CN107557743A - Heavy caliber SiC speculum plated film support meanss - Google Patents
Heavy caliber SiC speculum plated film support meanss Download PDFInfo
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- CN107557743A CN107557743A CN201710735075.8A CN201710735075A CN107557743A CN 107557743 A CN107557743 A CN 107557743A CN 201710735075 A CN201710735075 A CN 201710735075A CN 107557743 A CN107557743 A CN 107557743A
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Abstract
Heavy caliber SiC speculum plated film support meanss, belong to Some Techniques Used To Manufacture Optical Coatings field.Solves the technical problem how a kind of support meanss suitable for heavy caliber SiC speculum magnetron sputtering platings are provided.The support meanss of the present invention, including workpiece plate, support column and limited post；Support column is made up of pallet, hemisphere, the first T-shaped post, the first spacer pin, spring, the first regulating bolt and the first T-shaped base, and the number of support column is at least three；Limited post is made up of limiting plate, the second T-shaped post, the second spacer pin, the second regulating bolt and the second T-shaped base, and limited post is at least three；Support column and limited post are alternately fixed on workpiece plate, and the diameter of the circumference of support column distribution is less than the diameter of the circumference of limited post distribution.The support meanss have regulation height and the function of automatic adjusting horizontal, and support bore is unrestricted, and flexible for installation, the heavy caliber RB SiC speculums that are particularly suitable for use in are coated with support when modified layer and highly reflecting films.
Description
Technical field
The invention belongs to Some Techniques Used To Manufacture Optical Coatings field, and in particular to a kind of heavy caliber SiC speculums plated film support dress
Put.
Background technology
Large telescope generally use reflective structure, its bore is bigger, focal length is longer, and the resolution ratio of system is also got over
It is high.Most of large telescope requirement of system design is in light weight, hardness is high and optical characteristics is high.SiC has thermal expansion
The excellent physical and mechanical properties such as coefficient is low, thermal conductivity is high, specific stiffness is big, density is small, radiation resistance is good, shaking property of heat resistanceheat resistant is good, it is
One of preferred material of large caliber reflecting mirror substrate.
Space large caliber speculum generally use is RB-SiC ceramic materials.Silicon carbide reaction-sintered needs in the preparation
Simple substance Si materials are penetrated among SiC material, this, which is resulted in RB-SiC, has two kinds of compositions of Si and SiC.Due to two kinds of materials
Expect the difference of physical property, cause that Si removal rates in polishing process are very fast and SiC is then relatively slow, thus have a common boundary in two phase constituents
Part forms micro- step.This uneven optical surface quality for causing it to be obtained after directly polishing existing for surface of SiC is simultaneously
It is not very high, the requirement of high-precision spatial optical system can not be met.This just needs to be modified RB-SiC surfaces, Ran Houcai
Being coated with for highly reflecting films can be carried out.
Currently used RB-SiC surface modifying methods mainly have chemical vapour deposition technique (CVD), electron-beam vapor deposition method and
Magnetron sputtering method.
Chemical vapour deposition technique usually requires to heat substrate, is such as coated with Si modified layers, temperature is generally 600 DEG C, and plates
SiC modified layers processed then require heat to more than 1000 DEG C.Because substrate is all high-precision face shape, so high temperature is possible to
Cause basal surface shape that irreversible change occurs, and temperature is higher, and temperature rate of change is bigger, especially to heavy caliber base
Bottom, its may be made cracked or even broken when serious.Therefore, CVD is not suitable for the modification of heavy caliber substrate.
Electron-beam vapor deposition method compensate for CVD deficiency to a certain extent, is modified applied to SiC and also achieves preferable effect
Fruit, but there are still some drawbacks.Particularly its own characteristic limits, and can only be placed on plating piece on evaporation source, quilt
Plating carries out plated film downwards.Any problem is not present for the less substrate of bore, but to several tons of the heavy caliber substrate of weighing,
To just very big difficulty and risk be faced by wanting overturn.Therefore, which also limits its answering in heavy caliber base coated film
With.
Magnetron sputtering method is to utilize the lotus energy particle bombardment surface of solids, escapes surface of solids atom by momentum-exchange.
The average energy of sputtering particle is up to several eV during plated film, and the particle mean kinetic energy of vapour deposition method evaporation only has several eV of zero point, because
This magnetron sputtering method is usually used in preparing high performance thin-film material.Controlled sputtering source can be installed towards any direction in theory
Flexibly, strong adaptability, this has extremely strong attraction for several tons of the heavy caliber SiC mirror substrates of weighing.Meanwhile relatively
The conventional case structure vacuum cavity of electron beam evaporation deposition equipment at present, the vacuum cavity form of magnetic-controlled sputtering coating equipment is more
Add variation, may be used in heavy caliber SiC base coated film equipment by suitably changing.
Magnetron sputtering plating and the frock that electron beam evaporation deposition uses are dramatically different, and electron beam evaporation deposition, which belongs to, to be hung
Dress, and magnetron sputtering plating then supports speculum bottom, it is desirable to it has regulation height and the function of automatic adjusting horizontal, but existing
Have in technology, without the support meanss that can realize above-mentioned function.
The content of the invention
The purpose of the present invention is how to provide a kind of support suitable for heavy caliber SiC speculum magnetron sputtering platings to fill
Put.
It is as follows that the present invention solves the technical scheme that above-mentioned technical problem obtains.
Heavy caliber SiC speculum plated film support meanss, including workpiece plate, support column and limited post；
The number of the support column is at least three, and the support column is by pallet, hemisphere, the first T-shaped post, first spacing
Pin, spring, the first regulating bolt and the first T-shaped base composition；
First T-shaped base is made up of the first chassis and the first column jacket, and the first chassis is fixed on workpiece plate, and the first column jacket is
Hollow circular cylinder, it is fixed on the first chassis, the inwall of the first column jacket is provided with internal thread, and the top of inwall is in axial direction set
There is first bar-shaped trough of more than three；
First regulating bolt is arranged in the first column jacket, and outer wall is provided with the outer spiral shell to be cooperated with the internal thread of the first column jacket
Line；
First T-shaped post is taken over a business by first to be formed with the first inner prop, and the first surface taken over a business is provided with circular groove, the first inner prop
For solid cylinder, top be fixed on first take over a business on, bottom is inserted into the first column jacket；
First spacer pin is multiple, is corresponded with the first bar-shaped trough of the first column jacket, the first spacer pin is fixed on first
On the outer wall of inner prop, coordinate with the first bar-shaped trough of the first column jacket；
Hemispheroidal plane is fixed in the first circular groove taken over a business, and the deep-slotted chip breaker of cambered surface and tray bottom surface coordinates；
Spring is arranged in the first column jacket of the first T-shaped base, and be compressed in the first T-shaped post and the first regulating bolt it
Between；
The limited post is at least three, and limited post is by limiting plate, the second T-shaped post, the second spacer pin, the second regulating bolt
With the second T-shaped base composition；
Second T-shaped base is made up of the second chassis and the second column jacket, and the second column jacket is hollow circular cylinder, and the second chassis is fixed
On workpiece plate, the second column jacket is fixed on the second chassis, and first bar shaped of more than three is in axial direction provided with the top of inwall
Groove；
Second regulating bolt is arranged in the second column jacket, and outer wall is provided with the outer spiral shell to be cooperated with the internal thread of the second column jacket
Line；
Second T-shaped post is taken over a business by second to be formed with the second inner prop, and second takes over a business to be provided with parallel screwed hole, the second inner prop
For solid cylinder, top be fixed on second take over a business on, bottom is inserted into the second column jacket, is passed through the second regulating bolt and is supported；
Second spacer pin is multiple, is corresponded with the first bar-shaped trough of the second column jacket, the second spacer pin is fixed on second
On the outer wall of inner prop, coordinate with the first bar-shaped trough of the second column jacket；
Limiting plate is made up of fixed plate and baffle plate, and fixed plate is provided with two the second bar-shaped troughs being parallel to each other, two
Two bar-shaped troughs are taken over a business upper parallel screwed hole with second and coordinated respectively, fixed plate be fixed by screws in second take over a business on, it is fixed
By screw fixed position, baffle plate is vertical to be fixed in fixed plate plate；
Support column and limited post are alternately fixed on workpiece plate, and the diameter of the circumference of support column distribution is less than limited post point
The diameter of the circumference of cloth, when supporting speculum, the apparent height of fixed plate is less than speculum floor height.
Further, the workpiece plate is * types, is made up of workpiece arm more than disk and the six roots of sensation, workpiece arm circumference uniform distribution
Be fixed in the outer circumferential walls of disk, disk and workpiece arm are integrally formed；Further, the support column and limited post
Number sum is equal to the number of workpiece arm.
Further, first chassis and the second chassis are provided with screwed hole.
Further, the first bar-shaped trough circumference uniform distribution on the first column jacket and the second outer column wall.
Further, described first takes over a business to be provided with the first reinforcement between the first inner prop.
Further, described second takes over a business to be provided with the second reinforcement between the second inner prop.
Further, the pallet, hemisphere, the first T-shaped post, spring, the first regulating bolt and the first T-shaped base are coaxial
Set.
Further, the described second T-shaped post, the second regulating bolt and the second T-shaped base are coaxially disposed.
Further, the support column and limited post are three.
Compared with prior art, beneficial effects of the present invention are：
The heavy caliber SiC speculum magnetron sputtering platings support meanss of the present invention have regulation height and automatic adjusting horizontal
Function, and support bore is unrestricted, flexible for installation, strong adaptability, the heavy caliber RB-SiC speculums that are particularly suitable for use in, which are coated with, to be changed
Support when property layer and highly reflecting films.
Brief description of the drawings
Fig. 1 is the structural representation of the heavy caliber SiC speculum plated film support meanss of the present invention；
Fig. 2 is the structural representation of the support column of the present invention；
Fig. 3 is the top view of the first T-shaped base in Fig. 2；
Fig. 4 is the top view of the first T-shaped post, reinforcement and the first spacer pin in Fig. 2；
Fig. 5 is the structural representation of the limited post of the present invention；
Fig. 6 is the top view of the second T-shaped post in Fig. 5；
Fig. 7 is the top view of limiting plate in Fig. 5；
In figure, 1, workpiece plate, 11, disk, 12, workpiece arm, 2, support column, 21, pallet, 22, hemisphere, 23, reinforcement,
24th, the first T-shaped post, 241, first takes over a business, the 242, first inner prop, the 25, first spacer pin, and 26, spring, the 27, first regulating bolt,
28th, the first T-shaped base, the 281, first chassis, the 282, second column jacket, 283, screwed hole, 3, limited post, 31, limiting plate, 311, solid
Fixed board, 312, baffle plate, 313, supporting plate, the 314, second bar-shaped trough, the 32, second T-shaped post, 321, second takes over a business, in 322, second
Post, the 33, second reinforcement, the 34, second spacer pin, the 35, second regulating bolt, the 36, second T-shaped base, the 361, second chassis,
362nd, the second column jacket.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing 1~7.
As shown in figure 1, the heavy caliber SiC speculum plated films support meanss of the present invention include workpiece plate 1, support column 2 and limit
Position post 3.
Wherein, workpiece plate 1 is the base of support meanss.It is preferred that workpiece plate 1 is * types, it is made up of disk 11 and workpiece arm 12,
Both can be integrally formed；Workpiece arm 12 is more than the six roots of sensation, preferably the six roots of sensation altogether, the outer circumferential walls for being fixed on disk 11 of circumference uniform distribution
On.
The number of support column 2 and limited post 3 is at least three, and the number sum of support column 2 and limited post 3 is equal to workpiece
The number of arm 12.Support column 2 and limited post 3 are alternately fixed on workpiece plate 12, and respectively into circumference uniform distribution, three support columns
The diameter of the circumference of 2 distributions is less than the diameter for the circumference that three limited posts 3 are distributed, as support column is on diameter 2.8m circumference
120 ° are uniformly distributed, and limited post is uniformly distributed on diameter 4.0m circumference in 120 °.
Support column 2 is preferably three, is separately fixed on three non-conterminous workpiece arms 12.As in Figure 2-4, support column
2 by pallet 21, hemisphere 22, the first T-shaped post 24, the first spacer pin 25, spring 26, the first regulating bolt 27 and the first T-shaped bottom
Seat 28 forms.First T-shaped base 28 is made up of the first chassis 281 and the first column jacket 282, and the shape on the first chassis 281 is without spy
Different limitation, conventional to be square and circular, the first chassis 281 is provided with screwed hole 283, for the first T-shaped base 28 to be fixed
On workpiece arm 12；First column jacket 282 is hollow circular cylinder, is fixed on the centre on the first chassis 281, the first column jacket 282 it is interior
Wall is provided with internal thread, and the top of inwall is in axial direction provided with first bar-shaped trough of more than three, preferably all first bar shapeds
Groove circumference uniform distribution.First regulating bolt 27 is arranged in the first column jacket 282, and outer wall is provided with external screw thread, in the first column jacket 282
Screw thread cooperates, and by rotation clockwise and anticlockwise, adjusts its height in the first column jacket 282.First T-shaped post 24
To take over a business 241 by first to form with the first inner prop 242, the first shape for taking over a business 241 is not particularly limited, preferably circular, and first
The surface for taking over a business 241 is provided with circular groove；First inner prop 242 is solid cylinder, and top is fixed on first and taken over a business in 241
The heart, bottom are inserted into the first column jacket 282, and height is adjusted by the first regulating bolt 27.First spacer pin 25 is multiple, with the
First bar-shaped trough of one column jacket 282 is corresponded, and the first spacer pin 25 is fixed on the outer wall of the first inner prop 242, and outside first
First bar-shaped trough of post 282 coordinates, and for the first T-shaped post 24 is spacing, prevents that the first T-shaped post 24 rotates when workpiece plate 1 from rotating.
Preferably, first takes over a business 241 and first and is provided with the first reinforcement 23 between inner prop 242.The bottom surface of pallet 21 is provided with deep-slotted chip breaker.Half
The plane of spheroid 22 is fixed on first and taken over a business in 241 circular groove, and cambered surface and the deep-slotted chip breaker of pallet 21 coordinate.Spring 26 is set
In the first column jacket 282 of the first T-shaped base 28, bottom contacts with the first regulating bolt 27, and the of top and the first T-shaped post 24
One inner prop 242 is contacted, i.e., spring 26 is compressed between the first T-shaped regulating bolt 27 of post 24 and first.Preferred trays 21, hemisphere
22nd, the first T-shaped post 24, spring 26, the first regulating bolt 27 and the first T-shaped base 28 are coaxially disposed.
Limited post 3 is preferably three, is separately fixed on remaining three non-conterminous workpiece arms 12.As illustrated in figs. 5-7, limit
Position post 3 is by L-type limiting plate 31, the second T-shaped post 32, the second reinforcement 33, the second spacer pin 34, the second regulating bolt 35 and second
T-shaped base 36 forms.Second T-shaped base 36 is made up of the second chassis 361 and the second column jacket 362, and the shape on the second chassis 361 does not have
Have specifically limited, conventional to be square and circular, chassis 361 is provided with screwed hole, for the second T-shaped base 36 to be fixed on into work
On part arm 12；Second column jacket 362 is hollow circular cylinder, and the second column jacket 362 is fixed on the centre on the second chassis 361, inwall top
In axial direction it is provided with first bar-shaped trough of more than three, preferably all first bar-shaped trough circumference uniform distributions.Second regulating bolt 35
It is arranged in second outer 362, outer wall is provided with external screw thread, is cooperated with the internal thread of the second column jacket 362, by clockwise and inverse
The rotation of hour hands, adjust its height in the second column jacket 362.Second T-shaped post 32 takes over a business 321 and second inner prop 322 by second
Composition, the second shape for taking over a business 321 is not particularly limited, preferably square, and second, which takes over a business 321, is provided with parallel screwed hole,
Can be one or more groups of；Second inner prop 322 is solid cylinder, and top is fixed on the second center for taking over a business 321, bottom inserting
In the second column jacket 362, supported by regulating bolt 35；Second spacer pin 34 is multiple, the first bar shaped with the second column jacket 362
Groove corresponds, and the second spacer pin 34 is fixed on the outer wall of the second inner prop 322, matched somebody with somebody with the first bar-shaped trough of the second column jacket 362
Close, for the second T-shaped post 32 is spacing in the second T-shaped base 36.Preferably, second takes over a business 321 and second between inner prop 322
Provided with the second reinforcement 33.It is preferred that the second T-shaped post 32, the second regulating bolt 35 and the second T-shaped base 36 are coaxially disposed.Limiting plate
31 are made up of fixed plate 311 and baffle plate 312, preferably L-type structure, i.e. baffle plate 312 is fixed on the edge of fixed plate 311；Gu
Fixed board 311 is provided with two the second parallel bar-shaped troughs 314, and the parallel screwed hole taken over a business respectively with second on 321 coordinates, the
Two bar-shaped troughs 314 can move relative to screwed hole, and by screw fixed position, regulating fender 312 is in away from limited post 3
The distance of mandrel；To stablize limiting plate 31, the fixed support plate 313 on limiting plate 31, supporting plate 313 has two right-angle sides, and one
Bar side is fixedly connected with fixed plate 311, and another is fixedly connected with baffle plate 312.
In the present invention, first, the initial of support column 2 is adjusted according to the height of speculum manually by the first regulating bolt 27
Highly, after elemental height regulation is completed, speculum is lifted, now three support columns 2 can be according to speculum using spring 26
Weight automatically adjusts contour within a certain height, and can be put down by 22 automatic water detection of hemisphere.Limited post 31 passes through
The Manual height of second regulating bolt 35, and by the position of the limitation speculum of baffle plate 312, prevent speculum in support meanss
Breakked away during rotation.It should be noted that the height by adjusting support column 2 and limited post 3 so that speculum passes through support
Post 2 supports, and limited post 3 is spacing, i.e., limited post 3 does not support speculum, it is preferable that after on support column 2, speculum bottom surface
It is more than 0 with distance of the plane on limited post 3 (i.e. the upper surface of fixed plate 311) in axial direction, less than 3mm.
Claims (10)
1. heavy caliber SiC speculum plated film support meanss, it is characterised in that including workpiece plate (1), support column (2) and limited post
(3)；
The number of the support column (2) is at least three, and support column (2) is by pallet (21), hemisphere (22), the first T-shaped post
(24), the first spacer pin (25), spring (26), the first regulating bolt (27) and the first T-shaped base (28) composition；
First T-shaped base (28) is made up of the first chassis (281) and the first column jacket (282), and the first chassis (281) are fixed on workpiece
On disk (1), the first column jacket (282) is hollow circular cylinder, is fixed on the first chassis (281), on the inwall of the first column jacket (282)
Provided with internal thread, the top of inwall is in axial direction provided with first bar-shaped trough of more than three；
First regulating bolt (27) is arranged in the first column jacket (282), and outer wall is provided with mutual with the internal thread of the first column jacket (282)
The external screw thread of cooperation；
First T-shaped post (24) is taken over a business (241) by first and formed with the first inner prop (242), and the first surface for taking over a business (241) is provided with circle
Connected in star, the first inner prop (242) are solid cylinder, and top is fixed on first and taken over a business on (241), and bottom is inserted into the first column jacket
(282) in；
First spacer pin (25) is multiple, is corresponded with the first bar-shaped trough of the first column jacket (282), the first spacer pin (25) is solid
It is scheduled on the outer wall of the first inner prop (242), coordinates with the first bar-shaped trough of the first column jacket (282)；
The plane of hemisphere (22) is fixed in the first circular groove for taking over a business (241), cambered surface and the arc of pallet (21) bottom surface
Groove coordinates；
Spring (26) is arranged in the first column jacket (282) of the first T-shaped base (28), and is compressed in the first T-shaped post (24) and the
Between one regulating bolt (27)；
The limited post (3) is at least three, and limited post (3) is by limiting plate (31), the second T-shaped post (32), the second spacer pin
(34), the second regulating bolt (35) and the second T-shaped base (36) composition；
Second T-shaped base (36) is made up of the second chassis (361) and the second column jacket (362), and the second column jacket (362) is hollow circuit cylinder
Body, the second chassis (361) are fixed on workpiece plate (1), and the second column jacket (362) is fixed on the second chassis (361), at the top of inwall
In axial direction it is provided with first bar-shaped trough of more than three；
Second regulating bolt (35) is arranged in the second column jacket (362), and outer wall is provided with mutual with the internal thread of the second column jacket (362)
The external screw thread of cooperation；
Second T-shaped post (32) is taken over a business (321) by second and formed with the second inner prop (322), and second takes over a business (321) provided with parallel
Screwed hole, the second inner prop (322) are solid cylinder, and top is fixed on second and taken over a business on (321), and bottom is inserted into the second column jacket
(362) in, supported by the second regulating bolt (35)；
Second spacer pin (34) is multiple, is corresponded with the first bar-shaped trough of the second column jacket (362), the second spacer pin (34) is solid
It is scheduled on the outer wall of the second inner prop (322), coordinates with the first bar-shaped trough of the second column jacket (362)；
Limiting plate (31) is made up of fixed plate (311) and baffle plate (312), fixed plate (311) be provided with two be parallel to each other the
Two bar-shaped troughs (313), two the second bar-shaped troughs (313) are taken over a business screwed hole parallel on (321) with second and coordinated respectively, fixed plate
(311) it is fixed by screws in second to take over a business on (321), baffle plate (312) is vertical to be fixed in fixed plate (311)；
Support column (2) and limited post (3) are alternately fixed on workpiece plate (12), and the diameter of the circumference of support column (2) distribution is small
In the diameter of the circumference of limited post (3) distribution, when supporting speculum, the apparent height of fixed plate (311) is less than speculum bottom surface
Highly.
2. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that the workpiece plate (1)
For * types, it is made up of the workpiece arm (12) more than disk (11) and six roots of sensation, workpiece arm (12) circumference uniform distribution is fixed on disk (11)
Outer circumferential walls on, disk (11) and workpiece arm (12) are integrally formed.
3. heavy caliber SiC speculums plated film support meanss according to claim 2, it is characterised in that the support column (2)
It is equal to the number of workpiece arm (12) with the number sum of limited post (3).
4. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that first chassis
(281) and the second chassis (361) are provided with screwed hole (283).
5. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that the first column jacket (282)
With the first bar-shaped trough circumference uniform distribution on the second column jacket (362) inwall.
6. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that described first takes over a business
(241) be provided with the first reinforcement (23) between the first inner prop (242), described second take over a business (321) and the second inner prop (322) it
Between be provided with the second reinforcement (33).
7. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that limiting plate (31) is L
Type.
8. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that the pallet (21),
Hemisphere (22), the first T-shaped post (24), spring (26), the first regulating bolt (27) and the first T-shaped base (28) are coaxially disposed.
9. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that the second T-shaped post
(32), the second regulating bolt (35) and the second T-shaped base (36) are coaxially disposed.
10. heavy caliber SiC speculums plated film support meanss according to claim 1, it is characterised in that the support column
(2) and limited post (3) is three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710735075.8A CN107557743B (en) | 2017-08-24 | 2017-08-24 | Heavy caliber SiC reflecting mirror plated film support device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710735075.8A CN107557743B (en) | 2017-08-24 | 2017-08-24 | Heavy caliber SiC reflecting mirror plated film support device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107557743A true CN107557743A (en) | 2018-01-09 |
| CN107557743B CN107557743B (en) | 2019-06-11 |
Family
ID=60976823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710735075.8A Active CN107557743B (en) | 2017-08-24 | 2017-08-24 | Heavy caliber SiC reflecting mirror plated film support device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107557743B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110218986A (en) * | 2019-05-24 | 2019-09-10 | 上海现代先进超精密制造中心有限公司 | A kind of plated film tooling and installation method for rectangular mirror |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006032409A (en) * | 2004-07-12 | 2006-02-02 | Hitachi Kokusai Electric Inc | Substrate processing apparatus |
| CN205329156U (en) * | 2016-01-29 | 2016-06-22 | 郑州启航精密科技有限公司 | Ball is disk strutting arrangement for ion plating |
| CN106611733A (en) * | 2015-10-22 | 2017-05-03 | 沈阳拓荆科技有限公司 | A multi-inlet cavity heating bracing frame |
-
2017
- 2017-08-24 CN CN201710735075.8A patent/CN107557743B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006032409A (en) * | 2004-07-12 | 2006-02-02 | Hitachi Kokusai Electric Inc | Substrate processing apparatus |
| CN106611733A (en) * | 2015-10-22 | 2017-05-03 | 沈阳拓荆科技有限公司 | A multi-inlet cavity heating bracing frame |
| CN205329156U (en) * | 2016-01-29 | 2016-06-22 | 郑州启航精密科技有限公司 | Ball is disk strutting arrangement for ion plating |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110218986A (en) * | 2019-05-24 | 2019-09-10 | 上海现代先进超精密制造中心有限公司 | A kind of plated film tooling and installation method for rectangular mirror |
| CN110218986B (en) * | 2019-05-24 | 2021-03-19 | 上海现代先进超精密制造中心有限公司 | Coating tool for strip-shaped reflector and installation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107557743B (en) | 2019-06-11 |
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