CN107561715A - Optical signal dodging device and its method - Google Patents

Optical signal dodging device and its method Download PDF

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Publication number
CN107561715A
CN107561715A CN201610510444.9A CN201610510444A CN107561715A CN 107561715 A CN107561715 A CN 107561715A CN 201610510444 A CN201610510444 A CN 201610510444A CN 107561715 A CN107561715 A CN 107561715A
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China
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optical signal
light
mirror piece
light intensity
smoothing mirror
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CN201610510444.9A
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CN107561715B (en
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梁海亮
王赛
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Abstract

The invention provides a kind of even light device of optical signal and its method, optical signal is transmitted to a smoothing mirror piece by light conduction cell, the smoothing mirror piece can be by same position on the light collection of equal angular to pupil face, the one side of the smoothing mirror piece away from the light conduction cell is provided with an even smooth film, the even smooth film is used to modulate the optical signal, so that being improved by the uniformity of the optical signal of the smoothing mirror piece.

Description

Optical signal dodging device and its method
Technical field
The present invention relates to optical field, more particularly to optical signal dodging device and its method.
Background technology
Optical signal transmission plays the role of extensive and important in field of machine vision optics automatic defect detection device. In actual application scenarios, especially in defects detection application, everybody, which is intended to optical signal, has uniform far-field distribution, so as to Higher uniformity is obtained in Kohler illumination mode.But in fact, due to the self-characteristic of light conduction cell and by light The influence in source, the equalization of intensity of optical signal can not meet use demand at this stage.
At present, optical signal light-uniforming technology is broadly divided into two classes, and a kind of technology is optical fiber extruding (fiber squeezing), Another kind of technology be optical fiber extend (fiber stretching), two kinds of technologies be all realized by modulated optical signal it is relatively uniform Optical signal, the uniformity that the even light effect of both the above optical signal light-uniforming technology reaches is about 85%, but can not meet light Learn uniformity higher and higher requirement of the equipment (such as optics automatic defect detection device) to optical signal.How optical signal is solved Lack of uniformity the problem of be those skilled in the art's technical problem urgently to be resolved hurrily.
The content of the invention
It is an object of the present invention to provide optical signal dodging device and its method, solves the lack of uniformity of optical signal Problem.
Optical signal dodging device provided by the invention, including:Light conduction cell and smoothing mirror piece;The light conduction cell is used In transmission optical signal;The smoothing mirror piece is used for same position, the smoothing mirror on the light collection of equal angular to pupil face Piece is arranged on the output end of the light conduction cell, and the one side of the smoothing mirror piece away from the light conduction cell is provided with an even light Film, the even smooth film are used to modulate the optical signal.
Preferably, in the optical signal dodging device, the light conduction cell is optical fiber.
Preferably, in the optical signal dodging device, the even smooth film is by modulating the transmitance pair of the optical signal The optical signal carries out even light.
Preferably, in the optical signal dodging device, the transmitance of the even smooth film obtains according to following method:Obtain The light intensity data of the optical signal, the light intensity data is normalized, asks inverse to obtain light intensity the data after normalization Function;Light spread function is obtained by the light diffusion zone size of the optical signal;The light intensity function and the light are spread Function enters row interpolation using interpolation algorithm;Light intensity function after interpolation and light spread function are subjected to deconvolution, obtained described Cross rate.
Preferably, in the optical signal dodging device, the light intensity data of the optical signal uses detector detection or soft Part emulation obtains.
Preferably, in the optical signal dodging device, the smooth diffusion zone size is according to the optical signal from described Smoothing mirror piece is obtained to the distance in angular spectrum face and the optical signal by the angular spectrum face numerical aperture after the smoothing mirror piece.
Preferably, in the optical signal dodging device, the interpolation algorithm is spline interpolation algorithms.
The present invention also provides a kind of optical signal even smooth method, including:An optical signal is provided, the optical signal passes through an even light Eyeglass carries out even light, and the exiting surface of the smoothing mirror piece has an even smooth film, and the smoothing mirror piece converges the light of equal angular Gather same position on pupil face, the even smooth film modulates the optical signal.
Preferably, in the even smooth method of the optical signal, the optical signal is transmitted by optical fiber.
Preferably, in the even smooth method of the optical signal, the even light is by modulating the transmitance of the optical signal to institute State optical signal and carry out even light.
Preferably, in the even smooth method of the optical signal, the transmitance of the even smooth film obtains according to following method:Obtain The light intensity data of the optical signal, the light intensity data is normalized, asks inverse to obtain light intensity the data after normalization Function;Light spread function is obtained by the light diffusion zone size of the optical signal;The light intensity function and the light are spread Function enters row interpolation using interpolation algorithm;Light intensity function after interpolation and light spread function are subjected to deconvolution, obtained described Cross rate.
Preferably, in the even smooth method of the optical signal, the light intensity data of the optical signal uses detector detection or soft Part emulation obtains.
Preferably, in the even smooth method of the optical signal, the smooth diffusion zone size is according to the optical signal from described Smoothing mirror piece is obtained to the distance in angular spectrum face and the optical signal by the angular spectrum face numerical aperture after the smoothing mirror piece.
Preferably, in the even smooth method of the optical signal, the interpolation algorithm is spline interpolation algorithms.
In the even light device of optical signal provided by the invention and its method, it is even to one that optical signal is transmitted by light conduction cell Light microscopic piece, the smoothing mirror piece can be by same positions on the light collection of equal angular to pupil face, and the smoothing mirror piece is away from institute The one side for stating light conduction cell is provided with an even smooth film, and the even smooth film is used to modulate the optical signal, so that by described even The uniformity of the optical signal of light microscopic piece is improved.
Brief description of the drawings
Fig. 1 is the structural representation of the even light device of optical signal of the embodiment of the present invention.
Embodiment
In order that objects, features and advantages of the present invention can be more obvious understandable, accompanying drawing is referred to.It should be clear that this explanation Structure, ratio, size depicted in book institute accompanying drawings etc., only to coordinate the content disclosed in specification, for being familiar with this The personage of technology understands and read, and is not limited to the enforceable qualifications of the present invention, therefore does not have technical essence meaning Justice, the modification of any structure, the change of proportionate relationship or the adjustment of size, do not influenceing the effect of present invention can be generated and institute Under the purpose that can reach, all should still it fall in the range of disclosed technology contents are obtained and can covered.As shown in figure 1, this The even light device of optical signal provided is provided, including:Light conduction cell 10 and smoothing mirror piece 20;The light conduction cell 10 is used to pass Optical signals;The smoothing mirror piece 20 is used for same position on the light collection of equal angular to pupil face, the smoothing mirror piece 20 are arranged on the output end of the light conduction cell 10, and one side of the smoothing mirror piece 20 away from the light conduction cell 10 is provided with One even smooth film 30, the even smooth film 30 are used to modulate the optical signal.
Preferably, in the even light device of the optical signal, the light conduction cell 10 is optical fiber, and optical fiber is typically by glass With plastics made of fiber, delivery means of the optical fiber as optical signal, transmission of the optical signal in optical fiber have low-down damage Consumption.
Preferably, in the even light device of the optical signal, the even smooth film 30 is by modulating the transmitance of the optical signal Even light is carried out to the optical signal.
Preferably, in the even light device of the optical signal, the transmitance of the even smooth film obtains according to following method:Obtain The light intensity data of the optical signal, the light intensity data is normalized, such as carries out Returning to one for minimum value, after normalization Data ask inverse to obtain light intensity function, ask inverse to obtain light intensity function the data after normalization;Pass through the optical signal Light diffusion zone size obtains light spread function;The light intensity function and the smooth spread function are inserted using interpolation algorithm Value, so as to meet compensation calculation accuracy requirement;Light intensity function after interpolation and light spread function are subjected to deconvolution, obtained described Transmitance.
Preferably, in the even light device of the optical signal, the light intensity data of the optical signal uses detector detection or soft Part emulation obtains.And just, the optical signal directly tested by detector in light conduction cell obtains the light intensity of optical signal;Or Person, it is to determine due to usual optical signal, both the light intensity by optical signal data by Software simulation calculation optical signals.
Preferably, in the even light device of the optical signal, the smooth diffusion zone size is according to the optical signal from described Smoothing mirror piece to angular spectrum face distance and the optical signal by angular spectrum face numerical aperture after the smoothing mirror piece (NA, Numerical aperture) obtain.Angular spectrum face, which is optical signal, passes through the place face being gathered together again after smoothing mirror piece.
Preferably, in the optical signal dodging device, the interpolation algorithm is spline interpolation algorithms.
The even smooth method of optical signal provided by the invention, including:An optical signal is provided, the optical signal passes through a smoothing mirror piece Even light is carried out, the exiting surface of the smoothing mirror piece has an even smooth film, and the smoothing mirror piece arrives the light collection of equal angular Same position on pupil face, the even smooth film modulate the optical signal.
Preferably, in the even smooth method of the optical signal, the optical signal is transmitted by optical fiber.
Preferably, in the even smooth method of the optical signal, the even light is by modulating the transmitance of the optical signal to institute State optical signal and carry out even light.When optical signal is by even smooth film, different light compensates transmitance to realize light by even smooth film Signal is uniformly distributed.
Preferably, in the even smooth method of the optical signal, the transmitance of the even smooth film obtains according to following method:Obtain The light intensity data of the optical signal, the light intensity data is normalized, asks inverse to obtain light intensity the data after normalization Function;Light spread function is obtained by the light diffusion zone size of the optical signal;The light intensity function and the light are spread Function enters row interpolation using interpolation algorithm;Light intensity function after interpolation and light spread function are subjected to deconvolution, obtained described Cross rate.
Preferably, in the even smooth method of the optical signal, the light intensity data of the optical signal uses detector detection or soft Part emulation obtains.
Preferably, in the even smooth method of the optical signal, the smooth diffusion zone size is according to the optical signal from described Smoothing mirror piece is obtained to the distance in angular spectrum face and the optical signal by the angular spectrum face numerical aperture after the smoothing mirror piece.
Preferably, in the even smooth method of the optical signal, the interpolation algorithm is spline interpolation algorithms.
As described above, according to uniformity calculation formula:(1- (Imax-Imin)/(Imax+Imin)) x100%, wherein, Imax is the largest light intensity of optical signal, and Imin is the minimum intensity of light of optical signal, passes through this bright even smooth method of optical signal and its dress Put, optical signal is about 57% by the uniformity of the hot spot formed after smoothing mirror piece, passes through the equal of the hot spot after even smooth film modulation Even property is up to 95%, and middle uniformity is about that 85% tool improves a lot compared with prior art.
In the even light device of optical signal provided in an embodiment of the present invention and its method, optical signal is transmitted by light conduction cell To a smoothing mirror piece, the smoothing mirror piece can be by same position on the light collection of equal angular to pupil face, the smoothing mirror piece One side away from the light conduction cell is provided with an even smooth film, and the even smooth film is used to modulate the optical signal, so that passing through The uniformity of the optical signal of the smoothing mirror piece is improved.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims Scope.

Claims (14)

  1. A kind of 1. even light device of optical signal, it is characterised in that including:Light conduction cell and smoothing mirror piece;The light conduction cell For transmitting optical signal;The smoothing mirror piece is used for same position on the light collection of equal angular to pupil face, the even light Eyeglass is arranged on the output end of the light conduction cell, and it is even that the one side of the smoothing mirror piece away from the light conduction cell is provided with one Light film, the even smooth film are used to modulate the optical signal.
  2. 2. the even light device of optical signal as claimed in claim 1, it is characterised in that the light conduction cell is optical fiber.
  3. 3. the even light device of optical signal as claimed in claim 1, it is characterised in that the even smooth film is by modulating the optical signal Transmitance even light is carried out to the optical signal.
  4. 4. the even light device of optical signal as claimed in claim 1, it is characterised in that the transmitance of the even smooth film is according to such as lower section Method obtains:
    The light intensity data of the optical signal is obtained, the light intensity data is normalized, the data after normalization are asked reciprocal Obtain light intensity function;
    Light spread function is obtained by the light diffusion zone size of the optical signal;
    Row interpolation is entered using interpolation algorithm to the light intensity function and the smooth spread function;
    Light intensity function after interpolation and light spread function are subjected to deconvolution, obtain the transmitance.
  5. 5. the even light device of optical signal as claimed in claim 4, it is characterised in that the light intensity data of the optical signal uses detection Device detects or software emulation obtains.
  6. 6. the even light device of optical signal as claimed in claim 4, it is characterised in that the smooth diffusion zone size is according to the light Distance and the optical signal of the signal from the smoothing mirror piece to angular spectrum face pass through the angular spectrum face numerical value after the smoothing mirror piece Aperture obtains.
  7. 7. the even light device of optical signal as claimed in claim 4, it is characterised in that the interpolation algorithm is calculated for spline interpolation Method.
  8. A kind of 8. even smooth method of optical signal, it is characterised in that including:An optical signal is provided, the optical signal passes through a smoothing mirror Piece carries out even light, and the exiting surface of the smoothing mirror piece has an even smooth film, and the smoothing mirror piece is by the light collection of equal angular Same position on to pupil face, the even smooth film modulate the optical signal.
  9. 9. the even smooth method of optical signal as claimed in claim 8, it is characterised in that the optical signal is transmitted by optical fiber.
  10. 10. the even smooth method of optical signal as claimed in claim 8, it is characterised in that the even light is by modulating the optical signal Transmitance even light is carried out to the optical signal.
  11. 11. the even smooth method of optical signal as claimed in claim 8, it is characterised in that the transmitance of the even smooth film is according to as follows Method obtains:
    The light intensity data of the optical signal is obtained, the light intensity data is normalized, the data after normalization are asked reciprocal Obtain light intensity function;
    Light spread function is obtained by the light diffusion zone size of the optical signal;To the light intensity function and light diffusion letter Number enters row interpolation using interpolation algorithm;
    Light intensity function after interpolation and light spread function are subjected to deconvolution, obtain the transmitance.
  12. 12. the even smooth method of optical signal as claimed in claim 11, it is characterised in that the light intensity data of the optical signal uses spy Survey device detection or software emulation obtains.
  13. 13. the even smooth method of optical signal as claimed in claim 11, it is characterised in that the smooth diffusion zone size is according to Distance and the optical signal of the optical signal from the smoothing mirror piece to angular spectrum face pass through the angular spectrum face number after the smoothing mirror piece Value aperture obtains.
  14. 14. the even smooth method of optical signal as claimed in claim 11, it is characterised in that the interpolation algorithm is calculated for spline interpolation Method.
CN201610510444.9A 2016-06-30 2016-06-30 Optical signal dodging device and its method Active CN107561715B (en)

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Application Number Priority Date Filing Date Title
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CN107561715B CN107561715B (en) 2019-08-23

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2624241Y (en) * 2003-03-29 2004-07-07 鸿富锦精密工业(深圳)有限公司 Optical homogenizer
US20040156130A1 (en) * 2002-12-31 2004-08-12 Powell Karlton David Homogenizing optical sheet, method of manufacture, and illumination system
CN201199269Y (en) * 2008-05-29 2009-02-25 西安华科光电有限公司 Even light lens and system thereof
CN203433197U (en) * 2012-12-31 2014-02-12 深圳市光峰光电技术有限公司 Light equalizing device, light emitting device and projection system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040156130A1 (en) * 2002-12-31 2004-08-12 Powell Karlton David Homogenizing optical sheet, method of manufacture, and illumination system
CN2624241Y (en) * 2003-03-29 2004-07-07 鸿富锦精密工业(深圳)有限公司 Optical homogenizer
CN201199269Y (en) * 2008-05-29 2009-02-25 西安华科光电有限公司 Even light lens and system thereof
CN203433197U (en) * 2012-12-31 2014-02-12 深圳市光峰光电技术有限公司 Light equalizing device, light emitting device and projection system

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