CN1076087C - Super critical vacuum pump - Google Patents
Super critical vacuum pump Download PDFInfo
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- CN1076087C CN1076087C CN99102800A CN99102800A CN1076087C CN 1076087 C CN1076087 C CN 1076087C CN 99102800 A CN99102800 A CN 99102800A CN 99102800 A CN99102800 A CN 99102800A CN 1076087 C CN1076087 C CN 1076087C
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- vacuum pump
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- super critical
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Abstract
The present invention relates to a vacuum pump in the field of vacuum, particularly to a supercritical vacuum pump which can reach an ultrahigh vacuum limit with a single machine. The present invention is characterized in that the vacuum pump is in a V-shaped structure; the end part of the V-shaped structure is provided with a suction inlet; a heat radiator is fixedly arranged near the side wall of the suction inlet of the vacuum pump; a heating zone is formed by winding the side wall of the middle of the V-shaped structure of the vacuum part by resistance wires; a heat radiator is fixed to the side wall of an outlet; a groove is arranged on an impeller of the vacuum pump. The present invention has the advantages of obvious effect and reasonable structure; the supercritical vacuum pump has the characteristic of no oil and is suitable for various industries.
Description
The present invention relates to the vacuum pump in a kind of vacuum field.Be particularly related to the super critical vacuum pump that a kind of unit can reach the ultrahigh vacuum limit.
The limit 10 of existing unit vacuum pump
-2Handkerchief.If adopt existing unit vacuum pump that airtight container is bled, be difficult to reach the ultrahigh vacuum degree.Existing technology must be used the vacuum unit of several pumps; Bleed in succession, just can reach ultrahigh vacuum.
Its reason is that the unit vacuum pump is taken out the gas in the airtight container, is extracted into certain degree of vacuum 10
-4During handkerchief, still have 2.4 * 10 in the container
6(individual) gas molecule, the unit vacuum pump is taken out the gas molecule of seal container, and gas is thin in the container reaches 10
-2Handkerchief, at this moment the gas molecule spacing strengthens, variation along with pressure, the air extractor heating of unit vacuum pump, can make thin gas molecule temperature difference and pressure difference occur, the rarefied gas molecule is then because thermal source produces motion transmission heat like this, the interface of the vacuum pump removal system body of gas molecule and heating collides the back and obtains after the energy, the direction of bleeding of contrary vacuum pump, fly to the cold wall of seal container straight, and part energy is passed to airtight cold wall by collision, and make the unit vacuum pump to the gas in the seal container just because of this feature, take out and end 10
-2The vacuum limit again can not taken out the true cause of the gas molecule in the container.
This shows; the rarefied gas molecular density is very little; gas molecule is back and forth movement between the wall of a container face of sealing; not with other gas molecule collision; and be not subjected to the obstruction of other molecule; also not with other molecule generation exchange of kinetic energy and energy interchange, the characteristics of gas molecule phenomenon in the rarefied gas that Here it is.
Flow phenomenon based on rarefied gas, the temperature difference will cause the difference of pressure, seal container and vacuum pump are two parts, its temperature difference, the work of vacuum pump causes heating, then relative temperature is low for seal container one end, this has brought up temperature difference pressure to gas molecule and has renderd a service, make gas molecule make thermal transpiration motion phenomenon, gas molecule promptly can appear from the mass flow of high temperature side to low temperature side, when the energy of reverse flow equals the merit of bleeding of unit vacuum pump, the unit vacuum pump just is in threshold state like this.
In view of this, how to break through the critical limit state that vacuumizes of conventional vacuum pump, the simple power with improving vacuum pump is prominent not broken.But utilize the thermal transpiration rule of rarefied gas molecule in closed unit to design super critical vacuum pump, increase the vacuum limit of unit vacuum pump with this, the vacuum that breaks through former unit vacuum pump is critical, so that do not need very high vacuum pump power performance, just can improve the vacuum limit, in the vacuum field, start a higher level high-tech revolution.This also is the desired problems of capturing of numerous vacuum technique researchers, and also the present invention grinds the motivation place of wound just.
Designer of the present invention has accumulated rich practice experience by means of being engaged in the vacuum technique area research decades, on the basis of demonstration testing repeatedly, utilize the characteristics of motion of rarefied gas molecule, observe its rule, utilize its rule, design the super critical vacuum pump of novel concept.
Shortcoming at existing vacuum pump technology, with and the reason of the threshold state vacuum limit, the objective of the invention is to design cleverly, a kind of combination of overcritical vacuum system is provided, can be with the gas molecule in the seal container with prestissimo, shortest time, vacuumize the vacuum limit that reaches the highest.
Principle of the present invention is that super critical vacuum pump utilizes the thermal transpiration characteristics of motion, and air extractor is the V-type shape of falling, and the import first half of bleeding is the A district, latter half ofly is the B district.
The A district adds refrigeration plant, and seal container adds heating combined equipment, has changed the direction of original gas thermal transpiration, makes gas molecule to the very low vacuum pump A district of temperature, promptly along vacuumizing the direction motion.The special vacuum pump impeller of bleeding produces very strong suction, while active exchange of kinetic energy in highly thin gas, need certain Driving force, both needed certain pressure difference, otherwise this motion can not be kept, so the characteristics gas molecule in B district rotation area is big, flow velocity is slower; And A district air-flow rotation area is little, and the gas molecule flow velocity can form very strong air-flow thrust soon, causes the degree of vacuum in A district very high.
Processing is provided with concave groove on the impeller of bleeding in A district and B district, the spill air vent of the Baltimore groove camera wing, in high speed rotating, can form the multi-group vacuum vesicle like this, both increase the interface of air molecule with the impeller of bleeding, many vacuum units have been produced again, such impeller deflation area and the little vacuum unit of many groups strengthen air displacement, have formed very strong Driving force, can reduce the internal friction that gas molecule produces, realize mass motion like this.
With seal container heating, and by heat radiation reduces temperature to vacuum pump, impel gas in the seal container to the vacuum pump direction, promptly along vacuumizing the direction motion, thereby improve the degree of vacuum of seal container, break through the critical vacuum limit that has the unit vacuum pump now.
Purpose of the present invention can realize like this, a kind of super critical vacuum pump, it is characterized in that vacuum pump adopts the vacuum pump of V-structure, the end of V-structure is the import of bleeding, by bleeding inlet's sidewall, vacuum pump is fixed with radiator, sidewall is twined by resistance wire and constitutes the heating tape in the middle part of the vacuum V-type, in outlet port sidewall fixed heat sink; The impeller face of vacuum pump is provided with conduit.
The ingenious gas that must utilize of the present invention is in thin motion thermal transpiration characteristic, and vacuum pump inlet is a low temperature area, and it is very strong that low temperature " black hole " is distinguished to have constituted suction like this.Vacuum pump V-type middle part is provided with heating equipment, and the outer refrigeration plant that is provided with radiator of outlet makes gas in the vacuum pump under the double action of impeller and thermal transpiration, discharges from the outlet port of vacuum pump apace, flows back to high pressure air and faces nature.
This invents ripping and can not make external atmosphere pressure interfere the A district that vacuumizes, and the common fault that has changed existing vacuum pump is with very big power, overcomes to stop the atmospheric pressure interference; The rarefied gas molecule of super critical vacuum pump can enter the B district easily, returns atmosphere again.
Offer the wing groove of picture aircraft on the impeller, improve its pressurized effect; Impeller propelled power after offering is big, add vacuum vesicle itself, overcome when impeller rotates for many years because the gravitation parallel running of the earth, can not produce duck's egg shape swirling eddy body, reach state of equilibrium, reduce the friction with wall, overcome the vibration that irregular rotation gas produced and send and breathe heavily sound.
Below in conjunction with the present invention of accompanying drawing sets forth in detail.
Fig. 1 is a structural drawing of the present invention.
Fig. 2 is a user mode schematic representation of the present invention.
Vacuum pump of the present invention adopts the vacuum pump 1 of V-structure, the end of V-structure is the import 2 of bleeding, by bleeding inlet's sidewall, vacuum pump is fixed with radiator 3, radiator can reduce the temperature of inlet, constitute heating tape 5 at vacuum V-type middle part sidewall by resistance wire 4 windings, the 6 sidewall fixed heat sink 7 in the outlet port make to form a temperature difference at the middle part of vacuum to export department, impel gas to flow to the outlet port; 8 in the impeller of vacuum pump is provided with conduit 9, and the impeller conduit forms rotation shape air-flow and impels air-flow to quicken to flow, and impeller 8 is fixed on the axle 10, and axle 10 is driven by speed change gear 12 by motor 11 and rotates.
Referring to Fig. 2, when the present invention is applied to seal container 13 vacuumized, be provided with heating equipment 14 at the seal container sidewall, under vacuum pump 1 effect, in seal container, form overcritical vacuum to impel gas to flow out fast.
In sum, the invention provides a kind of energy and produce postcritical vacuum pump, effect is obvious, and is rational in infrastructure, and the super critical vacuum pump of the present invention's design has the characteristics of not having oil and is adapted to various industries.Obviously the present invention is a kind of novelty, progress and new design with practicability.The above is this novel specific embodiment and the know-why of being used, do not departing from the equivalence change that principle of the present invention is done, when the function that it produced does not exceed spiritual that specification and accompanying drawing contain yet, all should be within the scope of the invention, explanation hereby.
Claims (2)
1, a kind of super critical vacuum pump, it is characterized in that vacuum pump adopts the vacuum pump of V-structure, the end of V-structure is the import of bleeding, by bleeding inlet's sidewall, vacuum pump is fixed with radiator, sidewall is twined by resistance wire and constitutes the heating tape in the middle part of the vacuum V-type, in outlet port sidewall fixed heat sink.
2, super critical vacuum pump according to claim 1 is characterized in that the impeller face of vacuum pump is provided with conduit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN99102800A CN1076087C (en) | 1999-03-04 | 1999-03-04 | Super critical vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN99102800A CN1076087C (en) | 1999-03-04 | 1999-03-04 | Super critical vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1266149A CN1266149A (en) | 2000-09-13 |
| CN1076087C true CN1076087C (en) | 2001-12-12 |
Family
ID=5270982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN99102800A Expired - Fee Related CN1076087C (en) | 1999-03-04 | 1999-03-04 | Super critical vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1076087C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011003509B4 (en) * | 2011-02-02 | 2021-09-23 | Ford Global Technologies, Llc | Centrifugal vacuum pump |
| CN105465004A (en) * | 2015-12-30 | 2016-04-06 | 镇江市丹徒区粮机厂有限公司 | Ultralow-temperature vacuum draught fan |
| CN112392766B (en) * | 2019-08-15 | 2023-08-18 | 广东德昌电机有限公司 | Side runner pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06307381A (en) * | 1993-04-28 | 1994-11-01 | Shimadzu Corp | Vacuum pump |
| CN2250438Y (en) * | 1996-07-17 | 1997-03-26 | 于进才 | Liquid medium full closed high vacuum degree vacuum pump |
| CN2259514Y (en) * | 1996-04-23 | 1997-08-13 | 陈时云 | Blade type vacuum pump |
-
1999
- 1999-03-04 CN CN99102800A patent/CN1076087C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06307381A (en) * | 1993-04-28 | 1994-11-01 | Shimadzu Corp | Vacuum pump |
| CN2259514Y (en) * | 1996-04-23 | 1997-08-13 | 陈时云 | Blade type vacuum pump |
| CN2250438Y (en) * | 1996-07-17 | 1997-03-26 | 于进才 | Liquid medium full closed high vacuum degree vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1266149A (en) | 2000-09-13 |
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| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |