CN107525828A - A kind of C/V integrated capacitances type humidity sensor interface circuit - Google Patents

A kind of C/V integrated capacitances type humidity sensor interface circuit Download PDF

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Publication number
CN107525828A
CN107525828A CN201610449702.7A CN201610449702A CN107525828A CN 107525828 A CN107525828 A CN 107525828A CN 201610449702 A CN201610449702 A CN 201610449702A CN 107525828 A CN107525828 A CN 107525828A
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circuit
humidity sensor
sensor interface
interface circuit
type humidity
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李征
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Individual
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228Circuits therefor

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Amplifiers (AREA)

Abstract

A kind of C/V integrated capacitances type humidity sensor interface circuit, suitable for Internet of Things field.Humidity sensor interface circuit is made up of folded cascode Op Amp, reference current source, biasing circuit, compensation circuit.The first order uses Foldable cascade structure, there is provided higher gain;The second level uses common source level structure, there is provided higher output voltage swing.Biasing circuit uses the bootstrap reference current source with self-starting, so as to reduce influence of the supply voltage to capacitor charge and discharge.Circuit sensitivity is high, dynamic response is fast, good, simple in construction, the easy digitlization of stability, and has good anti-interference and reliability.

Description

A kind of C/V integrated capacitances type humidity sensor interface circuit
Art
The present invention relates to a kind of C/V integrated capacitances type humidity sensor interface circuit, suitable for Internet of Things field.
Background technology
Sensor finds out the feeler of nature information as the mankind, and it can need people the various non electrical quantity information found out Measurable information about power is changed into, recognizes for people and controls corresponding object to provide condition and foundation.With modern surveying, control The continuous development of system and automatic technology, sensor technology is increasingly paid attention to by people, with the communication technology and computer skill Art forms three big pillars of modern information industry, is the important foundation of information industry, it is e measurement technology, semiconductor technology, meter Numerous subject phases such as calculation machine technology, the information processing technology, microelectronics, optics, acoustics, precision optical machinery, bionics and materialogy One of comprehensive cutting edge technology mutually intersected, it is the commanding elevation that 21 century people fight in terms of hi-tech development.
Humidity sensor is a kind of important sensor, is widely applied in many fields, and serve important Effect.Such as:Precision electronic element manufacture, space missile, the storage of rocket, the mould proof and aerological sounding etc. of grain.But It is that humidity is to be most difficult to a parameter of accurate measurement in the ambient parameter of routine.Widely known hair hygrograph, wet and dry bulb Hygrometer oneself be unsatisfactory for being actually needed for modern requirements.Because the measurement of humidity can be by other factors (atmospheric pressure, temperature) Influence, in addition, the calibration of humidity is also a problem, so being all always very come the research for humidity sensor both at home and abroad Active.
Capacitance type transducers are a kind of important sensors in sensor family.It is to utilize capacitor principle, by non-electrical Amount is converted into capacitance, and then the device of the parameter such as voltage, electric current or frequency for converting to measure and transmit, it is every can be with Being converted to the amount of spacing, area and dielectric constant can be measured with capacitance type transducers.With other types of sensor phase Than, have the advantages that measurement range big, high sensitivity, dynamic response is fast, stability is good, it is simple in construction, easily digitize, wet Very extensive application has been obtained in terms of the measurements such as degree, temperature, displacement, pressure, thickness, amplitude, liquid level, constituent analysis, has been one Sensor of the kind with good development prospect.The effect of sensor signal processing circuit is to be converted into signal caused by sensor It is a very important connecting link to be available for the electric signal analyzed, calculate, show and handled, its performance directly influences The measurement accuracy of whole system and sensitivity, or even determine the realization of measuring system.
However, with the continuous development and application of capacitance type transducers, the requirement for capacitance measurement circuit is also increasingly It is high.Mainly there is the difficulty of following several respects in measurement small capacitance at this stage:(1)Capacitance type transducers capacitance can not possibly be big, Generally pF magnitudes, and the change of micro- electric capacity as caused by these physical quantitys is more small, generally makees fF even aF magnitudes.Such as This small variable quantity is a challenge to the design for detecting circuit, if detecting circuit without corresponding small-signal, then basic The practical of sensor can not be realized, therefore micro- capacitance sensing is detected and be treated as using special interface integrated circuit The important method of device;(2) measuring circuit will typically use a certain amount of electronic switch, but the Charge injection effect pair of electronic switch The influence of measuring system is difficult to eliminate.
The content of the invention
The present invention provides a kind of C/V integrated capacitances type humidity sensor interface circuit, and the first order is total to using collapsible common source Grid structure, there is provided higher gain;The second level uses common source level structure, there is provided higher output voltage swing.Biasing circuit is adopted With the bootstrap reference current source with self-starting, so as to reduce influence of the supply voltage to capacitor charge and discharge.Circuit sensitivity is high, dynamic State response is fast, good, simple in construction, the easy digitlization of stability, and has good anti-interference and reliability.
The technical solution adopted in the present invention is:
C/V integrated capacitances type humidity sensor interface circuit by folded cascode Op Amp, reference current source, biasing circuit, Compensation circuit forms.
The folded cascode circuitry is first order circuit, and Differential Input pair can be realized using NMOS or PMOS, Using NMOS as Differential Input pair, higher mutual conductance can be provided, be advantageous to improve the DC current gain of amplifier, but need to use PMOS is as cascade pipe, and under same bias condition, the mutual conductance of PMOS is the 1/2~1/3 of NMOS tube, limits fortune Calculate the secondary pole frequency of amplifier;According to PMOS as Differential Input pair, amplifier has relatively low noise and higher secondary pole Dot frequency, but DC current gain is smaller.Considered based on the compromise to DC current gain and unity gain bandwidth, employ PMOS as poor Divide input pair.The problem of its output voltage swing is relatively low can be solved by second level amplifier.
In the reference current source circuit, M1 and M2 make it that electric current I2 and 12 is equal.I2 flows through M4 and produces voltage VGS4, I1 Flow through resistance R2 and produce voltage I1R2.Because the two voltages connect together, an equalization point is determined that out.In order to avoid circuit The equalization point of mistake is selected, devises start-up circuit.If circuit is in undesirable equalization point, I1, I2 are equal to 0.M23 will The electric current for providing M4 causes circuit work to be transferred to equalization point Q.As circuit works close to Q points, M23 source voltage increase, So that M23 electric current reduces.In Q points, M4 electric current should be equal with M2 electric current.
The biasing circuit uses the form of fundamental current mirror, and output current I0 and reference current IR ratio is only by device The ratio of size determines, can accurately replica current source electric current, without being influenceed by flow-route and temperature, therefore can be system More accurate biasing is provided.M1 and M2 is the enhanced MOSFET of N-channel, and IR is referred to as reference current, and I0 is referred to as output current, V0 Referred to as output voltage.Because M1 VDSI=VGSI, it is always operating at saturation region.And M2 will then see that VDS2 size is come Determine which region it is operated in.Generally, it is desirable to which M2 is operated in saturation region.
In the compensation circuit, in two-stage amplifying circuit, high output impedance is presented in the first order, and the second level provides appropriate increase Benefit, the multiplication using Miller effect to electric capacity, an electric capacity is accessed on feedback network internally to overcome this shortcoming. One low-frequency pole is established with a medium capacitance, saves considerable chip area, miller compensation not only reduces Required capacitance, also output limit is moved to the direction for leaving origin.It is exactly based in two interpole point miller compensations electricity Hold mode in series with a resistor to compensate channel frequency, make the phase margin of circuit stable about 60 degree, ensure that electricity The stability and operating rate on road.
The beneficial effects of the invention are as follows:Circuit sensitivity is high, dynamic response is fast, stability is good, it is simple in construction, be easy to numeral Change, and there is good anti-interference and reliability.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the folded cascode circuitry of the present invention.
Fig. 2 is the reference current source circuit of the present invention.
Fig. 3 is the biasing circuit of the present invention.
Fig. 4 is the compensation circuit of the present invention.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples.
Such as Fig. 1, folded cascode circuitry is first order circuit, and Differential Input pair can be realized using PMOS, is used NMOS can provide higher mutual conductance, be advantageous to improve the DC current gain of amplifier, but need to use PMOS as Differential Input pair As cascade pipe, under same bias condition, the mutual conductance of PMOS is the 1/2~1/3 of NMOS tube, limits computing and puts The secondary pole frequency of big device;According to PMOS as Differential Input pair, amplifier has relatively low noise and higher secondary limit frequency Rate, but DC current gain is smaller.Considered based on the compromise to DC current gain and unity gain bandwidth, it is defeated as difference to employ PMOS Enter pair.The problem of its output voltage swing is relatively low can be solved by second level amplifier.
Such as Fig. 2, in reference current source circuit, M1 and M2 make it that electric current I2 and 12 is equal.I2 flows through M4 and produces voltage VGS4, I1 flows through resistance R2 and produces voltage I1R2.Because the two voltages connect together, an equalization point is determined that out.In order to avoid electricity The equalization point of road selection mistake, devises start-up circuit.If circuit is in undesirable equalization point, I1, I2 are equal to 0.M23 By the electric current for providing M4 so that circuit work is transferred to equalization point Q.Increase as circuit works close to Q points, M23 source voltage Add so that M23 electric current reduces.In Q points, M4 electric current should be equal with M2 electric current.
Such as Fig. 3, biasing circuit uses the form of fundamental current mirror, and output current I0 and reference current IR ratio is only by device The ratio of part size determines, can accurately replica current source electric current, without being influenceed by flow-route and temperature, therefore can be to be System provides more accurate biasing.M1 and M2 is the enhanced MOSFET of N-channel, and IR is referred to as reference current, and I0 is referred to as output current, V0 is referred to as output voltage.Because M1 VDSI=VGSI, it is always operating at saturation region.And M2 will then see VDS2 size To determine which region it is operated in.Generally, it is desirable to which M2 is operated in saturation region.
Such as Fig. 4, in compensation circuit, in two-stage amplifying circuit, high output impedance is presented in the first order, and the second level provides appropriate Gain, the multiplication using Miller effect to electric capacity, an electric capacity is accessed on feedback network internally to overcome this to lack Point.One low-frequency pole is established with a medium capacitance, saves considerable chip area, miller compensation not only reduces Required capacitance, also output limit is moved to the direction for leaving origin.It is exactly based in two interpole point miller compensations Electric capacity mode in series with a resistor compensates to channel frequency, makes the phase margin of circuit stable about 60 degree, ensure that The stability and operating rate of circuit.

Claims (8)

1. a kind of C/V integrated capacitances type humidity sensor interface circuit, it is characterized in that:Described humidity sensor interface circuit by Folded cascode Op Amp, reference current source, biasing circuit, compensation circuit composition.
2. a kind of C/V integrated capacitances type humidity sensor interface circuit according to claim 1, it is characterized in that:The folding Stacked cascode amplifier is first order circuit, and Differential Input using PMOS to being realized.
3. a kind of C/V integrated capacitances type humidity sensor interface circuit according to claim 1, it is characterized in that:Described In reference current source circuit, M1 and M2 make it that electric current I2 and 12 is equal, and I2 flows through M4 generation voltages VGS4, I1 and flows through resistance R2 productions Raw voltage I1R2.
4. a kind of C/V integrated capacitances type humidity sensor interface circuit according to claim 1, it is characterized in that:Described In reference current source circuit, M23 is by the electric current for providing M4 so that circuit work is transferred to equalization point Q, as circuit works close to Q Point, M23 source voltage increase so that M23 electric current reduces.
5. a kind of C/V integrated capacitances type humidity sensor interface circuit according to claim 1, it is characterized in that:It is described inclined Circuits use the form of fundamental current mirror, and output current I0 and reference current IR ratio are only determined by the ratio of device size It is fixed, can accurately replica current source electric current.
6. a kind of C/V integrated capacitances type humidity sensor interface circuit according to claim 1, it is characterized in that:It is described inclined In circuits, M1 and M2 are the enhanced MOSFET of N-channel, and IR is referred to as reference current, and I0 is referred to as output current, and V0 is referred to as exporting electricity Pressure, M1 are operated in saturation region.
7. a kind of C/V integrated capacitances type humidity sensor interface circuit according to claim 1, it is characterized in that:The benefit Repay in circuit, in two-stage amplifying circuit, high output impedance is presented in the first order, and the second level is provided appropriate gain, imitated using Miller Tackle the multiplication of electric capacity.
8. a kind of C/V integrated capacitances type humidity sensor interface circuit according to claim 1, it is characterized in that:The benefit Repay in circuit, an electric capacity accessed on feedback network internally, a low-frequency pole is established with a medium capacitance, Save considerable chip area.
CN201610449702.7A 2016-06-21 2016-06-21 A kind of C/V integrated capacitances type humidity sensor interface circuit Pending CN107525828A (en)

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CN201610449702.7A CN107525828A (en) 2016-06-21 2016-06-21 A kind of C/V integrated capacitances type humidity sensor interface circuit

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Application Number Priority Date Filing Date Title
CN201610449702.7A CN107525828A (en) 2016-06-21 2016-06-21 A kind of C/V integrated capacitances type humidity sensor interface circuit

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109557143A (en) * 2018-10-30 2019-04-02 电子科技大学 A kind of capacitive humidity sensor interface circuit
CN112737565A (en) * 2021-04-02 2021-04-30 深圳市中科蓝讯科技股份有限公司 Interface circuit and chip
US11820333B2 (en) * 2018-09-28 2023-11-21 Asahi Kasei Kabushiki Kaisha Humidity measuring device and dew point temperature measuring device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11820333B2 (en) * 2018-09-28 2023-11-21 Asahi Kasei Kabushiki Kaisha Humidity measuring device and dew point temperature measuring device
CN109557143A (en) * 2018-10-30 2019-04-02 电子科技大学 A kind of capacitive humidity sensor interface circuit
CN112737565A (en) * 2021-04-02 2021-04-30 深圳市中科蓝讯科技股份有限公司 Interface circuit and chip

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Application publication date: 20171229