CN107629701A - Polishing fluid and preparation method thereof - Google Patents

Polishing fluid and preparation method thereof Download PDF

Info

Publication number
CN107629701A
CN107629701A CN201711062417.0A CN201711062417A CN107629701A CN 107629701 A CN107629701 A CN 107629701A CN 201711062417 A CN201711062417 A CN 201711062417A CN 107629701 A CN107629701 A CN 107629701A
Authority
CN
China
Prior art keywords
polishing fluid
polishing
dispersant
oxidant
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201711062417.0A
Other languages
Chinese (zh)
Other versions
CN107629701B (en
Inventor
李俊锋
李青
徐兴军
张广涛
闫冬成
王丽红
郑权
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongxu Optoelectronic Technology Co Ltd
Original Assignee
Tunghsu Group Co Ltd
Tunghsu Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tunghsu Group Co Ltd, Tunghsu Technology Group Co Ltd filed Critical Tunghsu Group Co Ltd
Priority to CN201711062417.0A priority Critical patent/CN107629701B/en
Publication of CN107629701A publication Critical patent/CN107629701A/en
Application granted granted Critical
Publication of CN107629701B publication Critical patent/CN107629701B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The present invention relates to glass manufacturing area, more particularly to a kind of polishing fluid and preparation method thereof, wherein described polishing fluid contains abrasive material, oxidant, dispersant and pH adjusting agent, with abrasive material, on the basis of the total amount of oxidant and dispersant, abrasive content is 55 80 weight %, oxygenate content is 2 20 weight %, dispersant is 6 25 weight %, the preparation method includes abrasive material and dispersant being dissolved in the water, it is stirring evenly and then adding into oxidant, it is stirring evenly and then adding into pH adjusting agent, the invention further relates to glass polishing method, glass is processed by shot blasting including the use of polishing fluid of the present invention.The made polishing fluid of the present invention, solution dispersion stabilization, polishing efficiency are high, surface roughness is low after glass polishing, glass surface is smooth, and polishing fluid passes through high-strength mechanical friction, enhance close contact and the interaction of various compounding ingredients, each component Synergistic function is given full play to, makes polishing fluid more excellent performance.

Description

Polishing fluid and preparation method thereof
Technical field
The present invention relates to glass manufacturing area, and in particular to a kind of polishing fluid and preparation method thereof.
Background technology
Optical glass requires very high to glass surface finishes, and during post-processing, polishing process determines into glass sheet Quality, at present polishing fluid on the market occur that condensation, polishing efficiency are low, glass surface is of poor quality in use etc. and ask Topic, and the suspension of existing polishing fluid and dispersiveness are poor.
The content of the invention
The invention aims to overcome present in prior art, polishing efficiency is low, glass surface is of poor quality and existing A kind of the problem of suspension and poor dispersiveness of some polishing fluids, there is provided polishing fluid and preparation method thereof.
To achieve these goals, one aspect of the present invention provides a kind of polishing fluid, wherein, the polishing fluid contains mill Material, oxidant, dispersant and pH adjusting agent, on the basis of the total amount of abrasive material, oxidant and dispersant, the content of the abrasive material is 55-80 weight %, the content of the oxidant is 2-20 weight %, and the content of the dispersant is 6-25 weight %..
Another aspect of the present invention provides a kind of preparation method of above-mentioned polishing fluid, wherein, methods described includes first will mill Material and dispersant are dissolved in the water, and are stirring evenly and then adding into oxidant, are stirring evenly and then adding into pH adjusting agent.
Third aspect present invention provides a kind of glass polishing method, wherein, methods described is including the use of of the present invention Polishing fluid glass is processed by shot blasting.
Polishing fluid of the present invention is advantageous to the polishing of glass in alkalescence;Oxidant is added in polishing fluid, can be short The weak oxide-film of one layer of adhesion is formed in glass surface in time, is advantageous to mechanical removal, improves glass clearance, is saved Polishing time;Dispersant is added, ensures that solution has enough dispersion stabilizations, burnishing surface is not easy to scratch, not damage polish machine. Compared with existing polishing fluid, the made polishing fluid of the present invention, solution dispersion stabilization, polishing efficiency are high, surface after glass polishing Roughness is low, glass surface is smooth.In addition, polishing fluid of the present invention is various compound by high-strength mechanical friction, enhancing The close contact of component and interaction, give full play to the Synergistic function of various compounding ingredients so that polishing fluid performance is more To be excellent.
Embodiment
The end points of disclosed scope and any value are not limited to the accurate scope or value herein, these scopes or Value should be understood to comprising the value close to these scopes or value.For number range, between the endpoint value of each scope, respectively It can be combined with each other between the endpoint value of individual scope and single point value, and individually between point value and obtain one or more New number range, these number ranges should be considered as specific open herein.
One aspect of the present invention provides a kind of polishing fluid, wherein, the polishing fluid contain abrasive material, oxidant, dispersant and PH adjusting agent, on the basis of the total amount of abrasive material, oxidant and dispersant, the content of the abrasive material is 55-80 weight %, the oxygen The content of agent is 2-20 weight %, and the content of the dispersant is 6-25 weight %.
Preferably, on the basis of the total amount of abrasive material, oxidant and dispersant, the polishing fluid contains 56-70 weight %'s The dispersant of abrasive material, 5-15 weight % oxidant and 10-20 weight %.
In the present invention, it is preferred to the abrasive material is rare earth oxide, it is further preferred that the abrasive material is CeO2With/ Or La2O3.The cerium oxide and lanthana abrasive hardness of the present invention is moderate, fine size and even particle size distribution, suitable for precision instrument Polishing.
In the present invention, CeO2And La2O3Weight ratio can be 2-5:0.5-2, preferably 1.5-4:0.55-1.8.This CeO in invention2And La2O3The compound abrasive that abrasive material is mixed to form, it is more beneficial for raising and is polished material remove rate and smooth Degree.
In the present invention, the granularity of the abrasive material can be 0.5-0.7 μm, preferably 0.55-0.65 μm.It is described herein The granularity of abrasive material refer to:The diameter of mineral or particle (millimeter, micron) size.
In situations where it is preferred, oxidant of the present invention is at least one of potassium permanganate, manganese dioxide.The present invention Described in oxidant can form the weak oxide-film of one layer of adhesion in glass surface in a short time, be advantageous to machinery and go Remove, improve glass clearance, save polishing time.
In situations where it is preferred, dispersant of the present invention is neopelex, dodecyl sodium sulfate, poly- second At least one of alkene pyrrolidone and lauric acid amide of ethanol.These dispersants cause the polishing fluid prepared by the present invention to hang Buoyancy is strong, be not easy deposition and dispersion stabilization is good.
In the present invention, it is preferred to the pH adjusting agent is in sodium carbonate, potassium carbonate, sodium hydroxide and potassium hydroxide It is at least one.PH adjusting agent can adjust the pH value of polishing fluid, make polishing fluid pH value for alkalescence, preferably pH 7-8.Polishing fluid PH for alkalescence so that in polishing process, mechanism and chemical action reach peering state, in this case, chemistry The uniformity of effect is good so that surface tension is small, and processing uniformity is good, can obtain good surface finish.
In the present invention, the pH value of the polishing fluid can be alkalescence, it is highly preferred that pH value is 7-8.
The second aspect of the present invention is related to a kind of preparation method of polishing fluid of the present invention, and this method includes:First will Abrasive material and dispersant are dissolved in the water, and are stirring evenly and then adding into oxidant, are stirring evenly and then adding into pH adjusting agent.
The third aspect of the present invention is related to a kind of glass polishing method, and this method is including the use of polishing fluid of the present invention Glass is processed by shot blasting.
The present invention will be described in detail by way of examples below.
Embodiment 1-7
Abrasive material, dispersant and oxidant are weighed according to the content of each component in polishing fluid.Abrasive material, dispersant are dissolved in right amount Water in, carry out mechanical agitation, after being uniformly dispersed, continuously add oxidant, carry out mechanical agitation, then, add appropriate The pH value of pH value regulator regulation polishing fluid is to 7-8, you can obtains described alkalescence polishing liquid A1-A6.
Comparative example 1-3
The components such as commercially available cerium oxide powder are dissolved in appropriate water, polishing fluid D1-D3 is made.
Table 1
Embodiment 12-18 and comparative example 19-22
Identical glass is polished respectively using polishing fluid A1-A7 and D1-D4, then carries out following test, as a result It is illustrated in table 2.
Clearance:After the completion of polishing, after cleaning glass, glass surface quality and polishing speed are detected, is surveyed with precision balance Front and rear of poor quality, the calculating clearance of amount polishing.
Surface roughness:Using the surface roughness of the glass after surface roughness tester detection polishing.
Universal testing machine and Vickers measure glass breakage toughness K are used with reference to ASTM E-1820IC
Table 2
It can be seen that by the result of table 1 after being polished using polishing fluid of the present invention to glass, glass surface Roughness is low, clearance is high, glass surface is smooth.Moreover, polishing fluid of the present invention passes through high-strength mechanical friction, enhancing The close contact of various compounding ingredients and interaction, the Synergistic function of various compounding ingredients is given full play to so that throw Light fluidity can be more excellent.
The preferred embodiment of the present invention described in detail above, still, the present invention is not limited thereto.In the skill of the present invention In art concept, technical scheme can be carried out a variety of simple variants, including each technical characteristic with it is any its Its suitable method is combined, and these simple variants and combination should equally be considered as content disclosed in this invention, belong to Protection scope of the present invention.

Claims (10)

1. a kind of polishing fluid, it is characterised in that the polishing fluid contains abrasive material, oxidant, dispersant and pH adjusting agent, with mill On the basis of the total amount of material, oxidant and dispersant, the content of the abrasive material is 55-80 weight %, and the content of the oxidant is 2-20 weight %, the content of the dispersant is 6-25 weight %.
2. polishing fluid according to claim 1, it is characterised in that the abrasive material is rare earth oxide, preferably CeO2With/ Or La2O3
3. polishing fluid according to claim 1, it is characterised in that CeO2And La2O3Weight ratio be 2-5:0.5-2.
4. according to the polishing fluid described in any one in claim 1-3, it is characterised in that the granularity of the abrasive material is 0.5- 0.7μm。
5. polishing fluid according to claim 1, it is characterised in that the oxidant is potassium permanganate and/or manganese dioxide.
6. polishing fluid according to claim 1, it is characterised in that the dispersant is neopelex, 12 At least one of sodium alkyl sulfonate, polyvinylpyrrolidone and lauric acid amide of ethanol.
7. polishing fluid according to claim 1, it is characterised in that the pH adjusting agent is sodium carbonate, potassium carbonate, hydroxide At least one of sodium and potassium hydroxide.
8. according to the polishing fluid described in any one in claim 1-6, it is characterised in that the pH value of the polishing fluid is 7-8.
9. the preparation method of the polishing fluid in a kind of claim 1-7 described in any one, it is characterised in that this method includes: First abrasive material and dispersant are dissolved in the water, are stirring evenly and then adding into oxidant, is stirring evenly and then adding into pH adjusting agent.
10. a kind of glass polishing method, it is characterised in that this method is including the use of described in any one in claim 1-7 Polishing fluid is processed by shot blasting to glass.
CN201711062417.0A 2017-11-02 2017-11-02 Polishing solution and preparation method thereof Active CN107629701B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711062417.0A CN107629701B (en) 2017-11-02 2017-11-02 Polishing solution and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711062417.0A CN107629701B (en) 2017-11-02 2017-11-02 Polishing solution and preparation method thereof

Publications (2)

Publication Number Publication Date
CN107629701A true CN107629701A (en) 2018-01-26
CN107629701B CN107629701B (en) 2021-04-13

Family

ID=61107352

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711062417.0A Active CN107629701B (en) 2017-11-02 2017-11-02 Polishing solution and preparation method thereof

Country Status (1)

Country Link
CN (1) CN107629701B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108587479A (en) * 2018-07-04 2018-09-28 江西汇诺科技有限公司 A kind of novel sapphire polishing liquid
CN113249035A (en) * 2020-02-10 2021-08-13 中国科学院长春光学精密机械与物理研究所 Chemical mechanical polishing liquid and application thereof
CN113292928A (en) * 2021-05-20 2021-08-24 内蒙古大学 Preparation method of nano cerium dioxide polishing solution (powder)
CN115433520A (en) * 2022-08-29 2022-12-06 内蒙古广禾元纳米高科技有限公司 Green and environment-friendly chemical mechanical polishing solution for quartz glass and preparation method and application thereof
WO2023168780A1 (en) * 2022-03-08 2023-09-14 中国机械总院集团海西(福建)分院有限公司 Polishing solution having low abrasive material content and weak acidity for ultra-precise machining of optical glass, preparation method therefor

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1407045A (en) * 2001-08-21 2003-04-02 花王株式会社 Polishing composition
WO2003054096A1 (en) * 2001-12-20 2003-07-03 Akzo Nobel N.V. Cerium oxide coated silica particles and method for production thereof
CN1550537A (en) * 2003-05-09 2004-12-01 ��Ħ��ѧ��ҵ��ʽ���� Abrasive slurry having high dispersion stability and manufacturing method for a substrate
CN101302404A (en) * 2008-07-01 2008-11-12 上海大学 Preparation of nano-cerium oxide composite abrasive grain polishing solution
EP2011765A1 (en) * 2006-04-27 2009-01-07 Asahi Glass Company, Limited Oxide crystal fine particle and polishing slurry including the fine particle
CN101568615A (en) * 2006-12-28 2009-10-28 花王株式会社 Polishing liquid composition
KR20100080074A (en) * 2008-12-31 2010-07-08 제일모직주식회사 Cmp slurry composition for polishing metal wiring and polishing method using the same
CN102352186A (en) * 2011-06-24 2012-02-15 安徽工业大学 Nanometer polishing solution used for microcrystalline glass and preparation method thereof
CN102516874A (en) * 2011-11-09 2012-06-27 大连理工大学 Polishing liquid for ultra-precision sharpening of diamond cutting tool and preparation method thereof
CN103503118A (en) * 2011-06-03 2014-01-08 旭硝子株式会社 Polishing agent and polishing method
CN103917332A (en) * 2011-11-01 2014-07-09 旭硝子株式会社 Method for producing glass substrate
CN104178033A (en) * 2013-05-27 2014-12-03 天津西美半导体材料有限公司 Nano cerium oxide polishing liquid composition
KR20150019008A (en) * 2013-08-12 2015-02-25 주식회사 동진쎄미켐 Chemical mechanical polishing slurry composition for polishing metal layer and polishing method for metal layer
CN104385116A (en) * 2014-09-24 2015-03-04 尹涛 Polishing method of SiC semiconductor material
JP2015229750A (en) * 2014-06-06 2015-12-21 コニカミノルタ株式会社 Cmp polishing liquid
CN107129762A (en) * 2017-05-12 2017-09-05 江南大学 A kind of polishing fluid of carborundum chemically mechanical polishing and preparation method thereof

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1407045A (en) * 2001-08-21 2003-04-02 花王株式会社 Polishing composition
WO2003054096A1 (en) * 2001-12-20 2003-07-03 Akzo Nobel N.V. Cerium oxide coated silica particles and method for production thereof
CN1550537A (en) * 2003-05-09 2004-12-01 ��Ħ��ѧ��ҵ��ʽ���� Abrasive slurry having high dispersion stability and manufacturing method for a substrate
EP2011765A1 (en) * 2006-04-27 2009-01-07 Asahi Glass Company, Limited Oxide crystal fine particle and polishing slurry including the fine particle
CN101568615A (en) * 2006-12-28 2009-10-28 花王株式会社 Polishing liquid composition
CN101302404A (en) * 2008-07-01 2008-11-12 上海大学 Preparation of nano-cerium oxide composite abrasive grain polishing solution
KR20100080074A (en) * 2008-12-31 2010-07-08 제일모직주식회사 Cmp slurry composition for polishing metal wiring and polishing method using the same
CN103503118A (en) * 2011-06-03 2014-01-08 旭硝子株式会社 Polishing agent and polishing method
CN102352186A (en) * 2011-06-24 2012-02-15 安徽工业大学 Nanometer polishing solution used for microcrystalline glass and preparation method thereof
CN103917332A (en) * 2011-11-01 2014-07-09 旭硝子株式会社 Method for producing glass substrate
CN102516874A (en) * 2011-11-09 2012-06-27 大连理工大学 Polishing liquid for ultra-precision sharpening of diamond cutting tool and preparation method thereof
CN104178033A (en) * 2013-05-27 2014-12-03 天津西美半导体材料有限公司 Nano cerium oxide polishing liquid composition
KR20150019008A (en) * 2013-08-12 2015-02-25 주식회사 동진쎄미켐 Chemical mechanical polishing slurry composition for polishing metal layer and polishing method for metal layer
JP2015229750A (en) * 2014-06-06 2015-12-21 コニカミノルタ株式会社 Cmp polishing liquid
CN104385116A (en) * 2014-09-24 2015-03-04 尹涛 Polishing method of SiC semiconductor material
CN107129762A (en) * 2017-05-12 2017-09-05 江南大学 A kind of polishing fluid of carborundum chemically mechanical polishing and preparation method thereof

Non-Patent Citations (11)

* Cited by examiner, † Cited by third party
Title
张立业等: "铈基、硅基半导体抛光液的发展概况 ", 《稀土》 *
张立业等: "铈基、硅基半导体抛光液的发展概况", 《稀土》 *
李艳花等: "直接沉淀法制备纳米氧化铈及其抛光硅晶片的性能与影响因素 ", 《中国稀土学报》 *
王婕等: "纳米氧化铈抛光液对钌的化学机械抛光 ", 《金刚石与磨料磨具工程》 *
王婕等: "纳米氧化铈抛光液对钌的化学机械抛光", 《金刚石与磨料磨具工程》 *
白林山等: "二氧化铈抛光液化学机械抛光微晶玻璃的机理及优化 ", 《金刚石与磨料磨具工程》 *
白林山等: "二氧化铈抛光液化学机械抛光微晶玻璃的机理及优化", 《金刚石与磨料磨具工程》 *
莫益栋等: "精细雾化抛光TFT-LCD玻璃基板的抛光液研制 ", 《材料科学与工程学报》 *
莫益栋等: "精细雾化抛光TFT-LCD玻璃基板的抛光液研制", 《材料科学与工程学报》 *
陈广林等: "CeO2 纳米粒子抛光液分散稳定性及其化学机械抛光特性研究", 《表面技术》 *
隆仁伟等: "包覆型纳米CeO_2@SiO_2复合磨料的制备、表征及其抛光性能 ", 《摩擦学学报》 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108587479A (en) * 2018-07-04 2018-09-28 江西汇诺科技有限公司 A kind of novel sapphire polishing liquid
CN108587479B (en) * 2018-07-04 2021-01-15 江西汇诺科技有限公司 Sapphire polishing solution
CN113249035A (en) * 2020-02-10 2021-08-13 中国科学院长春光学精密机械与物理研究所 Chemical mechanical polishing liquid and application thereof
CN113249035B (en) * 2020-02-10 2024-05-24 长春长光圆辰微电子技术有限公司 Chemical mechanical polishing solution and application thereof
CN113292928A (en) * 2021-05-20 2021-08-24 内蒙古大学 Preparation method of nano cerium dioxide polishing solution (powder)
WO2023168780A1 (en) * 2022-03-08 2023-09-14 中国机械总院集团海西(福建)分院有限公司 Polishing solution having low abrasive material content and weak acidity for ultra-precise machining of optical glass, preparation method therefor
CN115433520A (en) * 2022-08-29 2022-12-06 内蒙古广禾元纳米高科技有限公司 Green and environment-friendly chemical mechanical polishing solution for quartz glass and preparation method and application thereof
CN115433520B (en) * 2022-08-29 2023-11-21 内蒙古广禾元纳米高科技有限公司 Green and environment-friendly chemical mechanical polishing solution for quartz glass and preparation method and application thereof

Also Published As

Publication number Publication date
CN107629701B (en) 2021-04-13

Similar Documents

Publication Publication Date Title
CN107629701A (en) Polishing fluid and preparation method thereof
CN108239484B (en) Alumina polishing solution for sapphire polishing and preparation method thereof
CN109321141B (en) A method of preparing the stability-enhanced silicon carbide chemical mechanical polishing liquid of pH
CN108864948A (en) Glass polishing powder, polishing fluid and preparation method thereof, glass and electronic product
CN105296106B (en) glass cutting liquid
CN107987731A (en) A kind of polishing fluid for sapphire 3D polishings and preparation method thereof
CN106281045A (en) A kind of nano material formula for precision stainless steel polishing and preparation technology thereof
CN110003798A (en) A kind of polishing fluid and its preparation method and application
CN103014712B (en) Aluminum component correcting fluid and correction method thereof
CN112680111B (en) Polishing solution for glass and application thereof
CN103965790A (en) Zr-Al-Ce polishing solution and preparation method thereof
CN104830234A (en) A-directional sapphire mobile phone cover plate polishing solution and preparation method thereof
KR20110099627A (en) Polishing composition and polishing method using the same
CN102392250A (en) Novel metal surface polishing agent
CN106663619A (en) Composition for polishing silicon wafers
CN107735471A (en) Serosity combination and additive and method for polishing organic polymer-based ophthalmically acceptable base material
JPH01257563A (en) Composition for polishing aluminium magnetic disc
CN105802582A (en) Rare earth grinding fluid
CN105506638B (en) A kind of Metallographic Analysis polishing fluid and preparation method thereof, application method
CN108864949A (en) A kind of rare earth polishing and preparation method thereof for polished glass
CN110041831A (en) A kind of nano-cerium oxide polishing fluid and preparation method thereof
CN113667408A (en) Multifunctional liquid wax and preparation method thereof
US20120034851A1 (en) Easy Rinsing Polishing Composition For Polymer-Based Surfaces
JPH04275387A (en) Abrasive composition
CN110846665B (en) Stainless steel polishing agent and preparation method and application thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right

Effective date of registration: 20200911

Address after: 050035 No. 9, the Yellow River Avenue, hi tech Zone, Hebei, Shijiazhuang

Applicant after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd.

Address before: The 100075 Beijing Seahawks Fengtai District Science City Road No. 9 Building No. 2 room 266 (Park)

Applicant before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd.

Applicant before: TUNGHSU GROUP Co.,Ltd.

TA01 Transfer of patent application right
GR01 Patent grant
GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20180126

Assignee: Sichuan Jiangwei Technology Co.,Ltd.

Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd.

Contract record no.: X2021110000049

Denomination of invention: Polishing liquid and its preparation method

Granted publication date: 20210413

License type: Common License

Record date: 20211125

EE01 Entry into force of recordation of patent licensing contract
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20180126

Assignee: Xinjiang Huiguang Photoelectric Technology Co.,Ltd.

Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd.

Contract record no.: X2022990000483

Denomination of invention: Polishing liquid and preparation method thereof

Granted publication date: 20210413

License type: Common License

Record date: 20220815

EE01 Entry into force of recordation of patent licensing contract