CN107727638A - A kind of laser Raman spectroscopy gas analyzer with resonator enhancing - Google Patents
A kind of laser Raman spectroscopy gas analyzer with resonator enhancing Download PDFInfo
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- CN107727638A CN107727638A CN201711067255.XA CN201711067255A CN107727638A CN 107727638 A CN107727638 A CN 107727638A CN 201711067255 A CN201711067255 A CN 201711067255A CN 107727638 A CN107727638 A CN 107727638A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
Abstract
The present invention provides a kind of laser Raman spectroscopy gas analyzer with resonator enhancing, by the temperature difference for adjusting tube wall, change the angle of tube head using thermal expansion, it is cavity mirror alignment laser beam, reach endovenous laser enhancing, and by adjusting the bulk temperature of heating film on tube wall, change and manage gentle chamber length, standing wave is formed in resonator, reaches the effect of endovenous laser enhancing；And reflector plate is integrated in hollow reflective pipe, mode-lock operation is carried out to resonator by conductive film, the structure of locked mode is carried out relative to reflector plate external in the prior art and by piezoelectric ceramics, the innovative point can realize more compact structure, and integrated form is easy to carry；Also by the electro-optic crystal of insertion, change refractive index, the light path for influenceing light to carry out phase-modulation to light, reaches the purpose of locked mode, strengthens resonance.
Description
Technical field
The present invention relates to aerochemistry analysis of components and detection technique field, and in particular to a kind of swashing with resonator enhancing
Light Raman spectrum gas analyzer.
Background technology
Laser Raman spectroscopy Analysis On Gaseous Constituentss are a kind of technologies developed in recent years.The technology has detection speed
It hurry up, sample less, multiple components, small volume can be analyzed simultaneously, safeguard the features such as simple and usage time is long, being especially suitable for online point
Analysis measurement industrial process gas component content.Laser Raman spectroscopy gas analysis technology can be applied to petroleum works gas detection logging,
Natural gas component detects and calorimetry, heat-treating atmosphere control, power plant soot control, the ironmaking of steel plant, steel-making, coking
The coal gas on-line analysis of journey, oil refining process gas-monitoring, fermentation process gas detection control, coal chemical industry, chemical fertilizer production, methanol and
Alcohol production, the field such as become more meticulous.
Resonator is as the important component in laser Raman spectroscopy gas analyzer, at present humorous to resonator progress
Shake regulation when, be that microdisplacement is produced under driving voltage by piezoelectric ceramics, so as to adjust between the terminal reflector of resonator two
Spacing, resonator locking laser beam longitudinal mode, strengthen endovenous laser beam energy.But resonance regulation is carried out by piezoelectric ceramics, needed
Piezoelectric ceramics to be installed on resonator, installation and debugging are complicated, and product size is larger, and cost is higher.Laser resonance cavity reflection
Mirror collimation requires high, and under the influence of temperature and air pressure, different degrees of bending occurs in the both ends of resonator, and then brings
The angle skew of speculum so that shoot laser weakened, influence the effect of detection and analysis.
Resonance regulation is carried out by piezoelectric ceramics, the design size of sample room is larger, while uses external speculum,
The design inconvenience of sample chamber size can be brought, it has not been convenient to carry, limit the application scenarios of product.
The content of the invention
The present invention provides a kind of laser Raman spectroscopy gas analyzer with resonator enhancing, by heating film or inserts
Enter the gentle chamber length of electro-optic crystal regulation resonance lumen, the angle of resonator tube head is adjusted by the temperature difference, reaches enhancing resonance effect.
In order to solve the above technical problems, the present invention adopts the following technical scheme that：
It is a kind of with resonator enhancing laser Raman spectroscopy gas analyzer, including successively light path connection resonator, dissipate
Light collecting device and spectrometer are penetrated, the resonator is built-in with hollow reflective pipe, and the laser end of the resonator is provided with incidence
Speculum, the detector end of resonator are provided with outgoing speculum, and the resonance cavity outer wall overlying is stamped heating film, the heating
Film electrically connects with external temperature controller.
It is a kind of with resonator enhancing laser Raman spectroscopy gas analyzer, including successively light path connection resonator, dissipate
Penetrate light collecting device and spectrometer, the resonator is hollow reflective pipe, the hollow reflective pipe relative to incident laser one end
Incidence reflection mirror is provided with, hollow reflective pipe is provided with outgoing speculum relative to the other end of shoot laser, described hollow anti-
Penetrate in pipe outer wall and electrically connected covered with heating film, the heating film with external temperature controller.
It is a kind of with resonator enhancing laser Raman spectroscopy gas analyzer, including successively light path connection resonator, dissipate
Light collecting device and spectrometer are penetrated, the resonator is built-in with hollow reflective pipe, and the laser end of the resonator is provided with incidence
Speculum, the detector end of resonator are provided with outgoing speculum, the laser between the incidence reflection mirror and outgoing speculum
Electro-optic crystal is provided with beam optical path, the electro-optic crystal carries out adjustable refractive index, the outgoing by external voltage driver
Speculum is connected with external detector light path, and the voltage driver is connected with the detector signal.
Further, the scattering light collecting device includes reflective filter, and the reflective filter includes light successively
Entrance lens, filtering assembly and the exit lens of road connection, the filtering assembly include sequentially forming the more of light path reflection connection
Individual filter plate.
Preferably, the filtering assembly includes one or more nitrogen filter plates, and one or more oxygen filter plates.
Preferably, the filtering assembly also includes one or more water filter plates.
Further, it is saturating to include the entrance lens of light path connection, filtering assembly, outgoing successively for the scattering light collecting device
Mirror and signal optical receiving end, the filtering assembly includes one or more dichroscopes, and is arranged at the saturating of dichroscope
Multiple bands resistance optical filter of side and reflection side is penetrated, the signal optical receiving end is placed on the transmitted light path of each band resistance optical filter,
Transmitted light and reflected light of the light after dichroscope are scattered, the signal of multiple spectrum segments is divided into by multiple bands resistance optical filter
Light.
Further, the spectrometer includes entrance lens, grating, camera lens and the sensor array of light path connection successively
Arrange, be provided with Mask filters on the receiving plane of the sensor array, the Mask filters can absorb or block nitrogen, oxygen
One or more strong spectral lines of gas, carbon dioxide and water.
Further, the spectrometer includes entrance lens, grating, camera lens and the sensor array of light path connection successively
Row, it is characterised in that Mask filters and imaging len are disposed with the light path between the camera lens and sensor array,
The Mask filters can absorb one or more strong spectral lines of nitrogen, oxygen, carbon dioxide and water.
Further, the heating film includes the temperature of two couple first being arranged circumferentially on the laser end outer wall of resonator
Spend module group, and two pairs of second temperature module groups being arranged circumferentially on the detector end outer wall of resonator, one pair of which the
One thermal module group is used to detect and control the temperature difference of laser end horizontal direction both sides, and another pair the first thermal module group is used for
Detect and control the temperature difference of laser end vertical direction both sides, one pair of which second temperature module group is used to detect and control detection
The temperature difference of device end horizontal direction both sides, another pair second temperature module group are used to detect and control detector end vertical direction both sides
The temperature difference.
Preferably, the thickness δ of the heating film and required heating power P has δ=L* ρ ' * P/ (U*U*w) relation,
Wherein L is film total length, and ρ ' is conductive film resistivity, and U is heating voltage, and w is the width of conductive film cross section.
Preferably, a stable locked mode region is formed in resonator, required heating power P has P=c* ρ * v*
λ/(2 α * l*t) relation, wherein v are resonator volume, and ρ is resonator density of material, and α is resonator material linear thermal expansion
Coefficient, c are specific heat capacity, and l is cavity length, and t is locked mode stabilization time.
Preferably, the lens tilt angle θ of the incidence reflection mirror and outgoing speculum has
Relation, wherein α is resonator material thermal linear expansion coefficient, and L is the length of single thermal module, and h is that eyeglass installs diameter,
T and T ' is respectively the temperature of resonance cavity outer wall horizontal direction both sides or vertical direction both sides outer wall.
From above technical scheme, the temperature difference of the invention by adjusting tube wall, thermal expansion is utilized to change the angle of tube head
Degree, it is cavity mirror alignment laser beam, reaches endovenous laser enhancing, and by adjusting the overall temperature of heating film on tube wall
Degree, change and manage gentle chamber length, standing wave is formed in resonator, reaches the effect of endovenous laser enhancing；And reflector plate is integrated in
In hollow reflective pipe, and mode-lock operation is carried out to resonator by conductive film, relative to reflector plate external in the prior art
And the structure of locked mode is carried out by piezoelectric ceramics, the innovative point can realize more compact structure, and integrated form is easy to carry,
And it is more standardized, production efficiency is high；Also by the electro-optic crystal of insertion, change refractive index, influence the light path of light to enter to light
Row phase-modulation, reach the purpose of locked mode, strengthen resonance.
Brief description of the drawings
Fig. 1 is the axial sectional view of the resonator of the embodiment of the present invention one；
Fig. 2 is the axial sectional view of the resonator of the embodiment of the present invention two；
Fig. 3 is the axial sectional view of the resonator of the embodiment of the present invention three；
Fig. 4 is the end view at resonance-cavity laser end in embodiment one；
Fig. 5 is the end view at resonance cavity detector end in embodiment one；
Fig. 6 is that the angle of speculum in embodiment one offsets schematic diagram；
Fig. 7 is scattering a kind of structural representation of preferred embodiment of light collecting device in the present invention；
Fig. 8 is the structural representation that light collecting device another kind preferred embodiment is scattered in the present invention；
Fig. 9 is a kind of structural representation of embodiment of grating spectrograph；
Figure 10 is the structural representation of grating spectrograph another kind embodiment；
Figure 11 is the schematic diagram of Mask filters；
Figure 12 is the preferred embodiment of heating film in the present invention.
Embodiment
A kind of preferred embodiment of the present invention is described in detail below in conjunction with the accompanying drawings.
Laser Raman spectroscopy gas analyzer of the present invention, including the resonator of light path connection, scattering light collecting device successively
And spectrometer, in order to realize the function of resonator enhancing, resonator is improved, it tied using three kinds of embodiments below
Structure illustrates.
Embodiment one
The present embodiment is the temperature difference by adjusting tube wall, changes the angle of tube head using thermal expansion, is resonance cavity reflection
Mirror is directed at laser beam, reaches endovenous laser enhancing, and by adjusting the bulk temperature of heating film on tube wall, change and manage gentle chamber
It is long, standing wave is formed in resonator, reaches the effect of endovenous laser enhancing.
As shown in figure 1, the resonator 10 includes resonator 20, and the hollow reflective pipe 30 being built in resonator,
The laser end of the resonator is provided with incidence reflection mirror 21, and the detector end of resonator is provided with outgoing speculum 22, described
Temperature controller 40 is provided with the outside of resonator.
Electrically connected on the outer wall of resonator 20 covered with heating film 50, the heating film with external temperature controller 40,
Heating film is a kind of heating power material, can use but be not limited to nickel, network, graphene, nickel complexing gold, constantan, and use
The mode of vacuum coating, etching or printing is realized.
The distribution adjustable space of the heating film 50 is big, and distribution is in diversity, as shown in figure 12, in the present embodiment, hair
In the S type structures being sequentially connected after hot film expansion, its both ends is separately provided for connecting the electrode 51 of temperature controller, such
Structure design is advantageous to the uniform of heating.Heating film can also use other multiple structural forms, as long as ensureing heating film
It is distributed substantially uniform, symmetrical.
The thickness of heating film 50 is determined by required heating power, film resistor formula:R=L* ρ '/(w* δ),
Required heating power:P=U*U/R, by above-mentioned two formula, obtain required film thickness：δ=L* ρ ' * P/ (U*U*w), wherein L is
Film total length, ρ ' are conductive film resistivity, and U is heating voltage, and w is the width of conductive film cross section.
The upper and lower surface of the heating film 50 is provided with insulation film, and the insulation film can be organic material
Material or inorganic material, insulating film material include but is not limited to silica, aluminum oxide, polyimides, polytetrafluoroethyl-ne
Alkene, its more than breakdown voltage 12V, more than thickness 100nm.Using vacuum coating or spraying into membrane meanses.
The temperature-controllable of the present embodiment resonator is high, wide temperature range (- 20 DEG C~200 DEG C), it is possible to achieve higher boiling
VOC gas test, the higher gas of water content, such as flue gas etc. can be monitored, without installing filter, the scope of application additional again
It is wider.
The present embodiment is by adjusting the bulk temperature of heating film on tube wall, and then the gentle chamber length of the pipe for changing resonator,
Standing wave is formed in resonator, forms locked mode effect, has the function that endovenous laser strengthens.It is stable in order to form one
Locked mode region, the length change amount Δ l of resonator need the half slightly larger than optical maser wavelength, i.e. Δ l=λ/2, optical maser wavelength with
The relevant Δ l=λ/2=α * l* Δ T of other specification of resonator, Δ T=λ/(2 α * l) is obtained, therefore keep stable mode-locking, it is required
Heating power P has P=c* ρ * v* Δ T/t=c* ρ * v* λ/(2 α * l*t) relation, and wherein v is resonator volume, and ρ is resonance
Cavity material density, α are resonator material thermal linear expansion coefficient, and c is specific heat capacity, and l is cavity length, when t is that locked mode is stable
Between.
Resonance cavity material includes but is not limited to quartz, and aluminium, copper, invar, locked mode time requirement is different, and resonance cavity material is not
Together, different power demands can be obtained.Locked mode integrated design of the present invention, mechanical stability number, it can be achieved under complex environment
Monitoring.
The present embodiment can also adjust the angle of resonator both sides tube head by pipe temperature, meet autocollimatic requirement, and this is needed
Heating film 50 is split, control the temperature of resonator both ends outer wall horizontal direction both sides or vertical direction both sides respectively
Difference, the angle of tube head is controlled according to the principle expanded with heat and contract with cold.In the present embodiment, heating film is uniformly divided into 8 heating strips, both ends
Each 4 heating strips, it is mutually symmetrical with.
As shown in Figures 4 and 5, four heating strips being arranged circumferentially on the laser end outer wall 23 of resonator, two pairs are formed
First thermal module, four heating strips being arranged circumferentially on the detector end outer wall 24 of resonator, form two pairs of second temperatures
Module, the first thermal module of one pair of which group 521 are used to detect and control the temperature difference of laser end horizontal direction both sides, another pair
First thermal module group 522 is used to detect and control the temperature difference of laser end vertical direction both sides, one pair of which second temperature mould
Block group 531 is used to detect and control the temperature difference of detector end horizontal direction both sides, and another pair second temperature module group 532 is used to examine
Survey and control the temperature difference of detector end vertical direction both sides.
Said temperature module group is combined, and the chamber of resonator can also be controlled to grow, controlled by bulk temperature change.
Every a pair of thermal modules group can control the angle of elbow, particular by two phases in control thermal module group
Small temperature difference between the heating strip of setting is realized.
As shown in fig. 6, incidence reflection mirror 21 and outgoing speculum 22 because of the influence of environment temperature and air pressure to resonator and
When misplacing, the eyeglass dislocation of its one end is Δ d=α * L* (T-T '), and wherein α is resonator material thermal linear expansion coefficient,
L is the length of single thermal module, and T and T ' are respectively the temperature of resonance cavity outer wall horizontal direction both sides or vertical direction both sides outer wall
Degree.Therefore lens tilt angle has sin θ=Δ d/h=α * L* (T-T ')/h relation, and wherein h is that eyeglass installs diameter, is obtained
Lens tilt angleBy controlling heating module small temperature difference, it is possible to achieve the control of lens angle
System.
Fig. 1 only shows temperature controller electric connection mode when heating film controls as bulk temperature, and controls angle of bend
Heating film in every a pair of thermal modules group individually electrically connected with temperature controller 40, temperature controller enters to every a pair of thermal modules group
Row individually control, the temperature controller find maximum letter intensity, and then detect and control tube head by temperature dynamic scanning small temperature difference
Angle.
Embodiment two
It is functional that the institute of resonator is substituted in the present embodiment using hollow reflective pipe, reflector plate is integrated in hollow reflective pipe
In, and mode-lock operation is carried out to resonator by conductive film, relative to reflector plate external in the prior art and pass through pressure
Electroceramics carries out the structure of locked mode, and the innovative point can realize more compact structure, and integrated form is easy to carry, and more standard
Change, production efficiency is high.
As shown in Fig. 2 being provided with temperature controller 30 on the outside of the hollow reflective pipe, covered on the outer wall of hollow reflective pipe 20
There is heating film 50, the heating film electrically connects with external temperature controller 30, and heating film is a kind of heating power material, can be with
Using but be not limited to nickel, network, graphene, nickel complexing gold, constantan, and realized by the way of vacuum coating, etching or printing.
By adjusting the bulk temperature of heating film on tube wall, change and manage gentle chamber length, formed and stayed in hollow reflective pipe
Ripple, reach the effect of endovenous laser enhancing, mode-lock operation is carried out to resonator.In the present embodiment, heating film and embodiment 1
Unanimously.
The hollow reflective pipe 20 is provided with incidence reflection mirror 21 relative to one end of incident laser, and hollow reflective pipe is relative
The other end of shoot laser is provided with outgoing speculum 22, laser beam enters in hollow reflective pipe from incidence reflection mirror, in sky
Oculo cardiac reflex pipe internal communication, scattering light is produced with gas molecule effect to be analyzed in pipe, scattering light passes through inside hollow reflective pipe
After crossing tube wall multiple reflections, projected from the one or both ends of hollow reflective pipe.An air inlet 23 is provided with hollow reflective pipe,
Another gas outlet can also be set.
Incidence reflection mirror 21 and outgoing speculum 22 are embedded in the both ends of hollow reflective pipe by the present embodiment, greatly reduce
The volume of sample room, is easy to carry, available in more complex environment.
Embodiment three
As shown in figure 3, the resonator is built-in with hollow reflective pipe 30, the laser end of the resonator is provided with incidence instead
Mirror 21 is penetrated, the detector end of optical resonator is provided with outgoing speculum 22.
The present embodiment is to combine spy by inserting electro-optic crystal 40 in resonator, and using external voltage driver 50
The feedback signal that device 60 perceives is surveyed, to adjust the refractive index of electro-optic crystal, the light path for influenceing light to carry out phase-modulation to light, reaches
To the purpose of locked mode.
Wherein, detector 60 is arranged on the detector end of optical resonator, is connected, can make with the outgoing light path of speculum 22
By the use of photodiode as detector, for detecting laser emitting end intensity, the feedback letter as electro-optic crystal adjustable refractive index
Number.
The electro-optic crystal 40 is arranged between incidence reflection mirror 21 and outgoing speculum 22, in the level of the electro-optic crystal
Line is located on the laser beam optical path of optical resonance intracavitary, to reduce machine error.The electro-optic crystal passes through supporting part and optics
Resonance cavity wall connects, and electro-optic crystal is arranged on detector end and the laser end of optical resonator.
The electro-optic crystal 40 carries out adjustable refractive index by external voltage driver 50, the voltage driver with it is described
The signal of detector 60 connects, and the detector is located in laser emitting light path, when detector detects signal intensity demand for maximum
Signal, peak value control is dynamically found by scanning voltage, specific principle it is as follows：
Refractive index n=n after the added electric field of the electro-optic crystal0+ m*U/L, wherein L are the length of electro-optic crystal, and U is edge
The voltage that the Z axis of electro-optic crystal applies, n0For initial refractive rate, m is constant, related to electro-optic crystal electro-optic coefficient.
The scattered light signal of resonator outgoing is collected by filtration by scattering light collecting device, and the invention provides two kinds
Specific embodiment.
A kind of embodiment as shown in Figure 7, the scattering light collecting device include the reflective filter after improving, and this is anti-
Penetrating formula filter includes entrance lens 10, filtering assembly 20 and the exit lens 30 of light path connection successively, the filtering assembly bag
Include one or more nitrogen filter plates, one or more oxygen filter plates and the one or more for sequentially forming light path reflection connection
Water filter plate.The quantity of nitrogen filter plate, oxygen filter plate and water filter plate is according under test gas species in mixed gas
Content is come what is designed, and content is lower, it is necessary to the number of filter nitrogen, oxygen and water is more, the quantity of corresponding filter plate
It is more.
In the present embodiment, the content of oxygen is 21% in air, and the content of nitrogen is 78%, it is therefore desirable to two nitrogen filters
Wave plate, the filtering assembly 20 include the first nitrogen filter plate 21, the second nitrogen filter plate 22, the first oxygen filter plate 23 and the
One water filter plate 24, light source enter from lens 10 are injected, and pass through the first nitrogen filter plate, the second nitrogen filter plate, the first oxygen
Filter plate and the first water filter plate are projected after reflecting successively by exit lens 30.Wherein, the first nitrogen filter plate 21 and first
Oxygen filter plate 23 is located at the same side, and the second nitrogen filter plate 22 is located at parallel opposite side with the first water filter plate 24.
By two nitrogen filter plates, an oxygen filter plate and a water filter plate, strong spectral line has been effectively eliminated,
Noise can largely be reduced, improve signal to noise ratio.
Notch filtering light piece 40 and bandpass filter can also be disposed between the nitrogen filter plate 21 of entrance lens 10 and first
Piece 50, optical signal pass through this two panels filter plate after sample room is entered, edge veiling glare and Rayleigh scattering light in signal and
Laser is all filtered, and so as to reduce influence of the strong light to spectrum, improves signal to noise ratio and the detection limit of measurement.
Compared to existing collection system, the advantages of the present embodiment is not only integrated with above collecting chamber and filter, and
The collection efficiency of Raman light is improved, reduces 5% signal light loss, reduces the volume of collection system.
Another embodiment as shown in Figure 8, the scattering light collecting device include the entrance lens of light path connection successively
10th, filtering assembly 20, exit lens 30 and signal optical receiving end 40, the scattering light from resonator scattering outlet, from incidence
Lens enter, and strong spectral line is filtered by filtering assembly, then project entering signal optical receiving end from exit lens, should
Signal optical receiving end uses detector array.
Innovative point of the present invention is that filtering assembly uses one or more dichroscopes, and is arranged at the transmission of dichroscope
Multiple bands of side and reflection side hinder optical filter, and the signal optical receiving end is placed on the transmitted light path of each band resistance optical filter, dissipated
Transmitted light and reflected light of the light after dichroscope are penetrated, the flashlight of multiple spectrum segments is divided into by multiple bands resistance optical filter,
Signal optical receiving end corresponding to the flashlight entrance of each spectrum segment, signal optical receiving end connect the defeated of spectrometer by fibre bundle
Enter end, spectrum is segmented, be advantageous to improve the resolution ratio of spectrum analysis, and the small chi of multiple only narrow spectral responses can be used
Very little optical arrays detector group reaches the effect of spread spectrum response range, so as to which alternative cost is high or is difficult to the single wide light obtained
Spectrum response large scale optical arrays detector.
As shown in figure 8, the filtering assembly 20 includes first paragraph dichroscope 21, second segment dichroscope 22, first band
Hinder the band resistance optical filter 25 of the band resistance of optical filter 23, second optical filter 24 and the 3rd, wherein first paragraph dichroscope and second segment two to
Look mirror is located on same light path straight line, and the first band resistance optical filter is arranged on the reflection side of first paragraph dichroscope, the second band
Resistance optical filter is arranged on the reflection side of second segment dichroscope, and the 3rd is arranged on the transmission of second segment dichroscope with resistance optical filter
Side, the first paragraph dichroscope conversely can also be identical with the refractive direction of second segment dichroscope.First band resistance optical filtering 23
Piece, second with resistance optical filter 24 and the 3rd band hinder optical filter 25 transmitted light path on be provided with signal optical receiving end 40.
When being particularly applicable in gas Raman detection application, 200-4200 wave-number ranges can be divided into three sections.Flashlight leads to
Cross first paragraph dichroscope and first band resistance optical filter filters out the flashlight that wave number is 200~1545；Pass through second segment two again
The flashlight that wave number is 1605~2335 is filtered out with resistance optical filter to Look mirror piece and second；Optical filter is hindered finally by the 3rd band
Filter out the flashlight that wave number is 2380~4200., can be with for receiving the spectrometer of the different flashlight of multiple wave-number ranges
It is the spectrometer of multiple independent spectrometers or integrated form.
It is described to scatter the flashlight after light collecting device is collected by filtration, eventually enter into spectrometer and carry out signal analysis,
The invention provides the two of spectrometer kind specific embodiment.
A kind of embodiment as shown in Figure 9, the grating spectrograph include entrance lens 10, the grating of light path connection successively
20th, camera lens 30 and sensor array 40, entrance lens can use achromatic lens.The reception of the sensor array 40
Mask filters 50 are provided with face, the Mask filters can absorb the one or more of nitrogen, oxygen, carbon dioxide and water
Strong spectral line.Stronger Raman signal can be suppressed using Mask filters, the Mask filters can use glass basis,
Rule on glass basis, obstruct the peak value of strong spectral line, as shown in figure 11.The hollow out knot that metal back layer can also be used to be formed
Structure.
Another embodiment as shown in Figure 10, the present embodiment and the difference of a upper embodiment be, the camera lens
Mask filters 50 and imaging len 60, Mask filters and sensor are disposed with light path between 30 and sensor array 40
Array is separation, and compared to the grating spectrograph of embodiment 1, scattering light of the strong spectral line on Mask filters passes through lens
Non-imaged areas and the edge zone of sensor are imaged on, further reduces influence of the veiling glare to spectrum.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention
Enclose and be defined, on the premise of design spirit of the present invention is not departed from, technical side of the those of ordinary skill in the art to the present invention
The various modifications and improvement that case is made, it should fall into the protection domain of claims of the present invention determination.
Claims (25)
1. a kind of laser Raman spectroscopy gas analyzer with resonator enhancing, including the resonator of light path connection, scattering successively
Light collecting device and spectrometer, the resonator are built-in with hollow reflective pipe, and the laser end of the resonator is provided with incidence instead
Mirror is penetrated, the detector end of resonator is provided with outgoing speculum, it is characterised in that it is thin that the resonance cavity outer wall overlying is stamped heating
Film, the heating film electrically connect with external temperature controller.
2. a kind of laser Raman spectroscopy gas analyzer with resonator enhancing, including the resonator of light path connection, scattering successively
Light collecting device and spectrometer, it is characterised in that the resonator is hollow reflective pipe, and the hollow reflective pipe swashs relative to incidence
One end of light is provided with incidence reflection mirror, and hollow reflective pipe is provided with outgoing speculum, institute relative to the other end of shoot laser
State and electrically connected in hollow reflective pipe outer wall covered with heating film, the heating film with external temperature controller.
3. a kind of laser Raman spectroscopy gas analyzer with resonator enhancing, including the resonator of light path connection, scattering successively
Light collecting device and spectrometer, the resonator are built-in with hollow reflective pipe, and the laser end of the resonator is provided with incidence instead
Penetrate mirror, the detector end of resonator is provided with outgoing speculum, it is characterised in that the incidence reflection mirror with outgoing speculum it
Between laser beam optical path on be provided with electro-optic crystal, the electro-optic crystal carries out adjustable refractive index by external voltage driver,
The outgoing speculum is connected with external detector light path, and the voltage driver is connected with the detector signal.
4. according to the laser Raman spectroscopy gas analyzer described in claim any one of 1-3, it is characterised in that the scattering light
Collection device includes reflective filter, the reflective filter include successively the entrance lens of light path connection, filtering assembly and
Exit lens, the filtering assembly include the multiple filter plates for sequentially forming light path reflection connection.
5. laser Raman spectroscopy gas analyzer according to claim 4, it is characterised in that the filtering assembly includes one
Individual or multiple nitrogen filter plates, and one or more oxygen filter plates.
6. laser Raman spectroscopy gas analyzer according to claim 5, it is characterised in that the filtering assembly also includes
One or more water filter plates.
7. according to the laser Raman spectroscopy gas analyzer described in claim any one of 5-6, it is characterised in that described incident saturating
Notch filtering light piece and bandpass filter are disposed between mirror and nitrogen filter plate.
8. according to the laser Raman spectroscopy gas analyzer described in claim any one of 1-3, it is characterised in that the scattering light
Collection device includes entrance lens, filtering assembly, exit lens and the signal optical receiving end of light path connection successively, the optical filtering
Component includes one or more dichroscopes, and is arranged at multiple bands resistance optical filtering of the transmissive side and reflection side of dichroscope
Piece, the signal optical receiving end are placed on the transmitted light path of each band resistance optical filter, transmission of the scattering light after dichroscope
Light and reflected light, the flashlight of multiple spectrum segments is divided into by multiple bands resistance optical filter.
9. laser Raman spectroscopy gas analyzer according to claim 8, it is characterised in that the dichroscope includes position
In first paragraph dichroscope and second segment dichroscope on same light path straight line, the reflection side of the first paragraph dichroscope is set
There is first band to hinder optical filter, the reflection side of second segment dichroscope is provided with the second band resistance optical filter, second segment dichroscope
Transmissive side is provided with the 3rd band resistance optical filter.
10. laser Raman spectroscopy gas analyzer according to claim 9, it is characterised in that the first paragraph dichroic
Mirror is opposite with the refractive direction of second segment dichroscope.
11. according to the laser Raman spectroscopy gas analyzer described in any one of claim 9 and 10, it is characterised in that the letter
Number optical receiving end uses detector array.
12. according to the laser Raman spectroscopy gas analyzer described in claim any one of 1-3, it is characterised in that the spectrum
Instrument includes entrance lens, grating, camera lens and the sensor array of light path connection successively, the receiving plane of the sensor array
On be provided with Mask filters, the Mask filters can absorb or block one kind or more of nitrogen, oxygen, carbon dioxide and water
Kind strong spectral line.
13. according to the laser Raman spectroscopy gas analyzer described in claim any one of 1-3, it is characterised in that the spectrum
Instrument includes entrance lens, grating, camera lens and the sensor array of light path connection successively, it is characterised in that the camera mirror
Mask filters and imaging len are disposed with light path between head and sensor array, the Mask filters can absorb or hide
Keep off one or more strong spectral lines of nitrogen, oxygen, carbon dioxide and water.
14. the laser Raman spectroscopy gas analyzer according to claim 12 or 13, it is characterised in that the entrance lens
Using achromatic lens.
15. laser Raman spectroscopy gas analyzer according to claim 1, it is characterised in that the heating film includes
Two couples the first thermal module group being arranged circumferentially on the laser end outer wall of resonator, and it is arranged circumferentially in the spy of resonator
The two pairs of second temperature module groups surveyed on the outer wall of device end, the first thermal module of one pair of which group are used to detect and control laser end
The temperature difference of horizontal direction both sides, the first thermal module of another pair group are used to detect and control the temperature of laser end vertical direction both sides
Difference, one pair of which second temperature module group are used to detect and control the temperature difference of detector end horizontal direction both sides, another pair second
Thermal module group is used to detect and control the temperature difference of detector end vertical direction both sides.
16. laser Raman spectroscopy gas analyzer according to claim 15, it is characterised in that first thermal module
Group and second temperature module group include being oppositely arranged on the heating strip of resonance cavity outer wall horizontal direction both sides or vertical direction both sides.
17. according to the laser Raman spectroscopy gas analyzer described in claim 1,2,15 or 16 any one, it is characterised in that institute
Heating strip is stated using the S type structures being sequentially connected, its both ends is separately provided for connecting the electrode of temperature controller.
18. according to the laser Raman spectroscopy gas analyzer described in claim 1,2 or 15 any one, it is characterised in that described
The upper and lower surface of heating film is provided with insulation film.
19. according to the laser Raman spectroscopy gas analyzer described in claim 1,2 or 15 any one, it is characterised in that described
The thickness δ of heating film and required heating power P has δ=L* ρ ' * P/ (U*U*w) relation, and wherein L is film total length,
ρ ' is conductive film resistivity, and U is heating voltage, and w is the width of conductive film cross section.
20. according to the laser Raman spectroscopy gas analyzer described in claim 1-3 or 15 any one, it is characterised in that humorous
Intracavitary of shaking forms a stable locked mode region, and required heating power P has P=c* ρ * v* λ/(2 α * l*t) relation, its
Middle v is resonator volume, and ρ is resonator density of material, and α is resonator material thermal linear expansion coefficient, and c is specific heat capacity, and l is humorous
Shake cavity length, and t is locked mode stabilization time.
21. according to the laser Raman spectroscopy gas analyzer described in any one of claim 15 or 16, it is characterised in that it is described enter
The lens tilt angle θ for penetrating speculum and being emitted speculum hasRelation, wherein α is resonator material
Expect thermal linear expansion coefficient, L is the length of single thermal module, and h is that eyeglass installs diameter, and T and T ' are respectively resonance cavity outer wall
Horizontal direction both sides or the temperature of vertical direction both sides outer wall.
22. laser Raman spectroscopy gas analyzer according to claim 2, it is characterised in that on the hollow reflective pipe
Offer air inlet.
23. laser Raman spectroscopy gas analyzer according to claim 3, it is characterised in that the electro-optic crystal adds
Refractive index n=n after electric field0+ m*U/L, wherein L are the length of electro-optic crystal, and U is the voltage applied along the Z axis of electro-optic crystal,
n0For initial refractive rate, m is constant, related to electro-optic crystal electro-optic coefficient.
24. laser Raman spectroscopy gas analyzer according to claim 3, it is characterised in that the electro-optic crystal passes through
Supporting part is connected with resonance cavity wall.
25. according to the laser Raman spectroscopy gas analyzer described in claim 3,23 and 24 any one, it is characterised in that described
Electro-optic crystal is located on the laser beam optical path in resonator.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108764097A (en) * | 2018-05-21 | 2018-11-06 | 北京理工大学 | A kind of high-spectrum remote sensing target identification method based on segmentation rarefaction representation |
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1331710A1 (en) * | 2002-01-23 | 2003-07-30 | Agilent Technologies, Inc. (a Delaware corporation) | Semiconductor laser |
| CN1497800A (en) * | 2002-10-16 | 2004-05-19 | 伊斯曼柯达公司 | External cavity organic laser |
| EP1721370A2 (en) * | 2004-02-23 | 2006-11-15 | Powerlase Limited | A laser apparatus |
| CN101820131A (en) * | 2010-04-02 | 2010-09-01 | 长春理工大学 | Electro-optical crystal lens Q-switch resonant cavity for realizing high-peak power output |
| CN102830107A (en) * | 2012-09-04 | 2012-12-19 | 南京信息工程大学 | Laser radar detection method and system for measuring contents of solid water and liquid water in cloud |
| CN103022622A (en) * | 2011-09-20 | 2013-04-03 | 豪尼机械制造股份公司 | Microwave resonator chamber housing |
| CN104377540A (en) * | 2014-12-14 | 2015-02-25 | 中国科学技术大学 | Resonant cavity system with automatic output power optimization function for high-power solid laser device |
| CN104880711A (en) * | 2015-05-18 | 2015-09-02 | 中国科学院合肥物质科学研究院 | Single-wavelength four-Raman laser radar detection system and detection method |
| CN105698820A (en) * | 2016-01-27 | 2016-06-22 | 中国人民解放军国防科学技术大学 | Device for actively compensating jittering deformation of cavity translation mirror of laser gyro |
| CN105987895A (en) * | 2015-03-05 | 2016-10-05 | 陈利平 | Laser-raman spectrum gas analyzer |
| CN106483069A (en) * | 2015-08-26 | 2017-03-08 | 西安泰戈分析仪器有限责任公司 | Trace gas on-line analyses device based on cavity attenuation and vibration technique |
| US20170074786A1 (en) * | 2015-03-09 | 2017-03-16 | California Institute Of Technology | Radiation Detector and Method Therefor |
| WO2016179693A8 (en) * | 2015-05-11 | 2017-05-26 | 9334-3275 Quebec Inc. | Photoacoustic detector |
| CN107064908A (en) * | 2017-04-25 | 2017-08-18 | 北方民族大学 | A kind of multi-wavelength polarizes Raman lidar beam splitting system |
| CN107342450A (en) * | 2017-07-11 | 2017-11-10 | 中国电子科技集团公司第十六研究所 | A kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser |
-
2017
- 2017-11-02 CN CN201711067255.XA patent/CN107727638B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1331710A1 (en) * | 2002-01-23 | 2003-07-30 | Agilent Technologies, Inc. (a Delaware corporation) | Semiconductor laser |
| CN1497800A (en) * | 2002-10-16 | 2004-05-19 | 伊斯曼柯达公司 | External cavity organic laser |
| EP1721370A2 (en) * | 2004-02-23 | 2006-11-15 | Powerlase Limited | A laser apparatus |
| CN101820131A (en) * | 2010-04-02 | 2010-09-01 | 长春理工大学 | Electro-optical crystal lens Q-switch resonant cavity for realizing high-peak power output |
| CN103022622A (en) * | 2011-09-20 | 2013-04-03 | 豪尼机械制造股份公司 | Microwave resonator chamber housing |
| CN102830107A (en) * | 2012-09-04 | 2012-12-19 | 南京信息工程大学 | Laser radar detection method and system for measuring contents of solid water and liquid water in cloud |
| CN104377540A (en) * | 2014-12-14 | 2015-02-25 | 中国科学技术大学 | Resonant cavity system with automatic output power optimization function for high-power solid laser device |
| CN105987895A (en) * | 2015-03-05 | 2016-10-05 | 陈利平 | Laser-raman spectrum gas analyzer |
| US20170074786A1 (en) * | 2015-03-09 | 2017-03-16 | California Institute Of Technology | Radiation Detector and Method Therefor |
| WO2016179693A8 (en) * | 2015-05-11 | 2017-05-26 | 9334-3275 Quebec Inc. | Photoacoustic detector |
| CN104880711A (en) * | 2015-05-18 | 2015-09-02 | 中国科学院合肥物质科学研究院 | Single-wavelength four-Raman laser radar detection system and detection method |
| CN106483069A (en) * | 2015-08-26 | 2017-03-08 | 西安泰戈分析仪器有限责任公司 | Trace gas on-line analyses device based on cavity attenuation and vibration technique |
| CN105698820A (en) * | 2016-01-27 | 2016-06-22 | 中国人民解放军国防科学技术大学 | Device for actively compensating jittering deformation of cavity translation mirror of laser gyro |
| CN107064908A (en) * | 2017-04-25 | 2017-08-18 | 北方民族大学 | A kind of multi-wavelength polarizes Raman lidar beam splitting system |
| CN107342450A (en) * | 2017-07-11 | 2017-11-10 | 中国电子科技集团公司第十六研究所 | A kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser |
Non-Patent Citations (3)
| Title |
|---|
| M. VAINIO ET AL.: "Thermal effects in singly resonant continuous-wave optical parametric oscillators", 《APPL PHYS B》 * |
| 陈海燕: "《激光原理与技术》", 31 January 2016, 国防工业出版社 * |
| 黄静 等: "《现代通信光电子技术基础及应用》", 30 November 2013, 西安电子科技大学出版社 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108764097B (en) * | 2018-05-21 | 2021-07-20 | 北京理工大学 | High-spectrum remote sensing image target identification method based on segmented sparse representation |
| CN108764097A (en) * | 2018-05-21 | 2018-11-06 | 北京理工大学 | A kind of high-spectrum remote sensing target identification method based on segmentation rarefaction representation |
| CN108830253A (en) * | 2018-06-27 | 2018-11-16 | 中石化西南石油工程有限公司地质录井分公司 | Screening model method for building up, spectrum screening plant and method |
| CN108830253B (en) * | 2018-06-27 | 2021-11-26 | 中石化西南石油工程有限公司地质录井分公司 | Screening model establishing method, spectrum screening device and method |
| CN110715726A (en) * | 2018-07-12 | 2020-01-21 | 中国移动通信集团设计院有限公司 | Visible light detection device and method |
| CN110715726B (en) * | 2018-07-12 | 2021-09-28 | 中国移动通信集团设计院有限公司 | Visible light detection device and method |
| CN109580586A (en) * | 2019-01-07 | 2019-04-05 | 重庆大学 | SF6Decompose gas joint enhancing Raman spectrum detecting device and detection method |
| CN109765184A (en) * | 2019-01-16 | 2019-05-17 | 深圳供电局有限公司 | Optical gas absorbance pond and optical gas detection system |
| CN110031410A (en) * | 2019-04-15 | 2019-07-19 | 中国科学院光电研究院 | A kind of laser, which declines, swings detection device |
| CN112986160A (en) * | 2021-01-16 | 2021-06-18 | 西安交通大学 | Multispectral high-speed imaging device for realizing scanning deflection based on DKDP crystal |
| CN112986160B (en) * | 2021-01-16 | 2022-05-20 | 西安交通大学 | Multispectral high-speed imaging device for realizing scanning deflection based on DKDP crystal |
| CN114384059A (en) * | 2022-01-10 | 2022-04-22 | 北京华泰诺安技术有限公司 | Gas detection device and method |
| CN114384059B (en) * | 2022-01-10 | 2023-10-13 | 北京华泰诺安技术有限公司 | Gas detection device and method |
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