CN107727002A - Shadow Moire parameter calibration structure, scaling method and offset error removing method - Google Patents
Shadow Moire parameter calibration structure, scaling method and offset error removing method Download PDFInfo
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- CN107727002A CN107727002A CN201710911338.6A CN201710911338A CN107727002A CN 107727002 A CN107727002 A CN 107727002A CN 201710911338 A CN201710911338 A CN 201710911338A CN 107727002 A CN107727002 A CN 107727002A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2504—Calibration devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
Abstract
The present invention relates to a kind of shadow Moire parameter calibration structure, scaling method and offset error removing method.The structure is by spot light, main camera CCD, auxiliary camera CCD, measure grating and electricity driving displacement platform composition, measurement grating is horizontally placed on main camera CCD underface, spot light and auxiliary camera CCD are respectively arranged at main camera CCD both sides, measured object is provided with electricity driving displacement platform, the spot light is monochromatic, its oblique irradiation measurement grating, deformed grating is projected for measured object surface, when main camera CCD is through measurement grating observation, measure grating and produce moiré topography with the overlapping effect of deformed grating, main camera CCD and auxiliary camera CCD forms Stereo Vision Measurement System, world coordinate system establishes the optical centre in CCD.The sparse point coordinate measurement in main application space of the invention, therefore stereoscopic vision provides for convenient approach.
Description
Technical field
The present invention relates to technical field of optical precision measurement, and in particular to a kind of shadow Moire parameter calibration structure, mark
Determine method and offset error removing method.
Background technology
Shadow Moire measuring three-dimensional profile technology is a kind of whole audience, non-contacting method for measuring optical three-dimensional contour, from
Since 1970 propose, anthropological measuring, crystal column surface detection, the test of BGA coplane degrees, automatic production, aviation have been widely used to
The fields such as industry.
The shadow Moire for being currently based on phase techniques has become its main flow demodulation method.Consolidate yet with shadow Moire
Some phase height non-linear relations, classical phase-shifting technique can not obtain accurate solution in shadow Moire；On the other hand,
It is difficult there is also geometrical parameter calibration in phase height mapping process, the problem of low precision.
The content of the invention
The present invention will provide a kind of shadow Moire parameter calibration structure and scaling method, to traditional phase shift shade not
You propose solution by object three-dimensional contour outline measuring set geometrical structure parameter problem of calibrating, and then provide a kind of imbalance and miss
Poor removing method, wherein phase height nonlinearity erron is eliminated, effectively improves measurement accuracy.
In order to overcome existing problem, solution of the invention is：
A kind of shadow Moire device geometrical structure parameter demarcation structure, by spot light, main camera CCD, second camera
Machine CCD, measurement grating and electricity driving displacement platform composition, measurement grating are horizontally placed on main camera CCD underface, spot light
Main camera CCD both sides are respectively arranged at auxiliary camera CCD, measured object, described light are provided with electricity driving displacement platform
Source is monochromatic, its oblique irradiation measurement grating, projects deformed grating for measured object surface, main camera CCD is through measurement light
When grid are observed, measurement grating produces moiré topography, main camera CCD and auxiliary camera CCD with the overlapping effect of deformed grating
Stereo Vision Measurement System is formd, world coordinate system establishes the optical centre in CCD.
A kind of shadow Moire device geometrical structure parameter scaling method using said apparatus, first to camera calibration,
The internal reference of video camera and outer ginseng, and the mark point being more than in grating face projection number are established, then with stereo visual system pair
The left side of mark point is measured, and then fits grating planar, and CCD optical centre is now can obtain with geometrical principle
With the distance between grating face, i.e. parameter h；
Ensure that spot light can rotate around CCD optical centre, 90 degree of control spot light rotate counterclockwise, make it into double
Item stereo vision measuring system visual field, then the point characterized by spot light, measures its world coordinates, and its ordinate is parameter
d。
One kind uses above-mentioned shadow Moire device geometrical structure parameter offset error removing method, comprises the concrete steps that：
The first step：Measurement structure is built, after carrying out parameter calibration, measurement object is placed in measurement space, with electronic position
Moving stage obtains number frame phase shift bar graph with subsection traverse measurement grating；
Second step：By handling bar graph, to determine grating amount of movement, and then initial estimation phase shift is obtained；
3rd step：Phase is calculated according to the bar graph of shooting, and with de-packaging method to the measurement phase extracted above
Phase unwrapping is carried out, and then obtains initial estimation measurement height；
4th step：Update phase shift and then update measurement height.
The specific method of above-mentioned 4th step is：
During measurement, workpiece is placed in measurement space, light source irradiation measurement grating is opened, More's bar is produced in body surface
Line figure, grating relative initial position is then controlled, vertical raster face is moved twice, and is absorbed using video camera and stored the light
Field change, the phase shift bar graph expression formula for just having obtained being used to demodulate object surface appearance are as follows.
Assuming that a (x, y) is background, b (x, y) is modulation item, and φ (x, y) is phase, and δ is phase shift, and n is time domain striped sequence
Number, then the bar graph light intensity absorbed can be expressed as respectively：
In(x, y)=A (x, y)+B (x, y) cos [φ (x, y)+n δ (x, y)], (n=0,1,2) (1)
Clear, the derivation omitted coordinate item (x, y) below in order to state, the phase proposed according to above formula, this patent
Demodulation method is：
Application is mutually subtracted except background item with striped first, and obtained new striped is expressed as：
Further addition, subtraction operation is carried out to new striped to obtain：
Ensure that striped number is more than 1 in the bar graph of intake, ignores non-linear relation in phase shift, can obtain approximate phase shift deltae,
And phase shift delta is replaced to obtain with it：
In above formulaAnd then determine that grating amount of movement is：
Δ h=ph δe/2πd (5)
Use δ simultaneouslyeEstimation phase (going to wrap up) and measurement height are：
To sum up phase shift is updated to：
The phase shift of renewal is substituted into formula (5), (6), such iteration, until meeting
max(|zq-zq-1|) ＜ ε (8)
In formulaqIterations is represented, ε is default precision, finally obtains high-precision result.
It is an advantage of the invention that：
1st, it is simple in construction：Measurement structure proposed in the present invention does not increase the complexity of shadow Moire measurement structure, auxiliary
Video camera CCD is helped after structural parameters calibration is completed, it is no longer necessary to.Therefore the present invention measurement apparatus is simple in construction, price just
Preferably.
2nd, structural parameters calibration can be carried out：So far also no a kind of effective structural parameters calibration scheme, therefore the present invention
Approach is provided for the solution of the problem.A kind of invention structural parameters independent scaling methods, this method have to make
There is More's device of fine structure parameter, and new way is provided for fine phase demodulation.
3rd, application requirement is low：This method does not need the uniformity of light source, low to environmental requirement, suitable for industrial occasions
Measurement needs.
4th, approach application iterative technique of the invention, the intrinsic non-linear mistake of phase height of phase shift shadow Moire is eliminated
Difference.
Brief description of the drawings
Fig. 1 is the schematic diagram that measuring method of the present invention is implemented.
Description of reference numerals is as follows：1, line source；2, video camera CCD1；3 auxiliary camera CCD2；4, electricity driving displacement platform；
5, objective table；6, measure grating.
Embodiment
Stereo vision measuring technology belongs to passive optical measuring method, and applies most ripe three-dimensional coordinate at present
One of measuring method, single camera vision system, binocular vision system and multi-vision visual system can be classified as.With active light
Measuring method difference is learned, stereovision technique only uses the coordinate information of sampled images vegetarian refreshments, rather than the gray scale letter of sample graph
Breath.The realization of stereo vision three-dimensional measurement is an extremely complex measurement process, its process mainly include camera calibration,
IMAQ, image procossing, rebuild main computing and data output etc..But the sparse point coordinate measurement in main application space of the invention,
Therefore stereoscopic vision provides for convenient approach.
Because shadow Moire system only uses a video camera, it is convenient to carry out measurement of coordinates using single camera vision system
, but monocular ranging process is complicated, therefore the method that the present invention has selected conventional binocular ranging.
The present invention will be described in detail by specific embodiment below.
Referring to Fig. 1：
A kind of shadow Moire device geometrical structure parameter demarcation structure provided by the invention, it is to be copied before.
Measurement grating 6 is be arranged in parallel by the grating fixture on motor 4.
Referring to Fig. 1, a kind of shadow Moire device geometrical structure parameter scaling method using said apparatus, before to be copied
Face.
The structural parameters of the experimental provision of shadow Moire include：P, h, d.It is generally acknowledged that screen periods p has higher essence
Degree, it is not necessary to demarcate.But need to demarcate other two parameters, however, because the center of video camera and light source is all empty
Intend point, therefore actual demarcation difficulty is larger.Technique of binocular stereoscopic vision is introduced shadow Moire measuring system by this patent proposition,
With its powerful measurement of coordinates function, realize that the geometric parameter in More's measurement structure is accurate, convenient demarcation, to improve
Phase height mapping precision, and provide approach for the design of More's measurement structure.
One kind uses above-mentioned shadow Moire device geometrical structure parameter offset error removing method, comprises the concrete steps that：
The first step：Build such as figure measurement structure, after carrying out parameter calibration, measurement object is placed in measurement space, with essence
Mil moving stage obtains 3 frame phase shift bar graphs with subsection (such as 0.01mm) moving grating；
Second step：By handling bar graph, to determine grating amount of movement, and then initial estimation phase shift is obtained；
3rd step：Phase is calculated according to the bar graph of shooting, and with de-packaging method to the measurement phase extracted above
Phase unwrapping is carried out, and then obtains initial estimation measurement height；
4th step：Update phase shift and then update measurement height, specific method is：
During measurement, workpiece is placed in measurement space, light source irradiation measurement grating is opened, More's bar is produced in body surface
Line figure, grating relative initial position is then controlled, vertical raster face is moved twice, and is absorbed using video camera and stored the light
Field change, the phase shift bar graph expression formula for just having obtained being used to demodulate object surface appearance are as follows.
Assuming that a (x, y) is background, b (x, y) is modulation item, and φ (x, y) is phase, and δ is phase shift, and n is time domain striped sequence
Number, then the bar graph light intensity absorbed can be expressed as respectively：
In(x, y)=A (x, y)+B (x, y) cos [φ (x, y)+n δ (x, y)], (n=0,1,2) (1)
Clear, the derivation omitted coordinate item (x, y) below in order to state.The phase proposed according to above formula, this patent
Demodulation method is：
Application is mutually subtracted except background item with striped first, and obtained new striped is expressed as：
Further addition, subtraction operation is carried out to new striped to obtain：
Ensure that striped number is more than 1 in the bar graph of intake, ignores non-linear relation in phase shift, can obtain approximate phase shift deltae,
And phase shift delta is replaced to obtain with it：
In above formulaAnd then determine that grating amount of movement is：
Δ h=ph δe/2πd (5)
Use δ simultaneouslyeEstimation phase (going to wrap up) and measurement height are：
To sum up phase shift is updated to：
The phase shift of renewal is substituted into formula (5), (6), such iteration, until meeting
max(|zq-zq-1|) ＜ ε (8)
In formulaqIterations is represented, ε is default precision.Finally obtain high-precision result.
Such as need to continue to measure, the repeat step first step to the 4th step.The process of demarcation can be saved.
Use above specific case is illustrated to the present invention, is only intended to help and is understood the present invention, not limiting
The system present invention.For those skilled in the art, according to the thought of the present invention, some letters can also be made
It is single to deduce, deform or replace.
Claims (4)
1. a kind of shadow Moire device geometrical structure parameter demarcation structure, it is characterised in that by spot light (1), main camera
CCD (1), auxiliary camera CCD (2), measurement grating (6) and electricity driving displacement platform (5) composition, measurement grating (6) are horizontally placed on
Main camera CCD (1) underface, spot light (1) and auxiliary camera CCD (2) are respectively arranged at main camera CCD's (1)
Both sides, measured object being provided with electricity driving displacement platform (5), the spot light (1) is monochromatic, its oblique irradiation measurement grating (6),
Deformed grating is projected for measured object surface, when main camera CCD (1) is through measurement grating (6) observation, measurement grating and deformation light
The overlapping effect of grid produces moiré topography, and main camera CCD (1) and auxiliary camera CCD (2) forms stereo-visiuon measurement system
System, world coordinate system establish the optical centre in CCD (1).
2. the scaling method of structure according to claim 1, it is characterised in that first to camera calibration, establish video camera
Internal reference and outer ginseng, and grating face projection number be more than (3) mark point, then with stereo visual system to mark point
The left side is measured, and then fits grating planar, and CCD1 optical centre and grating face is now can obtain with geometrical principle
Between distance, i.e. parameter h；
Ensure that spot light can rotate around CCD (1) optical centre, control 90 degree of spot light (1) rotate counterclockwise, make it into double
Item stereo vision measuring system visual field, then the point characterized by spot light (1), measures its world coordinates, and its ordinate is to join
Number d.
3. the offset error removing method of structure according to claim 1, it is characterised in that comprise the concrete steps that：
The first step：Measurement structure is built, after carrying out parameter calibration, measurement object is placed in measurement space, with electricity driving displacement platform
(4) number frame phase shift bar graph is obtained with subsection traverse measurement grating (6)；
Second step：By handling bar graph, to determine grating amount of movement, and then initial estimation phase shift is obtained；
3rd step：Phase is calculated according to the bar graph of shooting, and the measurement phase extracted above carried out with de-packaging method
Phase unwrapping, and then obtain initial estimation measurement height；
4th step：Update phase shift and then update measurement height.
4. offset error removing method according to claim 3, it is characterised in that
The specific method of 4th step is：
During measurement, workpiece is placed in measurement space, light source irradiation measurement grating is opened, moiré topography is produced in body surface,
Then grating relative initial position is controlled, vertical raster face is moved twice, and is absorbed using video camera and stored light field change,
Just the phase shift bar graph expression formula for having obtained being used to demodulate object surface appearance is as follows：
Assuming that a (x, y) is background, b (x, y) is modulation item, and φ (x, y) is phase, and δ is phase shift, and n is time domain striped sequence number, then
The bar graph light intensity of intake can be expressed as respectively：
In(x, y)=A (x, y)+B (x, y) cos [φ (x, y)+n δ (x, y)], (n=0,1,2) (1)
Clear, the derivation omitted coordinate item (x, y) below in order to state, the phase demodulating proposed according to above formula, this patent
Method is：
Application is mutually subtracted except background item with striped first, and obtained new striped is expressed as：
Further addition, subtraction operation is carried out to new striped to obtain：
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Q represents iterations in formula, and ε is default precision, finally obtains high-precision result.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108775874A (en) * | 2018-06-04 | 2018-11-09 | 西安工业大学 | A kind of shaded three-dimensional contour outline measuring set and method using random phase shift technology |
| CN111156928A (en) * | 2020-02-07 | 2020-05-15 | 武汉玄景科技有限公司 | Grating three-dimensional scanner moire fringe eliminating method based on DLP projection |
| CN115790452A (en) * | 2023-02-06 | 2023-03-14 | 西安知象光电科技有限公司 | Moire representation and measurement method for three-dimensional topography of gear tooth surface |
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