CN107529233A - A kind of heating and temperature measurement circuit based on RTD - Google Patents
A kind of heating and temperature measurement circuit based on RTD Download PDFInfo
- Publication number
- CN107529233A CN107529233A CN201710689995.0A CN201710689995A CN107529233A CN 107529233 A CN107529233 A CN 107529233A CN 201710689995 A CN201710689995 A CN 201710689995A CN 107529233 A CN107529233 A CN 107529233A
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- Prior art keywords
- rtd
- heating
- temperature measurement
- circuit
- temperature
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/0288—Applications for non specified applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
- G01K7/21—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit for modifying the output characteristic, e.g. linearising
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
A kind of heating and temperature measurement circuit based on RTD, belong to technical field of temperature control.RTD one end is grounded, and the other end connects heating module and temperature measurement module by first switch circuit with second switch circuit respectively；Signal generator is used to produce square-wave signal, on the one hand its output end connects the control terminal of first switch circuit, on the other hand passes through the control terminal of connection second switch circuit after phase inverter.First switch circuit turn-on when square-wave signal is high level, second switch closing of circuit, circuit enter heating mode, first switch closing of circuit when square-wave signal is low level, second switch circuit turn-on, and circuit enters thermometric pattern.The RTD that circuit provided by the invention to be produced on substrate only has one, has not only made adding thermal resistance but also has made temperature detecting resistance, does not have thermometric electrode footprint area on substrate, and the Temperature Distribution of substrate surface obtains more uniform；And heater circuit and measuring circuit are completely independent, do not disturb mutually.
Description
Technical field
The invention belongs to technical field of temperature control, more particularly to a kind of heating and temperature measurement circuit based on RTD.
Background technology
The electronic device of many miniaturizations, such as semiconductor gas sensor, minitype gathering device, miniature chromatogram be required for into
Trip temperature controls, that is, needs a heater to be heated, and utilizes the temperature of a temperature sensor measurement heating simultaneously.Platinum
The resistance value of resistance varies with temperature into positive temperature coefficient change, and measurement accuracy is high, stable performance, is that a kind of conventional temperature passes
Sensor；Meanwhile the resistivity of platinum and temperature-coefficient of electrical resistance (TCR) are all bigger, long-time stability are good, are very good heating
Resistance material.
But be all in the prior art by the different zones on same substrate made respectively platinum heat electrode and
Platinum thermometric electrode realizes the heating in temperature field and thermometric.For example, in 2005 annual Journal of
The article of Microelectromechanical Systems reports《High-performance temperature-
programmed microfabricated gas chromatography columns》(the miniature chromatogram of high-performance temperature programming
Post) in, device is heated and temperature survey using the platinum film heater and RTD that prepare in silicon chip back side.Platinum is thin
Film heater totally 4, respectively positioned at the center of silicon chip four edges.When an only heater heating, the temperature difference on silicon chip is
20℃；4 heaters work simultaneously when, the temperature difference is reduced to 3 DEG C.In the examples described above, due to the good thermal conductivity sum of silicon chip
Hundred microns of thickness, therefore even if the size of platinum film heater is all designed to smaller, only cover small portion's area of substrate
And leave enough areas and laid for temperature sensor, still obtain than more uniform Temperature Distribution.
But heater is such as 2006 on the silicon chip for being laid on the very poor substrate of thermal conductivity or being thinned in many cases
Spend the article of Sensors reports《High-temperature MEMS Heater Platforms:Long-term
Performance of Metal and Semiconductor Heater Materials》(high temperature MEMS heater platforms：
The long-term behaviour of metal and semiconductor heat booster material) in just employ SOI as substrate, after by the silicon removing of bottom, only
Platinum is heated electrode and thermometric electrode deposition by the device layer silicon for leaving 6 microns thick as substrate by the way of electron beam evaporation
To substrate surface, heating electrode is serpentine-like, is coiled on whole diaphragm substrate, and blank is left at center to lay platinum thermometric electricity
Pole.After electrified regulation, hence it is evident that the temperature at visible thermometric electrode is less than the temperature at heating electrode.
Heat electrode in existing technical scheme to be independently distributed on substrate with thermometric electrode, thermometric electrode occupies base
Plate suqare so that corresponding position can not lay heating wires, and there is heat uneven technical disadvantages.
The content of the invention
Heating can not be laid for the substrate position that thermometric electrode (or temperature sensor) occupies present in prior art
Line and the problem of heating-up temperature is lower than surrounding be present, the present invention provides a kind of heating and temperature measurement circuit based on RTD, the electricity
Road drives a RTD, is heated in high level, thermometric during low level, so as to be connected up in whole substrate area,
Obtain more uniform Temperature Distribution.
The technical scheme is that：
A kind of heating and temperature measurement circuit based on RTD, including RTD, heating module, temperature measurement module, signal occur
Device, first switch circuit, second switch circuit and phase inverter,
The RTD only has one, and its one end ground connection, the other end passes through first switch circuit and second switch electricity respectively
Road connects heating module and temperature measurement module；
The signal generator is used to produce square-wave signal, on the one hand its output end connects the control of first switch circuit
End, on the other hand pass through the control terminal of connection second switch circuit after phase inverter.
Specifically, the RTD is film platinum resistor.
Specifically, the heating and temperature measurement circuit based on RTD also include single-chip microcomputer, its output end connects the letter
Number generator, the signal generator is controlled to produce the square-wave signal of different frequency.
Specifically, the frequency of the square-wave signal is in the range of 200Hz to 1KHz.
Specifically, the heating module includes direct voltage source, the direct voltage source is connected by first switch circuit
The RTD, heating of the direct voltage source to the RTD is controlled by adjusting the dutycycle of the square-wave signal
Temperature.
Specifically, the temperature measurement module measures the resistance of the RTD, and according to the resistance value and temperature of the RTD
The relationship analysis of degree draws the temperature of the RTD.
Specifically, the temperature measurement module measures the resistance of the RTD, including fixed value resistance, voltage using bleeder circuit
Follower and analog-digital converter,
The fixed value resistance is connected with the RTD, its series connection point by connected after second switch circuit the voltage with
With the input of device, another termination supply voltage of the fixed value resistance, the other end ground connection of the RTD；
The input of the analog-digital converter connects the output end of the voltage follower, and its output end connects the monolithic
Machine.
Specifically, the temperature measurement module measures the resistance of the RTD using Wheatstone bridge.
Beneficial effects of the present invention are：Circuit provided by the invention is used as adding thermal resistance and survey using same RTD
Warm resistance, when the RTD in the present invention is produced on substrate, due to no thermometric electrode footprint area, the temperature of substrate surface
Degree is distributed more uniform, overcomes the shortcomings that temperature distributing disproportionation is even in the prior art；Using film platinum resistor, have preferably
Heating effect；Heater circuit and measuring circuit are completely independent, and are not disturbed mutually.
Brief description of the drawings
Fig. 1 is a kind of total system frame diagram of heating and temperature measurement circuit based on RTD provided by the invention；
Fig. 2 is the physical circuit signal of a kind of heating and temperature measurement circuit based on RTD provided by the invention in embodiment
Figure.
Embodiment
Specific embodiments of the present invention are described in detail with reference to Figure of description, while to the original of the present invention
Reason and characteristic are described further.Embodiments described below is served only for explaining the present invention, is not intended to limit the present invention
Scope.
Film platinum resistor is selected in the present embodiment, film resistor is directly deposited on temperature control object, without bonding agent, nothing
By being that heating or thermometric can obtain more preferable effect.
The core of the present invention is using control circuit so that film platinum resistor is respectively at heating within the different periods
With two kinds of different working conditions of thermometric, it so can be completely independent heater circuit and measuring circuit, avoid it from interfering.
The heating being illustrated in figure 2 in embodiment based on film platinum resistor and temperature measurement circuit, using single-chip microcomputer control arteries and veins in the present embodiment
Width modulator is rushed to replace signal generator to produce the square-wave signal of appropriate frequency, in the circuit course of work, caused side
Ripple signal frequency is certain.
Heating module in the present embodiment is a direct voltage source, and direct voltage source is connected thin by first switch circuit
Film RTD, enough heating powers are provided for film platinum resistor, film platinum is adjusted by adjusting the dutycycle of square-wave signal
The heat time of resistance, so as to adjust the temperature of heating.
Square-wave signal is divided into two-way, is directly connected to the control terminal of first switch circuit all the way, when square-wave signal is high level,
First switch closing of circuit, direct voltage source are connected with film platinum resistor, and direct voltage source heats to film platinum resistor；Side
When ripple signal is transformed to low level, first switch circuit disconnects, and film platinum resistor stops heating.Another way square-wave signal is inverted
The control terminal of second switch circuit is connected to after device is anti-phase, when square-wave signal is high level, the high level passes through inverter
After be converted into low level, second switch circuit disconnects, without thermometric；When square-wave signal is transformed to low level, inverted device is anti-
High level is converted into after phase, second switch closing of circuit carries out thermometric.It can be seen that foregoing circuit has interlock function so that film
RTD has and only heating and two kinds of working conditions of thermometric, and the heating and measurement of film platinum resistor are to be completely independent progress
, that is, when heating not thermometric and do not heat during thermometric, the separation for the function of realizing in time.
Need to be operated in appropriate frequency range to obtain good heating and thermometric effect, signal generator.When frequency
When rate is too high, turn-off time very little is heated, the continuity of heating is good, but the sampling time of thermometric will be very short, can influence to survey
The stable state of circuit temperature is established and accurate output.Accordingly, it is considered to the company of working frequency and the film platinum resistor heating to electronic switch
Continuous property, the working frequency of square-wave signal preferably, use 1KHz in the range of 200Hz-1KHz in the present embodiment.In the square-wave signal
Under frequency, the thermometric time of film platinum resistor is short enough, due to the effect of thermal inertia, it is believed that the temperature of film platinum resistor
Constant, the temperature measured is the heating-up temperature of film platinum resistor.
Temperature measurement module in the present embodiment measures the resistance of the film platinum resistor, including definite value electricity using bleeder circuit
Resistance, voltage follower and analog-digital converter, fixed value resistance are connected with film platinum resistor, after its series connection point is by second switch circuit
Connect the input of voltage follower, another termination 5V of fixed value resistance supply voltage, the other end ground connection of film platinum resistor；
The input connection voltage follower of analog-digital converter, its output end connection single-chip microcomputer.During second switch closing of circuit, that is, surveying
Thermophase, voltage follower can be from by fixed resistance R0Film is collected in the bleeder circuit formed with film platinum resistor R
The voltage at RTD R both ends, the analog voltage signal that analog-digital converter gathers voltage follower output are converted into digital voltage
Signal is transferred to single-chip microcomputer, and then single-chip microcomputer exports according to the Automated generalization analog-digital converter of film platinum resistor temperature and resistance
Digital voltage signal, digital voltage signal is converted into temperature value and shown, so as to complete temperature survey.
Wheatstone bridge can also be used to measure the resistance value of film platinum resistor in some embodiments.
Circuit provided by the invention so that the RTD being produced on substrate only has one, has not only made adding thermal resistance but also has surveyed
Warm resistance, there is no thermometric electrode footprint area on substrate so that the Temperature Distribution of substrate surface obtains more uniform, overcomes existing
Temperature shortcoming pockety in technology.
One of ordinary skill in the art can make various do not depart from originally according to these technical inspirations disclosed by the invention
The other various specific deformations and combination, these deformations and combination of invention essence are still within the scope of the present invention.
Claims (8)
1. a kind of heating and temperature measurement circuit based on RTD, it is characterised in that including RTD, heating module, temperature measurement module,
Signal generator, first switch circuit, second switch circuit and phase inverter,
The RTD only has one, and its one end ground connection, the other end is connected by first switch circuit and second switch circuit respectively
Connect heating module and temperature measurement module；
The signal generator is used to produce square-wave signal, and on the one hand its output end connects the control terminal of first switch circuit, separately
On the one hand the control terminal of connection second switch circuit after phase inverter is passed through.
2. heating and temperature measurement circuit according to claim 1 based on RTD, it is characterised in that the RTD is thin
Film RTD.
3. heating and temperature measurement circuit according to claim 1 based on RTD, it is characterised in that described to be based on RTD
Heating and temperature measurement circuit also include single-chip microcomputer, its output end connects the signal generator, controls the signal generator to produce
The square-wave signal of raw different frequency.
4. heating based on RTD and temperature measurement circuit according to claim 1 or 3, it is characterised in that the square wave letter
Number frequency in the range of 200Hz to 1KHz.
5. heating and temperature measurement circuit according to claim 1 based on RTD, it is characterised in that the heating module bag
Direct voltage source is included, the direct voltage source connects the RTD by first switch circuit, believes by adjusting the square wave
Number dutycycle control heating-up temperature of the direct voltage source to the RTD.
6. heating and temperature measurement circuit according to claim 1 based on RTD, it is characterised in that the temperature measurement module is surveyed
The resistance of the RTD is measured, and the temperature of the RTD is drawn according to the relationship analysis of the resistance value and temperature of the RTD
Degree.
7. heating based on RTD and temperature measurement circuit according to claim 3 or 6, it is characterised in that the thermometric mould
Block measures the resistance of the RTD, including fixed value resistance, voltage follower and analog-digital converter using bleeder circuit,
The fixed value resistance is connected with the RTD, and its series connection point after second switch circuit by connecting the voltage follower
Input, another termination supply voltage of the fixed value resistance, the RTD the other end ground connection；
The input of the analog-digital converter connects the output end of the voltage follower, and its output end connects the single-chip microcomputer.
8. heating and temperature measurement circuit according to claim 6 based on RTD, it is characterised in that the temperature measurement module profit
The resistance of the RTD is measured with Wheatstone bridge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710689995.0A CN107529233A (en) | 2017-08-14 | 2017-08-14 | A kind of heating and temperature measurement circuit based on RTD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710689995.0A CN107529233A (en) | 2017-08-14 | 2017-08-14 | A kind of heating and temperature measurement circuit based on RTD |
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| Publication Number | Publication Date |
|---|---|
| CN107529233A true CN107529233A (en) | 2017-12-29 |
Family
ID=60681068
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710689995.0A Pending CN107529233A (en) | 2017-08-14 | 2017-08-14 | A kind of heating and temperature measurement circuit based on RTD |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111238673A (en) * | 2020-01-06 | 2020-06-05 | 宁波中车时代传感技术有限公司 | Measuring circuit of film temperature sensor |
| CN113367578A (en) * | 2020-02-25 | 2021-09-10 | 佛山市顺德区美的电热电器制造有限公司 | Household appliance, control method and control device of household appliance and storage medium |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1548934A (en) * | 2003-05-07 | 2004-11-24 | 刘正洪 | Temperature sensor, its temperature detecting circuit and method |
| CN2664287Y (en) * | 2003-10-22 | 2004-12-15 | 华中科技大学 | A thermostatic crystal oscillator |
| CN1991654A (en) * | 2005-12-31 | 2007-07-04 | 博奥生物有限公司 | Temperature sensor needless accurate heating-up temperature control device and method |
| CN101290756A (en) * | 2008-06-25 | 2008-10-22 | 昆山龙腾光电有限公司 | Gamma voltage generating device, liquid crystal display device and method for controlling gamma voltage |
| CN101303607A (en) * | 2008-06-13 | 2008-11-12 | 百利通电子(上海)有限公司 | Positive temperature coefficient heating element temperature control method |
| CN201210259Y (en) * | 2008-06-13 | 2009-03-18 | 百利通电子(上海)有限公司 | Temperature control circuit for positive temperature coefficient heating element |
| CN101493707A (en) * | 2008-01-21 | 2009-07-29 | 同方威视技术股份有限公司 | Closed-loop temperature controlling and heating circuit |
| CN201382823Y (en) * | 2009-04-03 | 2010-01-13 | 刘瑜 | Temperature measuring circuit of quick heating body of coffee machine |
| CN205750587U (en) * | 2016-05-20 | 2016-11-30 | 中国工程物理研究院化工材料研究所 | Microminiature temperature field closed-loop control system |
-
2017
- 2017-08-14 CN CN201710689995.0A patent/CN107529233A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1548934A (en) * | 2003-05-07 | 2004-11-24 | 刘正洪 | Temperature sensor, its temperature detecting circuit and method |
| CN2664287Y (en) * | 2003-10-22 | 2004-12-15 | 华中科技大学 | A thermostatic crystal oscillator |
| CN1991654A (en) * | 2005-12-31 | 2007-07-04 | 博奥生物有限公司 | Temperature sensor needless accurate heating-up temperature control device and method |
| CN101493707A (en) * | 2008-01-21 | 2009-07-29 | 同方威视技术股份有限公司 | Closed-loop temperature controlling and heating circuit |
| CN101303607A (en) * | 2008-06-13 | 2008-11-12 | 百利通电子(上海)有限公司 | Positive temperature coefficient heating element temperature control method |
| CN201210259Y (en) * | 2008-06-13 | 2009-03-18 | 百利通电子(上海)有限公司 | Temperature control circuit for positive temperature coefficient heating element |
| CN101290756A (en) * | 2008-06-25 | 2008-10-22 | 昆山龙腾光电有限公司 | Gamma voltage generating device, liquid crystal display device and method for controlling gamma voltage |
| CN201382823Y (en) * | 2009-04-03 | 2010-01-13 | 刘瑜 | Temperature measuring circuit of quick heating body of coffee machine |
| CN205750587U (en) * | 2016-05-20 | 2016-11-30 | 中国工程物理研究院化工材料研究所 | Microminiature temperature field closed-loop control system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111238673A (en) * | 2020-01-06 | 2020-06-05 | 宁波中车时代传感技术有限公司 | Measuring circuit of film temperature sensor |
| WO2021139128A1 (en) * | 2020-01-06 | 2021-07-15 | 宁波中车时代传感技术有限公司 | Measurement circuit of thin-film temperature sensor |
| CN113367578A (en) * | 2020-02-25 | 2021-09-10 | 佛山市顺德区美的电热电器制造有限公司 | Household appliance, control method and control device of household appliance and storage medium |
| CN113367578B (en) * | 2020-02-25 | 2024-02-27 | 佛山市顺德区美的电热电器制造有限公司 | Household electrical appliance, control method, control device and storage medium for household electrical appliance |
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Application publication date: 20171229 |