CN107618256A - Mask assembly and screen printing apparatus - Google Patents
Mask assembly and screen printing apparatus Download PDFInfo
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- CN107618256A CN107618256A CN201711021381.1A CN201711021381A CN107618256A CN 107618256 A CN107618256 A CN 107618256A CN 201711021381 A CN201711021381 A CN 201711021381A CN 107618256 A CN107618256 A CN 107618256A
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Abstract
The present invention discloses a kind of mask assembly and screen printing apparatus, belongs to silk-screen printing field.The mask assembly includes：Mask plate and the framework for fixing mask plate, temperature adjustment part is provided with mask plate, and temperature adjustment part is used for the temperature for adjusting mask plate, is adjusted with the tension force to mask plate.The present invention contributes to the homogeneity for the tension force for solving the problems, such as mask plate poor, is favorably improved the homogeneity of the tension force of mask plate.The present invention is used for silk-screen printing.
Description
Technical field
The present invention relates to silk-screen printing field, more particularly to a kind of mask assembly and screen printing apparatus.
Background technology
In the manufacturing process of display product, it is often necessary to figure is formed on substrate using silk-screen printing technique.For example,
(English to Organic Light Emitting Diode using cover plate encapsulation：Organic Light-Emitting Diode；Referred to as：OLED) device
Part encapsulate during, it is necessary to using silk-screen printing technique on substrate printed glass glue.Screen printing apparatus is silk-screen printing
The equipment commonly used in technique, screen printing apparatus generally include：Printing machine platform, mask assembly and scraper.
In correlation technique, mask assembly includes mask plate and the framework for fixing mask plate, and there is mask plate printing to scheme
Shape region, printed pattern region are provided with printed pattern.Using silk-screen printing technique when forming figure on substrate, first by base
Plate is arranged on printing machine platform, and mask assembly then is arranged on into surface, makes mask assembly relative with the position of substrate solid
Fixed, the printed pattern region of mask plate is aligned with the graphics field to be formed on substrate, and slurry (example is then set on mask plate
Such as glass cement), finally the slurry on mask plate is extruded along print direction using scraper, passes through the slurry on mask plate
Printed pattern region is printed onto on substrate, and corresponding figure is formed in the graphics field to be formed of substrate.
But in above-mentioned mask assembly, the homogeneity of the tension force of mask plate relies primarily on essence when manufacturing mask assembly
Degree is realized, is influenceed by the accuracy of manufacture, the homogeneity of the tension force of mask plate is poor.
The content of the invention
The present invention provides a kind of mask assembly and screen printing apparatus, help to solve the homogeneity of the tension force of mask plate compared with
The problem of poor.Technical scheme is as follows：
First aspect, there is provided a kind of mask assembly, the mask assembly include：Mask plate and for fixing the mask plate
Framework, temperature adjustment part is provided with the mask plate, the temperature adjustment part is used for the temperature for adjusting the mask plate, with
The tension force of the mask plate is adjusted.
Alternatively, the temperature adjustment part includes at least one fire-bar, each at least one fire-bar plus
Hot bar is used for by being heated to the mask plate, to adjust the temperature of the mask plate.
Alternatively, the mask plate has tension adjustment region, and the temperature adjustment part is arranged on the tension adjustment area
In domain.
Alternatively, the mask plate also has printed pattern region, and the tension adjustment region is located at the printed pattern
Around region.
Alternatively, the space of a whole page of the mask plate and the printed pattern region are rectangular configuration, the tension adjustment area
Domain is loop configuration, and the inner ring and outer rings in the tension adjustment region are all rectangular, the inner ring in the tension adjustment region
Structure and the structure congruence in the printed pattern region.
Alternatively, the temperature adjustment part is located at the surrounding in the printed pattern region.
Alternatively, the mask plate includes silk screen layer and the adhesive film being arranged on the silk screen layer, the adhesive film bag
Glued membrane graphics field is included, the glued membrane graphics field and the overlapping region of the silk screen layer are the printed pattern region.
Second aspect, there is provided a kind of screen printing apparatus, the screen printing apparatus include printing machine platform, scraper, and, the
Mask assembly described in any optional mode of one side or first aspect.
Alternatively, the screen printing apparatus also includes：Tonometry component and control assembly, the tonometry component
Electrically connected respectively with the control assembly with the temperature adjustment part of the mask assembly,
The tonometry component is used for the tension force for measuring the mask plate；
The control assembly is used for the tension force measured according to the tonometry component, controls the temperature adjustment part to adjust
The temperature of the mask plate, it is adjusted with the tension force to the mask plate.
Alternatively, the temperature adjustment part includes at least one fire-bar, each at least one fire-bar plus
Hot bar electrically connects with the control assembly,
The tonometry component is used for the tension force for measuring each location point of the mask plate；
The control assembly is used for the tension force according to each location point, determines the location point of tension force to be regulated, and control
The fire-bar made around the location point of the tension force to be regulated heats to the mask plate.
The beneficial effect that technical scheme provided by the invention is brought is：
Mask assembly and screen printing apparatus provided by the invention, mask assembly include mask plate and for fixing mask plate
Framework, temperature adjustment part is provided with mask plate, temperature adjustment part is used for the temperature for adjusting mask plate, to be opened to mask plate
Power is adjusted.Because temperature adjustment part can adjust the temperature of mask plate, it is adjusted with the tension force to mask plate, makes mask
The even tension of version, therefore, the homogeneity for the tension force for helping to solve the problems, such as mask plate are poor, improve the tension force of mask plate
Homogeneity.
It should be appreciated that the general description and following detailed description of the above are only exemplary, this can not be limited
Invention.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, make required in being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for
For those of ordinary skill in the art, on the premise of not paying creative work, other can also be obtained according to these accompanying drawings
Accompanying drawing.
Fig. 1 is a kind of application scenario diagram for screen printing apparatus that correlation technique provides；
Fig. 2 is a kind of front view of mask assembly provided in an embodiment of the present invention；
Fig. 3 is a kind of profile of mask assembly provided in an embodiment of the present invention；
Fig. 4 is a kind of application scenario diagram of screen printing apparatus provided in an embodiment of the present invention.
Accompanying drawing herein is merged in specification and forms the part of this specification, shows the implementation for meeting the present invention
Example, and for explaining principle of the invention together with specification.
Embodiment
In order that the object, technical solutions and advantages of the present invention are clearer, the present invention is made below in conjunction with accompanying drawing into
One step it is described in detail, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole implementation
Example.Based on the embodiment in the present invention, what those of ordinary skill in the art were obtained under the premise of creative work is not made
All other embodiment, belongs to the scope of protection of the invention.
Fig. 1 is refer to, the application scenario diagram of a kind of screen printing apparatus 00 provided it illustrates correlation technique, referring to figure
1, the screen printing apparatus 00 includes：Printing machine platform 001, mask assembly 002 and scraper 003.Mask assembly 001 includes mask plate
0021 and for fixing the framework 0022 of mask plate 0021, mask plate 0021 can be silk-screen printing mask plate, the mask plate
0021 includes printed pattern region (not shown in figure 1), and the printed pattern region is provided with printed pattern.Using the screen printing
Substrate 01 is arranged on printing machine platform 001, then by mask assembly by brush equipment 00 first when forming figure on substrate 01
002 is arranged on the top of substrate 01, is relatively fixed the position of mask assembly 002 and substrate 01, the printing figure of mask plate 0021
Shape region is aligned with the graphics field (not shown in figure 1) to be formed on substrate 01, then sets slurry on mask plate 0021
(not shown in figure 1), finally the slurry on mask plate 0021 is extruded along print direction x using scraper 003, makes mask plate
Slurry on 0021 is printed onto on substrate 01 by printed pattern region, is formed accordingly in the graphics field to be formed of substrate 01
Figure.Wherein, during the slurry that scraper 003 is extruded on mask plate 0021, scraper 003 can apply to mask plate 0021
Pressure, deform upon mask plate 0021, when the pressure diminishes or cancelled, the resilience of mask plate 0021, in mask plate 0021
Under rebound effect, the slurry on mask plate 0021 is printed onto on substrate 01.In cover plate encapsulation field, above-mentioned slurry can be glass
Glass glue.
But the precision that the homogeneity of the tension force of mask plate 0021 is relied primarily on when manufacturer manufactures mask assembly 002 is realized,
Influenceed by the accuracy of manufacture, the homogeneity of the tension force of mask plate 0021 is poor, and the different zones caused in substrate 01 print to be formed
The thickness of figure larger difference be present, the homogeneity of the thickness of the figure of formation is poor.And the tension force of mask plate 0021
The poor deformation quantity for also resulting in the different zones of mask plate 0021 in printing process of homogeneity is different, and then causes printing to be formed
Figure and substrate 01 existence position deviation in graphics field to be formed, the positional precision for printing the figure of formation is relatively low.In addition,
In the tension force difference of the different zones of mask plate 0021, the diverse location of scraper 003 is subject in printing process bounce
Difference, the abrasion for causing the diverse location of scraper 003 to be subject to is different, and the homogeneity that scraper 003 wears is poor.
In addition, in correlation technique, the tension difference of different mask plates is generally larger, and for the mask assembly of finished product, cover
The tension force of film version can not be adjusted, therefore be caused in silk-screen printing technique, it is necessary to for different mask plate setting printing parameters
The stability of silk-screen printing technique is relatively low.Influenceed by the homogeneity of the tension force of mask plate, the service life of mask plate is general at present
All over shorter, every mask plate generally can not normal use after printing 2000 times.
Mask assembly and screen printing apparatus provided in an embodiment of the present invention, can solve the homogeneity of the tension force of mask plate
The problem of poor, the homogeneity of the thickness for the figure that printing is formed is favorably improved, improves the position essence for the figure that printing is formed
The stability of degree and silk-screen printing technique, extend the service life of mask plate.The detailed description of the embodiment of the present invention refer to down
State embodiment.
Fig. 2 is refer to,, should referring to Fig. 2 it illustrates a kind of front view of mask assembly 10 provided in an embodiment of the present invention
Mask assembly 10 includes：Mask plate 101 and the framework 102 for fixing mask plate 101, temperature tune is provided with mask plate 101
Part 103 is saved, temperature adjustment part 103 is used for the temperature for adjusting mask plate 101, is adjusted with the tension force to mask plate 101.
In embodiments of the present invention, according to principle of expanding with heat and contracting with cold, when the temperature rise of mask plate, the tension force of mask plate subtracts
It is small, when the temperature of mask plate reduces, the tension force increase of mask plate, therefore can be overregulated by adjusting the temperature of mask plate
The tension force of mask plate.
In summary, mask assembly provided in an embodiment of the present invention, because temperature adjustment part can adjust the temperature of mask plate
Degree, is adjusted with the tension force to mask plate, makes the even tension of mask plate, therefore, contributes to the tension force of solution mask plate
The problem of homogeneity is poor, improve the homogeneity of the tension force of mask plate.
Alternatively, as shown in Fig. 2 temperature adjustment part 103 includes at least one fire-bar 1031, at least one fire-bar
Each fire-bar 1031 in 1031 is used for by being heated to mask plate 101, to adjust the temperature of mask plate 101.Wherein, heat
Bar 1031 can be electroluminescent heating strip.When needing to heat mask plate 101, voltage can be applied to fire-bar 1031, make to add
Hot bar 1031 produces heat, and heat caused by fire-bar 1031 reaches mask plate 101 by being thermally conducted to, to add to mask plate 101
Heat.Further, it is also possible to the size for the voltage being applied on fire-bar 1031 is adjusted, to adjust the caloric value of fire-bar 1031, from
And the heat that fire-bar 1031 heats to mask plate 101 is adjusted, to adjust the temperature of mask plate 101.It should be noted that this hair
Bright embodiment illustrates so that temperature adjustment part 103 includes at least one fire-bar 1031 as an example, in practical application, temperature
Regulating part 103 can also include cooler, and cooler can cool down to mask plate, so as to enter to the temperature of mask plate 101
Row regulation, the embodiment of the present invention are not defined to temperature adjustment part 103.
Alternatively, as shown in Fig. 2 mask plate 101 has tension adjustment region A, temperature adjustment part 103 is arranged on tension force tune
Save in the A of region.Alternatively, temperature adjustment part 103 is pasted onto in the A of tension adjustment region by colloid.Further, the mask plate
101 also there is printed pattern region B, tension adjustment region A to be located at around the B of printed pattern region, in the B of the printed pattern region
Printed pattern (not marked in Fig. 2) is provided with, the printed pattern is used to form corresponding figure on substrate.As shown in Fig. 2 print
Map brushing shape includes multiple void region B1, and void region B1 is used to make slurry pass through mask plate 101, to form phase on substrate
The figure answered.In cover plate encapsulation field, each void region B1 in multiple void region B1 can in a ring, each hollow out
Region B1 is corresponding with a display device on substrate, and each void region B1 is used for the printed glass around display device
Glue.
Alternatively, as shown in Fig. 2 the space of a whole page of the mask plate 101 and printed pattern region B are rectangular configuration, tension force is adjusted
Section region A is loop configuration, and tension adjustment region A inner ring (not marked in Fig. 2) and outer shroud (not marked in Fig. 2) are all in square
Shape, the structure of tension adjustment region A inner ring and printed pattern region B structure congruence.Temperature adjustment part 103 is arranged on tension force
In adjustment region A, and temperature adjustment part 103 is located at printed pattern region B surrounding.
In embodiments of the present invention, when temperature adjustment part 103 includes at least two fire-bars 1031, this at least two plus
Hot bar 1031 can be evenly distributed in the A of tension adjustment region, for example, as shown in Fig. 2 temperature adjustment part 103 adds including 12
Hot bar 1031,12 fire-bars 1031 are evenly distributed in the A of tension adjustment region.Add when temperature adjustment part 103 includes one
During hot bar 1031, a fire-bar 1031 can be annularly distributed in the A of tension adjustment region, and is centered around printed pattern area
Domain B surrounding.Certainly, in practical application, the quantity and distribution situation of fire-bar 1031 can be arranged as required to, the present invention
Implementation is not construed as limiting to this.In embodiments of the present invention, should when temperature adjustment part 103 includes at least two fire-bars 1031
At least two fire-bars 1031 can be located at the different zones in the A of tension adjustment region, when needing to heat mask plate 101,
Different voltage can be applied, to cause to different fire-bars 1031 according to the tension force situation of the different zones of mask plate 101
Different fire-bars 1031 produce different heats, and mask plate 101 is heated, and make the tension distribution of mask plate 101 uniform.
, can be according to the environment temperature of the local environment of mask plate 101 and the tension force feelings of the different zones of mask plate 101 in practical application
Condition, it is determined that the voltage applied to different fire-bars 1031.It should be noted that in practical application, can also be according to be formed
The situation of the substrate of figure, the tension force of mask plate 101 is adjusted by least two fire-bars 1031, makes mask plate 101 not
Tension force with region is matched with the situation of the different zones on substrate, and the embodiment of the present invention is not construed as limiting to this.
Alternatively, in embodiments of the present invention, framework 102 can be metal framework.For example, framework 102 can use gold
The metal materials such as category aluminium, metallic iron and metallic copper are made.And as shown in Fig. 2 framework 102 is back-shaped framework, that is to say, framework
Exterior contour is rectangular.
Alternatively, Fig. 3 is refer to, it illustrates the profile at the E-E positions of the mask assembly 10 shown in Fig. 2, with reference to Fig. 2
And Fig. 3, mask plate 101 include silk screen layer 1011 and the adhesive film 1012 being arranged on silk screen layer 1011, adhesive film 1012 includes
Glued membrane graphics field (not shown in Fig. 3), glued membrane graphics field and the overlapping region of silk screen layer 1011 are printed pattern region B,
Fire-bar 1031 can be arranged on adhesive film 1012.Wherein, silk screen layer 1011 can be using stainless steel material or alloy material
Expect the steel wire formed, adhesive film 1012 can be formed using latex, when manufacturing mask plate 101, can first manufacture steel wire
As silk screen layer 1011, latex is then coated on silk screen layer 1011 to form adhesive film 1012, obtains mask plate 101.
Mask assembly provided in an embodiment of the present invention, by setting temperature adjustment part on mask plate, according to expanding with heat and contract with cold
Principle, the tension force of mask plate is adjusted by temperature adjustment part, it is possible to achieve the homogeneity of the tension force of mask plate, so as to improve
The homogeneity of the thickness of the figure formed is printed, and avoids the figure of printing formation and the graphics field to be formed of substrate from existing
Position deviation, improve the positional precision for the figure that printing is formed.Further, it is also possible to according to the situation of substrate, mask plate is adjusted
The tension force of subregion is different from the tension force in other regions, so as to the situation for substrate, improves the equal of the figure that printing is formed
One property.And scheme provided in an embodiment of the present invention, the tension adjustment of different mask plates to same goal tension can be eliminated
Tension Difference between different mask plates so that different mask plates can use same printing parameter to carry out silk-screen printing technique,
Greatly improve the stability of silk-screen printing technique.Mask assembly provided in an embodiment of the present invention, the photovoltaic device that is particularly suitable for use in,
Plasma display device, OLED and active matrix organic electroluminescence diode (English：Active Matrix
Organic Light Emitting Diode；Referred to as：AMOLED) device etc. needs to use the field that glass cement is sealed.
In summary, mask assembly provided in an embodiment of the present invention, because temperature adjustment part can adjust the temperature of mask plate
Degree, is adjusted with the tension force to mask plate, makes the even tension of mask plate, therefore, contributes to the tension force of solution mask plate
The problem of homogeneity is poor, improve the homogeneity of the tension force of mask plate.
Fig. 4 is refer to, it illustrates a kind of application scenario diagram of screen printing apparatus provided in an embodiment of the present invention, referring to
Fig. 4, the screen printing apparatus include printing machine platform 11, scraper 12 and mask assembly 10, wherein, printing machine platform 11 and scraper 12
Associated description may be referred to correlation technique, and the structure of mask assembly 10 may be referred to the mask assembly shown in Fig. 2 or Fig. 3, this hair
Bright embodiment will not be repeated here.
Alternatively, the screen printing apparatus also includes：Tonometry component 13 and control assembly 14, tonometry component 13
Electrically connected respectively with control assembly 14 with the temperature adjustment part (not marked in Fig. 4) of mask assembly 10.Tonometry component 13 is used
In the tension force of the mask plate (not marked in Fig. 4) of measurement mask assembly 10；Control assembly 14 is used for according to tonometry component 13
The tension force of measurement, the temperature of control temperature adjustment part regulation mask plate, is adjusted with the tension force to mask plate.
Alternatively, temperature adjustment part includes at least one fire-bar, each fire-bar at least one fire-bar and control
Component 14 processed electrically connects, and tonometry component 13 is used for the tension force for measuring each location point of mask plate；Control assembly 14 is used for
According to the tension force of each location point, determine the location point of tension force to be regulated, and control it is around the location point of tension force to be regulated plus
Hot bar heats to mask plate.
It should be noted that when temperature adjustment part includes at least one fire-bar, due to generally can not be by mask plate
Therefore temperature adjustment, is influenceed, this is to be regulated to the temperature for being less than mask plate local environment by the temperature of mask plate local environment
The location point of tension force is usually that tension force is different from the tension force of the other positions point of mask plate, and the location point that temperature is relatively low, this hair
Bright embodiment is not construed as limiting to this.
In embodiments of the present invention, tonometry component 13 can be tensometer, control assembly 14 can be controller or
Person's control device, control device is such as computer.Each location point on mask plate can be mapped to coordinate by control assembly 14
It is in (two-dimensional coordinate system or three-dimensional system of coordinate), obtains each position point coordinates on mask plate, then controls tonometry group
Part 13 measures according to the tension force of each location point of the coordinate pair mask plate of each location point on mask plate, and according to
The tension force for the diverse location point that force measurement component 13 measures, it is determined that need to need on mask plate to adjust tension force location point (or
Need the region of regulation tension force), control around the location point (or needing to adjust the region of tension force) of needs regulation tension force
Fire-bar heats to mask plate, makes the tension force of the location point (or needing to adjust the region of tension force) of needs regulation tension force
It is identical with the tension force of other positions point (or other regions), it is uniform so as to the tension distribution of mask plate.It should be noted that
During the control fire-bar of control assembly 14 heats to mask plate, tonometry component 13 can continue or periodicity
The tension force of the location point (or needing to adjust the region of tension force) of needs regulation tension force is measured, until needs regulation tension force
The tension force of location point (either needing to adjust the region of tension force) is identical with the tension force of other positions point (or other regions).Also need
It is noted that in practical application, screen printing apparatus can also include manipulator, and control assembly 14 can be according on mask plate
Each location point coordinate, control machinery hand-motion tonometry component 13 moves on mask plate, with to each of mask plate
The tension force of individual location point is measured, and the embodiment of the present invention is not construed as limiting to this.
It should be noted that after the tension adjustment of mask plate is uniform, slurry can be set on mask plate, then
Control assembly 14 controls scraper 12 slurry is passed through the printing figure of mask plate along print direction (not shown in Fig. 4) extruding slurry
Shape region is printed onto on substrate 01.In addition, in practical application, control assembly 14 can also determine the feelings of the different zones of substrate 01
Condition, the tension force of temperature adjustment part regulation mask plate is controlled according to the situation of the different zones of substrate 01, the embodiment of the present invention is herein
Repeat no more.
It should also be noted that, the embodiment of the present invention is so that tonometry component is the component in screen printing apparatus as an example
Illustrate, in practical application, tonometry component can also be the external tensometer of screen printing apparatus, and the present invention is implemented
Example is not construed as limiting to this.
Screen printing apparatus provided in an embodiment of the present invention, the tension force of mask plate can be adjusted, make mask plate
Tension distribution is uniform so that in printing process, scraper stress is homogeneous, blade wears state consistency, and lift scraper uses the longevity
Life, while lifting process stability；In addition, screen printing apparatus provided in an embodiment of the present invention can be covered with automatic measurement and regulation
The tension force of film version, it is possible to reduce the influence of human factor, greatly promote production stability, lift properties of product.
In summary, screen printing apparatus provided in an embodiment of the present invention, because the temperature adjustment part of mask assembly can
The temperature of mask plate is adjusted, is adjusted with the tension force to mask plate, makes the even tension of mask plate, therefore, help to solve
The problem of homogeneity of the tension force of mask plate is poor, improve the homogeneity of the tension force of mask plate.
One of ordinary skill in the art will appreciate that hardware can be passed through by realizing all or part of step of above-described embodiment
To complete, by program the hardware of correlation can also be instructed to complete, described program can be stored in a kind of computer-readable
In storage medium, storage medium mentioned above can be read-only storage, disk or CD etc..
The foregoing is only the present invention alternative embodiment, be not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent substitution and improvements made etc., it should be included in the scope of the protection.
Claims (10)
1. a kind of mask assembly, it is characterised in that the mask assembly includes：Mask plate and the frame for fixing the mask plate
Frame, temperature adjustment part is provided with the mask plate, the temperature adjustment part is used for the temperature for adjusting the mask plate, with to institute
The tension force for stating mask plate is adjusted.
2. mask assembly according to claim 1, it is characterised in that the temperature adjustment part includes at least one heating
Bar, each fire-bar at least one fire-bar are used for by being heated to the mask plate, to adjust the mask plate
Temperature.
3. mask assembly according to claim 1, it is characterised in that the mask plate has tension adjustment region, described
Temperature adjustment part is arranged in the tension adjustment region.
4. mask assembly according to claim 3, it is characterised in that the mask plate also has printed pattern region, institute
Tension adjustment region is stated to be located at around the printed pattern region.
5. mask assembly according to claim 4, it is characterised in that the space of a whole page of the mask plate and the printed pattern area
Domain is rectangular configuration, and the tension adjustment region is loop configuration, and the inner ring and outer rings in the tension adjustment region are all in
Rectangle, the structure of the inner ring in the tension adjustment region and the structure congruence in the printed pattern region.
6. mask assembly according to claim 5, it is characterised in that the temperature adjustment part is located at the printed pattern area
The surrounding in domain.
7. according to any described mask assembly of claim 4 to 6, it is characterised in that the mask plate includes silk screen layer and set
The adhesive film on the silk screen layer is put, the adhesive film includes glued membrane graphics field, the glued membrane graphics field and the silk
The overlapping region of stratum reticulare is the printed pattern region.
8. a kind of screen printing apparatus, it is characterised in that the screen printing apparatus includes printing machine platform, scraper and claim
1 to 7 any described mask assembly.
9. screen printing apparatus according to claim 8, it is characterised in that the screen printing apparatus also includes：Tension force
The temperature adjustment part of measurement assembly and control assembly, the tonometry component and the mask assembly respectively with the control group
Part electrically connects,
The tonometry component is used for the tension force for measuring the mask plate；
The control assembly is used for the tension force measured according to the tonometry component, controls described in the temperature adjustment part regulation
The temperature of mask plate, it is adjusted with the tension force to the mask plate.
10. screen printing apparatus according to claim 9, it is characterised in that the temperature adjustment part includes at least one
Fire-bar, each fire-bar at least one fire-bar electrically connect with the control assembly,
The tonometry component is used for the tension force for measuring each location point of the mask plate；
The control assembly is used for the tension force according to each location point, determines the location point of tension force to be regulated, and control institute
The fire-bar stated around the location point of tension force to be regulated heats to the mask plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711021381.1A CN107618256B (en) | 2017-10-27 | 2017-10-27 | Mask assembly and screen printing apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711021381.1A CN107618256B (en) | 2017-10-27 | 2017-10-27 | Mask assembly and screen printing apparatus |
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| CN107618256A true CN107618256A (en) | 2018-01-23 |
| CN107618256B CN107618256B (en) | 2019-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711021381.1A Active CN107618256B (en) | 2017-10-27 | 2017-10-27 | Mask assembly and screen printing apparatus |
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| CN110540172A (en) * | 2019-09-03 | 2019-12-06 | 西安增材制造国家研究院有限公司 | bonding method of MEMS wafer in MEMS packaging process |
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| Publication number | Publication date |
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| CN107618256B (en) | 2019-07-30 |
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