CN107676978A - A kind of temperature control device Electromagnetic Heating liquid-storage system - Google Patents

A kind of temperature control device Electromagnetic Heating liquid-storage system Download PDF

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Publication number
CN107676978A
CN107676978A CN201710976173.0A CN201710976173A CN107676978A CN 107676978 A CN107676978 A CN 107676978A CN 201710976173 A CN201710976173 A CN 201710976173A CN 107676978 A CN107676978 A CN 107676978A
Authority
CN
China
Prior art keywords
reserve tank
liquid reserve
liquid
temperature control
storage system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201710976173.0A
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Chinese (zh)
Inventor
金鑫
王光光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Yun Feng Technology Co Ltd
Original Assignee
Wuxi Yun Feng Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Yun Feng Technology Co Ltd filed Critical Wuxi Yun Feng Technology Co Ltd
Priority to CN201710976173.0A priority Critical patent/CN107676978A/en
Publication of CN107676978A publication Critical patent/CN107676978A/en
Withdrawn legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H7/00Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release
    • F24H7/02Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid
    • F24H7/04Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid with forced circulation of the transfer fluid
    • F24H7/0408Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid with forced circulation of the transfer fluid using electrical energy supply
    • F24H7/0433Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid with forced circulation of the transfer fluid using electrical energy supply the transfer medium being water
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • F24H9/0005Details for water heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • F24H9/18Arrangement or mounting of grates or heating means
    • F24H9/1809Arrangement or mounting of grates or heating means for water heaters
    • F24H9/1818Arrangement or mounting of electric heating means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • F24H9/20Arrangement or mounting of control or safety devices
    • F24H9/2007Arrangement or mounting of control or safety devices for water heaters
    • F24H9/2014Arrangement or mounting of control or safety devices for water heaters using electrical energy supply
    • F24H9/2028Continuous-flow heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H2250/00Electrical heat generating means
    • F24H2250/08Induction

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Induction Heating (AREA)

Abstract

The invention discloses a kind of temperature control device Electromagnetic Heating liquid-storage system,It is simple to aim to provide a kind of overall structure,Control accuracy high temperature control device Electromagnetic Heating liquid-storage system,Its drip irrigation device is,Including the cuboid liquid reserve tank being made up of box side,The intrusive mood pump connected on liquid reserve tank with liquid reserve tank,The liquid reserve tank is provided with the heater in insertion liquid reserve tank,The heater include the vertical direction top in the liquid reserve tank be fixedly connected with liquid reserve tank and bottom close to liquid reserve tank bottom plate cylindrical wall,In cylindrical wall and inner liner circular pipe that top is connected with cylindrical wall bottom,Feed tube through liquid reserve tank bottom and in inner liner circular pipe,The inlet connected with feed tube is provided with close to one end outside liquid reserve tank positioned at feed tube,It is sheathed on outside feed tube and top and is fixed on the earthenware of liquid reserve tank bottom and the high frequency coil positioned at earthenware outer, coaxial arrangement.

Description

A kind of temperature control device Electromagnetic Heating liquid-storage system
Technical field
The present invention relates to temperature control device field, more particularly to a kind of temperature control device Electromagnetic Heating liquid-storage system.
Background technology
Modern super hot investment casting, processing and apparatus measures have enter into nanometer, sub- the nanometer even technical merit of micromicron. As the raising of science and technology, environmental factor are also more and more significant to the influence of these high, precision and frontier instrument and equipments.According to phase Statistics is closed, in accurate and Ultra-precision Turning, nearly 40%~70% mismachining tolerance derives from the thermal deformation of lathe, it is clear that with temperature The ambient parameter spent for representative, which has become, restricts an important factor for nanotechnolgy further develops.Litho machine is as highly integrated Degree, high-accuracy manufacturing equipment are extremely harsh to operating environment requirements, therefore there is an urgent need to a kind of high precision temperature control equipment.
At present, Publication No. CN101609262B Chinese patent discloses a kind of temperature control of projection lens of lithography machine Device, it includes, at least a water jacket, and the water jacket includes water jacket body and double helix is wrapped in the water pipe of the external wall of the water jacket;For Sense an at least temperature sensor for the temperature of the projection objective of the litho machine;Flow distributing and collecting plate by the flow distributing and collecting pipe to this The water pipe of water jacket body provides recirculated water and receives the recirculation water in the water pipe of the water jacket body, is provided with and is used on the flow distributing and collecting pipe Control the regulating valve of the circulating water flow in the water pipe;The temperature of water control unit control recirculated water is circulated, and passes through the transmission Pipe provides recirculated water to the flow distributing and collecting plate;Projection objective temperature control unit be used to receiving the temperature sensor senses should The temperature of projection objective, the projection objective temperature control unit adjust the circulation water control unit according to the projection objective temperature value The temperature of the recirculated water of offer and the opening journey of the regulating valve.
Although the temperature control equipment of the temperature control equipment projection lens of lithography machine of this projection lens of lithography machine can Ensure the uniformity and stability of the projection objective bulk temperature by temperature sensor, but this temperature controlled mode is By the control for circulating water temperature so as to carry out overall control, at the same it is internal hydraulically full in heating process, and outside is deposited It is relatively low in the situation overall thermal transformation efficiency that heat scatters and disappears.
The content of the invention
It is an object of the invention to provide a kind of temperature control device Electromagnetic Heating liquid-storage system, there is heater to be arranged in for it Inside liquid reserve tank, effectively by the liquid absorption in liquid-storage system, heat is produced by liquid absorption in liquid reserve tank, has and effectively carries The advantages of high thermal transition efficiency.
The present invention above-mentioned technical purpose technical scheme is that:
A kind of temperature control device Electromagnetic Heating liquid-storage system, including the cuboid liquid reserve tank being made up of box side, positioned at storage The intrusive mood pump connected in liquid case with liquid reserve tank, the liquid reserve tank are provided with the heater in insertion liquid reserve tank, the heating Device include the vertical direction top in the liquid reserve tank be fixedly connected with liquid reserve tank and bottom close to liquid reserve tank bottom plate cylindrical wall, In cylindrical wall and inner liner circular pipe that top is connected with cylindrical wall bottom, through liquid reserve tank bottom and in inner liner circular pipe Feed tube, positioned at feed tube, one end is provided with the inlet connected with feed tube, is sheathed on outside feed tube outside the liquid reserve tank The earthenware of liquid reserve tank bottom and the high frequency coil positioned at earthenware outer, coaxial arrangement are fixed in portion and top.
By using above-mentioned technical proposal, justify in liquid reserve tank because the high frequency coil heating liquid reserve tank of heater is corresponding Barrel, the liquid in liquid reserve tank is transferred heat to by heat transfer, therefore common usual electricity is compared in heating process Magnetic heater has preferable thermal transition efficiency, the heater being arranged in liquid reserve tank, and liquid is each filled with inside and outside high frequency coil Body, heat utilization ratio is high, while has evaded the risk of electromagnetic heater circumference metal device, and eliminates Electromagnetic Heating External protection guards.The high problem of traditional resistor silk heating seal request is avoided, main heating position is stainless steel inner lining tube, real Existing Electromagnetic Heating is to heated material magnetic conductivity requirement, while the stainless steel tube of liner contacts with circulation fluid, if liquid reserve tank other Position uses stainless steel, and the heating storage of corrosive liquids can be achieved, realize continuous reliable work requirements.Simultaneously Liquid forms the distribution mode of " W " type, can effectively prevent local dry burning phenomenon.And liquid can pass through liquid in liquid reserve tank The equipment such as outside barrel transmit heat to the external world, and so as to cause the lost situation of heat, high frequency coil is in heating liquid reserve tank Heat transfer can be carried out to corresponding cylindrical wall, position in liquid reserve tank is transferred heat to by way of heat transfer during liquid Liquid in both sides, ensure that Electromagnetic Heating heats to equipment miscellaneous part, raising heat conversion further.
Further set:The feed tube is provided with some fluid holes away from inlet one end
By using above-mentioned technical proposal, feed tube top part fluid hole, the liquid into liquid reserve tank is set to be forced into electricity Magnetic heating region, Electromagnetic Heating is accelerated to produce recycle heat diffusion, it is ensured that liquid reserve tank internal liquid temperature value is consistent, not because of position It is different and have temperature difference phenomenon.
Further set:The inner liner circular pipe on liquid reserve tank bottom end away from being also fixed with internal lining pipe upper plug head.
By using above-mentioned technical proposal, reduce the liquid splash occurred in liquid reserve tank and occur to the situation of outside.
Further set:The liquid reserve tank bottom side is provided with liquid discharging tube, is also set on the liquid reserve tank above the liquid discharging tube There is the liquid-feeding tube connected with liquid reserve tank.
By using above-mentioned technical proposal, because the liquid in liquid reserve tank has the loss of part in use, because This needs to supplement the amount of liquid of liquid reserve tank by liquid-feeding tube when fluid low in liquid reserve tank, while needs the feelings such as maintenance Liquid can be discharged by liquid discharging tube during condition.
Further set:The liquid reserve tank side is additionally provided with the liquid level marking device connected with liquid reserve tank for showing liquid level.
By using above-mentioned technical proposal, for supplying the level condition inside observer's observation liquid reserve tank.
Further set:Observation panel is provided with positioned at intrusive mood pump side above the liquid reserve tank, the observation panel is provided with Observation lid, the observation lid, which is surrounded by, will pass through the fixing bolt that observation lid is fixed on liquid reserve tank.
By using above-mentioned technical proposal, observation lid is mainly used in checking liquid reserve tank internal unit situation, while observes liquid Body situation
In summary, the invention has the advantages that:Its overall structure is simple, and control accuracy is high, is arranged in liquid reserve tank The heater in portion so that liquid is each filled with inside and outside heating coil, heat utilization ratio is high, while the distribution of liquid can be effectively real Existing heating region liquid is fully moved, it is ensured that the heat of liquid-storage system is uniformly distributed.
Brief description of the drawings
Fig. 1 is temperature control device Electromagnetic Heating liquid-storage system overall structure diagram;
Fig. 2 is temperature control device Electromagnetic Heating liquid-storage system internal liquid distribution schematic diagram;
Fig. 3 is temperature control device Electromagnetic Heating liquid-storage system feed tube structural representation;
Fig. 4 is temperature control device Electromagnetic Heating liquid-storage system feed tube periphery earthenware and high-frequency coil structure schematic diagram.
In figure, 1, box side;2nd, liquid reserve tank;3rd, intrusive mood pump;4th, heater;41st, cylindrical wall;42nd, inner liner circular pipe; 43rd, feed tube;44th, inlet;45th, earthenware;46th, high frequency coil;5th, fluid hole;6th, internal lining pipe upper plug head;7th, liquid discharging tube;8、 Liquid-feeding tube;9th, liquid level marking device;10th, observation panel;11st, observation lid;12nd, fixing bolt.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
Embodiment 1:A kind of temperature control device Electromagnetic Heating liquid-storage system, including the cuboid being made up of box side 1 Liquid reserve tank 2, the memory storage of liquid reserve tank 2 have for hydronic liquid, are provided with positioned at liquid reserve tank 2 and are invaded with what liquid reserve tank 2 connected Enter formula pump 3.The side bottom of liquid reserve tank 2 one is additionally provided with liquid discharging tube 7, and the liquid reserve tank 2 of the top of liquid discharging tube 7 is provided with to be connected with liquid reserve tank 2 Liquid-feeding tube 8.And it is additionally provided with and is connected with liquid reserve tank 2 for showing liquid with respect to the side of liquid discharging tube 7 and liquid-feeding tube 8 in liquid reserve tank 2 The liquid level marking device 9 of position.The top of liquid reserve tank 2 is provided with observation panel 10 positioned at the side of intrusive mood pump 3, and observation panel 10 is provided with observation and covered 11, observation lid 11, which is surrounded by, will pass through the fixing bolt 12 that observation lid 11 is fixed on liquid reserve tank 2.
The heater 4 in liquid reserve tank 2 is additionally provided with liquid reserve tank 2, heater 4 includes erecting in liquid reserve tank 2 Nogata is fixedly connected to top with liquid reserve tank 2 and the cylindrical wall 41 of the close bottom plate of liquid reserve tank 2 in bottom, in cylindrical wall 41 and pushes up The inner liner circular pipe 42 being connected with the bottom of cylindrical wall 41 is held, inner liner circular pipe 42 on the bottom end of liquid reserve tank 2 away from being also fixed with Bushing pipe upper plug head 6.The feed tube 43 connected with inner liner circular pipe 42 is provided with the bottom of liquid reserve tank 2, is provided with the top of liquid reserve tank 2 The inlet 44 connected with feed tube 43.And earthenware 45 is also arranged with outside feed tube 43, the top of earthenware 45 is fixed on The bottom of liquid reserve tank 2, high frequency coil 46 is disposed with the outer, coaxial of earthenware 45, feed tube 43 on the one end of inlet 44 away from setting There are some fluid holes 5.
Its main operational principle is as follows:Circulation fluid inlet 44, feed tube 43 enter liquid reserve tank 2, feed tube 43 during work Top locally goes out liquid aperture, and the liquid made into liquid-storage system is forced into Electromagnetic Heating region, accelerates Electromagnetic Heating to produce Recycle heat spreads, it is ensured that liquid-storage system internal liquid temperature value is consistent, does not have temperature difference phenomenon because position is different.The liquid of heating Body, which is delivered to liquid pressing through intrusive mood pump 3, needs position.
Heater 4 makes the ordinary carbon steel outside inner liner circular pipe 42 produce sensing heating after being powered through high frequency coil 46, leads to Its internal liquid of overheat conduction heating.Due to magnetic signature, such as there is leakage field phenomenon in the high frequency coil 46 of heater 4, then can Circumference metal properties object, and high frequency coil 46 then heats the corresponding cylindrical wall 41 of liquid reserve tank 2 in the present embodiment, passes through heat Conduction transfers heat to the liquid in liquid reserve tank 2, ensures that Electromagnetic Heating heats to equipment miscellaneous part, improves thermal transition again Rate.Realize that temperature control device liquid storage heats so as to overall, thermal transition efficiency high, relatively commonly use Resistant heating energy-conservation at present.Electricity simultaneously Magnetic heating is arranged in inside water tank, magnetic leakage free phenomenon, is produced heat by liquid absorption in liquid-storage system, is improved thermal conversion efficiency Rate.Long lifespan is heated compared with traditional resistor silk, and reliability is high, and it is good that adaptability promoted existing temperature control device, easy for installation.It is main Heating position is stainless steel inner lining tube, realizes Electromagnetic Heating to heated material magnetic conductivity requirement, at the same the stainless steel tube of liner with Circulation fluid contacts, if other positions of liquid reserve tank 2 use stainless steel, the heating storage of corrosive liquids can be achieved, real Continuous reliable work requirements are showed.
The above embodiments are only explanation of the invention, and it is not limitation of the present invention, people in the art Member can make the modification of no creative contribution to the present embodiment as needed after this specification is read, but as long as at this All protected in the right of invention by Patent Law.

Claims (6)

1. a kind of temperature control device Electromagnetic Heating liquid-storage system, including by box side(1)The cuboid liquid reserve tank of composition (2), positioned at liquid reserve tank(2)Upper and liquid reserve tank(2)The intrusive mood pump of connection(3), it is characterised in that:The liquid reserve tank(2)On set There is insertion liquid reserve tank(2)Interior heater(4), the heater(4)Including positioned at liquid reserve tank(2)Interior vertical direction top With liquid reserve tank(2)It is fixedly connected and bottom is close to liquid reserve tank(2)The cylindrical wall of bottom plate(41), positioned at cylindrical wall(41)Interior and top With cylindrical wall(41)The inner liner circular pipe of bottom connection(42), through liquid reserve tank(2)Bottom and it is located at inner liner circular pipe(42)Interior enters Liquid pipe(43), positioned at feed tube(43)Close to liquid reserve tank(2)Outside one end is provided with and feed tube(43)The inlet of connection (44), be sheathed on feed tube(43)Liquid reserve tank is fixed on outside and top(2)The earthenware of bottom(45)And positioned at earthenware (45)The high frequency coil of outer, coaxial arrangement(46).
A kind of 2. temperature control device Electromagnetic Heating liquid-storage system according to claim 1, it is characterised in that:The feed tube (43)Away from inlet(44)One end is provided with some fluid holes(5).
A kind of 3. temperature control device Electromagnetic Heating liquid-storage system according to claim 2, it is characterised in that:The liner circle Pipe(42)Away from liquid reserve tank(2)Internal lining pipe upper plug head is also fixed with bottom end(6).
A kind of 4. temperature control device Electromagnetic Heating liquid-storage system according to claim 3, it is characterised in that:The liquid reserve tank (2)Bottom side is provided with liquid discharging tube(7), the liquid discharging tube(7)The liquid reserve tank of top(2)On be additionally provided with and liquid reserve tank(2)Connection Liquid-feeding tube(8).
A kind of 5. temperature control device Electromagnetic Heating liquid-storage system according to claim 4, it is characterised in that:The liquid reserve tank (2)Side is additionally provided with and liquid reserve tank(2)Connect the liquid level marking device for showing liquid level(9).
A kind of 6. temperature control device Electromagnetic Heating liquid-storage system according to claim 5, it is characterised in that:The liquid reserve tank (2)Top is located at intrusive mood pump(3)Side is provided with observation panel(10), the observation panel(10)It is provided with observation lid(11), it is described Observation lid(11)It is surrounded by and will pass through observation lid(11)It is fixed on liquid reserve tank(2)On fixing bolt(12).
CN201710976173.0A 2017-10-19 2017-10-19 A kind of temperature control device Electromagnetic Heating liquid-storage system Withdrawn CN107676978A (en)

Priority Applications (1)

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CN201710976173.0A CN107676978A (en) 2017-10-19 2017-10-19 A kind of temperature control device Electromagnetic Heating liquid-storage system

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Application Number Priority Date Filing Date Title
CN201710976173.0A CN107676978A (en) 2017-10-19 2017-10-19 A kind of temperature control device Electromagnetic Heating liquid-storage system

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CN107676978A true CN107676978A (en) 2018-02-09

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110038209A (en) * 2009-10-08 2011-04-14 자원전자 주식회사 High efficiency heating apparatus for infrastructure
KR20140078487A (en) * 2012-12-17 2014-06-25 현대자동차주식회사 Washer heater apparatus for vehicle
CN105402894A (en) * 2015-12-13 2016-03-16 何树香 Instantaneous water heater achieving high-frequency electromagnetic induction heating
CN205896698U (en) * 2016-07-25 2017-01-18 洋紫荆油墨(浙江)有限公司 Printing ink pipeline automatic temperature control system
CN107246729A (en) * 2017-07-12 2017-10-13 张欣翼 A kind of electromagnetic eddy calandria of cavity body structure
CN207299527U (en) * 2017-10-19 2018-05-01 无锡沄沨科技有限公司 A kind of temperature control device electromagnetic heating liquid-storage system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110038209A (en) * 2009-10-08 2011-04-14 자원전자 주식회사 High efficiency heating apparatus for infrastructure
KR20140078487A (en) * 2012-12-17 2014-06-25 현대자동차주식회사 Washer heater apparatus for vehicle
CN105402894A (en) * 2015-12-13 2016-03-16 何树香 Instantaneous water heater achieving high-frequency electromagnetic induction heating
CN205896698U (en) * 2016-07-25 2017-01-18 洋紫荆油墨(浙江)有限公司 Printing ink pipeline automatic temperature control system
CN107246729A (en) * 2017-07-12 2017-10-13 张欣翼 A kind of electromagnetic eddy calandria of cavity body structure
CN207299527U (en) * 2017-10-19 2018-05-01 无锡沄沨科技有限公司 A kind of temperature control device electromagnetic heating liquid-storage system

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Application publication date: 20180209