CN107631815A - A kind of thin-film pressure sensor and preparation method thereof - Google Patents
A kind of thin-film pressure sensor and preparation method thereof Download PDFInfo
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- CN107631815A CN107631815A CN201610567824.6A CN201610567824A CN107631815A CN 107631815 A CN107631815 A CN 107631815A CN 201610567824 A CN201610567824 A CN 201610567824A CN 107631815 A CN107631815 A CN 107631815A
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Abstract
A kind of thin-film pressure sensor disclosed by the invention and preparation method thereof, it is made up of double-layer filmses, respectively the upper and lower, electrode layer, sensitive material, insulating barrier and glue layer are printed with respectively on lower film, electrode layer, sensitive material and insulating barrier are printed with respectively on topmost thin film.The sensor can be tested pressure, and the bigger resistance of pressure is smaller；Special structure design make it that test of the sensor to pressure is more accurate, data wander is smaller, using more permanent.
Description
Technical field
The present invention relates to sensor field, more particularly to a kind of diaphragm pressure test sensor.
Background technology
Pressure sensor is a kind of very universal sensor of application, has application in various occasions, different field.It is conventional
Pressure sensor be typically made by metal structure, volume is relatively large, and texture is harder, has certain limitation；It is thin
Diaphragm pressure transducer is a kind of flexible, small volume sensor, have usual pressure sensor without advantage, can be with
With on wearable device or smaller structure.
But existing thin-film pressure sensor in the market, either single-point or multipoint mode, generally existing is surveyed
The shortcomings that data are inaccurate, drift is larger is tried, is subject to certain restrictions in application.
The content of the invention
The present invention proposes that a kind of precision is higher, test is more accurate, drifted about more for the deficiency of existing thin-film pressure sensor
Small thin-film pressure sensor and preparation method thereof.
The measure taken of the present invention is：Thin-film pressure sensor is made up of double-layer filmses, respectively the upper and lower,
Electrode layer, sensitive material, insulating barrier and glue layer are printed with lower film respectively, electrode is printed with respectively on topmost thin film
Layer, sensitive material and insulating barrier.There is subregion to overlap between layer film upper electrode layer and sensitive material up and down, it is sensitive
Can directly it be contacted with each other between material layer；Directly contact portion does not include electrode layer between sensitive material on upper and lower layer film
With the overlapping region of sensitive material, insulating barrier can play the function of completely cutting off this overlapping region；Electrode on upper and lower layer film
Necessary mutually insulated, insulating barrier can play this isolation function between layer.
The present invention preparation method be：（a）Cut two correspondingly sized films, respectively the upper and lower film；（b）
Printed electrode layer, sensitive material and insulating barrier successively on lower film using printing machine；（c）Print is used on topmost thin film
Brush machine prints electrode layer, sensitive material and insulating barrier successively；（d）Press printing glue layer is used on lower film；（e）
On lower film glue layer solidification before, by topmost thin film have printing layer one down, lid be pressed on lower film；Two
The pattern that layer film prints when pressing will be corresponded to mutually.All printing layers are both needed to carry out again after upper strata printing layer is fully cured
Printing.
The beneficial effects of the invention are as follows：The present invention is simple in construction, and preparation method is easier to；Special structure design may be such that
Test data drift of the sensor to pressure is smaller, more stable, and the test to pressure is more accurate；This structure is it is also possible that pass
The sensor life-span increases, and workable effective time is longer.
The present invention is described further with reference to the accompanying drawings and examples.
Brief description of the drawings
Fig. 1 is printing layer schematic diagram on diaphragm type single point pressure sensor lower film of the present invention.
Fig. 2 is printing layer schematic diagram on diaphragm type single point pressure sensor topmost thin film of the present invention.
Fig. 3 is schematic diagram after diaphragm type single point pressure sensor levels film laminating of the present invention.
Fig. 4 is printing layer schematic diagram on diaphragm type multipoint pressure sensor lower film of the present invention.
Fig. 5 is printing layer schematic diagram on diaphragm type multipoint pressure sensor topmost thin film of the present invention.
Fig. 6 is schematic diagram after diaphragm type multipoint pressure sensor levels film laminating of the present invention.
In figure, 1. films, 2. electrode layers, 3. sensitive materials, 4. insulating barriers, 5. glue layers.
Embodiment
Embodiment 1：A kind of embodiment of thin-film pressure sensor of the present invention is illustrated with reference to Fig. 1, Fig. 2 and Fig. 3,
The sensor can be tested single point pressure, be diaphragm type single point pressure sensor.As shown in Figure 1 and Figure 2, sensor is by two
Layer film（1）Composition, respectively the upper and lower, lower film（1）It is upper to be printed with electrode layer respectively（2）, sensitive material
（3）, insulating barrier（4）And glue layer（5）, electrode layer is printed with respectively on topmost thin film（2）, sensitive material（3）And insulating barrier
（4）.The upper and lower film（1）Upper electrode layer（2）With sensitive material（3）There are overlapping region, insulating barrier（4）Can be complete
Portion covers this overlapping region, only upper and lower layer film（1）On not covered with insulating barrier（4）Sensitive material（3）Between can be straight
Connect and contact with each other.Its preparation method is：（a）Cut the polyester film of two 200mm × 200mm sizes（1）, respectively upper strata and
Lower film（1）；（b）In lower film（1）It is upper to be printed electrode layer using conductive silver paste successively using printing machine（2）, using leading
Composite prints sensitive material（3）And use insulating materials printing insulating barrier（4）；（c）Equally, in topmost thin film（1）
It is upper to be printed electrode successively layer using printing machine（2）, sensitive material（3）And insulating barrier（4）；（d）In lower film（1）Upper use
Press printing glue layer（5）；（e）In lower film（1）Upper glue layer（5）Before solidification, by topmost thin film（1）There is printing layer
One down, lid be pressed in lower film（2）On；Double-layer filmses（1）The pattern printed during pressing will be corresponded to mutually, such as Fig. 3 institutes
Show.In addition, all printing layers are both needed to be printed again after upper strata printing layer is fully cured.
Embodiment 2：The thin-film pressure sensor another kind embodiment of the present invention is said with reference to Fig. 4, Fig. 5 and Fig. 6
Bright, the sensor can be tested multipoint pressure.As shown in Figure 4, Figure 5, sensor is by double-layer filmses（1）Composition, it is respectively
The upper and lower, lower film（1）It is upper to be printed with electrode layer respectively（2）, sensitive material（3）, insulating barrier（4）And glue layer
（5）, electrode layer is printed with respectively on topmost thin film（2）, sensitive material（3）And insulating barrier（4）.Upper and lower layer film（1）On
Insulating barrier（4）Need that upper/lower electrode layer can be completely cut off（3）So that mutually insulated between them；Upper and lower layer film（1）On sensitive material
The bed of material（3）Between can directly contact with each other, can contact with each other part do not include sensitive material（3）With electrode layer（2）Coincidence
Part.Its preparation method is：（a）Cut the Kapton of two 300mm × 200mm sizes（1）, respectively upper strata is with
Layer film（1）；（b）In lower film（1）It is upper to be printed electrode layer using conductive silver paste successively using printing machine（2）, use conduction
Composite prints sensitive material（3）And use insulating materials printing insulating barrier（4）；（c）Equally, in topmost thin film（1）On
Printed electrode successively layer using printing machine（2）, sensitive material（3）And insulating barrier（4）；（d）In lower film（1）It is upper to use print
Brush machine printing rubber water layer（5）；（e）In lower film（1）Upper glue layer（5）Before solidification, by topmost thin film（1）There is printing layer
One down, and lid is pressed in lower film（2）On；Double-layer filmses（1）The pattern printed during pressing will be corresponded to mutually, upper and lower layer film
（1）On electrode layer（2）Intersect, as shown in Figure 6.In addition, all printing layers are both needed to be fully cured in upper strata printing layer
Printed again afterwards.
Claims (5)
- A kind of 1. thin-film pressure sensor, it is characterised in that：By double-layer filmses（1）Composition, respectively the upper and lower, lower floor Film（1）It is upper to be printed with electrode layer respectively（2）, sensitive material（3）, insulating barrier（4）And glue layer（5）, on topmost thin film point Electrode layer is not printed with it（2）, sensitive material（3）And insulating barrier（4）.
- 2. thin-film pressure sensor according to claim 1, it is characterised in that：Electrode layer（2）With sensitive material（3） Between have subregion coincidence, upper and lower layer film（1）On sensitive material（3）Between can directly contact with each other.
- 3. thin-film pressure sensor according to claim 1, it is characterised in that：Upper and lower layer film（1）On sensitive material The bed of material（3）Between directly contact portion do not include electrode layer（2）With sensitive material（3）Overlapping region, insulating barrier（4）It can rise To the function of completely cutting off this overlapping region.
- 4. thin-film pressure sensor according to claim 1, it is characterised in that：Upper and lower layer film（1）On electrode layer （2）Between must mutually insulated, insulating barrier（4）This isolation function can be played.
- 5. thin-film pressure sensor according to claim 1, its preparation method are：（a）Cut two correspondingly sized films（1）, respectively the upper and lower film（1）；（b）In lower film（1）It is upper to be printed electrode successively layer using printing machine（2）, sensitive material（3）And insulating barrier（4）；（c）In topmost thin film（1）It is upper to be printed electrode successively layer using printing machine（2）, sensitive material（3）And insulating barrier（4）；（d）In lower film（1）It is upper to use press printing glue layer（5）；（e）In lower film（1）On glue layer（5）Before solidification, by topmost thin film（1）There is face-down a, lid of printing layer It is pressed in lower film（1）On, double-layer filmses（1）The pattern printed during pressing will be corresponded to mutually.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610567824.6A CN107631815A (en) | 2016-07-18 | 2016-07-18 | A kind of thin-film pressure sensor and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610567824.6A CN107631815A (en) | 2016-07-18 | 2016-07-18 | A kind of thin-film pressure sensor and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107631815A true CN107631815A (en) | 2018-01-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610567824.6A Pending CN107631815A (en) | 2016-07-18 | 2016-07-18 | A kind of thin-film pressure sensor and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107631815A (en) |
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2016
- 2016-07-18 CN CN201610567824.6A patent/CN107631815A/en active Pending
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| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180126 |
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| WD01 | Invention patent application deemed withdrawn after publication |