CN107612414A - A kind of friction nanometer power generator and its preparation method and application - Google Patents
A kind of friction nanometer power generator and its preparation method and application Download PDFInfo
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Abstract
The present invention relates to a kind of friction nanometer power generator and its preparation method and application, the friction nanometer power generator be the flexible material using conduction as upper/lower electrode, and the film stacked gradually by the first insulating polymer, the first flexible material, the second insulating polymer, the second flexible material and the 3rd insulating polymer.The present invention friction nanometer power generator can the attachment on small radius of curvature object and reduce longitudinal direction on or transverse direction on space requirement, we have broken away from the limitation of generator " heaviness " substrate, have the advantages that ultra-thin, lightweight vertical independent friction laminar friction nanometer power generator.In addition, the friction nanometer power generator of the present invention can realize the attachment on complex structure, while have the function of collecting energy and sensing, and the damage of device can't be caused.This electric generator structure is simple, cost of manufacture is cheap and can largely produce, and meets the needs of current market.Belong to micro-nano energy source utilizing electricity generating techn field.
Description
Technical field
The invention belongs to micro-nano energy source utilizing electricity generating techn field, and in particular to a kind of friction nanometer power generator and preparation method thereof
And application.
Background technology
Friction nanometer power generator is as a kind of energy device of new collecting mechanical energy (Zhang L, Zhang B, Chen
J,et al.Lawn structured triboelectric nanogenerators for scavenging sweeping
wind energy on rooftops[J].Advanced Materials,2016,28(8):1650-1656.), by more next
More concerns.It has been achieved with huge progress in output, transformation efficiency, application and configuration aspects.Its output can expire
Sufficient mobile phone charging (Zhu G, Chen J, Zhang T, et al.Radial-arrayed rotary electrification
for high performance triboelectric generator[J].Nature communications,2014,
5.), transformation efficiency has reached 85% (Xie Y, Wang S, Niu S, et al.Grating-Structured
Freestanding Triboelectric‐Layer Nanogenerator for Harvesting Mechanical
Energy at 85%Total Conversion Efficiency [J] .Advanced Materials, 2014,26 (38):
6599-6607.)；Both energy device can be used as, sensor can also be used as, as pressure sensor (Chen S W, Cao X,
Wang N,et al.An Ultrathin Flexible Single‐Electrode Triboelectric‐
Nanogenerator for Mechanical Energy Harvesting and Instantaneous Force
Sensing [J] .Advanced Energy Materials, 2016.), ion detector (Lin Z H, Zhu G, Zhou Y
S,et al.A self‐powered triboelectric nanosensor for mercury ion detection[J]
.Angewandte Chemie International Edition,2013,52(19):5065-5069.), angle probe
(Lin Z H,Zhu G,Zhou Y S,et al.A self‐powered triboelectric nanosensor for
mercury ion detection[J].Angewandte Chemie International Edition,2013,52(19):
5065-5069.), ultraviolet light detector (Lin Z H, Cheng G, Yang Y, et al.Triboelectric
nanogenerator as an active UV photodetector[J].Advanced Functional Materials,
2014,24(19):2810-2816.) etc.；With contact separation formula (Zhu G, Pan C, Guo W, et
al.Triboelectric-generator-driven pulse electrodeposition for micropatterning
[J].Nano letters,2012,12(9):4960-4965.), sliding (Wang S, Lin L, Xie Y, et
al.Sliding-triboelectric nanogenerators based on in-plane charge-separation
mechanism[J].Nano letters,2013,13(5):2226-2233.), single electrode formula (Yang Y, Zhang H, Chen
J,et al.Single-electrode-based sliding triboelectric nanogenerator for self-
powered displacement vector sensor system[J].Acs Nano,2013,7(8):7342-7351.) and
Independent friction laminar (Zhu G, Chen J, Zhang T, et al.Radial-arrayed rotary electrification
for high performance triboelectric generator[J].Nature communications,2014,
5.).For structure, because single electrode formula friction nanometer power generator needs ground electrode, wearable device is limited it as
Using.But the generator of other three types needs sufficient space and " heaviness " substrate problem in the vertical or in transverse direction
(Chen S W,Cao X,Wang N,et al.An Ultrathin Flexible Single‐Electrode
Triboelectric‐Nanogenerator for Mechanical Energy Harvesting and
Instantaneous Force Sensing [J] .Advanced Energy Materials, 2016.), limit generator
Application in the supporting object of small space and complicated shape.
Resistive pressure sensor by by this non-electrical physical quantity of power be converted into resistance change (Liao X, Liao Q,
Yan X,et al.Flexible and highly sensitive strain sensors fabricated by pencil
drawn for wearable monitor[J].Advanced Functional Materials,2015,25(16):2395-
2401.).But this sensor is very sensitive to mechanically deform, its application on the small object of radius of curvature is limited.Though
So there is technology to overcome to the sensitive pressure sensor of mechanically deform (LeeS, Reuveny A, Reeder J, et al.A at present
transparent bending-insensitive pressure sensor[J].Nature nanotechnology,
2016.), but manufacturing cost is high, and preparation process is complicated.Output (Luo is just had because friction nanometer power generator needs contact
J,Tang W,Fan F R,et al.Transparent and Flexible Self-Charging Power Film and
Its Application in a Sliding Unlock System in Touchpad Technology[J].ACS
nano,2016,10(8):8078-8086.), it can't be influenceed by mechanically deform.Therefore, our use costs are low
Honest and clean friction nanometer power generator is as pressure sensor.
The content of the invention
To solve the above problems, the present invention proposes a kind of friction nanometer power generator and its preparation method and application, the present invention
Friction nanometer power generator can the attachment on small radius of curvature object and reduce longitudinal direction on or transverse direction on space requirement,
We have broken away from the limitation of generator " heaviness " substrate, are to have the vertical stand alone type friction nanometer a little such as ultra-thin, lightweight
Generator.In addition, the friction nanometer power generator of the present invention can realize the attachment on complex structure, while can collect
Energy and sensing, and the damage of device can't be caused.This electric generator structure is simple, cost of manufacture is cheap and can be a large amount of
Production, meets the needs of current market.
The present invention is achieved by the following technical solutions：
A kind of friction nanometer power generator, the friction nanometer power generator be using conduction flexible material as upper/lower electrode, and
By the first insulating polymer, the first flexible material, the second insulating polymer, the second flexible material and the 3rd insulating polymer successively
Stack the film formed；The material of first insulating polymer polymerize with second insulating polymer and the 3rd insulation
The material of thing is different；
The thickness of the friction nanometer power generator is 60-90 μm, mass area ratio 3-6mg.cm-2。
Further, first insulating polymer is petrochemical industry base polyester, polydimethylsiloxane or dimethyl silicone polymer,
It can be taken off after solidification from substrate polymer or glass；
First flexible material and the second flexible material are identical or different；The flexible material is nano silver wire, carbon is received
Mitron or the silica gel of graphene doping；
The material of second insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin；
The material of 3rd insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin.
The nano generator is using nano silver wire as upper/lower electrode, and by ethyl cellulose, nano silver wire, poly dimethyl silicon
The film that oxygen alkane, nano silver wire and polyurethane stack gradually；Thickness is 60-90 μm, mass area ratio 3-6mg.cm-2。
Further, the friction nanometer power generator can be attached to different shape well, in the supporting object of angle, and
The damage of device will not be caused.
A kind of preparation method of friction nanometer power generator, the preparation method include the preparation of ethyl cellulose solution, gathered
The preparation of dimethyl siloxane solution and the preparation of generator；
The preparation of the generator by Top electrode and the preparation process of bottom electrode and the coating of generator insulating layer and
The forming step of generator is obtained using nano silver wire as upper/lower electrode, and by ethyl cellulose, nano silver wire, polydimethylsiloxanes
The film that alkane, nano silver wire and polyurethane stack gradually, i.e., described friction nanometer power generator；Can be by institute according to practical application
State friction nanometer power generator and be cut into corresponding specification；
The Top electrode and the preparation process of bottom electrode include：
(1) preparation of polyethylene terephthalate/ethyl cellulose film：By the ethyl cellulose solution, rotation
It is coated on polyethylene terephthalate (PET) thin slice as support substrate, places at ambient temperature, standing time is
t1, transparent ethyl cellulose film is obtained on PET substrate；
(2) first etchings：Polyethylene terephthalate/the ethyl cellulose film is etched with nitrogen and oxygen,
Etch period is t2, to reduce the hydrophobicity on ethyl cellulose surface；
(3) preparation of bottom electrode：Obtained in step (2) on polyethylene terephthalate/ethyl cellulose film,
One layer of nano silver wire of spin coating, as bottom electrode, then the film is put into baking oven and dried, drying temperature T3, during drying
Between be t3, ethyl cellulose/nano silver wire film is obtained on PET substrate；
(4) preparation of insulating coating：By the dimethyl silicone polymer be spin-coated on the polyethylene terephthalate/
On ethyl cellulose/nano silver wire, it is put into vacuum drying chamber, drying temperature T4, drying time t4, in poly- terephthaldehyde
Poly- ethyl cellulose/nano silver wire/polydimethylsiloxanefilm film is obtained in sour glycol ester substrate；
(5) second etchings：Polyethylene terephthalate/ethyl cellulose/the Yin Na is etched with nitrogen and oxygen
Rice noodles/dimethyl silicone polymer, etch period t5, obtain hydrophilic polydimethylsiloxanefilm film；
(6) preparation of Top electrode：Polyethylene terephthalate/the second obtained in step (5) through over etching
On base cellulose/silver nano line/dimethyl silicone polymer, then one layer of nano silver wire of spin coating, then will be described thin as Top electrode
Film is put into baking oven and dried, drying temperature T6, it is that drying time is t6, obtained on PET substrate
Ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire film；Now, prepared by Top electrode and bottom electrode
Into.
Further, the coating of the generator insulating layer and the forming step of generator include：
A. in the polyethylene terephthalate/ethyl cellulose/nano silver wire/dimethyl silicone polymer/Yin Na
The strata urethane (PU) of spin coating one on rice noodles film, after placing 4-5h at room temperature, on PET substrate
Obtain ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire/polyurethane film；
B. it is C with concentrationbThe obtained ethyl cellulose/nano silver wire/poly dimethyl of sulfuric acid solution etching a steps
Siloxanes/nano silver wire/polyurethane film, sulfuric acid solution etch period are tb, rinsed well after etching, done with deionized water
It is dry, until water evaporating completely, completes the coating of the generator insulating layer；
C., b is walked to the obtained ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire/thin polyurethane
Film is taken off from the PET substrate, that is, obtains the friction nanometer power generator.
Further, the sulfuric acid concentration CbFor 3-5mol/L；Sulfuric acid solution etch period t described in step bbFor 10-
20s。
Further, the preparation of the ethyl cellulose solution is using volume as V0-1Dichloromethane and volume be V0-2's
Absolute ethyl alcohol is solvent, and dissolving quality is m0Ethyl cellulose, stirring is until described and cellulose fully dissolves, during stirring
Between be t0, obtain the flaxen ethyl cellulose solution.
Further, the time t of the stirring0For 4-6h.
Further, the methylene chloride volume V0-1For 30-50ml.
Further, the absolute ethyl alcohol volume V0-2For 15-25ml.
Further, the quality m of the ethyl cellulose0For 5-9g.
Further, the preparation of the dimethyl silicone polymer solution is by dimethyl silicone polymer and curing agent (band second
The prepolymer of alkenyl chain) and mass ratio be 1-10：1-3 ratio mixing, stirs to both and is sufficiently mixed, mixing time is
T0', white clear liquid is obtained, i.e., described dimethyl silicone polymer solution.
Further, the mixing time T0' it is 5-10min.
Further, standing time t described in step (1)1For 4-5h.
Further, etch period t described in step (2)2For 30-60s.
Further, drying temperature T described in step (3)3For 50-60 DEG C, the drying time t3For 10-15min.
Further, drying temperature T described in step (4)4For 100-150 DEG C；The drying time t4For 1-3h.
Further, etch period t described in step (5)5For 200-300s.
Further, drying temperature T described in step (6)6For 50-60 DEG C；The drying time t6For 10-15min.
A kind of application of friction nanometer power generator, the application are in energy device or sensor.
The present invention has following advantageous effects：
(1) friction nanometer power generator of the invention has light weight, thickness of thin, simple in construction, cost of manufacture cheap and can
The advantages that largely to produce.
(2) preparation method of friction nanometer power generator of the invention is simple, and material requested is cheap to be easy to get.
(3) friction nanometer power generator of the invention is the vertical independent laminar friction nanometer power generator that rubs.
(4) friction nanometer power generator of the invention has good shape adaptability, is attached in the substrate of arbitrary shape, real
Existing collection of energy and sensing.
(5) friction nanometer power generator of the invention can be used as high sensitive electronic skin, realize pressure sensing, sensitivity is
85.63μA.MPa-1。
(6) friction nanometer power generator of the invention can reduce the space requirement in longitudinal upper or transverse direction, break away from hair
The limitation of motor " heaviness " substrate.
(7) friction nanometer power generator of the invention is bipolar electrode, and its field applied and occasion are more extensive.
Brief description of the drawings
Fig. 1 is the dimensional drawing of making devices in embodiment.
Fig. 2 is the output current performance map of friction nanometer power generator in embodiment.
Fig. 3 is the output voltage performance map of friction nanometer power generator in embodiment.
Fig. 4 is performance map of the friction nanometer power generator as pressure sensor in embodiment.
Fig. 5 is the electric current output figure that friction nanometer power generator detects Strand as pressure sensor in embodiment.
Fig. 6 is that friction nanometer power generator is attached to the wedge angle figure on square object in embodiment.
Description of reference numerals：1- ethyl celluloses, 2- nano silver wires, 3- dimethyl silicone polymer 4- nano silver wires, 5- gather
Urethane.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is explained in further detail.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, and
It is not used in the restriction present invention.
On the contrary, the present invention covers any replacement done in the spirit and scope of the present invention being defined by the claims, repaiied
Change, equivalent method and scheme.Further, in order that the public has a better understanding to the present invention, below to the thin of the present invention
It is detailed to describe some specific detail sections in section description.Part without these details for a person skilled in the art
Description can also understand the present invention completely.
Embodiment 1
A kind of preparation method of friction nanometer power generator, the preparation method include herein below：
(1) preparation of solution：
5g ethyl cellulose is dissolved in the mixed solution of 30ml dichloromethane and 15ml absolute ethyl alcohols, stirring 5h is straight
Fully dissolved to the cellulose dimly, obtain the flaxen ethyl cellulose solution；
By dimethyl silicone polymer (PDMS) and curing agent (prepolymer with vinyl sidechain) using mass ratio as 3:1 ratio
Example mixing, stirring 5min are sufficiently mixed up to both, obtain the white clear liquid of bubble-free, i.e., described dimethyl silicone polymer
Solution；
(2) preparation of polyethylene terephthalate/ethyl cellulose film：By the ethyl cellulose solution, rotation
It is coated on polyethylene terephthalate (PET) thin slice as support substrate, places at ambient temperature, standing time is
5h, obtain transparent polyethylene terephthalate/ethyl cellulose film；
(3) first etchings：Be 50sccm nitrogen with flow and oxygen etch the polyethylene terephthalate/
Ethyl cellulose film, etch period 30s, to reduce the hydrophobicity on ethyl cellulose surface；
(4) preparation of bottom electrode：Obtained in step (3) on polyethylene terephthalate/ethyl cellulose film,
One layer of nano silver wire of spin coating, as bottom electrode, then the film is put into baking oven and dried, drying temperature is 60 DEG C, drying
Time is 10min, obtains PET/ethyl cellulose/nano silver wire film；
(5) preparation of insulating coating：By the dimethyl silicone polymer be spin-coated on the polyethylene terephthalate/
On ethyl cellulose/nano silver wire film, it is put into vacuum drying chamber, drying temperature is 120 DEG C, drying time 1.5h, is obtained
To polyethylene terephthalate/ethyl cellulose/nano silver wire/polydimethylsiloxanefilm film；
(6) second etchings：Be 50sccm nitrogen with flow and oxygen etch the polyethylene terephthalate/
Ethyl cellulose/nano silver wire/polydimethylsiloxanefilm film, etch period 200s, obtains hydrophilic polydimethylsiloxanes
Alkane film；
(7) preparation of Top electrode：Polyethylene terephthalate/the second obtained in step (6) through over etching
In base cellulose/silver nano line/polydimethylsiloxanefilm film, then one layer of nano silver wire of spin coating, as Top electrode, then by institute
State film and be put into baking oven and dry, drying temperature is 60 DEG C, drying time 10min, obtain polyethylene terephthalate/
Ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire film；Now, prepared by Top electrode and bottom electrode
Into.
(8) coating of generator insulating layer and the formation of generator：
First, in the polyethylene terephthalate/ethyl cellulose/nano silver wire/dimethyl silicone polymer/silver
The strata urethane (PU) of spin coating one on nano wire film, after placing 5h at room temperature, obtain polyethylene terephthalate/ethyl
Cellulose/silver nano line/dimethyl silicone polymer/nano silver wire/polyurethane film；
Then, the sulfuric acid solution etching polyethylene terephthalate obtained above for being 3mol/L with concentration/
Ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire/polyurethane film, sulfuric acid solution etch period are 20s,
Rinsed well, dried with deionized water after etching, until water evaporating completely, completes the coating of the generator insulating layer, obtain
Polyethylene terephthalate/ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire/polyurethane film；
Finally, by the ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire/polyurethane film from institute
State and taken off on PET substrate, that is, obtain the friction nanometer power generator, as shown in Figure 1.
The friction nanometer power generator obtained by the preparation method of the present embodiment, as shown in figure 1, its thickness is 78 μm,
Mass area ratio is 4.294mg.cm-2.The friction nanometer power generator of gained is made a service test below：
By the friction nanometer power generator in the case where applying the pressure of 3Hz frequencies, respectively with oscillograph and electrometer to described
Friction nanometer power generator measures, and as shown in Figures 2 and 3, the voltage and short circuit current measured is respectively 18V, 0.25 μ A.
Described friction nanometer power generator application is formed in the sensor and is based on friction nanometer power generator adaptability pressure
Sensor, the sensitivity of the pressure sensor is measured, as shown in Figure 4, the high sensitivity of pressure sensor is up to 85.63 μ
A.MPa-1；As shown in Fig. 5 electric current of the friction nanometer power generator as pressure sensor detection Strand in the present embodiment
Output figure, as seen from the figure, friction nanometer power generator of the invention can realize the detection of Strand.
Fig. 6 is the wedge angle figure that the friction nanometer power generator of the present embodiment is attached on square object, as seen from the figure, friction
Nanometer generating function is attached to different shape well, in the supporting object of angle, can't cause the damage of device.
This generator is not only simple in structure and can produced in enormous quantities, can not only be used as energy device but also can be used for passing
Sensor, there is important application in portable energy source and pressure sensor systems.
Embodiment 2
Nano generator of the present embodiment and preparation method thereof is substantially the same manner as Example 1, only unlike：
When in step (1) prepared by ethyl cellulose solution, ethyl cellulose quality is 9g；Methylene chloride volume is 50ml；
The volume of absolute ethyl alcohol is 25ml；Mixing time is 6h；
When preparing dimethyl silicone polymer solution, dimethyl silicone polymer (PDMS) and curing agent are (with vinyl sidechain
Prepolymer) mass ratio be 1:1；
Standing time described in step (2) is 5h；
Etch period described in step (3) is 60s；
Drying temperature described in step (4) is 60 DEG C, and the drying time is 15min；
Drying temperature described in step (5) is 120 DEG C；The drying time is 3h；
Etch period described in step (6) is 300s；
Drying temperature described in step (7) is 60 DEG C；The drying time is 15min.
The thickness of the friction nanometer power generator obtained by the preparation method of the present embodiment is 60 μm, mass area ratio
For 3mg.cm-2。
Embodiment 3
Generator of the present embodiment and preparation method thereof is substantially the same manner as Example 1, only unlike：
The thickness of the friction nanometer power generator obtained by the preparation method of the present embodiment is 78 μm, mass area ratio
For 5mg.cm-2。
Embodiment 4
Generator of the present embodiment and preparation method thereof is substantially the same manner as Example 1, only unlike：
When preparing dimethyl silicone polymer solution, dimethyl silicone polymer (PDMS) and curing agent are (with vinyl sidechain
Prepolymer) mass ratio be 10:3；
Standing time described in step (2) is 4h；
Etch period described in step (3) is 30s；
Drying temperature described in step (4) is 50 DEG C, and the drying time is 15min；
Drying temperature described in step (5) is 150 DEG C；The drying time is 1h；
Etch period described in step (6) is 200s；
Drying temperature described in step (7) is 50 DEG C；The drying time is 15min.
The thickness of the friction nanometer power generator obtained by the preparation method of the present embodiment is 90 μm, mass area ratio
For 6mg.cm-2。
Claims (10)
1. a kind of friction nanometer power generator, it is characterised in that the friction nanometer power generator is the flexible material using conduction on
Bottom electrode, and by the first insulating polymer, the first flexible material, the second insulating polymer, the second flexible material and the 3rd insulation
The film that polymer stacks gradually；The material of first insulating polymer and second insulating polymer and described the
The material of three insulating polymers is different；
The thickness of the friction nanometer power generator is 60-90 μm.
2. a kind of friction nanometer power generator according to claim 1, it is characterised in that first insulating polymer is stone
Change base polyester, polydimethylsiloxane or dimethyl silicone polymer；
First flexible material and the second flexible material are identical or different；The flexible material is nano silver wire, CNT
Or the silica gel of graphene doping；
The material of second insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin；
The material of 3rd insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin.
3. a kind of friction nanometer power generator according to claim 2, it is characterised in that the friction nanometer power generator is with silver
Nano wire is upper/lower electrode, and by ethyl cellulose, nano silver wire, dimethyl silicone polymer, nano silver wire and polyurethane successively
Stack the film formed；The thickness of the friction nanometer power generator is 60-90 μm.
4. a kind of preparation method of friction nanometer power generator, it is characterised in that the preparation method includes ethyl cellulose solution
Preparation, the preparation of dimethyl silicone polymer solution and the preparation of generator；
Top electrode and the preparation process of bottom electrode and the coating and generating of generator insulating layer are passed through in the preparation of the generator
The forming step of machine is obtained using nano silver wire as upper/lower electrode, and by ethyl cellulose, nano silver wire, dimethyl silicone polymer,
The film that nano silver wire and polyurethane stack gradually, i.e., described friction nanometer power generator；
The Top electrode and the preparation process of bottom electrode include：
(1) preparation of polyethylene terephthalate/ethyl cellulose film：By the ethyl cellulose solution, it is spin-coated on
As on the polyethylene terephthalate thin slice of support substrate, place at ambient temperature, standing time t1；At poly- pair
Ethyl cellulose film is obtained in PET substrate；
(2) first etchings：Polyethylene terephthalate/the ethyl cellulose film, etching are etched with nitrogen and oxygen
Time is t2, to reduce the hydrophobicity on ethyl cellulose surface；
(3) preparation of bottom electrode：Obtained in step (2) on polyethylene terephthalate/ethyl cellulose, one layer of spin coating
Nano silver wire, as bottom electrode, then the film is put into baking oven and dried, drying temperature T3, drying time t3,
Ethyl cellulose/nano silver wire film is obtained on PET substrate；
(4) preparation of insulating coating：The dimethyl silicone polymer is spin-coated on the polyethylene terephthalate/ethyl
On cellulose/silver nano line film, it is put into vacuum drying chamber, drying temperature T4, drying time t4, in poly- terephthaldehyde
Ethyl cellulose/nano silver wire/polydimethylsiloxanefilm film is obtained in sour glycol ester substrate；
(5) second etchings：With nitrogen and oxygen etch the polyethylene terephthalate/ethyl cellulose/nano silver wire/
Polydimethylsiloxanefilm film, etch period t5, obtain hydrophilic polydimethylsiloxanefilm film；
(6) preparation of Top electrode：In step (5) described ethyl cellulose/nano silver wire/poly dimethyl is obtained through over etching
On siloxane film, then one layer of nano silver wire of spin coating, as Top electrode, then the film is put into baking oven and dried, dried
Temperature is T6, it is that drying time is t6, ethyl cellulose/nano silver wire/poly- is obtained on PET substrate
Dimethyl siloxane/nano silver wire film；Now, the preparation of Top electrode and bottom electrode is completed.
5. the preparation method of a kind of friction nanometer power generator according to claim 4, it is characterised in that the generator is exhausted
The coating of edge layer and the forming step of generator include：
A. polyethylene terephthalate/the ethyl cellulose obtained in the Top electrode and the preparation process of bottom electrode/
The strata urethane of spin coating one on nano silver wire/dimethyl silicone polymer/nano silver wire, after placing 4-5h at room temperature, poly- to benzene
Ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire/thin polyurethane is obtained in naphthalate substrate
Film；
B. it is C with concentrationbThe obtained ethyl cellulose/nano silver wire/polydimethylsiloxanes of sulfuric acid solution etching a steps
Alkane/nano silver wire/polyurethane film, sulfuric acid solution etch period are tb, rinsed well after etching, dried, directly with deionized water
To water evaporating completely, the coating of the generator insulating layer is completed；
C. b is walked the obtained ethyl cellulose/nano silver wire/dimethyl silicone polymer/nano silver wire/polyurethane film from
Taken off on the PET substrate, that is, obtain the friction nanometer power generator.
A kind of 6. preparation method of friction nanometer power generator according to claim 5, it is characterised in that the sulfuric acid concentration
CbFor 3-5mol/L, sulfuric acid solution etch period tbFor 10-20s.
A kind of 7. preparation method of friction nanometer power generator according to claim 4, it is characterised in that the ethyl cellulose
The preparation of plain solution is using volume as V0-1Dichloromethane and volume be V0-2Absolute ethyl alcohol be solvent, dissolving quality is m0's
Ethyl cellulose, stirring are fully dissolved up to described and cellulose, mixing time t0, it is fine to obtain the flaxen ethyl
Tie up plain solution.
A kind of 8. preparation method of friction nanometer power generator according to claim 7, it is characterised in that the stirring when
Between t0For 4-6h；
The methylene chloride volume V0-1For 30-50ml；
The absolute ethyl alcohol volume V0-2For 15-25ml；
The quality m of the ethyl cellulose0For 5-9g.
A kind of 9. preparation method of friction nanometer power generator according to claim 4, it is characterised in that the poly dimethyl
The preparation of siloxane solution is using mass ratio as 1-10 by dimethyl silicone polymer and curing agent：1-3 ratio mixing, stirring is extremely
Both are sufficiently mixed, and mixing time 5-10min, obtain white clear liquid, i.e., described institute's dimethyl silicone polymer solution；Institute
It is the prepolymer with vinyl sidechain to state curing agent.
A kind of 10. preparation method of friction nanometer power generator according to claim 4, it is characterised in that institute in step (1)
State standing time t1For 4-5h；
Etch period t described in step (2)2For 30-60s；
Drying temperature T described in step (3)3For 50-60 DEG C, the drying time t3For 10-15min；
Drying temperature T described in step (4)4For 100-150 DEG C；The drying time t4For 1-3h；
Etch period t described in step (5)5For 200-300s；
Drying temperature T described in step (6)6For 50-60 DEG C；The drying time t6For 10-15min.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108269646A (en) * | 2018-02-01 | 2018-07-10 | 中国科学院电工研究所 | A kind of micro- laminating structure insulating materials and preparation method thereof and preparation facilities |
| CN110310470A (en) * | 2019-06-24 | 2019-10-08 | 北京科技大学 | It is a kind of to slide the netted integrated control device of electrostatic ripple and preparation method |
| CN111624360A (en) * | 2020-04-19 | 2020-09-04 | 季华实验室 | Rotating speed sensing device, estimation system and estimation method of pneumatic tire |
| CN112751500A (en) * | 2020-12-29 | 2021-05-04 | 北京师范大学 | Friction nanometer generator based on copper phthalocyanine and preparation method and application thereof |
| CN113639901A (en) * | 2021-07-20 | 2021-11-12 | 电子科技大学 | Touch sensor with piezoelectric-triboelectric laminated structure and preparation method thereof |
| CN113738196A (en) * | 2021-08-27 | 2021-12-03 | 科思技术(温州)研究院 | Coded lock and control method thereof |
| CN114836844A (en) * | 2022-04-11 | 2022-08-02 | 中国科学院工程热物理研究所 | Preparation method of functional fiber |
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| CN103411710A (en) * | 2013-08-12 | 2013-11-27 | 国家纳米科学中心 | Pressure sensor, electronic skin and touch screen equipment |
| CN106382997A (en) * | 2016-09-18 | 2017-02-08 | 北京科技大学 | Electronic skin of friction electrostatic induction type |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108269646A (en) * | 2018-02-01 | 2018-07-10 | 中国科学院电工研究所 | A kind of micro- laminating structure insulating materials and preparation method thereof and preparation facilities |
| CN108269646B (en) * | 2018-02-01 | 2020-08-14 | 中国科学院电工研究所 | Micro-stack-structure insulating material and preparation method and preparation device thereof |
| CN110310470A (en) * | 2019-06-24 | 2019-10-08 | 北京科技大学 | It is a kind of to slide the netted integrated control device of electrostatic ripple and preparation method |
| CN111624360A (en) * | 2020-04-19 | 2020-09-04 | 季华实验室 | Rotating speed sensing device, estimation system and estimation method of pneumatic tire |
| CN112751500A (en) * | 2020-12-29 | 2021-05-04 | 北京师范大学 | Friction nanometer generator based on copper phthalocyanine and preparation method and application thereof |
| CN112751500B (en) * | 2020-12-29 | 2022-03-22 | 北京师范大学 | Friction nanometer generator based on copper phthalocyanine and preparation method and application thereof |
| CN113639901A (en) * | 2021-07-20 | 2021-11-12 | 电子科技大学 | Touch sensor with piezoelectric-triboelectric laminated structure and preparation method thereof |
| CN113738196A (en) * | 2021-08-27 | 2021-12-03 | 科思技术(温州)研究院 | Coded lock and control method thereof |
| CN114836844A (en) * | 2022-04-11 | 2022-08-02 | 中国科学院工程热物理研究所 | Preparation method of functional fiber |
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