CN107658275A - The more package modules of stack and its manufacture method - Google Patents

The more package modules of stack and its manufacture method Download PDF

Info

Publication number
CN107658275A
CN107658275A CN201710828205.2A CN201710828205A CN107658275A CN 107658275 A CN107658275 A CN 107658275A CN 201710828205 A CN201710828205 A CN 201710828205A CN 107658275 A CN107658275 A CN 107658275A
Authority
CN
China
Prior art keywords
electronic component
insulating barrier
stack
package modules
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710828205.2A
Other languages
Chinese (zh)
Inventor
张鹤议
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Semiconductor Engineering Inc
Original Assignee
Advanced Semiconductor Engineering Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Semiconductor Engineering Inc filed Critical Advanced Semiconductor Engineering Inc
Priority to CN201710828205.2A priority Critical patent/CN107658275A/en
Publication of CN107658275A publication Critical patent/CN107658275A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3171Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3185Partial encapsulation or coating the coating covering also the sidewalls of the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3192Multilayer coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Ceramic Engineering (AREA)

Abstract

The embodiment of the present invention provides a kind of more package modules of stack and its manufacture method, and the manufacture method of the more package modules of stack includes at least one first electronic component being installed on a substrate.One conductive layer is configured on one first insulating barrier.First insulating barrier is covered in first electronic component and local complexity on the substrate surface.Separately at least one first electronic component is installed on first insulating barrier and is electrically connected with the conductive layer.And one second insulating barrier is covered on first electronic component and the substrate surface.

Description

The more package modules of stack and its manufacture method
The present invention is a divisional application, and the applying date of original application is on 05 31st, 2013, Application No. It is 201310214754.2 entitled:The more package modules of stack and its manufacture method.
Technical field
The present invention is related to a kind of more package modules of stack, and in particular to the stack with the first insulating barrier More package modules.
Background technology
Common Electronic Packaging module generally includes packaged type stacked structure (Package Stacking) at present, and in order to Improve the stacking density of overall Electronic Packaging module and reduce the volume of encapsulation, usual Electronic Packaging module is hung down using three-dimensional The straight combination for stacking (Vertically Integrated Circuits, VIC) is integrated.
When the electronic component for running into different height is electrically connected on substrate, to improve the heap of overall Electronic Packaging module Folded density, existing three-dimensional perpendicular stacking method are generally initially formed molding coated electric components with mould, then will be highly relatively low Electronic component above molding material pothole is dug out using the advance installation position as electronic component with laser, then in molding Conductive pole and circuit are produced in pothole, electronic component is then put in molding pothole and to insert another sealing to fill out Complementary modulus seals pothole.
In general, as the miniaturization of Electronic Packaging module, the ornaments mode and Making programme of electronic component are also got over Become complicated, manufacture difficulty is also lifted therewith.In addition, such a method easily has the problems such as appearance color difference and bad planarization.
The content of the invention
A kind of more package modules of stack of present invention offer, the flow that its insulating barrier encapsulates to simplification, with And the inside of the increase more package modules of stack stacks space availability ratio.
The more package modules of stack of the present invention, including substrate, stacked structure and at least one second electronic component;Stack Structure includes multiple first electronic components, at least one first insulating barrier and an at least conductive pattern layer, which part some One electronic component is installed on substrate, and the first insulating barrier is covered in some first electronic components of part and local complexity substrate Surface, conductive pattern layer are configured on the first insulating barrier, and the electronic component of other first is installed on the first insulating barrier and It is electrically connected with conductive pattern layer;Second electronic component is installed on substrate, and the height of the second electronic component be more than this first The height of electronic component.
The present invention provides a kind of manufacture method of the more package modules of stack, to simplify the flow of encapsulation and increase heap The inside of the more package modules of stacked stacks space availability ratio.
The manufacture method of the more package modules of stack of the present invention, including installing at least one first electronic component and at least One second electronic component is on substrate, and first, second electronic component is connected with electrical property of substrate, and the second electronic component is highly big In the height of first electronic component;After conductive layer is configured on the first insulating barrier, the first insulating barrier is covered in One electronic component and local complexity are on substrate surface.Form at least one conduction for penetrating conductive layer and the first insulating barrier Post, and conductive layer is subjected to patterned process, a conductive pattern layer is formed according to this;Separately it will install at least one first electronic component It is electrically connected with the first insulating barrier and with conductive pattern layer.
In summary, the more package modules of stack of the invention, its second electronic component are highly more than the first electronic component Height so that can have a difference in height between the first electronic component and the second electronic component.Some of first electronic components And second electronic component be installed on substrate, and the first insulating barrier attach be covered in a portion the first electronic component and On partial substrate.Technique is relatively simple, so as to simplify the flow of encapsulation.When the first insulating barrier covers these the first electronic components And when on part substrate, will there be space above these first electronic components to house other first electronic components.Accordingly, no The flow of encapsulation can only be simplified and shorten signal wire path, so that line loss and interference are reduced, product is electrically more preferably. In addition, the encapsulation planarization of the more package modules of stack is high and appearance color is homogeneous, and the inside heap of the more package modules of stack Folded space availability ratio is increased.
In addition, the manufacture method of the more package modules of stack of the invention, its second electronic component are highly more than the The height of one electronic component so that can have a difference in height between the first electronic component and the second electronic component.By attaching the One insulating barrier is covered on first electronic component and partial substrate of a portion, on these first electronic components The space content of side puts other the first electronic components.Accordingly, it can not only simplify the flow of encapsulation and shorten signal wire path, from And make it that line loss and interference are reduced, product is electrically more preferably.In addition, the encapsulation planarization of the more package modules of stack is high and outer It is homogeneous to see color, and the inside of the more package modules of stack stacks space availability ratio and is increased.
In order to be further understood that the present invention to reach technology, method and effect that set purpose is taken, refers to Below in connection with detailed description of the invention, schema, it is believed that the purpose of the present invention, feature and feature, when can thus be able to deeply and It is specific to understand, but institute's accompanying drawings are only provided with annex and used with reference to explanation, are not used for the present invention person of being any limitation as.
Brief description of the drawings
Fig. 1 is the structural representation of the more package modules of stack of first embodiment of the invention.
Fig. 2 is the structural representation of the more package modules of stack of second embodiment of the invention.
Fig. 3 is the schematic flow sheet of the manufacture method of the more package modules of stack of the embodiment of the present invention.
Fig. 4 A~4F are the manufacture method of the stacked package module of first embodiment of the invention respectively in each step institute shape Into semi-finished product schematic diagram.
Wherein, description of reference numerals is as follows:
100th, the more package modules of 200 stacks
110 substrates
112 ground mats
120th, 220 stacked structure
122nd, the electronic component of 122', 122a, 122b, 122c, 122a', 122b'122c' first
124th, the insulating barriers of 124' first
125 conductive layers
126th, 126' conductive pattern layers
127th, 127' guide holes
130 second electronic components
140 second insulating barriers
150 ELECTROMAGNETIC OBSCURANT layers
D1 cutters
S101~S106 steps flow charts
Embodiment
Fig. 1 is the structural representation of the more package modules of stack of first embodiment of the invention.Referring to Fig. 1, stack More package modules 100 include substrate 110, stacked structure 120 and at least one second electronic component 130.Stacked structure 120 configures On substrate 110, and the second electronic component 130 installs (mount) on substrate 110.
Connection pad (boding pad), ground mat (grounding pad) 112 and circuit are commonly configured with substrate 110 (trace) (do not illustrate).In the support plate (carrier) that in practice, substrate 110 is configured by circuit and various electronic components, and These connection pads and circuit can be set according to needs are electrically connected with.
Stacked structure 120 includes multiple first electronic components 122, at least the first insulating barrier 124 and an at least conductive pattern Pattern layer 126.Some of first electronic components 122 are installed on substrate 110, and the first insulating barrier 124 is covered in some of them First electronic component 122 and the surface of local complexity substrate 110, conductive pattern layer 126 are configured on the first insulating barrier 124, and The first electronic component of other 122 is installed on the first insulating barrier 124 and is electrically connected with conductive pattern layer 126.
First electronic component 122 can include all kinds, and the species of these the first electronic components 122 is not fully It is identical.Such as first electronic component 122 can be active member or passive device, chip or discrete elements (discrete Component) etc., as depicted in Fig. 1, the first electronic component 122 can include different species, with the first electronic component 122a, 122b and 122c are represented.But, the present invention is not limited to the species of the first electronic component 122.In addition, first Electronic component 122a, 122b and 122c can be electrically connected with many ways with substrate 110, e.g. routing mode (wire Bonding), the connection pad and/or circuit of flip mode (flip chip) or other method for packing and substrate 110 are electrically connected with.
First insulating barrier 124 is covered in first electronic component 122a, 122b and 122c of a portion, and extends and cover Cover the local surface of substrate 110.First insulating barrier 124 is avoiding producing unnecessary electricity between the first electronic component 122 Property connection.Specifically, the first insulating barrier 124 is a thermosetting sheet glue material, has viscosity at room temperature, attaching and It is covered on first electronic component 122a, 122b and 122c of a portion.Because the first insulating barrier 124 is sheet glue material, So as to which the first insulating barrier 124 can be not required to be covered in first electronic component 122a, 122b of a portion by mould And on 122c, that is to say, that the first insulating barrier 124 is partly taken shape on substrate 110.At a proper temperature, the first insulation Layer 124 is able to more attach on the first electronic component 122 and substrate 110, and will not be dissolved with heating..It is worth Illustrate, the material of the first insulating barrier 124 includes epoxy resin (Epoxy resin), inorfil (inorganic Filler) etc., such as the material of the first insulating barrier 124 can be thermoset hot melt glue glue material (Thermo-melting sealant sheet)。
In multiple first electronic component 122a, 122b and 122c, wherein the first electronic component of another part 122a', 122b' and 122c' are installed on the first insulating barrier 124, and are electrically connected with conductive pattern layer 126.Briefly, First electronic component 122a, 122b and 122c of some of them is located within the first insulating barrier 124.First electronics of another part Element 122a', 122b' and 122c' are located at outside the first insulating barrier 124, and the first electronic component 122' passes through conductive pattern The circuit of layer 126 is designed and can electrically conducted.
Stacked structure 120 also includes at least one conductive pole 127, and conductive pole 127 penetrates the first insulating barrier 124.Typically For, conductive pole 127 is interior through extension from conductive pattern layer 126 toward the first insulating barrier 124, and according to different product designs It is for electrically connecting to different the first electronic component 122 or base plate line.
The more package modules 100 of stack include at least one second electronic component 130, wherein the second electronic component 130 is installed In on substrate 110, and the height of the second electronic component 130 is more than the height of the first electronic component 122.Similarly, the second electronics member Part 130 can also include all kinds, e.g. active member or passive device, chip or discrete elements etc..And second is electric Subcomponent 130 can also be electrically connected with many ways with substrate 110, e.g. routing mode, flip mode or other envelopes Dress method and the connection pad and/or circuit of substrate 110 are electrically connected with.
The more package modules 100 of stack also include the second insulating barrier 140, and the second insulating barrier 140 is covered in the second electronics member Part 130, stacked structure 120 and the surface of substrate 110.Second insulating barrier 140 causes the second electronics to reduce moisture intrusion The infringement of element 130, stacked structure 120 or circuit, and the second insulating barrier 140 can also avoid the second electronic component 130 Between produce unnecessary electric connection.The material of second insulating barrier 140 can be different with the material of the first insulating barrier 124, example Such as the second insulating barrier 140 can be an adhesive layer, and main material includes pressing mold glue (molding compound), passes through sealing Technique (encapsulation process) inserts the shaping of die cavity (cavity) baking hardening.Or second insulating barrier 140 Material can be identical with the material of the first insulating barrier 124, is all thermosetting sheet glue material, and the second electricity is covered in a manner of attaching Subcomponent 130, stacked structure 120 and the surface of substrate 110.But, the present invention is not subject to the material of the second insulating barrier 140 Limit.
In addition, being designed for the ELECTROMAGNETIC OBSCURANT of product, the more package modules 100 of stack also include ELECTROMAGNETIC OBSCURANT layer 150, electricity Magnetic shielding layer 150 is located at the outer surface of the second insulating barrier 140, and is electrically connected with ground mat 112.ELECTROMAGNETIC OBSCURANT layer 150 is used To reduce electromagnetic interference effect caused by the electronic component 130 of electronic component 122 and second and Radio frequency interference effect.It is general and Speech, ELECTROMAGNETIC OBSCURANT layer 150 are made by conductive material, e.g. with metal material, conducting polymer composite either conduction again Made by condensation material.And ELECTROMAGNETIC OBSCURANT layer 150 can be by spraying (Spray Coating), ion plating (Ion Plating), the mode such as sputter (Sputter Deposition) or evaporation (Evaporation Deposition) deposits Conductive film or with metal cover cover in the outer surface of the second insulating barrier 140.
Fig. 2 is the diagrammatic cross-section of the more package modules of stack of second embodiment of the invention.The stacking of second embodiment Both the more package modules 200 of formula package modules 100 more to the stack of first embodiment structure is similar, and effect is identical, such as heap The more package modules 200 and 100 of stacked equally all include the first electronic component 122.The more package modules of stack will be only introduced below Difference both 200 and 100, and then it is no longer repeated for identical feature.
Referring to Fig. 2, the more package modules 200 of the stack of second embodiment include substrate 110, stacked structure 220 and At least one second electronic component 130.Stacked structure 220 is configured on substrate 110, and the second electronic component 130 is installed (mount) on substrate 110.
Stacked structure 220 includes multiple first electronic components 122, multiple first insulating barriers 124 and multiple conductive patterns Layer 126.What deserves to be explained is stacked structure 220 is by multiple first electronic components 122, multiple first insulating barriers 124 and more Individual conductive pattern layer 126, which stacks, to be formed.
Specifically, some of first electronic component 122a, 122b and 122c are installed on substrate 110, and wherein One first insulating barrier 124 is covered in these the first electronic component 122a, 122b and 122c and the surface of local complexity substrate 110 On, and a wherein conductive pattern layer 126 is configured on this first insulating barrier 124, and the first electronic component of another part 122a, 122b and 122c are installed on this first insulating barrier 124 and are electrically connected with this conductive pattern layer 126.Another first is exhausted Edge layer 124' is on the first electronic component 122 and conductive pattern layer 126 is covered in, and another conductive pattern layer 126' is being covered In on the first insulating barrier 124', and first electronic component 122a', 122b' and 122c' of another part is installed in the first insulation It is electrically connected with layer 124' and with conductive pattern layer 126'.
Briefly, stacked structure 220 can be sandwich construction, and some of first electronic components 122 are installed in substrate On 110 and within the first insulating barrier 124, the first electronic component of other 122 is located on the first insulating barrier 124, and First electronic component 122' is located at outside the first insulating barrier 124'.Conductive pattern layer 126,126' be located at the first insulating barrier 124, On 124'.
What deserves to be explained is in the present embodiment, stacked structure 220 is double-layer structure.But, in other embodiments, According to considering for different electric connection designs, stacked structure 220 can be more than two layers of structure.But, the present invention not This is limited.
Fig. 3 is the schematic flow sheet of the manufacture method of the more package modules of stack of the embodiment of the present invention.A~4F points of Fig. 4 It is not the signal of semi-finished product that the manufacture method of the more package modules of stack of first embodiment of the invention is formed in each step Figure.Refer to Fig. 3 and sequentially coordinate reference picture 4A~4F.
In step 101, Fig. 4 A are referred to, will at least one first electronic component 122 and at least one second electronic component 130 are installed on substrate 110, and the first electronic component 122 is all electrically connected with the second electronic component 130 with substrate 110, and The height of second electronic component 130 is more than the height of the first electronic component 122.What deserves to be explained is in this, highly it is defined as installing The first electronic component 122 and the bottom surface of the second electronic component 130 afterwards extends vertically distance to top surface.Due to the second electronics The height of element 130 is more than the height of the first electronic component 122, therefore, in the first electronic component 122 and the second electronic component 130 Between can have a difference in height.
Specifically, there is provided substrate 110, substrate 110 can be circuit yoke plate (circuit substrate panel or Circuit substrate strip) (Fig. 4 A only illustrate a part for substrate 110).At least one first is installed on substrate 110 Electronic component 122 and at least one second electronic component 130, in the present embodiment, there is provided multiple first electronic component 122a, 122b and 122c and multiple second electronic components 130, wherein the first electronic component 122 and the second electronic component 130 can be with It is active member or passive device, chip or discrete elements etc., and can be electrically connected with many ways with substrate 110, such as It is routing mode (wire bonding), flip mode (flip chip) or the connection pad and/or line of other method for packing and substrate Road is electrically connected with.
In step 102, Fig. 4 B are referred to, conductive layer 125 is configured on the first insulating barrier 124.Conductive layer 125 can With by spraying (Spray Coating), ion plating (Ion Plating), sputter (Sputter Deposition) either Metal material or conductive material are formed at the upper of the first insulating barrier 124 by the modes such as evaporation (Evaporation Deposition) Surface.
In step 103, Fig. 4 C are referred to, it is exhausted by first after conductive layer 125 is configured on the first insulating barrier 124 Edge layer 124 is covered in the first electronic component 122 and local complexity on the surface of substrate 110.What deserves to be explained is the first insulation Layer 124 is a thermosetting sheet glue material, and in the present embodiment, the material of the first insulating barrier 124 can be thermoset hot melt glue glue Material, it is covered in by way of attaching on first electronic component 122 and partial substrate 110 of a portion, that is, Say, the first insulating barrier 124 is partly taken shape on substrate 110.
In step 104, Fig. 4 D are referred to, form at least one conduction for penetrating the insulating barrier 124 of conductive layer 125 and first Post 127, and conductive layer 125 is subjected to patterned process, conductive pattern layer 126 is formed according to this.Specifically, using laser pair The insulating barrier 124 of conductive layer 125 and first is drilled, so that the first insulating barrier 124 forms an at least hollow via-hole, then, Conductive material is formed in forming conductive pole 127 in hollow via-hole according to this, conductive pole 127 is from conductive layer 125 toward the first insulating barrier 124 It is interior to run through extension.What deserves to be explained is can according to different electric connection demands and designed, designed each conductive pole 127 Shape, quantity are with distributing position.Then, patterned process is carried out to conductive layer 125, to form conductive pattern layer 126.In detail and Speech, can use laser ablation conductive layer, so that conductive layer 125 forms conductive pattern.
In addition, it should be noted that, considered in order to technologic, form conductive pole 127 and pattern is carried out to conductive layer 125 The step of changing processing order can be while or sequentially exchange.The present invention is limited not to this.
In step 105, Fig. 4 E are referred to, by separately at least one first electronic component 122' is installed in the first insulating barrier 124 Above and with conductive pattern layer 126 it is electrically connected with.In the present embodiment, there is provided multiple first electronic component 122a', 122b' and 122c', and first electronic component 122a', 122b' and 122c' that these are installed on the first insulating barrier 124 can pass through conduction Patterned layer 126 and conductive pole 127 and the first electronic component 122 or the second electronic component 130 with being installed on substrate 110 It is electrically connected with.
What deserves to be explained is due to having difference in height between the first electronic component 122 and the second electronic component 130, therefore When some of first electronic components 122 and the second electronic component 130 are installed on substrate 110, these first electronic components Will there be space 122 tops to house other first electronic components 122.
Infringement and the guarantor of the second electronic component 130, stacked structure 120 or circuit are caused in order to reduce moisture intrusion Protect between the second electronic component 130 and produce unnecessary electric connection, the manufacture method of the more package modules 100 of stack also includes Second insulating barrier 140 is covered on stacked structure 120, the second electronic component 130 and the surface of substrate 110.
In step 106, Fig. 4 F are referred to, the second insulating barrier 140 is covered in stacked structure 120 and the surface of substrate 110 On.In general, the second insulating barrier 140 can be an adhesive layer, main material includes pressing mold glue.By sealing adhesive process, by The material of two insulating barrier 140 is inserted in die cavity, via baking hardening is molded again after plastic squeeze, injecting glue.In addition, in other embodiments, The material of second insulating barrier 140 can also be identical with the material of the first insulating barrier 124, that is, the material of the second insulating barrier 140 is Thermosetting sheet glue material, and the second electronic component 130, stacked structure 120 and the table of substrate 110 are covered in a manner of attaching Face.Also the second insulating barrier 140 can need not be made in practical application of the present invention.
Then, substrate 110 is cut into multiple units by cutter D1 or using laser.This cutting can be hemisection, All cut off i.e. without by molding unit 130 and substrate 110, and again all cut the substrate 110 of hemisection when final step It is disconnected.Or cutting can be cut entirely, i.e., once substrate 110 is all cut off.
Referring to Fig. 1, designed for the ELECTROMAGNETIC OBSCURANT of product, the manufacture method of the more package modules 100 of stack is also It is electrically connected with including forming ELECTROMAGNETIC OBSCURANT layer 150 in the outer surface of the second insulating barrier 140, and with ground mat 112.ELECTROMAGNETIC OBSCURANT Layer 150 can be that the conductive film made by conductive material is deposited by modes such as spraying, ion plating, sputter or evaporations. Or ELECTROMAGNETIC OBSCURANT layer 150 can also be in the outer surface of the second insulating barrier 140 with metal cover cover.Via above-mentioned steps, heap Stacked package module 100 has substantially been formed
In summary, the embodiment of the present invention provides a kind of more package modules of stack, and its second electronic component is highly more than The height of first electronic component so that can have a difference in height between the first electronic component and the second electronic component.It is some of First electronic component and the second electronic component are installed on substrate, and the first insulating barrier is thermosetting sheet glue material, is not required to pass through Mould and attach and be covered on first electronic component and partial substrate of a portion.Therefore, technique is relatively simple, from And simplify the flow of encapsulation.When the first insulating barrier is covered on these first electronic components and part substrate, these first electricity To there be space above subcomponent to house other first electronic components.Accordingly, flow and the shortening of encapsulation can not only be simplified Signal wire path, so that line loss and interference are reduced, product is electrically more preferably.In addition, the envelope of the more package modules of stack Fill planarization height and appearance color is homogeneous, and the inside of the more package modules of stack stacks space availability ratio and is increased.
In addition, the embodiment of the present invention provides the manufacture method of the more package modules of stack, and its second electronic component is high Height of the degree more than the first electronic component so that can have a difference in height between the first electronic component and the second electronic component.It is logical Cross the first insulating barrier of attaching to be covered on first electronic component and partial substrate of a portion, then at these the first electricity Space content above subcomponent puts other the first electronic components.Accordingly, it can not only simplify the flow of encapsulation and shorten signal Thread path, so that line loss and interference are reduced, product is electrically more preferably.In addition, the encapsulation of the more package modules of stack is put down Whole property is high and appearance color is homogeneous, and the inside of the more package modules of stack stacks space availability ratio and is increased.
Embodiments of the invention are the foregoing is only, it is not limited to the claims of the present invention.Appoint What those skilled in the art, is not departing from spirit and scope of the invention, the change made and the equivalence replacement of retouching, still for In the claims of the present invention.

Claims (13)

1. a kind of more package modules of stack, it is characterised in that the more package modules of the stack include:
One substrate;
At least one first insulating barrier, the local complexity substrate surface;
An at least conductive pattern layer, it is configured on first insulating barrier;
Multiple first electronic components, the plurality of first electronic component in part are covered by least one first insulating barrier, and in addition should Multiple first electronic components are installed on first insulating barrier and are electrically connected with the conductive pattern layer;And
One second insulating barrier, cover the plurality of first electronic component in the part and at least one first insulating barrier, be exposed to The substrate surface of at least one first insulating barrier.
It is exhausted that 2. the more package modules of stack as claimed in claim 1, the wherein more package modules of the stack include multiple first Edge layer and multiple conductive pattern layers, wherein the conductive pattern layer is located therein between 2 first insulating barriers, and this is more in addition Individual first electronic component is located therein on first insulating barrier and is electrically connected with the conductive pattern layer.
3. the more package modules of stack as claimed in claim 1, in addition at least one second electronic component, second electronics member Part is installed on the substrate.
4. the more package modules of stack as claimed in claim 3, the wherein height of second electronic component are more than first electricity The height of subcomponent.
5. the more package modules of stack as claimed in claim 1, in addition to an at least conductive pole, the conductive pole penetrate this first Insulating barrier.
6. a kind of more package modules of stack, it is characterised in that the more package modules of the stack include:
One substrate;
Stacked arrangement, including multiple first electronic components and at least one first insulating barrier, the plurality of first electronics of which part Element is installed on the substrate, and first insulating barrier is covered in the plurality of first electronic component in part, and in addition the plurality of first Electronic component is installed on first insulating barrier;
One second insulating barrier, cover the plurality of first electronic component in the part and at least one first insulating barrier;And
One ELECTROMAGNETIC OBSCURANT layer, positioned at an outer surface of second insulating barrier, and first insulating barrier is not contacted.
7. the more package modules of stack as claimed in claim 6, in addition at least one second electronic component, second electronics member Part is installed on the substrate, and the height of second electronic component is more than the height of first electronic component.
8. the more package modules of stack as claimed in claim 7, the wherein height of second electronic component are more than first electricity The height of subcomponent.
9. the more package modules of stack as claimed in claim 7, wherein second electronic component separate the ELECTROMAGNETIC OBSCURANT layer and First insulating barrier.
A kind of 10. manufacture method of the more package modules of stack, it is characterised in that the manufacture method of the more package modules of the stack Including:
At least one first electronic component is installed on a substrate;
One conductive layer is configured on one first insulating barrier;
First insulating barrier is covered in first electronic component and local complexity on the substrate surface;
Separately at least one first electronic component is installed on first insulating barrier and is electrically connected with the conductive layer;And
One second insulating barrier is covered on first electronic component and the substrate surface.
11. the manufacture method of the more package modules of stack as claimed in claim 10, in addition to:
Form at least one conductive pole for penetrating the conductive layer and first insulating barrier;And
The conductive layer is subjected to patterned process, forms a conductive pattern layer according to this.
12. the manufacture method of the more package modules of stack as claimed in claim 10, in addition to:
At least one second electronic component is installed on the substrate, second insulating barrier is covered second electronic component.
13. the manufacture method of the more package modules of stack as claimed in claim 10, the wherein more package modules of the stack Manufacture method also includes being formed an ELECTROMAGNETIC OBSCURANT layer in the outer surface of second insulating barrier.
CN201710828205.2A 2013-05-31 2013-05-31 The more package modules of stack and its manufacture method Pending CN107658275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710828205.2A CN107658275A (en) 2013-05-31 2013-05-31 The more package modules of stack and its manufacture method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310214754.2A CN104218030B (en) 2013-05-31 2013-05-31 The many package modules of stack and its manufacture method
CN201710828205.2A CN107658275A (en) 2013-05-31 2013-05-31 The more package modules of stack and its manufacture method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201310214754.2A Division CN104218030B (en) 2013-05-31 2013-05-31 The many package modules of stack and its manufacture method

Publications (1)

Publication Number Publication Date
CN107658275A true CN107658275A (en) 2018-02-02

Family

ID=52099376

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201710828205.2A Pending CN107658275A (en) 2013-05-31 2013-05-31 The more package modules of stack and its manufacture method
CN201310214754.2A Active CN104218030B (en) 2013-05-31 2013-05-31 The many package modules of stack and its manufacture method

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201310214754.2A Active CN104218030B (en) 2013-05-31 2013-05-31 The many package modules of stack and its manufacture method

Country Status (1)

Country Link
CN (2) CN107658275A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112071811A (en) * 2020-09-18 2020-12-11 环维电子(上海)有限公司 Semiconductor package and manufacturing method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11908781B2 (en) 2021-03-22 2024-02-20 Advanced Semiconductor Engineering, Inc. Semiconductor device package and a method of manufacturing the same

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1649145A (en) * 2004-01-30 2005-08-03 松下电器产业株式会社 Module with a built-in component, and electronic device with the same
CN1784785A (en) * 2003-05-09 2006-06-07 松下电器产业株式会社 Module with built-in circuit element
JP2006310421A (en) * 2005-04-27 2006-11-09 Cmk Corp Printed wiring board with built-in components and its manufacturing method
KR20090021452A (en) * 2007-08-27 2009-03-04 앰코 테크놀로지 코리아 주식회사 Semiconductor package
CN101635265A (en) * 2008-07-24 2010-01-27 海华科技股份有限公司 Electronic packaging structure and manufacturing method thereof
CN101663926A (en) * 2007-05-02 2010-03-03 株式会社村田制作所 Component-incorporating module and its manufacturing method
CN101840910A (en) * 2009-03-16 2010-09-22 株式会社瑞萨科技 Semiconductor device and manufacture method thereof
CN102176449A (en) * 2011-03-22 2011-09-07 南通富士通微电子股份有限公司 High-density system-in-package structure
US20110298102A1 (en) * 2010-06-03 2011-12-08 Samsung Electro-Mechanics Co., Ltd. Semiconductor package and method of manufacturing the semiconductor package
CN102446907A (en) * 2010-10-13 2012-05-09 环旭电子股份有限公司 Three-dimensional packaging structure and making method thereof
CN102832182A (en) * 2012-09-10 2012-12-19 日月光半导体制造股份有限公司 Semiconductor package and manufacturing method of semiconductor package
CN102867813A (en) * 2011-05-30 2013-01-09 三星电子株式会社 Electronic device
WO2017101037A1 (en) * 2015-12-16 2017-06-22 Intel Corporation Pre‐molded active ic of passive components to miniaturize system in package

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009218484A (en) * 2008-03-12 2009-09-24 Tdk Corp Electronic module, and method for manufacturing the electronic module
KR101711045B1 (en) * 2010-12-02 2017-03-02 삼성전자 주식회사 Stacked Package Structure

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1784785A (en) * 2003-05-09 2006-06-07 松下电器产业株式会社 Module with built-in circuit element
CN1649145A (en) * 2004-01-30 2005-08-03 松下电器产业株式会社 Module with a built-in component, and electronic device with the same
JP2006310421A (en) * 2005-04-27 2006-11-09 Cmk Corp Printed wiring board with built-in components and its manufacturing method
CN101663926A (en) * 2007-05-02 2010-03-03 株式会社村田制作所 Component-incorporating module and its manufacturing method
KR20090021452A (en) * 2007-08-27 2009-03-04 앰코 테크놀로지 코리아 주식회사 Semiconductor package
CN101635265A (en) * 2008-07-24 2010-01-27 海华科技股份有限公司 Electronic packaging structure and manufacturing method thereof
CN101840910A (en) * 2009-03-16 2010-09-22 株式会社瑞萨科技 Semiconductor device and manufacture method thereof
US20110298102A1 (en) * 2010-06-03 2011-12-08 Samsung Electro-Mechanics Co., Ltd. Semiconductor package and method of manufacturing the semiconductor package
CN102446907A (en) * 2010-10-13 2012-05-09 环旭电子股份有限公司 Three-dimensional packaging structure and making method thereof
CN102176449A (en) * 2011-03-22 2011-09-07 南通富士通微电子股份有限公司 High-density system-in-package structure
CN102867813A (en) * 2011-05-30 2013-01-09 三星电子株式会社 Electronic device
CN102832182A (en) * 2012-09-10 2012-12-19 日月光半导体制造股份有限公司 Semiconductor package and manufacturing method of semiconductor package
WO2017101037A1 (en) * 2015-12-16 2017-06-22 Intel Corporation Pre‐molded active ic of passive components to miniaturize system in package

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112071811A (en) * 2020-09-18 2020-12-11 环维电子(上海)有限公司 Semiconductor package and manufacturing method thereof

Also Published As

Publication number Publication date
CN104218030A (en) 2014-12-17
CN104218030B (en) 2017-09-26

Similar Documents

Publication Publication Date Title
TWI691260B (en) Molded circuit module and manufacturing method thereof
US9161483B2 (en) Electronic module and method of manufacturing electronic module
CN104347595B (en) Electronic packaging module and manufacturing method thereof
JP2014112649A (en) Electronic circuit module and manufacturing method of the same
CN105637635A (en) Method for treating semiconductor package with emi shield
CN105336629B (en) The manufacturing method and Electronic Packaging module of Electronic Packaging module
CN104716102B (en) Electronic Packaging module and its manufacture method
CN102569242B (en) Semiconductor packaging part of integrated screened film and manufacture method thereof
TWI553818B (en) Method of manufacturing electronic package module and structure of electronic package module
TW201605001A (en) Method of manufacturing electronic package module and electronic package module manufactured by the same
CN103633060A (en) Wiring board with embedded device and electromagnetic shielding
CN106328633A (en) Electronic device module and method of manufacturing the same
CN102254901B (en) Semiconductor structure having electromagnetic interference resisting structure and method manufacturing same
CN104218030B (en) The many package modules of stack and its manufacture method
CN103151328B (en) Semiconductor package assembly and a manufacturing method thereof
CN202651112U (en) Semiconductor device and lamination
CN104576616B (en) Module integrated circuit packaging structure and preparation method thereof
US10763128B2 (en) Process of surface-mounting three-dimensional package structure electrically connected by prepackaged metal
US20110104429A1 (en) Substrate member, module, electric equipment, and manufacturing method of modules
CN103094258B (en) Air cavity type package and manufacture method thereof
CN105023851B (en) The manufacture method of Electronic Packaging module
CN205609498U (en) Buried via hole type surface sound filtering chip package structure
CN205609474U (en) Metal disk buried via hole type surface sound filtering chip package structure
CN108461456A (en) Electronic Packaging component and preparation method thereof
CN113540069A (en) Chip lamination packaging structure and chip lamination packaging method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20180202

RJ01 Rejection of invention patent application after publication