CN107678172A - A kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device - Google Patents
A kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device Download PDFInfo
- Publication number
- CN107678172A CN107678172A CN201710985679.8A CN201710985679A CN107678172A CN 107678172 A CN107678172 A CN 107678172A CN 201710985679 A CN201710985679 A CN 201710985679A CN 107678172 A CN107678172 A CN 107678172A
- Authority
- CN
- China
- Prior art keywords
- optical device
- diffraction optical
- slot array
- varied angle
- angle slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
Abstract
A kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device, comprises the following steps：(1) single diffraction optical device Mold Making；(2) flexible varied angle slot array diffraction optical device Mold Making；(3) flexible varied angle slot array diffraction optical device is made on thermoplastic material, gets thermoplastic flexible material ready, and clean；Using the flexible varied angle slot array diffraction optical device mould, hot pressing is carried out using hot press, controls depth of indentation using pressure and hot pressing time, the depth of indentation is determined by Binary Diffractive Optics constructional depth h；After impressing terminates and cooled down, remove thermoplastic flexible material and cut, bond by the 1st group and N group one-dimensional binaries diffractive optical structure along Y-axis, form flexible varied angle slot array diffraction optical device.All band speckle inhibition of the present invention is good, motion mode is simple, be easily achieved and system versatility, robustness be good, cost is cheap.
Description
Technical field
The invention belongs to laser display projection field, more particularly to a kind of diffraction optical device suppressed for laser speckle
Hot pressing type manufacture method of the structure on flexible plastic material.
Background technology
Laser light projection display system is because its possessed is rich in color, image quality is high, long lifespan, reliability are high, effect
High, low power consumption and other advantages, by more and more extensive concern and welcome.It is high coherent light yet with laser, inevitably
A kind of picture noise for being referred to as laser speckle can be produced.Speckle shows as being randomly dispersed in the black splotch in laser facula, its
The substantially random coherent superposition of signal, the presence of speckle have a strong impact on the quality of image and information.Show and lead in laser projection
Domain, speckle can decline the image quality of Projection Display, cause beholder to produce the symptom such as tired and dizzy, have a strong impact on
The experience of laser-projector user, turn into the central factor for restricting laser light projection display system and Instrument Development.Therefore, research and develop
Laser speckle suppression technology and device are very necessary.
To the suppression of laser speckle in prior art, commonly used is the diffraction optical device of motion, such as
《Hadamard speckle contrast reduction》Jahja in (2004, Opt.Lett.29,11-13) one text
I.Trisnadi employs the diffraction optical device based on Hadamard matrix structures for the first time；《Full speckle
suppression in laser projectors using two Barker code-type diffractive
optical elements》In (2013, J.Opt.Soc.Am.A 30,22-31) text, Lapchuk et al. is based on using two
The diffraction optical device of Barker code structure, speckle Inhibition test is carried out to all band (both including red, green, blue) laser；It is happy
Diligent pure, Xiong Qiyuan, Dong Wen and Fu Minglei are in Chinese invention patent《A kind of laser speckle suppression side based on diffractive-optical element
Method》It is proposed to suppress laser speckle using the binary diffractive optic element of motion in (CN 106896520A).But above-mentioned it is based on
The diffraction optical device of motion is all produced on hard material, such as glass (silica) material or lucite material
Material.The diffraction optical device being made on hard material, there is very big limitation to its motion mode, while also cause motion
Design it is extremely complex.So far, there has been no on making the diffraction optics suppressed for laser speckle on flexible material
The relevant report of device.
Further, in view of binary diffractive optic device belongs to micro structural component, in optical field generally use photoetching skill
Art makes.If continuing this conventional thinking, the flexible varied angle slot array diffraction optical device of the present invention is made using photoetching technique, then
It is only applicable to have after photoetching adhesive curing high resiliency, bent and optically transparent Other substrate materials (such as polydimethylsiloxanes
Alkane, light-sensitive polyimide), and for PC, PVC, PET suitable for making the flexible varied angle slot array diffraction optical device of the present invention etc.
Thermoplastic material, this method can not use.On the other hand, because each photoresist, there is its specifically side of making
Method and technological process, the universality of technical scheme are very poor.In addition, the size limitation of current lithographic equipment photoetching table top is limited to,
The length of whole flexible varied angle slot array diffraction optical device is typically no more than 9 centimetres.
In summary, the speckle suppression technology of existing based drive diffraction optical device, in the structure of diffractive optical element
Shortcomings, cause or speckle inhibition level is inadequate；Or all band speckle suppression can not be carried out；Or the essence of structure design
Degree requires too high, and System Error-tolerance Property, robustness, versatility are very poor, are only suitable for laboratory, it is impossible to meet practical application request；Or
It is to need reciprocating machine to move, changing speed in motion process causes speckle inhibition bad etc..On the other hand, exist
In manufacturing technology, so far, the making of the diffraction optical device suppressed for laser speckle is not made on flexible material also
Method, the technical side of the flexible varied angle slot array diffraction optical device of the present invention is made particularly not on thermoplastic material
Method.
The content of the invention
In order to overcome the diffraction optical device technology speckle inhibition moved is not good enough, can not carry out all band to dissipate
Spot suppresses, system using device number and species is more, moving component is complicated and have to instrument impact damage, size greatly, instrument knot
The shortcomings of structure is complicated, high energy consumption, and there has been no the universality that flexible diffraction optical device is made for thermoplastic material
Manufacturing technology, a kind of all band speckle inhibition of present invention offer is good, motion mode is simple, be easily achieved and system is general
Property, the hot pressing type manufacture method for the flexible varied angle slot array diffraction optical device that robustness is good, cost is cheap, are moulded using thermoplasticity
The making of material material, the caterpillar drive that infinitely can be at the uniform velocity circulated by varied angle slot array diffraction structure, structure replace reciprocating
Mechanical movement realizes that red, green, blue all band laser speckle suppresses.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device, the described method comprises the following steps：
(1) single diffraction optical device Mold Making
Step 1：It is standby to prepare the mask of N number of one-dimensional binary diffractive optical structure, N number of mask corresponds to respectively
N group one-dimensional binary diffractive optical structures in the flexible varied angle slot array diffraction optical device of the present invention；
Step 2：Silicon chip is selected as base material, and is cleaned；
Step 3：One layer of photoresist is applied on the cleaning silicon wafer Jing Guo step 2, front baking is carried out, then using step 1
Mask exposure, development afterwards, rear baking, forms photoetching offset plate figure structure；
Step 4：On the print Jing Guo step 3, the Copper thin film that a layer thickness is 100 nanometers to 250 nanometers is grown, as
Electroforming negative electrode；
Step 5：By the print Jing Guo step 4, insert electroformed nickel in electrolyte, the thickness control of nickel at 850 nanometers extremely
Between 1150 nanometers；
Step 6：The print Jing Guo step 5 is cleaned, removes the electrolyte of residual, it is then supporting using photoresist in step 3
Glue-dispenser removes photoresist and metal thereon, and single diffraction optical device mould, the single diffraction optical device mould is made
Tool repeated multiple times can use；
(2) flexible varied angle slot array diffraction optical device Mold Making
Step 7：Using precision machinery technology, processing mold firmware is standby, and the X-axis is defined as flexible varied angle slot array and spread out
The length direction of optics is penetrated, the Y-axis is defined as the width of flexible varied angle slot array diffraction optical device；
Step 8：According to the structure design of flexible varied angle slot array diffraction optical device, choose by the list made by (one)
Individual diffraction optical device mould installion is combined on the mould firmware of step 7, is fastened afterwards, and flexible varied angle slot array is made
Diffraction optical device mould；
(3) flexible varied angle slot array diffraction optical device is made on thermoplastic material
Step 9：Get thermoplastic flexible material ready, and clean；
Step 10：Using the flexible varied angle slot array diffraction optical device mould, hot pressing is carried out using hot press, is utilized
Pressure and hot pressing time control depth of indentation, the depth of indentation are determined by Binary Diffractive Optics constructional depth h；
Step 11：After impressing terminates and cooled down, the thermoplastic flexible material for removing step 9 and cutting, along Y-axis by the 1st group
Bond with N group one-dimensional binaries diffractive optical structure, form flexible varied angle slot array diffraction optical device.
Further, the flexible varied angle slot array diffraction optical device is produced on flexible material, is spread out by N group one-dimensional binaries
Penetrate optical texture head and the tail to be formed by connecting, the one-dimensional binary diffractive optical structure includes optical grating construction and optical microstructures, described
One-dimensional to refer to that diffractive optical structure is one-dimensional patterns, the binary refers to because the optical path difference that diffractive optical structure depth is formed is
Binaryzation.
Further, the one-dimensional binary diffractive optical structure pattern is represented by parameter T, and the parameter T is the micro- knot of optics
The minimum unit width of structure, the width of all optical microstructures represent with T integral multiple, the one-dimensional binary diffraction optics
The overall width T of structure plan0Represent；The depth of the one-dimensional binary diffractive optical structure is h, the one-dimensional binary diffraction light
It is θ that structure, which is learned, with inclination angle folded by X-axis0。
The optical microstructures are the optical microstructures based on pseudo-random sequence, optical microstructures or base based on M sequence
In the optical microstructures of Barker code.
The N is positive integer, represents the array number included in flexible varied angle slot array diffraction optical device, N=1,
2,3 ... ∞, as N=1, the flexible varied angle slot array diffraction optical device suppressed for laser speckle is single diffraction light
Device is learned, i.e. diffraction optical device unit, each diffraction optical device unit includes the structural parameters identical in m cycle
One-dimensional binary diffractive optical structure pattern；As N≤2, the flexible varied angle slot array diffraction light suppressed for laser speckle
It is the diffraction optical device for including N number of array to learn device；N number of diffraction optical device unit in the array is disposably produced on
On monolithic flexible material, the one-dimensional binary diffractive optical structure pattern phase inside N number of diffraction optical device unit in its array
With or differ, N groups one-dimensional binary diffractive optical structure head and the tail connection, along Y direction by the 1st group of diffractive optical structure
Head be connected with the tail of N group diffractive optical structures.
N number of diffraction optical device unit in array is different from inclination angle folded by X-axis, is expressed as θ±i, wherein θ±i=θ0±
(N-1)/2 Δ θ ± i Δ θ, Δ θ represent neighboring diffraction optical device unit and the amplitude of variation at inclination angle folded by X-axis.
The depth h of Binary Diffractive Optics structure is relevant with the refractive index of flexible material, and its scope is in 350nm to 650nm.
The flexible material refers to transparent to the visible light wave range including red, green, blue, soft bent heat
Thermoplastic plastic.
The thermoplastic includes polyethylene terephtalate, polyvinylchloride or polycarbonate.
The present invention technical concept be：By making varied angle slot array diffraction optical device, profit on monolithic flexible material
Change the phase distribution of laser beam with the diffraction optics micro-structural of motion, destroy the spatial coherence of laser, so as to reach
Suppress the effect of speckle.
Further, the bending of flexible material is utilized so that the different one-dimensional binary diffractive optical structure of N groups is mutually folded
Add；The optical texture dynamic change for causing to be superimposed is moved using continuous crawler type, to reach the suppression of all band laser speckle
Effect simultaneously improves laser speckle inhibiting rate.
Further, because crawler type transmission goes round and begins again, it effectively prevent and transported in reciprocating machine motion process
The change of dynamic speed, interference noise caused by system injury and movement velocity change caused by reducing mechanical movement impact.
Yet further, invention varied angle slot array structure is passed through so that in the case where only needing one-dimensional square to move, realize
The technique effect of two-dimension displacement.
Further, for the thermoplastic material that optical transparence is good, stability is high, mechanical ductility is good, invention one
The preparation method of the heat pressing type of universality is covered, metal material mould, then the method by impressing is first made, high resiliency, light is made
Learn transparent flexible varied angle slot array diffraction optical device.
Beneficial effects of the present invention are mainly manifested in：(1) invention one kind is made for speckle on thermoplastic flexible material
Diffraction optical device, universality the manufacturing technology method of suppression, because using flexible material so that crawler type continuously moves into
For possibility.(2) multigroup diffraction optics micro-structural is made in single piece of material, size is small, efficiency high.(3) the curved of flexible material is utilized
Folding and crawler type are continuously moved so that the different one-dimensional binary diffractive optical structure of N groups is overlapped mutually and dynamic change, realizes
All band laser speckle suppresses.(4) invention varied angle slot array structure is passed through so that in the case where only needing one-dimensional square to move,
Realize the technique effect of two-dimension displacement.(5) replace reciprocating machine to move using crawler type motion, possess more stable speckle
Inhibition and smaller noise jamming, also make it that total is more stable.(6) whole speckle suppression system it is simple in construction,
Stabilization, versatility is good, effect is high, energy consumption is low.(7) size of the flexible varied angle slot array diffraction optical device made by not by
The combined reconstruct of unit component, flexibility are good in limit, array.(8) compared with the existing speckle restraining device of in the market, letter is made
Single, cost is cheap, is adapted to produce in enormous quantities.
Brief description of the drawings
Fig. 1 is schematic diagram (the micro- knot of optics of diffractive optical element unit in the flexible varied angle slot array diffraction optical device of the present invention
Structure is by taking M sequence as an example).
Fig. 2 is the array arrangement schematic diagram of the flexible varied angle slot array diffraction optical device of the present invention.
Fig. 3 is that the flexible varied angle slot array diffraction optical device of the present invention realizes the system schematic that laser speckle suppresses, its
In, 1 is laser；2 be planoconvex spotlight；3 be diaphragm；4 be the flexible varied angle slot array diffraction optical device of the present invention and its crawler belt
Formula transmission device；5 be imaging len；6 be projection screen；7 be CCD camera and its computer processing system.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
1~Fig. 3 of reference picture, a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device, including it is following
Step：
(1) single diffraction optical device Mold Making
Step 1：It is standby to prepare the mask of N number of one-dimensional binary diffractive optical structure, N number of mask corresponds to respectively
N group one-dimensional binary diffractive optical structures in the flexible varied angle slot array diffraction optical device of the present invention；
Step 2：Silicon chip is selected as base material, and is cleaned；
Step 3：One layer of photoresist is applied on the cleaning silicon wafer Jing Guo step 2, front baking is carried out, then using step 1
Mask exposure, development afterwards, rear baking, forms photoetching offset plate figure structure；
Step 4：On the print Jing Guo step 3, the Copper thin film that a layer thickness is 100 nanometers to 250 nanometers is grown, as
Electroforming negative electrode；
Step 5：By the print Jing Guo step 4, insert electroformed nickel in electrolyte, the thickness control of nickel at 850 nanometers extremely
Between 1150 nanometers；
Step 6：The print Jing Guo step 5 is cleaned, removes the electrolyte of residual, it is then supporting using photoresist in step 3
Glue-dispenser removes photoresist and metal thereon, and single diffraction optical device mould, the single diffraction optical device mould is made
Tool repeated multiple times can use.
(2) flexible varied angle slot array diffraction optical device Mold Making
Step 7：Using precision machinery technology, processing mold firmware is standby, and the X-axis is defined as flexible varied angle slot array and spread out
The length direction of optics is penetrated, the Y-axis is defined as the width of flexible varied angle slot array diffraction optical device；
Step 8：According to the structure design of flexible varied angle slot array diffraction optical device, manufactured in (one) single spread out is chosen
Penetrate optics mould installion to be combined on the mould firmware of step 7, fasten afterwards, flexible varied angle slot array diffraction is made
Optics mould.
(3) flexible varied angle slot array diffraction optical device is made on thermoplastic material
Step 9：Get thermoplastic flexible material ready, and clean；
Step 10：Flexible varied angle slot array diffraction optical device mould made of (two) is used, utilizes the hot press of commercialization
Hot pressing is carried out, it is true by Binary Diffractive Optics constructional depth h using pressure and hot pressing time control depth of indentation, the depth of indentation
It is fixed；
Step 11：After impressing terminates and cooled down, the thermoplastic flexible material for removing step 9 and cutting, along Y-axis by the 1st group
Bond with N group one-dimensional binaries diffractive optical structure, form pedrail type flexible varied angle slot array diffraction optical device.
The flexible varied angle slot array diffraction optical device that the hot pressing type manufacture method of the present invention obtains, by N group one-dimensional binaries
Diffractive optical structure head and the tail are formed by connecting.The one-dimensional binary diffractive optical structure includes but is not limited to optical grating construction, based on puppet
The optical microstructures of random sequence, the optical microstructures based on M sequence, the optical microstructures based on Barker code.It is described one-dimensional
Refer to that diffractive optical structure is referred to because the optical path difference that diffractive optical structure depth is formed is two-value by one-dimensional patterns, the binary
Change.The one-dimensional binary diffractive optical structure pattern by parameter T represent (referring to accompanying drawing 1, the optical microstructures based on M sequence
Schematic diagram), the parameter T is the minimum unit width of optical microstructures, and the width of all optical microstructures uses T integral multiple
To represent, the overall width T of the one-dimensional binary diffractive optical structure pattern0Represent.The one-dimensional binary diffractive optical structure
Depth be h, inclination angle folded by the one-dimensional binary diffractive optical structure and X-axis be θ0。
Further, the N is positive integer, N=1,2,3 ... ∞, described a kind of to suppress for laser speckle as N=1
Flexible varied angle slot array diffraction optical device, deteriorate to single diffraction optical device (hereinafter referred to as diffraction optical device unit)；Work as N
It is array diffraction optical device when≤2.Each described diffraction optical device unit includes the structural parameters phase in m cycle
Same one-dimensional binary diffractive optical structure pattern.N number of diffraction optical device unit in the array, is disposably produced on monolithic
On flexible material, the one-dimensional binary diffractive optical structure pattern inside N number of diffraction optical device unit in its array can phase
Together, can also differ.The N groups one-dimensional binary diffractive optical structure head and the tail connect, and can be, but not limited to glue using adhesive
Knot or the methods of hot pressing, along Y direction by the tail phase of the head and N group diffractive optical structures of the 1st group of diffractive optical structure
Even.
A kind of flexible varied angle slot array diffraction optical device suppressed for laser speckle, N number of diffraction in array
Optical device unit is different from inclination angle folded by X-axis, is expressed as θ±i, wherein θ±i=θ0± (N-1)/2 Δ θ ± i Δ θ, Δ θ
Represent neighboring diffraction optical device unit and the amplitude of variation at inclination angle folded by X-axis.
The flexible varied angle slot array diffraction optical device suppressed for laser speckle, its binary diffractive optical structure
Depth h is relevant with the refractive index of flexible material, and scope is between 350 nanometers to 650 nanometers.
Further, the flexible material, refer to transparent to the visible light wave range including red, green, blue, soft
Bent thermoplastic.Including but not limited to polyethylene terephthalate (PET), polyvinyl chloride (PVC), poly- carbonic acid
Ester (PC) material.
The principle that the flexible varied angle slot array diffraction optical device suppresses laser speckle is as follows：
1) speckle contrast SC calculation formula：
Wherein σ is the standard deviation of light distribution,It is average intensity distribution.Most of speckle suppressing method starting point is all
Light distribution is set to be averaged.
2) a kind of flexible varied angle slot array diffraction optical device suppressed for laser speckle of the present invention, the flexible angle
Spend array diffraction optical device to be connected by N group one-dimensional binaries diffractive optical structure head and the tail, form track structure.The N groups one
Dimension Binary Diffractive Optics structure includes but is not limited to optical grating construction, the optical microstructures based on pseudo-random sequence, based on M sequence
Optical microstructures, the optical microstructures based on Barker code.When the flexible varied angle slot array diffraction optical device of the present invention enters journey
Belt move when, N group one-dimensional binary diffractive optical structures be overlapped mutually simultaneously dynamic change, realize laser diffraction Optical Field Superposition,
The coherence of laser is destroyed, therefore reaches the effect for suppressing laser speckle.Meanwhile the N groups one-dimensional binary diffraction optics
Structure is overlapped mutually, and realizes the technique effect of two-sided one dimensional optical micro-structural coding, therefore can be carried out full wave sharp
Light speckle suppresses.
The Fundamentals for influenceing laser speckle inhibition have two：The direction of motion and movement velocity in motion process.
The influence of the direction of motion and movement velocity to speckle inhibition is determined with the linear displacement of X-direction and Y direction, it is theoretical
Calculation formula is as follows：
Wherein, D is projection width of the resolution of eye unit on screen, x1,x2,y1,y2It is that laser beam passes through two pieces of edges
The coordinate that the Binary Diffractive Optics structure of moved in coaxial is not projected on screen, H (x1,x2,y1,y2) and H (x1,x1,y1,y1) be
By the auto-correlation function of the laser beam of the screen plane of M sequence binary diffractive optic elements modulate：
Wherein, Δ t is the time for exposure of human eye；V1Be binary diffractive optic part drawing picture on screen along Y direction
Movement velocity, V2It is the movement velocity along X-direction；T0It is the least unit length in binary diffractive optic element a cycle；
M is nonzero integer；T (x, y, V, t) is the transmission coefficient function of binary diffractive optic element.
Embodiment 1：
A kind of flexible varied angle slot array diffraction optical device suppressed for laser speckle, it is produced on makrolon (PC) heat
On plastic material, it is formed by connecting by 3 groups of one-dimensional binary diffractive optical structure head and the tail.The one-dimensional binary diffractive optical structure is base
In the optical microstructures (referring to accompanying drawing 1 and accompanying drawing 2) of M sequence, its one-dimensional Binary Diffractive Optics structure plan is represented by parameter T,
The parameter T is the minimum unit width of optical microstructures, and the width of all optical microstructures is represented with T integral multiple,
The overall width T of the one-dimensional binary diffractive optical structure pattern0Represent.The depth of the one-dimensional binary diffractive optical structure is
H, the one-dimensional binary diffractive optical structure and inclination angle folded by X-axis are θ0。
The T parameters are 4 microns, and one-dimensional binary diffractive optical structure depth h is 420 nanometers, and M sequence is encoded to 31 volumes
Code, i.e., 1111100110100100001010111011000.3 groups of one-dimensional binary diffractive optical structures and inclination angle folded by X-axis
Respectively 44.4 °, 45 °, 45.6 °, using the method for adhesive bonds, along Y direction by the head of the 1st group of diffractive optical structure
It is connected with the tail of the 3rd group of diffractive optical structure.
The flexible varied angle slot array diffraction optical device of makrolon (PC) thermoplastic is made, is comprised the following steps that：
(1) single diffraction optical device Mold Making
Step 1：It is standby to prepare the mask comprising 3 groups of 31 M sequence diffractive optical structures, 3 masks
Inclination angle folded by corresponding and X-axis is respectively 44.4 °, 45 °, 45.6 ° 3 groups of 31 M sequence one-dimensional binary diffraction optics knots to version respectively
Structure；
Step 2：Silicon chip is selected as base material, and is cleaned；
Step 3：One layer of BP212 positive photoresist is applied on the cleaning silicon wafer Jing Guo step 2, front baking is carried out, then makes
With the mask exposure of step 1, development afterwards, rear baking, photoetching offset plate figure structure is formed；
Step 4：On the print Jing Guo step 3, the Copper thin film that a layer thickness is 150 nanometers is grown, as electroforming negative electrode；
Step 5：By the print Jing Guo step 4, electroformed nickel in electrolyte is inserted, the thickness control of nickel is at 1000 nanometers；
Step 6：The print Jing Guo step 5 is cleaned, the electrolyte of residual is removed, is then gone using BP212 photoresists are supporting
Jelly removes photoresist and metal thereon, and single diffraction optical device mould is made.
(2) flexible varied angle slot array diffraction optical device Mold Making
Step 7：Using precision machinery technology, processing mold firmware is standby, and the X-axis is defined as flexible varied angle slot array and spread out
The length direction of optics is penetrated, the Y-axis is defined as the width of flexible varied angle slot array diffraction optical device；
Step 8：According to the structure design of flexible varied angle slot array diffraction optical device, manufactured in (one) single spread out is chosen
Penetrate optics mould installion to be combined on the mould firmware of step 7, fasten afterwards, flexible varied angle slot array diffraction is made
Optics mould.
(3) flexible varied angle slot array diffraction optical device is made on thermoplastic material
Step 9：Get makrolon (PC) film ready and clean；
Step 10：Flexible varied angle slot array diffraction optical device mould made of (two) is used, heat is carried out using hot press
Pressure, depth of indentation are controlled in 420 rans；
Step 11：After impressing terminates and cooled down, the thermoplastic flexible material for removing step 9 and cutting, along Y-axis by the 1st group
Bond with the 3rd group of one-dimensional binary diffractive optical structure, form pedrail type flexible varied angle slot array diffraction optical device.
Referring to accompanying drawing 3, the manufactured pedrail type flexible varied angle slot array diffraction optical device is placed in laser speckle suppression
In system processed.The laser speckle suppression system, including laser, modulation lens subassembly, a kind of flexible varied angle battle array of the present invention
Row diffraction optical device, imaging len, projection screen, CCD camera and its computer processing system.The modulation lens subassembly bag
Include a planoconvex spotlight and a diaphragm.The laser, modulation lens subassembly, a kind of flexible varied angle slot array diffraction of the present invention
Optics and imaging len are located in same optical axis, and the laser beam that laser projects is carried out by the modulation lens subassembly
Expand, shaping and calibration, in a kind of normal incidence to flexible varied angle slot array diffraction optical device of the present invention, the present invention is a kind of flexible
Varied angle slot array diffraction optical device is arranged on the enterprising journey belt motion of crawler type conveyer driven by stepper motors.Institute
State the projection imaging of projection screen recording laser and directly visually observed.Laser on the CCD camera record projection screen
Projection imaging simultaneously inputs computer progress follow-up data processing.
Due to being moved using crawler type, when laser is irradiated on one of diffraction optical device region, light beam passes through
The region is also irradiated to the different region in another piece of micro optical structure inclination angle of flexible varied angle slot array diffraction optical device simultaneously
On, it is consequently formed two-sided one-dimensional diffraction optics overlaying structure.Due to laser irradiating part be divided to front and rear two pieces of device areas towards
Opposite direction uniform motion, and different components region micro optical structure angle of inclination is different, is produced with this to reach equivalent to Y-axis
The displacement in direction.As for the motion speed for the crawler type telecontrol equipment for being installed with the flexible varied angle slot array diffraction optical device of the present invention
Degree, then controlled by electricity control module.
The laser beam that light source is sent is collimated and expanded by the planoconvex spotlight 2, then changes its aperture by diaphragm
Size, by laser beam normal incidence to the flexible varied angle slot array diffraction optical device of the present invention.Described flexible varied angle slot array
Diffraction optical device is fixed on crawler actuator, when laser beam is irradiated to its surface, starts electricity control module control
Make the flexible varied angle slot array diffraction optical device and carry out at the uniform velocity crawler type translatory movement.The flexible varied angle slot array of the motion
Diffraction optical device changes the phase of diffraction progression within the time for exposure of human eye or CCD camera, and then destroys laser beam
Spatial coherence, reached speckle suppression effect.
Embodiment 2：
The flexible varied angle slot array diffraction optical device material is that polyethylene terephthalate (PET) plastics are thin
Film, one-dimensional binary diffractive optical structure depth h are 380 nanometers, and other implement parameter and process is same as Example 1.
Claims (9)
- A kind of 1. hot pressing type manufacture method of flexible varied angle slot array diffraction optical device, it is characterised in that：Methods described includes Following steps：(1) single diffraction optical device Mold MakingStep 1：It is standby to prepare the mask of N number of one-dimensional binary diffractive optical structure, N number of mask corresponds to this hair respectively N group one-dimensional binary diffractive optical structures in bright flexible varied angle slot array diffraction optical device；Step 2：Silicon chip is selected as base material, and is cleaned；Step 3：One layer of photoresist is applied on the cleaning silicon wafer Jing Guo step 2, front baking is carried out, then using the mask of step 1 Version exposure, development afterwards, rear baking, forms photoetching offset plate figure structure；Step 4：On the print Jing Guo step 3, the Copper thin film that a layer thickness is 100 nanometers to 250 nanometers is grown, as electroforming Negative electrode；Step 5：By the print Jing Guo step 4, electroformed nickel in electrolyte is inserted, the thickness control of nickel is received at 850 nanometers to 1150 Between rice；Step 6：The print Jing Guo step 5 is cleaned, the electrolyte of residual is removed, is then removed photoresist using photoresist in step 3 is supporting Agent removes photoresist and metal thereon, single diffraction optical device mould is made, the single diffraction optical device mould can Repeated multiple times use；(2) flexible varied angle slot array diffraction optical device Mold MakingStep 7：Using precision machinery technology, processing mold firmware is standby, and the X-axis is defined as flexible varied angle slot array diffraction light The length direction of device is learned, the Y-axis is defined as the width of flexible varied angle slot array diffraction optical device；Step 8：According to the structure design of flexible varied angle slot array diffraction optical device, single diffraction optical device made of selection Mould installion is combined on the mould firmware of step 7, is fastened afterwards, and flexible varied angle slot array diffraction optical device mould is made Tool；(3) flexible varied angle slot array diffraction optical device is made on thermoplastic materialStep 9：Get thermoplastic flexible material ready, and clean；Step 10：Using the flexible varied angle slot array diffraction optical device mould, hot pressing is carried out using hot press, utilizes pressure Depth of indentation is controlled with hot pressing time, the depth of indentation is determined by Binary Diffractive Optics constructional depth h；Step 11：Impressing terminates and after cooling down, the thermoplastic flexible material for removing step 9 and cutting, along Y-axis by the 1st group and N Group one-dimensional binary diffractive optical structure bonds, and forms flexible varied angle slot array diffraction optical device.
- 2. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as claimed in claim 1, its feature It is：The flexible varied angle slot array diffraction optical device is produced on flexible material, by N group one-dimensional binary diffractive optical structures Head and the tail are formed by connecting, and the one-dimensional binary diffractive optical structure includes optical grating construction and optical microstructures, described one-dimensional to refer to spread out It is one-dimensional patterns to penetrate optical texture, and the binary refers to because the optical path difference that diffractive optical structure depth is formed is binaryzation.
- 3. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as claimed in claim 2, its feature It is：The one-dimensional binary diffractive optical structure pattern is represented that the parameter T is the minimum unit of optical microstructures by parameter T Width, the width of all optical microstructures represent with T integral multiple, the one-dimensional binary diffractive optical structure pattern it is total Width T0Represent；The depth of the one-dimensional binary diffractive optical structure is h, the one-dimensional binary diffractive optical structure and X-axis Folded inclination angle is θ0。
- 4. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as claimed in claim 2, its feature It is：The optical microstructures are the optical microstructures based on pseudo-random sequence, the optical microstructures based on M sequence or are based on The optical microstructures of Barker code.
- 5. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as described in one of claim 2~4, It is characterized in that：The N is positive integer, represents the array number included in flexible varied angle slot array diffraction optical device, N= 1,2,3 ... ∞, as N=1, the flexible varied angle slot array diffraction optical device suppressed for laser speckle is single diffraction Optics, i.e. diffraction optical device unit, it is identical that each diffraction optical device unit includes the structural parameters in m cycle One-dimensional binary diffractive optical structure pattern；As N≤2, the flexible varied angle slot array diffraction suppressed for laser speckle Optics is the diffraction optical device for including N number of array；N number of diffraction optical device unit in the array disposably makes On monolithic flexible material, the one-dimensional binary diffractive optical structure pattern inside N number of diffraction optical device unit in its array Identical or differ, the N groups one-dimensional binary diffractive optical structure head and the tail connect, along Y direction by the 1st group of diffraction optics knot The head of structure is connected with the tail of N group diffractive optical structures.
- 6. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as claimed in claim 5, its feature It is：N number of diffraction optical device unit in array is different from inclination angle folded by X-axis, is expressed as θ±i, wherein θ±i=θ0±(N- 1)/2 Δ θ ± i Δ θ, Δ θ represent neighboring diffraction optical device unit and the amplitude of variation at inclination angle folded by X-axis.
- 7. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as described in one of claim 2~4, It is characterized in that：The depth h of Binary Diffractive Optics structure is relevant with the refractive index of flexible material, its scope in 350nm extremely 650nm。
- 8. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as described in one of claim 2~4, It is characterized in that：The flexible material refers to transparent to the visible light wave range including red, green, blue, soft bent Thermoplastic.
- 9. a kind of hot pressing type manufacture method of flexible varied angle slot array diffraction optical device as claimed in claim 8, its feature It is：The thermoplastic includes polyethylene terephtalate, polyvinylchloride or polycarbonate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710985679.8A CN107678172B (en) | 2017-10-20 | 2017-10-20 | A kind of hot pressing type manufacture method of flexibility varied angle slot array diffraction optical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710985679.8A CN107678172B (en) | 2017-10-20 | 2017-10-20 | A kind of hot pressing type manufacture method of flexibility varied angle slot array diffraction optical device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107678172A true CN107678172A (en) | 2018-02-09 |
| CN107678172B CN107678172B (en) | 2019-03-12 |
Family
ID=61139856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710985679.8A Active CN107678172B (en) | 2017-10-20 | 2017-10-20 | A kind of hot pressing type manufacture method of flexibility varied angle slot array diffraction optical device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107678172B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110515148A (en) * | 2019-07-19 | 2019-11-29 | 浙江工业大学 | A kind of production method of array micro-prism structure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60230650A (en) * | 1984-04-30 | 1985-11-16 | Shimadzu Corp | Formation of fine pattern |
| JPH07243870A (en) * | 1994-03-08 | 1995-09-19 | Ricoh Co Ltd | Rotary encoder |
| US20130088723A1 (en) * | 2011-10-05 | 2013-04-11 | Daniel Feldkhun | Systems and methods for suppressing coherent structured illumination artifacts |
| CN106842607A (en) * | 2017-01-19 | 2017-06-13 | 浙江工业大学 | What the laser speckle based on diffractive-optical element suppressed realizes system |
-
2017
- 2017-10-20 CN CN201710985679.8A patent/CN107678172B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60230650A (en) * | 1984-04-30 | 1985-11-16 | Shimadzu Corp | Formation of fine pattern |
| JPH07243870A (en) * | 1994-03-08 | 1995-09-19 | Ricoh Co Ltd | Rotary encoder |
| US20130088723A1 (en) * | 2011-10-05 | 2013-04-11 | Daniel Feldkhun | Systems and methods for suppressing coherent structured illumination artifacts |
| CN106842607A (en) * | 2017-01-19 | 2017-06-13 | 浙江工业大学 | What the laser speckle based on diffractive-optical element suppressed realizes system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110515148A (en) * | 2019-07-19 | 2019-11-29 | 浙江工业大学 | A kind of production method of array micro-prism structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107678172B (en) | 2019-03-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4623723B2 (en) | Diffractive optical element and optical low-pass filter using the same | |
| US6835535B2 (en) | Microlens arrays having high focusing efficiency | |
| US6587276B2 (en) | Optical reproduction system | |
| JPH05509416A (en) | Improvements in or relating to microlens screens, photopolymerizable materials and crafts using them | |
| CN101952746B (en) | Optical element | |
| JP2016006529A (en) | Manufacturing processes for optical elements that displays virtual images | |
| JPH03504539A (en) | Display system using a light-transmitting screen | |
| JP2011527770A (en) | Optical element for displaying a virtual image | |
| CN103460077B (en) | printing material and photographic material | |
| CN207440436U (en) | A kind of flexibility varied angle slot array diffraction optics micro-structure | |
| JP2007047757A (en) | Method for producing translucent screen, apparatus for producing translucent screen, and translucent screen | |
| JP2004249508A (en) | Stereolithography apparatus | |
| WO2021120906A1 (en) | Direct-write photoetching system and direct-write photoetching method | |
| CN107678171B (en) | A kind of laser speckle suppressing method based on flexible varied angle slot array diffraction optical device | |
| CN107678172B (en) | A kind of hot pressing type manufacture method of flexibility varied angle slot array diffraction optical device | |
| CN1684819A (en) | Laser-supported reproduction method | |
| US20160299263A1 (en) | Microlens array, manufacturing method thereof, image acquisition device, and display device | |
| JP2004258071A (en) | Optical component and method for manufacturing same, and image projection screen | |
| CN107783215A (en) | A kind of preparation method of PDMS material flexibility varied angle slot array diffraction optical device | |
| CN207799254U (en) | The flexible varied angle slot array diffraction optical device inhibited for laser speckle | |
| CN207541347U (en) | A kind of realization system of flexibility varied angle slot array diffraction optical device | |
| CN107678173B (en) | The flexible varied angle slot array diffraction optical device inhibited for laser speckle | |
| CN107678174B (en) | A kind of flexibility varied angle slot array diffraction optics micro-structure and its crawler type movement technique | |
| CN107884951A (en) | A kind of preparation method of light-sensitive polyimide material flexibility varied angle slot array diffraction optical device | |
| EP3325277B1 (en) | Printed facets |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |