CN107505704A - The driving adjusting method and device of a kind of fiber spiral scanner - Google Patents

The driving adjusting method and device of a kind of fiber spiral scanner Download PDF

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Publication number
CN107505704A
CN107505704A CN201710857772.0A CN201710857772A CN107505704A CN 107505704 A CN107505704 A CN 107505704A CN 201710857772 A CN201710857772 A CN 201710857772A CN 107505704 A CN107505704 A CN 107505704A
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drive signal
optical fiber
constant pressure
scanning
scanner
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CN107505704B (en
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付玲
王瀛
刘谦
骆清铭
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/103Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements

Abstract

The present invention discloses the driving adjusting method and device of a kind of fiber spiral scanner, including:Apply first set combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the optical fiber scanning trace of fiber spiral scanner is in the first single linear pattern;Apply second set of combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the optical fiber scanning trace of fiber spiral scanner is in the second single linear pattern;Apply first set combination constant pressure drive signal and second set of combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the optical fiber scanning trace of fiber spiral scanner is in circular;Linear amplitude modulation is carried out to above-mentioned constant pressure drive signal, analyzes the hysteresis phenomenon of the optical fiber scanning trace after linear amplitude modulation;By optimized modulating wave envelope modulation drive signal, to alleviate the central area over-sampling phenomenon of optical fiber scanning trace.The present invention can obtain circular scanning track, and the problem of overcome center over-sampling.

Description

The driving adjusting method and device of a kind of fiber spiral scanner
Technical field
The invention belongs to optical scanning technique field, the driving more particularly, to a kind of fiber spiral scanner is adjusted Method and device.
Background technology
Optical scanning device is studied in the technical fields such as engineering exploration, position sensing, medical imaging and other related sciences In there is important application prospect.Common optical scanning device include galvanometer optical scan vibration lens, multi-surface rotating formula prism, Audio-optical deflection device, micro photo-electro-mechanical integral system etc..Galvanometer optical scan vibration lens, multi-surface rotating formula prism and acousto-optic are inclined It is larger to turn the conventional scanner volume such as device, it is difficult to be built in the miniature probe of distal end;And micro photo-electro-mechanical integral system is set It is complicated to count manufacturing process, it is with high costs.
Simple in construction, small volume, flexibility are good during micro-optical scanning based on single scanning optical fiber, and with scanning Scope adjustability is high, imaging results gradually obtain extensive accreditation without advantages such as honeycomb grid interference.Usual this kind of optical fiber Scanner is mainly using the piezo tube or four-piece type piezoelectricity rhs-structure of the sub-electrode of band four as main body.
Helical scanning is the scan mode that above-mentioned fibre optic scanner is most commonly seen, general.Four sub-electrodes of scanner can divide For two mutually orthogonal prescriptions to, the two pairs of electrodes is applied respectively the phase difference through ramp signal amplitude modulation for 90 degree just String carrier signal is driven.Wherein, sinusoidal carrier frequency is consistent with the single scanning optical fiber resonance frequency, is put with obtaining resonance Expose thoroughly scope.
Asked however, existing Helical Fiber scanner generally has structure asymmetry and piezoelectric reflection sluggishness etc. two Topic.Structure asymmetry be by scanning optical fiber in itself and scanner manual fabrication procedures introduce, can cause to scan optical fiber and exist Nonlinear type scanning is presented when single shaft drives, and the scanning track of two axles is no longer orthogonal.I.e. can not be by typically differing 90 degree Sine wave drive signal obtain circular scanning range.Piezoelectric sluggishness is then the pressure when starting the starting stage of scanning The response speed of electric material does not catch up with the pace of change of drive signal, and a certain degree of hysteresis can be presented.Thus cause in tradition Under the driving of ramp signal modulation, it is detained the long period near center location, further results in asking for center over-sampling Topic.
To sum up, existing Helical Fiber scanner can not obtain positive round by typically differing 90 degree of sine wave drive signal Shape scanning range, and the problem of center over-sampling be present.
The content of the invention
It is an object of the invention to provide a kind of driving adjusting method of fiber spiral scanner and device, it is intended to solves existing There is Helical Fiber scanner can not obtain circular scanning range by typically differing 90 degree of sine wave drive signal, and deposit The technical problem of over-sampling in center.
To achieve the above object, in a first aspect, the present invention provides a kind of driving adjusting method of fiber spiral scanner, bag Include:
Apply first set combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the fiber spiral The optical fiber scanning trace of scanner is in the first single linear pattern;Apply second set of combination to two axial electrodes of fiber spiral scanner Constant pressure drive signal so that the optical fiber scanning trace of the fiber spiral scanner is in the second single linear pattern, and described first is single Root linear pattern track is consistent with the amplitude range of the described second single linear pattern track and direction is orthogonal;To fiber spiral scanner Two axial electrodes simultaneously apply first set combination constant pressure drive signal and second set combine constant pressure drive signal so that the optical fiber The optical fiber scanning trace of helical scanning device is in circular;Linear amplitude tune is carried out to the drive signal of the optical fiber scanning trace System, two sets of combination drive signals are obtained, analyze two sets of lower optical fiber scannings of combination drive signal driving that linear amplitude modulation obtains The hysteresis phenomenon of track, the optical fiber scanning trace is in central area over-sampling;According to the modulating wave envelope modulation of optimization Drive signal, to alleviate the central area over-sampling phenomenon of the optical fiber scanning trace.
Alternatively, first set combination drive signal Vvx(t) it is:
Vvx(t)=sin (ω t) [sin θ1x+cosθ1y]
Wherein, ω represents driving frequency, θ1The angle between the proper direction of optical fiber first and scanner electrode direction is represented, sinθ1With cos θ1One group of combinations of values is represented, for compensated scanning device individual difference, to obtain linear pattern scanning track, x and y Two axial electrodes of fiber spiral scanner, sin θ are represented respectively1X represents to be applied to x electricity in first set combination constant pressure drive signal The drive signal of pole, cos θ1Y represents to be applied to the drive signal of y electrodes in first set combination constant pressure drive signal.
Alternatively, second set of combination constant pressure drive signal Vvy(t) it is:
Vvy(t)=cos (ω t) [cos θ2x+sinθ2y]
Wherein, θ2Represent the angle between the proper direction of optical fiber second and scanner electrode direction, sin θ2With cos θ2Represent one Group combinations of values, for compensated scanning device individual difference, to obtain linear pattern scanning track, cos θ2X represents that second set of combination is permanent The drive signal of x electrodes, sin θ are applied in pressure drive signal2Y represents to be applied to y electricity in second set of combination constant pressure drive signal The drive signal of pole.
It should be noted that when the proper direction of optical fiber first is defined as applying first set combination drive signal, optical fiber straight line The direction that type scanning track is marked, when the proper direction of optical fiber second is defined as applying second set of combination drive signal, optical fiber straight line The direction that type scanning track is marked.
Alternatively, apply the first set to two axial electrodes of fiber spiral scanner and combine constant pressure drive signal and described The superposed signal of second set of combination constant pressure drive signal, make it that the optical fiber scanning trace of the fiber spiral scanner is in positive round Shape.
Alternatively, the drive signal according to the modulating wave envelope modulation of optimization, after optimized modulating wave envelope modulation Final drive signal it is specific as follows:
Vx(t)=f (t) sin (ω t) [sin θ1x+cosθ1y]
Vy(t)=f (t) cos (ω t) [cos θ2x+sinθ2y]
Wherein, Vx(t) the first set combination drive signal after the modulating wave envelope modulation of optimization, V are representedy(t) optimization is represented Modulating wave envelope modulation after second set combination drive signal, f (t) represent Modulation and Amplitude Modulation function, and meet in the starting stage Slope be higher than final stage slope, for overcoming the hesitation, alleviate the central area of the optical fiber scanning trace Over-sampling phenomenon, the changing rule of the slope of the slope of the starting stage to the final stage are:From the starting stage to most Phase slope gradually reduces afterwards, with ensure the sampling density meet demand of the outer peripheral areas of the optical fiber scanning trace and uniformly.
Second aspect, the present invention provide a kind of drive adjusting device of fiber spiral scanner, including:
Drive signal production unit, for applying first set combination constant pressure driving to two axial electrodes of fiber spiral scanner Signal so that the optical fiber scanning trace of the fiber spiral scanner is in the first single linear pattern;
Drive signal production unit, for applying second set of combination constant pressure driving to two axial electrodes of fiber spiral scanner Signal so that the optical fiber scanning trace of the fiber spiral scanner is in the second single linear pattern, the first single linear pattern Track is consistent with the amplitude range of the described second single linear pattern track and direction is orthogonal;
Drive signal production unit, apply first set combination constant pressure simultaneously for two axial electrodes to fiber spiral scanner Drive signal and second set of combination constant pressure drive signal so that the optical fiber scanning trace of the fiber spiral scanner is in positive round Shape;
Amplitude modulation unit, for carrying out linear amplitude modulation to described two sets combination constant pressure drive signals, obtain two sets Drive signal is combined, the sluggishness for analyzing two sets of lower optical fiber scanning traces of combination drive signal driving that linear amplitude modulation obtains shows As the optical fiber scanning trace is in central area over-sampling;
Envelope modulation unit, for two sets of combination drive signals of modulating wave envelope modulation according to optimization, with described in alleviation The central area over-sampling phenomenon of optical fiber scanning trace.
Alternatively, first set combination constant pressure drive signal Vvx(t) it is:
Vvx(t)=sin (ω t) [sin θ1x+cosθ1y]
Wherein, ω represents driving frequency, θ1The angle between the proper direction of optical fiber first and scanner electrode direction is represented, sinθ1With cos θ1One group of combinations of values is represented, for compensated scanning device individual difference, to obtain linear pattern scanning track, x and y Two axial electrodes of fiber spiral scanner, sin θ are represented respectively1X represents to be applied to x electricity in first set combination constant pressure drive signal The drive signal of pole, cos θ1Y represents to be applied to the drive signal of y electrodes in first set combination constant pressure drive signal.
Alternatively, second set of combination constant pressure drive signal Vvy(t) it is:
Vvy(t)=cos (ω t) [cos θ2x+sinθ2y]
Wherein, θ2Represent the angle between the proper direction of optical fiber second and scanner electrode direction, sin θ2With cos θ2Represent one Group combinations of values, for compensated scanning device individual difference, to obtain linear pattern scanning track, cos θ2X represents that second set of combination is permanent The drive signal of x electrodes, sin θ are applied in pressure drive signal2Y represents to be applied to y electricity in second set of combination constant pressure drive signal The drive signal of pole.
Alternatively, drive signal production unit, for applying the first set to two axial electrodes of fiber spiral scanner The superposed signal of constant pressure drive signal and second set of combination constant pressure drive signal is combined, to cause the fiber spiral to scan The optical fiber scanning trace of device is in circular.
Alternatively, envelope modulation unit, for generating two sets after optimized modulating wave envelope modulation combination driving letters Number:
Vx(t)=f (t) sin (ω t) [sin θ1x+cosθ1y]
Vy(t)=f (t) cos (ω t) [cos θ2x+sinθ2y]
Wherein, Vx(t) the first set combination drive signal after the modulating wave envelope modulation of optimization, V are representedy(t) optimization is represented Modulating wave envelope modulation after second set combination drive signal, f (t) represent Modulation and Amplitude Modulation function, and f (t) meet initial The slope in stage is higher than the slope of final stage, for overcoming the hesitation, alleviates the center of the optical fiber scanning trace Region over-sampling phenomenon, the changing rule of the slope of the slope of the starting stage to the final stage are:From the starting stage Gradually reduced to final stage slope, with ensure the sampling density meet demand of the outer peripheral areas of the optical fiber scanning trace and It is even.
In general, by the contemplated above technical scheme of the present invention compared with prior art, have below beneficial to effect Fruit:
1st, the present invention proposes a pair of combination drive signals, realizes the separately driving scanning on one group of orthogonal direction Optical fiber, on the proper direction of optical fiber cantilever the effect of the electrode of x, y two be superimposed to form one-dimensional vibrations scanning, and in its proper direction The effect of the electrode of orthogonal direction two cancel out each other, it is possible to the stable one dimensional line without crosstalk is obtained on the proper direction of optical fiber Track is scanned, and then can be by the form of two groups of combinations of values, to that the scanner of asymmetry realizes spiral shell arbitrarily be present Rotation scanning, no coupling crosstalk phenomenon.
2nd, for there is the fibre optic scanner of structure asymmetry in the present invention, it is proposed that the driving with wide usage is adjusted Section method, by two sets to obtain circular scanning range.
3rd, the present invention is proposed by changing modulation wave envelope, by controlling the slope of amplitude modulation to improve because piezoelectric is anti- The problems such as answering the serious over-sampling of middle section caused by sluggishness and radially non-uniform scanning track.
4th, the present invention is only needed by feedback regulation for several times, appropriate to change drive signal form feature, you can is realized with general With the driving regulatory function of property.
Brief description of the drawings
Fig. 1 is fibre optic scanner structural representation provided by the invention;
Fig. 2 is the driving adjusting method schematic flow sheet of fiber spiral scanner provided by the invention;
Fig. 3 be asymmetry structure provided by the invention fibre optic scanner scan track schematic diagram, Fig. 3 (a) for only by Scanning track under the electrode drive of axle one, Fig. 3 (b) for only by the scanning track under the electrode drive of axle two, Fig. 3 (c) be Fig. 3 (a), (b) the scanning track under two single shaft drive signal collective effects;
Fig. 4 is the scanning trajectory diagram of orthogonal no crosstalk under composite signal provided by the invention, and Fig. 4 (a) combines for first set Scanning track under the effect of constant pressure drive signal, Fig. 4 (b) are the scanning track under second set of combination constant pressure drive signal effect, Fig. 4 (c) is the scanning track under two sets of combination constant pressure drive signal collective effects in Fig. 4 (a), (b);
Fig. 5 is that track result schematic diagram is scanned under piezoelectricity hesitation provided by the invention;
Fig. 6 is the scanning track comparison diagram provided by the invention changed after modulating wave envelope, and Fig. 6 (a) is under linear modulation Track timing diagram is scanned, Fig. 6 (b) is the scanning track timing diagram under the modulation of optimized modulating wave, and Fig. 6 (c) is under linear modulation Two-dimensional scan pattern, Fig. 6 (d) are the lower two-dimensional scan pattern of optimized modulating wave modulation;
Fig. 7 is fluoroscopic imaging systems schematic diagram provided by the invention;
Fig. 8 is fluorescence beads imaging results provided by the invention and existing fluorescence beads imaging results contrast schematic diagram, Fig. 8 (a) for the imaging results figure obtained during this adjusting method is not used, Fig. 8 (b) is to use the imaging knot obtained after this adjusting method Fruit is schemed;
Fig. 9 is the drive adjusting device structural representation of fiber spiral scanner provided by the invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, not For limiting the present invention.
The present invention provides a kind of driving adjusting method and device for fiber spiral scanner, including single scanning light Fine, fibre optic scanner and driving adjusting method.As shown in figure 1, be fibre optic scanner structural representation provided by the invention, including Two pairs of polarity carry micro electric towards consistent piezoelectric chip and the scanning optical fiber of position at its center, four piezoelectric patches Pole, for applying required constant pressure drive signal or modulated drive signal.
Fibre optic scanner is can to receive drive signal and drive the single scanning optical fiber to be carried out near its resonant frequency The scanning device of two-dimension vibration, the vibration formed in two mutually perpendicular directions of two-dimension vibration are independent mutually.This method energy It is enough to realize to either fiber helical scanning device, no matter its existing structure asymmetry difference or its piezoelectric lags in response Degree, circular scanning range can be obtained by regulation and scanning track radial distribution is uniform.
Fig. 2 is the driving adjusting method schematic flow sheet of fiber spiral scanner provided by the invention, as shown in figure 1, bag Step S101 is included to step S105.
S101, apply first set combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the light The optical fiber scanning trace of fine helical scanning device is in the first single linear pattern.
S102, apply second set of combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the light The optical fiber scanning trace of fine helical scanning device is in the second single linear pattern, the first single linear pattern track and second list The amplitude range of root linear pattern track is consistent and direction is orthogonal.
S103, apply first set combination constant pressure drive signal and second set of combination to two axial electrodes of fiber spiral scanner Constant pressure drive signal so that the optical fiber scanning trace of the fiber spiral scanner is in circular.
S104, linear amplitude modulation is carried out to described two sets combination constant pressure drive signals, obtains two sets of combination drive signals, The hysteresis phenomenon for two sets of lower optical fiber scanning traces of combination drive signal driving that linear amplitude modulation obtains is analyzed, the optical fiber is swept Track is retouched in central area over-sampling.
S105, the modulation wave envelope of optimization is determined according to the hysteresis phenomenon of optical fiber scanning trace, and utilize the modulating wave Two sets of combination drive signals of envelope modulation, to alleviate the central area over-sampling phenomenon of the optical fiber scanning trace.
It should be noted that the piezoelectric resonant fibre optic scanner in ideal model is strict centrosymmetric, optical fiber is scanned Positioned at the center for the similar square tube type structure being made up of four piezoelectric chips, adjacent two panels piezoelectric chip direction is orthogonal.Pass through Apply drive signal respectively to electrode corresponding to two groups, scanning optical fiber can be produced without crosstalk on two mutually orthogonal directions One dimensional line scanning;When further applying identical frequency, sinusoidal signal of 90 degree phase differences to two arrays of electrodes, optical fiber is scanned two Circular scan track is realized under the collective effect of group piezoelectric chip;Again by introducing Modulation and Amplitude Modulation, the spiral that can obtain expansion is swept Retouch pattern.
But in a practical situation, scanner does not ensure that strict centre symmetry.On the one hand, it is total in miniature piezoelectric Shake in the manual fabrication procedures of fibre optic scanner, a certain degree of asymmetry can be introduced, mainly include PZT wafer sizes and exist Fine difference, four-piece type rhs-structure and non-critical Central Symmetry, the epoxide-resin glue dosage of bonding effect is played in the presence of slight poor Not etc..In the future by introducing the machining customized, it is possible to achieve precision, manufacture scanner to standardization, enter And interindividual variation is effectively controlled, reduce this kind of asymmetry.On the other hand, having research to point out commercial fibres itself, there is also one Fixed asymmetry, this asymmetry introduced by optical fiber itself is unavoidable, it will causes scanner can not be along pre- The theoretical scanning track of phase is scanned.
Above series of reason result in it is not all made of scanners can present it is almost not poor with theory expectation Other scanning track.Simply, if being exactly that 90 ° of the sine wave signal through amplitude modulation point is differed with default two phases It is other scanner both direction is driven if, it is likely that the helical scanning shaped like a positive round of theory expectation can not be obtained Track.
Ideally, the drive signal of input is converted into the stress deformation of piezoelectric patches, Jin Eryin by two pairs of electrodes Play scanning optical fiber and produce displacement.Normally, the drive signal being applied in two pairs of electrodes should be following form:
Vx(t)=f (t) sin (ω t)
Vy(t)=f (t) cos (ω t)
Wherein, f (t) represents Modulation and Amplitude Modulation function, that is, is used as realizing spiral-expanding, usually ramp signal;ω represents to drive Dynamic frequency.When not considering asymmetry interference, in the presence of above-mentioned drive signal, the movement locus for scanning optical fiber cantilever should It is two straight lines in that orthogonal direction respectively.However, in most cases, when being limited by serious asymmetry, when wherein All the way during drive signal independent role, cross-couplings response can be produced, obtains scanning track as shown in Figure 3.Driven in single shaft Under dynamic, the linear pattern scanning track of theory is not produced, but oval track.
This explanation the single passage of scanner driving be broken down into the major axis along the oval-shaped scan track, two of short axle Component.Similarly, during another way drive signal independent role, it drives effect to be also broken down into two components.Cross-couplings Response causes mutual crosstalk.
And then the present invention is in order to accurately control scanner to realize the two-dimensional scan of high quality, it is necessary to eliminates above-mentioned intersection coupling Response phenomenon is closed, realizes and is driven on two proper directions of optical fiber again.It is noted that can be by being applied to two Drive signal on electrode is specifically combined, forms one group of new combination drive signal:
Vvx(t)=sin (ω t) [sin θ1x+cosθ1y]
Vvy(t)=cos (ω t) [cos θ2x+sinθ2y]
Wherein, θ1Represent the angle of the proper direction of optical fiber first and scanner electrode direction, θ2Represent the second intrinsic side of optical fiber To the angle with scanner electrode direction, sin θ1With cos θ1Represent one group of combinations of values, sin θ2With cos θ2Represent another group of number Value combination, is used to compensated scanning device individual difference, and to obtain linear pattern scanning track, x and y represent the driving electrodes of reality, That is two axial electrodes of fiber spiral scanner, if Vvx(t) constant pressure drive signal is combined for first set, if Vvy(t) it is the second set group Close constant pressure drive signal, sin θ1X represents to be applied to the drive signal of x electrodes, cos θ in first set combination constant pressure drive signal1y Represent that first set combines the drive signal that y electrodes are applied in constant pressure drive signal.cosθ2X represents that second set of combination constant pressure is driven The drive signal of x electrodes, sin θ are applied in dynamic signal2Y represents to be applied to y electrodes in second set of combination constant pressure drive signal Drive signal.Combination constant pressure drive signal provided by the invention is substantially to be applied to reality by one group of special value proportionate relationship Signal composition on the electrode of border.
Alternatively, apply the first set to two axial electrodes of fiber spiral scanner and combine constant pressure drive signal and described The superposed signal of second set of combination constant pressure drive signal, make it that the optical fiber scanning trace of the fiber spiral scanner is in positive round Shape.
Fig. 4 illustrates the scanning trajectory diagram of orthogonal no crosstalk under composite signal provided by the invention, wherein, Fig. 4 (a) is The first single linear pattern scanning track that constant pressure drive signal obtains is combined by first set, Fig. 4 (b) is by second set combination perseverance The second single linear pattern scanning track that pressure drive signal obtains, Fig. 4 (c) are obtained by two sets of combination constant pressure drive signals Circular scans track.
The scanning track that two composite signals obtain when individually acting on.With one of composite signal VvxExemplified by, lead to The drive signal for applying electrode x from certain numerical value combination to reality and electrode y is crossed, under the collective effect of the two, is hanged in optical fiber The effect of the electrode of x, y two is superimposed to form one-dimensional vibrations scanning on the proper direction of arm, and in the orthogonal direction two of its proper direction The effect of electrode is cancelled out each other.It can therefore be seen that cross-couplings response phenomenon has been basically eliminated, scanner can be in light The scanning of one-dimensional wire is realized on fine proper direction.Fig. 4 is illustrated when two composite signal collective effects, and resulting connects Subcircular scans track.
Described fibre optic scanner, can be it is any single scanning optical fiber can be driven to carry out two-dimension vibration, and two The mutual independent scanning device of vibration in mutually perpendicular direction.Fibre optic scanner utilizes the single resonance effects for scanning optical fiber Scan function is realized, when optical fiber vibrates in the two directions simultaneously, that is, realizes two-dimensional scan.Helical scanning expands outwardly rank Section is realized by applying the sine wave drive signal of 90 degree of the phase difference through amplitude modulation in 2 orthogonal directions;So And existing Helical Fiber scanner generally has structure asymmetry and piezoelectric reflection sluggishness etc. two, cause nothing Method obtains circular scanning range by typically differing 90 degree of sine wave drive signal, in the drive of traditional ramp signal modulation Under dynamic, near center location is detained the long period, further results in center over-sampling the problem of.
We pass through based on inverse piezoelectric effect and coupled field theoretical research, it is proposed that one kind driving adjusting method, to any The fiber spiral scanner of structure asymmetry difference or piezoelectric lags in response phenomenon be present, can be specific by two groups Being driven by the coefficient drive signal of two passages through the modulation of self-defined modulating wave, obtain circular scanning range and scanning Track radial distribution is uniform.
First, according to scanning optical fiber structure material parameter, its resonant frequency is estimated;Then experiment test, further at it Theoretical value environs determine actual value, and attempt traditional single channel and drive and record;According to record acquired results analysis meter Calculate, with one group of specific double-channel signal collective effect, to obtain linear scanning track;With another group of specific binary channels Signal, realize the linear pattern scanning orthogonal with the above results;The traditional slope of addition is attempted to modulate and record, it is anti-according to record result Feedback regulation, align string drive signal with customized modulation wave envelope and be modulated, rail is uniformly scanned to obtain radial distribution Mark.
Its specific implementation process is as follows:
Using the two-dimensional piezoelectric optical fiber cantilever of four-piece type structure resonance type scanner as realizing that spiral scan driving adjusts Device.The two-dimensional piezoelectric optical fiber cantilever used in embodiment resonates type scanner as shown in figure 1, including one section of optical fiber and four Piezoelectric ceramics, four piezoelectric ceramics wrap up one section of optical fiber, and two of four piezoelectric ceramics blocks is bonded at around optical fiber and exposes one Section optical fiber cantilever.
Optical fiber cantilever one end is fixed on scanner by driving structure (being piezoelectric patches in the present embodiment) excited vibrational, cantilever The other end is free end, and free end produces scanning due to vibration.Driving regulation can be realized by following steps:
The driving adjusting method is carried out as follows:1st, according to scanning fibre characteristic parameter, its resonant frequency is estimated.First Apply the constant sinusoidal signal of the frequency and writing scan track respectively to the axle of scanner two, then driving is applied simultaneously simultaneously to two axles Recording track.2nd, analysis calculating is carried out according to result in 1, applying a set of combination drive signal to axle one, axle two (is denoted as combination letter Number one), order scanning track is in single linear pattern.3rd, apply another set of combination drive signal to axle one, axle two and (be denoted as composite signal Two), order scanning track also be in single linear pattern, and with 2 scan footprint approach, direction it is orthogonal.4 while apply combination Signal one, composite signal two, order scanning track is circular.5th, linear amplitude modulation is added, and records its spiral scan trajectory, Analyze the order of severity of the scanner hysteresis phenomenon.6th, according to the analysis to recording result in 5, optimized modulating wave bag is proposed Network, driven using the composite signal of modulating wave modulation, alleviate the serious over-sampling problem in central area.
Embodiment 1:For structure asymmetric problem
According to the material and structural parameters of scanning optical fiber, its resonant frequency can be estimated with Flexural cantilever model, and it is pre- at this Nearby frequency sweep determines actual value for valuation.Attempt individually by passage one and passage two to apply and above-mentioned actual measurement resonant frequency one The sine wave drive signal of cause, and the scanning track of writing scan optical fiber is as shown in Figure 3.It can be seen that in the shadow of asymmetry structure Under sound, when applying driving separately through passage one or passage two, linear pattern is no longer presented in the scanning track of gained, but presents near Like ellipticity, and when passage one, two collective effects, gained is the uncertain oval-shaped scan track of form.Illustrate that scanner is deposited Structure asymmetry result in when traditional single shaft when, coupling crosstalk can be introduced, unidirectional scanning can not be obtained.
According to result in Fig. 3, calculated through analysis, it is proposed that two groups of composite signals.The essence of composite signal is through passage one The drive signal exported jointly with passage two, its carrier frequency is consistent with scanning optical fiber resonance frequency, and the passage two of passage one is respective Shared weight ratio then calculates according to result feedback regulation in Fig. 3.Fig. 4 is illustrated under different two groups of composite signals effects, Resulting is presented linear, mutually orthogonal scanning track, is then obtained close to positive round under two groups of composite signal collective effects The scanning track of shape.This explanation, all can be real by the method for composite signal for any scanner that unsymmetric structure be present Scanning optical fiber is driven on present one group of orthogonal direction without coupling crosstalk, that is, meets the premise calls of helical scanning.
Thought of the invention by introducing composite signal, efficiently solve and swept caused by scanner structure asymmetry Retouch track and the problem of deviation occurs in expection.The stage is debugged in the scanner of reality, by estimating and debugging, finds suitable one Group combinations of values, on the proper direction of optical fiber cantilever the effect of the electrode of x, y two be superimposed to form one-dimensional vibrations scanning, and at it The effect for levying the electrode of orthogonal direction two in direction is cancelled out each other, it is possible to the stabilization without crosstalk is obtained on the proper direction of optical fiber One dimensional line scans track, and then can be by the form of two groups of combinations of values, to the scanner of asymmetry arbitrarily be present Realize helical scanning.
Alternatively, the drive signal according to the modulating wave envelope modulation of optimization, it is specially:
Two sets after optimized modulating wave envelope modulation combination drive signals are:
Vx(t)=f (t) sin (ω t) [sin θ1x+cosθ1y]
Vy(t)=f (t) cos (ω t) [cos θ2x+sinθ2y]
Wherein, Vx(t) the first set combination drive signal after the modulating wave envelope modulation of optimization, V are representedy(t) optimization is represented Modulating wave envelope modulation after second set combination drive signal, f (t) represent Modulation and Amplitude Modulation function, and f (t) meet initial The slope in stage is higher than the slope of final stage, for overcoming the hesitation, alleviates the center of the optical fiber scanning trace Region over-sampling phenomenon, the changing rule of the slope of the slope of the starting stage to the final stage are:From the starting stage Gradually reduced to final stage slope, to ensure the sampling density of the outer peripheral areas of the optical fiber scanning trace.
Embodiment 2;Braking problems are responded for piezoelectric
Fig. 5 is illustrated in the range of 0 millisecond -150 milliseconds of sweep start starting stage by scanning footprint timing diagram Actual measurement scanning track and theoretical predicted value deviation situation.As can be seen that the influence sluggish due to piezoelectric response be present, Starting the starting stage of driving, scanning trajectory amplitudes scope is less than its theoretical predicted value, and has a certain degree of phase delay Due to the lagging characteristics of piezoelectric, the amplitude response of piezoelectric does not catch up with the amplitude speedup of signal, has considerably long one section Time rests on smaller amplitude (i.e. correspondence image central area), so that tighter the problem of the over-sampling of helical scanning center Weight.The hesitation of piezoelectric chip gently then deteriorates center over-sampling problem, heavy then too small, the influence that directly results in overall field range Imaging.
For this problem, we are modulated using customized modulation wave envelope to carrier wave, and the purpose is to alleviate pressure Electric hesitation, scanner is made to accelerate to spend central area.Fig. 6 shows linear ramp signal modulation and through self-defined bag Scanning track sequential comparison diagram and two-dimensional scan track comparison diagram obtained by the drive signal of network modulation.It can be seen that in linear ramp Under signal modulation, initial start stage scan amplitude scope is smaller, and its scanning range changes with time rate (timing diagram envelope slope) Gradual steepening increase, i.e., scanning track distribution presentation central area can be caused excessively intensive, as shown in Fig. 6 (c), that is, aggravated mistake Sampling.And during through self-defined envelope modulation, constant tendency is presented in the slope substantially, and then it can be seen that center in X-Y scheme Sector scanning track density substantially reduces, and as shown in Fig. 6 (d), illustrates that this method is effectively alleviated because piezoelectric responds sluggishness Caused by central area over-sampling problem.
Specifically, Fig. 6 (a) is most common linear ramping signal modulation, however, hesitation is limited by, its displacement The envelope of response is simultaneously non-linear, initial stage vibration amplitude and rate of change it is all smaller, subsequent rate of change gradually increases.Asked for this Topic, in technical scheme provided by the invention, we attempt to be improved by using nonlinear modulation wave envelope, its principle It is by self-defined modulation wave envelope, the envelope characteristic is that starting stage slope is higher, beneficial to overcoming hesitation, and it is subsequent Slope gradually reduces, to ensure that periphery has enough sampling densities.Fig. 6 (b) is the modulating wave bag using power function form The result of the drive signal of network.Adopted from 6 (b) as can be seen that alleviating the center brought by hesitation to a certain extent Sample rate problem, the envelope of its obtained fiber optics displacement amount have leveled off to the constant straight line of slope.
Embodiment 3:Imaging system
Fluoroscopic imaging systems using spiral scan driving adjusting method are as shown in Figure 7:Wherein, piezoelectric fibers cantilever is total to In vibration shape scanner and micro lens encapsulation assembled casing, the miniature front end of imaging system is collectively formed.Pass through the drive of the present invention Dynamic adjusting method, with reference to traditional two-dimensional helical turntable driving, the two-dimensional helical formula scanning of Rapid reset can be realized.
System using femtosecond laser as illumination excitation source, by one 10 ×, 0.3NA coupling object lens enter spy Transmitted in kind optical fiber.Fluorescence signal is reflected by dichroscope and separated, eventually through photomultiplier transit after optical filter through fiber pass-back Pipe collects detection.
Fig. 8, which is illustrated, has used the fluoroscopic imaging systems of the invention for driving adjusting method to fluorescence beads mark in embodiment 3 The imaging results of quasi- sample.Compared with unregulated result (Fig. 8 a), scanning field of view scope is presented just after this method is adjusted Circular (Fig. 8 b), and have benefited from more uniformly scanning track distribution, image clearly is undistorted, it was demonstrated that the driving of the present invention is adjusted Section method will not produce negative effect to scanning imagery quality.
After the wear-type standing finish for being applied to mouse when the fluoroscopic imaging systems are additional, the probe can be used for intravital mouse Brain function calcium imaging applications.
Fig. 9 provides a kind of drive adjusting device structural representation of fiber spiral scanner for the present invention, as shown in figure 9, Including:
Drive signal production unit, for applying first set combination constant pressure driving to two axial electrodes of fiber spiral scanner Signal so that the optical fiber scanning trace of the fiber spiral scanner is in the first single linear pattern.
Drive signal production unit, for applying second set of combination constant pressure driving to two axial electrodes of fiber spiral scanner Signal so that the optical fiber scanning trace of the fiber spiral scanner is in the second single linear pattern, the first single linear pattern Track is consistent with the amplitude range of the described second single linear pattern track and direction is orthogonal.
Drive signal production unit, for applying first set combination constant pressure driving to two axial electrodes of fiber spiral scanner Signal and second set of combination constant pressure drive signal so that the optical fiber scanning trace of the fiber spiral scanner is in circular.
Amplitude modulation unit, for carrying out linear amplitude modulation to two sets of combination constant pressure drive signals, obtain two sets of combinations Drive signal, the hysteresis phenomenon for two sets of lower optical fiber scanning traces of combination drive signal driving that linear amplitude modulation obtains is analyzed, The optical fiber scanning trace is in central area over-sampling.
Envelope modulation unit, for drive signal described in the modulating wave envelope modulation according to optimization, to alleviate the optical fiber Scan the central area over-sampling phenomenon of track.
Wherein, Fig. 9 may also include more or less parts, and the function of each part can refer to above method embodiment institute State, will not be described here.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included Within protection scope of the present invention.

Claims (10)

  1. A kind of 1. driving adjusting method of fiber spiral scanner, it is characterised in that including:
    Apply first set combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the fiber spiral scanning The optical fiber scanning trace of device is in the first single linear pattern;
    Apply second set of combination constant pressure drive signal to two axial electrodes of fiber spiral scanner so that the fiber spiral scanning The optical fiber scanning trace of device is in the second single linear pattern, the first single linear pattern track and the second single linear pattern rail The amplitude range of mark is consistent and direction is orthogonal;
    Apply first set combination constant pressure drive signal and second set of combination constant pressure simultaneously to two axial electrodes of fiber spiral scanner Drive signal so that the optical fiber scanning trace of the fiber spiral scanner is in circular;
    Linear amplitude modulation is carried out to above-mentioned two sets combination constant pressure drive signals, obtains two sets of combination drive signals, analysis is linear The hysteresis phenomenon for two sets of lower optical fiber scanning traces of combination drive signal driving that amplitude modulation obtains, the optical fiber scanning trace exist Central area over-sampling;
    The modulation wave envelope of optimization is determined according to the hysteresis phenomenon of optical fiber scanning trace, and utilizes the modulation wave envelope of the optimization Two sets of combinations drive signal is modulated, to alleviate the central area over-sampling phenomenon of the optical fiber scanning trace.
  2. 2. the driving adjusting method of fiber spiral scanner as claimed in claim 1, it is characterised in that first set combines constant pressure Drive signal Vvx(t) it is:
    Vvx(t)=sin (ω t) [sin θ1x+cosθ1y]
    Wherein, ω represents driving frequency, θ1Represent the angle between the proper direction of optical fiber first and scanner electrode direction, sin θ1With cosθ1One group of combinations of values is represented, for compensated scanning device individual difference, to obtain linear pattern scanning track, x and y generation respectively Two axial electrodes of mass color fibre helical scanning device, sin θ1X represents to be applied to the drive of x electrodes in first set combination constant pressure drive signal Dynamic signal, cos θ1Y represents to be applied to the drive signal of y electrodes in first set combination constant pressure drive signal.
  3. 3. the driving adjusting method of fiber spiral scanner as claimed in claim 2, it is characterised in that second set of combination constant pressure Drive signal Vvy(t) it is:
    Vvy(t)=cos (ω t) [cos θ2x+sinθ2y]
    Wherein, θ2Represent the angle between the proper direction of optical fiber second and scanner electrode direction, sin θ2With cos θ2Represent one group of number Value combination, for compensated scanning device individual difference, to obtain linear pattern scanning track, cos θ2X represents that second set of combination constant pressure is driven The drive signal of x electrodes, sin θ are applied in dynamic signal2Y represents to be applied to y electrodes in second set of combination constant pressure drive signal Drive signal.
  4. 4. the driving adjusting method of fiber spiral scanner as claimed in claim 1, it is characterised in that scanned to fiber spiral Two axial electrodes of device apply the superposition of the first set combination constant pressure drive signal and second set of combination constant pressure drive signal Signal, make it that the optical fiber scanning trace of the fiber spiral scanner is in circular.
  5. 5. the driving adjusting method of fiber spiral scanner as claimed in claim 1, it is characterised in that pass through the modulation of optimization Wave envelope modulation two sets of combinations drive signal, it is specially:
    Vx(t)=f (t) sin (ω t) [sin θ1x+cosθ1y]
    Vy(t)=f (t) cos (ω t) [cos θ2x+sinθ2y]
    Wherein, Vx(t) the first set combination drive signal after the modulating wave envelope modulation of optimization, V are representedy(t) tune of optimization is represented Second set of combination drive signal after wave envelope modulation processed, f (t) represents Modulation and Amplitude Modulation function, and f (t) met in the starting stage Slope be higher than final stage slope, for overcoming the hesitation, alleviate the central area of the optical fiber scanning trace Over-sampling phenomenon, the changing rule of the slope of the slope of the starting stage to the final stage are:From the starting stage to most Phase slope gradually reduces afterwards, with ensure the sampling density meet demand of the outer peripheral areas of the optical fiber scanning trace and uniformly.
  6. A kind of 6. drive adjusting device of fiber spiral scanner, it is characterised in that including:
    Drive signal production unit, for applying first set combination constant pressure driving letter to two axial electrodes of fiber spiral scanner Number so that the optical fiber scanning trace of the fiber spiral scanner is in the first single linear pattern;
    Drive signal production unit, for applying second set of combination constant pressure driving letter to two axial electrodes of fiber spiral scanner Number so that the optical fiber scanning trace of the fiber spiral scanner is in the second single linear pattern, the first single linear pattern rail Mark is consistent with the amplitude range of the described second single linear pattern track and direction is orthogonal;
    Drive signal production unit, apply first set combination constant pressure driving simultaneously for two axial electrodes to fiber spiral scanner Signal and second set of combination constant pressure drive signal so that the optical fiber scanning trace of the fiber spiral scanner is in circular;
    Amplitude modulation unit, for carrying out linear amplitude modulation to two sets of combination constant pressure drive signals, obtain two sets of combination drivings Signal, the hysteresis phenomenon for two sets of lower optical fiber scanning traces of combination drive signal driving that linear amplitude modulation obtains is analyzed, it is described Optical fiber scanning trace is in central area over-sampling;
    Envelope modulation unit, for two sets of combination drive signals of modulating wave envelope modulation according to optimization, to alleviate the optical fiber Scan the central area over-sampling phenomenon of track.
  7. 7. the drive adjusting device of fiber spiral scanner as claimed in claim 6, it is characterised in that first set combines constant pressure Drive signal Vvx(t) it is:
    Vvx(t)=sin (ω t) [sin θ1x+cosθ1y]
    Wherein, ω represents driving frequency, θ1Represent the angle between the proper direction of optical fiber first and scanner electrode direction, sin θ1With cosθ1One group of combinations of values is represented, for compensated scanning device individual difference, to obtain linear pattern scanning track, x and y generation respectively Two axial electrodes of mass color fibre helical scanning device, sin θ1X represents to be applied to the drive of x electrodes in first set combination constant pressure drive signal Dynamic signal, cos θ1Y represents to be applied to the drive signal of y electrodes in first set combination constant pressure drive signal.
  8. 8. the drive adjusting device of fiber spiral scanner as claimed in claim 7, it is characterised in that second set of combination constant pressure Drive signal Vvy(t) it is:
    Vvy(t)=cos (ω t) [cos θ2x+sinθ2y]
    Wherein, θ2Represent the angle between the proper direction of optical fiber second and scanner electrode direction, sin θ2With cos θ2Represent one group of number Value combination, for compensated scanning device individual difference, to obtain linear pattern scanning track, cos θ2X represents that second set of combination constant pressure is driven The drive signal of x electrodes, sin θ are applied in dynamic signal2Y represents to be applied to y electrodes in second set of combination constant pressure drive signal Drive signal.
  9. 9. the drive adjusting device of fiber spiral scanner as claimed in claim 6, it is characterised in that drive signal production is single Member, constant pressure drive signal and second set group are combined for applying the first set to two axial electrodes of fiber spiral scanner The superposed signal of constant pressure drive signal is closed, make it that the optical fiber scanning trace of the fiber spiral scanner is in circular.
  10. 10. the drive adjusting device of fiber spiral scanner as claimed in claim 6, it is characterised in that envelope modulation unit, For generating two sets after optimized modulating wave envelope modulation combination drive signals:
    Vx(t)=f (t) sin (ω t) [sin θ1x+cosθ1y]
    Vy(t)=f (t) cos (ω t) [cos θ2x+sinθ2y]
    Wherein, Vx(t) the first set combination drive signal after the modulating wave envelope modulation of optimization, V are representedy(t) tune of optimization is represented Second set of combination drive signal after wave envelope modulation processed, f (t) represents Modulation and Amplitude Modulation function, and f (t) met in the starting stage Slope be higher than final stage slope, for overcoming the hesitation, alleviate the central area of the optical fiber scanning trace Over-sampling phenomenon, the changing rule of the slope of the slope of the starting stage to the final stage are:From the starting stage to most Phase slope gradually reduces afterwards, with ensure the sampling density meet demand of the outer peripheral areas of the optical fiber scanning trace and uniformly.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108267853A (en) * 2018-02-09 2018-07-10 成都理想境界科技有限公司 A kind of fibre optic scanner, fibre-optic scanner and optical fiber scanning equipment
CN108803012A (en) * 2018-03-26 2018-11-13 成都理想境界科技有限公司 Method and fibre optic scanner in optical fiber scanning for correcting image distortion
CN109283682A (en) * 2018-10-19 2019-01-29 陈西府 A kind of two-sided helical phase reflecting mirror of Piezoelectric Driving and its electric excitation method thereof
CN110873961A (en) * 2018-08-31 2020-03-10 成都理想境界科技有限公司 Optical fiber scanning display device, optical fiber scanning display equipment and optical fiber scanning method
CN114826415A (en) * 2022-04-01 2022-07-29 北京航空航天大学 Spiral driving signal modulation device and method and imaging system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080058629A1 (en) * 2006-08-21 2008-03-06 University Of Washington Optical fiber scope with both non-resonant illumination and resonant collection/imaging for multiple modes of operation
CN101923218A (en) * 2010-08-04 2010-12-22 华中科技大学 Single-optical fiber scanning micro device as well as production method and control method thereof
WO2011122410A1 (en) * 2010-03-31 2011-10-06 ブラザー工業株式会社 Optical scanning device and image display device
WO2016157249A1 (en) * 2015-03-30 2016-10-06 オリンパス株式会社 Driving condition setting method and driving condition setting device for optical scanning device
CN106413511A (en) * 2014-05-27 2017-02-15 奥林巴斯株式会社 Optical scanning-type endoscope device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080058629A1 (en) * 2006-08-21 2008-03-06 University Of Washington Optical fiber scope with both non-resonant illumination and resonant collection/imaging for multiple modes of operation
WO2011122410A1 (en) * 2010-03-31 2011-10-06 ブラザー工業株式会社 Optical scanning device and image display device
CN101923218A (en) * 2010-08-04 2010-12-22 华中科技大学 Single-optical fiber scanning micro device as well as production method and control method thereof
CN106413511A (en) * 2014-05-27 2017-02-15 奥林巴斯株式会社 Optical scanning-type endoscope device
WO2016157249A1 (en) * 2015-03-30 2016-10-06 オリンパス株式会社 Driving condition setting method and driving condition setting device for optical scanning device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
付玲: ""多光谱荧光共聚焦内窥显微成像系统研究"", 《中国医疗器械信息》 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108267853A (en) * 2018-02-09 2018-07-10 成都理想境界科技有限公司 A kind of fibre optic scanner, fibre-optic scanner and optical fiber scanning equipment
CN108803012A (en) * 2018-03-26 2018-11-13 成都理想境界科技有限公司 Method and fibre optic scanner in optical fiber scanning for correcting image distortion
WO2019184624A1 (en) * 2018-03-26 2019-10-03 成都理想境界科技有限公司 Method for correcting image distortion during optical fiber scanning, and optical fiber scanner
CN110873961A (en) * 2018-08-31 2020-03-10 成都理想境界科技有限公司 Optical fiber scanning display device, optical fiber scanning display equipment and optical fiber scanning method
CN110873961B (en) * 2018-08-31 2022-03-04 成都理想境界科技有限公司 Optical fiber scanning display device, optical fiber scanning display equipment and optical fiber scanning method
CN109283682A (en) * 2018-10-19 2019-01-29 陈西府 A kind of two-sided helical phase reflecting mirror of Piezoelectric Driving and its electric excitation method thereof
CN114826415A (en) * 2022-04-01 2022-07-29 北京航空航天大学 Spiral driving signal modulation device and method and imaging system
CN114826415B (en) * 2022-04-01 2023-11-17 北京航空航天大学 Spiral driving signal modulation device and method and imaging system

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