CN107631817B - micro-Newton micro-thrust test system and test method - Google Patents
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Abstract
The invention provides a micro-Newton micro-thrust test system and a test method, comprising the following steps: a rack; a cantilever connected to the gantry by a flexible shaft; a damping device for preventing the cantilever from swinging horizontally by using electromagnetic resistance; a thrust device mounted at one end of the cantilever; the displacement measuring device is arranged at the other end of the cantilever, and the calibration device is used for calibrating the horizontal swing of the cantilever through the repulsive force between the magnets; a vacuum chamber for providing a vacuum environment for the equipment; a control unit for receiving and controlling the measurement process. The invention can realize the test of the thrust with the thrust-weight ratio of 10 < -7 > to 10 < -4 >, and greatly improve the measurement precision under the condition of enough measurement bandwidth. Meanwhile, the environmental influence is weakened, the test waiting time is greatly reduced, and the measurement times are increased.
Description
Technical Field
The invention relates to the field of physical mechanics, in particular to a method capable of measuring 1-3000 uN with a thrust-weight ratio of 10-7～10-4And the testing system of the thrust of the micro thruster in the range.
Background
The micro thruster is characterized in that the thrust ratio is small, the general thrust is below hundreds of millinewtons, and the accurate measurement of the small thrust is difficult. For a micro thruster, it can also work in a pulsed fashion, so there is not only the problem of how to measure small thrusts, but also the need to measure the pulse impulse. In order to shorten the test preparation time and weaken the influence of environmental noise, the damping of a rack must be considered; in order to avoid zero drift of long-term test, the problem of online thrust calibration must be considered. Therefore, a thrust measurement technique with high accuracy and high environmental reliability is one of the techniques that must be developed in the research of micro thrusters.
Currently, the micro-thrust/impulse measurement technology can be summarized into two types:
(1) the direct method comprises the following steps: when the thrust is large and the thrust-weight ratio is large, the thruster is directly placed on the force measuring sensor to directly measure the thrust. When the thrust is large but the thrust-weight ratio is small, the gravity of the thruster is balanced by a precisely designed balance platform frame, the thrust signal is directly converted into an electric signal by force sensors such as piezoelectric ceramics and the like, and then the electric signal is connected with an amplifier and then collected and recorded. The "zero deformation" characteristic of piezoelectric sensors makes them the most dynamically responsive measuring elements, with frequencies up to tens of kHz. Thus, the natural frequency of the measurement system is mainly dependent on the zenith carriage mechanism. To increase the natural frequency, the mechanical parts must be hardened, which necessarily reduces the sensitivity of the thrust measurement. In addition, this force measurement method can only achieve thrust measurement of several hundred mN or more at a large thrust-to-weight ratio, subject to the lower limit of the force measurement of the small-range force sensor. If the device is used for a smaller thrust test, sufficient measurement accuracy cannot be guaranteed.
(2) An indirect method: designing thrust platforms with different structures, and converting thrust measurement into platform displacement or acceleration measurement. Common structure types of the rack comprise simple pendulum, double pendulum or torsional pendulum and the like, and the average thrust measurement can be realized by calibrating the relation between static thrust and displacement/acceleration of the rack. The method is also the most widely applied micro thrust measurement method, wherein a simple pendulum structure generally performs thrust measurement of mN magnitude, and a torsional pendulum is mainly used for thrust measurement of mN, uN and even nN magnitude.
The quality of the referential scheme is analyzed one by one, and the fact that the direct method cannot be used for measuring thrust of a thruster of a uN level although the minimum force measuring limit is about tens of mN is not difficult to find. Moreover, the thrust-weight ratio of most thrusters of the uN stage is very small, such as 10-7～10-4It is difficult to use direct force measurement.
In indirect force measurement, the force measurement is often converted into a measurement displacement or acceleration. In the acceleration scheme, the change in gantry velocity, i.e. the change in gantry momentum, before and after the propeller fires needs to be measured to test the average thrust. The method not only needs to test the speed of the bench, but also needs to calibrate the effective mass of the bench, and meanwhile, the acting time of the thrust also needs to be accurately measured. This method is less applicable than the displacement method. In the displacement measurement scheme, thrust platforms with different structures need to be designed, and thrust measurement is converted into platform displacement measurement. The method can realize the measurement of the steady thrust by calibrating the relation between the static thrust and the displacement of the rack. The method is the most widely applied micro-thrust measurement method, and micro-force measurement as low as submicron Newton can be realized. However, the existing micro-thrust measurement technology has insufficient measurement accuracy and bandwidth, and is difficult to measure micro-thrust and micro-impulse simultaneously. Meanwhile, in a satellite-propelled ground test, automatic control, acquisition and online calibration need to be realized, and vacuum applicability and simplicity and convenience in operation are also needed.
Disclosure of Invention
The invention aims to provide a method for measuring the thrust-weight ratio of 1-3000 uN to 10-7～10-4The testing system of the thrust of the micro thruster in the range and the testing method using the testing system.
In particular, the present invention provides a micro-Newton micro-thrust test system comprising:
a stage providing a mounting base;
the cantilever is connected with the rack through a flexible shaft, so that two ends of the cantilever horizontally swing relative to the rack by taking the flexible shaft as a fulcrum;
the damping device is arranged at one end of the cantilever and rapidly stops the cantilever from horizontally swinging by utilizing electromagnetic resistance;
the thrust device is arranged at one end of the cantilever and comprises a micro thruster for applying horizontal thrust to the cantilever;
the displacement measuring device is arranged at the other end side of the cantilever and is used for acquiring the swinging displacement of the cantilever through capacitance change;
the calibration device is arranged on one side of the cantilever where the thrust device is arranged and used for calibrating the horizontal swing of the cantilever through repulsive force among magnetism;
the vacuum bin is used for providing a vacuum environment for the equipment;
and the control unit is arranged outside the vacuum bin, is used for receiving and controlling the work of the displacement measuring device and the calibration device, and comprises an industrial personal computer and display equipment with data processing capacity.
In one embodiment of the present invention, a first bracket is fixed to an upper surface of the stage, a second bracket is fixed to a lower surface of the arm, the second bracket being opposed to the first bracket, the first bracket and the second bracket are fixed to one end of the flexible shaft, respectively, and the flexible shaft is sandwiched and fixed by the first bracket and the second bracket.
In one embodiment of the present invention, the flexible shaft is a linear shaft, two horizontally extending holders are disposed on one side of the first bracket, one flexible shaft is vertically mounted in each holder, two horizontal fixing plates are mounted on the second bracket opposite to the side surface of the first bracket, and the horizontal fixing plates are respectively connected with the flexible shafts in the holders.
In one embodiment of the invention, the damping device comprises an electromagnet arranged on one side of the cantilever and a copper plate arranged on the cantilever and opposite to the electromagnet, the electromagnet is provided with a horizontal groove, and the copper plate is horizontally arranged and a track when the copper plate horizontally swings is superposed with the horizontal groove.
In one embodiment of the present invention, the displacement measuring device includes a capacitance displacement meter disposed proximate to the cantilever, and a micro electrically controlled translation stage for controlling a current position of the capacitance displacement meter.
In one embodiment of the invention, the measuring range of the capacitance displacement meter is 200um, and the displacement resolution is less than 0.1 nm; the stroke of the miniature electric control translation stage is 12mm, and the specific moving distance of the miniature electric control translation stage is controlled by external input voltage.
In one embodiment of the invention, the calibration device comprises a permanent magnet fixed on the side surface of the cantilever, a coil positioned on one side of the permanent magnet, and a programmable power supply for adjusting the current of the coil; wherein, the calibration force and the current are in a linear relation, the set point is variable, and the calibration is 10-3000 uN.
In one embodiment of the invention, the magnetic field intensity of the permanent magnet is 4000 gauss, the coil is 10 bundles, the diameter is 20mm, the working voltage is 0-20V, and the actually measured impedance is 0.5 omega; the maximum working voltage of the programmable power supply model is 40V, and the current is 5A.
In one embodiment of the present invention, a weight member having the same weight as that of the thrust device is attached to an upper surface of an end of the cantilever opposite to the thrust device.
In an embodiment of the present invention, there is provided a testing method of the micro-Newton micro-thrust testing system, including the following steps:
and 300, collecting a capacitance continuous change value between the displacement measuring device and the cantilever by using the control unit, thereby obtaining a thrust-time change curve chart of the current thrust device.
The cantilever horizontally placed in the invention can not be influenced by gravity, the stability of the cantilever can be kept through the damping device, and the distance between the capacitive displacement sensor and the cantilever can be accurately controlled through the displacement measuring device, so that accurate measuring data can be obtained. The steady-state thrust calibration can be realized through the calibration device. The invention can realize the test of the thrust with the thrust-weight ratio of 10 < -7 > to 10 < -4 >, and greatly improve the measurement precision under the condition of enough measurement bandwidth. Meanwhile, the environmental influence is weakened, the test waiting time is greatly reduced, and the measurement times are increased.
Drawings
FIG. 1 is a schematic diagram of a micro-Newton micro-thrust test system in accordance with one embodiment of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a schematic view of the operation of the displacement measuring device according to one embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating an operating condition of a calibration device according to an embodiment of the present invention;
FIG. 5 is a schematic diagram illustrating the variation of the thrust of a micro thruster measured according to an embodiment of the present invention;
FIG. 6 is a flow diagram of a test mode of an embodiment of the present invention.
Detailed Description
As shown in fig. 1 and 2, the micro-thrust test system of the present invention generally includes a stage 10 as a mounting base, a cantilever 20 mounted on the stage 10, a damping device 30, a thrust device 40, a displacement measuring device 50 and a calibration device 60 mounted on the cantilever 20, a vacuum chamber 70 for providing a vacuum environment, and a control unit 80 for controlling a test process.
The cantilever 20 is a lath-shaped structure, and is connected with the rack 10 through a flexible shaft 22 at the central symmetry position, so that two ends of the cantilever 20 can horizontally swing relative to the rack 10 by taking the flexible shaft 22 as a fulcrum. The connection structure of the cantilever 20 and the gantry 10 may be: a first support 11 is fixed on the upper surface of the stand 10, and a second support 21 opposite to the first support 11 is fixed on the lower surface of the cantilever 20, the first support 11 and the second support 21 can be respectively fixed with one end of a flexible shaft 22, and the flexible shaft 22 is clamped and limited by the first support 11 and the second support 21. The specific limiting structure may be: two horizontally extending clamping seats 111 with clamping spaces are arranged on one side of the first support 11, a flexible shaft 22 is vertically arranged in each clamping seat 111, and each flexible shaft 22 is a linear shaft; two horizontal fixing plates 211 are fixed to the side surfaces of the second bracket 21 opposite to the first bracket 11, and the two horizontal fixing plates 211 are connected to the flexible shafts 22 in the corresponding holders 111.
The flexible shaft 22 serves as a horizontal rotation axis of the suspension 20 with respect to the gantry 10, and the flexible shaft 22 is a non-lubricated member, and can be used in air or can meet the requirements of a vacuum environment. The flexible shaft 22 is fixed at both ends and can rotate in the middle, and the interior of the flexible shaft is similar to a rocker and has a fixed spring coefficient under a certain angle. The required spring rate is readily evaluated in terms of thrust and impulse test range, and weight of the micro thruster.
The damping device 30 is arranged at one end of the cantilever 20, and utilizes electromagnetic resistance force to rapidly stop the cantilever 20 from swinging horizontally; the specific structure comprises an electromagnet 31 which is arranged on one side of the cantilever 20 and is not contacted with the cantilever 20, and a copper plate 32 which is arranged at the end part of the cantilever 20 and is opposite to the electromagnet 31, wherein a horizontal groove 311 facing to the cantilever 20 is arranged on the electromagnet 31, the copper plate 32 is horizontally fixed at the end part of the cantilever 20, and the track of the copper plate 32 when the copper plate horizontally swings along with the cantilever 20 is superposed with the horizontal groove 311.
Due to the unobstructed nature of the flexible shaft 22, small oscillations caused by environmental vibrations or noise during testing are difficult to self-stop. This interference is fatal to the effects of extremely small steady state thrust (e.g., thrust less than 50uN) and extremely small impulse (e.g., 5uNs) measurements. Therefore, a damping system 30 must be used for stable control of the cantilever 20 under ground, vacuum conditions. In this embodiment, the electromagnet 31 may be fixed on the rack 10 or separately fixed on the ground, and when the cantilever 20 drives the copper plate 32 to move, the moving copper plate 32 generates an eddy current inside the horizontal groove 311 in the magnetic field generated by the energized electromagnet 31, and then generates an attractive force with the magnetic field of the electromagnet 31, so as to hinder the movement of the copper plate 32 relative to the electromagnet 31, and further realize the static of the cantilever 20 under the damping effect of the two. Experiments show that under the condition that the electromagnet 31 adopts 4000 gausses, the thickness of the copper plate 31 is 3mm, and the length and the width of the copper plate are respectively 30mm, the damping effect is good, and the pendulum can be stopped within seconds.
The thrust device 40 is installed at one end of the cantilever 20, and includes a micro thruster (not shown) for applying a horizontal thrust to the cantilever 20, and a fixing base 41 for fixing the micro thruster. The micro thruster is fixed on the upper surface of the cantilever 20 through the fixing seat 41, and can not be influenced by gravity. In order to ensure that the boom 20 is positioned substantially horizontally to eliminate the effect of gravity, in addition to enhancing the stiffness of the boom 20 at a reasonable orientation, the effect of gravity on the gantry 10 may be eliminated by adding a counterweight 23 to the opposite end of the boom 20.
The sensitivity of the thrust measurement 40 is related to the angle of rotation of the flexible shaft 22, and therefore, the torque constant of the flexible shaft 22 must be considered when selecting the flexible shaft 22. The smaller the constant, the larger the torsional angle of the cantilever 20 after loading the unit torque, and the higher the sensitivity of the thrust force acting on the gantry 10. But it is not preferable that the torque constant of the flexible shaft 22 is as small as possible, and the flexible shaft 22 having an appropriate torque constant should be appropriately selected according to the dynamic range of the measurement. The flexible shaft used in this embodiment is 6004-.
As shown in fig. 3, the displacement measuring device 50 is installed at an end of the cantilever 20 opposite to the thrust device 40, and may be on the same side as the thrust device 40 or on the opposite side to the thrust device 40, so as to obtain the swing displacement of the cantilever 20 through the capacitance change; comprises a capacitance displacement meter 52 arranged close to the cantilever 20 and a miniature electric control translation stage 51 for controlling the position of the capacitance displacement meter 52 relative to the cantilever 20. The capacitance displacement meter 52 measures the equivalent capacitance formed by the tiny distance (<0.5mm) between the metal end and the cantilever 20, and measures the distance between the two accurately, the effective measurement frequency of the capacitance displacement meter 52 is about 5kHz, the optimal resolution of the displacement is less than 0.1nm, so that the absolute value of the displacement (swing angle) and the time variation curve thereof can be obtained, the maximum displacement, the maximum speed and the acceleration process of the cantilever 20 can be obtained, and the steady-state thrust, the monopulse impulse and the acceleration variation curve of the micro thruster can be obtained by combining with static calibration.
Because the effective measuring range of the capacitance displacement meter 52 is very small (less than or equal to 0.2mm), the distance between the capacitance displacement meter and the swing arm 20 needs to be accurately controlled, so that the capacitance displacement meter can effectively measure. In actual operation, the output displacement signal of the capacitance type displacement meter 52 is transmitted back to the control unit 80, the control unit 80 determines the measuring range threshold value, when the capacitance type displacement meter 52 is in the effective measuring range, the micro electrically controlled translation stage 51 stops moving, when the position exceeds the measuring range threshold value, the control unit 80 estimates the position deviation to form a bias voltage, and then the bias voltage is added with the original voltage for output to control the moving distance of the micro electrically controlled translation stage 51 until the position of the capacitance type displacement meter 52 is within the threshold value. The capacitance displacement meter 52 with high measurement bandwidth is used for increasing the acquisition frequency of displacement, so that the time derivative measurement of displacement can be realized, and the micro-impulse information can be extracted.
As shown in fig. 4, the calibration device 60 is installed at the side of the cantilever 20 at the end where the thrust device 40 is installed, and is used for calibrating the horizontal swing of the cantilever 20 by the repulsive force between the magnets; the relationship of the current to the repulsive force can be measured in advance by a precision balance. The calibration device 60 may include a permanent magnet 63 fixed to a side surface of the cantilever 20, a coil 62 spaced apart from the permanent magnet 63, and a programmable power source 61 for adjusting a current level of the coil 62. The coil 62 is substantially fixed in distance from the permanent magnet 63. When the current of the coil 62 is changed, the magnetic field generated by the current of the coil 62 is changed, and the magnitude of the attraction and repulsion between the permanent magnet 63 and the coil is changed, and the attraction and repulsion is applied to the cantilever 20 without contact, so that the required standard force is formed.
The attraction and repulsion between the coil 62 and the permanent magnet 63 fixed on the cantilever 20 can be changed by changing the current of the coil, so that the non-contact on-line calibration is realized. In the aspect of calibration, the control unit 80 controls the programmable power supply 61 through the analog voltage, so that the output voltage/current of the programmable power supply 61 can be changed, the current in the coil 62 can be further changed, electromagnetic attraction and repulsion with specified magnitude can be generated, the force can be changed within the range of 10-3000 uN, and the precision and the linearity are excellent. When the position of the capacitance type displacement meter 52 is well controlled and the calibration is completed, the control unit 80 measures the pendulum thrust response under the loading of the known attraction and repulsion force, and then the steady thrust calibration can be realized.
The control unit 80 is disposed outside the vacuum chamber 70, and is used for controlling the working processes of the displacement measuring device 50 and the calibration device 60, and includes an industrial personal computer, a collection card and a display device with data processing capability. In terms of hardware, the industrial personal computer selects and uses a Hua industrial personal computer IPC-610MB and a Wa-pan multifunctional acquisition card PCI-3363. The configuration of the industrial personal computer IPC-610MB is as follows: the CPU E5300; memory: 4G; 500G of hard disk; an optical drive: a DVD. The acquisition card 3363 has 16 paths of differential inputs, the maximum sampling rate of 625ks/s, 18 bits of AD resolution and-10V of input analog signal range; 4 paths of analog signals are output, the maximum update rate is 2MHz, the DAC resolution is 16 bits, and the maximum output current is 50 mA. And on the aspect of a software interface, compiling a measurement and control program based on Labview, and generating a measurement and control installation file. The final software has friendly interface and perfect functions, and comprises the parts of parameter setting (the name and the type of a stored file), data display, data playback, calibration and the like. In the parameter setting, the name and type of the storage file can be set, and the sampling frequency of analog and digital channels can be set.
During measurement, the rack 10 and the cantilever 20 are placed in the vacuum chamber 70, the damping device 30 can keep the cantilever 20 static through interaction of magnetic force, then the micro thruster applies corresponding continuous thrust to the cantilever 20, the capacitance type displacement meter 52 can measure displacement change of the cantilever 20 in the measuring range, corresponding measurement results are sent to an industrial personal computer for analysis and recording, and the thrust test result of the current micro thruster can be obtained through stable thrust and impulse instructions given by the industrial personal computer.
Fig. 5 is a schematic diagram illustrating the thrust variation of a micro thruster measured in the vacuum chamber 70. Wherein, the abscissa is the supply voltage of the micro thruster, and the ordinate is the absolute value of the thrust. Therefore, the thrust variation range of the micro thruster is 1.9-803 uN in the voltage variation of 1.9-2.7V. In this test, the noise level of the capacitance displacement meter 52 reduced the thrust to about 0.3 uN. Through shock isolation, leveling, fine calibration and repeated tests, the force measurement error can be ensured to be about 1 uN.
The cantilever that the level was placed in this embodiment can not receive the influence of gravity, can keep the stability of cantilever through damping device, can accurate control capacitanc displacement sensor and the interval between the cantilever through displacement measurement device to acquire accurate measured data. The steady-state thrust calibration can be realized through the calibration device. This embodiment can realize a thrust-weight ratio of 10-7～10-4The thrust within the range is tested, and under the condition that the measurement bandwidth is enough, the measurement precision is greatly improved. Meanwhile, the environmental influence is weakened, the test waiting time is greatly reduced, and the measurement times are increased.
As shown in fig. 6, in an embodiment of the invention, a testing method of the micro-newton stage micro-thrust testing system is provided, which includes the following steps:
and 300, collecting a capacitance continuous change value between the displacement measuring device and the cantilever by using the control unit, thereby obtaining a thrust-time change curve chart of the current thrust device.
In the present test method, the components and the relationship between them are specifically adopted, please refer to the foregoing description, which is not repeated here.
This embodiment can realize a thrust-weight ratio of 10-7～10-4And (4) testing the thrust within the range of 1-3000 uN. The high measurement bandwidth of displacement measurement is realized, the measurement precision is greatly improved, and meanwhile, the automatic operation of a test system can be used for vacuum tests.
Thus, it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the invention have been illustrated and described in detail herein, many other variations or modifications consistent with the principles of the invention may be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the invention. Accordingly, the scope of the invention should be understood and interpreted to cover all such other variations or modifications.
Claims (9)
1. A micro-Newton micro-thrust test system, comprising:
a stage providing a mounting base;
the cantilever is connected with the rack through a flexible shaft, so that two ends of the cantilever horizontally swing relative to the rack by taking the flexible shaft as a fulcrum;
the damping device is arranged at one end of the cantilever and rapidly stops the cantilever from horizontally swinging by utilizing electromagnetic resistance, wherein the damping device comprises an electromagnet arranged at one side of the cantilever and a copper plate arranged on the cantilever and opposite to the electromagnet, a horizontal groove is formed in the electromagnet, the copper plate is horizontally arranged, and a track when the copper plate horizontally swings is superposed with the horizontal groove;
the thrust device is arranged at the other end of the cantilever and comprises a micro thruster for applying horizontal thrust to the cantilever;
the displacement measuring device is arranged on one end side of the cantilever, which is provided with the damping device, and is used for acquiring the swing displacement of the cantilever through capacitance change;
the calibration device is arranged on one side of the cantilever where the thrust device is arranged and used for calibrating the horizontal swing of the cantilever through repulsive force among magnetism;
the vacuum bin is used for providing a vacuum environment for the rack, the damping device, the thrust device, the displacement measuring device and the calibration device;
and the control unit is arranged outside the vacuum bin, is used for receiving and controlling the work of the displacement measuring device and the calibration device, and comprises an industrial personal computer and display equipment with data processing capacity.
2. The micro-Newton level micro-thrust testing system of claim 1, wherein,
the upper surface of the rack is fixedly provided with a first support, the lower surface of the cantilever is fixedly provided with a second support opposite to the first support, the first support is fixed with two ends of the flexible shaft, the second support is fixed with the middle part of the flexible shaft, and the flexible shaft is clamped and fixed by the first support and the second support.
3. The micro-Newton level micro-thrust testing system of claim 2, wherein,
the flexible shaft is a linear shaft, two horizontally extending clamping seats are arranged on one side of the first support, a flexible shaft is vertically arranged in each clamping seat, two horizontal fixing plates are arranged on the side face, opposite to the first support, of the second support, and the two horizontal fixing plates are connected with the flexible shafts in the two clamping seats respectively.
4. The micro-Newton level micro-thrust testing system of claim 1, wherein,
the displacement measuring device comprises a capacitance displacement meter arranged close to the cantilever and a miniature electric control translation table for controlling the current position of the capacitance displacement meter.
5. The micro-Newton level micro-thrust testing system of claim 4, wherein,
the measuring range of the capacitance displacement meter is 200um, and the displacement resolution is less than 0.1 nm; the stroke of the miniature electric control translation stage is 12mm, and the specific moving distance of the miniature electric control translation stage is controlled by external input voltage.
6. The micro-Newton level micro-thrust testing system of claim 1, wherein,
the calibration device comprises a permanent magnet fixed on the side surface of the cantilever, a coil positioned on one side of the permanent magnet, and a programmable power supply for adjusting the current of the coil; wherein, the calibration force and the current are in a linear relation, the set point is variable, and the calibration is 10-3000 uN.
7. The micro-Newton level micro-thrust testing system of claim 6, wherein,
the magnetic field intensity of the permanent magnet is 4000 gauss, the coil is 10 bundles, the diameter is 20mm, the working voltage is 0-20V, and the actually measured impedance is 0.5 omega; the maximum working voltage of the programmable power supply model is 40V, and the current is 5A.
8. The micro-Newton level micro-thrust testing system of claim 1, wherein,
and a counterweight block with the same weight as the thrust device is arranged on the upper surface of one end, opposite to the thrust device, of the cantilever.
9. A method of testing a micro-newton stage micro-thrust test system according to any one of claims 1 to 8, including the steps of:
step 100, electrifying the damping device to enable the cantilever to be in a static state, adjusting the displacement measuring device to be in a measuring range relative to the cantilever, and utilizing electromagnetic repulsion to realize thrust on-line calibration on the thrust device through the calibration device;
step 200, applying a continuous thrust-weight ratio to the cantilever by using a thrust device at 10-7～10-4Thrust within the range of 1-3000 uN;
and 300, collecting a capacitance continuous change value between the displacement measuring device and the cantilever by using the control unit, thereby obtaining a thrust-time change curve chart of the current thrust device.
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