CN107726752B - Vacuum drying oven - Google Patents

Vacuum drying oven Download PDF

Info

Publication number
CN107726752B
CN107726752B CN201710946832.6A CN201710946832A CN107726752B CN 107726752 B CN107726752 B CN 107726752B CN 201710946832 A CN201710946832 A CN 201710946832A CN 107726752 B CN107726752 B CN 107726752B
Authority
CN
China
Prior art keywords
solvent tank
plate
hot plate
solvent
driving rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710946832.6A
Other languages
Chinese (zh)
Other versions
CN107726752A (en
Inventor
高昕伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201710946832.6A priority Critical patent/CN107726752B/en
Publication of CN107726752A publication Critical patent/CN107726752A/en
Application granted granted Critical
Publication of CN107726752B publication Critical patent/CN107726752B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
    • F26B9/06Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B23/00Heating arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00Details of general application not covered by group F26B21/00 or F26B23/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum

Abstract

The invention relates to the technical field of display, and discloses a vacuum drying oven which is used for drying an ink-jet printing device and comprises a cavity, wherein the top of the cavity is provided with an exhaust port; the hot plate is arranged in the cavity, and a bearing surface for placing an ink-jet printing device is formed on the surface of the hot plate facing the exhaust port; the solvent tank is arranged on the periphery of the hot plate and the temperature of the solvent tank can be controlled independently, and a solvent tank opening hole for solvent diffusion is formed on the surface of one side, facing the exhaust port, of the solvent tank; and the cold plate is arranged in the cavity and is positioned between the hot plate and the exhaust port. The vacuum drying oven enables all parts of the surface of the ink-jet printing device to be dried uniformly by creating the same atmosphere on the surface of the ink-jet printing device placed therein.

Description

Vacuum drying oven
Technical Field
The invention relates to the technical field of display, in particular to a vacuum drying oven.
Background
In the prior art, after the surface of the inkjet printing device is dried, the surface of the inkjet printing device is likely to show non-uniformity after drying due to different volatilization speeds of solvents of all parts of the surface of the inkjet printing device in the drying process, especially obvious difference of the volatilization speeds of solvents of the middle part and the edge part of the inkjet printing device, and the use of the inkjet printing device is affected.
Disclosure of Invention
The invention provides a vacuum drying oven, which can uniformly dry all parts of the surface of an ink-jet printing device by creating the same atmosphere on the surface of the ink-jet printing device placed in the vacuum drying oven.
In order to achieve the purpose, the invention provides the following technical scheme:
a vacuum drying oven for drying an inkjet printing device, comprising:
the top of the cavity is provided with an exhaust port;
the hot plate is arranged in the cavity, and the surface of the hot plate facing the exhaust port forms a bearing surface for placing an ink-jet printing device;
the solvent groove is arranged on the periphery of the hot plate and is independently controllable in temperature, and a solvent groove opening hole for solvent diffusion is formed in the surface of the solvent groove facing the exhaust port;
a cold plate disposed within the cavity and located between the hot plate and the exhaust port.
The vacuum drying oven is used for drying the ink-jet printing device and comprises a cavity, wherein an exhaust port is arranged at the top of the cavity and used for vacuumizing the interior of the vacuum drying oven so as to prevent air flow from influencing the volatilization uniformity of a solvent on the surface of the ink-jet printing device; the vacuum drying oven is used for placing the ink-jet printing device on the hot plate when drying the ink-jet printing device, and the heating effect of the hot plate is favorable for accelerating the volatilization of a solvent on the surface of the ink-jet printing device; the solvent tank is arranged on the periphery of the hot plate, the temperature of the solvent tank is independently controllable, a solvent tank opening hole for solvent diffusion is formed in the surface of one side, facing the exhaust port, of the solvent tank, the solvent tank is arranged on the periphery of the hot plate, and is beneficial to solvent supplement on the periphery of an ink-jet printing device on the hot plate, the drying speed of the periphery of the ink-jet printing device is generally higher than that of the middle position, at the moment, the phenomenon of uneven drying of the surface of the ink-jet printing device is easily caused due to the fact that the drying speed of the surface of the ink-jet printing device is not consistent, the solvent in the solvent tank is volatilized to the edge of the surface of the ink-jet printing device through the solvent tank opening hole to supplement the solvent for the edge of the; the vacuum drying box further comprises a cold plate which is arranged in the cavity and located between the hot plate and the exhaust port, and the cold plate is used for adjusting solvent atmosphere distribution above the ink-jet printing device, so that the surface atmosphere of the ink-jet printing device is consistent with the surrounding atmosphere distribution, and the surface drying of the ink-jet printing device is more uniform.
Preferably, along the direction that the cold plate points to the hot plate, the solvent groove is located the hot plate deviates from one side of the cold plate, and be equipped with the bed course that is used for thermal-insulated between solvent groove and the hot plate.
Preferably, the solvent tank is further provided with:
the baffle plate assembly is arranged in the solvent tank and is used for adjusting the opening size of the opening of the solvent tank during action;
and the driving component drives the baffle component to act.
Preferably, the baffle assembly includes baffles in one-to-one correspondence with the solvent tank apertures, and the drive assembly includes:
the driving rod is movably arranged in the solvent tank along the length direction of the driving rod, each baffle plate is arranged on the driving rod, and when the driving rod moves, the baffle plates are driven to act so as to adjust the opening size of the corresponding solvent tank open pore;
the motor is installed in the solvent tank and is in transmission connection with the driving rod so as to drive the driving rod to move.
Preferably, the baffle plate assembly comprises baffle plates which correspond to the solvent tank open holes one by one, each baffle plate can be rotatably arranged in the solvent tank around a rotating shaft which is perpendicular to the surface of the solvent tank, provided with the solvent tank open holes, and a shielding part for shielding the corresponding solvent tank open hole is formed at one end of each baffle plate; the drive assembly includes:
the driving rod is movably arranged in the solvent tank along the length direction of the driving rod, each baffle plate is connected with the driving rod, and when the driving rod moves, the baffle plates are driven to rotate so as to adjust the opening size of the corresponding solvent tank open pore;
the motor is installed in the solvent tank and is in transmission connection with the driving rod so as to drive the driving rod to act.
Preferably, a heat insulating partition plate is disposed around the solvent tank, an end of the heat insulating partition plate facing the gas outlet is located on one side of the heat plate facing the gas outlet, and an angle of an opening facing a central direction of the heat plate is an acute angle in an angle formed by the heat insulating partition plate and a plane where the opening of the solvent tank is located.
Preferably, the end part of the heat insulation partition plate facing the exhaust port is in sealing fit with the edge part of the cold plate, and the cold plate is provided with air holes to communicate the space of the cold plate facing one side of the hot plate with the space of the cold plate facing away from one side of the hot plate.
Preferably, a local cold plate is arranged on the outer side of a part, corresponding to the bearing surface on the hot plate, of the heat insulation partition plate.
Preferably, the local cold plate is peripherally clad with an insulating plate.
Preferably, the solvent tank has a closed ring structure.
Drawings
FIG. 1 is a sectional view of a first vacuum drying oven according to an embodiment of the present invention;
FIG. 2 is a sectional view of a second vacuum drying oven according to an embodiment of the present invention;
FIG. 3 is a sectional view of a third vacuum drying oven according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a solvent tank structure of a vacuum drying oven according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a solvent tank structure of another vacuum drying oven according to an embodiment of the present invention.
Icon:
1-a cavity; 11-an exhaust port; 2-hot plate; 21-a bearing surface; 3-a solvent tank; 31-opening a solvent groove; 32-a baffle plate assembly; 321-a baffle plate; 33-a drive assembly; 331-a drive rod; 4-a cold plate; 5-cushion coat; 6-insulating thermal barrier; 7-local cold plate; 8-heat insulating plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A vacuum drying oven for drying an inkjet printing device, as shown in fig. 1, comprising:
the top of the cavity 1 is provided with an exhaust port 11;
the hot plate 2 is arranged in the cavity 1, and a bearing surface 21 for placing an ink-jet printing device is formed on the surface, facing the exhaust port 11, of the hot plate 2;
a solvent tank 3 which is provided around the hot plate 2 and whose temperature is individually controllable, and in which a solvent tank opening 31 for solvent diffusion is formed on the surface of the solvent tank 3 on the side facing the exhaust port 11, as shown in fig. 4 and 5;
and the cold plate 4 is arranged in the cavity 1 and is positioned between the hot plate 2 and the exhaust port 11.
The vacuum drying oven is used for drying the ink-jet printing device and comprises a cavity 1, wherein an exhaust port 11 is arranged at the top of the cavity 1, and the exhaust port 11 is used for vacuumizing the interior of the vacuum drying oven so as to prevent air flow from influencing the volatilization uniformity of a surface solvent of the ink-jet printing device; the hot plate 2 is arranged in the cavity 1, a bearing surface 21 for placing an ink-jet printing device is formed on the surface, facing the exhaust port 11, of the hot plate 2, when the vacuum drying oven is used for drying the ink-jet printing device, the ink-jet printing device is placed on the hot plate 2, and the heating effect of the hot plate 2 is favorable for accelerating the volatilization of a solvent on the surface of the ink-jet printing device; the solvent tank 3 is arranged on the periphery of the hot plate 2 and the temperature of the solvent tank 3 can be independently controlled, a solvent tank opening 31 for solvent diffusion is formed in the surface of the solvent tank 3, which faces to the exhaust port 11 side, the solvent tank 3 is arranged on the periphery of the hot plate 2 and is beneficial to supplement the solvent to the periphery of the ink-jet printing device on the hot plate 2, the peripheral position of the ink-jet printing device is generally higher than the drying speed of the middle position, the phenomenon that the surface of the ink-jet printing device is uneven is easily caused by the fact that the drying speed of the surface of the ink-jet printing device is not uniform, the solvent in the solvent tank 3 is volatilized to the edge of the surface of the ink-jet printing device through the solvent tank opening 31 to supplement the solvent to the edge of the ink-jet printing device, and the phenomenon; the vacuum drying box further comprises a cold plate 4 which is arranged in the cavity 1 and located between the hot plate 2 and the exhaust port 11, and the cold plate 4 is used for adjusting solvent atmosphere distribution above the ink-jet printing device, so that the surface atmosphere of the ink-jet printing device is consistent with the surrounding atmosphere distribution, and the surface drying of the ink-jet printing device is more uniform.
Specifically, in the direction in which the cold plate 4 points toward the hot plate 2, the solvent tank 3 is located on the side of the hot plate 2 facing away from the cold plate 4, and a cushion 5 for thermal insulation is provided between the solvent tank 3 and the hot plate 2.
In the vacuum drying box, the solvent tank 3 is positioned on one side of the hot plate 2, which is deviated from the cold plate 4, along the direction that the cold plate 4 points to the hot plate 2, the cushion layer 5 for heat insulation is arranged between the solvent tank 3 and the hot plate 2, and the cushion layer 5 is added for heat insulation, so that the temperature of the solvent tank 3 is independently controllable without being influenced by the temperature of the hot plate 2, the volatilization speed of the solvent in the solvent tank 3 is controlled, and the drying speed of each part on the surface of the ink-jet printing device is consistent.
Specifically, as shown in fig. 4 and 5, the solvent tank 3 is further provided with:
a baffle plate assembly 32 which is installed in the solvent tank 3 and adjusts the opening size of the solvent tank opening 31 during operation;
and a driving assembly 33 for driving the baffle assembly 32.
The solvent tank opening 31 of the solvent tank 3 is provided with a baffle assembly 32 for adjusting the opening size of the solvent tank opening 31 and a driving assembly 33 for driving the baffle assembly 32 to act, the baffle assembly 32 can be adjusted through the driving assembly 33 so as to adjust the opening size of the solvent tank opening 31, and therefore the volatilization amount of the solvent in the solvent tank 3 is controlled so that the drying conditions of all parts of the surface of the ink-jet printing device are consistent.
Specifically, as shown in fig. 4, the baffle plate assembly 32 includes a baffle plate 321 corresponding to the solvent tank opening 31 one to one, and the driving assembly 33 includes:
the driving rod 331, the driving rod 331 is installed in the solvent tank 3 movably along its length direction, each baffle 321 is installed in the driving rod 331, when the driving rod 331 moves, the baffle 321 is driven to move to adjust the opening size of the corresponding solvent tank opening 31;
and a motor (not shown) which is installed in the solvent tank 3 and is in transmission connection with the driving rod 331 to drive the driving rod 331 to move.
The baffle plate assembly 32 is simple and convenient to manufacture by adopting the design, and the opening size of the solvent tank opening hole 31 can be adjusted conveniently and accurately.
Specifically, as shown in fig. 5, the baffle plate assembly 32 includes baffle plates 321 corresponding one-to-one to the solvent tank apertures 31, each baffle plate 321 being rotatably mounted to the solvent tank 3 about a rotation axis perpendicular to a surface of the solvent tank where the solvent tank aperture is provided, one end of the baffle plate 321 forming a shielding portion for shielding the corresponding solvent tank aperture 31; the driving assembly 33 includes:
the driving rod 331, the driving rod 331 is installed in the solvent tank 3 movably along its length direction, each baffle 321 is connected with the driving rod 331, when the driving rod 331 moves, the baffle 321 is driven to rotate to adjust the opening size of the corresponding solvent tank opening 31;
a motor (not shown) installed in the solvent tank 3 and drivingly connected to the driving rod 331 for driving the driving rod 331.
The baffle plate assembly 32 adopts the design, so that the space is saved, and the adjustment of the opening size of the solvent tank opening hole 31 is very convenient and accurate.
Specifically, as shown in fig. 2, the heat insulating partition plate 6 is provided on the periphery of the solvent bath 3, the end of the heat insulating partition plate 6 facing the exhaust port 11 is located on the side of the carrying surface 21 of the hot plate 2 facing the exhaust port 11, and the angle of the opening of the heat insulating partition plate 6 with respect to the plane of the solvent bath opening 31 is acute toward the center of the hot plate 2.
In order to more accurately control the solvent atmosphere at the edge of the ink-jet printing device, a heat insulation clapboard 6 is arranged at the periphery of the solvent tank, the end part of the heat insulation clapboard 6 facing the exhaust port 11 is positioned at one side of the bearing surface 21 of the hot plate 2 facing the exhaust port 11, and the angle formed by the clapboard and the plane of the opening 31 of the solvent tank is an acute angle, wherein the angle of the opening facing the central direction of the hot plate 2 makes the edge of the ink-jet printing device close to the heat insulation clapboard 6, so as to better control the solvent atmosphere at the edge of the ink-jet printing device.
Specifically, as shown in fig. 3, the end of the heat insulating partition 6 facing the exhaust port 11 is in sealing fit with the edge of the cold plate 4, and the cold plate 4 is provided with air holes to communicate the space of the cold plate 4 facing the hot plate 2 and the space of the cold plate 4 facing away from the hot plate 2.
The end of the heat insulation partition plate 6 facing the exhaust port 11 is in sealing fit with the edge of the cold plate 4, so that the ink-jet printing device is positioned in a closed space, the atmosphere of each part on the surface of the ink-jet printing device is maintained to be the same, the air holes are formed in the cold plate 4 to communicate the space of the cold plate 4 facing one side of the hot plate 2 and the space of the cold plate 4 deviating from one side of the hot plate 2, and the surface of the ink-jet printing device is positioned in a stable environment through the exhaust port 11 for exhausting.
Specifically, the partial cold plate 7 is arranged outside the part of the heat insulation partition plate 6 corresponding to the bearing surface 21 on the hot plate 2.
The partial cold plate 7 is arranged on the outer side of the part, corresponding to the bearing surface 21 on the hot plate 2, of the heat insulation partition plate 6, so that the atmosphere of the part is improved locally on the edge of the ink-jet printing device, and the surface of the ink-jet printing device is dried more uniformly.
In particular, the perimeter of the partial cold plate 7 is clad with an insulating plate 8.
The periphery of the local cold plate 7 is covered with an insulating plate 8, which effectively prevents the mutual interference between the parts connected with each other.
Specifically, the solvent tank 3 has a closed ring-shaped structure.
The solvent tank 3 has a closed ring-shaped structure, surrounds the entire periphery of the hot plate 2, i.e., the entire edge of the ink-jet printing device, and supplies solvent thereto to dry the surface thereof uniformly.
It will be apparent to those skilled in the art that various changes and modifications may be made in the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (9)

1. A vacuum drying oven for drying an inkjet printing device, comprising:
the top of the cavity is provided with an exhaust port;
the hot plate is arranged in the cavity, and the surface of the hot plate facing the exhaust port forms a bearing surface for placing an ink-jet printing device;
the solvent groove is arranged on the periphery of the hot plate and is independently controllable in temperature, and a solvent groove opening hole for solvent diffusion is formed in the surface of the solvent groove facing the exhaust port;
the periphery of the solvent tank is provided with a heat insulation clapboard, the end part of the heat insulation clapboard facing the exhaust port is positioned on one side of the bearing surface of the hot plate facing the exhaust port, and the angle of an opening facing the center direction of the hot plate in the angle formed by the heat insulation clapboard and the plane of the opening of the solvent tank is an acute angle;
a cold plate disposed within the cavity and located between the hot plate and the exhaust port.
2. The vacuum drying oven according to claim 1, wherein the solvent tank is located on a side of the hot plate facing away from the cold plate in a direction in which the cold plate points toward the hot plate, and a cushion layer for thermal insulation is provided between the solvent tank and the hot plate.
3. The vacuum drying oven according to claim 1, wherein the solvent tank is further provided with:
the baffle plate assembly is arranged in the solvent tank and is used for adjusting the opening size of the opening of the solvent tank during action;
and the driving component drives the baffle component to act.
4. The vacuum drying oven of claim 3, wherein said baffle assembly includes baffles in one-to-one correspondence with said solvent slot apertures, and said drive assembly includes:
the driving rod is movably arranged in the solvent tank along the length direction of the driving rod, each baffle plate is arranged on the driving rod, and when the driving rod moves, the baffle plates are driven to act so as to adjust the opening size of the corresponding solvent tank open pore;
the motor is installed in the solvent tank and is in transmission connection with the driving rod so as to drive the driving rod to move.
5. The vacuum drying oven according to claim 3, wherein the baffle plate assembly comprises baffle plates corresponding to the solvent tank openings one to one, each of the baffle plates is rotatably mounted to the solvent tank about a rotation axis perpendicular to a surface of the solvent tank on which the solvent tank opening is provided, and one end of each baffle plate forms a shielding portion for shielding the corresponding solvent tank opening; the drive assembly includes:
the driving rod is movably arranged in the solvent tank along the length direction of the driving rod, each baffle plate is connected with the driving rod, and when the driving rod moves, the baffle plates are driven to rotate so as to adjust the opening size of the corresponding solvent tank open pore;
the motor is installed in the solvent tank and is in transmission connection with the driving rod so as to drive the driving rod to act.
6. The vacuum drying oven according to claim 1, wherein the end of the heat insulating partition plate facing the exhaust port is in sealing fit with the edge of the cold plate, and the cold plate is provided with air holes to communicate the space of the cold plate facing the hot plate and the space of the cold plate facing away from the hot plate.
7. The vacuum drying oven according to claim 6, wherein a partial cold plate is provided outside a portion of the heat insulating partition plate corresponding to the bearing surface of the hot plate.
8. Vacuum drying oven according to claim 7, characterized in that the local cold plates are peripherally coated with an insulating plate.
9. The vacuum drying oven according to any one of claims 1 to 8, wherein the solvent tank has a closed ring structure.
CN201710946832.6A 2017-10-12 2017-10-12 Vacuum drying oven Active CN107726752B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710946832.6A CN107726752B (en) 2017-10-12 2017-10-12 Vacuum drying oven

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710946832.6A CN107726752B (en) 2017-10-12 2017-10-12 Vacuum drying oven

Publications (2)

Publication Number Publication Date
CN107726752A CN107726752A (en) 2018-02-23
CN107726752B true CN107726752B (en) 2020-07-17

Family

ID=61211009

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710946832.6A Active CN107726752B (en) 2017-10-12 2017-10-12 Vacuum drying oven

Country Status (1)

Country Link
CN (1) CN107726752B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111086330B (en) * 2018-10-23 2021-08-31 广东聚华印刷显示技术有限公司 Drying device and drying process
CN110350110A (en) * 2019-06-24 2019-10-18 深圳市华星光电技术有限公司 Drying device and drying means
CN111129360B (en) * 2019-12-25 2023-02-07 Tcl华星光电技术有限公司 Vacuum drying device and display substrate drying method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6808566B2 (en) * 2001-09-19 2004-10-26 Tokyo Electron Limited Reduced-pressure drying unit and coating film forming method
JP4145905B2 (en) * 2005-08-01 2008-09-03 セイコーエプソン株式会社 Vacuum dryer
KR101201326B1 (en) * 2005-12-30 2012-11-14 엘지디스플레이 주식회사 Vacuum Dry Device for Manufacturing LCD
JP2010272382A (en) * 2009-05-22 2010-12-02 Panasonic Corp Method and device of manufacturing functional element
JP2013040689A (en) * 2009-12-02 2013-02-28 Sharp Corp Ink drying apparatus
CN104596205B (en) * 2015-02-13 2016-08-03 京东方科技集团股份有限公司 A kind of Minton dryer and vacuum drying method
CN105091506A (en) * 2015-08-31 2015-11-25 武汉华星光电技术有限公司 Vacuum drying device
CN106299118B (en) * 2016-08-26 2020-04-14 纳晶科技股份有限公司 Pre-drying device, film layer preparation method, light-emitting device and preparation method thereof
CN107128069B (en) * 2017-04-28 2019-07-02 京东方科技集团股份有限公司 Adjust method, inkjet printing methods, device and its system of inkjet-printing device
CN107201504B (en) * 2017-05-19 2019-04-05 京东方科技集团股份有限公司 It is dried in vacuo the method and display device of film layer

Also Published As

Publication number Publication date
CN107726752A (en) 2018-02-23

Similar Documents

Publication Publication Date Title
CN107726752B (en) Vacuum drying oven
US11315770B2 (en) Exhaust device for processing apparatus provided with multiple blades
KR100687949B1 (en) Substrate processing apparatus
US7943886B2 (en) Heat treatment apparatus
JP4021139B2 (en) Heat treatment apparatus and heat treatment method
KR102132323B1 (en) Vacuum Evaporation Coating Apparatus for Coating Multiple Substrates using Revolution, Rotation and Tilting
JP2001012870A (en) Batch type oven
WO2010089936A1 (en) Ink drying apparatus
WO2015105026A1 (en) Rotary heat treatment furnace
JP5384226B2 (en) Hot air heating device
JP4895984B2 (en) Application processing equipment
CN106906448A (en) A kind of heater for vacuum chamber
WO2011068013A1 (en) Ink drying apparatus
JP2010133647A (en) Heat treatment device
CN114990528B (en) Device and method for improving temperature field in cavity of CVD equipment
JP2014009879A (en) Rotary heat treatment furnace
KR101438734B1 (en) Rotary-type heat treatment furnace
JP3266844B2 (en) Heat treatment equipment
JP2006021138A (en) Drying method and drying apparatus for coating film
JPS61235833A (en) Coating apparatus
JPH11168045A (en) Semiconductor manufacture device and processing method for wafer
JP3703703B2 (en) Substrate processing equipment
JP2004085126A (en) Vacuum heat treatment furnace
CN214925505U (en) Can be fast and even stoving ceramic toasting case
JP3739272B2 (en) Substrate heat treatment equipment

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant