CN107561871A - Proximity printing and light orientation integrated device, light alignment method and exposure method - Google Patents
Proximity printing and light orientation integrated device, light alignment method and exposure method Download PDFInfo
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- CN107561871A CN107561871A CN201610512887.1A CN201610512887A CN107561871A CN 107561871 A CN107561871 A CN 107561871A CN 201610512887 A CN201610512887 A CN 201610512887A CN 107561871 A CN107561871 A CN 107561871A
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Abstract
The present invention relates to a kind of proximity printing and light orientation integrated device, light alignment method and exposure method.A kind of proximity printing and light orientation integrated device, including light source, it is sequentially placed into light source optical path direction：Light reflection filtering mechanism, fly lens group, spherical reflector, speculum, mask platform and the work stage with energy sensor；It is additionally provided between fly lens group and mask stage and is polarized module, being polarized module includes loophole station, is equipped with being polarized station and being placed in the travel mechanism at light source optical path center for will be polarized station and loophole Switch of working position for rotating mechanism；During exposure operation, loophole station is placed in light source optical path center, during light orientation operation, station will be polarized and be placed in light source optical path center, and energy sensor is moved to optical path Center, rotation regulation rotating mechanism.It can realize that same proximity printing equipment is provided simultaneously with exposure and orientation function by the present invention, save space and cost.
Description
Technical field
The present invention relates to a kind of proximity printing device, more particularly to a kind of proximity printing and light orientation one
Device, light alignment method and exposure method.
Background technology
Proximity printing equipment is one of important equipment in flat sheet industries, be widely used in TFT-LCD and
Colored filter (Color filter, CF) photoetching process in LTPS-OLED, its line-width resolution are general
In more than 10um.The demand improved at present for resolution ratio is not very strong, and due to apparatus for projection exposure
It is expensive, therefore in the case of application demand is met, proximity printing equipment will occupy larger market
Share.
Light orientation equipment is also one of equipment crucial in flat display field LCD processing procedures, with panel size
Continuous increase, process apparatus size also constantly increasing, and this directly increases plant area and factory service expense
With.If proximity printing equipment and light orientation equipment can be combined into one, will significantly reduce equipment investment and
Running cost.Meanwhile some scientific research institutions or laboratory funds are limited, narrow space, to capacity requirements
It is not high.
The content of the invention
For drawbacks described above, it is an object of the invention to provide a kind of proximity printing and light orientation integrally to fill
Put, light alignment method and exposure method, to cause equipment to be provided simultaneously with exposure and orientation function, save space
And cost.
For up to this purpose, in a first aspect, the invention provides a kind of proximity printing and light orientation integrated device,
Including：Including light source, it is sequentially placed into light source optical path direction：Light reflection filtering mechanism, fly lens group,
Spherical reflector, speculum, mask platform and the work stage with energy sensor；In fly lens group and
It is additionally provided between mask stage and is polarized module, the module that is polarized includes loophole station, is equipped with whirler
Structure is polarized station and is placed in the movement at light source optical path center for will be polarized station and loophole Switch of working position
Mechanism；During exposure operation, loophole station is placed in light source optical path center, during light orientation operation, will be polarized
Station is placed in light source optical path center, and energy sensor is moved into optical path Center, and rotation adjusts the rotation
Mechanism.
Preferably, the module that is polarized is placed at the light extraction of the fly lens group.
Preferably, the light source is mercury lamp light source, is inside provided with water cooling plant.
Preferably, the light reflection filtering mechanism and the equal angle of light of fly lens group output are less than 15 °.
Preferably, work stage includes level to motion and/or vertically to motion.
Preferably, the rotating mechanism is sequentially connected：Be placed in the gear clamping device being polarized outside station,
Gear mechanism and motor, the travel mechanism are progressive motor.
Second aspect, include a kind of light alignment method of proximity printing, applied to one described in first aspect
Kind proximity printing and light orientation integrated device, comprise the following steps：
The station that is polarized is placed in by light source optical path center by the travel mechanism；
Analyzing grating is uploaded, the energy sensor is moved to the light intensity of optical path Center measurement transmission, passes through rotation
Rotation mechanism is polarized the polarizer of station in 0 ° to 360 ° scope internal rotation；
Record and be respectively polarized the light intensity that energy sensor described in angle obtains, complete to calibrate and preserve；
Download analyzing grating, setting orientation angle.
Preferably, the station that is polarized for being polarized module is placed in before light source optical path center, in addition to：Increase pump drainage stream
Measure or by water-cooling pattern to light source heat radiation.
Preferably, analyzing grating is consistent with standard mask size, and carries alignment mark, in the analyzing grating
Raster graphic it is consistent with the mask pattern zone position in standard mask.
The third aspect, a kind of proximity printing method, applied to a kind of proximity printing described in first aspect and
Light orientation integrated device, comprises the following steps：
Loophole station is placed in by light source optical path center by the travel mechanism；
Upload mask and be exposed operation.
The present invention uses above-mentioned technical proposal, compared with existing technical scheme, has following beneficial effect：
The present invention is added on proximity printing machine with the module that is polarized for being polarized station and loophole station, is exposed
During light operation, loophole station is placed in light source optical path center, when calibration orientation angle operates, station will be polarized
It is polarized station and is placed in light source optical path center, there is provided polarized illumination, and the energy sensor is moved to light
Lu Zhizheng, rotation adjust the rotating mechanism, realized by changing configuration parameter so that device has simultaneously
Standby exposure and orientation function, can substantially reduce the equipment investment of client, save client's factory building or lab space.
Brief description of the drawings
Fig. 1 is that a kind of proximity printing of alternative offer of the present invention and the structure of light orientation integrated device are shown
It is intended to.
Fig. 2 is that a kind of proximity printing that alternative of the present invention provides and light orientation integrated device are polarized mould
Block side view.
Fig. 3 is the polarizer of a kind of proximity printing that alternative of the present invention provides and light orientation integrated device
And gear clamping device structural representation.
Fig. 4 is a kind of proximity printing and light orientation integrated device exposure operation that alternative of the present invention provides
When be polarized module position top view.
Fig. 5 is that a kind of proximity printing that alternative of the present invention provides and the orientation of light orientation integrated device light are made
Module position top view is polarized during industry.
Fig. 6 is the device work of a kind of proximity printing that alternative of the present invention provides and light orientation integrated device
Industry flow chart.
Fig. 7 is the analyzing light of a kind of proximity printing that alternative of the present invention provides and light orientation integrated device
Grid schematic diagram.
Fig. 8 is that a kind of proximity printing that alternative of the present invention provides and the orientation of light orientation integrated device light are made
Schematic diagram during industry.
Fig. 9 is a kind of method flow diagram of the light alignment method for proximity printing that alternative of the present invention provides.
Figure 10 is a kind of method flow diagram for proximity printing method that alternative of the present invention provides.
Embodiment
Proximity printing provided by the invention and light orientation integrated device, light are matched somebody with somebody below with reference to Fig. 1 to Figure 10
It is described in detail to method and exposure method, it is optional embodiment of the present invention, it is believed that this
Art personnel can modify and polish to it in the range of spirit and content of the invention is not changed.
As shown in Figure 1, the invention provides a kind of proximity printing and light orientation integrated device, including mercury
Lamp source 10, it is sequentially placed into light source optical path direction：Light reflection filtering mechanism 20, fly lens group 30,
Spherical reflector 40, speculum 50, mask platform 60 and the work stage 70 with energy sensor 71.
Light reflection filtering mechanism 20 includes cold mirror 21, shutter 22, optical filter 23 successively in the present embodiment.Mercury
The light that lamp source is sent reflects by cold mirror 21, and optical filter 23 filters, 30 even light of fly lens group,
Spherical reflector 40 amplifies light beam, reflects to form directional light by speculum 50, is irradiated to mask platform 60
On mask, be ultimately imaged on substrate 80.The present invention fly lens group 30 and mask stage 60 it
Between light source optical path in be additionally provided with and be polarized module 90, as shown in Figure 2, being polarized module 90 includes
Unthreaded hole station 91, be equipped with rotating mechanism 921 be polarized station 92 and for will be polarized station 92 and thoroughly
Unthreaded hole station 91 switches the travel mechanism 93 for being placed in light source optical path center.Wherein, it is polarized in station 92 and sets
The polarizer 922 is equipped with, rotating mechanism 921 drives polarizer rotation, and the polarizer 922 can be wire grating,
Rotating mechanism 921 drives wire grating to be adjusted in the range of 0 °~360 °, and loophole station 91 is then one
Individual unobstructed circular hole, light beam can pass through completely.As shown in Figure 3, rotating mechanism 921 in the present embodiment
It is sequentially connected：It is placed in the gear clamping device 9211 being polarized outside station 92, the and of gear mechanism 9212
Motor 9213, as shown in figures 4 and 5, travel mechanism 93 are progressive motor, and drive is polarized station
92 and loophole station 91 moved in position-limit mechanism 94 mutually to switch.Make when exposure operation, will
Loophole station 91 is placed in light source optical path center, when calibrating the operation of orientation angle, will be polarized station 92 and is placed in
Light source optical path center, and energy sensor 71 is moved to optical path Center, rotation regulation rotating mechanism 921.
Because light beam becomes big after spherical reflector, polarizer size also will become big therewith, and cost will be big
Width increase, is placed at the light extraction of fly lens group 30 it is therefore preferred that being polarized module 90, is polarized module 90
Ensured with the position relationship of light path by mechanical erection.
After wire grating is increased, nearly the light of half can be reflected back mercury lamp light source 10, it is therefore necessary to strengthen mercury
Lamp heat dispersion, such as pump drainage flow is increased, air cooling is changed to the modes such as water cooling, preferably, in mercury lamp light source
Water cooling plant is provided with 10.
Preferably, the equal angle of light that light reflection filtering mechanism 20 and fly lens group 30 export is less than
15 °, because：Wire grating extinction ratio formula：E=Ip/Ie=Tp/Te, wherein, Ip and Ie represent metal
P light and E light intensity below wiregrating, Tp and Te represent wire grating to the transmission of P light and E light in incident light
Rate.I.e. extinction ratio depends on wire grating to the transmitance of P light and E light in incident light, usual mercury lamp illumination
Incidence angle is less than 15 ° after the even light of system, and now Calculation results show that extinction ratio is higher, more than 50:1,
Meet light orientation demand.
And because in the panel display board exposure of big generation, proximity printing machine is due to exposure field size
Limited with transmission speed, using, there is level to move step to the even dual stage of the work stage with catenary motion function
Enter formula exposure, therefore the work stage 70 of the present invention includes level to motion and/or vertically to fitness machine
It is equally applicable during structure.
The invention provides the operation principle of a kind of proximity printing and light orientation integrated device to be specially：
When for exposure operation, it is polarized module 90 and loophole station 91 is moved to by stepper motor, will
Loophole station 91 is placed in light source optical path center, as shown in figure 4, light beam is completely by uploading mask
61 can be normally carried out exposure operation；When for light orientation operation, it is polarized module 90 and passes through stepper motor
It is moved to and is polarized station 92, station 92 will be polarized and be placed in light source optical path center, as shown in figure 8, uploads inspection
Polarisation grid 62, energy sensor 71 is moved to optical path Center, passes through the rotating metallic line of rotating mechanism 921
Grid simultaneously receive light intensity to calibrate orientation angle by energy sensor 71, and analyzing grating 2 is downloaded after the completion of calibration,
Orientation angle is set according to technological requirement, you can carry out light orientation operation.Device work flow is as shown in Figure 6.
As shown in Figure 7, analyzing grating 62 of the invention is using the analyzing device of customization, and outer shape is by mark
Quasi- mask size design, retaining the alignment mark 621 of mask, mask graph area is changed to raster graphic 622,
I.e. analyzing grating 62 is consistent with standard mask size, and carries alignment mark 621, the grating in analyzing grating
Figure 622 is consistent with the mask pattern zone position in standard mask.As shown in Figure 7.Analyzing grating 62 is uploaded,
Motor 9213 drives gear mechanism 9212 to rotate the polarizer in 0 ° to 360 ° range of motion, passes through gold
The polarizing light irradiation that category wiregrating is polarized is to analyzing grating 62, and only part light is by the way that the energy in work stage passes
Sensor 71 is moved to the light intensity that optical path Center measurement passes through, as shown in Figure 8.By rotating mechanism 921 not
The disconnected rotation polarizer and tracking measurement light intensity, record each stop position corresponding to light intensity, work as energy sensor
It is consistent with analyzing direction to be polarized direction during 71 measurement light intensity maximum, it is to be polarized direction when measuring light intensity minimum
It is vertical with analyzing direction, record difference and be polarized light intensity corresponding to angle, matched curve, complete to calibrate and protect
Deposit.
Embodiment two
As shown in Figure 9, the invention provides a kind of light alignment method of proximity printing, applied to embodiment
A kind of one proximity printing and light orientation integrated device, comprise the following steps：
S11：Station will be polarized by travel mechanism and be placed in light source optical path center.
Specifically, station is polarized to light source optical path center by the travel mechanism's movement for being polarized module.
S12：Analyzing grating is uploaded, energy sensor is moved to the light intensity of optical path Center measurement transmission, passed through
Rotating mechanism is polarized the polarizer of station in 0 ° to 360 ° scope internal rotation.
Wherein, analyzing grating is consistent with standard mask size, and carries alignment mark, the light in analyzing grating
Gate figure is consistent with the mask pattern zone position in standard mask.
Specifically, uploading analyzing grating in mask platform, by alignment mark, energy sensor is moved
The light intensity passed through to optical path Center measurement is moved, work is polarized in 0 ° to 360 ° scope internal rotation by rotating mechanism
The wire grating of position.
S13：The light intensity for being respectively polarized the acquisition of angle energy sensor is recorded, completes to calibrate and preserve.
Specifically：Record and be respectively polarized light intensity corresponding to angle (stop position), when energy sensor measures
It is consistent with analyzing direction to be polarized direction during light intensity maximum, it is to be polarized direction and analyzing when measuring light intensity minimum
Direction is vertical, records difference and is polarized light intensity corresponding to angle, matched curve, completes to calibrate and preserve.
S14：Download analyzing grating, setting orientation angle.
Specifically, analyzing grating is downloaded, setting orientation angle, you can carry out light orientation operation.
After increase wire grating, nearly the light of half can be reflected back mercury lamp, it is therefore necessary to strengthen mercury lamp and dissipate
Hot property, it is preferred that before S11, in addition to：S 10：Increase pump drainage flow or by water-cooling pattern to light
Source heat-dissipating.
Embodiment three
As shown in Figure 10, the invention provides a kind of proximity printing method, applied in embodiment one
A kind of proximity printing and light orientation integrated device, comprise the following steps：
S21：Loophole station is placed in by light source optical path center by travel mechanism.
Specifically, loophole station is moved to light source optical path center, light beam by being polarized the travel mechanism of module
Pass through completely.
S22：Upload mask and be exposed operation.
Specifically, uploading mask in mask platform, operation is exposed.
Station will be polarized and be placed in light source optical path center, upload analyzing grating, and the energy in work stage is sensed
Device is moved to the light intensity that optical path Center measurement passes through, by rotating mechanism adjust described in be polarized the angle of station.
In summary, a kind of proximity printing and light orientation integrated device provided by the invention, light alignment method
And exposure method, added on proximity printing machine and be polarized module be polarized station and loophole station,
During exposure operation, loophole station is placed in light source optical path center, when calibration orientation angle operates, work will be polarized
Position is polarized station and is placed in light source optical path center, there is provided polarized illumination, and the energy sensor is moved to
Optical path Center, rotation adjust the rotating mechanism, realized by changing configuration parameter so that device is simultaneously
Possess exposure and orientation function, the equipment investment of client can be substantially reduced, save client's factory building or laboratory is empty
Between.
In summary, the present invention uses above-mentioned technical proposal, compared with existing technical scheme, has following
Beneficial effect：
The present invention adds on proximity printing machine is polarized module be polarized station and loophole station,
During exposure operation, loophole station is placed in light source optical path center, when calibration orientation angle operates, work will be polarized
Position is polarized station and is placed in light source optical path center, there is provided polarized illumination, and the energy sensor is moved to
Optical path Center, rotation adjust the rotating mechanism, realized by changing configuration parameter so that device is simultaneously
Possess exposure and orientation function, the equipment investment of client can be substantially reduced, save client's factory building or laboratory is empty
Between.
Claims (10)
1. a kind of proximity printing and light orientation integrated device, it is characterised in that including light source, be sequentially placed into light source
Optical path direction：Light reflection filtering mechanism, fly lens group, spherical reflector, speculum, mask platform with
And the work stage with energy sensor；It is additionally provided between fly lens group and mask stage and is polarized module,
It is described be polarized module include loophole station, be equipped with rotating mechanism be polarized station and for work will to be polarized
Position and loophole Switch of working position are placed in the travel mechanism at light source optical path center；During exposure operation, by loophole work
Position will be polarized station and be placed in light source optical path center when light source optical path center, light orientation operation, and by institute
State energy sensor and be moved to optical path Center, rotation adjusts the rotating mechanism.
2. a kind of proximity printing as claimed in claim 1 and light orientation integrated device, it is characterised in that institute
State and be polarized module and be placed at the light extraction of the fly lens group.
3. a kind of proximity printing as claimed in claim 1 and light orientation integrated device, it is characterised in that institute
It is mercury lamp light source to state light source, is inside provided with water cooling plant.
4. a kind of proximity printing as claimed in claim 1 and light orientation integrated device, it is characterised in that institute
The equal angle of light for stating light reflection filtering mechanism and the output of fly lens group is less than 15 °.
5. a kind of proximity printing as claimed in claim 1 and light orientation integrated device, it is characterised in that work
Part platform includes level to motion and/or vertically to motion.
6. a kind of proximity printing as claimed in claim 1 and light orientation integrated device, it is characterised in that institute
Rotating mechanism is stated to be sequentially connected：Be placed in the gear clamping device being polarized outside station, gear mechanism and
Motor, the travel mechanism are progressive motor.
A kind of 7. light alignment method of proximity printing, applied to one kind described in any one in claim 1-6
Proximity printing and light orientation integrated device, it is characterised in that comprise the following steps：
The station that is polarized is placed in by light source optical path center by the travel mechanism；
Analyzing grating is uploaded, the energy sensor is moved to the light intensity of optical path Center measurement transmission, passes through rotation
Rotation mechanism is polarized the polarizer of station in 0 ° to 360 ° scope internal rotation；
Record and be respectively polarized the light intensity that energy sensor described in angle obtains, complete to calibrate and preserve；
Download analyzing grating, setting orientation angle.
8. the light alignment method of a kind of proximity printing as claimed in claim 7, it is characterised in that be polarized mould
The station that is polarized of block is placed in before light source optical path center, in addition to：Increase pump drainage flow or pass through water-cooling pattern
To light source heat radiation.
9. a kind of proximity printing as claimed in claim 7 and light orientation integrated device, it is characterised in that inspection
Polarisation grid are consistent with standard mask size, and carry alignment mark, the raster graphic in the analyzing grating with
Mask pattern zone position in standard mask is consistent.
A kind of 10. proximity printing method, applied to a kind of proximity described in any one in claim 1-6
Exposure and light orientation integrated device, it is characterised in that comprise the following steps：
Loophole station is placed in by light source optical path center by the travel mechanism；
Upload mask and be exposed operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610512887.1A CN107561871B (en) | 2016-07-01 | 2016-07-01 | Proximity type exposure and photo-alignment integrated device, photo-alignment method and exposure method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610512887.1A CN107561871B (en) | 2016-07-01 | 2016-07-01 | Proximity type exposure and photo-alignment integrated device, photo-alignment method and exposure method |
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| Publication Number | Publication Date |
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| CN107561871A true CN107561871A (en) | 2018-01-09 |
| CN107561871B CN107561871B (en) | 2020-04-10 |
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| CN201610512887.1A Active CN107561871B (en) | 2016-07-01 | 2016-07-01 | Proximity type exposure and photo-alignment integrated device, photo-alignment method and exposure method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110262194A (en) * | 2019-05-31 | 2019-09-20 | 深圳市华星光电技术有限公司 | The optical system of exposure sources |
| CN113741100A (en) * | 2021-08-05 | 2021-12-03 | 信利（惠州）智能显示有限公司 | Photo-alignment device and photo-alignment method |
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| US5864388A (en) * | 1995-07-11 | 1999-01-26 | Ushiodenki Kabushiki Kaisha | Surface activating process, and device and lamp for performing said process |
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| CN103135284A (en) * | 2011-11-23 | 2013-06-05 | 群康科技(深圳)有限公司 | Forming method of alignment film |
| CN105511166A (en) * | 2016-01-27 | 2016-04-20 | 京东方科技集团股份有限公司 | Orientation equipment, orientation film preparation method and display substrate |
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| US5864388A (en) * | 1995-07-11 | 1999-01-26 | Ushiodenki Kabushiki Kaisha | Surface activating process, and device and lamp for performing said process |
| JPH10154658A (en) * | 1996-09-27 | 1998-06-09 | Ushio Inc | Proximity aligner with changeable irradiation angle |
| EP0994378A2 (en) * | 1998-10-12 | 2000-04-19 | Ushiodenki Kabushiki Kaisha | Proximity exposure method by oblique irradiation with light |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110262194A (en) * | 2019-05-31 | 2019-09-20 | 深圳市华星光电技术有限公司 | The optical system of exposure sources |
| CN113741100A (en) * | 2021-08-05 | 2021-12-03 | 信利（惠州）智能显示有限公司 | Photo-alignment device and photo-alignment method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107561871B (en) | 2020-04-10 |
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