optoelectronic speed imaging system is carried out to outgoing photoelectron
Detection, obtains the photoelectron spectroscopy of neutral cluster electronic structure.
The laser splash ion gun is provided with the 1st pulse valve, the 2nd pulse valve, growth passage, reaction channel, nozzle, solid
Sample target, laser, laser port and lens；The laser beam of the laser is shone by the micropore after lens focus by laser port
It is mapped on the sample of solid sample target, the 1st pulse valve makes carrier gas enter in growth passage, and plasma collision is cooled down
Cluster, then enter reaction channel under carrier gas carrier band；2nd pulse valve introduces reacting gas, the cluster collisions with generation
Interaction, reaction of formation thing and reactant intermediate, eventually pass through nozzle and enter cooling ion trap.
The laser can use Nd：YAG type lasers, the launch wavelength of laser is 532nm, and the frequency of laser beam is
10Hz or 20Hz；Laser port diameter is less than 0.1mm.
1st pulse valve and the 2nd pulse valve can use General Valve, the type pulse valves of Series 9, trigger arteries and veins
Wide generally 40~150 μ s.
The solid sample target makees upper and lower and circular motion by two driving stepper motors.
The cooling ion trap is provided with helium refrigerator, cold screen, cold head and linear ion hydrazine；Cluster ions by laser splash from
Component enters linear ion hydrazine after producing, apply cluster ions needed for rf electric field imprison, while compressed by helium refrigerator
High-purity hydrogen expand in the high-purity helium that Leng Pingchu expands and compresses at cold head to be taken away ambient heat to form two level cooling next cold
But cluster ions.
The buffer gas of the cold head can use H2(35K) or He (5K).
The linear ion hydrazine can use eight grades of bar linear ion hydrazines, eight grades of bar circumferential arrangements, and circle diameter can be
7.5mm, pole bar diameter can 5mm, pole bar length can be 50mm.
The flight time mass spectrum is provided with accelerator, deflecting plates, the 1st lens group, the 1st reflector, the 2nd lens group, the 2nd anti-
Emitter and detector；The accelerated device of the ion enters the field-free region of flight time mass spectrum after accelerating, by deflecting plates deflect with
And the 1st lens group and the 2nd lens group focusing, reach the 1st reflector and the 2nd reflector, inspection reached after the reflection of the 2nd reflector
Device is surveyed, mass spectrogram is obtained, wherein the 1st reflector and the 2nd reflector are fixed by two L-squares.
The flight time mass spectrum can use dual reflective flight time mass spectrum, and resolution ratio is up to 1000.
The anion optoelectronic speed imaging system is provided with reference tube, accelerating field, microchannel plate, fluorescent screen, CCD phases
Machine, magnetic shielding cylinder and laser；2nd reflector of the ion beam through flight time mass spectrum is anti-caused by the laser splash ion gun
After penetrating, into anion optoelectronic speed imaging system, and with laser caused by be desorbed laser collision, produce electron beam；Electricity
Beamlet enters accelerating field behind the equipotential field that reference tube is formed and accelerates to reach microchannel plate after focusing on, and on fluorescent screen
Feature is shown, the shooting for eventually passing through CCD camera forms image, and wherein magnetic shielding cylinder is used to shield earth's magnetic field to electronic flight rail
The influence of mark.
The anion optoelectronic speed imaging system can use conllinear formula anion optoelectronic speed imaging system, i.e. light
Electronic imaging instrument and ion flight direction are on the same line.
The present invention generates cluster ions first with laser splash ion gun, and caused cluster ions enter linear ion hydrazine
Field is accelerated after imprison cooling and vertically accelerates into flight time mass spectrum, and the intensity for producing cluster ions is obtained by mass spectrometry detection
Distribution.After analyzing mass spectrum, specific cluster anion interested is selected, makes it and is desorbed laser interaction, produces neutral point
Son and photoelectron.Finally outgoing photoelectron is detected using anion optoelectronic speed imaging system, obtains neutral cluster
The photoelectron spectroscopy of electronic structure.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is the structural representation of laser splash ion gun described in the embodiment of the present invention.
Fig. 3 is the structural representation that ion trap is cooled down described in the embodiment of the present invention.
Fig. 4 is the structural representation of dual reflective flight time mass spectrum described in the embodiment of the present invention.
Fig. 5 is the structural representation of anion optoelectronic speed imager described in the embodiment of the present invention.
Embodiment
The present invention is described in further details below in conjunction with the accompanying drawings.
As shown in Fig. 1~5, the embodiment of the present invention is provided with laser splash ion gun 1, cooling ion trap 2, flight time mass spectrum
3 and anion optoelectronic speed imaging system 4；Laser splash ion gun 1 is used to generate cluster ions, and caused cluster ions enter
Accelerated field vertically accelerates into flight time mass spectrum 3 after entering to cool down the imprison cooling of ion trap 2, is produced by mass spectrometry detection
The intensity distribution of cluster ions；After analyzing mass spectrum, specific cluster anion interested is selected, makes it with being desorbed laser phase interaction
With generation neutral molecule and photoelectron；Finally outgoing photoelectron is visited using anion optoelectronic speed imaging system 4
Survey, obtain the photoelectron spectroscopy of neutral cluster electronic structure.
The laser splash ion gun 1 is provided with the 1st pulse valve 5, growth passage 6, reaction channel 7, nozzle 8, solid sample
Target 9, the 2nd pulse valve 10, laser 11, lens 12 and laser port 13；The laser beam of the laser 11 is focused on by lens 12
The micropore by laser port 13 is irradiated on the sample of solid sample target 9 afterwards, and substantial amounts of plasma is produced in ion pipeline,
By controlling the 1st pulse valve 5 carrier gas A is entered in growth passage 6, plasma collision is cooled down into cluster, then in carrier gas
Carrier band is lower to enter reaction channel 7；2nd pulse valve 10 introduces reacting gas B, is interacted with the cluster collisions of generation, raw
Into reactant and reactant intermediate, eventually pass through nozzle 8 and enter cooling ion trap 2.
The launch wavelength of the laser 11 is 532nm, and the frequency of laser beam is 10Hz or 20Hz.
The cooling ion trap 2 is provided with helium refrigerator 14, cold screen 15, cold head 16 and eight grades of bar linear ion hydrazines 17；Cluster
Ion enters eight grades of bar linear ion hydrazines 17 after being produced by laser splash ion gun 1, apply cluster needed for rf electric field imprison from
Son, while the high-purity helium for expanding and compressing at cold screen 15 by the high-purity hydrogen that helium refrigerator 14 compresses is swollen at cold head 16
Expansible band walks ambient heat and forms two level cooling to cool down cluster ions.
It is saturating that the flight time mass spectrum 3 is provided with accelerator 18, deflecting plates 19, the 1st lens group 20, the 1st reflector the 21, the 2nd
Microscope group 22, the 2nd reflector 23 and detector 24；The accelerated device 18 of ion enters the field-free of flight time mass spectrum after accelerating
Area, deflected by deflecting plates 19, the 1st lens group 20 and the 2nd lens group 22 are focused on up to the 1st reflector 21 and the 2nd reflector
23, detector 24 is reached after the reflection of the 2nd reflector 23, mass spectrogram is obtained, wherein the 1st reflector 21 and the 2nd reflector 23
Fixed by oblique angle fixed plate 25.
The anion optoelectronic speed imaging system 4 is provided with reference tube 26, accelerating field 27, microchannel plate 28, fluorescence
Screen 29, CCD camera 30, magnetic shielding cylinder 31 and laser 32；Ion beam is through the flight time caused by the laser splash ion gun 1
Mass spectrum 3 the 2nd reflector 23 reflection after, into anion optoelectronic speed imaging system 4, and with laser 32 caused by be desorbed
Laser collides, and produces electron beam；Electron beam enters accelerating field 27 behind the equipotential field that reference tube 26 is formed, and accelerates to focus on
Microchannel plate 28 is reached afterwards, and shows feature on fluorescent screen 29, the shooting for eventually passing through CCD camera 30 forms image, wherein
Magnetic shielding cylinder 31 is used to shield influence of the earth's magnetic field to electronic flight track.
The present invention is used to detect atom or molecular cluster.System architecture includes laser splash ion gun, cooling ion trap, flown
Row time mass spectrum and anion optoelectronic speed imaging system.It is wider that mass range can be produced using laser splash ion gun
Cluster；Cluster can be cooled down in favor of obtaining more accurate photoelectron spectroscopy using linear ion hydrazine is cooled down；Utilize the flight time
Mass spectrum is quick to the progress of caused cluster ions, detection in real time, in situ, and can effectively investigate cluster ions and be formed and divided
The rule of cloth；The electron affinity of neutral species and hanging down for anion can be obtained using anion optoelectronic speed imaging system
The information such as straight Desorption Energy, to probe into its electronic structure and bonding property.Instrument of the present invention is overall more small-sized, mass spectrum and power spectrum point
Resolution is high and spectral sensitivity is high, and mass spectrum can in situ, reflection light desorption area in real time ionic condition.
Claims (10)
- A kind of 1. dual reflective flight time mass spectrum optoelectronic speed imager, it is characterised in that provided with laser splash ion gun, Cool down ion trap, flight time mass spectrum and anion optoelectronic speed imaging system；Laser splash ion gun is used to generate cluster Ion, accelerated field vertically accelerates into flight time mass spectrum after caused cluster ions enter cooling ion trap imprison cooling, The anion optoelectronic speed imaging system detects to outgoing photoelectron, obtains the photoelectron of neutral cluster electronic structure Power spectrum.
- 2. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 1, it is characterised in that described Laser splash ion gun is provided with the 1st pulse valve, the 2nd pulse valve, growth passage, reaction channel, nozzle, solid sample target, laser Device, laser port and lens；The laser beam of the laser is irradiated to solid-like by the micropore after lens focus by laser port On the sample of product target, the 1st pulse valve makes carrier gas enter in growth passage, plasma collision is cooled down into cluster, then Enter reaction channel under carrier gas carrier band；2nd pulse valve introduces reacting gas, is interacted with the cluster collisions of generation, Reaction of formation thing and reactant intermediate, eventually pass through nozzle and enter cooling ion trap.
- 3. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 2, it is characterised in that described Laser uses Nd：YAG type lasers, the launch wavelength of laser is 532nm, and the frequency of laser beam is 10Hz or 20Hz；Swash Optical port diameter is less than 0.1mm.
- 4. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 2, it is characterised in that described 1st pulse valve and the 2nd pulse valve use General Valve, the type pulse valves of Series 9, and triggering pulsewidth is 40~150 μ s.
- 5. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 2, it is characterised in that described Solid sample target makees upper and lower and circular motion by two driving stepper motors.
- 6. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 1, it is characterised in that described Cooling ion trap is provided with helium refrigerator, cold screen, cold head and linear ion hydrazine；Cluster ions are produced laggard by laser splash ion gun Enter linear ion hydrazine, apply cluster ions needed for rf electric field imprison, the high-purity hydrogen compressed by helium refrigerator is in Leng Pingchu The high-purity helium of expansion and compression expands at cold head takes away ambient heat formation two level cooling to cool down cluster ions.
- 7. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 6, it is characterised in that described The buffer gas of cold head uses H2Or He, H2For 35K, He 5K.
- 8. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 6, it is characterised in that described Linear ion hydrazine uses eight grades of bar linear ion hydrazines, eight grades of bar circumferential arrangements, circle diameter 7.5mm, pole bar diameter 5mm, pole Pole length is 50mm.
- 9. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 1, it is characterised in that described Flight time mass spectrum is provided with accelerator, deflecting plates, the 1st lens group, the 1st reflector, the 2nd lens group, the 2nd reflector and detection Device；The accelerated device of ion enters the field-free region of flight time mass spectrum after accelerating, by deflecting plates deflection and the 1st lens group and the The focusing of 2 lens groups, the 1st reflector and the 2nd reflector are reached, detector is reached after the reflection of the 2nd reflector, obtain mass spectrum spectrum Figure, wherein the 1st reflector and the 2nd reflector are fixed by two L-squares；The flight time mass spectrum can use dual reflective to fly Time mass spectrum, resolution ratio is up to 1000.
- 10. a kind of dual reflective flight time mass spectrum optoelectronic speed imager as claimed in claim 1, it is characterised in that described Anion optoelectronic speed imaging system is provided with reference tube, accelerating field, microchannel plate, fluorescent screen, CCD camera, magnetic shielding cylinder And laser；Ion beam caused by the laser splash ion gun is after the 2nd reflector reflection of flight time mass spectrum, into negative Ion optoelectronic speed imaging system, and with laser caused by be desorbed laser collision, produce electron beam；Electron beam is by reference Enter accelerating field behind the equipotential field that cylinder is formed to accelerate to reach microchannel plate after focusing on, and in fluorescence onscreen display feature, most The shooting Jing Guo CCD camera forms image eventually, and wherein magnetic shielding cylinder is used to shield influence of the earth's magnetic field to electronic flight track；The anion optoelectronic speed imaging system can use conllinear formula anion optoelectronic speed imaging system, i.e. photoelectron Imager and ion flight direction are on the same line.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108538699A (en) * | 2018-05-14 | 2018-09-14 | 北京卫星环境工程研究所 | Mass spectrum-high-rise neutral atmosphere the detection device of power spectrum integration |
| CN108680265A (en) * | 2018-06-01 | 2018-10-19 | 中国科学院西安光学精密机械研究所 | High repetition frequency attosecond pulse photoelectron and ion energy spectrum measuring system and method |
| CN109115660A (en) * | 2018-08-23 | 2019-01-01 | 金华职业技术学院 | A kind of particle imaging method |
| CN109887832A (en) * | 2019-03-01 | 2019-06-14 | 金华职业技术学院 | A kind of photoelectron time flight spectrum instrument |
| CN110018220A (en) * | 2019-03-02 | 2019-07-16 | 金华职业技术学院 | A kind of preparation and test method of the metal cluster of chemical modification |
| CN110018221A (en) * | 2019-03-02 | 2019-07-16 | 金华职业技术学院 | A kind of test device of the metal cluster of chemical modification |
| CN111103615A (en) * | 2019-12-19 | 2020-05-05 | 厦门大学 | High-resolution photoelectronic speed imaging device |
| CN112540117A (en) * | 2020-11-26 | 2021-03-23 | 厦门大学 | Gas phase in-situ mass spectrum detection device |
| CN113720899A (en) * | 2021-09-08 | 2021-11-30 | 中国科学院大连化学物理研究所 | High-resolution neutral cluster infrared spectrum device |
| CN113758990A (en) * | 2021-08-30 | 2021-12-07 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Reflective TOF device for cluster beam comprehensive deposition |
| CN113871287A (en) * | 2021-08-18 | 2021-12-31 | 中国科学院大学 | Device and method for preparing large amount of cold molecular ions |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108538699B (en) * | 2018-05-14 | 2019-11-26 | 北京卫星环境工程研究所 | Mass spectrum-high-rise neutral atmosphere the detection device of power spectrum integration |
| CN108538699A (en) * | 2018-05-14 | 2018-09-14 | 北京卫星环境工程研究所 | Mass spectrum-high-rise neutral atmosphere the detection device of power spectrum integration |
| CN108680265A (en) * | 2018-06-01 | 2018-10-19 | 中国科学院西安光学精密机械研究所 | High repetition frequency attosecond pulse photoelectron and ion energy spectrum measuring system and method |
| CN109115660A (en) * | 2018-08-23 | 2019-01-01 | 金华职业技术学院 | A kind of particle imaging method |
| CN109887832A (en) * | 2019-03-01 | 2019-06-14 | 金华职业技术学院 | A kind of photoelectron time flight spectrum instrument |
| CN109887832B (en) * | 2019-03-01 | 2024-05-10 | 金华职业技术学院 | Photoelectron time-of-flight spectrometer |
| CN110018221A (en) * | 2019-03-02 | 2019-07-16 | 金华职业技术学院 | A kind of test device of the metal cluster of chemical modification |
| CN110018220A (en) * | 2019-03-02 | 2019-07-16 | 金华职业技术学院 | A kind of preparation and test method of the metal cluster of chemical modification |
| CN111103615A (en) * | 2019-12-19 | 2020-05-05 | 厦门大学 | High-resolution photoelectronic speed imaging device |
| CN112540117A (en) * | 2020-11-26 | 2021-03-23 | 厦门大学 | Gas phase in-situ mass spectrum detection device |
| CN113871287A (en) * | 2021-08-18 | 2021-12-31 | 中国科学院大学 | Device and method for preparing large amount of cold molecular ions |
| CN113871287B (en) * | 2021-08-18 | 2023-08-15 | 中国科学院大学 | Device and method for preparing large amount of cold molecular ions |
| CN113758990A (en) * | 2021-08-30 | 2021-12-07 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Reflective TOF device for cluster beam comprehensive deposition |
| CN113720899A (en) * | 2021-09-08 | 2021-11-30 | 中国科学院大连化学物理研究所 | High-resolution neutral cluster infrared spectrum device |
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