CN107498724B - Reduce the abnormal method of guide wheel abrasion - Google Patents

Reduce the abnormal method of guide wheel abrasion Download PDF

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Publication number
CN107498724B
CN107498724B CN201710791926.0A CN201710791926A CN107498724B CN 107498724 B CN107498724 B CN 107498724B CN 201710791926 A CN201710791926 A CN 201710791926A CN 107498724 B CN107498724 B CN 107498724B
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guide wheel
wear rate
abnormal
abrasion
parameter
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CN107498724A (en
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朱明露
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Funing PV Technology Co. Ltd.
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Funing Pv Technology Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material

Abstract

The present invention relates to a kind of methods that the abrasion of reduction guide wheel is abnormal, which comprises obtains the real-time cutting parameter of wire cutting machine;The cutting parameter is substituted into the guide wheel wear rate that preset guide wheel wear model obtains corresponding board;Judge whether guide wheel is abnormal according to the guide wheel wear rate;If being abnormal, the technological parameter for needing to adjust is calculated according to the guide wheel wear rate.This method can measure the abrasion condition of guide wheel, reduce guide wheel abrasion exception by adjusting guide wheel technological parameter, extend the service life of guide wheel.

Description

Reduce the abnormal method of guide wheel abrasion
Technical field
The present invention relates to photovoltaic slice processing fields, more particularly to a kind of side that the abrasion of reduction guide wheel is abnormal Method.
Background technique
Current photovoltaic slice processing process generally uses wire cutting machine tool to cut silicon single crystal rod, core component For wire cutting guide wheel.As shown in Figure 1, wire cutting guide wheel includes the cylinder body of a cylindrical shape, and the painting coated in side of cylinder block Layer, coating are generally layer of polyurethane, and multiple cutting grooves at equal intervals for being used to control cutting line direction are equipped on layer of polyurethane, Steel wire is laid on the cutting groove of multiple wire cutting guide wheels forms cutting gauze.Meanwhile silicon single crystal rod two sides are equipped with mortar nozzle, energy It is online that mortar cutting fluid is enough injected in cutting line.As shown in Fig. 2, when silicon single crystal rod is contacted with the cutting gauze of high-speed motion When, the abrasive grain in mortar is pressed on the cutting that silicon single crystal bar surface carries out abrading type by cutting steel wire, so that silicon single crystal rod be cut It is cut into silicon wafer.
But cutting steel wire and mortar can have certain abrasion to guided wheel slot in cutting process.As guide wheel uses the time Increase, the transversal wave movement of cutting steel wire cause groove profile deformation it is more violent, groove profile is widened more serious.Cutting groove is to steel wire Binding force greatly reduces, it is easy to and there is the cuttings such as wire jumper, broken string exception, not can guarantee the position precision of cutting steel wire, thus It affects to obtain the thickness of silicon wafer.
Guide wheel abrasion causes the problem of wire cutting machine cutting exception currently without preferable solution, at this stage single Slot pitch compensation is difficult to achieve the effect that inhibit to wear, and how to reduce guide wheel abrasion exception becomes urgent problem to be solved.
Summary of the invention
Based on this, it is necessary to for the problem that guide wheel abrasion causes cutting abnormal, it is abnormal to provide a kind of reduction guide wheel abrasion Method.
A method of it is abnormal to reduce guide wheel abrasion, which comprises
Obtain the real-time cutting parameter of wire cutting machine;
The cutting parameter is substituted into the guide wheel wear rate that preset guide wheel wear model obtains corresponding board;
Judge whether guide wheel is abnormal according to the guide wheel wear rate;
If being abnormal, the technological parameter for needing to adjust is calculated according to the guide wheel wear rate.
Method provided by the invention can measure the abrasion condition of multi-wire saw guide wheel, by adjusting guide wheel technological parameter It is abnormal to reduce guide wheel abrasion, extends the service life of guide wheel.
The real-time cutting parameter of the wire cutting machine includes: cutter, on steel wire in one of the embodiments, Tension, guide wheel groove width, guide wheel groove angle, guide wheel polyurethane material hardness.
In one of them embodiment, the preset guide wheel wear model is following formula: Wherein W is the wear rate of guide wheel, and K is running-in wear constant, and L is guide wheel groove width, and T is on steel wire Tension, θ is guide wheel groove angle, and N is cutter time, and H is guide wheel polyurethane material hardness, and 0.428sin θ -0.226 is steel wire With the real contact area of guided wheel slot.
The acquisition of the running-in wear constant K for including in the formula in one of the embodiments, the following steps are included:
Obtain the guide wheel wear coefficient and the real-time cutting parameter of wire cutting machine of preset group number;
Calculate separately out guide wheel wear rate corresponding to each group of guide wheel wear coefficient in preset group number;
The real-time cutting parameter of the wire cutting machine of preset group number and corresponding guide wheel wear rate progress multiple regression analysis is true Determine the value of running-in wear constant K.
The guide wheel wear coefficient includes groove width and the slot section face before guide wheel use in one of the embodiments, Groove width and slot cross section area after product, guide wheel use.
The preset group number is greater than or equal to 2 in one of the embodiments,.
In one of the embodiments, corresponding to each group of guide wheel wear coefficient calculated separately out in preset group number Guide wheel wear rate, comprising:
Using coating silica gel coat be not used guide wheel, obtain reverse mould sample 1, to after sample sections pass through Quadratic Finite Element projector Measure groove width L1And the area S of slot section1
Under guide wheel after machine, it is cleaned and dried, is equally coated to obtain reverse mould sample 2 with coating silica gel, to passing through after sample sections Quadratic Finite Element projector measures groove width L2And the area S of slot section2
Pass through guide wheel wear rateIt is calculated.
The technological parameter that the needs adjust in one of the embodiments, includes tension T, guide wheel groove angle θ on steel wire And guide wheel polyurethane material hardness H, wherein adjusting tensionAdjust groove angleAdjust material hardness Wherein, N is cutter, and W2 is the wear rate of guide wheel to be adjusted, and W1 is average guide wheel wear rate.
The average guide wheel wear rate W1 is that the guide wheel wear rate of at least ten sets guide wheels takes in one of the embodiments, The result of arithmetic mean of instantaneous value.
The technological parameter that the needs adjust in one of the embodiments, includes tension T, guide wheel groove angle θ on steel wire And guide wheel polyurethane material hardness H, adjustment can only change one of them parameter every time.
Detailed description of the invention
Fig. 1 is Guiding wheel structure schematic diagram;
Fig. 2 is wire cutting process schematic;
Fig. 3 is the flow diagram for reducing guide wheel and wearing abnormal method;
Fig. 4 is the acquisition methods flow diagram of constant K in guide wheel wear rate model.
102 cylinder bodies
104 polyurethane coatings
201 mortar nozzles
203 guide wheels
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated, it should be understood that specific embodiment described herein is only used to explain invention, not For limiting the present invention.
Fig. 3 is the flow chart of the abnormal method of reduction guide wheel abrasion provided by the embodiments of the present application, specifically includes following step It is rapid:
S100: the real-time cutting parameter of wire cutting machine is obtained.
Wherein, real-time cutting parameter refers to tension of the cutting machine on the steel wire in cutting process, guide wheel groove width, guide wheel Groove angle, guide wheel polyurethane material hardness and cutter time.The acquisition of real-time cutting parameter passes through the on-site supervision to wire cutting machine It realizes.
S200: cutting parameter is substituted into the guide wheel wear rate that preset guide wheel wear model obtains corresponding board.
Wherein, the formula of guide wheel wear rate model are as follows:
In formula, W is guide wheel wear rate, and K is running-in wear constant, and L is groove width, and T is the tension on steel wire, and θ is Guide wheel groove angle, N are cutter, and H is guide wheel polyurethane material hardness, and 0.428sin θ -0.226 is steel wire and guided wheel slot Real contact area (is extrapolated) according to the angle of the shape of steel wire and V-groove, and K is running-in wear constant (by the poly- ammonia of guide wheel Ester material physicochemical property, cutting modulus etc. codetermine).
Specifically, as shown in figure 4, the acquisition for the running-in wear constant K for including in formula specifically includes the following steps:
S201: the guide wheel wear coefficient and the real-time cutting parameter of wire cutting machine of preset group number are obtained.
Wherein, the number of preset number group needs to be greater than or equal to 2 to meet the minimum need for calculating running-in wear constant K It wants.Guide wheel wear coefficient includes the groove width and slot cross section area after groove width and slot cross section area, guide wheel use before guide wheel use.
S202: guide wheel wear rate corresponding to each group of guide wheel wear coefficient in preset group number is calculated separately out.
When being calculated, needs to coat unused guide wheel using coating silica gel, pass through Quadratic Finite Element after being sliced to reverse mould sample 1 Projector measures groove width L1And the area S of slot section1;Under guide wheel after machine, it is cleaned and dried, is equally coated down with coating silica gel Apperance product 2 measure groove width L by Quadratic Finite Element projector to after sample sections2And the area S of slot section2;Finally by guided wheel slot Wear rateIt is calculated.
S203: the real-time cutting parameter of the wire cutting machine of preset group number is subjected to multiple regression point with corresponding guide wheel wear rate Analyse the value for determining running-in wear constant K.
After the step of S201 to S203, obtains the value of running-in wear constant K, the wire cutting machine that will be obtained in S100 Real-time cutting parameter substitutes into guide wheel wear rate model, can find out the guide wheel wear rate of guide wheel to be measured.
S300: judge whether guide wheel is abnormal according to guide wheel wear rate;
By the guide wheel wear rate found out in S200 compared with expected average guide wheel wear rate, if the guide wheel of guide wheel to be measured is worn Rate is higher than expected average guide wheel wear rate, then it is assumed that guide wheel to be measured is abnormal;If the guide wheel wear rate of guide wheel to be measured be lower than or Equal to expected average guide wheel wear rate, then it is assumed that guide wheel to be measured is normal.Wherein, it is contemplated that average guide wheel wear rate is that an experience is normal Number.
S400: if being abnormal, the technological parameter for needing to adjust is calculated according to guide wheel wear rate.
The technological parameter for needing to adjust, including the tension T on steel wire, guide wheel groove angle θ and guide wheel polyurethane material hardness H:
Adjust tension
It adjusts the angle
Adjust material hardness
Wherein, N is cutter, and W2 is the wear rate of guide wheel to be adjusted, and W1 is average guide wheel wear rate.
Wherein, average guide wheel wear rate W1 is that the guide wheel wear rate of at least ten sets guide wheels takes the result of arithmetic mean of instantaneous value.
When the technological parameter of adjustment, the tension T on steel wire, guide wheel groove angle θ and guide wheel polyurethane material can only be changed every time A parameter in hardness H, other two remain unchanged.
Above to reduce in the abnormal method of guide wheel abrasion, the real-time cutting parameter for the cutting machine that will acquire substitutes into preset lead Foot wheel abrasion model obtains the guide wheel wear rate of corresponding board, judges whether guide wheel is abnormal, if being abnormal, according to guide wheel The technological parameter that wear rate adjusts needed for calculating.This method can reduce guide wheel abrasion by adjusting the technological parameter of guide wheel and cause Cut abnormal situation.
Specifically, for the present embodiment foundation such as lower tumbler wear rate model: When obtaining constant K, the present embodiment is further described by the following contents.
Since embodiment is generally used for cutting silicon wafer, the silicon chip cutter that the present embodiment uses selects Applied The HCT-B5 of Materials company is as experiment lathe.
Guide wheel takes V-groove.
Cutting technique is as follows: line sending speed is 12m/s, and cutting speed is 445 μm/min, and steel wire tension T is 25N, guide wheel Spacing δGFFor 0.68m, it is 0.01m that line, which bends height B,.
The present embodiment extracts the guide wheel wear rate model that 10 groups of cutting experiment data regressions are established, specific data such as following table institute Show:
By data in the above table it is found that each group of cutting parameter includes 5 data in the present embodiment, respectively groove width L is (single Position micron), the tension T (units Newtons) on steel wire, guide wheel groove angle θ (unit degree), guide wheel polyurethane material hardness H (unit Degree), cutter time N (unit time).
Usually experiment lathe, which can according to need, is selected, such as the lathe really used in actual production process.It leads The selection of wheel must coincide with corresponding experiment lathe, meet the operation requirement of experiment lathe.Cutting technique can be according to experiment Lathe determines.The cutting data of preset number group is selected as 10 groups, wherein specific number selects according to actual needs, usually number More according to group number, the calculated subsequent guide wheel wear rate of institute is more accurate.It should be pointed out that the present embodiment is finally counted using 10 groups Error between the guide wheel wear rate of calculating and the guide wheel wear rate for using more multi-group data to calculate is within an acceptable range, this The technological parameter that error will not adjust needs impacts.It is pointed out that the realization of S201 to S203 in the present embodiment It is to be realized under the premise of testing lathe and corresponding cutting technique based on determination.
After determining the above experiment lathe, cutting technique and preset 10 groups of cutting experiment data, coated using coating silica gel Guide wheel is not used, groove width L is measured by Quadratic Finite Element projector after being sliced to reverse mould sample 11And the area S of slot section1;Under guide wheel After machine, it is cleaned and dried, is equally coated to obtain reverse mould sample 2 with coating silica gel, be surveyed to after sample sections by Quadratic Finite Element projector The wide L of measuring tank2And the area S of slot section2;Finally by guide wheel wear rateIt is counted It calculates.In the present embodiment, according to above 10 groups of data and experiment lathe, the calculated guide wheel wear rate of cutting technique such as following table institute Show:
Wherein, 1 to 10 is the corresponding group of above 10 groups of data, below corresponding number for according to the data meter of corresponding group The guide wheel wear rate of calculation.According in upper table 10 groups of data and and upper table in 10 groups of guide wheel wear rates carry out multiple regression analysis It can be obtained the value of running-in wear constant K.
In the present embodiment, the K=3.13 finally obtained substitutes into the above preset available formula of guide wheel wear rate model Are as follows:
According to above formula, during cutting on line, after the real-time cutting parameter for obtaining cutting machine, what can be will acquire is cut It cuts parameter and substitutes into above-mentioned formula, calculate corresponding guide wheel wear rate.
Finally, needing the technological parameter adjusted includes the tension T on steel wire, guide wheel groove angle θ and guide wheel polyurethane material are hard At least one in H is spent, as follows with formulae express:
Adjust tension
Adjust groove angle
Adjust material hardness
Wherein, N is cutter, and W2 is the wear rate of guide wheel to be adjusted, and W1 is average guide wheel wear rate.
Verified, the ten sets of guide wheel average wear rate W1 counted at present are 0.168%, and cutting line sending speed is 12m/s, are cut Cutting speed is 445us/min.
According to lower tumbler wear rate model:
The wear rate W2 that guide wheel to be adjusted can be calculated is 0.176%.
According to the following formula:
Adjust tension
Adjust groove angle
Adjust material hardness
It is 24.8N that adjustment tension, which can be calculated, and adjustment groove angle is 85.7 °, and adjustment material hardness is 97.3A.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention Protect range.The scope of protection of the patent of the present invention is determined by the appended claims.

Claims (9)

1. a kind of reduce the abnormal method of guide wheel abrasion, which is characterized in that the described method includes:
Obtain the real-time cutting parameter of wire cutting machine;
The cutting parameter is substituted into the guide wheel wear rate that preset guide wheel wear model obtains corresponding board;
Judge whether guide wheel is abnormal according to the guide wheel wear rate;
If being abnormal, the technological parameter for needing to adjust is calculated according to the guide wheel wear rate;
The preset guide wheel wear model is following formula:Wherein W is to lead The wear rate of wheel, K are running-in wear constant, and L is guide wheel groove width, and T is the tension on steel wire, and θ is guide wheel groove angle, and N is cutter Secondary, H is guide wheel polyurethane material hardness, and 0.428sin θ -0.226 is the real contact area of steel wire and guided wheel slot.
2. according to claim 1 reduce the abnormal method of guide wheel abrasion, which is characterized in that the reality of the wire cutting machine When cutting parameter include: cutter time, the tension on steel wire, guide wheel groove width, guide wheel groove angle, guide wheel polyurethane material hardness.
3. according to claim 1 reduce the abnormal method of guide wheel abrasion, which is characterized in that the mill for including in the formula The acquisition of occlusal wear constant K the following steps are included:
Obtain the guide wheel wear coefficient and the real-time cutting parameter of wire cutting machine of preset group number;
Calculate separately out guide wheel wear rate corresponding to each group of guide wheel wear coefficient in the preset group number;
The real-time cutting parameter of wire cutting machine of the preset group number and corresponding guide wheel wear rate progress multiple regression analysis is true Determine the value of running-in wear constant K.
4. according to the method described in claim 3, it is characterized in that, the guide wheel wear coefficient includes the slot before guide wheel use Groove width and slot cross section area after wide and slot cross section area, guide wheel use.
5. according to the method described in claim 3, it is characterized in that, the preset group number is greater than or equal to 2.
6. according to claim 3 reduce the abnormal method of guide wheel abrasion, which is characterized in that described calculate separately out is preset Guide wheel wear rate corresponding to each group of guide wheel wear coefficient in group number, comprising:
It is coated using coating silica gel and guide wheel is not used, obtained reverse mould sample 1, measured by Quadratic Finite Element projector after sample sections Groove width L1And the area S of slot section1
Under guide wheel after machine, it is cleaned and dried, is equally coated to obtain reverse mould sample 2 with coating silica gel, it is secondary to passing through after sample sections First projector measures groove width L2And the area S of slot section2
Pass through guide wheel wear rateIt is calculated.
7. according to claim 1 reduce the abnormal method of guide wheel abrasion, which is characterized in that the work that the needs adjust Skill parameter includes the tension T on steel wire, guide wheel groove angle θ and guide wheel polyurethane material hardness H, wherein adjusting tensionAdjust groove angle Adjust material hardnessWherein, N is cutter, and W2 is guide wheel to be adjusted Wear rate, W1 are average guide wheel wear rate.
8. according to claim 7 reduce the abnormal method of guide wheel abrasion, the average guide wheel wear rate W1 is at least The guide wheel wear rate of ten sets of guide wheels takes the result of arithmetic mean of instantaneous value.
9. according to claim 1 reduce the abnormal method of guide wheel abrasion, the technological parameter that the needs adjust includes Tension T on steel wire, guide wheel groove angle θ and guide wheel polyurethane material hardness H, adjustment can only change one of them parameter every time.
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CN115870571A (en) * 2022-12-05 2023-03-31 北京天科合达半导体股份有限公司 Cutting device control method, system, equipment and medium
CN117140315B (en) * 2023-10-30 2024-01-30 四川盛杰机电设备有限责任公司 Slotless reel control system and cutting equipment thereof

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US20030073382A1 (en) * 2001-10-11 2003-04-17 Ran Manor System and method for non-contact wear measurement of dicing saw blades
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