CN107716468A - A kind of laser auto focusing method, system, device and readable storage medium storing program for executing - Google Patents

A kind of laser auto focusing method, system, device and readable storage medium storing program for executing Download PDF

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Publication number
CN107716468A
CN107716468A CN201711046183.0A CN201711046183A CN107716468A CN 107716468 A CN107716468 A CN 107716468A CN 201711046183 A CN201711046183 A CN 201711046183A CN 107716468 A CN107716468 A CN 107716468A
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China
Prior art keywords
laser
distance
focal length
lens group
lens
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CN201711046183.0A
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Inventor
何浩
李海艳
黄运保
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Guangdong University of Technology
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Guangdong University of Technology
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Priority to CN201711046183.0A priority Critical patent/CN107716468A/en
Publication of CN107716468A publication Critical patent/CN107716468A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28Systems for automatic generation of focusing signals

Abstract

This application discloses a kind of laser auto focusing method, including:Obtain the distance of Laser output point and target surface;Whether needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate the adjusting parameter of the lens group;According to the adjusting parameter, the lens distance of the lens group is adjusted, so that Laser Focusing is in the target surface.Compared with the prior art, the present invention is wider by calculating distance and adjust automatically lens, the wide action scope of laser focal automatically, it is easy to operate, and it can accurately, reliable adjust the minor alteration of focal length so that laser can focus on target surface, reach the purpose that laser energy effectively utilizes.The application further correspondingly discloses a kind of laser auto focusing system, device and readable storage medium storing program for executing.

Description

A kind of laser auto focusing method, system, device and readable storage medium storing program for executing
Technical field
The present invention relates to laser cleaning field, more particularly to a kind of laser auto focusing method, system, device and readable deposit Storage media.
Background technology
Cleaning is the important procedure during green remanufacturing, and traditional cleaning method can cause different degrees of dirt to environment Dye.Domestic and foreign scholars were studying the various cleaning methods for being advantageous to environmental protection always in recent years, and laser cleaning is exactly wherein one Kind.
A kind of green cleaning technology of the laser cleaning as 21 century, there is contactless, not damaged, green, controllable Change substrate surface form, compared with distinguishing features such as high workload efficiency, the derusting of large ocean engineer equipment, tire-mold cleaning, The field extensive application demand such as historical relic and communal facility maintenance, has huge development potentiality.But theoretical research is not The limitation of foot and real time monitoring, equipment, the practical application of laser cleaning are not promoted widely.
We easily have found, the cleaning process of material surface are handled for Modern Laser, in order to deepen the wide work of laser focal With domain, the regulation of focal length is a vital ring.Focal length is incorrect, and the energy of laser cannot gather in finished surface well Collection, it is impossible to produce a desired effect.Present focus adjustment is also only the technology by optical design, by adding or reducing light Eyeglass is learned to realize the wide action scope scope of adjustment focal length, focus adjustment scope very little, plasticity is low.When to some height not When flat, the processing part of complex appearance is cleaned, if monitoring and dynamic focusing in real time can not be realized, laser cleaning will It can not serve good, or even not act on, reduce the utilization rate of laser energy.
The content of the invention
In view of this, it is an object of the invention to provide a kind of reliable efficiently laser auto focusing method, system, device And readable storage medium storing program for executing, it is easy to adjust laser spot.Its concrete scheme is as follows:
A kind of laser auto focusing method, including:
Obtain the distance of Laser output point and target surface;
Whether needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate the tune of the lens group Whole parameter;
According to the adjusting parameter, the lens distance of the lens group is adjusted, so that Laser Focusing is in the mesh Mark surface.
Preferably, the process of the distance for obtaining Laser output point and target surface, including:
Stereo matching is carried out to two images collected by binocular camera, obtains the mesh after three-dimensional reconstruction The physical location on surface is marked, then obtains the distance of the Laser output point and the target surface.
Preferably, before described pair of two images collected by binocular camera carry out the process of Stereo matching, Also include:
Using Zhang Shi scaling methods, image rectification is carried out to two images.
Preferably, the process of the adjusting parameter for calculating the lens group, including:
According to focal length calculation formula, the adjusting parameter of the lens group is calculated;
Wherein, the focal length calculation formula, in advance in focal length test experiments, using the lens distance to lens group and Corresponding focal length carries out data fitting, obtained focal length calculation formula.
Preferably, the process that the lens distance to the lens group is adjusted includes:
The lens distance of the lens group is adjusted using mini drive.
Preferably, the mini drive is piezoelectric ceramics mini drive.
Accordingly, the invention also discloses a kind of laser auto focusing system, including:
Range finder module, for obtaining the distance of Laser output point and target surface;
Data processing module, for whether being needed to adjust the focal length of lens group according to the Distance Judgment;If it is, meter Calculate the adjusting parameter of the lens group;
Adjusting module, for according to the adjusting parameter, being adjusted to the lens distance of the lens group, so that laser Focus on the target surface.
Preferably, the data processing module is specifically used for:
Whether needed to adjust the focal length of lens group according to the Distance Judgment;
If it is, according to focal length calculation formula, the adjusting parameter of the lens group is calculated;
Wherein, the focal length calculation formula, in advance in focal length test experiments, using the lens distance to lens group and Corresponding focal length carries out data fitting, obtained focal length calculation formula.
Accordingly, the invention also discloses a kind of laser auto focusing device, including:
Memory, for storing computer program;
Processor, realizing the laser auto focusing method as described in any one above during for performing the computer program Step.
Accordingly, the invention also discloses a kind of readable storage medium storing program for executing, computer is stored with the readable storage medium storing program for executing Program, realized when the computer program is executed by processor as described in any one above the step of laser auto focusing method.
A kind of laser auto focusing method disclosed by the invention, including:Obtain the distance of Laser output point and target surface; Whether needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate the adjusting parameter of the lens group;Root According to the adjusting parameter, the lens distance of the lens group is adjusted, so that Laser Focusing is in the target surface.Relatively Prior art, for the present invention by calculating distance and adjust automatically lens automatically, the wide action scope of laser focal is wider, easy to operate Fast, and the minor alteration of focal length can accurately, reliable be adjusted so that laser can focus on target surface, reach laser The purpose of energy effective utilization.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this The embodiment of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis The accompanying drawing of offer obtains other accompanying drawings.
Fig. 1 is a kind of step flow chart of laser auto focusing method in the embodiment of the present invention;
Fig. 2 is a kind of step flow chart of specific laser auto focusing method in the embodiment of the present invention;
Fig. 3 is a kind of structural representation of lens group and respective drivers in the embodiment of the present invention;
Fig. 4 is a kind of structural representation of laser auto focusing system in the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made Embodiment, belong to the scope of protection of the invention.
It is shown in Figure 1 the embodiment of the invention discloses a kind of laser auto focusing method, including:
S11:Obtain the distance of Laser output point and target surface;
Wherein, the method for obtaining distance can be binocular distance measurement method or other distance-finding methods.
It is understood that the target surface of cleaning workpiece is apart from Laser output point and is not belonging to very remote distance, pass Commonly used phase-shift laser rangefinder method of uniting carries out ranging.For the ranging during laser cleaning to out-of-flatness surface, laser phase Position method ranging be with laser beam measuring targets carry out spot scan, then calculate return signal time indirect draw the point away from From information.This method scanning range is small, longer to the distance measurement time of out-of-flatness surface piece, and the degree of accuracy is not high. It is that Surface scan ranging is carried out with the picture size under camera lens with the method for binocular distance measurement, it is whole to calculate return by chip The world coordinates of individual all entity points of measurement surface, the range information of luminous point is gone out so as to obtain all entity points to laser lens, And preserve into chip, it more rapidly can effectively carry out range measurement.
S12:Whether needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate the lens group Adjusting parameter;If it is not, then focal length need not be adjusted.
Specifically, according to focal length calculation formula, the adjusting parameter of the lens group is calculated;
Wherein, the focal length calculation formula, in focal length test experiments, to be demarcated, being made to lens group in advance The relation table of one focal length and lens distance, then the data in relation table be programmed.Utilize the lens to lens group Distance and corresponding focal length carry out data fitting, obtained focal length calculation formula.
For example, in advance in focal length test experiments, obtain respectively corresponding focal length be 20cm, 20.5cm, 21cm, The position of each lens in 21.5cm, 22cm, 22.5cm, 23cm lens group, by the pass of the position of each lens and focal length Newton interpolation fitting is done by system, obtains the focal length calculation formula of corresponding each lens.
S13:According to the adjusting parameter, the lens distance of the lens group is adjusted, so that Laser Focusing is in institute State target surface.
Adjustment action can be realized by the mini drive being connected with lens group, it is of course also possible to using other energy The method for enough realizing the step.
A kind of laser auto focusing method disclosed by the invention, including:Obtain the distance of Laser output point and target surface; Whether needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate the adjusting parameter of the lens group;Root According to the adjusting parameter, the lens distance of the lens group is adjusted, so that Laser Focusing is in the target surface.Relatively Prior art, for the present invention by calculating distance and adjust automatically lens automatically, the wide action scope of laser focal is wider, easy to operate Fast, and the minor alteration of focal length can accurately, reliable be adjusted so that laser can focus on target surface, reach laser The purpose of energy effective utilization.
The embodiment of the invention discloses a kind of specific laser auto focusing method, relative to a upper embodiment, this implementation Example has made further instruction and optimization to technical scheme.Shown in Figure 2, specific step is as follows:
S21:The distance of Laser output point and target surface is obtained using binocular distance-finding method;
Specifically, Stereo matching is carried out to two images collected by binocular camera, after obtaining three-dimensional reconstruction The target surface physical location, then obtain the distance of the Laser output point and the target surface.
Further, before Stereo matching, Zhang Shi scaling methods can also be utilized, image is carried out to two images Correction.
It is understood that demarcation is to establish a kind of corresponding pass between three-dimensional world coordinate and two dimensional image coordinate System.System carries out IMAQ using two video cameras, the distance between two video cameras (i.e. baseline distance) is set, with shooting Machine gathers and is placed on the demarcation thing before video camera simultaneously.Camera calibration is using Zhang Shi scaling methods, also known as Zhang Zhengyou mark Determine method.
Zhang Zhengyou scaling method needs video camera to shoot the multiple image of scaling board from different perspectives.Due to two shootings Machine is placed in parallel forward, and baseline distance is fixed, so need to only put the change in location of scaling board.Video camera is pin hole Imaging model, then spatial point P (XW,YW,ZW) mapping relations between picture point p (u, v) are:
For convenience of calculating, the Z coordinate of plane is 0 where making scaling board, i.e. ZW=0 plane, then above formula can be changed to:
Wherein, A is the internal reference matrix of video camera, and [R t] is to join matrix outside video camera, and s is scale factor.Make M=[XW YW 1]T, m=[u v 1]T, then above formula can be written as:Sm=A [R t] M
Wherein,
For perspective projection matrix, it is the mapping between the point on scaling board and its picture point.It is right with its in known spatial point After answering picture point, H-matrix can be obtained, and obtain and take the photograph using Levenberg-Marquardt Algorithm for Solving according to least squares equation The inside and outside parameter matrix of camera.
All there is lens distortion in general video camera, and distortion can influence calibration result, particularly radial distortion.Distortion is rectified Just, first it will be appreciated that distortion factor, then does the conversion opposite with distortion, elimination distortion.
Radial distortion is only focused in Zhang Shi standardizations.Demarcated according to Zhang Shi, calculate distortion factor.Because in actual conditions Under, radial distortion is smaller, it is possible to is carried out with the first few items of the Taylor series expansion around principal point (principle point) Description.Zhang Shi standardizations, the distortion factor of radial distortion is determined using first two.Mathematic(al) representation is as follows:
Wherein, k1And k2For the coefficient of radial distortion of preceding two rank.Distortion for central point is equally applicable.Then byWithIt can obtain:
Wherein, (u, v) represents preferable distortionless pixel coordinate,Represent the pixel in the case of actual footpath image distortion Coordinate, (u0,v0) principal point is represented, consecutive image coordinate when (x, y) represents preferable undistorted,Represent actual footpath image distortion In the case of consecutive image coordinate, k1,k2The distortion parameter of two ranks before representative.
So for any point on image, we have two equatioies.It is melted into matrix form:
By the camera model above tried to achieve, we can calculate (x, y) and (can directly be solved by camera model Go out), (u0,v0) (with whether distorting unrelated, being obtained in directly being entered a match in having tried to achieve),(having for directly reading is abnormal The pixel coordinate of change), (u, v) (can be solved) by camera model by the world coordinate point of object.So, two equations two Individual unknown number, we with any can in the hope of radial distortion.Because we there are n pictures, there is m point on every pictures, So we can obtain 2mn equation.Result is optimized with least square method.Following formula solution radial distortion k=can be used [k1k2]。
K=(DTD)-1DTd
Wherein, the coefficient matrix of the equation on the D equatioies left side, d are that have the pixel coordinate of distortion and without pixel on the right of equation The matrix that the difference of coordinate is formed.Using above formula, settle at one go and calculate distortion factor.
In order that obtained by calibrating estimate camera parameters that are actual, radial distortion being present.We are needed just asking The distortion parameter that solution obtains, together be previously obtained it is preferable it is undistorted under the conditions of inside and outside parameter, carry out maximum likelihood estimate Meter.
To minimize lower array function as target,
Then, calculated with Levenberg-Marquardt algorithms.Finally just obtain, we want abnormal in consideration In the case of change, the parameter of video camera.
In the case of the inside and outside parameter for the video camera that known corrections are crossed, the perspective projection matrix that have modified is calculated and takes the photograph Camera calibration, according to the relation of image coordinate system and world coordinate system, then it can obtain range information.In binocular vision, take the photograph Camera photographs two images of same object different angle simultaneously, and by same point, positional information can calculate in two images Go out its three-dimensional coordinate in world coordinates.
Two formulas more than, eliminate proportionality coefficient k1,k2, can obtain following four equation groups:
Wherein, [X Y Z 1] is the coordinate of P points under world coordinate system, [u1 v11] and [u2 v21] it is P points in left and right Picture point on image.Due to the presence of calibrated error and picture noise, four equations of the above are nonlinear, therefore available minimum Square law obtains the three-dimensional coordinate of P points.The actual range of space object and camera lens can be obtained.
S22:Whether needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate the lens group Adjusting parameter;
S23:The lens distance of the lens group is adjusted using piezoelectric ceramics mini drive.
Wherein, piezoelectric ceramics mini drive has the advantage that:
Transmission mechanism is not needed, Bit andits control precision is high, up to 0.01um;
Fast response time, about 10us, no mechanical clearance, voltage servo antrol can be achieved;
It is low in energy consumption, than electromagnetic motor micro positioner order of magnitude lower;
Closed-loop control easily is realized with power supply, sensor, microcomputer etc., and volume ratio other types driver is much smaller;
In view of these advantages, preferentially the adjustment of lens distance, Neng Gouda are carried out from piezoelectric ceramics mini drive It is that focal length carries out more accurate minor alteration to the purpose of rapid fine adjustment lens.
Further, consider to eliminate difference in the design of lens group, four lens can be used to form lens group, miniature drive Dynamic device is arranged on the bottom of each eyeglass, shown in Figure 3.
It is to consider following three aspect it is understood that why using four lens:
First, the visual field size of equipment:Visual field size is the size in one of camera lens exploration face, is to being ingested with camera lens What object distance, camera lens Jiao head and required imaging size determined.Therefore it is relevant with camera lens operating distance, focal length.Camera lens Operating distance it is more remote, visual field is bigger, but the energy that Laser emission comes out is dispersed with operating distance from focusing on, based on us Experiment generating laser power used is relatively low, this operating distance with regard to smaller, according to this operating distance we to eyeglass It is designed, formulates the operating distance of focusing laser energy.
Wherein, the focal length of camera lens, visual field size and camera lens being calculated as follows to the distance for being ingested object:
F=wl/W
F=hL/H
F is lens focus, and w is the width of image, and W is subject width, and L is distance of the subject to camera lens, and h is Image height, H are the height of subject.
Second, consider pore size:The diameter of focal length/camera lens aperture of aperture f values=camera lens
It can be seen from the computational methods of f-number, identical f-number, focal length is longer, and the actual diameter of aperture is bigger, burnt Away from shorter, the actual diameter of aperture is smaller.Pore size is formulated according to the focal range of our lens sets.
Third, consider spherical aberration, aberration:We need to eliminate spherical aberration and aberration, it is necessary to which we adjust eyeglass, therefore I Eyeglass choose 4 eyeglasses composition compound lenses, the spherical aberration in some height can be eliminated.The size in aberration and aperture and regard Field size is relevant, and under near-axial condition, relatively aperture needs small, and visual field is also small.
Accordingly, it is shown in Figure 4 the embodiment of the invention also discloses a kind of laser auto focusing system, including:
Range finder module 01, for obtaining the distance of Laser output point and target surface;
Data processing module 02, for whether being needed to adjust the focal length of lens group according to the Distance Judgment;If it is, Calculate the adjusting parameter of the lens group;
Adjusting module 03, for according to the adjusting parameter, being adjusted to the lens distance of the lens group, so as to swash Light focuses on the target surface.
Specifically, data processing module 02 can be used for:
Whether needed to adjust the focal length of lens group according to the Distance Judgment;
If it is, according to focal length calculation formula, the adjusting parameter of the lens group is calculated;
Wherein, the focal length calculation formula, in advance in focal length test experiments, using the lens distance to lens group and Corresponding focal length carries out data fitting, obtained focal length calculation formula.
Accordingly, the embodiment of the invention also discloses a kind of laser auto focusing device, including:
Memory, for storing computer program;
Processor, the laser auto focusing as described in any one of foregoing embodiments is realized during for performing the computer program The step of method.
The specific details about the laser auto focusing device, the laser auto focusing side with reference to described in foregoing embodiments Method, here is omitted.
Accordingly, the invention also discloses a kind of readable storage medium storing program for executing, computer is stored with the readable storage medium storing program for executing Program, realizing the laser auto focusing method as described in any one of foregoing embodiments when the computer program is executed by processor Step.
The specific details about the readable storage medium storing program for executing, the laser auto focusing method with reference to described in foregoing embodiments, this Place repeats no more.
Finally, it is to be noted that, herein, such as first and second or the like relational terms be used merely to by One entity or operation make a distinction with another entity or operation, and not necessarily require or imply these entities or operation Between any this actual relation or order be present.Moreover, term " comprising ", "comprising" or its any other variant meaning Covering including for nonexcludability, so that process, method, article or equipment including a series of elements not only include that A little key elements, but also the other element including being not expressly set out, or also include for this process, method, article or The intrinsic key element of equipment.In the absence of more restrictions, the key element limited by sentence "including a ...", is not arranged Except other identical element in the process including the key element, method, article or equipment being also present.
A kind of laser auto focusing method provided by the present invention, system, device and readable storage medium storing program for executing are carried out above It is discussed in detail, specific case used herein is set forth to the principle and embodiment of the present invention, above example Explanation be only intended to help understand the present invention method and its core concept;Meanwhile for those of ordinary skill in the art, According to the thought of the present invention, there will be changes in specific embodiments and applications, in summary, in this specification Appearance should not be construed as limiting the invention.

Claims (10)

  1. A kind of 1. laser auto focusing method, it is characterised in that including:
    Obtain the distance of Laser output point and target surface;
    Whether needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate the adjustment ginseng of the lens group Number;
    According to the adjusting parameter, the lens distance of the lens group is adjusted, so that Laser Focusing is in the object table Face.
  2. 2. laser auto focusing method according to claim 1, it is characterised in that the acquisition Laser output point and object table The process of the distance in face, including:
    Stereo matching is carried out to two images collected by binocular camera, obtains the object table after three-dimensional reconstruction The physical location in face, then obtain the distance of the Laser output point and the target surface.
  3. 3. laser auto focusing method according to claim 2, it is characterised in that described pair is gathered by binocular camera Before two images arrived carry out the process of Stereo matching, in addition to:
    Using Zhang Shi scaling methods, image rectification is carried out to two images.
  4. 4. according to any one of claims 1 to 3 laser auto focusing method, it is characterised in that described to calculate the lens The process of the adjusting parameter of group, including:
    According to focal length calculation formula, the adjusting parameter of the lens group is calculated;
    Wherein, the focal length calculation formula, it is in advance in focal length test experiments, using the lens distance to lens group and correspondingly Focal length carry out data fitting, obtained focal length calculation formula.
  5. 5. laser auto focusing method according to claim 4, it is characterised in that the lens distance to the lens group The process being adjusted includes:
    The lens distance of the lens group is adjusted using mini drive.
  6. 6. laser auto focusing method according to claim 5, it is characterised in that the mini drive is that piezoelectric ceramics is micro- Type driver.
  7. A kind of 7. laser auto focusing system, it is characterised in that including:
    Range finder module, for obtaining the distance of Laser output point and target surface;
    Data processing module, for whether being needed to adjust the focal length of lens group according to the Distance Judgment;If it is, calculate institute State the adjusting parameter of lens group;
    Adjusting module, for according to the adjusting parameter, being adjusted to the lens distance of the lens group, so that Laser Focusing In the target surface.
  8. 8. laser auto focusing system according to claim 7, it is characterised in that the data processing module is specifically used for:
    Whether needed to adjust the focal length of lens group according to the Distance Judgment;
    If it is, according to focal length calculation formula, the adjusting parameter of the lens group is calculated;
    Wherein, the focal length calculation formula, it is in advance in focal length test experiments, using the lens distance to lens group and correspondingly Focal length carry out data fitting, obtained focal length calculation formula.
  9. A kind of 9. laser auto focusing device, it is characterised in that including:
    Memory, for storing computer program;
    Processor, the laser auto focusing side as described in any one of claim 1 to 6 is realized during for performing the computer program The step of method.
  10. 10. a kind of readable storage medium storing program for executing, it is characterised in that computer program, the meter are stored with the readable storage medium storing program for executing Realized when calculation machine program is executed by processor as described in any one of claim 1 to 6 the step of laser auto focusing method.
CN201711046183.0A 2017-10-31 2017-10-31 A kind of laser auto focusing method, system, device and readable storage medium storing program for executing Pending CN107716468A (en)

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CN108499986A (en) * 2018-05-09 2018-09-07 华霆(合肥)动力技术有限公司 Battery core clean method and control device
CN109495692A (en) * 2019-01-09 2019-03-19 湖南农业大学 A kind of laser auto focusing percussion device based on three-dimensional machine vision
CN110849208A (en) * 2018-08-20 2020-02-28 青岛海尔空调器有限总公司 Air conditioner self-cleaning method and device, air conditioner, computer equipment and storage medium
CN111906434A (en) * 2020-06-24 2020-11-10 大族激光科技产业集团股份有限公司 Laser processing method and device, computer storage medium and laser processing equipment
CN112596324A (en) * 2020-12-21 2021-04-02 北京航空航天大学 Intelligent robot vision recognition system based on liquid zoom camera
CN114653685A (en) * 2020-12-23 2022-06-24 深圳市欧亚激光智能科技有限公司 Laser 3D automatic focusing cleaning equipment
CN114755798A (en) * 2022-03-25 2022-07-15 中国科学院信息工程研究所 Laser focusing control method and system
CN115839943A (en) * 2023-02-13 2023-03-24 合肥金星智控科技股份有限公司 Laser-induced spectroscopy system, spectrum calibration method and electronic equipment

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