CN107342450A - A kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser - Google Patents
A kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser Download PDFInfo
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- CN107342450A CN107342450A CN201710559968.1A CN201710559968A CN107342450A CN 107342450 A CN107342450 A CN 107342450A CN 201710559968 A CN201710559968 A CN 201710559968A CN 107342450 A CN107342450 A CN 107342450A
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- microstrip resonator
- superconducting microstrip
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- fine lines
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
- H01P11/008—Manufacturing resonators
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Abstract
The present invention relates to a kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser, comprise the following steps：（1）According to layout of the superconducting microstrip resonator main line bar in whole superconductive micro-strip circuit, close coupling region is determined.（2）Fine lines layout area is determined according to layout, the physical dimension of superconducting microstrip resonator main line bar and laser focal spot diameter of the superconducting microstrip resonator main line bar in whole superconductive micro-strip circuit.（3）The fine lines being connected with superconducting microstrip resonator main line bar are set in fine lines layout area.（4）When setting fine lines, the physical dimension of superconducting microstrip resonator main line bar is adjusted accordingly.The problem of super conductive filter frequency that the present invention can solve the problem that superconducting microstrip resonator and be made from it can not be adjusted accurately, to reach the purpose saved development cost, shorten the lead time.
Description
Technical field
The present invention relates to microwave engineering techniques field, and in particular to a kind of superconductive micro-strip that frequency can be accurately adjusted with laser
The design method of resonator.
Background technology
In all kinds of microwave systems such as microwave receiver, long-range radar detecting, super conductive filter is widely used.
Micro-strip resonantor is the elementary cell for forming microstrip filter.At present, make used in superconducting micro band filter
Micro-strip resonantor form has：Hair clip type, single-screw type, double helical form, meander configuration, L-type, U-shaped, parallel line type etc..And existing set
The superconducting microstrip resonator of meter method design does not possess the fine linear for being easy to that frequency adjustment is realized with laser, uses this
Only with operating ambient temperature change trickle change occurs for the wave filter that quasi resonant oscillator makes, passband or stopband, in building ring
In the case of the term restriction of border, it is difficult to accurate to adjust passband or stop-band frequency to meet index request.Such as resonator or wave filter
Frequency does not meet index request, then needs to remake.Cost is big, cycle length.It is general for cost-effective consideration, research institute
All over wishing that design, the manufacture number of occurrence are more few better, it is harsh to make required precision for design accuracy and technique.
The content of the invention
It is an object of the invention to provide a kind of design side for the superconducting microstrip resonator that frequency can be accurately adjusted with laser
Method, the problem of super conductive filter frequency that this method can solve the problem that superconducting microstrip resonator and be made from it can not be adjusted accurately,
To reach the purpose saved development cost, shorten the lead time.
To achieve the above object, present invention employs following technical scheme：
A kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser, the superconducting microstrip resonator include super
Lead chip substrate, the signal being separately positioned on superconduction chip substrate excitation end and superconducting microstrip resonator main line bar and with surpassing
Lead the connected fine lines of micro-strip resonantor main line bar.
The design method of the superconducting microstrip resonator comprises the following steps：
（1）According to layout of the superconducting microstrip resonator main line bar in whole superconductive micro-strip circuit, close coupling region is determined.Band logical
The close coupling region of wave filter is between resonator and between resonator and signal excitation end；The close coupling of bandstop filter
Region is between resonator and main transmission line and between resonator.
（2）According to layout of the superconducting microstrip resonator main line bar in whole superconductive micro-strip circuit, superconducting microstrip resonator
The physical dimension and laser focal spot diameter of main line bar determine fine lines layout area.Laser focal spot is laser process equipment
Parameter, laser that laser is sent is referred to after lens are assembled, light beam is concentrated into a high-energy on lens focal plane
The hot spot of density.
（3）The fine lines being connected with superconducting microstrip resonator main line bar are set in fine lines layout area.
（4）When setting fine lines, the physical dimension of superconducting microstrip resonator main line bar is adjusted accordingly.
Further, fine lines and superconducting microstrip resonator main line the strip adoption identical material.
Further, the width of the fine lines is less than the width of superconducting microstrip resonator main line bar.
Further, the fine lines layout area is located on the superconduction chip substrate beyond close coupling region.
Further, the fine lines surrounding space size is more than the size of laser focal spot, is so designed to adopting
Target lines are trimmed with laser focal spot（Fine lines）When, laser focal spot will not be made to be irradiated on other lines.
From above technical scheme, the present invention is used to design the superconductive micro-strip realized and be easy to accurately be adjusted frequency with laser
Resonator, the resonator realized is designed after the completion of circuit photoetching through the present invention, fine lines are trimmed using laser, so as to real
The accurate adjustment and amendment of existing resonator resonant frequency.Through the resonator that present invention design is realized as the basic of composition wave filter
Unit, the superconducting micro band filter that frequency can be adjusted accurately can be made by being applied in combination（It is bandpass filter, bandstop filter, more
The types of devices such as work device）.
Brief description of the drawings
Fig. 1 is the structural representation of the superconducting microstrip resonator in the present invention；
Fig. 2 is the design method schematic diagram of the superconducting microstrip resonator in the present invention；
Fig. 3 is the design method flow chart of existing super conductive filter；
Fig. 4 is the design method flow chart using the super conductive filter of superconducting microstrip resonator in the present invention；
Fig. 5 is the accurate adjustment schematic diagram of superconducting microstrip resonator resonant frequency before and after laser trimming in the present invention；
Fig. 6-1 be using the present invention in superconducting microstrip resonator super conductive filter laser trimming before and after resonant frequency it is accurate
Adjust schematic diagram；
Fig. 6-2 is that resonant frequency obtains essence before and after laser trimming using the super conductive filter of superconducting microstrip resonator in the present invention
The schematic diagram one really adjusted；
Fig. 6-3 is that resonant frequency obtains essence before and after laser trimming using the super conductive filter of superconducting microstrip resonator in the present invention
The schematic diagram two really adjusted.
Wherein：
1st, superconduction chip substrate, 2, signal excitation end, 3, close coupling region, 4, superconducting microstrip resonator main line bar, 5, glass-coated microwire
Bar layout area, 6, fine lines.
Embodiment
The present invention will be further described below in conjunction with the accompanying drawings：
A kind of design method of superconducting microstrip resonator that frequency can be accurately adjusted with laser as Figure 1-Figure 2, the superconduction
Micro-strip resonantor includes superconduction chip substrate 1, the signal being separately positioned on superconduction chip substrate 1 excitation end 2 and superconductive micro-strip
Resonator main line bar 4 and the fine lines 6 being connected with superconducting microstrip resonator main line bar 4.Fine lines 6 and superconductive micro-strip are humorous
The device main line bar 4 that shakes is located at same substrate surface.Superconducting microstrip resonator main line bar 4 and fine the lines phase at non-close coupling side
Even.The fine lines, adjustment is trimmed for laser of the optical graving after standby.The present invention passes through in different fine of structure design
Laser trimming is carried out on lines, accurate adjustment of the resonator resonant frequency to high frequency or low frequency can be realized.The superconductive micro-strip
The structure designs such as resonator main line bar and the plane figure of fine lines and topological structure are different.Preferably, the fine lines
Thin and straight line segment can be designed to or be designed to close ring.When fine lines are designed as close ring, with laser in the closure
Ring different parts interrupt, and the amplitude of frequency adjustment is different, and the direction of frequency adjustment is also different（Can be to high frequency deviation, also can be to low frequency
Partially）.
As shown in Fig. 2 the design method of the superconducting microstrip resonator comprises the following steps：
（1）According to layout of the superconducting microstrip resonator main line bar 4 in whole superconductive micro-strip circuit, close coupling region 3 is determined.Band
The close coupling region of bandpass filter is between resonator and between resonator and signal excitation end, the strong coupling of bandstop filter
Region is closed between resonator and main transmission line and between resonator.
（2）According to layout of the superconducting microstrip resonator main line bar 4 in whole superconductive micro-strip circuit, superconducting microstrip resonator
The physical dimension and laser focal spot diameter of main line bar 4 determine fine lines layout area 5.Using microwave designing simulation software,
Increase fine lines 6 in the fine lines layout area primarily determined that, carry out simulation calculation, contrast microwave property result of calculation,
Confirm fine lines layout area reasonability.In design method of the present invention, it is desirable to the surrounding space size of fine lines 6
More than the size of laser focal spot, so design is easy to laser to trim, while other lines will not be caused to damage.
（3）The fine lines 6 being connected with superconducting microstrip resonator main line bar 4 are set in fine lines layout area 5.
（4）When setting fine lines 6, the physical dimension of superconducting microstrip resonator main line bar 4 is adjusted accordingly.
Design and simulation link, after increasing the fine lines to frequency adjustment, former resonant frequency can change.In order to make increase micro-
The frequency of superconducting microstrip resonator after hachure is maintained at former design load, it is necessary to which superconducting microstrip resonator main line bar is carried out must
The adjustment wanted, for example slightly shorten or lengthen main line size etc..
Design is combined to the physical dimension of fine lines and superconducting microstrip resonator main line bar, to make simulation calculation
Value matches with design object value.In design method of the present invention, it is desirable to which the fine width of lines 6 is led much smaller than resonator 4
Lines, to realize the accurate adjustment of resonant frequency.
Further, fine lines 6 and superconducting microstrip resonator the main line bar 4 uses identical material.Fine lines
With superconducting microstrip resonator main line bar while complete design, make simultaneously.Superconducting microstrip resonator main line bar is first designed, then
Fine lines are designed, superconducting microstrip resonator main line bar and fine lines are finally subjected to comprehensive simulating design, to realize design
Index.
Further, the width of the fine lines 6 is less than the width of superconducting microstrip resonator main line bar 4.
Further, the fine lines layout area 5 is located on the superconduction chip substrate 1 beyond close coupling region 3.It is logical
Crossing makes fine lines layout area 5 avoid close coupling region 3, that is, allows fine lines 6 to avoid close coupling region 3, such energy
Enough realize the accurate adjustment of resonator resonant frequency.
Further, the surrounding space size of fine lines 6 is more than laser focal spot diameter, and so design is easy to laser to repair
Cut.
In summary, the design method of resonator of the present invention, it is easy to laser accurately to adjust available for frequency super
Lead the design of micro-strip resonantor.The quasi resonant oscillator trims fine lines after the completion of circuit photoetching, using laser, realizes resonance
The accurate adjustment and amendment of device resonant frequency.Using the resonator of the invention designed and the wave filter combined by resonator
Frequency-adjustable is whole, and controllable precise, greatly reduces the number that mask plate preparation, film preparation, litho pattern etc. repeat manufacture,
The cost-effective and time.Significantly：Because frequency realizes adjustable, can significantly reduce design, technique and manufacture etc.
Process is for mask plate preparation, thin-film technique, the high-precision requirement of photoetching process.With the existing design method shown in Fig. 3
Flow is compared, and the design method flow shown in Fig. 4 is reliable and practical, when applying frequency is easy to the superconductive micro-strip that laser accurately adjusts
When the super conductive filter performance test that resonator is combined into is unqualified, the fine lines on resonator are trimmed by laser, you can
Accurate adjusting device frequency；The number that mask plate preparation, film preparation, litho pattern etc. repeat manufacture is greatly reduced, is saved
Cost and time.
Fig. 5,6-1,6-2 and 6-3 show that laser can be used accurately to be adjusted for the frequency of resonator and its wave filter.
The accurate adjustment of resonant frequency before and after laser trimming of superconducting microstrip resonator in the present invention as shown in Figure 5 is shown
It is intended to, wherein abscissa is frequency, and ordinate is amplitude.It was found from the figure, accurate laser trimming can realize resonator frequency
The adjustment of rate, to high frequency direction or to low frequency direction.
The frequency Adjustment effect figure of the super conductive filter of superconducting microstrip resonator in the application present invention as in Figure 6-1；
Wherein abscissa is frequency；Ordinate is amplitude.Fig. 6-2 is the amplification in the GHz of frequency range 2.1GHz in Fig. 6-1~2.18,
Wherein abscissa is frequency, and ordinate is amplitude.Fig. 6-3 is putting in the GHz of frequency range 2.132GHz in Fig. 6-1~2.141
Greatly, wherein abscissa is frequency, and ordinate is amplitude.From Fig. 6-1 as can be seen that being trimmed by laser, by present invention design
Into the frequency of wave filter of resonator composition be adjusted；It can more clearly from find out from Fig. 6-2 and 6-3 and be set by the present invention
Count the accuracy of the frequency adjustment of the wave filter of the resonator composition formed.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention
Enclose and be defined, on the premise of design spirit of the present invention is not departed from, technical side of the those of ordinary skill in the art to the present invention
The various modifications and improvement that case is made, it all should fall into the protection domain of claims of the present invention determination.
Claims (5)
- A kind of 1. design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser, it is characterised in that：The superconduction is micro- Include superconduction chip substrate, the signal being separately positioned on superconduction chip substrate excitation end and superconducting microstrip resonator with resonator Main line bar and the fine lines being connected with superconducting microstrip resonator main line bar；The design method of the superconducting microstrip resonator comprises the following steps：（1）According to layout of the superconducting microstrip resonator main line bar in whole superconductive micro-strip circuit, close coupling region is determined；（2）According to layout of the superconducting microstrip resonator main line bar in whole superconductive micro-strip circuit, superconducting microstrip resonator main line The physical dimension and laser focal spot diameter of bar determine fine lines layout area；（3）The fine lines being connected with superconducting microstrip resonator main line bar are set in fine lines layout area；（4）When setting fine lines, the physical dimension of superconducting microstrip resonator main line bar is adjusted accordingly.
- 2. a kind of design method of superconducting microstrip resonator that frequency can be accurately adjusted with laser according to claim 1, It is characterized in that：Fine lines and superconducting microstrip resonator main line the strip adoption identical material.
- 3. a kind of design method of superconducting microstrip resonator that frequency can be accurately adjusted with laser according to claim 1, It is characterized in that：The width of the fine lines is less than the width of superconducting microstrip resonator main line bar.
- 4. a kind of design method of superconducting microstrip resonator that frequency can be accurately adjusted with laser according to claim 1, It is characterized in that：The fine lines layout area is located on the superconduction chip substrate beyond close coupling region.
- 5. a kind of design method of superconducting microstrip resonator that frequency can be accurately adjusted with laser according to claim 1, It is characterized in that：The fine lines surrounding space size is more than the size of laser focal spot.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710559968.1A CN107342450A (en) | 2017-07-11 | 2017-07-11 | A kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser |
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| CN201710559968.1A CN107342450A (en) | 2017-07-11 | 2017-07-11 | A kind of design method for the superconducting microstrip resonator that frequency can be accurately adjusted with laser |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107727638A (en) * | 2017-11-02 | 2018-02-23 | 嘉兴镭光仪器科技有限公司 | A kind of laser Raman spectroscopy gas analyzer with resonator enhancing |
| CN108955662A (en) * | 2018-04-27 | 2018-12-07 | 苏州大学 | Resonator gyroscope substantially symmetrical about its central axis with frequency difference adjustment structure |
| CN109599651A (en) * | 2018-11-02 | 2019-04-09 | 中国电子科技集团公司第十六研究所 | A kind of design method for the pole narrowband superconduction frequency-selective filtering group that multichannel low frequency is inclined |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03153105A (en) * | 1989-11-10 | 1991-07-01 | Fuji Elelctrochem Co Ltd | Trimming method for resistive terminator |
| US20010011936A1 (en) * | 1998-05-13 | 2001-08-09 | Martin Schallner | Method of adjusting a resonance frequency of a ring resonator |
| US20030016099A1 (en) * | 2001-07-23 | 2003-01-23 | Manseau David J. | Tunable resonator and method of tuning the same |
| CN1938899A (en) * | 2003-11-21 | 2007-03-28 | 纳幕尔杜邦公司 | Laser trimming to tune the resonance frequency of a spiral resonator, the characteristics of a high temperature superconductor filter comprised of spiral resonators, or the resonance frequency of a pl |
| CN101310411A (en) * | 2005-11-17 | 2008-11-19 | Cts公司 | Ball grid array filter |
-
2017
- 2017-07-11 CN CN201710559968.1A patent/CN107342450A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03153105A (en) * | 1989-11-10 | 1991-07-01 | Fuji Elelctrochem Co Ltd | Trimming method for resistive terminator |
| US20010011936A1 (en) * | 1998-05-13 | 2001-08-09 | Martin Schallner | Method of adjusting a resonance frequency of a ring resonator |
| US20030016099A1 (en) * | 2001-07-23 | 2003-01-23 | Manseau David J. | Tunable resonator and method of tuning the same |
| CN1938899A (en) * | 2003-11-21 | 2007-03-28 | 纳幕尔杜邦公司 | Laser trimming to tune the resonance frequency of a spiral resonator, the characteristics of a high temperature superconductor filter comprised of spiral resonators, or the resonance frequency of a pl |
| CN101310411A (en) * | 2005-11-17 | 2008-11-19 | Cts公司 | Ball grid array filter |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107727638A (en) * | 2017-11-02 | 2018-02-23 | 嘉兴镭光仪器科技有限公司 | A kind of laser Raman spectroscopy gas analyzer with resonator enhancing |
| CN108955662A (en) * | 2018-04-27 | 2018-12-07 | 苏州大学 | Resonator gyroscope substantially symmetrical about its central axis with frequency difference adjustment structure |
| CN109599651A (en) * | 2018-11-02 | 2019-04-09 | 中国电子科技集团公司第十六研究所 | A kind of design method for the pole narrowband superconduction frequency-selective filtering group that multichannel low frequency is inclined |
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Application publication date: 20171110 |
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