CN107544035A - A kind of radio-frequency power supply dynamic detection system and method for work - Google Patents

Abstract

The invention discloses a kind of radio-frequency power supply dynamic detection system, including detection means, the detection means includes the microprocessor for data analysis, storage, for connecting the RS232 standard interfaces of radio-frequency power supply, for performing the relay of serial ports interrupt routine, for performing the timer of timing transmission program, D/A converter；The RS232 standard interfaces are connected by RS232 Serial Port Lines with radio-frequency power supply；The detection means external power supply；The detection means is connected with turn-key system.System provided by the invention monitors, manages and analyzed the dynamic data of power supply in real time, find that the indigenous fault of power supply and the bad symptom of a trend, change maintenance mode are pro-active intervention ahead of time, change the equipment that will be damaged in time, the operating efficiency safeguarded is improved, reduces the percent defective of product.

Description

A kind of radio-frequency power supply dynamic detection system and method for work

Technical field

The present invention relates to radio-frequency signal generator field, more particularly to a kind of radio-frequency signal generator dynamic detection system and its work side Method.

Background technology

Over nearly one, 20 year, microelectronic industry fast development is various with the continuous progress of lower temperature plasma technology The plasma apparatus of function such as radio frequency (or radio frequency magnetron) sputtering, plasma etching (PE), reactive ion etching (RIE), Plasma deposition (PECVD) etc., is also taken seriously more and more, and has obtained widely applying in many fields.It is first The first application of etch silicon nitride, polysilicon, aluminium, deposit silicon nitride in the semiconductor industry.Other industrial expansions also exist therewith This new technology is actively used, such as deposits various optical thin films, sensitive thin film, and minimally invasive medical, chemical fibre, organic matter are carried out Surface modification etc..The popularization and application of these new technologies, new technology, new equipment, it is required for substantial amounts of radio-frequency signal generator.

In these application fields, the job stability of radio-frequency power supply is matter of utmost importance.Due to long-term continual work, And be up to a hundred while work, the whether normal yield and quality for being directly connected to its product of device power supply (DPS).

The problem of how finding radio-frequency power supply in time, ensure the work that all radio-frequency power supplies can be steady in a long-term, be partly to lead Body manufacturing enterprise, the production capacity of production line is played to greatest extent, improve production efficiency, while the rate that can greatly reduce the number of rejects and seconds.

At present, the detection of radio-frequency power supply equipment is only detected in the manufacturer of equipment by the equipment of specialty, still For the user of vast radio-frequency power supply equipment, also lack perfect detection architecture to diagnose and prejudge numerous electricity in time The working condition of source device, and all using passive artificial view mode, and during usual power-supply device alarm, radio-frequency power supply is just It has been failed that, cause the waste of production cost.

The content of the invention

The purpose of the present invention is the dynamic data of real-time detection, management and analysis radio-frequency signal generator.

For achieving the above object, the technical scheme is that：A kind of radio-frequency power supply dynamic detection system, including inspection Device is surveyed, the detection means includes the microprocessor for data analysis, storage, and the RS232 for connecting radio-frequency power supply is marked Quasi- interface, for performing the relay of serial ports interrupt routine, for performing the timer of timing transmission program, D/A converter；Institute RS232 standard interfaces are stated to be connected with radio-frequency power supply by RS232 Serial Port Lines；The detection means external power supply；The detection dress Put and be connected with turn-key system.

Preferably, the detection means is connected one kind as the present invention by power supply adaptor with 220V AC powers, electricity Source adapter is converted into 15V direct currents for 220V alternating currents.

Preferably, the detection means also includes display screen to another kind as the present invention.

Based on the method for work of radio-frequency power supply dynamic detection system, this method is included at the main program for data output Reason, the timing transmission program for obtaining data are handled, and for the processing of serial ports interrupt routine, the main program processing includes：

Step 1, judge RS232 standard interfaces whether successful connection；

Step 2, judge that RS232 standard interfaces receive the mark of valid data；

Step 3, judge that dynamic is measured according to command string, corresponding numeric character string is converted into numerical value is output to DA conversions Device input, open serial ports interrupt routine；

The timing transmission program processing includes：

Step A, timer is set, performs interrupt instruction；

Step B, judge whether to connect；

Step C, cycles through command adapted thereto, obtains corresponding data；

The serial ports interrupt routine processing includes：

Step I, when the character received is not " * ", by data buffer storage；

Step II, when the character of reception is " * ", command character string assignment, numeric character string assignment；

Step III, data cached, closing RS232 standard interface reception interruptions are emptied.

The beneficial effects of the invention are as follows：

The system monitors, manages and analyzed the dynamic data of power supply in real time, finds the indigenous fault of power supply and the bad symptom of a trend ahead of time, Change maintenance mode is pro-active intervention, changes the equipment that will be damaged in time, improves the operating efficiency of maintenance, reduces the useless of product Product rate.

Brief description of the drawings

Fig. 1 is the structural representation of the present invention；

Fig. 2 is main program handling process schematic diagram of the present invention；

Fig. 3 is timing transmission program handling process schematic diagram of the present invention；

Fig. 4 is serial ports interrupt routine handling process schematic diagram of the present invention.

Embodiment

The technical scheme in the embodiment of the present invention is clearly and completely described below in conjunction with accompanying drawing.

As shown in figure 1, a kind of radio-frequency power supply dynamic detection system, including detection means 1, the detection means 1 include using In the microprocessor 101 of data analysis, storage, for connecting the RS232 standard interfaces 102 of radio-frequency power supply, for performing serial ports The relay 103 of interrupt routine, for performing the timer 104 of timing transmission program, D/A converter 105, display screen（In figure It is not shown）；The RS232 standard interfaces 102 are connected by RS232 Serial Port Lines 3 with radio-frequency power supply 2；

The detection means 1 is connected by power supply adaptor 4 with 220V AC powers 5, and power supply adaptor 4 is used for 220V alternating currents It is converted into 15V direct currents.

The detection means 1 is connected with turn-key system 6.

The operation principle of the present invention, finds out the serial port communicating protocol of radio-frequency power supply 2, i.e., to obtain corresponding dynamic number first The instruction sent according to needs.Using the timing of RS232 standard interfaces 102 and circulate to the transmission command adapted thereto of radio-frequency power supply 2, and will The valid data that RS232 standard interfaces 102 receive are divided into command component and numerical part is cached, by judging instruction part Point, come determine be which dynamic amount numerical value, write-in microprocessor 101 corresponding memory block, while numerical value is changed by DA The analog signal output that device 105 is converted into 0-10V can real-time monitor desired on penetrating to turn-key system 6, turn-key system 6 The dynamic data of frequency power 2, such as dissipated power, total voltage, total current, fan electrical current, PA1 temperature.

Based on the method for work of radio-frequency power supply dynamic detection system, this method is included at the main program for data output Reason, the timing transmission program for obtaining data are handled, for the processing of serial ports interrupt routine.As shown in Fig. 2 at the main program Reason includes：

Step 1, power-up initializing, including setting RS232 standard interfaces 102, timer 104, relay 103 etc., then initially Change display screen and DA converters 105, principal function of then entering loop body 7；

Step 2, RS232 standard interface transmitting counter f_c are first determined whether, when f_c is more than 5, connection failure is represented, aobvious " Connecting ... " is shown in display screen, returns to the beginning of principal function loop body；When f_c is less than 5, RS232 standards are judged Mark Rflag of the interface to valid data；

Step 3, as Rflag=1, represent that RS232 standard interfaces receive valid data, then empty Rflag, Rflag=0, root Judge that dynamic is measured according to command string ML, by corresponding numeric character string SJ in corresponding position display, and it is defeated to be converted into numerical value Go out to the input of D/A converter 105, open serial ports interrupt routine, assignment interrupt identification TR1=1, return to principal function loop body Start；As Rflag=0, expression is not received by valid data, then returns to the beginning of loop body.

As shown in figure 3, the timing transmission program processing includes：

Step A, timer T0, timing 50ms are set using, execution is once interrupted, and count adds 1；

Step B, as count=10, i.e. 500ms timings.Connection mark flag_hand is first determined whether into 500ms timings, when Flag_hand=0, connection failure is represented, then send the instruction 0x0d that shakes hands；When flag_hand=1, represent that connection is normal；

Step C, connection is normal, then cycles through ROD, PAV, PAI, MON8, MOND instruction, to obtain corresponding data；

Step D, returns to main program, and timing transmission program terminates.

As shown in figure 4, the serial ports interrupt routine processing includes：

Step I, empty interrupt identification TR1, TR1=0；

Step II, judge the character that RS232 standard interfaces SBUF is received, when the character received is not " * ", data are stored in In order caching device Receive_Buffer；When the character of reception is " * ", by the of order caching device Receive_Buffer 0th, in 1 writing commands character string ML, numeric character string is write by the 6th of order caching device Receive_Buffer the, 7,8,9 In SJ.

Step III, order caching device Receive_Buffer is emptied, set receives mark Rflag=1 of valid data, put Position connection mark flag_hand=1, empties transmitting counter f_c=0, closes serial ports reception and interrupts TR1=0；

Step IV, main program is returned to, serial ports interrupt routine terminates.

Described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on the present invention In embodiment, the every other implementation that those of ordinary skill in the art are obtained under the premise of creative work is not made Example, belongs to the scope of protection of the invention.

Claims (4)

1. a kind of radio-frequency power supply dynamic detection system, it is characterised in that including detection means, the detection means includes being used to count According to the microprocessor of analysis, storage, for connecting the RS232 standard interfaces of radio-frequency power supply, for performing serial ports interrupt routine Relay, for performing the timer of timing transmission program, D/A converter；The RS232 standard interfaces pass through RS232 Serial Port Lines It is connected with radio-frequency power supply；The detection means external power supply；The detection means is connected with turn-key system.

2. radio-frequency power supply dynamic detection system according to claim 1, it is characterised in that the detection means passes through power supply Adapter is connected with 220V AC powers, and power supply adaptor is converted into 15V direct currents for 220V alternating currents.

3. radio-frequency power supply dynamic detection system according to claim 1, it is characterised in that the detection means also includes aobvious Display screen.

4. the method for work based on radio-frequency power supply dynamic detection system described in claim 1, it is characterised in that this method includes using Handled in the main program of data output, the timing transmission program for obtaining data is handled, for the processing of serial ports interrupt routine, institute Stating main program processing includes：

Step 1, judge RS232 standard interfaces whether successful connection；

Step 2, judge that RS232 standard interfaces receive the mark of valid data；

Step 3, judge that dynamic is measured according to command string, corresponding numeric character string is converted into numerical value is output to DA conversions Device input, open serial ports interrupt routine；

The timing transmission program processing includes：

Step A, timer is set, performs interrupt instruction；

Step B, judge whether to connect；

Step C, cycles through command adapted thereto, obtains corresponding data；

The serial ports interrupt routine processing includes：

Step I, when the character received is not " * ", by data buffer storage；

Step II, when the character of reception is " * ", command character string assignment, numeric character string assignment；

Step III, data cached, closing RS232 standard interface reception interruptions are emptied.