CN107664998A - The thickness control device and method of a kind of electrode plates - Google Patents
The thickness control device and method of a kind of electrode plates Download PDFInfo
- Publication number
- CN107664998A CN107664998A CN201610613517.7A CN201610613517A CN107664998A CN 107664998 A CN107664998 A CN 107664998A CN 201610613517 A CN201610613517 A CN 201610613517A CN 107664998 A CN107664998 A CN 107664998A
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- electrode plates
- thickness
- resistance
- test
- conductive fiber
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000012360 testing method Methods 0.000 claims abstract description 92
- 239000000835 fiber Substances 0.000 claims abstract description 56
- 239000011247 coating layer Substances 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 3
- 238000000576 coating method Methods 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000005030 aluminium foil Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002803 fossil fuel Substances 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 239000005749 Copper compound Substances 0.000 description 1
- 241001269238 Data Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 150000001880 copper compounds Chemical class 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D5/00—Control of dimensions of material
- G05D5/02—Control of dimensions of material of thickness, e.g. of rolled material
- G05D5/03—Control of dimensions of material of thickness, e.g. of rolled material characterised by the use of electric means
Abstract
A kind of thickness control device of electrode plates, including electrode plates, upper conductive fiber, lower conductive fiber, upper sensor, lower sensor, upper signal wire, lower signal wire and test cabinet, the test cabinet includes thickness test module, resistance test module, Database module and thickness adjusting module, the test cabinet by with upper wire, upper sensor, upper conductive fiber, electrode plates, lower conductive fiber, lower sensor, lower wire is connected to form a loop to test the resistance of electrode plates, the switch board monitors the thickness of electrode plates by the resistance measured.The control method of thickness provided by the invention can realize that the thickness to electrode plates is monitored and adjusted using relation corresponding to the resistance and thickness of the electrode plates tested out, the method for controlling thickness is not only more accurate, and implement simple and convenient, it is easy to popularize and promotes.
Description
【Technical field】
The present invention relates to the thickness control device and method of cell art, more particularly to a kind of electrode plates.
【Background technology】
With fossil fuel shortages, increasing environmental pollution, fossil energy crisis has turned into the matter of utmost importance of social development, green
Color non-pollution renewable energy arises at the historic moment, lithium ion battery as green regenerative energy sources, with its substitute fossil fuels into
For the development trend of new energy.The battery core of lithium ion battery includes being coated respectively with positive electrode, negative material and wound on one
The anode pole piece and cathode pole piece risen, anode pole piece and cathode pole piece are commonly referred to as electrode plates.The crucial making of electrode plates
Technique is coating, baking, two pairs of rollers successively, and cell coating technogenic influence battery cycle life, low pressure rate, gram volume play, multiplying power
Performance etc..Coating layer thickness and resistance, both positive and negative polarity pole piece weight piece can be triggered, cause battery core cyclic process analysis lithium, high resistance, and then
Battery core electrical property is influenceed, therefore detection coating layer thickness and resistance are the core test datas of coating process.The coating used at present
Thickness testing tool is mainly micrometer, and method of testing is that micrometer clamps coating upper and lower surface, rotates the dial of micrometer,
Testing coating thickness, method of testing is simple, and cost is low easy to operate, but such test mode needs constantly to take a survey manually
Amount, and the testing time grow, the reflection cycle is also longer, and pole piece resistance is not tested, can not be according to monitoring and adjust in real time
The thickness of whole pole piece.
In view of the foregoing, it is necessory to provide the thickness control device and method of a kind of electrode plates.
【The content of the invention】
The present invention provide it is a kind of can electrode plates of coordination electrode pole piece thickness in real time thickness control device and method.
To achieve these goals, the present invention provides a kind of thickness control device of electrode plates, including：Electrode plates,
Upper conductive fiber, lower conductive fiber, upper sensor, lower sensor, upper signal wire, lower signal wire and test cabinet, the electrode pole
Piece includes upper and lower surface, and the upper conductive fiber is arranged at the upper surface of the electrode plates, the lower conductive fiber
The lower surface of the electrode plates is arranged at, the upper and lower sensor is respectively arranged on corresponding upper and lower conductive fiber, institute
State wire, one end of lower wire is electrically connected corresponding upper sensor and lower sensor, the other end and is electrically connected to institute
State test cabinet；The test cabinet includes thickness test module, resistance test module, Database module and thickness adjustment mould
Block, the thickness test module are used for the thickness for testing electrode plates, and the resistance test module is used to test electrode plates
Resistance, the Database module are used for the resistance value data corresponding with the thickness value of electrode plates for establishing electrode plates
Storehouse, the thickness adjusting module are used for the thickness for adjusting electrode plates.
In a preferred embodiment, the conductive fiber is cylindrical, and spacing parallel arranging be completely covered on electrode
On the width of the upper and lower surface of pole piece.
In a preferred embodiment, the conductive fiber radius is r, length L, size L*r=70*4mm.
In a preferred embodiment, the sensor is in rectangular-shape, and width corresponds to the width of electrode plates.
In a preferred embodiment, a length of L of the sensor, a width of D, a height of H, the size sensor are L*
D*H=596*3*1mm.
In addition, the present invention also provides a kind of control method of the thickness of electrode plates, comprise the following steps：
Step 1：Test cabinet is opened, pre- heat test device simultaneously confirms that conductive fiber contact is good；
Step 2：The coating layer thickness of sheet resistance and corresponding resistance test point to electrode plates is tested, and is collected
The thickness data corresponding with test resistance；
Step 3：Establish the resistance value database corresponding with the thickness value of electrode plates of electrode plates；
Step 4：The resistance value shown by test cabinet monitors electrode plates thickness in real time, using the database of step 3 as
Standard, judge electrode plates thickness whether in processing range；
Step 5：According to the result of determination of step 4, regulate and control coating layer thickness.
In a preferred embodiment, in step 3, the Database module is according to resistivity formula R=ρ d/L
To establish a database, wherein R is the resistance value of electrode plates, is measured by resistance test module；L is the width of electrode plates
Degree, is constant, in present embodiment, L 596mm；ρ is the resistivity of electrode plates, and it is constant；D is the thickness of electrode plates
Degree, is measured by thickness test module；The Database module is used for the resistance value and electrode plates for establishing electrode plates
Thickness value corresponding to database.
In a preferred embodiment, in step 5, the process that thickness is regulated and controled according to resistance is：When test resistance value surpasses
When going out standard range limit, coating layer thickness is reduced, when resistance value exceeds critical field lower limit, improves coating layer thickness.
Compared with prior art, the thickness control device and method of a kind of electrode plates provided by the invention, the thickness
Control device can be tested the resistance of electrode plates the thickness for monitor electrode plates in real time, it is no longer necessary to go to survey manually
The thickness of electrode plates is tried, also saves time of measuring.It can be covered entirely in addition, the control device is provided with conductive fiber
The width of electrode plates simultaneously contacts with the upper and lower surface of electrode plates, has cleaning action to electrode plates surface.On the other hand, institute
Closed corresponding to the resistance and thickness for stating the electrode plates that method for controlling thickness can utilize the thickness control device to test out
It is to realize that the thickness to electrode plates is monitored and adjusted, the method for controlling thickness is not only more accurate, and realizes
Get up simple and convenient, be easy to popularize and promote.
【Brief description of the drawings】
Fig. 1 is the composition structural representation of the thickness control device of electrode plates provided by the invention.
Fig. 2 is the composition structural representation of the test cabinet of the thickness control device of the electrode plates described in Fig. 1.
【Embodiment】
In order that the purpose of the present invention, technical scheme and advantageous effects become apparent from understanding, below in conjunction with accompanying drawing and
Embodiment, the present invention will be described in further detail.It should be appreciated that the specific implementation described in this specification
Mode is not intended to limit the present invention just for the sake of explaining the present invention.
It refer to Fig. 1, the thickness control device 100 of a kind of electrode plates provided by the invention, for testing and controlling electricity
The thickness of pole pole piece 10.The thickness control device 100 of the electrode plates includes：Upper conductive fiber 20, lower conductive fiber 21, on
Sensor 30, lower sensor 31, upper wire 40, lower wire 41 and test cabinet 50.
The electrode plates 10 can be anode pole piece or cathode pole piece.When electrode plates 10 are anode pole piece, it is wrapped
Include aluminium foil and be coated on the anode material of two opposing surfaces of aluminium foil.When electrode plates 10 are cathode pole piece, it includes copper foil
And it is coated on the cathode material of two opposing surfaces of copper foil.The electrode plates 10 include upper surface 11 and lower surface 12.
The upper conductive fiber 20 is arranged at the upper surface 11 of the electrode plates and in electrical contact with upper surface 11, described
Lower conductive fiber 21 is arranged at the lower surface 12 of the electrode plates and in electrical contact with the lower surface 12.In present embodiment
In, the upper conductive fiber 20, lower conductive fiber 21 are cylindrical, are mainly led by metallic compound type conductive fiber and metal system
Small column spacing parallel arranging made of the types such as electric fiber is arranged on the width of the figure cloth electrode plates.The metallization
The electrically conductive particles of high concentration are mainly locally mixed into fiber and produced by compound type conductive fiber using composite spinning method, and black system is conductive
Particulate carbon black, white system conductive titanium dioxide coating, fiber on the antimony oxide surface of the metal oxide such as tin containing small amounts
It is relatively light, there is pliability, can wash and be easy to process；Also post-processing chemistry set copper compound or plating metal can be passed through.It is described
Prepared by this fiber of metal system conductive fiber is the electric conductivity using metal, its main method has direct fiber elongation method,
Metal wire is iterated through into mould to carry out stretching manufactured fiber.Each upper conductive fiber 20, the length L of lower conductive fiber 21 are
70mm, diameter r are 8m.In the present embodiment, the width L of the electrode plates 10 is：596mm.So, due to upper conductive fine
Dimension 20, it is completely covered on the upper surface 11 of electrode plates, on the width of lower surface 12 spacing parallel arranging of lower conductive fiber 21,
The upper conductive fiber 20, lower conductive fiber 21 can have cleaning action to 11 surfaces on electrode plates 10 and lower surface 12.
The upper sensor 30, lower sensor 31 are respectively rectangular-shape, and are made of an electrically conducting material, each conductive fine
One end of dimension 20 is connected to sensor 30, and the other end contacts with the upper surface 11 of electrode plates 10, each lower conductive fiber 21
One end be connected to lower sensor 31, the other end contacts with the lower surface 12 of electrode plates 10.In present embodiment, the upload
Sensor is that length is that 596mm, width are the cuboids that 3mm, height are 1mm.
One end of the upper wire 40 is electrically connected with corresponding upper sensor 30, and the other end is electrically connected to the test
Cabinet 50, one end of the lower wire 41 are electrically connected with corresponding lower sensor 31, and the other end is electrically connected to the test cabinet
50。
Fig. 2 is refer to, the test cabinet 50 includes thickness test module 51, resistance test module 52, Database mould
Block 53, thickness adjusting module 54.The thickness test module 51 can be using thickness test the methods of ultrasonic wave, X ray
Instrument.The upper wire 40 of the connection of test cabinet 50, then connects upper sensor 30, upper sensor 30 is connected to by upper wire 40
Conductive fiber 20, upper conductive fiber 20 contact with the upper surface 11 of electrode plates 10；Meanwhile test cabinet 50 connects lower wire 41,
Then lower sensor 31 is connected by lower wire 41, lower sensor 31 is connected to lower conductive fiber 21, lower conductive fiber 21 and electrode
The lower surface contact of pole piece 10.The test cabinet 50 by with upper wire 40, upper sensor 30, upper conductive fiber 20, electrode pole
Piece 10, lower conductive fiber 21, lower sensor 31, lower wire 41 are connected to form a loop.So, the electricity of the test cabinet 50
Resistance test module 52 can be to pass through the resistance of above-mentioned loop-around test electrode plates 10.The Database module 53 is according to electricity
Resistance rate formula R=ρ d/L establish a database, and wherein R is the resistance value of electrode plates, measured by resistance test module 52；
L is the width of electrode plates, is constant, in present embodiment, L 596mm；ρ is the resistivity of electrode plates, and it is constant；d
For the thickness of electrode plates, measured by thickness test module；The Database module 53 is used to establish electrode plates
Resistance value database corresponding with the thickness value of electrode plates.Meanwhile the thickness adjusting module 54 of the test cabinet 50 is according to number
Judge the thickness of electrode plates 10 whether in database scope, when test resistance value exceeds the critical field upper limit, survey according to storehouse
Resistance is reduced electrode pole by examination cabinet 50 beyond the feedback of the information of the critical field upper limit of database to process equipment (not shown)
The thickness of the coating of piece 10, when resistance value exceeds the critical field lower limit of database, resistance is exceeded critical field by test cabinet 50
The feedback of the information process equipment of lower limit improves the thickness of the coating of electrode plates 10.So, the root in manufacture craft is just realized
Regulate and control the thickness of coating 10 according to resistance.In the present embodiment, the test device 100 selects 9V constant currents test cabinet 50.
A kind of control method of the thickness of electrode plates, comprises the following steps：
Step 1：Open test cabinet 50, pre- heat test device 100 and confirm upper conductive fiber 20, lower conductive fiber 21 with
Electrode plates 10 contact well.
Step 2：The thickness of the electrode plates 10 of sheet resistance and corresponding resistance test point to electrode plates 10 is surveyed
Examination, and collect the thickness data corresponding with test resistance.
When the upper conductive fiber 20 and the lower conductive fiber of the lower surface of electrode plates 10 that are arranged at electrode plates upper surface 11
21 when touch electrode plates 10, the painting of the resistance and corresponding resistance test point of the test cabinet detecting electrode pole piece 10
Thickness degree, and collect the thickness data of the point corresponding with test resistance, the thickness to survey thickness as standard,
Step 3：Test cabinet establishes the resistance value database corresponding with the thickness value of electrode plates of electrode plates.
The test cabinet 50 includes thickness test module 51, resistance test module 52, Database module 53, thickness and adjusted
Mould preparation block 54.The thickness test module 51 can be using Thickness measuring instrument device the methods of ultrasonic wave, X-ray.The survey
The upper wire 40 of the connection of cabinet 50 is tried, upper sensor 30 is then connected by upper wire 40, upper sensor 30 is connected to conductive fiber 20,
Upper conductive fiber 20 contacts with the upper surface 11 of electrode plates 10；Meanwhile test cabinet 50 connects lower wire 41, then by lower wire
41 connection lower sensors 31, lower sensor 31 are connected to lower conductive fiber 21, the following table of lower conductive fiber 21 and electrode plates 10
Face contacts.The test cabinet 50 passes through fine with upper wire 40, upper sensor 30, upper conductive fiber 20, electrode plates 10, lower conduction
Dimension 21, lower sensor 31, lower wire 41 are connected to form a loop.So, the resistance test module 52 of the test cabinet 50
Can be to pass through the resistance of above-mentioned loop-around test electrode plates 10.The Database module 53 is according to resistivity formula R=ρ
D/L establishes a database, and wherein R is the resistance value of electrode plates, measured by resistance test module 52；L is electrode plates
Width, be constant, in present embodiment, L 596mm；ρ is the resistivity of electrode plates, and it is constant；D is electrode plates
Thickness, measured by thickness test module；The Database module 53 is used for resistance value and the electricity for establishing electrode plates
Database corresponding to the thickness value of pole pole piece.
Step 4：The resistance value shown by test cabinet 50 monitors the thickness of electrode plates 10 in real time, with building for step 3
Whether vertical database is standard, judge the thickness of electrode plates 10 in processing range.
Step 5：According to the result of determination of step 4, the thickness of regulation and control electrode plates 10.
According to above-mentioned result of determination, when test resistance value exceeds the critical field upper limit, test cabinet 50 exceeds resistance
The feedback of the information of the critical field upper limit of database reduces the thickness of the coating of electrode plates 10 to process equipment (not shown), works as electricity
When resistance exceeds the critical field lower limit of database, test cabinet 50 sets feedback of the information technique of the resistance beyond critical field lower limit
The standby thickness for improving the coating of electrode plates 10.So, just realize and electrode plates 10 are regulated and controled according to resistance in manufacture craft
Thickness.
The above-described embodiments are merely illustrative of preferred embodiments of the present invention, not to the model of the present invention
Enclose and be defined, on the premise of design spirit of the present invention is not departed from, this area ordinary skill technical staff is to the technology of the present invention
The various modifications and improvement that scheme is made, it all should fall into the protection domain of claims of the present invention determination.
Claims (8)
- A kind of 1. thickness control device of electrode plates, it is characterised in that：Including electrode plates, upper conductive fiber, lower conductive fibre Dimension, upper sensor, lower sensor, upper signal wire, lower signal wire and test cabinet, the electrode plates include upper surface and following table Face, the upper conductive fiber are arranged at the upper surface of the electrode plates, and the lower conductive fiber is arranged at the electrode plates Lower surface, the upper and lower sensor be respectively arranged at corresponding on upper and lower conductive fiber, the upper wire, the one of lower wire End is electrically connected corresponding upper sensor and lower sensor, the other end and is electrically connected to the test cabinet；The test cabinet Including thickness test module, resistance test module, Database module and thickness adjusting module, the thickness test module is used In the thickness of test electrode plates, the resistance test module is used for the resistance for testing electrode plates, the Database mould Block is used for the resistance value database corresponding with the thickness value of electrode plates for establishing electrode plates, and the thickness adjusting module is used for Adjust the thickness of electrode plates.
- 2. the thickness control device of electrode plates according to claim 1, it is characterised in that：The conductive fiber is in cylinder Shape, and spacing parallel arranging be completely covered on electrode plates upper and lower surface width on.
- 3. the thickness control device of electrode plates according to claim 2, it is characterised in that：The conductive fiber radius is R, length L, size L*r=70*4mm.
- 4. the resistance testing device of electrode plates according to claim 1, it is characterised in that：The sensor is in cuboid Shape, and width corresponds to the width of electrode plates.
- 5. the thickness control device of electrode plates according to claim 4, it is characterised in that：A length of L of the sensor, A width of D, a height of H, the size sensor are L*D*H=596*3*1mm.
- 6. a kind of control method of the thickness of electrode plates, comprises the following steps：Step 1：Test cabinet is opened, pre- heat test device simultaneously confirms that conductive fiber contact is good；Step 2：The coating layer thickness of sheet resistance and corresponding resistance test point to electrode plates is tested, and is collected and surveyed Try the corresponding thickness data of resistance；Step 3：Establish the resistance value database corresponding with the thickness value of electrode plates of electrode plates；Step 4：The resistance value shown by test cabinet monitors electrode plates thickness in real time, using the database of step 3 as standard, Judge electrode plates thickness whether in processing range；Step 5：According to the result of determination of step 4, regulate and control coating layer thickness.
- 7. the control method of the thickness of electrode plates according to claim 6, it is characterised in that：In step 3, the number Module is established according to resistivity formula R=ρ d/L to establish a database according to storehouse, wherein R is the resistance value of electrode plates, by Resistance test module measures；L is the width of electrode plates, is constant, in present embodiment, L 596mm；ρ is electrode plates Resistivity, it is constant；D is the thickness of electrode plates, is measured by thickness test module；The Database module is used for Establish the resistance value database corresponding with the thickness value of electrode plates of electrode plates.
- 8. the control method of the thickness of electrode plates according to claim 6, it is characterised in that：In step 5, according to electricity Resistance regulation and control thickness process be：When test resistance value exceeds the critical field upper limit, coating layer thickness is reduced, when resistance value is beyond mark During quasi- range lower limit, coating layer thickness is improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610613517.7A CN107664998A (en) | 2016-07-29 | 2016-07-29 | The thickness control device and method of a kind of electrode plates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610613517.7A CN107664998A (en) | 2016-07-29 | 2016-07-29 | The thickness control device and method of a kind of electrode plates |
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| Publication Number | Publication Date |
|---|---|
| CN107664998A true CN107664998A (en) | 2018-02-06 |
Family
ID=61115752
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610613517.7A Pending CN107664998A (en) | 2016-07-29 | 2016-07-29 | The thickness control device and method of a kind of electrode plates |
Country Status (1)
| Country | Link |
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| CN (1) | CN107664998A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111162125A (en) * | 2018-11-08 | 2020-05-15 | 无锡华润上华科技有限公司 | Method for monitoring height of grid material in semiconductor device |
| CN112030093A (en) * | 2020-07-15 | 2020-12-04 | 成都飞机工业（集团）有限责任公司 | Method for acquiring optimal path spacing of flame aluminum spraying of robot |
-
2016
- 2016-07-29 CN CN201610613517.7A patent/CN107664998A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111162125A (en) * | 2018-11-08 | 2020-05-15 | 无锡华润上华科技有限公司 | Method for monitoring height of grid material in semiconductor device |
| CN111162125B (en) * | 2018-11-08 | 2022-09-16 | 无锡华润上华科技有限公司 | Method for monitoring height of grid material in semiconductor device |
| CN112030093A (en) * | 2020-07-15 | 2020-12-04 | 成都飞机工业（集团）有限责任公司 | Method for acquiring optimal path spacing of flame aluminum spraying of robot |
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Application publication date: 20180206 |