CN107607199A - New Fourier transformation infrared spectrometer and movinglens scanning device - Google Patents

New Fourier transformation infrared spectrometer and movinglens scanning device Download PDF

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Publication number
CN107607199A
CN107607199A CN201711002135.1A CN201711002135A CN107607199A CN 107607199 A CN107607199 A CN 107607199A CN 201711002135 A CN201711002135 A CN 201711002135A CN 107607199 A CN107607199 A CN 107607199A
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wedge
position limiting
spheroid
lozenges
scanning device
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CN201711002135.1A
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CN107607199B (en
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康学亮
张白
王丽
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Shenzhen Hongyue Enterprise Management Consulting Co ltd
Tianhang Changying Jiangsu Technology Co ltd
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North Minzu University
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Abstract

The present invention relates to a kind of new Fourier transformation infrared spectrometer and movinglens scanning device, the movinglens scanning device includes magnetic devices, wedge structure, drive device, stopping means and sychronisation;The wedge structure includes the first wedge and the second wedge, and under the induction of the magnetic devices, the lozenges of the lozenges of the first wedge and the second wedge fits;The drive device is used to drive the first wedge to move along first straight line direction;The stopping means only moves for limiting first wedge along first straight line direction, and under the fitting effect of the first wedge, the second wedge of limitation is only along the movement in vertical direction in first straight line direction;The sychronisation is used to magnetic devices are synchronized with the movement with the second wedge.By novel Fourier infrared spectrograph provided by the invention and movinglens scanning device, detection error can be reduced, improve the accuracy of detection of fourier spectrometer, and it is simple in construction.

Description

New Fourier transformation infrared spectrometer and movinglens scanning device
Technical field
The present invention relates to fourier spectrometer technical field, more particularly to a kind of novel Fourier infrared spectrograph and index glass Scanning means.
Background technology
The core component of fourier spectrometer is Michelson interferometers, and the interference of light from interferometer index glass and is determined Optical path difference caused by relative motion between mirror.Index glass scanning system is an important component of spectrometer, high-precision dynamic Mirror drive system is one of core and difficult point of Fourier transform spectrometer, in motion process, to keep index glass to move even Speed, and in motion process, to rocking or having tilted strict requirements.
In the mechanical structure (i.e. the intermediate link such as electric rotating motivation+ball screw rod) of traditional movinglens scanning device, machinery Element is also easy to produce the defects of elastic deformation, friction, gap, nonlinearity erron.In order to improve this defect, scanned in some index glass In device, realize that the motion in a direction is converted to the motion of another vertical direction using wedge structure, and fill using magnetic Put to ensure the contact reliability of wedge structure.The magnetic of magnetic devices can not be too big, avoids producing magnetic interference, but wedge-shaped The movement travel of structure is larger, and as the move distance of two wedges in wedge structure is more remote, the absorption affinity of magnetic texure is got over Difference, and then cause the contact reliability of wedge structure to reduce, then cause the accuracy of detection of spectrometer to decline.
The content of the invention
It is an object of the invention to improve the above-mentioned deficiency in the presence of prior art, there is provided a kind of new fourier infrared Spectrometer and movinglens scanning device, to improve the precision of spectrometer.
In order to realize foregoing invention purpose, the embodiments of the invention provide following technical scheme:
A kind of movinglens scanning device, including magnetic devices, wedge structure, drive device, stopping means and sychronisation;Its In,
The wedge structure includes the first wedge and the second wedge, under the inducing action of the magnetic devices, the The lozenges of the lozenges of one wedge and the second wedge fits;
The drive device is used to drive the first wedge along first straight line direction uniform motion;
The stopping means only moves for limiting first wedge along first straight line direction, and in the first wedge shape Under the fitting effect of block, the second wedge of limitation is only along the movement in vertical direction in first straight line direction;
Second wedge is provided with soft magnet material layer, and the sychronisation is used to cause magnetic devices with the second wedge It is synchronized with the movement.
Above-mentioned movinglens scanning device, on the one hand, pass through the cooperation of magnetic devices, wedge structure, stopping means so that first Wedge and the second wedge can only move along a straight line along the direction of setting, and realize two vertically in a manner of wedge structure The motion in direction, it can ensure that device does not deform, and under the control of drive device, wedge structure can also realize stabilization Uniform motion, and then improve accuracy of detection;On the other hand, sychronisation is additionally arranged, magnetic devices are in the presence of sychronisation It is synchronized with the movement with the second wedge, and then ensures that the second wedge and the distance between magnetic devices are constant, then keeps magnetic Property device has good adsorption effect to the soft magnet material layer in the second wedge, that is, ensures the first wedge and the second wedge The reliability being bonded between shape block, improve the spectral resolution and accuracy of detection of movinglens scanning device.Further, since using wedge shape Structure, the motion of both direction can be realized simultaneously by drive device drive the first wedge motion so that whole index glass is swept The structure of imaging apparatus more simplifies, and meets the requirement of compact apparatus.
As a kind of embodiment, the sychronisation includes being arranged at the wedge-shaped slot of the first wedge, and wedge-shaped slot is along the The length direction of one wedge is set, and the lozenges of wedge-shaped slot is parallel to the lozenges of the first wedge, and magnetic devices are in wedge shape As the second wedge is synchronized with the movement in groove.
Further, sychronisation also includes the second position limiting structure, for limiting magnetic devices only along first straight line direction Movement in vertical direction.Pass through the restriction effect of the second position limiting structure so that the movement of magnetic devices and the second wedge are complete It is synchronous, avoid magnetic devices while have the motion in first straight line direction, ensure magnetic devices and the second wedge in vertical and water Square to distance it is all constant, further ensure the reliability being bonded between the second wedge and the first wedge.
In the scheme further optimized, movinglens scanning device also includes the first spheroid, and the first spheroid is arranged at first wedge Between the lozenges of the lozenges of shape block and the second wedge, under the inducing action of the magnetic devices, the first wedge The lozenges of lozenges and the second wedge is fitted by the first spheroid.
The first spheroid is provided between the lozenges of the lozenges of first wedge and the second wedge, realizes that sphere connects Touch, based on the limitation of currently manufactured technique, the smoothness of spheroid sphere is far above the smoothness of block structure plane, therefore passes through The setting of first spheroid can further ensure that the first wedge and the direction of motion of the second wedge do not convert, can also Reduce the frictional force between the first wedge and the second wedge so that both relative motions are smoother, and then improve spectrum The spectral resolution and accuracy of detection of instrument.
In the scheme further optimized, the first spheroid is arranged at the lozenges of second wedge, or, the first ball Body is arranged at the lozenges of the second wedge.By way of the first spheroid is fixed, the first spheroid can be made more stable, ensured Sphere-contact is more reliable between first wedge and the second wedge.
In the scheme further optimized, the contact surface of the stopping means and the first wedge is sphere, and/or, limit The contact surface of position device and the second wedge is sphere.Stopping means is also with the contact surface of the first wedge and the second wedge Sphere so that the smoothness of stopping means and the first wedge and the contact surface of the second wedge is higher, further improves light The accuracy of detection of spectrometer.
Further, stopping means includes the first position limiting structure and the second spheroid, and the second spheroid is arranged at the first spacing knot On structure, stopping means passes through the second spheroid and the first wedge and the second wedge sphere-contact.Can be directly by position limiting structure Contact surface be arranged to sphere, but may so be not easy to process, can be with by way of spheroid is set on position limiting structure Reduce difficulty of processing.
Further, two sides of the first wedge along its length are respectively arranged with a spacing supplementary structure, Length of the spacing supplementary structure along the first wedge is set;First position limiting structure and the second spheroid are 14, second ball Body is arranged on first position limiting structure, wherein 8 the first position limiting structures are connect by the second spheroid and the first wedge sphere Touch, the upper and lower ends of each spacing supplementary structure set two the first position limiting structures respectively;Other 6 the first position limiting structures pass through Second spheroid and the second wedge sphere-contact, the opposed both sides of the second wedge are respectively arranged with 3 the first position limiting structures, and 3 the first position limiting structures are not point-blank.
In a further embodiment, two sides of first wedge along its length are inclined-plane, and first is spacing Structure and the second spheroid are 16, and second spheroid is arranged on first position limiting structure, wherein 4 the first spacing knots Structure passes through the second spheroid and the top surface sphere-contact of the first wedge;Wherein 6 the first position limiting structures pass through the second spheroid respectively With the inclined-plane sphere-contact of the first wedge, an inclined-plane sets 3 the first position limiting structures, and 3 position limiting structures do not exist On straight line;Other 6 the first position limiting structures are relative by the second spheroid and the second wedge sphere-contact, the second wedge Vertical both sides set 3 the first position limiting structures respectively, and 3 position limiting structures are not point-blank.
In the embodiment further optimized, the drive device is motor.Motor can ensure stabilization Running speed, and running speed can facilitate regulation as needed, and volume minimizes.
Movinglens scanning device in any of the above-described embodiment can be applied in Fourier transformation infrared spectrometer, structure Into a kind of new Fourier transformation infrared spectrometer, the accuracy of detection of spectrometer is improved, simplifies the structure of spectrometer.
Compared with prior art, using the new FFIR of movinglens scanning device of the present invention Instrument, have the advantages that:
(1) sychronisation is additionally arranged, magnetic devices are synchronized with the movement with the second wedge in the presence of sychronisation, entered And ensure that the second wedge and the distance between magnetic devices are constant, magnetic devices are then kept to the soft magnetism in the second wedge The iron material bed of material has good adsorption effect, that is, ensures the reliability being bonded between the first wedge and the second wedge, improves The spectral resolution and accuracy of detection of movinglens scanning device.
(2) wedge structure is used, movinglens scanning device is not likely to produce position deviation, can also travel at the uniform speed, therefore can be with Interference effect and the general quality of light are improved, improves accuracy of detection.
The first spheroid is provided between the lozenges of (3) first wedges and the lozenges of the second wedge, realizes sphere Contact, the flatness of the ratio of precision block structure plane of spheroid sphere is easier to process and ensured, therefore passes through the first spheroid Setting can further ensure that the first wedge and the direction of motion of the second wedge do not convert, and can also reduce first wedge Frictional force between shape block and the second wedge so that both relative motions are smoother, and then improve the spectrum point of spectrometer Resolution and accuracy of detection.
(4) whole movinglens scanning device is simple in construction, miniaturization, detachableization, is easy to assemble, meets that device miniaturization becomes The development of gesture.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below by embodiment it is required use it is attached Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore be not construed as pair The limitation of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 is a kind of structural representation of the movinglens scanning device provided in the embodiment of the present invention 1.
Fig. 2 is the structural representation of the first wedge described in embodiment 1.
Fig. 3 is schematic diagram of the magnetic devices in wedge-shaped slot.
Fig. 4 is the structural representation of another movinglens scanning device provided in the embodiment of the present invention 2.
Fig. 5 is the structural representation of the wedge of another kind first provided in the embodiment of the present invention 3.
Description of symbols in figure
Magnetic devices 10;Wedge structure 20;Drive device 30;First position limiting structure 40;Reflecting optics 50;Second spacing knot Structure 60;First wedge 201;Second wedge 202;Steel ball 203;Spacing supplementary structure 204;Wedge-shaped slot 2011.
Embodiment
Below in conjunction with accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Ground describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Generally exist The component of the embodiment of the present invention described and illustrated in accompanying drawing can be configured to arrange and design with a variety of herein.Cause This, the detailed description of the embodiments of the invention to providing in the accompanying drawings is not intended to limit claimed invention below Scope, but it is merely representative of the selected embodiment of the present invention.Based on embodiments of the invention, those skilled in the art are not doing The every other embodiment obtained on the premise of going out creative work, belongs to the scope of protection of the invention.
It should be noted that in the description of the invention, term " first ", " second " etc. are only used for distinguishing description, without It is understood that to indicate or implying relative importance.
Referring to Fig. 1, a kind of movinglens scanning device provided in the embodiment of the present invention 1, including magnetic devices 10, wedge shape knot Structure, drive device 30, stopping means, reflecting optics 50 and sychronisation;Wherein,
Wedge structure 20 includes the first wedge 201 and the second wedge, the lozenges and the second wedge of the first wedge 201 The lozenges of shape block 202 fits;
Magnetic devices 10 are used to produce magnetic field, adsorb the soft magnet material layer set in the second wedge so that first wedge The lozenges of the lozenges of shape block 201 and the second wedge 202, which can be stablized, keeps fit-state;
Drive device 30 is used to drive the first wedge 201 along first straight line direction uniform motion;
Stopping means only moves for limiting the first wedge 202 along first straight line direction, and in the first wedge 201 Under fitting effect, the second wedge 202 is only along the movement in vertical direction in first straight line direction;
Reflecting optics 50, one end of the second wedge is arranged at, for realizing optical interferometry.
In structure shown in Fig. 1, two sides of the first wedge 201 along its length are respectively arranged with a spacing auxiliary Structure 204, spacing supplementary structure 204 can be cuboid, and length of the spacing supplementary structure 204 along the first wedge 201 is set, The length of spacing supplementary structure 204 can with the equal length of the first wedge 201, it is or slightly short or slightly longer,;Spacing dress Put including 14 position limiting structures 40, wherein 8 position limiting structures 40 contact with the first wedge 201, each spacing supplementary structure 204 Upper and lower ends (only using the orientation of structure shown in scheming as reference), two position limiting structures 40 are set respectively;Other 6 spacing knots Structure 40 contacts with the second wedge 202, and the left and right sides of the second wedge 202 is respectively arranged with 3 position limiting structures 40, and 3 limits Bit architecture 40 point-blank, does not realize three-point fix, strengthens limit effect.The spacing wedge of supplementary structure 204 and first 201 fixed settings, spacing supplementary structure 204 can follow the first wedge 201 to move together, in motion process, spacing auxiliary Structure 204 by be disposed thereon 8 position limiting structures 40 at lower both ends carry out it is spacing, can only be along horizontal motion, then So that the first wedge 201 can only also move in the horizontal direction, realize indirectly to the spacing of the first wedge 201.The present embodiment In be spacing supplementary structure 204 side carried out by two position limiting structures it is spacing, it is equally possible that by straight not at one 3 position limiting structures on line carry out spacing, enhancing position-limiting action.Of course, there can also be other for the number of position limiting structure Selection, as long as the direction of motion of the first wedge of limitation and the second wedge can be realized.
Drive device 30 uses motor in the present embodiment, and motor can provide stable power to drive first Wedge 201 is along first straight line direction uniform motion.Of course, drive device 30 can also use other equipment, such as hydraulic pressure Driving equipment.
As Figure 2-3, sychronisation includes the second position limiting structure 60 and is arranged at the wedge-shaped slot of the first wedge 201 2011, length direction of the wedge-shaped slot 2011 along the first wedge 201 is set, and the lozenges of wedge-shaped slot 2011 is parallel to the first wedge shape The lozenges of block 201.In motion process, the first wedge is under the driving of drive device along first straight line direction (institute in figure It is shown as level to the right) to move, the motion of the first wedge causes vertical direction of second wedge along first straight line direction (in figure It show straight down) motion, under the interaction of magnetic adsorptive power, magnetic devices 10 are in wedge-shaped slot 2011 with second Wedge 202 is synchronized with the movement and (moved straight down), then keeps the wedge 202 of magnetic devices 10 and second in vertical direction Stability.Second position limiting structure 60 limitation magnetic devices are realized and the second wedge only along the movement in vertical direction in first straight line direction Complete Synchronization of the shape block between direction and distance.The setting of second position limiting structure 60 can cause the wedge of magnetic devices 10 and second The wedge of magnetic devices 10 and second is further enhanced between shape block 202 in stable distance vertically and horizontally simultaneously The reliability that shape block 202 is synchronized with the movement, but be not the necessary portion that the wedge 202 of magnetic devices 10 and second made is synchronized with the movement Part.
Index glass scanning system is an important component of spectrometer, and the scanning distance of index glass determines the maximum of spectrum Resolution ratio, the site error and scanning at the uniform velocity property of index glass determine interference effect and spectral quality, above-mentioned movinglens scanning device, led to Cross the cooperation of magnetic devices, wedge structure, stopping means, sychronisation so that the first wedge and the second wedge can only edges The direction for setting is moved along a straight line, and the motion of two vertical direction is realized in a manner of wedge structure, can ensure device Do not deform, and under the control of drive device, wedge structure can also realize stable uniform motion;Magnetic devices are in synchronization It is synchronized with the movement in the presence of device with the second wedge, and then ensures the distance between the second wedge and magnetic devices perseverance It is fixed, then keep magnetic devices that there is good adsorption effect to the soft magnet material layer in the second wedge, that is, ensure first The reliability being bonded between wedge and the second wedge, improve the spectral resolution and accuracy of detection of movinglens scanning device.Separately Outside, due to using wedge structure, the motion of the first wedge is driven to realize the motion of both direction simultaneously by drive device, So that the structure of whole movinglens scanning device more simplifies, meet the requirement of compact apparatus.
In order to further improve the spectral resolution of spectrometer and accuracy of detection, in the embodiment of the present invention 2, such as Fig. 4 institutes Show, first spheroid can be set between the lozenges of the first wedge 201 and the lozenges of the second wedge 202, described Under the suction-operated of magnetic devices, the lozenges of the lozenges of the first wedge 201 and the second wedge 202 passes through the first spheroid Fit.The smoothness of spheroid sphere is far above the smoothness of block structure plane, therefore can be with by the setting of the first spheroid Further ensure that the direction of motion of the first wedge 201 and the second wedge 202 does not convert, the first wedge shape can also be reduced Frictional force between the wedge 202 of block 201 and second so that both relative motions are smoother, and then improve the light of spectrometer Spectral resolution and accuracy of detection.
First spheroid can be directly movably set between the first wedge 201 and the second wedge 202, but in order to protect Hinder the stability of sphere-contact, be preferably arranged at the first spheroid on the lozenges of the second wedge 202, as shown in Fig. 2 or First spheroid can be arranged on the lozenges of the first wedge 201.First spheroid can be realized using steel ball 203, intensity Greatly, smoothness is high.Two steel balls 203 are provided with Fig. 4 on the lozenges of the second wedge 202, it is readily understood that ground, steel The number of pearl 203 may not be two, can less or more, such as three steel balls 203 and not point-blank, but excellent Elect two and the above as and be uniformly arranged, to cause first wedge shape block 201 to provide the power of balance, auxiliary stopper device causes the Two wedges 202 are only along the movement in vertical direction in first straight line direction without producing skew.The mode for providing spheroid realizes contact Fitting, can reduce the frictional force between the first wedge 201 and the second wedge 202, be more beneficial for the first wedge 201 with Relative motion between second wedge 202.
As shown in figure 4, in the embodiment further optimized, the stopping means and the first wedge 201 and The contact surface of two wedges 202 is sphere, for example, setting second spheroid, (the second ball in each first position limiting structure 40 Body is also realized using steel ball 203), the first position limiting structure 40 passes through the wedge 21 of steel ball 203 and first and the ball of the second wedge 202 Face contacts.Same principle, the flatness of the plane of the remote height block structure of Global planarity of spherical structure, stopping means are adopted With the second spheroid and the first wedge 201 and the sphere-contact of the second wedge 202, the flatness of contact surface can be strengthened, strengthened Limit effect.
In structure shown in Fig. 2, the end surface shape of the first wedge 201 is rectangle, in the embodiment of the present invention 3, such as Fig. 5 Shown, the end surface shape of the first wedge 201 is isosceles trapezoid, i.e. the side of the first wedge 201 along its length is inclined-plane, Under such a structure, the first position limiting structure and the second spheroid are 12, and second spheroid is arranged at first position limiting structure On, wherein 4 the first position limiting structures pass through the second spheroid and the top surface sphere-contact of the first wedge;Wherein 2 first spacing Structure passes through the second spheroid and the inclined-plane sphere-contact of the first wedge respectively;Other 6 the first position limiting structures pass through Two spheroids and the second wedge sphere-contact, the opposed both sides of the second wedge set 3 the first position limiting structures, and 3 respectively Position limiting structure is not point-blank.By such structure setting, the position limiting structure on the first wedge inclined-plane is arranged at setting It is placed in the position limiting structure mating reaction of the first wedge top surface so that the first wedge 201 can not move straight down, be arranged at The position limiting structure of the opposed both sides of second wedge prevents the second wedge 202 from producing the motion of horizontal direction.Of course, Under such a structure, there can also be other selections for the number of position limiting structure, such as be arranged at the number of the position limiting structure on inclined-plane Can also be more, to provide bigger component straight up, as long as the first wedge of limitation and the second wedge can be realized The direction of motion.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained Cover within protection scope of the present invention.

Claims (10)

1. a kind of movinglens scanning device, it is characterised in that including magnetic devices, wedge structure, drive device, stopping means and same Walk device;Wherein,
The wedge structure includes the first wedge and the second wedge, under the inducing action of the magnetic devices, first wedge The lozenges of the lozenges of shape block and the second wedge fits;
The drive device is used to drive the first wedge along first straight line direction uniform motion;
The stopping means only moves for limiting first wedge along first straight line direction, and in the first wedge Under fitting effect, the second wedge of limitation is only along the movement in vertical direction in first straight line direction;
Second wedge is provided with soft magnet material layer, and the sychronisation is used to magnetic devices are done together with the second wedge Step motion.
2. movinglens scanning device according to claim 1, it is characterised in that the sychronisation includes being arranged at first wedge The wedge-shaped slot of shape block, length direction of the wedge-shaped slot along the first wedge are set, and the lozenges of wedge-shaped slot is parallel to the first wedge Lozenges, magnetic devices are in wedge-shaped slot as the second wedge is synchronized with the movement.
3. movinglens scanning device according to claim 2, it is characterised in that sychronisation also includes the second position limiting structure, For limiting magnetic devices only along the movement in vertical direction in first straight line direction.
4. according to any described movinglens scanning devices of claim 1-3, it is characterised in that also including the first spheroid, the first ball Body is arranged between the lozenges of the first wedge and the lozenges of the second wedge, in the inducing action of the magnetic devices Under, the lozenges of the lozenges of the first wedge and the second wedge is fitted by the first spheroid.
5. movinglens scanning device according to claim 4, it is characterised in that the stopping means connects with the first wedge Contacting surface is sphere, and/or, the contact surface of stopping means and the second wedge is sphere.
6. movinglens scanning device according to claim 5, it is characterised in that stopping means includes the first position limiting structure and the Two spheroids, the second spheroid are arranged on the first position limiting structure, and stopping means passes through the second spheroid and the first wedge and the second wedge Shape block sphere-contact.
7. movinglens scanning device according to claim 6, it is characterised in that two sides of the first wedge along its length Face is respectively arranged with a spacing supplementary structure, and length of the spacing supplementary structure along the first wedge is set;First position limiting structure It it is 14 with the second spheroid, second spheroid is arranged on first position limiting structure, wherein 8 the first position limiting structures lead to Cross the second spheroid and the first wedge sphere-contact, the upper and lower ends of each spacing supplementary structure set respectively two it is first spacing Structure;Other 6 the first position limiting structures pass through the second spheroid and the second wedge sphere-contact, the opposed both sides of the second wedge It is respectively arranged with 3 the first position limiting structures, and 3 the first position limiting structures are not point-blank.
8. movinglens scanning device according to claim 6, it is characterised in that first wedge along its length two Individual side is inclined-plane, and the first position limiting structure and the second spheroid are 16, and second spheroid is arranged at a first spacing knot On structure, wherein 4 the first position limiting structures pass through the second spheroid and the top surface sphere-contact of the first wedge;Wherein 6 first limits Bit architecture respectively by the second spheroid and the inclined-plane sphere-contact of the first wedge, an inclined-plane set 3 it is first spacing Structure, and 3 position limiting structures are not point-blank;Other 6 the first position limiting structures pass through the second spheroid and the second wedge Sphere-contact, the opposed both sides of the second wedge set 3 the first position limiting structures respectively, and 3 position limiting structures are not straight at one On line.
9. movinglens scanning device according to claim 1, it is characterised in that also including reflecting optics, for realizing optics Interferometry.
10. a kind of novel Fourier infrared spectrograph, it is characterised in that including any described index glass scannings of claim 1-9 Device.
CN201711002135.1A 2017-10-24 2017-10-24 Novel Fourier transform infrared spectrometer and moving mirror scanning device Active CN107607199B (en)

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JP2002296006A (en) * 2001-03-30 2002-10-09 Japan Science & Technology Corp Length measuring method by laser beam propagating through solid, and method of exposure and patterning by using the same laser beam
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TWM249380U (en) * 2003-12-19 2004-11-01 Hon Hai Prec Ind Co Ltd A lens module
US20040234361A1 (en) * 2003-04-14 2004-11-25 Nsk Ltd. Positioning device
KR20050009682A (en) * 2003-07-18 2005-01-25 스미도모쥬기가이고교 가부시키가이샤 Stage apparatus for table coater
CN101968442A (en) * 2010-09-19 2011-02-09 西安交通大学 Crank block movable mirror scanning system for Fourier transform spectrometer
CN207407998U (en) * 2017-10-24 2018-05-25 北方民族大学 A kind of new Fourier transformation infrared spectrometer and movinglens scanning device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999025634A1 (en) * 1997-11-17 1999-05-27 Shapovalov Vladimir Vladimirov Wedge-shaped converter of force
JP2002296006A (en) * 2001-03-30 2002-10-09 Japan Science & Technology Corp Length measuring method by laser beam propagating through solid, and method of exposure and patterning by using the same laser beam
CN2479528Y (en) * 2001-06-08 2002-02-27 王兴华 Focusing device of scanning apparatus for medical infrared thermal imaging dianostic system
CN2552025Y (en) * 2002-04-03 2003-05-21 力捷电脑(中国)有限公司 Scanner lens focusing tool
US20040234361A1 (en) * 2003-04-14 2004-11-25 Nsk Ltd. Positioning device
KR20050009682A (en) * 2003-07-18 2005-01-25 스미도모쥬기가이고교 가부시키가이샤 Stage apparatus for table coater
TWM249380U (en) * 2003-12-19 2004-11-01 Hon Hai Prec Ind Co Ltd A lens module
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CN207407998U (en) * 2017-10-24 2018-05-25 北方民族大学 A kind of new Fourier transformation infrared spectrometer and movinglens scanning device

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