CN107643132A - One kind sealing pressure ceramic flat membrane pressure sensor - Google Patents
One kind sealing pressure ceramic flat membrane pressure sensor Download PDFInfo
- Publication number
- CN107643132A CN107643132A CN201610580004.0A CN201610580004A CN107643132A CN 107643132 A CN107643132 A CN 107643132A CN 201610580004 A CN201610580004 A CN 201610580004A CN 107643132 A CN107643132 A CN 107643132A
- Authority
- CN
- China
- Prior art keywords
- hole
- positioning belt
- plate body
- upper plate
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
A kind of sealing pressure ceramic flat membrane pressure sensor of the invention, wherein, including：The downside of upper plate body is provided with lower diaphragm, and the side of lower film piece plate body upwardly is provided with induction region, and Wheatstone bridge is provided with induction region；The side of upper plate body diaphragm downwards is provided with two orthogonal positioning belt bodies, two positioning belt bodies are respectively parallel to adjacent two side of upper plate body, the remote one end of two positioning belt body phases and the two positioning belt body phase places of connecing are respectively equipped with first through hole, it is provided with the second through hole in region of the upper plate body away from two positioning belt bodies, one end of the second through hole and first through hole diaphragm downwards is equipped with pad；Multiple sensing elements are fixed with two positioning belt bodies.By using a kind of sealing pressure ceramic flat membrane pressure sensor of the invention, pass through the transformation to the flat membrane structure of sensor, it is easier to process and the cost of material is low, effectively pass through the detection of biased induction gravity, to improve the precision of detection, the failure of bias detection gravity is prevented.
Description
Technical field
The present invention relates to pressure sensor technique field, and in particular to one kind sealing pressure ceramic flat membrane pressure sensor.
Background technology
It is well known that ceramic pressure sensor does not have the appearance that liquid transmission directly acts on ceramic diaphragm by pressure
Face, film is set to produce small deformation, thick-film resistor is printed on the back side of ceramic diaphragm, connects into a Wheatstone bridge and shape
Into.At present, mainly by laser calibration, sensor has very high temperature stability and time stability, and sensor is certainly
Band temperature-compensating 0-70 degree, and can be with most physical contact between media.But accuracy of detection of the prior art is not high, make
It is exactly the biasing of detection zone into the main reason for this phenomenon, and the biasing of pressure spot not only makes Monitoring Data receive shadow
Ring, can also cause the pressurized zone service life of pressure sensor to shorten.On the other hand, film of the prior art is circle,
For complex in the processing technology of circular membrane and also higher for processing request so cause production efficiency to be affected.
The content of the invention
The application provides a kind of sealing pressure ceramic flat membrane pressure sensor, to solve the flat film knot of sensor in the prior art
Structure is bad, causes detection sense of touch of the flat film for low pressure bad and processes the problem of constant.
To achieve the above object, the technical solution adopted by the present invention is：
One kind sealing pressure ceramic flat membrane pressure sensor, wherein, including：Upper plate body, the downside of the upper plate body are provided with lower diaphragm,
The lower film piece is provided with induction region towards the side of the upper plate body, and Wheatstone bridge is provided with the induction region；
The upper plate body is provided with two orthogonal positioning belt bodies, the two positioning belt body difference towards the side of the lower diaphragm
Parallel to adjacent two side of the upper plate body, the remote one end of the two positioning belt body phases and the two positioning belt body phases connect
Place is respectively equipped with first through hole, and the upper plate body is provided with the second through hole in the region away from the two positioning belt bodies, and described second
Through hole is equipped with pad with the first through hole towards one end of the lower diaphragm；
Multiple sensing elements are fixed with the two positioning belt bodies.
Above-mentioned sealing pressure ceramic flat membrane pressure sensor, wherein, the first through hole surrounds with 3 second through holes
Area be more than the induction region area.
Above-mentioned sealing pressure ceramic flat membrane pressure sensor, wherein, the induction region is rectangular, the induction region
Two opposite side of longitudinal direction are arc line shaped.
The flat film ceramic pressure sensor of above-mentioned low pressure, wherein, the lower diaphragm is ceramic strain film piece.
The flat film ceramic pressure sensor of above-mentioned low pressure, wherein, axis and the first through hole of second through hole
Diameter parallel.
The flat film ceramic pressure sensor of above-mentioned low pressure, wherein, a straight sides side and the positioning of the induction region
Band side side overlaps.
According to a kind of sealing pressure ceramic flat membrane pressure sensor of above-described embodiment, the program has following effect：
1st, the transformation to the flat membrane structure of sensor is passed through so that product, which is more readily processed, to be easy to produce in batches, production efficiency
Height can lift 5-10 times, and the cost of material is low；
2nd, the failure of bias detection gravity to improve the precision of detection, is effectively prevented by the detection of biased induction gravity；
3rd, its is simple in construction, easily fabricated, installation.
Brief description of the drawings
Fig. 1 is a kind of side schematic view for sealing and pressing ceramic flat membrane pressure sensor；
Fig. 2 is a kind of upper plate body upward view for sealing and pressing ceramic flat membrane pressure sensor；
Fig. 3 is a kind of lower diaphragm top view for sealing and pressing ceramic flat membrane pressure sensor.
Such as scheme to refer to：Upper plate body 1, lower diaphragm 2, induction region 3, positioning belt body 4, first through hole 5, the second through hole 6, welding
Point 7, sensing element 8.
Embodiment
In order that technological means, creation feature, reached purpose and effect that invention is realized are easy to understand, lower combination tool
Body illustrates, and the present invention is expanded on further.
As Figure 1-3, a kind of sealing pressure ceramic flat membrane pressure sensor of the present invention, wherein, including：Upper plate body 1, upper plate
The downside of body 1 is provided with lower diaphragm 2, and lower diaphragm 2 is provided with induction region 3 towards the side of upper plate body 1, favour is provided with induction region 3
Stone electric bridge（Not shown in figure）；The side of the diaphragm 2 downwards of upper plate body 1 is provided with two orthogonal positioning belt bodies 4, further
Positioning belt body 4 set by position be biasing check weighing region, two positioning belt bodies 4 are respectively parallel to the adjacent both sides of upper plate body 1
Side, the mutually remote one end of two positioning belt bodies 4 and the joint of two positioning belt body 4 are respectively equipped with first through hole 5, and upper plate body 1 is remote
It is provided with the second through hole 6 in the region of two positioning belt bodies 4, one end of the second through hole 6 and first through hole 5 diaphragm 2 downwards is equipped with
Pad 7；Multiple sensing elements 8 are fixed with two positioning belt bodies 4, further this product can be detected with biasing
Pressure, tested measuring pressure are mainly pressed to the region with multiple sensing elements 8.
In a particular embodiment of the present invention, the area that the through hole 6 of first through hole 5 and 3 second surrounds is more than induction region 3
Area, the compressive region of further induction region 3 has certain limitation, and the position being pressurized can tune to two
The region of positioning belt body 43, is easy to detect herein the article of gravity biased, and improves the service life of sensor.
In a particular embodiment of the present invention, induction region 3 is rectangular, and two opposite side of the longitudinal direction of induction region 3 are equal
For arc line shaped, the further compression area for increasing induction region 3.
In a particular embodiment of the present invention, lower diaphragm 2 is ceramic strain film piece, and further upper plate body 1 is ceramics
Material is made.
In a particular embodiment of the present invention, the axis of the second through hole 6 and the diameter parallel of first through hole 5, further
It is easy to the processing of drilling.
In a particular embodiment of the present invention, a straight sides side of induction region 3 overlaps with the side of positioning belt body 4, enters one
Step causes induction region 3 to be not directly contacted with the sensing element 8 for being positioned and being fixed with body 4.
In the embodiment of the present invention, apply pressure on lower diaphragm 2, lower diaphragm 2 is offset to positioning belt body 4
Sensed by sensing element 8 and pad 7, receive the sensing of pressure-biased in this sensing element 8.
In summary, a kind of sealing pressure ceramic flat membrane pressure sensor of the present invention, by changing to the flat membrane structure of sensor
Make so that product, which is more readily processed, to be easy to produce in batches, and production efficiency height can lift 5-10 times, and material cost
It is low, effectively by the detection of biased induction gravity, to improve the precision of detection, the failure of bias detection gravity is prevented, it is tied
Structure is simple, easily fabricated, installation.
The specific embodiment of invention is described above.It is to be appreciated that invention be not limited to it is above-mentioned specific
Embodiment, wherein the equipment and structure be not described in detail to the greatest extent are construed as being practiced with the common mode in this area；
Those skilled in the art can make within the scope of the claims various deformations or amendments make it is some it is simple deduce, deformation or
Replace, this has no effect on the substantive content of invention.
Claims (6)
1. one kind sealing pressure ceramic flat membrane pressure sensor, it is characterised in that including：Upper plate body, set on the downside of the upper plate body
There is lower diaphragm, the lower film piece is provided with induction region towards the side of the upper plate body, favour stone is provided with the induction region
Electric bridge；
The upper plate body is provided with two orthogonal positioning belt bodies, the two positioning belt body difference towards the side of the lower diaphragm
Parallel to adjacent two side of the upper plate body, the remote one end of the two positioning belt body phases and the two positioning belt body phases connect
Place is respectively equipped with first through hole, and the upper plate body is provided with the second through hole in the region away from the two positioning belt bodies, and described second
Through hole is equipped with pad with the first through hole towards one end of the lower diaphragm；
Multiple sensing elements are fixed with the two positioning belt bodies.
2. the flat film ceramic pressure sensor of low pressure according to claim 1, it is characterised in that the first through hole and three institutes
State the area that the area that the second through hole surrounds is more than the induction region.
3. the flat film ceramic pressure sensor of low pressure according to claim 1, it is characterised in that the induction region is in square
Shape, two opposite side of the longitudinal direction of the induction region are arc line shaped.
4. the flat film ceramic pressure sensor of low pressure according to claim 1, it is characterised in that the lower diaphragm should for ceramics
Thinning diaphragm.
5. the flat film ceramic pressure sensor of low pressure according to claim 1, it is characterised in that the axis of second through hole
With the diameter parallel of the first through hole.
6. the flat film ceramic pressure sensor of low pressure according to claim 1, it is characterised in that the induction region is always
Line side during the positioning belt side while with overlapping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610580004.0A CN107643132A (en) | 2016-07-22 | 2016-07-22 | One kind sealing pressure ceramic flat membrane pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610580004.0A CN107643132A (en) | 2016-07-22 | 2016-07-22 | One kind sealing pressure ceramic flat membrane pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107643132A true CN107643132A (en) | 2018-01-30 |
Family
ID=61109303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610580004.0A Pending CN107643132A (en) | 2016-07-22 | 2016-07-22 | One kind sealing pressure ceramic flat membrane pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107643132A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2816779Y (en) * | 2005-09-01 | 2006-09-13 | 秦皇岛通联特种车辆有限公司 | Flat-bed transport vehicle of automatic weighting and graving center displaying |
| CN1985155A (en) * | 2004-07-03 | 2007-06-20 | 伍兹堡尤利乌斯－马克西米利安斯大学 | Force evaluating device and force evaluating method for determining balance characteristics |
| DE102010030156A1 (en) * | 2010-06-16 | 2011-12-22 | Endress + Hauser Gmbh + Co. Kg | Ceramic pressure sensor has annular joint made of silicon that is connected with measuring diaphragm and base structure by low temperature co-fired ceramic connection and connected with base structure by gold silicon eutectic connection |
| CN103728066A (en) * | 2012-10-10 | 2014-04-16 | 吾土产业株式会社 | Pressure transducer using ceramic diaphragm |
| CN105067179A (en) * | 2015-07-30 | 2015-11-18 | 湖北美标中芯电子科技有限公司 | Ceramic capacitive pressure sensor and manufacturing method thereof |
| CN204944714U (en) * | 2015-08-24 | 2016-01-06 | 上海宇瓷电子科技有限公司 | Pressure resistance type ceramic pressure sensor |
-
2016
- 2016-07-22 CN CN201610580004.0A patent/CN107643132A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1985155A (en) * | 2004-07-03 | 2007-06-20 | 伍兹堡尤利乌斯－马克西米利安斯大学 | Force evaluating device and force evaluating method for determining balance characteristics |
| CN2816779Y (en) * | 2005-09-01 | 2006-09-13 | 秦皇岛通联特种车辆有限公司 | Flat-bed transport vehicle of automatic weighting and graving center displaying |
| DE102010030156A1 (en) * | 2010-06-16 | 2011-12-22 | Endress + Hauser Gmbh + Co. Kg | Ceramic pressure sensor has annular joint made of silicon that is connected with measuring diaphragm and base structure by low temperature co-fired ceramic connection and connected with base structure by gold silicon eutectic connection |
| CN103728066A (en) * | 2012-10-10 | 2014-04-16 | 吾土产业株式会社 | Pressure transducer using ceramic diaphragm |
| CN105067179A (en) * | 2015-07-30 | 2015-11-18 | 湖北美标中芯电子科技有限公司 | Ceramic capacitive pressure sensor and manufacturing method thereof |
| CN204944714U (en) * | 2015-08-24 | 2016-01-06 | 上海宇瓷电子科技有限公司 | Pressure resistance type ceramic pressure sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4161410B2 (en) | Pressure detection device | |
| CN105091731B (en) | The axial deviation sensitive grid interdigitated metal foil gauge of the axial local derviation of measurable surface strain | |
| JP5883771B2 (en) | Pressure sensor | |
| KR20160115830A (en) | Semiconductor strain gauge | |
| CN105066869B (en) | The lateral deviation sensitive grid interdigitated metal foil gauge of the horizontal local derviation of measurable surface strain | |
| US5291788A (en) | Semiconductor pressure sensor | |
| CN208847373U (en) | Strain gauge and load-detecting system | |
| WO2015076158A1 (en) | Pressure sensor | |
| WO2002003043A1 (en) | Capacity type pressure sensor and method of manufacturing the pressure sensor | |
| CN202158916U (en) | Measuring device for deformation detection | |
| CN105241371B (en) | Resistance strain gage | |
| US20120006129A1 (en) | Pressure measuring device | |
| KR102038156B1 (en) | Pressure transducer substrate with self alignment feature | |
| US8272256B2 (en) | Pressure sensor | |
| KR102021103B1 (en) | Silicon strain gage with high sensitivity and pressure transducer comprising the same | |
| US4774843A (en) | Strain gage | |
| JP2018048859A (en) | Pressure sensor | |
| CN110168335A (en) | Pressure sensor | |
| CN106461478A (en) | Strain sensor and load detection device using same | |
| CN107643132A (en) | One kind sealing pressure ceramic flat membrane pressure sensor | |
| JP2013124947A (en) | Semiconductor pressure sensor | |
| EP3332702B1 (en) | Method of inspecting pressure pulse wave sensor, and method of manufacturing pressure pulse wave sensor | |
| KR101573367B1 (en) | Piezoresistive typed ceramic pressure sensor | |
| CN206074157U (en) | A kind of flat film ceramic pressure sensor of low pressure | |
| CN109341907A (en) | A kind of pressure sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180130 |
|
| RJ01 | Rejection of invention patent application after publication |