CN107635914A - Ozone generator - Google Patents
Ozone generator Download PDFInfo
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- CN107635914A CN107635914A CN201680033191.9A CN201680033191A CN107635914A CN 107635914 A CN107635914 A CN 107635914A CN 201680033191 A CN201680033191 A CN 201680033191A CN 107635914 A CN107635914 A CN 107635914A
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- electrode
- discharge face
- ozone generator
- protuberance
- line part
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/32—Constructional details of the dielectrics
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/64—Oxygen
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- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Ozone generator (10) possesses：Dielectric portion (1) with discharge face (11)；With the inside of dielectric portion (1) it is mutually arranged extend, and the sparking electrode (2) and opposite electrode (3) opposed with discharge face (11) respectively, sparking electrode (2) or opposite electrode (3) possess the line part (22 that the edge of electrode when from discharge face (11) extends in the longitudinal direction, 32), with the edge of electrode from line part (22, 32) leading section (21 extended deviously is started, 31), for caused electrostatic capacitance between sparking electrode (2) and opposite electrode (3) is in composition caused by the inside of dielectric portion (1), leading section (21, 31) composition near is less than line part (22, 32) composition near.
Description
Technical field
Produced and by the space opposed with discharge face the present invention relates to electric discharge is made using dielectric surface as discharge face
Oxygen generate the Ozone generator of ozone.
Background technology
Dielectric surface is used as to the Ozone generator of discharge face, possesses dielectric and is arranged on inside dielectric
Sparking electrode and opposite electrode.This Ozone generator is by applying driving voltage between sparking electrode and opposite electrode
And make to produce electric discharge in the air near discharge face or discharge face, ozone is generated by the oxygen in air.Filled if being generated in ozone
Put and observe discharge face in the state of positive electric discharge, then the adjacent edges of sparking electrode or opposite electrode can light, but sparking electrode or
Front end of opposite electrode etc., electrode curved edge near especially light brightly.The reason is：In the curved edge of electrode
Position near, with electrode edge with linearly extended position nearby compared with, electric-field intensity has strengthened.
If driving Ozone generator, the region that discharge face lights brightly, easier precipitation in for a long time
The attachment of coal etc.Moreover, if precipitation progress of the attachment to discharge face, the electric discharge of Ozone generator stop sometimes
Only.Further, near position luminous brightly, partial discharge is easy to the defects of because present in dielectric inside
Produce, sometimes due to the partial discharge, defect can extend and cause dielectric destruction.
Thus, the technology for proposing to cause the distributing equilibrium of the electric-field intensity in discharge face all the time is (referring for example to patent
Document 1.).For example, Ozone generator disclosed in patent document 1 is by the leading section of sparking electrode and the front end of opposite electrode
Portion's rounding, thus come suppress electrode leading section nearby place electric-field intensity.
Citation
Patent document
Patent document 1：JP Beneficial 5-35830 publications
The content of the invention
- the technical problems to be solved by the invention-
Wherein, even if Ozone generator is set to electrode leading section by rounding like that as disclosed in Patent Document 1, with putting
The edge of the sidepiece of electrode or opposite electrode, i.e. electrode is compared with linearly extended part, the electric-field intensity of electrode leading section
Also relatively strong, in discharge face compared with electrode sides, electrode leading section lights more brightly.Therefore, even if being set to sparking electrode
Or the electrode leading section of opposite electrode is by rounding, suppress to light brightly near electrode leading section in discharge face and as deterioration
Starting point be also difficult.
Thus, it is an object of the present invention to provide a kind of sparking electrode or opposite electrode be which kind of electrode shape all
The Ozone generator of the distributing equilibrium of the electric-field intensity in discharge face can be caused.
- be used to solving the means of technical problem-
The Ozone generator of the present invention, possesses：Dielectric portion, there is discharge face；With the 1st electrode and the 2nd electrode, in institute
The inside for stating dielectric portion extends mutually arrangedly, and opposed with the discharge face respectively, and the 1st electrode possesses：From
The line part and the edge of electrode that the edge of electrode upwardly extends in the side that the 1st electrode extends during discharge face observation from
The line part starts the pars convoluta extended deviously, between the 1st electrode and the discharge face, near the pars convoluta
Electrostatic capacitance caused by the per unit area of 1st electrode is less than the every single of the 1st electrode near the line part
Electrostatic capacitance caused by plane product.
Hereinafter, electrostatic capacitance caused by the per unit area of the 1st electrode between the 1st electrode and discharge face is referred to as
Part 1 electrostatic capacitance.In above-mentioned composition, with part 1 electrostatic capacitance pars convoluta nearby and line part near it is equal
Situation is compared, and the electric field that can nearby suppress in pars convoluta in discharge face is concentrated.Generally, in discharge face, near line part
Compare, the electric-field intensity near pars convoluta is stronger, as long as therefore can suppress as described above the electric field near pars convoluta concentration, no matter discharge
Which kind of electrode shape electrode or opposite electrode are, can cause the distributing equilibrium of the electric-field intensity in discharge face.
It is preferred that dielectric portion possesses the relative dielectric constant changing unit that the pars convoluta is covered when from the discharge face,
The relative dielectric constant changing unit has the relative dielectric constant lower than the dielectric portion.
In this composition, even if not changing the interval between pars convoluta and discharge face, nearby it can also reduce the 1st in pars convoluta
Divide electrostatic capacitance.
It is preferred that the distance of the 1st electrode and the discharge face near the line part is shorter than near the pars convoluta
The 1st electrode and the discharge face distance.
In this composition, even if not changing the relative dielectric constant of dielectric portion near pars convoluta, near pars convoluta
Part 1 electrostatic capacitance can be reduced.
The dielectric portion can also possess the protuberance that the pars convoluta is covered when from the discharge face, described prominent
Go out portion in the discharge face around compared with it is more prominent.Further, the 1st electrode can also the pars convoluta nearby to
The direction bending that the discharge face separates.
During these are formed, for the interval of the 1st electrode and discharge face, compared near line part, in pars convoluta
Nearby further separate.
It is preferred that in the direction intersected with the line part when the relative dielectric constant changing unit is from the discharge face
Upper extension is simultaneously overlapping with the 2nd electrode.Similarly, preferably described protuberance when from the discharge face with it is described straight
The side that line portion intersects upwardly extends and overlapping with the 2nd electrode.
Here, by electrostatic electricity caused by the per unit area of the 2nd electrode between the 2nd foregoing electrode and discharge face
Hold and be referred to as part 2 electrostatic capacitance.In above-mentioned composition, compared near line part, part 1 electrostatic capacitance and part 2
Electrostatic capacitance nearby reducing in pars convoluta, therefore, can further suppress the electric field near the pars convoluta in discharge face and concentrate.
It is preferably provided with：The edge of electrode upwardly extends straight in the side that the 2nd electrode extends when from the discharge face
The pars convoluta that the edge of line portion and electrode extends deviously since the line part, the 2nd electrode and the discharge face it
Between, electrostatic capacitance (part 2 electrostatic capacitance) caused by the per unit area of the 2nd electrode near the pars convoluta is less than
Electrostatic capacitance (part 2 electrostatic capacitance) caused by the per unit area of the 2nd electrode near the line part.
In this composition, it even can also suppress electric field concentration near the pars convoluta of the 2nd electrode in discharge face, can be further
Make the distributing equilibrium of the electric-field intensity in discharge face.
It is preferred that the Ozone generator possesses multipair 1st electrode and the 2nd electrode, from the discharge face
When multipair 1st electrode and the 2nd electrode arrangement relative to the 1st electrode and the 2nd electrode extension direction
On orthogonal direction, driving voltage source is also equipped with, output has the N phase driving voltages of the pattern repeated and the phase difference of circulation,
Wherein N >=3, multipair 1st electrode and the 2nd electrode are according to putting in order for these electrodes and defeated from the driving voltage source
Enter the driving voltage of n-th, wherein 1≤n≤N.In this composition, the distribution of the electric-field intensity near discharge face changes, with
So that circulated along the direction of each electrode pair arrangement.Thus, near discharge face, the gas in space is divided by electric-field intensity
The influence of cloth and along each electrode pair arrange direction move.Therefore, supply and ozone self discharge of the oxygen to discharge face can be promoted
The disengaging in face, by increasing capacitance it is possible to increase ozone growing amount.Further, the circulation due to producing gas, therefore dirt etc. becomes to be difficult to be adsorbed in put
Electric face, the reliability of Ozone generator also improve.
The Ozone generator of the present invention possesses：Dielectric portion, there is discharge face；With the 1st electrode and the 2nd electrode, in institute
The inside for stating dielectric portion extends and opposed with the discharge face respectively mutually arrangedly, and the 1st electrode possesses：From institute
The line part that is upwardly extended in the side that the 1st electrode extends of edge of electrode and the edge of electrode are from institute when stating discharge face observation
The pars convoluta that line part starts to extend deviously is stated, the dielectric portion, which possesses, covers the pars convoluta when from the discharge face
Protuberance, the protuberance protrude from the electric discharge towards thickness direction.
In this composition, by being arranged to protuberance to cover pars convoluta, so as to which the part 1 electrostatic capacitance near pars convoluta subtracts
It is small.Thus, it can suppress caused electric-field intensity near pars convoluta in discharge face.Thus, point of the electric-field intensity in discharge face can be made
Cloth is balanced.
Additionally, it is preferred that upwardly extended when the protuberance is from the discharge face in the side intersected with the line part.
- invention effect-
According to the Ozone generator of the present invention, the electric field that can nearby suppress in pars convoluta in discharge face is concentrated, therefore energy
Enough so that the distributing equilibrium of the electric-field intensity in discharge face.Thus, in discharge face, can be difficult to produce pars convoluta vicinity
The precipitation of attachment or the extension of defect, the reliability of Ozone generator can be improved.
Brief description of the drawings
Fig. 1 is the top view observed from discharge face of Ozone generator of the first embodiment.
Fig. 2 is the sectional view observed from front of Ozone generator of the first embodiment.
Fig. 3 is the schematic diagram for representing caused power line in Ozone generator of the first embodiment.
Fig. 4 (A) (B) illustrates to caused electrostatic capacitance in Ozone generator of the first embodiment
Schematic diagram.
Fig. 5 is the top view observed from discharge face of Ozone generator of the second embodiment.
Fig. 6 (A) (B) is the sectional view observed from front of Ozone generator of the third embodiment.
Fig. 7 (A) (B) is the sectional view observed from front of Ozone generator of the fourth embodiment.
Fig. 8 is the top view observed from discharge face of Ozone generator of the fifth embodiment.
Fig. 9 (A) is the electrical connection graph of Ozone generator of the sixth embodiment.Fig. 9 (B) is driving voltage V1~V4
Time waveform figure.
Figure 10 is the figure of one of the flow chart for the manufacture method for representing Ozone generator.
Embodiment
《1st embodiment》
Fig. 1 is the top view observed from discharge face of the Ozone generator of the first embodiment 10 of the present invention.
Fig. 2 is the sectional view observed from front of Ozone generator 10.
Ozone generator 10 possesses dielectric portion 1, sparking electrode 2, opposite electrode 3 and driving voltage source 4.
Dielectric portion 1 is made up of dielectric substance.Dielectric portion 1 possesses discharge face (top surface) 11, bottom surface 12, left surface
13rd, right flank 14, front 15 and the back side 16.The flat board square-shaped when being from discharge face 11 of dielectric portion 1.Wherein, it is electric
The shape observed from discharge face 11 of dielectric portion 1 is not limited to square shape, can be set to polygon-shaped or toroidal, ellipse
The arbitrary shape such as shape.
Sparking electrode 2 and opposite electrode 3 are internally provided with least one pair of in dielectric portion 1.Sparking electrode 2 and opposed electricity
The respective at least a portion region in pole 3 is in direction (the hereinafter referred to as thickness direction from bottom surface 12 towards discharge face 11.) on putting
Electric face 11 is opposed.Further, sparking electrode 2 and opposite electrode 3 along from left surface 13 towards the direction of right flank 14 (hereinafter referred to as
Length direction.) extension.
Here, sparking electrode 2 is made up of the planar conductor abreast extended with discharge face 11 respectively with opposite electrode 3, phase
It is mutually opposed in a thickness direction.Sparking electrode 2 is located at compared with opposite electrode 3 more leans on the side of discharge face 11.Opposite electrode 3 and electric discharge
Electrode 2 is compared, and the size of width is roomy, is stretched in the direction of the width from the both sides of sparking electrode 2 when from discharge face 11
Go out.
Further, sparking electrode 2 has the leading section 21 ended in the inside of dielectric portion 1 in the side of left surface 13, in front end
The side of right flank 14 in portion 21 has the line part 22 for the right flank 14 for arriving at dielectric portion 1.Line part 22 is from discharge face 11
When electrode edge alongst extend.The edge of electrode is since line part 32 when leading section 21 is from discharge face 11
Bend and extend in the direction of the width.Therefore, leading section 21 is equivalent to " pars convoluta " in sparking electrode 2.
Opposite electrode 3 has the leading section 31 ended in the inside of dielectric portion 1 in the side of right flank 14, in leading section 31
The side of left surface 13 has the line part 32 for the left surface 13 for arriving at dielectric portion 1.Electrode when line part 32 is from discharge face 11
Edge alongst.When leading section 31 is from discharge face 11 edge of electrode bent since line part 32 and along
Width extends.Therefore, leading section 31 is equivalent to " pars convoluta " in opposite electrode 3.
Further, dielectric portion 1 possesses protuberance 17,18 in discharge face 11.Protuberance 17,18 is putting in dielectric portion 1
From position prominent to thickness direction around in electric face 11.Discharge face 11 is all flat in addition to protuberance 17,18.Also
Have, protuberance 17 extends in the direction of the width when observing discharge face 11, to cover the leading section 21 of sparking electrode 2.Separately
Outside, protuberance 18 extends in the direction of the width when observing discharge face 11, to cover the leading section 31 of opposite electrode 3.
Driving voltage source 4 is electrically connected to one end of the side of line part 22 and the line part 32 of opposite electrode 3 of sparking electrode 2
Between one end of side.Here, opposite electrode 3 is connected to reference potential by driving voltage source 4, by the alternation corresponding to reference potential
Voltage is applied to sparking electrode 2.By to applying this alternating voltage between sparking electrode 2 and opposite electrode 3, so as to discharge
Alternating electric field is produced around electrode 2 and opposite electrode 3.
Fig. 3 is the signal of the alternating electric field on the periphery for representing sparking electrode 2 and opposite electrode 3 in Ozone generator 10
Figure.In figure 3, it is represented by dotted lines the power line as caused by above-mentioned alternating electric field.
The alternating electric field produces：Only opposite electrode 3 is directly reached from sparking electrode 2 via the inside of dielectric portion 1
Power line A；And extend from sparking electrode 2 to the side of discharge face 11 and extended to the outside of dielectric portion 1, be then back to electric Jie
The inside in matter portion 1 and reach the power line B of opposite electrode 3.In the outside of dielectric portion 1, if power line B density is up to certain
More than degree, the electric-field intensity of the even outside of dielectric portion 1 is enhanced to more than to a certain degree, then in discharge face 11 or discharge face
Space near 11 can produce insulation breakdown, thus produce electric discharge.In Ozone generator 10, due in discharge face 11 from putting
The edge of electrode 2 plays power line B in the region overlapping with the opposite electrode 3 in nearby outside and becomes high density, therefore in the region
Inside become prone to produce electric discharge.
Fig. 4 (A) is to show as the electrostatic capacitance in sparking electrode 2 caused by per unit area between opposite electrode 3
The schematic diagram of the equivalent circuit of lumped constant.
Electrostatic capacitance C in sparking electrode 2 caused by per unit area between opposite electrode 3, can be considered as to produce
The partial electrostatic electric capacity Ca of power line A electric field is set in figure 3 and produces the partial electrostatic electric capacity for the electric field for being set to power line B
Cb be connected in parallel obtained by condenser network.That is, electrostatic capacitance C can be represented by the following formula.
C=Ca+Cb
Further, the partial electrostatic electric capacity Cb based on power line B, is further able to be considered as in sparking electrode 2 and discharge face
Power line B part 1 electrostatic capacitance C1 is produced between 11, produces between opposite electrode 3 and discharge face 11 the of power line B
2 partial electrostatic electric capacity C2 and the third portion electrostatic that power line B is produced in the space near discharge face 11 or discharge face 11
Electric capacity C3 be connected in series obtained by condenser network.It can be represented by the following formula namely based on power line B partial electrostatic electric capacity Cb.
1/Cb=1/C1+1/C2+1/C3
In the Ozone generator 10 with this equivalent circuit, by possess protuberance 17 shown in Fig. 1 and Fig. 2,
18, so as near leading section 21,31 in dielectric portion 1, with the line part 22,32 in dielectric portion 1 nearby compared with, from putting
The thickness of electrode 2 or opposite electrode 3 untill discharge face 11 has increased.Thus, the leading section 21 in dielectric portion 1,
Near 31, compared near the line part 22,32 in dielectric portion 1, part 1 electrostatic capacitance C1 or part 2 electrostatic capacitance
C2 is smaller.
Here, partial electrostatic electric capacity is caused on the thickness from sparking electrode 2 or opposite electrode 3 untill discharge face 11
Influence, illustrate in more detail.Distance from sparking electrode 2 untill discharge face 11 is being set to L1, Jie by vacuum
Electric constant is set to ε 0, the relative dielectric constant in dielectric portion 1 is set to ε r, the area in sparking electrode 2 is set to A (here,
Electrostatic capacitance C is the electric capacity of per unit area, therefore A=1) in the case of, part 1 electrostatic capacitance C1 can be with following formula come table
Show.
C1=ε 0 × ε r × A/L1=0 × ε of ε r/L1
Similarly, in the case where the distance from opposite electrode 3 untill discharge face 11 is set into L2, part 2 electrostatic
Electric capacity C2 can be represented by the following formula.
C2=ε 0 × ε r × A/L2=0 × ε of ε r/L2
Otherwise in these mathematical expressions, if distance L1, L2 increases, partial electrostatic electric capacity C1, C2 reduce, if distance L1, L2
Reduce, then partial electrostatic electric capacity C1, C2 increase.Therefore, in the thickness from sparking electrode 2 or opposite electrode 3 untill discharge face 11
Spend near larger leading section 21,31, compared near the line part 22,32 in dielectric portion 1, part 1 electrostatic capacitance C1
Or part 2 electrostatic capacitance C2 has reduced.
Fig. 4 (B) be will be provided with the part of protuberance 17,18 caused by part 1 electrostatic capacitance be expressed as C1 ', will
Part 2 electrostatic capacitance is expressed as C2 ', will be not provided with part 1 electrostatic capacitance caused by the part of protuberance 17,18 in addition
It is expressed as C1 ", part 2 electrostatic capacitance is expressed as to C2 " schematic diagram.
In dielectric portion 1, the thickness untill discharge face 11 to sparking electrode 2 or opposite electrode 3 is being provided with protuberance
17th, 18 part is larger and smaller in the part for being not provided with protuberance 17,18.If therefore, with foregoing partial electrostatic electric capacity
C1, C2 deriving control, then partial electrostatic electric capacity C1 ', the C2 ' being provided with the part of protuberance 17,18, than not setting
Partial electrostatic electric capacity C1 ", the C2 " put at the part of protuberance 17,18 is also small.
If here, for part 1 electrostatic capacitance C1 or part 2 electrostatic capacitance C2 to the electric-field intensity in discharge face 11
Caused by influence to illustrate, then in being applied from driving voltage source 4 between sparking electrode 2 and opposite electrode 3 shown in Fig. 4 (A)
In the case of having added driving voltage V0, if part 1 electrostatic capacitance C1 and part 2 electrostatic capacitance C2 combined capacity are set to
C12, V3 will be set to and the voltage applied to third portion electrostatic capacitance C3 by discharge face 11, then voltage V3 can with following formula come
Represent.
V3=(C12/ (C3+C12)) × V0
The mathematical expression represents：Part 1 electrostatic capacitance C1 and part 2 electrostatic capacitance C2 combined capacity C12 are smaller, then
Being applied to third portion electrostatic capacitance C3 voltage V3 more reduces.
That is, represent in discharge face 11, if by being arranged to protuberance 17,18 to cover leading section 21,31 and portion
Electrostatic capacitance C1, C2 is divided to reduce, then caused voltage V3 is reduced near the leading section 21,31 of discharge face 11, electric-field intensity subtracts
It is weak.
Generally, as the leading section 21,31 in sparking electrode 2 or opposite electrode 3 curved edge of electrode position, with
The edge of electrode as line part 22,32 is that linear position is compared, and the electric-field intensity nearby located more strengthens.Therefore,
If it is not provided with protuberance 17,18, then become prone to produce near leading section 21,31 in discharge face 11 and discharge, it is preceding
End 21,31 nearby lights and is possible to significantly change the problem of attachment or defect growth brightly.However, present embodiment
In Ozone generator 10, therefore energy overlapping with leading section 21,31 during due to being arranged to observe discharge face 11 by protuberance 17,18
It is enough to be difficult to generation electric discharge near leading section 21,31 in discharge face 11.Therefore, leading section can be suppressed in discharge face 11
21st, 31 nearby produce excessive electric discharge and significantly change the problem of preventing attachment or defect growth.
In addition, in present embodiment, although showing only to set the configuration example of 1 pair of sparking electrode 2 and opposite electrode 3, this
Invention is not limited to this composition example.For example, can also set 2 pairs or than more sparking electrodes 2 and opposite electrode 3.Setting
In the case of multipair sparking electrode 2 and opposite electrode 3, protuberance 17,18 can be arranged to across multipair sparking electrode 2 and right
Put electrode 3.Or also can by every a pair of settings protuberance of sparking electrode 2 and opposite electrode 3, with cause individually with each
Leading section 21,31 it is overlapping.
Further, in present embodiment, must more be leaned on although showing that sparking electrode 2 is set than opposite electrode 3 near discharge face 11
Configuration example, but the present invention is not limited to this composition example.For example, replacing the function of sparking electrode 2 and opposite electrode 3, can also incite somebody to action
Electrode close to discharge face 11 is set to opposite electrode, the electrode separated with discharge face 11 is set into sparking electrode.
Further, in the present embodiment, although show protuberance 17,18 cover sparking electrode 2 leading section 21 with it is opposed
The 31 respective configuration example of leading section of electrode 3, but the present invention is not limited to this composition example.For example, protuberance can be also arranged to
Only cover the leading section of either one.In this case, generation electricity is nearby easiest to due to the leading section near discharge face 11
Field is concentrated, therefore it is preferred that protuberance is arranged into leading section of the covering near discharge face 11.
In addition, in present embodiment, although showing using the leading section 21,31 of sparking electrode 2 or opposite electrode 3 as from putting
When electric face 11 is observed " pars convoluta " of the curved edge of electrode and by 17,18 configuration example to cover of protuberance, but the present invention not by
It is limited to this composition example.For example, also it can nearby be set in the center of the length direction of sparking electrode 2 or opposite electrode 3 with bent axle shape
The part of bending, and covered using the part of the bending as " pars convoluta " with protuberance.
《2nd embodiment》
Fig. 5 is the Ozone generator 10A of the second embodiment of the present invention vertical view observed from discharge face 11
Figure.
Ozone generator 10A, which possesses dielectric portion 1A, sparking electrode 2A, opposite electrode 3A and driving voltage source 4, (not to scheme
Show).Here, sparking electrode 2A and opposite electrode 3A is made up of the planar conductor abreast extended with discharge face 11 respectively, in thickness
Degree is not opposed to arrange in the direction of the width on direction.Further, sparking electrode 2A and opposite electrode 3A alternately 22 ground
Set, be provided with 2 pairs.Wherein, sparking electrode 2A and opposite electrode 3A is arranged at identical height in a thickness direction respectively
Spend position.Further, the size of respective width is identical.
In addition, in dielectric portion 1A discharge face 11, protuberance 17 is set in a same manner as in the first embodiment, to cover
Lid sparking electrode 2A leading section 21, and it is provided with the protuberance 18 of covering opposite electrode 3A leading section 31.
In the Ozone generator 10A of this composition, because protuberance 17,18 is covered near leading section 21,31, therefore
The distance untill discharge face 11 from sparking electrode 2A or opposite electrode 3A can be widened.Therefore, in this embodiment, also enter
One step can reduce part 1 electrostatic capacitance C1 or part 2 electrostatic capacitance C2 near leading section 21,31, in discharge face 11
In can also weaken electric-field intensity near leading section 21,31.Thus, even in the Ozone generator of present embodiment
In 10A, can also suppress in discharge face 11 leading section 21,31 nearby produce excessive electric discharge, can prevent attachment or
The problem of defect growth, becomes notable.
In addition, in the present embodiment, also it can suitably change structure as illustrated by the end of the 1st embodiment
Into.For example, can change set sparking electrode 2A and opposite electrode 3A to quantity.Further, can by sparking electrode 2A and
Opposite electrode 3A every a pair of settings protuberance, it is individually overlapping to cause.Further, protuberance can be also set, only to cover
Sparking electrode 2A leading section 21 and either one in opposite electrode 3A leading section 31.In addition, also can in sparking electrode 2A or
Opposite electrode 3A length direction center nearby set such as bending of bent axle shape part, using the part of the bending as
" pars convoluta " and covered using protuberance.
《3rd embodiment》
Fig. 6 (A) is the Ozone generator 10B of the third embodiment of the present invention section view observed from front
Figure.Ozone generator 10B possesses dielectric portion 1B, sparking electrode 2B, opposite electrode 3B and driving voltage source 4 (not shown).
Dielectric portion 1B and the 1st embodiment are different, are not provided with protuberance, the entire surface general planar of discharge face 11.Moreover, substitution is prominent
Go out portion and sparking electrode 2B and opposite electrode 3B are provided with bending section 17B, 18B.
Although sparking electrode 2B and opposite electrode 3B and the 1st embodiment are similarly made up of planar conductor, from front
There is provided bending section 17B, 18B position during observation, bend since the direction parallel with discharge face 11 so that compare bending section
17B, 18B are located further forward end 21, the region of 31 sides, with than bending section 17B, 18B more by line part 22,32 sides region compared with,
More leave discharge face 11.Thus, in Ozone generator 10B, even if being not provided with protuberance, near leading section 21,31
Also the distance from sparking electrode 2B or opposite electrode 3B untill discharge face 11 can be widened.Therefore, in this embodiment,
Part 1 electrostatic capacitance C1 or part 2 electrostatic capacitance C2 can further be reduced near leading section 21,31, additionally it is possible to
Weaken the electric-field intensity near leading section 21,31 in discharge face 11.Thus, even in the Ozone generator of present embodiment
In 10B, can also suppress in discharge face 11 leading section 21,31 nearby produce excessive electric discharge, can prevent attachment or
The problem of defect growth, becomes notable.
In addition, also it can suitably change structure as illustrated by the end of the 1st embodiment in the present embodiment
Into.For example, can change set sparking electrode 2B and opposite electrode 3B to quantity.Further, also can in sparking electrode 2B or
The center of opposite electrode 3B length direction is nearby set with the part of the bendings such as bent axle shape, using the part of the bending as " bent
Portion ", and covered with protuberance.
Fig. 6 (B) is the section view observed from front for the Ozone generator 10C that the variation of the 3rd embodiment is related to
Figure.Ozone generator 10C possesses dielectric portion 1C, sparking electrode 2C, opposite electrode 3C and driving voltage source 4 (not shown).
Ozone generator 10C and the 2nd embodiment are same, and sparking electrode 2C and opposite electrode 3C is arranged in thickness direction
Identical height and position, and mutually arranged in width arrangement.Moreover, in this composition, also sparking electrode 2C with it is right
Put electrode 3C and bending section 17C, 18C are set, thus leave the nearby self discharge face 11 of leading section 21,31.So, even put
Electrode is arranged in the composition of identical height and position with opposite electrode, can also realize curved in sparking electrode and opposite electrode setting
3rd embodiment of pars convoluta.
《4th embodiment》
Fig. 7 (A) is the Ozone generator 10D of the fourth embodiment of the present invention section view observed from front
Figure.Ozone generator 10D possesses dielectric portion 1D, sparking electrode 2D, opposite electrode 3D and driving voltage source 4 (not shown).
Dielectric portion 1D and the 1st embodiment or the 2nd embodiment are different, and are not provided with protuberance or bending section, but substitute these
Part, it is provided with relative dielectric constant changing unit 17D, 18D.Relative dielectric constant changing unit 17D, 18D is normal by relative dielectric
The position of the number dielectric substance composition also lower than around in dielectric portion 1D.Relative dielectric constant changing unit 17D, 18D quilt
It is arranged to cover sparking electrode 2D or opposite electrode 3D leading section 21,31.
Here, if the mathematical expression and part 2 electrostatic of the part 1 electrostatic capacitance shown in the 1st embodiment are represented again
The mathematical expression of electric capacity, then it is C1=ε 0 × ε r/L1 and C2=0 × ε of ε r/L2.
In these mathematical expressions, ε r are relative dielectric constants, if relative dielectric constant ε r reduce, part 1 electrostatic capacitance
C1 or part 2 electrostatic capacitance C2 reduces.Therefore, as represented by present embodiment, even if being not provided with protuberance or bending section,
By nearby setting relative dielectric constant relative dielectric constant changing unit 17D, 18D also low than around in leading section 21,31,
So as to also can further reduce part 1 electrostatic capacitance C1 or part 2 electrostatic capacitance C2, can also subtract in discharge face 11
Electric-field intensity near weak leading section 21,31.Thus, the even Ozone generator 10D of present embodiment, in discharge face 11
In can also suppress leading section 21,31 nearby produce excessive electric discharge, attachment or defect growth can be prevented the problem of becoming
Obtain significantly.
In addition, in the present embodiment, also it can suitably change structure as illustrated by the end of the 1st embodiment
Into.For example, can change set sparking electrode 2D and opposite electrode 3D to quantity.Further, it can also set relative dielectric normal
Number changing unit, only to cover either one in the leading section 31 of sparking electrode 2D leading section 21 and opposite electrode 3D.Further,
The part of such as bent axle shape bending also can be nearby set in the center of sparking electrode 2D or opposite electrode 3D length direction, and will
The part of the bending is covered as " pars convoluta ", with relative dielectric constant changing unit.
Fig. 7 (B) is the sectional view that the Ozone generator 10E that the variation of the 4th embodiment is related to observes from front.
Ozone generator 10E possesses dielectric portion 1E, sparking electrode 2E, opposite electrode 3E and driving voltage source 4 (not shown).This is smelly
Oxygen generator unit 10E and the 2nd embodiment are same, and sparking electrode 2E and opposite electrode 3E is arranged in identical height and position.And
And in this composition, relative dielectric constant changing unit 17E, 18E is set, so as to overlapping with sparking electrode 2E and opposite electrode 3E,
Thus partial electrostatic electric capacity C1, C2 are nearby reduced in leading section 21,31.So, even sparking electrode is arranged with opposite electrode
The composition of identical height and position is listed in, can also realize the 4th embodiment that relative dielectric constant changing unit is set.
《5th embodiment》
Fig. 8 is the Ozone generator 10F of the fifth embodiment of the present invention vertical view observed from discharge face 11
Figure.Ozone generator 10F possesses dielectric portion 1F, sparking electrode 2F, opposite electrode 3F and driving voltage source 4 (not shown).
The embodiment is compared with the 2nd embodiment, and protuberance 17F, 18F shape are different possessed by dielectric portion 1F.Protuberance
17F is individually set relative to each sparking electrode 2F, and is arranged to only overlapping with each leading section 21.Further, protuberance 18F
Individually set relative to each opposite electrode 3F, and be arranged to only overlapping with each leading section 31.So, protrusion can be also set
Portion.
《6th embodiment》
Fig. 9 (A) is the Ozone generator 10G of the sixth embodiment of present invention electrical connection graph.Given birth on ozone
Into device 10G summary form, it is identical with the composition of the 1st foregoing embodiment, possess dielectric portion 1G, sparking electrode 2G,
Opposite electrode 3G (not shown) and driving voltage source 4G.Here, sparking electrode 2G and opposite electrode 3G is provided with more than 4 pairs.Put
Electrode 2G's and opposite electrode 3G is each to being grouped into 4 groups according to the order for being arranged in width.Moreover, driving voltage
Source 4G is configured to output and the driving voltage V of each pair of sparking electrode 2G and opposite electrode 3G of the phase of group number identical 41~V4.Structure
The driving voltage V that mutually numbers corresponding with group # is inputted as to the sparking electrode 2G of each group1~V4。
Fig. 9 (B) is driving voltage V1~V4Time waveform figure.Driving voltage V1~V4There is identical to repeat to scheme respectively
Case, and there is 90 ° of phase difference by the order mutually numbered.Therefore, driving voltage V1~V4Followed as phase difference by the order mutually numbered
The relation of ring.
In the Ozone generator 10G so formed, the distribution of the electric-field intensity near discharge face 11 changes, so as to
Circulated along width.Thus, near discharge face 11, the gas in space is influenceed and edge by electric-field intensity
Width movement.Therefore, the disengaging of supply and ozone self discharge face of the oxygen to discharge face can be promoted, by increasing capacitance it is possible to increase ozone is given birth to
Cheng Liang.Further, producing the circulation of gas, so as to which dirt etc. becomes to be difficult to be adsorbed in discharge face, Ozone generator 10G's is reliable
Property also improves.
In addition, in present embodiment, although being shown as driving voltage V1~V4And the example of pulse wave signal is utilized, but
Driving voltage V1~V4Sine wave signal or square-wave signal can be also utilized in addition.If utilize pulse wave signal or rectangle
Ripple signal, compared with the situation using sine wave signal, enable to start the voltage low-voltage of electric discharge, be more highly preferred to.
Although further, show for the number of phases of driving voltage to be set to 4 example in the present embodiment, but as long as the number of phases of driving voltage is
More than 3, then arbitrary integer can be used.Further, in the present embodiment, although showing to turn into phase under each driving voltage
The example of same waveform pattern, but the waveform pattern of each driving voltage can also differ.Such as also can utilize amplitude or
The cycle different driving voltage repeated.
《The illustration and reliability test of manufacture method》
The real machine for the Ozone generator being related to using each embodiment, reliability test is carried out.
First, the manufacture method of Ozone generator is illustrated as representative using the situation for the real machine for being provided with protuberance.
Figure 10 is the figure of the flow chart of the manufacture method in the real machine for represent Ozone generator.
In the manufacture for the real machine for possessing protuberance, the formation (S1) of dielectric raw cook has been carried out first.Specifically, will
CaO-B2O3-Al2O3-SiO2Gas and Al2O3Reinstate ball mill with toluene/ethanol mixed solvent and dispersant, adhesive one and enter
Go after 8hr decentralized processings, dielectric raw cook is formd by scraper for coating method.Wherein, the manufacture of dielectric raw cook is used
Various materials or specific processing method be not defined as the above, as long as according to form dielectric portion dielectric substance
Species set.For example, as dielectric substance, as long as A12O3、SiO2、ZrO2, various glass, BaTiO3Deng
Oxide, form LTCC glass and oxide filler resin such as mixture, epoxy or polyimides etc., can be situated between in electricity
Realize the material of high-insulativity in matter portion, it becomes possible to utilize suitable material.
Then, in the manufacture of real machine, the formation for the conductor paste pattern for turning into sparking electrode and opposite electrode has been carried out
(S2).Specifically, Ag cream is printed in by dielectric raw cook by silk-screen printing, thus form as sparking electrode and opposed electricity
The conductor paste pattern of pole.
Although in addition, as long as the material of conductor paste can be formed and just do not limited especially relative to dielectric raw cook,
With the dielectric raw cook being made up of oxide material etc. while in the case of burning till, as conductor paste it is expected to select Cu, Ag,
Pd, Pt, W or RuO2Resistance paste etc..
Then, in the manufacture of real machine, accumulate and be laminated multiple dielectric raw cooks, apply after pressure carries out integration and carry out
Burn till (S3).Now so that the dielectric thickness on sparking electrode is 40 μm, the dielectric thickness on opposite electrode is 120 μ
M, overall thickness is 500 μm.
Moreover, in the manufacture of real machine, the formation (S4) of protuberance has been carried out.Specifically, before use can cover each electrode
The printed patterns of end apply glass cream or dielectric paste, to cover the electricity of the dielectric raw cook after electrode print
The pars convoluta of pole printed patterns, by burning attached glass cream, become 10 μm so as to which protuberance is formed as into dielectric thickness.
Consequently, it is possible to produce the real machine for the Ozone generator for possessing protuberance.
In addition, in the manufacture method of above-mentioned real machine, although by the coating of glass cream with burn it is attached form protuberance,
But such as can also be by the way that the dielectric substance of sheet be struck out into desired pattern and with burning till stacking that is rear or not burning till
Body is laminated, and is then burnt till to form protuberance.Further, the material as protuberance, can in addition to glass cream
Utilize arbitrary Ins. ulative material.Wherein, from the point of view of the viewpoints such as reliability, due to the major part and protuberance in dielectric portion
It is expected the characteristic closes such as coefficient of thermal expansion, the material pretended as protuberance it is expected that selection can obtain the material of this characteristic.It is further, prominent
The dielectric thickness for going out portion is desired for more than 5 μm.Protuberance thickness ratio this it is also thin in the case of because the manufacture of protuberance
Deviation, the electric discharge near the leading section of sparking electrode or opposite electrode can not be reduced sometimes.Further, sparking electrode and discharge face it
Between interval be preferably converged in the range of 10 μm~100 μm.If should be at intervals of less than 10 μm, the insulating properties in dielectric portion
Scarcity, produce destructive electric discharge in electric discharge sometimes.On the other hand, if being somebody's turn to do at intervals of more than 100 μm, needed for electric discharge
Voltage raises, and causes power supply cost increase because of maximization of transformer that booster circuit is utilized etc..Therefore, above-mentioned interval is outstanding
It is preferably less than 50 μm.In addition, as long as the width of each electrode or the adjacent spaces of width are for 10 μm~200 μm
Can, it is particularly desirable to be 30 μm~100 μm.If these are less than 30 μm, the complexity raising of the wiring formation in mode of printing,
Yield rate is deteriorated.In addition, if less than 100 μm, then the transformer of more low price, being driven under low-voltage can be used
May.
Further, be not provided with protuberance and in the case that bending section is set, without forming the process (S4) of protuberance,
, will be relative to sparking electrode or opposite electrode and only heavy with leading section in layered dielectric raw cook and the process (S3) burnt till
The dielectric raw cook of folded pattern (such as frame-shaped) is laminated in discharge face.Moreover, applied in the entirety to layered product stressed same
Shi Jinhang is burnt till.Now, each main material or pressure, heat time etc. are set, to cause the flowing by adhesive to make discharge face
Planarization.Accordingly, because the shape of dielectric raw cook of the conductor paste pattern inside layered product along frame-shaped and in thickness direction
Deformation, so can bend sparking electrode or opposite electrode.
Further, be not provided with protuberance or bending section and in the case that relative dielectric constant changing unit is set, without shape
Into the process (S4) of protuberance, in layered dielectric raw cook and the process (S3) burnt till, opening will be provided with, to cause
Relative to sparking electrode or opposite electrode, dielectric raw cook only overlapping with leading section is burnt till after being laminated in discharge face.And
And after burning till, carry out using cream of dielectric substance etc. with different relative dielectric constants to bury the opening of discharge part,
And make the solidified process of the cream, thus, it is possible to set relative dielectric constant changing unit.
The real machine that the real machine and comparative example that each embodiment produced for the manufacture method more than is related to are related to,
Reliability test is carried out.In reliability test, it is held in by groove in the thermostat of 40 DEG C of -90% environment, makes each reality
Machine continuous discharge preset time (500hr).Moreover, in continuous discharge, aspirated by constant speed using in terms of ozone concentration
Gas in housing, measures ozone concentration.After continuous discharge starts the ozone concentration at initial stage and continuous discharge terminates immediately
Ozone concentration it is as follows.
In sparking electrode and opposite electrode in a thickness direction opposed real machine, following reliability test can be obtained
As a result.
1st embodiment (Fig. 1：Have protuberance, electrode contraposition type) initial stage：After 22.1ppm → experiment：20.5ppm |
Ozone concentration rate of descent：7.2%
3rd embodiment (Fig. 6 (A)：Have bending section, electrode contraposition type) initial stage：After 22.8ppm → experiment：21.5ppm
| ozone concentration rate of descent：5.7%
Comparative example (no protuberance, bending section, electrode contraposition type) initial stage：After 24.5ppm → experiment：17.65ppm | it is smelly
Oxygen concentration rate of descent：28%
According to these results, in the real machine that embodiments of the present invention are related to, can significantly suppress compared with comparative example
The decline of ozone concentration.It is thought that because：In the real machine that embodiments of the present invention are related to, from sparking electrode and opposed electricity
Thickness of the leading section of pole untill discharge face adds, and as a result nearby can suppress to discharge in electrode leading section, as coal
The precipitation of attachment is suppressed.
Further, if the real machine being related to embodiments of the present invention is compared each other, it is able to confirm that out：It is prominent with setting
The composition for going out portion is compared, and it is in good tendency to set the ozone concentration of the composition of bending section and rate of descent.
It is thought that because：In the composition for setting bending section, because discharge face becomes flat, therefore extraneous air is to electric discharge
The supply in face and the disengaging of ozone become prone to caused reason.
Further, in sparking electrode and opposite electrode in the case that identical height and position arranges in the direction of the width, energy
Obtain the result of following reliability test.
2nd embodiment (Fig. 5：Protuberance is continuous, electrode combed) initial stage：After 27.6ppm → experiment：23.8ppm |
Ozone concentration rate of descent：13.8%
5th embodiment (Fig. 8：Ledge is from, electrode combed) initial stage：After 27.3ppm → experiment：24.1ppm |
Ozone concentration rate of descent：11.7%
3rd embodiment (Fig. 6 (B)：Bending section, electrode combed) initial stage：After 28.6ppm → experiment：25.8ppm | it is smelly
Oxygen concentration rate of descent：9.7%
Comparative example (no protuberance, bending section：Electrode combed) initial stage：After 30.8ppm → experiment：16.3ppm | ozone
Concentration rate of descent：47.1%
It will also realize that according to these results, in the real machine that embodiments of the present invention are related to, compared with comparative example, one can be entered
Step significantly suppresses the decline of ozone concentration.Further, even if the real machine being related to embodiments of the present invention is compared each other,
Compared with the composition of protuberance is set, the ozone concentration of the composition of bending section and rate of descent is set further to become good.In addition,
Even if in the case where setting protuberance, also it is able to confirm that：Compared with ledge is left into the composition of setting, protuberance is set
It is in become good tendency to be set to the ozone concentration of the composition continuously extended and rate of descent.Think these also in that：Discharge face
In continuous shape so that the disengaging of supply and ozone of the extraneous air to discharge face becomes prone to produce.
In addition, by making driving voltage possess phase difference, so as to can be obtained in the case where making discharge face produce air-flow with
Under reliability test result.
6th embodiment (has protuberance：Airflow) initial stage：After 35.7ppm → experiment：31.2ppm | ozone concentration
Rate of descent：12.6%
3rd comparative example (no protuberance：Airflow) initial stage：After 37.0ppm → experiment：19.8ppm | under ozone concentration
Drop rate：46.5%
According to these results, in the real machine that embodiments of the present invention are related to, compared with comparative example, under ozone concentration
Drop can more significantly be suppressed.Further, by making discharge face produce air-flow in above-mentioned real machine, so as to promote extraneous air
The disengaging of supply and ozone to discharge face, therefore can obtain extraordinarily high ozone concentration compared with other constructions.
In addition, each embodiment of mistake indicated above or the composition of real machine are simply illustrated if claim after all
The composition of book, then either which kind of composition can access the action effect of the present invention.Further, disclosed in each embodiment
How composition combines can.
- symbol description-
1... dielectric portion
2... sparking electrode
3... opposite electrode
4... driving voltage source
10... Ozone generator
11... discharge face
12... bottom surface
13... left surface
14... right flank
15... it is positive
16... the back side
17th, 18,17F, 18F... protuberance
17B, 18B, 17C, 18C... bending section
17D, 18D, 17E, 18E... relative dielectric constant changing unit
21st, 31... leading sections
22nd, 32... line parts
Claims (11)
1. a kind of Ozone generator, possesses：
Dielectric portion, there is discharge face；With
1st electrode and the 2nd electrode, the inside of the dielectric portion it is mutually arranged extend, and respectively with the discharge face
It is opposed,
1st electrode possesses：The edge of electrode upwardly extends in the side that the 1st electrode extends when from the discharge face
Line part and electrode the pars convoluta that extends deviously since the line part of edge,
Between the 1st electrode and the discharge face, the per unit area of the 1st electrode near the pars convoluta produces
Electrostatic capacitance be less than the line part near the 1st electrode per unit area caused by electrostatic capacitance.
2. Ozone generator according to claim 1, wherein,
The dielectric portion possesses the relative dielectric constant changing unit that the pars convoluta is covered when from the discharge face,
The relative dielectric constant changing unit has the relative dielectric constant lower than the dielectric portion.
3. Ozone generator according to claim 2, wherein,
The relative dielectric constant changing unit upwardly extends when from the discharge face in the side intersected with the line part
It is and overlapping with the 2nd electrode.
4. according to Ozone generator according to any one of claims 1 to 3, wherein,
The distance of the 1st electrode and the discharge face near the line part is shorter than described near the pars convoluta
The distance of 1 electrode and the discharge face.
5. Ozone generator according to claim 4, wherein,
The dielectric portion possesses the protuberance that the pars convoluta is covered when from the discharge face,
The protuberance is more prominent compared with surrounding in the discharge face.
6. Ozone generator according to claim 5, wherein,
The protuberance upwardly extended when from the discharge face in the side intersected with the line part and with the described 2nd electricity
It is extremely overlapping.
7. the Ozone generator according to any one of claim 4~6, wherein,
1st electrode is nearby bent the pars convoluta to the direction separated with the discharge face.
8. according to Ozone generator according to any one of claims 1 to 7, wherein,
2nd electrode possesses：The edge of electrode upwardly extends in the side that the 2nd electrode extends when from the discharge face
The pars convoluta that the edge of line part and electrode extends deviously since the line part,
Between the 2nd electrode and the discharge face, the per unit area of the 2nd electrode near the pars convoluta produces
Electrostatic capacitance be less than the line part near the 2nd electrode per unit area caused by electrostatic capacitance.
9. according to Ozone generator according to any one of claims 1 to 8, wherein,
The Ozone generator possesses multipair 1st electrode and the 2nd electrode, multipair institute when from the discharge face
The 1st electrode and the 2nd electrode arrangement are stated relative to the 1st electrode side orthogonal with the direction that the 2nd electrode extends
Upwards,
Driving voltage source is also equipped with, output has the N phase driving voltages of the pattern repeated and the phase difference of circulation, wherein N >=3,
Multipair 1st electrode and the 2nd electrode are transfused to n-th according to putting in order for these electrodes from the driving voltage source
The driving voltage of phase, wherein 1≤n≤N.
10. a kind of Ozone generator, possesses：
Dielectric portion, there is discharge face；With
1st electrode and the 2nd electrode, the inside of the dielectric portion it is mutually arranged extend and respectively with the discharge face
It is opposed,
1st electrode possesses：The edge of electrode upwardly extends in the side that the 1st electrode extends when from the discharge face
The pars convoluta that the edge of line part and electrode extends since the line part deviously,
The dielectric portion possesses the protuberance that the pars convoluta is covered when from the discharge face,
The protuberance protrudes from the electric discharge towards thickness direction.
11. Ozone generator according to claim 10, wherein,
Upwardly extended when the protuberance is from the discharge face in the side intersected with the line part.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015115911 | 2015-06-08 | ||
| JP2015-115911 | 2015-06-08 | ||
| PCT/JP2016/066107 WO2016199625A1 (en) | 2015-06-08 | 2016-06-01 | Ozone generation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107635914A true CN107635914A (en) | 2018-01-26 |
| CN107635914B CN107635914B (en) | 2020-03-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680033191.9A Active CN107635914B (en) | 2015-06-08 | 2016-06-01 | Ozone generating device |
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| Country | Link |
|---|---|
| JP (1) | JP6547826B2 (en) |
| CN (1) | CN107635914B (en) |
| DE (1) | DE112016002204T5 (en) |
| WO (1) | WO2016199625A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5407639A (en) * | 1991-10-14 | 1995-04-18 | Toto, Ltd. | Method of manufacturing a corona discharge device |
| JP2001019409A (en) * | 1999-07-02 | 2001-01-23 | Toshiaki Akimoto | High voltage ozone generator |
| CN1774394A (en) * | 2004-02-25 | 2006-05-17 | 东芝三菱电机产业系统株式会社 | Ozone generator and ozone generating method |
| CN103476706A (en) * | 2011-04-08 | 2013-12-25 | 松下电器产业株式会社 | Ozone generating device |
| CN105409331A (en) * | 2013-07-19 | 2016-03-16 | 株式会社村田制作所 | Airflow generator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0741116Y2 (en) * | 1988-04-14 | 1995-09-20 | 閃一 増田 | Electric field device |
| JP2526706Y2 (en) * | 1991-10-14 | 1997-02-19 | 東陶機器株式会社 | Ozonizer |
-
2016
- 2016-06-01 JP JP2017523593A patent/JP6547826B2/en active Active
- 2016-06-01 WO PCT/JP2016/066107 patent/WO2016199625A1/en active Application Filing
- 2016-06-01 CN CN201680033191.9A patent/CN107635914B/en active Active
- 2016-06-01 DE DE112016002204.2T patent/DE112016002204T5/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5407639A (en) * | 1991-10-14 | 1995-04-18 | Toto, Ltd. | Method of manufacturing a corona discharge device |
| JP2001019409A (en) * | 1999-07-02 | 2001-01-23 | Toshiaki Akimoto | High voltage ozone generator |
| CN1774394A (en) * | 2004-02-25 | 2006-05-17 | 东芝三菱电机产业系统株式会社 | Ozone generator and ozone generating method |
| CN103476706A (en) * | 2011-04-08 | 2013-12-25 | 松下电器产业株式会社 | Ozone generating device |
| CN105409331A (en) * | 2013-07-19 | 2016-03-16 | 株式会社村田制作所 | Airflow generator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2016199625A1 (en) | 2018-01-18 |
| WO2016199625A1 (en) | 2016-12-15 |
| DE112016002204T5 (en) | 2018-02-22 |
| CN107635914B (en) | 2020-03-17 |
| JP6547826B2 (en) | 2019-07-24 |
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