CN107677458A - A kind of laser beam simulation generator controllable in real time - Google Patents
A kind of laser beam simulation generator controllable in real time Download PDFInfo
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- CN107677458A CN107677458A CN201711042850.8A CN201711042850A CN107677458A CN 107677458 A CN107677458 A CN 107677458A CN 201711042850 A CN201711042850 A CN 201711042850A CN 107677458 A CN107677458 A CN 107677458A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention provides a kind of laser beam simulation generator controllable in real time, the program includes computer, laser, one-level collimator and extender unit, LCD space light modulator, line slideway, two level secondary mirror, distorting lens, tilting mirror, two level object lens, spectroscope, the real-time monitoring unit of wavefront；The laser beam of laser output injects distorting lens after being transmitted through one-level collimator and extender unit, LCD space light modulator and two level secondary mirror successively, inputted again transmitted through two level object lens to spectroscope after being reflected successively via distorting lens and tilting mirror again, the real-time monitoring unit of wavefront is injected by spectroscopical reflected light, transmission light output is as calibration light source；Two level secondary mirror is fixedly installed on line slideway；Computer electrically connects with LCD space light modulator, line slideway, distorting lens and tilting mirror respectively.The present invention can be provided with various aberrations and jitter spectrum and shoot laser beam controllable in real time, to need laser to input, and provide corollary apparatus for each equipment of system mode calibration.
Description
Technical field
The present invention relates to laser application field, especially a kind of laser beam simulation generator controllable in real time.
Background technology
With the rapid development of laser technology, the evaluation of laser beam quality, the correction of laser beam performance increasingly comes
It is concerned by people.Laser beam is evaluated or corrected, it is necessary to there is the beam quality measurement or adaptive of superior performance
Answer optical system.And the calibration of beam quality measurement or adaptive optics system in itself is all a technical problem all the time.
More common way is calibrated by comparing laser interferometer to the test result of standard aberration plate.2015, week
The superfine people of text is in the patent No.：201510466363 " a kind of calibration system for the measurement of CCD far fields method beam quality β factor "
Middle proposition is measured using transmission aberration Lamb wave front-distortion of the laser interferometer to various combination mode, according to test result meter
Calculation obtains beam quality β factor, then the beam quality β factor value ratio with surveying to obtain by school beam quality β factor measuring system
To being calibrated to complete measuring system.It is also to be interfered by comparing that more Hartmann sensor is used in adaptive optics system
Instrument is calibrated to the test result of standard aberration plate.《The Zernike polynominal wave front restoration of Hartmann-Shack sensor misses
Difference》(Li Xinyang, Acta Optica, 2002, the 10th phase of volume 22：Page 1236 ~ 1240) propose to pass according to inspection Hartmann shark
The practices well of sensor measurement accuracy, first the aberration profile situation of aberration plate is measured with ZYGO interferometers, then with biography
Sensor measures to same aberration plate, and contrasts two kinds of measurement results to calibrate Hartmann sensor.Using comparison interferometer
The test result of standard aberration plate is calibrated, significant limitation in actual applications be present.Standard aberration plate first
Aberration it is mostly relatively simple, it is difficult to rationally being calibrated by calibration system room and time bandwidth；Secondly during calibration,
It is difficult to ensure that standard aberration plate is carved, completes calibration with position at the same time, so maximum error will be brought to calibration result.
The content of the invention
Present invention solves the technical problem that it is：Overcome the system calibration process such as current beam mass measurement or adaptive optics
In, it is single to be limited to standard aberration plate aberration, and is difficult to complete calibration in the same time, with position, so as to the big error brought and
Calibrate rational problem.A kind of laser beam simulation generator controllable in real time is provided, the device can be provided with various
Aberration and jitter spectrum and shoot laser controllable in real time, provided for system calibrations such as beam quality measurement or adaptive optics supporting
Device.
This programme is achieved by the following technical measures：
A kind of laser beam simulation generator controllable in real time, includes computer (1), laser (2), one-level collimator and extender list
First (3), LCD space light modulator (4), line slideway (5), two level secondary mirror (6), distorting lens (7), tilting mirror (8), two level thing
Mirror (9), spectroscope (10), the real-time monitoring unit of wavefront (11)；Laser（2）The laser beam of output is transmitted through one-level standard successively
Straight expand unit (3), LCD space light modulator (4) and two level secondary mirror（6）Distorting lens (7) is injected afterwards, then successively via deformation
Again transmitted through two level object lens after mirror (7) and tilting mirror (8) reflection（9）Input to spectroscope（10）, by spectroscope（10）It is anti-
Penetrate light and inject the real-time monitoring unit of wavefront (11), transmission light output is as calibration light source；Two level secondary mirror（6）It is fixedly installed on straight line
Guide rail（5）On；The two level secondary mirror（6）Can be in line slideway（5）On translated along optical axis direction；Computer（1）Respectively with liquid
Brilliant spatial light modulator (4), line slideway (5), distorting lens (7) and tilting mirror (8) electrical connection.
As the preferred of this programme：Distorting lens (7) can be in computer（1）Control under minute surface face type is changed,
So as to add various aberrations for incident laser beam.
As the preferred of this programme：Tilting mirror (8) can be in computer（1）Control under shaken, so as to for outgoing
Laser beam adds different type jitter spectrum.
As the preferred of this programme：LCD space light modulator (4) is the compound modulator of Amplitude ＆ Phase.
As the preferred of this programme：Distorting lens (7) is separate unit discrete surface distorting lens or separate unit continuous surface
Distorting lens.
As the preferred of this programme：Tilting mirror (8) is analysis of fast piezo steering mirror.
As the preferred of this programme：The real-time monitoring unit of wavefront (11) is Hartman wavefront detector or interferometer.
As the preferred of this programme：The real-time monitoring unit of wavefront (11) room and time bandwidth is above by the light beam of calibration
Mass measurement or adaptive optics system.
The beneficial effect of this programme can be learnt according to the narration to such scheme, due to passing through in the program in control device
Distorting lens mirror shape, outgoing laser beam can be made to obtain corresponding aberration, by the tilted mirror input parameter of control device, can be made
Shoot laser beam obtains corresponding jitter spectrum, while by the real-time monitoring unit of wavefront, shoot laser Shu Boqian can be carried out real
When monitor, the device output beam aberration is various, controllable in real time, to beam quality measurement or adaptive optics etc. by calibration system
System, room and time bandwidth can be calibrated rationally.
As can be seen here, the present invention is to system calibrations such as beam quality measurement or adaptive optics, without as traditional calibration side
Formula is the same, by comparing test result of the laser interferometer to standard aberration plate, solves and is difficult to complete to mark in the same time, with position
School, the problems such as bringing calibration error and cumbersome calibration process, there are prominent substantive distinguishing features and significantly improve, its implementation
Beneficial effect be also obvious.
Brief description of the drawings
Fig. 1 is the principle schematic of the present invention.
Fig. 2 is the schematic diagram of calibration embodiment of the present invention.
In figure, 1 is computer, and 2 be laser, and 3 be one-level collimator and extender unit, and 4 be LCD space light modulator, and 5 are
Line slideway, 6 be two level secondary mirror, and 7 be distorting lens, and 8 be tilting mirror, and 9 be two level object lens, and 10 be spectroscope, and 11 be that wavefront is real-time
Monitoring unit, 12 be beam quality measuring system.
Embodiment
All features disclosed in this specification, or disclosed all methods or during the step of, except mutually exclusive
Feature and/or step beyond, can combine in any way.
This specification（Including any accessory claim, summary and accompanying drawing）Disclosed in any feature, except non-specifically chatting
State, can alternative features equivalent by other or with similar purpose replaced.I.e., unless specifically stated otherwise, each feature
It is an example in a series of equivalent or similar characteristics.
As shown in figure 1, the laser 2 of this programme launches laser beam after the collimator and extender of one-level collimator and extender unit 3, by liquid
Brilliant spatial light modulator 4, its corrugated amplitude and phase are tentatively modulated, make the plane that outgoing laser beam is even intensity
Ripple, two level secondary mirror 6 are fixed on line slideway 5, and line slideway 5 can drive two level secondary mirror 6 to be moved linearly along optical axis direction, straight line
The control line of guide rail 5 is connected with computer 1, and distorting lens 7 can make mirror shape change by control program in computer 1, from
And outgoing laser beam is obtained corresponding aberration, tilting mirror 8 makes it be trembled by input spectrum by control program in computer 1
Dynamic, so that shoot laser 12 obtains corresponding jitter spectrum, two level object lens 9 form two level expand unit with two level secondary mirror 6, both it
Between distance change, can large scale change shoot laser beam defocus aberration, shoot laser beam through spectroscope 10 light splitting after, reflection
Light is monitored, transmitted light is then used for by the calibration light source of Calibration System in real time by the real-time monitoring unit 11 of wavefront to its wavefront.
Embodiment 1
As shown in Fig. 2 beam quality measuring system 12 carries out calibration by apparatus of the present invention.Zero positioning is first carried out before calibration,
I.e.：8 line slideway 5, distorting lens 7 and tilting mirror upper electricity are failure to actuate, and two level secondary mirror 6 is located at zero-bit, is formed with two level object lens 9
Two level expand unit, which only expands, does not produce defocus aberration.Situation is monitored according to the wavefront of the real-time monitoring unit 11 of wavefront, adjusted in real time
LCD space light modulator 4 is saved, makes the plane wave that outgoing laser beam is even intensity.After Zero positioning is complete, liquid crystal spatial light is adjusted
The state of device 4 processed is kept, and carries out formal calibration.Distorting lens 7 by controlling mirror shape, export specify certain aberration (such as：It is intelligent
Difference) or indefinite combination aberrations.Tilting mirror 8 is composed according to input parameter output jitter, can be certain frequency spectrum specified
(such as：Sine spectrum) or indefinite combined spectral.Line slideway 5 is controlled, makes two level secondary mirror 6 along the optical axis of line slideway 5
Direction moves linearly, so as to which large scale changes the defocus aberration of shoot laser beam.Beam quality measuring system 12 receives outgoing and swashed
Light beam, by comparing the monitoring result of the real-time monitoring unit 11 of wavefront, system calibration is carried out, the real-time monitoring unit of wavefront 11 is supervised
Result is surveyed, with the calibration result of beam quality measuring system 12, spectrum analysis is done in spatial domain, beam quality measurement can be obtained
The spatial bandwidth of system 12；Spectrum analysis is done in time-domain, the time bandwidth of beam quality measuring system 12 can be obtained.
Embodiment 2
Embodiment 2 and the operating procedure all same of embodiment 1, difference are that beam quality measuring system 12 changes Hartmann's ripple into
Preceding measuring system.
Embodiment 3
Embodiment 3 and the operating procedure all same of embodiment 1, difference are that beam quality measuring system 12 changes adaptive optical into
System.
The invention is not limited in foregoing embodiment.The present invention, which expands to, any in this manual to be disclosed
New feature or any new combination, and disclose any new method or process the step of or any new combination.
Claims (8)
1. a kind of laser beam simulation generator controllable in real time, it is characterized in that：Include computer (1), laser (2), one
Level collimator and extender unit (3), LCD space light modulator (4), line slideway (5), two level secondary mirror (6), distorting lens (7), inclination
Mirror (8), two level object lens (9), spectroscope (10), the real-time monitoring unit of wavefront (11)；The laser（2）The laser beam of output according to
It is secondary to be transmitted through one-level collimator and extender unit (3), LCD space light modulator (4) and two level secondary mirror（6）After inject distorting lens
(7) again transmitted through two level object lens after reflecting, then via distorting lens (7) and tilting mirror (8) successively（9）Input to spectroscope（10）,
By spectroscope（10）Reflected light inject the real-time monitoring unit of wavefront (11), transmission light output as calibration light source；Described two
Level secondary mirror（6）It is fixedly installed on line slideway（5）On；The two level secondary mirror（6）Can be in line slideway（5）On along optical axis direction
Translation；The computer（1）Respectively with LCD space light modulator (4), line slideway (5), distorting lens (7) and tilting mirror (8)
Electrical connection.
2. a kind of laser beam simulation generator controllable in real time according to claim 1, it is characterized in that：The distorting lens
(7) can be in computer（1）Control under minute surface face type is changed, so as to add various aberrations for incident laser beam.
3. a kind of laser beam simulation generator controllable in real time according to claim 1, it is characterized in that：The tilting mirror
(8) can be in computer（1）Control under shaken, so as to for shoot laser beam add different type jitter spectrum.
4. a kind of laser beam simulation generator controllable in real time according to claim 1, it is characterized in that：Described liquid crystal
Spatial light modulator (4) is the compound modulator of Amplitude ＆ Phase.
5. a kind of laser beam simulation generator controllable in real time according to claim 1, it is characterized in that：Described deformation
Mirror (7) is separate unit discrete surface distorting lens or separate unit continuous surface deformable mirror.
6. a kind of laser beam simulation generator controllable in real time according to claim 1, it is characterized in that：Described inclination
Mirror (8) is analysis of fast piezo steering mirror.
7. a kind of laser beam simulation generator controllable in real time according to claim 1, it is characterized in that：Described wavefront
Real-time monitoring unit (11) is Hartman wavefront detector or interferometer.
8. a kind of laser beam simulation generator controllable in real time according to claim 1, it is characterized in that：Described wavefront
Real-time monitoring unit (11) room and time bandwidth is above beam quality measurement or adaptive optics system by calibration.
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| CN201711042850.8A CN107677458B (en) | 2017-10-31 | 2017-10-31 | Real-time controllable laser beam simulation generating device |
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| CN201711042850.8A CN107677458B (en) | 2017-10-31 | 2017-10-31 | Real-time controllable laser beam simulation generating device |
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| CN107677458B CN107677458B (en) | 2023-08-18 |
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Cited By (5)
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| CN109253797A (en) * | 2018-10-15 | 2019-01-22 | 湖北航天技术研究院总体设计所 | A kind of laser irradiating effects pilot system and method |
| CN109375366A (en) * | 2018-12-20 | 2019-02-22 | 中国工程物理研究院应用电子学研究所 | A kind of distorting lens voltage protection method and distorting lens system based on neighborhood |
| CN109883542A (en) * | 2019-03-29 | 2019-06-14 | 中国科学院长春光学精密机械与物理研究所 | No Wavefront detecting expands the laser beam expanding transmission method and system of optical path compensation |
| CN111929891A (en) * | 2020-08-17 | 2020-11-13 | 中国科学院光电技术研究所 | Adaptive optical system wave-front tilt composite correction device and control method |
| CN112817157A (en) * | 2020-12-28 | 2021-05-18 | 西南技术物理研究所 | Novel flat-top light beam generating device |
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| CN105610493A (en) * | 2015-12-21 | 2016-05-25 | 西安空间无线电技术研究所 | Atmosphere turbulence simulation system and method based on inverse self-adaptation technology |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253797A (en) * | 2018-10-15 | 2019-01-22 | 湖北航天技术研究院总体设计所 | A kind of laser irradiating effects pilot system and method |
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| CN109883542A (en) * | 2019-03-29 | 2019-06-14 | 中国科学院长春光学精密机械与物理研究所 | No Wavefront detecting expands the laser beam expanding transmission method and system of optical path compensation |
| CN111929891A (en) * | 2020-08-17 | 2020-11-13 | 中国科学院光电技术研究所 | Adaptive optical system wave-front tilt composite correction device and control method |
| CN111929891B (en) * | 2020-08-17 | 2022-08-02 | 中国科学院光电技术研究所 | Adaptive optical system wave-front tilt composite correction device and control method |
| CN112817157A (en) * | 2020-12-28 | 2021-05-18 | 西南技术物理研究所 | Novel flat-top light beam generating device |
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| CN107677458B (en) | 2023-08-18 |
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