CN107597474A - A kind of boron diffusion device - Google Patents
A kind of boron diffusion device Download PDFInfo
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- CN107597474A CN107597474A CN201710722211.XA CN201710722211A CN107597474A CN 107597474 A CN107597474 A CN 107597474A CN 201710722211 A CN201710722211 A CN 201710722211A CN 107597474 A CN107597474 A CN 107597474A
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- boron
- glass tube
- spray
- component
- diffusion device
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Abstract
The invention discloses a kind of boron diffusion device, including shell, include upper chamber and lower chambers in the shell, operating platform is provided between upper chamber and lower chambers；The upper chamber is provided with spray boron component and the height for adjusting spray boron component upper-lower height adjusts component, the height adjustment component and spray boron component are fixedly connected by crossbeam, the spray boron component includes the first glass tube, the second glass tube and contains boron container, first glass tube is fixedly connected with crossbeam, one end of first glass tube is air inlet, and the other end is gas outlet；One end of second glass tube, which is stretched into, contains in boron container, and the other end is provided with spray boron mouth；The spray boron mouth of second glass tube is arranged at below the first glass tube puff prot.Using the present invention, the uniformity that boron spreads is improved.
Description
Technical field
The present invention relates to IGCT technical field, more particularly to a kind of boron diffusion device.
Background technology
At present, the boron diffusion device of thyristor chip, B solution is dropped in the chip of IGCT using manual dropper
Heart position, then by chip tell the B solution that rotation makes center the coating surface of chip spread apart come.Therefore often
Occur and coat uneven situation, have impact on the product quality of chip, finally have impact on the properties of product of IGCT.
The content of the invention
It is an object of the invention to provide a kind of boron diffusion device, improves the uniformity of boron diffusion, improves thyristor chip
Product quality.
To solve the problems, such as that prior art is present, the present invention provides a kind of boron diffusion device, and the device includes：Shell, institute
Stating in shell includes upper chamber and lower chambers, and operating platform is provided between upper chamber and lower chambers；The upper chamber is provided with
Spray boron component and adjust component for adjusting the height of spray boron component upper-lower height, the height adjustment component and spray boron component lead to
Cross crossbeam to be fixedly connected, the spray boron component includes the first glass tube, the second glass tube and contains boron container, first glass
Glass pipe is fixedly connected with crossbeam, and one end of first glass tube is air inlet, and the other end is gas outlet；Second glass tube
One end stretch into contain boron container in, the other end be provided with spray boron mouth；The spray boron mouth of second glass tube is arranged at the first glass
Below pipe puff prot.
The technical program is provided with spray boron component, wherein spraying high pressure nitrogen by the first glass tube, high pressure nitrogen is going out
The negative pressure of sector is formed at gas port, being arranged on Supreme Being from the second glass tube ejiction opening anticipates the lower section of glass tube ejiction opening, therefore from the
The diboron trioxide solution that two glass tubes spray is atomized in sector region, is then sprayed on the chip surface of rotation at a high speed, is improved
The uniformity of boron is applied, improves product quality.In addition, being additionally provided with height adjustment component, boron component can be sprayed by adjusting
Height adjustment spray boron area, meet the requirement of various sizes of chip, improve the versatility of equipment.
Preferably, the second glass tube spray boron mouth is in dropper shape, and the second glass tube sprays the body and level of the dropper shape of boron mouth
The angle of body is obtuse angle.So as to be that spray boron mouth is bent downwardly, be advantageous to spray the progress of boron.
Preferably, in addition to the 3rd glass column, the 3rd glass column be connected to the first glass tube and the second glass tube it
Between, one end of the 3rd glass column is fixedly connected with the first glass tube, and the other end is fixedly connected with the second glass tube.Improve
Spray the solidness of boron component.
Preferably, the height adjustment component includes the guide rail being fixed on shell, the sliding block slided up and down along guide rail, institute
Sliding block is stated to be fixedly connected with the crossbeam.It is achieved thereby that the adjustment to spraying boron component height, improves the flexible of spray boron component
Property.
Preferably, the Sheng boron container is fixed on container bottom including one end, and the other end is the connecting tube of free end, described
Connecting tube is fixedly connected with the crossbeam.Allow the priming synchronous with the first glass tube under the drive of crossbeam of Sheng boron container, it is real
The overall height adjustment of spray boron component is showed.
Preferably, the lower chambers include turntable, and the turntable includes pallet, pallet connecting shaft and buncher,
The buncher is connected with pallet connecting shaft, and the pallet connecting shaft is connected with pallet.It is achieved thereby that place on a spinstand
The high speed rotation of chip.
Preferably, the operating platform is provided with cover plate and the stud with cover plate rotation connection, and the cover plate is arranged on institute
The top of pallet is stated, the area of the cover plate is more than the area for the chip being placed on pallet.Midway is avoided to stop by cover plate
When spraying boron, dust and other impurities drop onto chip surface and influence the product quality of chip.
Preferably, the dust cover sliding door that the upper chamber is additionally provided with dust cover and is connected with dust cover.So as to drop
Low dust enters the probability of device interior, improves the cleanliness factor of device interior.
Preferably, in addition to electric control cabinet, the electric control cabinet are provided with relay, timer and electric machine speed regulation
Device.Realize the control to the injecting time of B solution, and the control to turntable rotating speed.
The present invention is provided with spray boron component, wherein spraying high pressure nitrogen by the first glass tube, high pressure nitrogen is in gas outlet
Place forms fan-shaped negative pressure, and being arranged on Supreme Being from the second glass tube ejiction opening anticipates the lower section of glass tube ejiction opening, therefore from the second glass
The diboron trioxide solution that glass pipe sprays is atomized in sector region, is then sprayed on the chip surface of rotation at a high speed, is improved painting
The uniformity of boron, improves product quality.In addition, being additionally provided with height adjustment component, the height of boron component can be sprayed by adjusting
The area of degree adjustment spray boron, meets the requirement of various sizes of chip, improves the versatility of equipment.
Brief description of the drawings
Fig. 1-2 is a kind of a kind of schematic diagram for the implementation for spraying boron device of the present invention；
Fig. 3 is a kind of a kind of schematic diagram of the embodiment for the spray boron component for spraying boron device of the present invention.
In figure：Shell 1, upper chamber 100, lower chambers 200, operating platform 300, height adjust component 10, and guide rail 11 is sliding
Block 12, crossbeam 13；Boron component 20 is sprayed, the first glass tube 21, the second glass tube 22, the 3rd glass column 23, contains boron container 24, connection
Pipe 25；Turntable 30, pallet 31, pallet shaft coupling 32, buncher 33；Cover plate 41, stud 42, dust cover 43, dust cover push-and-pull
Door 44；Electric control cabinet 50, relay 51, timer 52, machine governor 53, speed setter 54, indicator lamp 55, startup is pressed
Button 56, power button 57, stop button 58.
Embodiment
Fig. 1 is a kind of a kind of schematic diagram for the embodiment for spraying boron device of the present invention, and the device includes:Shell 1, in housing 1
It is divided into upper chamber and lower chambers, operating platform 300 is provided between the upper chamber 100 and lower chambers 200.Wherein upper chamber is set
There are spray boron component 20 and the height for adjusting the upper-lower height of spray boron component 20 to adjust component 10, lower chambers are provided with chip placement
Turntable 30.Boron is ejected on the chip placed on a spinstand by the spray boron component 20 in upper chamber, it is achieved thereby that brilliant
The spraying of boron in the process of brake tube.Chip it is of different sizes, it is desirable to the area for spraying boron component spray boron also can be different, therefore can
To be adjusted by height adjustment component to the height for spraying boron component, so as to have adjusted the projected area of boron.
Highly adjust component 10, including the guide rail 11 being fixed on shell, the sliding block 12 being slidably connected with guide rail 11, with cunning
The crossbeam 13 that block is fixedly connected.
Spray boron component 20, including the first glass tube 21, the second glass tube 22, the 3rd glass column 23 and Sheng boron container 24.The
For one glass tube 21 in being vertically arranged, its one end is air inlet, and the other end is the gas outlet in dropper shape.Second glass tube 22 is in L
Shape, its one end, which stretches into, contains inside boron container 24, and the other end is the liquid outlet in dropper shape.
The liquid outlet of first glass tube 21 and the second glass tube 22 are relative, and the liquid outlet of the second glass tube 22 is located at the first glass
On the extended line of the gas outlet center line of glass pipe 21, the diboron trioxide so come out from the liquid outlet of the second glass tube 22 is completely in the
In the range of the fan-shaped gases at high pressure that the high pressure nitrogen that one glass tube gas outlet sprays is formed, it ensure that in the presence of high pressure N2 gas
Whole atomizations of diboron trioxide, so that diboron trioxide is uniformly sprayed onto on chip, improve the uniformity of Peng's diffusion.
Further shown by experiment for conventional thyristor chip, the liquid outlet elongated central line of the second glass tube 22
Angle with the first glass tube gas outlet center extended line can be 40 degree, and the second glass tube liquid outlet is in the first glass tube nitrogen
5 millimeters of places below inflatable mouth, so as to be further ensured that after the B solution energy of the first glass tube liquid outlet out in the effect of nitrogen
Lower atomization completely, makes boron source solution be uniformly adhered to the surface of rotary chip.
The 3rd glass column 23 is connected between first glass tube 21 and the second glass tube 22.3rd glass column is L-shaped, one
End is fixedly connected with the first glass tube 21, and the other end is fixedly connected with the second glass tube 23, so as to play the first glass of fixed support
The effect of glass pipe and the second glass tube.
Contain to be provided with boron container 24 and be fixedly connected with pipe 25, one end of connecting tube 25 connects with containing the bottom of boron container and fixing
Connect, the other end is fixedly connected with crossbeam 13.
First glass tube 21 and connecting tube 25 are fixedly connected with crossbeam 13 respectively.Therefore when sliding block 12 connects along guide rail 11
When, the crossbeam 13 being fixedly connected with guide rail drives the first glass tube 21 and contains boron container 24 and synchronously moves up and down, and is adjusted so as to play
The effect of whole spray boron area.Spray boron area can be thus adjusted according to the size of chip.
Turntable 30, including chip tray 31, chip tray shaft coupling 32 and buncher 33.Wherein buncher and core
Tablet tray connecting shaft is connected, and chip tray shaft coupling is connected with chip tray.When buncher switches on power, connected by chip tray
Axle driving chip pallet is rotated, so as to reach the purpose that boron is uniformly ejected into chip surface.
Operating platform 300, corresponding to spray boron component shower nozzle（First glass tube gas outlet and the second glass tube liquid outlet phase
Corresponding position）Cover plate 41 and stud 42 are provided with, cover plate 41 is rotatablely connected with stud 42, and the area of cover plate can cover in down
The area of face boron chip to be painted.Therefore during boron is sprayed, if necessary to pause spray boron, then can be covered with cover plate,
Prevent debris from falling into chip surface, influence the quality of product, improve the performance of product.
In addition, the dust cover sliding door 44 that upper chamber 200 is additionally provided with dust cover 43 and is connected with dust cover, so as to subtract
Lack the pollution of dust, improve the quality of product.
In addition, being additionally provided with electric control cabinet 50, the electric control cabinet is provided with the time relay 51, timer 52, electricity
Machine speed regulator 53, speed setter 54, indicator lamp 55 and shift knob, the shift knob include start button 56, electronic pressed
Button 57 and stop button 58.The rotating speed of buncher is wherein set by speed setter 54, spray boron is set by timer 52
The working time of device.
When carrying out spray boron, the N2 gas of certain pressure enters the first glass tube, and is sprayed from the gas outlet of the first glass tube,
Form the negative pressure space of fan-shaped（As shown in Figure 3）, the liquid outlet of the second glass tube is everywhere in this negative pressure space.With the second glass
The diboron trioxide solution contained in boron container that glass pipe is connected, in the presence of negative pressure, flowed out from the liquid outlet of the second glass tube,
It is atomized after entering the negative pressure space of N2 formation.Chip rotates at a high speed in the presence of motor.The diboron trioxide of atomization
Uniformly spray the chip surface in high speed rotation.
Described above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (9)
1. a kind of boron diffusion device, including shell（1）, it is characterised in that the shell（1）It is interior including upper chamber（100）With under
Chamber（200）, upper chamber（100）And lower chambers（200）Between be provided with operating platform（300）；The upper chamber（100）Set
There is spray boron component（20）Component is adjusted with the height for adjusting spray boron component upper-lower height（10）, the height adjustment component
（10）With spray boron component（20）Pass through crossbeam（13）It is fixedly connected, the spray boron component（20）Including the first glass tube
（21）, the second glass tube（22）With Sheng boron container（23）, first glass tube（21）With crossbeam（13）It is fixedly connected, described
One glass tube（21）One end be air inlet, the other end is gas outlet；Second glass tube（22）One end stretch into contain boron hold
Device（23）Interior, the other end is provided with spray boron mouth；Second glass tube（22）Spray boron mouth be arranged at the first glass tube（21）Spray
Below gas port.
2. boron diffusion device according to claim 1, it is characterised in that the second glass tube（22）It is in dropper shape to spray boron mouth,
Second glass tube（22）The body of dropper shape and the angle of horizontal for spraying boron mouth are obtuse angle.
3. boron diffusion device according to claim 1, it is characterised in that also including the 3rd glass column（23）, the described 3rd
Glass column（23）It is connected to the first glass tube（21）With the second glass tube（22）Between, the 3rd glass column（23）One end with
First glass tube（21）It is fixedly connected, the other end and the second glass tube（22）It is fixedly connected.
4. boron diffusion device according to claim 1, it is characterised in that the height adjusts component（10）Including being fixed on
Guide rail on shell（11）, the sliding block that slides up and down along guide rail（12）, the sliding block and the crossbeam（13）It is fixedly connected.
5. boron diffusion device according to claim 1, it is characterised in that the Sheng boron container（24）It is fixed on including one end
Container bottom, the other end are the connecting tube of free end（25）, the connecting tube（25）With the crossbeam（13）It is fixedly connected.
6. boron diffusion device according to claim 1, it is characterised in that the lower chambers（200）Including turntable（30）,
The turntable（30）Including pallet（31）, pallet connecting shaft（32）And buncher（33）, the buncher（33）With support
Disk connecting shaft（32）Connection, the pallet connecting shaft（32）With pallet（31）Connection.
7. boron diffusion device according to claim 6, it is characterised in that the operating platform（300）It is provided with cover plate
（41）With the stud being rotatablely connected with cover plate（42）, the cover plate（41）It is arranged on the pallet（31）Top, the cover plate
（41）Area be more than be placed on pallet（31）On chip area.
8. boron diffusion device according to claim 1, it is characterised in that the upper chamber（100）It is additionally provided with dust cover
（43）And the dust cover sliding door being connected with dust cover（44）.
9. boron diffusion device according to claim 1, it is characterised in that also including electric control cabinet（50）, the electrical equipment
Switch board is provided with relay（51）, timer（52）And machine governor（53）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710722211.XA CN107597474A (en) | 2017-08-22 | 2017-08-22 | A kind of boron diffusion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710722211.XA CN107597474A (en) | 2017-08-22 | 2017-08-22 | A kind of boron diffusion device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107597474A true CN107597474A (en) | 2018-01-19 |
Family
ID=61065310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710722211.XA Pending CN107597474A (en) | 2017-08-22 | 2017-08-22 | A kind of boron diffusion device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107597474A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070110904A1 (en) * | 2005-11-17 | 2007-05-17 | Pai-Hua Chen | Method for producing luminous ceramic article |
| CN103606523A (en) * | 2013-11-06 | 2014-02-26 | 蚌埠天宇机械工具有限公司 | GPP diode chip production process |
| WO2015180079A1 (en) * | 2014-05-28 | 2015-12-03 | 王长津 | Micropore atomization sheet and micropore atomization apparatus |
| CN205043644U (en) * | 2015-09-30 | 2016-02-24 | 润奥电子(扬州)制造有限公司 | Spout boron source support |
| CN205950512U (en) * | 2016-08-31 | 2017-02-15 | 江苏天淮钢管有限公司 | Hollow billet blows bracket that borax was used |
-
2017
- 2017-08-22 CN CN201710722211.XA patent/CN107597474A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070110904A1 (en) * | 2005-11-17 | 2007-05-17 | Pai-Hua Chen | Method for producing luminous ceramic article |
| CN103606523A (en) * | 2013-11-06 | 2014-02-26 | 蚌埠天宇机械工具有限公司 | GPP diode chip production process |
| WO2015180079A1 (en) * | 2014-05-28 | 2015-12-03 | 王长津 | Micropore atomization sheet and micropore atomization apparatus |
| CN205043644U (en) * | 2015-09-30 | 2016-02-24 | 润奥电子(扬州)制造有限公司 | Spout boron source support |
| CN205950512U (en) * | 2016-08-31 | 2017-02-15 | 江苏天淮钢管有限公司 | Hollow billet blows bracket that borax was used |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20180119 |